JP2000074613A - Rotation angle sensor - Google Patents

Abstract

(57) [Problem] To provide a rotation angle sensor capable of obtaining stable sensor characteristics by minimizing the influence of an external magnetic field. A throttle sensor includes a first housing, a second housing, and a first housing.
The rotor 30 is rotatably supported at zero. The magnet structure 320 that forms a part of the rotor 30 includes the permanent magnet 3
22 and a pair of yokes 32 fixed to the permanent magnet 322
4,326. In the second housing 40, a substrate portion 410 inserted between the magnetic pole surfaces 334 and 336 of the yokes 324 and 326 is integrally formed. The concave portion 41 is provided in a portion of the substrate portion 410 sandwiched between the magnetic pole surfaces 334 and 336.
2 are formed, and a Hall element 430 is provided in the recess 412.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a rotation angle sensor for detecting a rotation angle of a rotating body, and more particularly, to a rotation angle sensor suitable as, for example, a throttle sensor for detecting an opening of a throttle valve of an internal combustion engine. .

[0002]

2. Description of the Related Art Japanese Patent Application Laid-Open Nos. Hei 7-260412, Hei 7-260413 and Hei 7-280 disclose rotational angle sensors used for throttle sensors and the like.
A “rotational position sensor” described in, for example, Japanese Patent Application Publication No. 509 is known.

FIG. 11 is a perspective view showing a main part of a rotation position sensor 900 of this type, and FIG.
It is sectional drawing which followed the 2 line. As shown in each of these figures,
The rotation position sensor 900 includes a magnet structure 901 and a Hall effect device 905. The magnet structure 901 is fixed to a magnetically permeable pole piece 902 having a substantially C-shaped cross section that rotates integrally with a rotating shaft (not shown) (the axis of which is indicated by “C”), and a portion facing the magnetically permeable pole piece 902. And a pair of magnets 903 and 904. Opposing magnetic pole faces 903a, 904 of these magnets 903, 904
“a” has a shape that extends in a spiral shape while being inclined with respect to the axial direction of the rotation shaft.

The Hall effect device 905 has a rotational position sensor 9
It is mounted on the upper surface of a substrate 906 fixed to a housing 00 (not shown). As shown in FIG. 12, the upper surface of the Hall effect device 905 and the lower surface of the substrate 906 are arranged at predetermined intervals from the magnetic pole surfaces 903a and 904a, respectively.

In the rotation position sensor 900, when the magnet structure 901 rotates with the rotation axis, the Hall effect device 9
Since the size of the gap H between the magnetic pole surfaces 903a and 904a at the position 05 changes and the density of the magnetic flux passing through the Hall effect device 905 changes, the rotation angle of the rotating shaft is detected from the magnitude of the magnetic flux density. can do.

[0006] The rotational position sensor 900 is similar to that shown in FIG.
As indicated by a two-dot chain line in FIG. 2, most of the magnetic flux generated from each of the magnets 903 and 904 passes through the inside of the magnetically permeable pole piece 902, which is a so-called closed magnetic circuit type sensor. Compared to the open magnetic path type sensor that passes through the inside,
It is hardly affected by external magnetic fields such as geomagnetism.

[0007]

Incidentally, in such a closed magnetic circuit type rotational position sensor 900, each of the magnets opposed to each other with the magnetic flux passing through the space, that is, with the substrate 906 and the Hall effect device 905 interposed therebetween. It is desirable to make the gap H between 903 and 904 as narrow as possible in order to suppress the influence of the external magnetic field.

However, when the magnet structure 901 rotates, the magnets 903 and 904 do not interfere with the substrate 906 and the Hall effect device 905 so that they do not interfere with each other.
It is necessary to set the gap H between the holes 904 wider than at least the sum of the thickness of the substrate 906 and the thickness of the Hall effect device 905. For this reason, in the conventional rotation position sensor 900, it is difficult to sufficiently reduce the effect of the external magnetic field in the gap H between the magnets 903 and 904.
Instability of the sensor characteristics due to the influence of such an external magnetic field has been unavoidable.

The present invention has been made in view of the above circumstances, and an object of the present invention is to provide a rotation angle sensor capable of obtaining a stable sensor characteristic by minimizing the influence of an external magnetic field.

