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JP2000061810A - Magnetic polishing method and magnetic polishing apparatus - Google Patents

Magnetic polishing method and magnetic polishing apparatus

Info

Publication number
JP2000061810A
JP2000061810A JP10237466A JP23746698A JP2000061810A JP 2000061810 A JP2000061810 A JP 2000061810A JP 10237466 A JP10237466 A JP 10237466A JP 23746698 A JP23746698 A JP 23746698A JP 2000061810 A JP2000061810 A JP 2000061810A
Authority
JP
Japan
Prior art keywords
magnetic
polishing
polished
abrasive
ferromagnetic material
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
JP10237466A
Other languages
Japanese (ja)
Inventor
Kazuhiro Tsuchiya
和博 土屋
Hideki Kawakubo
英樹 川久保
Makoto Miyazawa
信 宮沢
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
Original Assignee
Seiko Epson Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Epson Corp filed Critical Seiko Epson Corp
Priority to JP10237466A priority Critical patent/JP2000061810A/en
Publication of JP2000061810A publication Critical patent/JP2000061810A/en
Withdrawn legal-status Critical Current

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  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)

Abstract

(57)【要約】 【課題】 強磁性材粒子2、砥粒3及び結合材4を用い
た混合型磁性研磨材を用いる磁気研磨方法における研磨
性能を向上させる最適な研磨条件を見い出す。また、被
研磨物の厚さによらず均一な研磨ができる磁気研磨装置
を提供する。 【解決手段】 強磁性材粒子2として不定形粒子、硬度
Hvが300以下のものを用いる。強磁性材粒子2を硬
度の低い材料で被覆する。結合材4を融点30〜65℃
の油脂を用いる。混合型磁性研磨材1を、強磁性材粒子
40〜70容量%、砥粒15〜35容量%、結合材15
〜35容量%の混合比で構成する。また、磁気研磨装置
において、磁気回路の磁束数を検出する磁束数測定器を
備え、磁束数の変化に応じて電磁石の電力を調整して厚
さが部分的に異なる非磁性材料の被研磨物を一定の研磨
圧力で研磨する。
[PROBLEMS] To find out optimal polishing conditions for improving the polishing performance in a magnetic polishing method using a mixed type magnetic abrasive using ferromagnetic material particles 2, abrasive grains 3 and a binder 4. Further, the present invention provides a magnetic polishing apparatus capable of performing uniform polishing regardless of the thickness of an object to be polished. SOLUTION: As ferromagnetic material particles 2, irregular-shaped particles having a hardness Hv of 300 or less are used. The ferromagnetic material particles 2 are coated with a material having low hardness. The bonding material 4 has a melting point of 30 to 65 ° C.
Use oils and fats. The mixed type magnetic abrasive 1 was prepared by mixing ferromagnetic particles 40 to 70% by volume, abrasive grains 15 to 35% by volume,
It is composed of a mixing ratio of up to 35% by volume. The magnetic polishing apparatus further includes a magnetic flux number measuring device for detecting the magnetic flux number of the magnetic circuit, and adjusts the power of the electromagnet in accordance with the change in the magnetic flux number to polished the non-magnetic material to be polished with the thickness partially different. Is polished at a constant polishing pressure.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【発明の属する技術分野】本発明は、磁界中において磁
性研磨材で被研磨物を研磨する磁気研磨方法及び磁気研
磨装置に関する。
TECHNICAL FIELD The present invention relates to a magnetic polishing method and a magnetic polishing apparatus for polishing an object to be polished with a magnetic abrasive in a magnetic field.

【0002】[0002]

【従来の技術】磁性研磨材に磁気吸引力を与えて被研磨
物を圧接させながらこれらを相対運動させて研磨する磁
気研磨方法は、微細円管内面など固定工具による研磨が
困難な被研磨物、あるいは、磁性研磨材が被研磨物の凹
凸に追随して研磨を行うため、金型など複雑形状をした
被研磨物の表面仕上げ加工、バリ取りなどに有効であ
る。
2. Description of the Related Art A magnetic polishing method in which a magnetic abrasive is magnetically attracted to an object to be polished so that the objects to be polished are relatively moved while being pressed against each other is known as a magnetic polishing method. Alternatively, since the magnetic polishing material follows the irregularities of the object to be polished, it is effective for surface finishing and deburring of the object to be polished having a complicated shape such as a mold.