[0010]

According to one aspect of the present invention, there is provided a magnet structure including a substrate and a pair of opposed portions opposed to each other with a magnetic sensing element mounted on the substrate interposed therebetween. The body forms a closed magnetic path for magnetic flux passing through the magnetic sensing element, and the density of the magnetic flux passing through the magnetic sensing element by changing the distance between the facing parts at the position of the magnetic sensing element by rotating the facing part with the rotating body. In the rotation angle sensor configured to detect the rotation angle of the rotator based on the magnitude of the magnetic flux density, the substrate is partially thinned, and the magnetic detection element is provided in the thinned portion. Like that.

[0011] According to such a configuration, the distance between the opposing portions opposing each other with the substrate and the magnetic detection element interposed therebetween can be made as small as possible. Further, as a more specific configuration for disposing the magnetic sensing element in the thinned portion of the substrate as described above, as in the invention described in claim 2, In this case, a configuration may be adopted in which the magnetic sensing element is disposed in the concave portion.

According to this structure, the portion of the substrate to be thinned can be minimized. Furthermore, if a configuration is adopted in which the magnetic detection element is brought into contact with the inner peripheral wall surface of the concave portion, the movement of the magnetic detection element with respect to the substrate is suppressed. Thus, the positioning accuracy of the magnetic detection element with respect to the substrate can be improved.

[0013] As described above, the magnetic sensing element is brought into contact with the inner peripheral wall surface of the concave portion. Can be adopted.

According to this structure, the movement of the magnetic detection element with respect to the substrate can be more reliably suppressed, so that the positioning accuracy of the magnetic detection element with respect to the substrate can be further improved.

Also, as in the invention according to claim 5,
In addition to the configuration of the invention described in any one of claims 2 to 4, if the concave portion further has a configuration in which the concave portion has a fitting portion into which the magnetic detecting element is fitted, the magnetic detecting element in the concave portion is provided. Is restricted, so that the accuracy of positioning the magnetic detection element with respect to the substrate can be improved.

Further, according to the invention described in claim 6,
In addition to the configuration of the invention according to any one of claims 2 to 5, the magnetic detection element may be provided in a recess so as not to protrude from the surface of the substrate. It is possible to prevent the magnetic sensing element from coming into contact with the opposing portion when disposing between the opposing portions.

[0017]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment in which the present invention is embodied as a throttle sensor for detecting the opening (throttle opening) of a throttle valve provided in an intake pipe of an engine will be described below.

FIG. 1 is a sectional view of a throttle sensor 10 according to the present embodiment. The throttle sensor 10 includes a first housing 20 fixed to an intake pipe (not shown),
A second housing 40 assembled to the first housing 20; and a rotor 30 rotatably provided in the internal space formed by the housings 20 and 40 (the rotation axis C is shown in FIG. 1). It has.

The first housing 20 is formed in a shape having an internal space by a resin material such as PBT (polybutylene terephthalate) resin, and the internal space is divided into a first space 204 and a second space 206 by a partition wall portion 202. Is divided into A substantially cylindrical bearing 208 made of a metal material such as copper is fixed to the partition 202.

The rotor 30 has a shaft 302 rotatably supported by bearings 208 such that each end is located in a first space 204 and a second space 206, respectively.
, A magnet structure 320 as a magnetic path component disposed in the first space 204, and a lever 308 disposed in the second space 206.

A disk portion 302 is provided at one end of the shaft 302.
a is formed, and the magnet structure 320 is
02a so as to be integrally rotatable. Shaft 30
A plate 306 that regulates the movement of the shaft 302 in the axial direction is fitted to the other end of the lever 2, and the lever 308 is fixed to the shaft 302 via the plate 306 so as to be integrally rotatable. The shaft 302 and the plate 306 are formed of a non-magnetic material such as austenitic stainless steel.

A spring 12 is provided between the lever 308 and the partition wall 202, and the lever 308 is constantly urged in the circumferential direction of the rotation axis C by the urging force of the spring 12. The lever 308 is engaged with another lever provided so as to be integrally rotatable on a valve shaft (not shown) of the throttle valve. By this engagement,
When the valve shaft rotates in the direction in which the throttle valve opens, the rotor 30 rotates around the rotation axis C against the urging force of the spring 12.