【0003】従来、磁性研磨材としては、図14に示す
ように、数100μmの粒径の強磁性材粒子100の表
面に数μmの酸化アルミニウム等の研磨砥粒101を金
属結合状態で付着させ、研磨砥粒101と強磁性材粒子
100が一体となった磁性砥粒が用いられているしか
し、この磁性砥粒は、製造方法が特殊であり、コスト高
であると共に、種類が少なく、研磨条件を最適化するの
が困難であるという問題を有する。
Conventionally, as a magnetic abrasive, as shown in FIG. 14, abrasive grains 101 such as aluminum oxide having a particle size of several μm are adhered to the surface of a ferromagnetic material particle 100 having a particle size of several 100 μm in a metal bonded state. However, the magnetic abrasive grains in which the abrasive grains 101 and the ferromagnetic material particles 100 are integrated are used. However, the magnetic abrasive grains have a special manufacturing method, are high in cost, and have a small number of types. There is a problem that it is difficult to optimize the conditions.

【0004】このような問題を解決するため、本発明者
は、特開平5−42476号公報で、強磁性材粒子と砥
粒とを別体とし、それらを油性ワックスなどの結合材で
保持する混合型磁性研磨材を用いる新しい磁気研磨方法
を提案した。
In order to solve such a problem, the present inventor discloses in Japanese Patent Laid-Open No. 5-42476 that the ferromagnetic material particles and the abrasive particles are separated and held by a binder such as oily wax. We proposed a new magnetic polishing method using mixed magnetic abrasives.

【0005】この混合型磁性研磨材を用いる磁気研磨方
法によれば、従来の磁性砥粒を用いる場合と比較して、
磁気抵抗となる磁性砥粒表面の研磨砥粒がなく、磁界が
数十倍の強さとなるため、数十倍の研磨力が得られ、研
磨力を飛躍的に高めることに成功した。また、強磁性材
粒子、砥粒、結合材の選択の自由度が高く、しかも低コ
ストである。
According to the magnetic polishing method using this mixed type magnetic abrasive, compared with the case of using the conventional magnetic abrasive grains,
Since there are no abrasive grains on the surface of the magnetic abrasive grains that become the magnetic resistance and the magnetic field is several tens of times stronger, a polishing force of several tens of times was obtained, and the polishing force was dramatically increased. Further, the degree of freedom in selecting the ferromagnetic material particles, the abrasive grains, and the binder is high, and the cost is low.

【0006】[0006]

【発明が解決しようとする課題】しかしながら、このよ
うな混合型磁性研磨材を用いる新規な磁気研磨方法は、
今までの磁気研磨方法と全く異なる機構で研磨を行うこ
と、磁性研磨材を構成する強磁性材粒子、砥粒、結合材
の選択の幅が広いことから、研磨条件が十分に解明され
ていなかった。そのため、かかる磁気研磨方法における
研磨量や仕上げ面といった研磨性能の向上が要望されて
いた。
However, a new magnetic polishing method using such a mixed magnetic abrasive is as follows:
Polishing conditions have not been fully clarified because polishing is performed by a mechanism that is completely different from conventional magnetic polishing methods and the selection of ferromagnetic material particles, abrasive grains, and binders that make up magnetic polishing materials is wide. It was Therefore, it has been demanded to improve the polishing performance such as the polishing amount and the finished surface in the magnetic polishing method.

【0007】本発明は、上記要望に鑑みてなされたもの
で、強磁性材粒子、砥粒及び結合材を用いた混合型磁性
研磨材を用いる磁気研磨方法における研磨性能を向上さ
せる最適な研磨条件を見い出すことを目的とする。
The present invention has been made in view of the above-mentioned demands, and the optimum polishing conditions for improving the polishing performance in a magnetic polishing method using a mixed magnetic abrasive containing ferromagnetic material particles, abrasive grains and a binder. The purpose is to find out.

【0008】また、従来の磁気研磨装置は、被研磨物が
部分的に厚みが異なる非磁性材料の場合、被研磨物の厚
さが変化すると磁気抵抗が変化することから磁気回路を
流れる磁束数が変化し、厚い部分では磁束数が減少し、
薄い部分では磁束数が増加するため、強磁性材粒子の被
研磨物への押し付け力が変化し、その結果、砥粒の切り
込み量が変化し、研磨力が被研磨物の厚さによって部分
的に変化してしまう問題がある。
Further, in the conventional magnetic polishing apparatus, when the object to be polished is a non-magnetic material having a partially different thickness, the magnetic resistance changes as the thickness of the object to be polished changes. Changes, and the number of magnetic flux decreases in the thick part,
Since the number of magnetic flux increases in the thin part, the pressing force of the ferromagnetic material particles against the work piece changes, and as a result, the cutting amount of the abrasive grains changes, and the polishing force partially changes depending on the thickness of the work piece. There is a problem that changes to.