The magnet structure 320 is connected to the rotation axis C of the rotor 30.
And a quadrangular prism-shaped permanent magnet 322 arranged substantially coaxially with
A pair of yokes 324 and 326 fixed to the permanent magnet 322 so as to be integrally rotatable;
26 is fixed to a permanent magnet 322. The permanent magnet 322 is made of a rare earth material, and the yokes 324 and 326 are made of a material having high magnetic permeability such as iron and steel. The connecting portion 304 is formed of a resin material such as PPS (polyphenylene sulfide) resin.

FIG. 2 is a front view of the magnet structure 320.
FIG. 3 is a perspective view of the magnet structure 320 (the connection portion 304 is not shown in each of these drawings). The yokes 324 and 326 are formed substantially in the shape of a fan, and the rotation axes C
Are arranged so as to face each other at a predetermined interval in the axial direction. In the yokes 324 and 326, rectangular cutouts 324a and 326a are formed in portions where the rotation axis C passes. These notches 324a, 32
Each end of the permanent magnet 322 is fitted to 6a, and both end surfaces 322a, 32a of the permanent magnet 322 in the axial direction are fitted.
2b is exposed from the yokes 324 and 326. The yokes 324, 32
6 and the permanent magnet 322 are integrally fixed by a connecting portion 304.

Arc-shaped magnetic pole surfaces 334 and 336 are formed on the peripheral edges of the yokes 324 and 326, respectively, and extend in the circumferential direction of the rotation axis C and face each other at a predetermined interval in the axial direction of the rotation axis C. . As shown in FIG. 2, one of the magnetic pole surfaces 334 and 336 has a shape that extends in a spiral shape while being inclined with respect to the axial direction of the rotation axis C. Therefore, the size of the gap H between the magnetic pole surfaces 334 and 336 changes continuously in the circumferential direction of the rotation axis C.

The magnetic flux generated by the permanent magnet 322 passes through the inside of each of the yokes 324 and 326, so that the closed magnetic path of the magnetic flux as shown by a two-dot chain line in FIGS. Is formed. Each pole face 3
The magnitude of the magnetic flux density between the magnetic pole surfaces 34 and 336 changes in accordance with the size of the gap H between the magnetic pole surfaces 334 and 336, and the smaller the gap H is, the smaller the gap H is. .

As shown in FIG. 1, the second housing 40
Is extended so as to be positioned between the magnetic pole surfaces 334 and 336, and a cover portion 402 for covering the inside of the first housing 20 so as to hermetically seal the first housing 20, and a connector portion 404 provided with a plurality of terminals 406. And a substrate section 410 on which the Hall element 430 and the like are mounted. These cover portions 40
2, the connector section 404 and the board section 410 are integrally formed of a resin material such as PBT resin, similarly to the first housing 20.

As shown in FIG. 1, an annular joint 408 having a joint surface 408a inclined with respect to the rotation axis C is formed at the peripheral portion of the cover 402. An annular joint 210 is formed in the first housing 20 so as to correspond to the joint 408. A circumferential groove 210a extending in the circumferential direction is formed in the joint 210, and a seal ring 212 made of a rubber material is provided in the circumferential groove 210a. The surface of the seal ring 212 exposed from the circumferential groove 210a is a joint surface 212a on the first housing 20 side to which the joint surface 408a inclined with respect to the rotation axis C is joined.

The first connecting surface 408a and the first connecting portion 412a are located at the peripheral portion of the cover 402 in a state where they are joined.
The peripheral wall 214 of the housing 20 is heat caulked toward the rotation axis C, so that the second housing 40
Is mounted on the housing 20. By assembling the two housings 20 and 40 in this manner, the first space 204 is a closed space closed by the inner wall surface of the cover 402.

FIG. 4 is a perspective view showing a tip portion of the substrate section 410, and FIG. 5 is a rear view showing the tip portion. FIG. 6 is a sectional view taken along line 6-6 in FIG. A concave portion 412 corresponding to the shape of the Hall element 430 is formed at a position facing one of the magnetic pole surfaces 336 in a portion of the substrate portion 410 sandwiched between the magnetic pole surfaces 334 and 336.
The Hall element 430 is mounted so as to be located between the magnetic pole surfaces 334 and 336 in the concave portion 412. The Hall element 430 is a magnetic detection element that outputs a signal (Hall voltage) according to the strength (magnetic flux density) of the magnetic flux applied to the element 430.