【0009】したがって、本発明は、被研磨物の厚さに
よらず均一な研磨ができる磁気研磨装置を提供すること
を目的とする。
Therefore, an object of the present invention is to provide a magnetic polishing apparatus capable of performing uniform polishing regardless of the thickness of the object to be polished.

【0010】[0010]

【課題を解決するための手段】本発明者は、強磁性材粒
子、砥粒、結合材を用いた混合型磁性研磨材を用いた磁
気研磨方法の研磨の機構を検討しながら、実験を繰り返
して最適な研磨条件を見い出した。
The present inventors repeated experiments while examining the polishing mechanism of a magnetic polishing method using a mixed magnetic abrasive containing ferromagnetic material particles, abrasive grains, and a binder. And found the optimum polishing conditions.

【0011】すなわち、請求項1記載の磁気研磨方法
は、強磁性材粒子、砥粒及び結合材を主成分として用い
た混合型磁性研磨材を磁気吸引力で被研磨物に圧接させ
ながら、これらの混合型磁性研磨材と被研磨物とを相対
運動させることにより、前記被研磨物を研磨する磁気研
磨方法において、前記強磁性材粒子が、不定形状粒子で
あることを特徴とする。
That is, in the magnetic polishing method according to the first aspect of the present invention, the mixed magnetic abrasive containing the ferromagnetic material particles, the abrasive grains and the binder as the main components is pressed against the object to be polished by the magnetic attraction force. In the magnetic polishing method for polishing the object to be polished by relatively moving the mixed magnetic abrasive and the object to be polished, the ferromagnetic material particles are irregularly shaped particles.

【0012】請求項2記載の磁気研磨方法は、強磁性材
粒子、砥粒及び結合材を主成分として用いた混合型磁性
研磨材を磁気吸引力で被研磨物に圧接させながら、これ
らの混合型磁性研磨材と被研磨物とを相対運動させるこ
とにより、前記被研磨物を研磨する磁気研磨方法におい
て、前記強磁性材粒子のビッカース硬度Hvが、300
以下であることを特徴とする。
According to a second aspect of the present invention, there is provided a magnetic polishing method in which ferromagnetic material particles, abrasive grains, and a mixed magnetic abrasive material containing a binder as a main component are pressed against an object to be polished by magnetic attraction. In the magnetic polishing method of polishing the object to be polished by relatively moving the type magnetic abrasive and the object to be polished, the Vickers hardness Hv of the ferromagnetic material particles is 300.
It is characterized by the following.

【0013】請求項3記載の磁気研磨方法は、強磁性材
粒子、砥粒及び結合材を主成分として用いた混合型磁性
研磨材を磁気吸引力で被研磨物に圧接させながら、これ
らの混合型磁性研磨材と被研磨物とを相対運動させるこ
とにより、前記被研磨物を研磨する磁気研磨方法におい
て、前記強磁性材粒子が、該強磁性材粒子より硬度が低
い材料で被覆されていることを特徴とする。
According to a third aspect of the present invention, there is provided a magnetic polishing method in which ferromagnetic material particles, abrasive grains, and a mixed magnetic abrasive material containing a binder as a main component are pressed against an object to be polished by magnetic attraction. In a magnetic polishing method for polishing an object to be polished by relatively moving a die-shaped magnetic abrasive and the object to be polished, the ferromagnetic material particles are coated with a material having a hardness lower than that of the ferromagnetic material particles. It is characterized by

【0014】請求項4記載の磁気研磨方法は、強磁性材
粒子、砥粒及び結合材を主成分として用いた混合型磁性
研磨材を磁気吸引力で被研磨物に圧接させながら、これ
らの混合型磁性研磨材と被研磨物とを相対運動させるこ
とにより、前記被研磨物を研磨する磁気研磨方法におい
て、前記結合材が、融点が30〜65℃の油脂であるこ
とを特徴とする。
According to a fourth aspect of the present invention, there is provided a magnetic polishing method, wherein a mixed magnetic abrasive containing ferromagnetic material particles, abrasive grains, and a binder as main components is pressed against an object to be polished by a magnetic attractive force, and these are mixed. In the magnetic polishing method for polishing the object to be polished by relatively moving the mold magnetic abrasive and the object to be polished, the binder is a fat or oil having a melting point of 30 to 65 ° C.