The concave portion 412 is formed so that both wall surfaces extending in the direction in which the substrate portion 410 extends (the left-right direction in FIGS. 4 and 5)
2a are vertical surfaces 412b and 412c, while both wall surfaces in the extending direction are bottom surfaces 412b and 412c.
The inclined surfaces 412d and 412e are inclined with respect to a. The Hall element 430 has both side surfaces in contact with the vertical surfaces 412b and 412c, respectively, and is sandwiched between the vertical surfaces 412b and 412c from both sides.

As shown in FIG.
2a, a fitting portion 440 having a rectangular cross section corresponding to the bottom of the Hall element 430 is recessed.
0 is fitted to the fitting portion 440. Also,
As shown in FIG. 6, the concave portion 412 and the fitting portion 440 are provided so that the Hall element 430 does not protrude from the surface of the substrate portion 410.
(The length in the vertical direction in FIG. 6) is set.

One surface of the substrate portion 410 on which the concave portion 412 is formed (the lower surface in FIG. 1, the lower surface in FIG.
A plurality of wiring patterns 420 are formed of a conductive material such as copper on the bottom surface 412a of the concave portion 412 and the surfaces of the inclined surfaces 412d and 412e. Terminal 4
30a is connected.

As shown in FIGS. 1 and 6, another concave portion 460 is formed on the pattern forming surface 410a at the base end portion of the substrate portion 410 in the second housing 40. ICs constituting a drive circuit for supplying a drive current to the Hall element 430 and a temperature characteristic compensation circuit for compensating for the temperature characteristic of the Hall element 430 are provided in the recess 460.
450 are implemented. Each terminal 45 of this IC 450
0a is the Hall element 43 by the wiring pattern 420.
0 and another wiring pattern 422 formed on the pattern forming surface 410a.
06.

Each of the recesses 412 and 460 is filled and hardened with a resin potting material (not shown), and the Hall element 430 and the IC 450 are covered with the resin potting material. The resin potting material prevents moisture from adhering to the Hall element 430, the IC 450, and the vicinity thereof, and also securely fixes the elements 430, 450 in the recesses 412, 460.

The throttle sensor 1 constructed as described above
At 0, when the rotor 30 rotates around the rotation axis C in accordance with the opening / closing operation of the throttle valve, the size of the gap H between the magnetic pole surfaces 334 and 336 sandwiching the Hall element 430 changes according to the rotation angle. The density of the magnetic flux passing through the Hall element 430 changes. As a result, the Hall element 430
Generates a Hall voltage corresponding to the magnitude of this magnetic flux density, in other words, the throttle opening. The Hall voltage is input to the IC 450 and subjected to various processes such as temperature characteristic compensation, and then output as an opening signal (voltage signal) having a correlation with the throttle opening to the control device of the engine via the terminal 406. You.

Next, each wiring pattern 42 is
0, 422, and the respective concave portions 412, 4
A procedure for disposing the Hall element 430 and the IC 450 in the device 60 will be described.

FIGS. 7A to 7D and FIGS.
(C) is a schematic process drawing for explaining each of the above procedures. [1] First, a resin is injected into a mold of an injection molding machine in which a terminal 406 is arranged at a predetermined position, thereby forming a second resin.
Is formed. As shown in FIG. 7A, the fitting portion 440 is attached to the substrate portion 410 by this injection molding.
Is formed.

[2] Next, after the surface of the pattern forming surface 410a is adjusted, a catalyst (for example, Pd-Sn colloid particles) for forming copper plating is applied to the forming surface 410a. Then, as shown in FIG. 7B, a copper thin film F is formed on the entire surface of the pattern forming surface 410a and the inner wall surface of the concave portion 412 by performing a copper plating process.

[3] Next, as shown in FIG.
A photosensitive resist R is applied on the copper thin film F. Then, as shown in FIG. 3D, the photosensitive resist R applied to portions other than the portions where the wiring patterns 420 and 422 are formed is removed by performing exposure processing and development processing. Incidentally, the surfaces 412 d and 4 of the inner peripheral wall surface of the concave portion 412 where a part of each wiring pattern 420 is formed.
The reason why 12e is inclined is to expose the photosensitive resist R by one exposure process.