【0015】請求項5記載の磁気研磨方法は、請求項4
記載の磁気研磨方法において、前記結合材が、ラウリン
酸であることを特徴とする。
According to a fifth aspect of the present invention, there is provided a magnetic polishing method according to the fourth aspect.
In the magnetic polishing method described above, the binder is lauric acid.

【0016】請求項6記載の磁気研磨方法は、強磁性材
粒子、砥粒及び結合材を主成分として用いた混合型磁性
研磨材を磁気吸引力で被研磨物に圧接させながら、これ
らの混合型磁性研磨材と被研磨物とを相対運動させるこ
とにより、前記被研磨物を研磨する磁気研磨方法におい
て、前記混合型磁性研磨材が、前記強磁性材粒子が40
〜70容量%、前記砥粒が15〜35容量%、前記結合
材が15〜35容量%の混合比で構成されていることを
特徴とする。
According to a sixth aspect of the present invention, there is provided a magnetic polishing method in which a mixed magnetic abrasive containing ferromagnetic material particles, abrasive grains, and a binder as main components is pressed against an object to be polished by magnetic attraction to mix them. In the magnetic polishing method of polishing the object to be polished by moving the type magnetic abrasive and the object to be polished relative to each other, the mixed magnetic abrasive is 40
˜70% by volume, the abrasive grains are 15 to 35% by volume, and the binder is 15 to 35% by volume.

【0017】請求項7記載の磁気研磨方法は、請求項6
記載の磁気研磨方法において、研磨中に前記混合型磁性
研磨材の混合比の範囲を維持するように各成分を供給す
ることを特徴とする。
The magnetic polishing method according to claim 7 is the method according to claim 6.
In the magnetic polishing method described above, each component is supplied so as to maintain a mixing ratio range of the mixed magnetic polishing material during polishing.

【0018】請求項8記載の磁気研磨方法は、強磁性材
粒子、砥粒及び結合材を主成分として用いた混合型磁性
研磨材を磁気吸引力で被研磨物に圧接させながら、これ
らの混合型磁性研磨材と被研磨物とを相対運動させるこ
とにより、前記被研磨物を研磨する磁気研磨方法におい
て、研磨中に前記磁性研磨材の一部又は全部を交換する
ことを特徴とする。
In the magnetic polishing method according to the present invention, a mixed magnetic abrasive containing ferromagnetic material particles, abrasive grains and a binder as main components is pressed against an object to be polished by a magnetic attraction force to mix these. In the magnetic polishing method for polishing the object to be polished by relatively moving the die magnetic abrasive and the object to be polished, a part or all of the magnetic abrasive is replaced during polishing.

【0019】また、請求項9の磁気研磨装置は、磁気回
路を構成するヨークと電磁石、及び該電磁石へ電力を供
給する電源を備え、前記磁気回路中の空隙部に配置した
被研磨物に磁性研磨材を磁気吸引力で圧接させ、これら
の被研磨物と磁性研磨材とを相対運動させて前記被研磨
物を研磨する磁気研磨装置において、前記磁気回路の磁
束数の変化を検出する磁束数測定器を備え、この磁束数
測定器により磁束数の変化に応じて前記電源の電力を変
化させて、前記磁気回路の磁束数を保つように制御する
ことを特徴とする。
Further, a magnetic polishing apparatus according to a ninth aspect is provided with a yoke forming a magnetic circuit, an electromagnet, and a power source for supplying electric power to the electromagnet, and a magnetic material is attached to an object to be polished arranged in a void portion in the magnetic circuit. In a magnetic polishing apparatus that presses an abrasive with a magnetic attraction force and relatively moves the object to be polished and the magnetic abrasive to polish the object to be polished, the number of magnetic fluxes for detecting a change in the number of magnetic fluxes of the magnetic circuit. A measuring device is provided, and the magnetic flux number measuring device changes the electric power of the power source according to the change of the magnetic flux number, and controls so as to maintain the magnetic flux number of the magnetic circuit.

【0020】この磁気研磨装置は、磁束数測定器により
磁気回路の磁束数の変化を検出し、この磁束数の変化に
基づいて電磁石への電力を調整するようにしたものであ
る。これにより、被研磨物の厚い部分を研磨するときの
磁束数の減少を検出して電磁石への電力を増加させて研
磨力を増加させ、被研磨物の厚さの薄い部分を研磨する
ときの磁束数の増加を検出して電磁石への電力供給を減
少させて研磨力を減少させることができるため、被研磨
物の厚さによらず、一定の研磨圧力で均一に研磨するこ
とができる。
In this magnetic polishing apparatus, a magnetic flux number measuring device detects a change in the magnetic flux number of the magnetic circuit, and the electric power to the electromagnet is adjusted based on the change in the magnetic flux number. This detects a decrease in the number of magnetic fluxes when polishing a thick part of the object to be polished, increases the electric power to the electromagnet to increase the polishing force, and when polishing a thin part of the object to be polished. Since the increase in the number of magnetic fluxes can be detected to reduce the power supply to the electromagnet to reduce the polishing force, it is possible to perform uniform polishing at a constant polishing pressure regardless of the thickness of the object to be polished.

【0021】請求項10記載の磁気研磨装置は、請求項
9記載の磁気研磨装置において、前記磁性研磨材を構成
する成分の一部又は全部を前記被研磨物に供給する供給
装置を備えることを特徴とする。
According to a tenth aspect of the present invention, there is provided a magnetic polishing apparatus according to the ninth aspect, further comprising a supply device for supplying a part or all of components constituting the magnetic polishing material to the object to be polished. Characterize.

【0022】[0022]

【発明の実施の形態】以下、本発明の実施の形態につい
て、図面を参照しながら説明するが、本発明は下記の実
施の形態に限定されるものではない。
BEST MODE FOR CARRYING OUT THE INVENTION Hereinafter, embodiments of the present invention will be described with reference to the drawings, but the present invention is not limited to the following embodiments.

【0023】本発明の磁気研磨方法は、強磁性材粒子、
砥粒及び結合材を主成分として用いた混合型磁性研磨材
を磁気吸引力で被研磨物に圧接させながら、これらの磁
性研磨材と被研磨物とを相対運動させることにより、被
研磨物を研磨するものである。
The magnetic polishing method of the present invention comprises ferromagnetic material particles,
While pressing the mixed magnetic abrasive containing abrasive grains and the binder as the main components against the object to be polished by magnetic attraction, the magnetic abrasive and the object to be polished are moved relatively to each other. It is to be polished.

【0024】図1は、一般的な磁気研磨装置を用いて磁
気研磨を行う方法を模式的に示すもので、(a)は磁性
材料の円筒の外面を研磨する場合、(b)は非磁性材料
の円管の内面を研磨する場合を示している。
FIG. 1 schematically shows a method of performing magnetic polishing using a general magnetic polishing apparatus. (A) is a case of polishing the outer surface of a cylinder of a magnetic material, (b) is a non-magnetic material. The case where the inner surface of the circular tube of material is polished is shown.

【0025】図1(a)の磁気研磨装置は、ヨーク10
の対向するそれぞれの先端がS磁極11、N磁極12と
なっていて、励磁コイル13がヨークの先端の磁極から
少し離れた位置のヨーク10に巻回され、電磁石14、
15を構成している。励磁コイル13には図示しない電
源が接続され、励磁コイル13に電力を供給している。
被研磨物20は、磁極11、12間に配置され、例え
ば、ボールスプラインを介してモータと加振機に取り付
けられ、軸を中心とした回転と軸方向の振動が与えられ
るようになっている。
The magnetic polishing apparatus shown in FIG.
The opposite magnetic poles are the S magnetic pole 11 and the N magnetic pole 12, and the exciting coil 13 is wound around the yoke 10 at a position slightly apart from the magnetic pole at the tip of the yoke.
Make up 15. A power source (not shown) is connected to the exciting coil 13 to supply electric power to the exciting coil 13.
The object to be polished 20 is arranged between the magnetic poles 11 and 12, and is attached to, for example, a motor and a vibration exciter via a ball spline so that rotation about an axis and vibration in the axial direction are given. .

【0026】混合型磁性研磨材1は、結合材が常温で固
体状態であり、励磁コイルの電源をONにした後、固ま
りとして磁極11,12と被研磨物20との間の空隙に
充填される。ヨーク10、磁極11,12、混合型磁性
研磨材1、被研磨物20で磁気回路が構成され、混合型
磁性研磨材1は、磁極11,12と被研磨物20との間
の磁界によって被研磨物20表面を圧接する。
In the mixed magnetic polishing material 1, the binder is solid at room temperature, and after the power supply of the exciting coil is turned on, it is filled as a lump in the space between the magnetic poles 11 and 12 and the object to be polished 20. It A magnetic circuit is constituted by the yoke 10, the magnetic poles 11 and 12, the mixed magnetic abrasive 1, and the object to be polished 20, and the mixed magnetic abrasive 1 is covered by the magnetic field between the magnetic poles 11 and 12 and the object to be polished 20. The surface of the polishing object 20 is pressed.