[4] Further, by performing an etching process, as shown in FIG.
The copper thin film F formed in a portion other than the portion where 0,422 is formed is removed. Then, as shown in FIG. 3B, the photosensitive resist R is removed to expose the wiring patterns 420 and 422.

[5] Next, the Hall element 430 and the IC 450 are provided in the concave portions 412 and 460, respectively.
Here, when disposing the hall element 430 in the recess 412, the bottom of the hall element 430 is fitted to the fitting portion 440, and both sides thereof are formed by the vertical surfaces 412 b and 412 c of the recess 412. Let it be pinched. As a result, the movement of the Hall element 430 in the recess 412 is restricted, and the positioning of the Hall element 430 with respect to the substrate 410 is performed.

As described above, the Hall element 430 and the IC 45
0 is disposed in each of the recesses 412 and 460, and then each of the wiring patterns 420 and 422, the Hall element 430, and the IC 450
Are soldered and connected to the respective terminals 430a and 450a. Thereafter, a resin potting material is filled into each of the recesses 412 and 460 and cured.

Through the above steps [1] to [5], the wiring patterns 420 and 422 are formed on the substrate 410, and the Hall element 430 and the IC 450 are provided in the recesses 412 and 460, respectively.

(1) In the throttle sensor 10 according to the present embodiment described above, by forming the concave portion 412 in the substrate portion 410, the substrate portion 410 is partially thinned, and the Hall element is provided in the thinned portion. 430 is provided. Accordingly, the magnetic pole surfaces 334 and 336 opposed to each other with the substrate unit 410 and the Hall element 430 interposed therebetween.
The gap H between the magnet structures 32 can be made as small as possible.
Thus, the closed magnetic circuit property at 0 can be improved. As a result, it is possible to obtain a stable sensor characteristic while suppressing the influence of the external magnetic field to a small value, and to accurately detect the throttle opening.

(2) Further, since the gap H between the magnetic pole surfaces 334 and 336 can be set to be narrow, the amount of magnetic flux leaking from the gap H can be reduced. Therefore, the amount of change when the magnetic flux passing through the Hall element 430 changes with the rotation of the rotor 30 can be increased. As a result, the dynamic range of the throttle sensor 10 can be expanded, and more accurate detection can be performed.

(3) Also, as described above, the pole faces 334,
When a configuration is adopted in which a part of the substrate portion 410 on which the Hall element 430 is provided is made thinner in order to make the gap H between the 336 as small as possible, the rigidity is excessively reduced due to the thinning. When there is, the substrate part 410 has both pole faces 334,
Since it has a cantilever shape extending between 336, there is a concern that the tip portion of the substrate portion 410 may vibrate, causing a change in the detection signal.

In this respect, in this embodiment, the substrate portion 41
By forming a concave portion 412 corresponding to the shape of the Hall element 430 on the substrate portion 410, the substrate portion 410 is partially thinned, so that the thinned portion can be minimized. As a result, the substrate portion 41 accompanying the thinning
0 can be suppressed as much as possible, and the fluctuation of the detection signal as described above can be suppressed.

(4) In addition, the Hall element 430 is
2, the Hall element 430 is inserted into the recess 412.
The vertical planes 412b and 412c of the Hall element 430 are sandwiched between the vertical planes 412b and 412c. Further, the bottom of the Hall element 430 is fitted to the fitting part 440 in the recess 412.

Accordingly, the movement of the Hall element 430 in the concave portion 412 can be reliably restricted, and the substrate portion 41
The positioning accuracy of the Hall element 430 with respect to 0 can be improved. As a result, the Hall element 43
The position shift when the 0 is disposed at a predetermined position between the magnetic pole surfaces 334 and 336 can be reduced, and the deterioration of the detection accuracy due to the position shift can be reliably suppressed.

(5) Further, in the present embodiment, the concave portion 412
And adjusting the depth of the fitting portion 440 as appropriate,
0 does not protrude from the surface of the substrate portion 410 (pattern forming surface 410a). Therefore, when assembling the second housing 40 to the first housing 20 while inserting the substrate portion 410 between the two magnetic pole surfaces 334 and 336, the Hall element 430 is mistakenly used for the magnetic pole surfaces 334 and 332.
36 does not come into contact. As a result, damage to the Hall element 430 during manufacturing can be prevented beforehand, and a more reliable throttle sensor 10 can be obtained.