【0027】この状態で、被研磨物20に回転と軸方向
振動を与えると、はじめは結合材が固体状態であるが、
摩擦熱で加工域温度が上昇し、融点に達するとすぐに溶
け始め、混合型磁性研磨材1中の強磁性材粒子は磁力線
に沿ってブラシ状に整列すると共に、結合材の保持力で
砥粒と強磁性材粒子が結合される。そして、混合型磁性
研磨材1は磁気力によってその位置にとどまるため、被
研磨物20と強磁性材粒子1との相対運動により被研磨
物20が砥粒によって研磨される。
In this state, when the object to be polished 20 is rotated and axially vibrated, the binder is initially in a solid state.
The processing area temperature rises due to frictional heat, and as soon as it reaches the melting point, it begins to melt, and the ferromagnetic material particles in the mixed magnetic abrasive 1 are arranged in a brush shape along the lines of magnetic force, and the holding force of the binder causes grinding. The particles and the ferromagnetic material particles are combined. Since the mixed magnetic abrasive 1 stays at that position due to the magnetic force, the object 20 to be polished is polished by the abrasive grains due to the relative movement between the object 20 to be polished and the ferromagnetic material particles 1.

【0028】また、図1(b)の磁気研磨装置は、ヨー
ク10先端のS磁極11、N磁極12が互いに直交する
方向に対向し、励磁コイル13がヨーク10の先端の磁
極から少し離れた位置のヨーク10に巻回され、電磁石
13,14を構成している。励磁コイル13には図示し
ない電源が接続され、励磁コイル13に電力を供給して
いる。被研磨物20は、磁極11、12間に配置され、
例えば、ボールスプラインを介してモータと加振機に取
り付けられ、軸を中心とした回転と軸方向の振動が与え
られるようになっている。
In the magnetic polishing apparatus of FIG. 1B, the S magnetic pole 11 and the N magnetic pole 12 at the tip of the yoke 10 face each other in a direction orthogonal to each other, and the exciting coil 13 is slightly separated from the magnetic pole at the tip of the yoke 10. The electromagnets 13 and 14 are wound around the position yoke 10. A power source (not shown) is connected to the exciting coil 13 to supply electric power to the exciting coil 13. The object to be polished 20 is arranged between the magnetic poles 11 and 12,
For example, it is attached to a motor and a vibration exciter via a ball spline so that rotation about an axis and vibration in the axial direction are applied.

【0029】混合型磁性研磨材1は、円管20内に充填
される。励磁コイル13の電源をONにすると、ヨーク
10、磁極11,12、混合型磁性研磨材1で磁気回路
が構成され、磁性研磨材1中の強磁性材粒子は、磁極1
1、12によって吸引され、円管20内面を圧接する。
The mixed magnetic abrasive 1 is filled in the circular tube 20. When the exciting coil 13 is turned on, a magnetic circuit is constituted by the yoke 10, the magnetic poles 11 and 12, and the mixed magnetic abrasive material 1. The ferromagnetic material particles in the magnetic abrasive material 1 are
The inner surface of the circular tube 20 is pressed against the inner surface of the circular tube 20 by suction.

【0030】この状態で、円管20に回転と軸方向振動
を与えると、摩擦熱で結合材が溶融し、円管中の強磁性
材粒子は磁気力によってその位置にとどまるため、円管
20と混合型磁性研磨材との相対運動により円管20内
面が研磨される。
In this state, when the circular tube 20 is rotated and vibrated in the axial direction, the binder is melted by frictional heat, and the ferromagnetic material particles in the circular tube remain at the position due to the magnetic force. The inner surface of the circular pipe 20 is polished by the relative movement of the mixed magnetic polishing material with the.

【0031】図2は、本発明にかかる磁気研磨方法の研
磨機構を模式的に示すものである。強磁性材粒子2は、
磁気力により被研磨物20を垂直方向の力Pxで圧接す
る。また、磁界中に保持される力Pmを受ける一方、被
研磨物20と矢印のように相対運動をしているため、被
研磨物20と共に回転しようとする力Pyを受け、水平
方向にこれらの差Ps=Pm−Pyの力を受ける。Px
とPsを合成した力Paの砥粒方向分力Pbが強磁性材
粒子2と被研磨物20に挟まれた砥粒3に加えられ、砥
粒3には被研磨物20に対する垂直向きの背分力Pvが
与えられる。このようにして研磨圧力を受けた砥粒3に
より被研磨物20の表面が削られ、切り込みが生じて被
研磨物20が研磨されることになる。このとき、砥粒3
と強磁性材粒子2とを結合しているのが結合材4であ
る。
FIG. 2 schematically shows the polishing mechanism of the magnetic polishing method according to the present invention. The ferromagnetic material particles 2 are
The object to be polished 20 is pressed by a magnetic force to exert a vertical force Px. Further, while receiving a force Pm held in the magnetic field, the object 20 to be polished is relatively moving as indicated by an arrow, so that the force Py to rotate together with the object 20 to be polished is received, and these forces are horizontally applied. The force of the difference Ps = Pm-Py is received. Px
Abrasive grain direction component force Pb of force Pa that is a combination of Ps and Ps is applied to the abrasive grain 3 sandwiched between the ferromagnetic material particle 2 and the object 20 to be polished, and the abrasive grain 3 has a vertical spin on the object 20 to be polished. A component force Pv is given. In this way, the surface of the object to be polished 20 is shaved by the abrasive grains 3 that have received the polishing pressure, and a notch is generated, so that the object to be polished 20 is polished. At this time, abrasive grains 3
The binder 4 is a combination of the ferromagnetic particles 2 and the ferromagnetic particles 2.

【0032】これらのことから、強磁性材粒子2は、磁
気力を受けて研磨圧力を砥粒3に与える機能を必要とす
るため、要求される特性は、磁気特性がよいこと、粒径
が適当であること、形状が砥粒を良く保持できること、
硬度が高すぎないこと、容易に入手できること、安価な
ことなどが挙げられる。磁気特性については、保磁力が
小さいこと、最大磁束密度が高いこと、透磁率が高いこ
とが挙げられる。
From these facts, the ferromagnetic material particles 2 need to have a function of receiving a magnetic force and giving a polishing pressure to the abrasive grains 3, and therefore the required characteristics are that the magnetic characteristics are good and the particle diameter is Being suitable, the shape can hold the abrasive grains well,
The hardness is not too high, it is easily available, and it is inexpensive. Regarding the magnetic properties, it can be mentioned that the coercive force is small, the maximum magnetic flux density is high, and the magnetic permeability is high.

【0033】強磁性材粒子3の材料として、具体的に
は、鉄、鉄とニッケルの合金等を例示することができ
る。
Specific examples of the material of the ferromagnetic material particles 3 include iron and an alloy of iron and nickel.

【0034】また、砥粒3は被研磨物を研磨する作用を
有するため、被研磨物の種類に応じた材料、硬度、粒径
を選択することができるが、具体的には、酸化アルミニ
ウム、酸化クロム、酸化鉄等を例示することができる。
Further, since the abrasive grains 3 have a function of polishing the object to be polished, it is possible to select the material, hardness and particle size according to the kind of the object to be polished. Specifically, aluminum oxide, Examples thereof include chromium oxide and iron oxide.

【0035】本発明者は、混合型磁性研磨材1を構成す
る成分について詳細な実験を行い、研磨の機構を解明し
た。
The present inventor has conducted detailed experiments on the components constituting the mixed magnetic abrasive 1 and has clarified the mechanism of polishing.

【0036】まず、強磁性材粒子と砥粒の粒径を検討し
た。図3は、砥粒と強磁性材粒子の粒径比を変えて研磨
量を測定したグラフである。図3(a)は、強磁性材粒
子として鋼球、砥粒として酸化アルミニウム、結合材と
してパルミチン酸を用いて、初期表面粗さ5〜8μmR
yのSK3円管の外面を研磨したものである。図3
(b)は、強磁性材粒子として鋼球、砥粒として酸化ア
ルミニウム、結合材としてラウリン酸を用いて、初期表
面粗さが10〜15μmRyのステンレススチール製の
円管の内面を研磨したものである。
First, the particle diameters of the ferromagnetic material particles and the abrasive particles were examined. FIG. 3 is a graph in which the polishing amount is measured by changing the particle size ratio between the abrasive grains and the ferromagnetic material particles. FIG. 3A shows an initial surface roughness of 5 to 8 μmR using steel balls as ferromagnetic material particles, aluminum oxide as abrasive grains, and palmitic acid as a binder.
The outer surface of the SK3 circular tube of y was polished. Figure 3
(B) is obtained by polishing the inner surface of a stainless steel circular tube having an initial surface roughness of 10 to 15 μmRy using steel balls as ferromagnetic material particles, aluminum oxide as abrasive grains, and lauric acid as a binder. is there.