(6) The substrate 410 on which the Hall element 430 is mounted is mounted on the second housing 40 (the cover 40).
2 and the connector portion 404). Therefore, for example, unlike the configuration in which the Hall element is mounted on a board that is separately assembled to the housing,
It is possible to prevent displacement between the two members that occurs when the substrate is assembled to the housing. As a result, it is possible to suppress the deterioration of the detection accuracy due to the displacement at the time of assembling, and it is possible to perform the detection with higher accuracy.

The embodiment embodying the present invention has been described above. However, this embodiment can be implemented by changing the configuration as follows. In the above embodiment, the concave portion 412 is formed in the substrate portion 410 and the Hall element 430 is disposed in the concave portion 412. However, for example, as shown in FIG. The thin portion 418 may be formed at the front end portion located therebetween, and the Hall element 430 may be provided on the thin portion 418.

In the above embodiment, the both sides of the Hall element 430 are brought into contact with the vertical surfaces 412b and 412c of the concave portion 412, and are sandwiched by the both sides 412b and 412c. However, as shown in FIG. 430 is not brought into contact with the inner peripheral wall surface of the concave portion 412,
It is also possible to adopt a configuration in which the Hall element 430 is positioned only by fitting the Hall element 430 into the hole 40.

The structure of the magnet structure 320 is the same as that shown in the above embodiment, and for example, the permanent magnet 322 in the above embodiment is changed to an iron core,
It is also possible to adopt a configuration in which permanent magnets are attached to the respective 4,336 so as to face each other.

In the above embodiment, the Hall element 430 is provided in the recess 412 so as not to protrude from the pattern forming surface 410a of the substrate portion 410. However, the Hall element 430 may be partially patterned depending on the shape of the Hall element. Forming surface 41
It may be configured to protrude from 0a.

In the above embodiment, the Hall element 430 is fitted to the fitting portion 440.
0 may be omitted and the positioning operation may be performed only by contacting the vertical surfaces 412b and 412c of the concave portion 412.

In the above embodiment, the Hall element 430 is used as the magnetic detecting element. However, for example, a magnetoresistive element can be used. In the above embodiment, the present invention is applied to the throttle sensor that detects the throttle opening from the rotation angle of the valve shaft of the throttle valve, but, for example, an accelerator sensor that detects the amount of depression of the accelerator pedal, or a steering shaft The present invention can also be applied to a sensor that detects the amount of rotation.

[0059]

According to the first to sixth aspects of the present invention, the substrate is partially thinned, and the magnetic detecting element is disposed in the thinned portion. The space between the opposing portions opposing each other with the element interposed therebetween can be made as small as possible. As a result, a stable sensor characteristic can be obtained by reducing the influence of the external magnetic field. Further, since the amount of magnetic flux leakage between the opposed portions can be reduced, the amount of change when the magnetic flux passing through the magnetic detecting element changes with the rotation of the rotating body can be increased, and the dynamic range can be expanded. Become like

In particular, in the inventions set forth in claims 2 to 6, since the thin portion is formed by the concave portion formed in the substrate and the magnetic detecting element is disposed in the concave portion, the thickness of the substrate is reduced. It is possible to minimize the portion to be reduced. Therefore, it is possible to minimize the decrease in the rigidity of the substrate, and to suppress the deterioration of the detection accuracy due to the vibration of the substrate on which the magnetic detection elements are mounted.

According to the third or fourth aspect of the present invention, since the magnetic detecting element is brought into contact with the inner peripheral wall of the recess, the movement of the magnetic detecting element with respect to the substrate is suppressed, and the magnetic detection with respect to the substrate is performed. The degree of element position determination can be improved. As a result, it is possible to reduce the displacement when the magnetic detection element is arranged between the facing portions, and it is possible to suppress the deterioration of the detection accuracy due to the displacement.

In particular, in the invention described in claim 4, since the magnetic detecting element is sandwiched from both sides by the inner peripheral wall surface of the concave portion, the positional deviation when the magnetic detecting element is arranged between the opposing portions is further reduced. The detection accuracy can be more reliably suppressed from being deteriorated due to the positional deviation.

In the invention described in claim 5, the recess has a fitting portion into which the magnetic detection element is fitted, and the magnetic detection element is fitted into the fitting portion with the fitting portion of the recess. Therefore, the movement of the magnetic detection element in the recess can be restricted to improve the positioning accuracy of the magnetic detection element with respect to the substrate. As a result, it is possible to reduce the displacement when the magnetic detecting element is arranged between the facing portions, and it is possible to reliably suppress the deterioration of the detection accuracy due to the displacement.

Further, in the invention described in claim 6, since the magnetic detecting element is provided in the recess so as not to protrude from the surface of the substrate, when the substrate is provided between the opposing portions, the magnetic detecting element is not provided. It is possible to prevent the detection element from coming into contact with the opposing portion. As a result, damage to the magnetic detection element can be prevented beforehand, and a more reliable rotation angle sensor can be obtained.

[Brief description of the drawings]

FIG. 1 is a sectional view of a throttle sensor.

FIG. 2 is a front view of the magnet structure.

FIG. 3 is a perspective view of a magnet structure.

FIG. 4 is a perspective view of a front end side portion of the substrate unit.

FIG. 5 is a rear view of a front end portion of the substrate unit.

FIG. 6 is a sectional view taken along the line 6-6 in FIG. 5;

FIG. 7 is a process chart showing a procedure for forming a wiring pattern on a substrate portion.

FIG. 8 is a process chart showing a procedure for forming a wiring pattern on a substrate portion.

FIG. 9 is a perspective view showing an example of a configuration change of a substrate unit.

FIG. 10 is a perspective view showing an example of a configuration change of a substrate unit.

FIG. 11 is a perspective view showing a main part of a conventional rotation position sensor.

FIG. 12 is a sectional view taken along the line 12-12 in FIG. 11;

[Explanation of symbols]

DESCRIPTION OF SYMBOLS 10 ... Throttle sensor, 12 ... Spring, 20 ... 1st housing, 40 ... 2nd housing, 30 ... Rotor, 202 ... Partition part, 204 ... 1st space, 206 ... 2nd
Space, 208: bearing, 210: joint, 210a
... peripheral groove, 212 ... seal ring, 212a ... joining surface, 3
02: shaft, 302a: disk part, 304: connecting part,
306: plate, 308: lever, 320: magnet structure, 322: permanent magnet, 322a, 322b: end face, 3
24, 326: yoke, 324a, 326a: notch,
334, 336: magnetic pole surface, 402: cover part, 404 ...
Connector part, 406 terminal, 408 joint part, 4
08a: bonding surface, 410: substrate portion, 410a: pattern forming surface, 420, 422: wiring pattern, 430: hall element, 412: concave portion, 412a: bottom surface, 412b, 4
12c: vertical surface, 412d, 412e: inclined surface, 440
... fitting part, 430 ... Hall element, 430a ... terminal, 45
0: IC, 450a: terminal, 460: recess, H: gap,
C: rotating shaft.

Claims (6)

[Claims] A magnet structure including a substrate and a pair of opposing portions opposing each other across a magnetic detection element mounted on the substrate forms a closed magnetic path of a magnetic flux passing through the magnetic detection element, and the opposing portion is formed by the magnetic structure. The density of the magnetic flux passing through the magnetic sensing element is changed by changing the distance between the facing portions at the position of the magnetic sensing element by rotating with the rotating body, and the rotating body is changed based on the magnitude of the magnetic flux density. A rotation angle sensor configured to detect the rotation angle of the rotation angle sensor, wherein the substrate is partially thinned, and the magnetic detection element is disposed in the thinned portion. 2. The rotation angle sensor according to claim 1, wherein the thinned portion is formed by a concave portion formed in the substrate, and the magnetic detecting element is disposed in the concave portion. Sensor. 3. The rotation angle sensor according to claim 2, wherein the magnetic detection element is in contact with an inner peripheral wall surface of the recess. 4. The rotation angle sensor according to claim 3, wherein the magnetic detection element is sandwiched from both sides by an inner peripheral wall surface of the recess. 5. The rotation angle sensor according to claim 2, wherein the recess has a fitting portion into which the magnetic detection element fits. 6. The rotation angle sensor according to claim 2, wherein the magnetic detection element is provided in the recess so as not to protrude from a surface of the substrate. Angle sensor.