【0037】図3(a)の結果より、円管外面の研磨量
から、砥粒径には強磁性材粒子に対する最適な粒径比が
あり、その粒径比(砥粒/強磁性材粒子)は0.05〜
0.3程度、好ましくは0.2程度である。また、図3
(b)の結果より、円管内面の研磨量から、砥粒径/強
磁性材粒子の粒径比にも最適値があり、その最適値は、
0.01〜0.2、好ましくは、0.02〜0.1程度
である。したがって、一般的な砥粒径/強磁性材粒子の
粒径比は、0.01〜0.3、好ましくは0.02〜
0.2程度が最適である。
From the result of FIG. 3 (a), from the polishing amount of the outer surface of the circular tube, there is an optimum particle size ratio to the ferromagnetic material particles in the abrasive particle size, and the particle size ratio (abrasive particle / ferromagnetic material particle). ) Is 0.05 ~
It is about 0.3, preferably about 0.2. Also, FIG.
From the result of (b), there is an optimum value for the particle size ratio of the abrasive particle size / ferromagnetic material particle from the polishing amount on the inner surface of the circular tube. The optimum value is
It is about 0.01 to 0.2, preferably about 0.02 to 0.1. Therefore, the general abrasive grain size / ferromagnetic material grain size ratio is 0.01 to 0.3, and preferably 0.02 to
The optimum value is about 0.2.

【0038】このように、砥粒径/強磁性材粒子の粒径
比に最適値が存在する理由は次のように考えられる。図
4に示すように、砥粒3の粒径が相対的に大きくなる
と、強磁性材粒子2から与えられる力Pbのうち、被研
磨物20に対する背分力Pvが次第に小さくなり、研磨
力が低下すると考えられる。
The reason why there is an optimum value in the particle size ratio of abrasive particle size / ferromagnetic material particle is considered as follows. As shown in FIG. 4, when the particle size of the abrasive grains 3 becomes relatively large, the back force Pv against the object to be polished 20 among the force Pb given from the ferromagnetic material particles 2 becomes gradually smaller, and the polishing force becomes smaller. It is expected to decrease.

【0039】逆に、砥粒3の粒径が小さくなりすぎる
と、図5に示すように、被研磨物20の初期表面粗さR
yより砥粒3aの粒径が小さいと、表面粗さ凹部に砥粒
3aが詰まり、研磨機能を発揮できない状態になるため
と考えられる。実際に、砥粒の粒径が、円管外面の研磨
では、初期表面粗さ5〜8μmRyより小さい7μmの
とき、円管内面の研磨では、砥粒径が4μmより小さい
ときには、ほとんど初期粗さを向上させることはできな
かった。したがって、砥粒の粒径は、図5の3bに示す
ように、被研磨物の初期表面粗さRyより大きいものを
選択することが好ましく、また、この砥粒の粒径に対応
した最適な粒径の強磁性材粒子を選択することが好まし
い。
On the contrary, when the grain size of the abrasive grains 3 becomes too small, as shown in FIG. 5, the initial surface roughness R of the object to be polished 20 is increased.
It is considered that when the grain size of the abrasive grains 3a is smaller than y, the abrasive grains 3a are clogged in the concave portions of the surface roughness and the polishing function cannot be exerted. Actually, when the grain size of the abrasive grains is 7 μm, which is smaller than the initial surface roughness of 5 to 8 μmRy in the polishing of the outer surface of the circular pipe, and when the grain size of the inner surface of the circular pipe is smaller than 4 μm, the initial roughness is almost the same. Could not be improved. Therefore, as shown in 3b of FIG. 5, it is preferable to select an abrasive grain having a particle size larger than the initial surface roughness Ry of the object to be polished, and the optimum grain size corresponding to the particle size of the abrasive grain. It is preferable to select ferromagnetic material particles having a particle size.

【0040】また、強磁性材粒子の形状と材質及び砥粒
の材質を検討した。図6は、その円管外面の研磨結果を
示す3次元のグラフである。X軸は粒径80〜100μ
mの強磁性材粒子の形状と材質を示し、B−Feは、硬
度Hv(ビッカース硬度)900の鋼球、B−45Ni
は、Ni45%のパーマロイのボール、A−Feは、水
アトマイズ法で製造した不定形状の鉄粉で、硬度Hvが
200〜300、A−45Niは、不定形状の45Ni
パーマロイ粉で硬度Hvが120程度、A−78Ni
は、不定形状の78Niパーマロイ粉で、硬度Hvが1
40程度である。Y軸は粒径6〜7μmの砥粒の種類を
示し、酸化クロムと酸化アルミニウムを用いている。Z
軸は研磨後の被研磨物の表面粗さ(μm)を示してい
る。
Further, the shape and material of the ferromagnetic material particles and the material of the abrasive grains were examined. FIG. 6 is a three-dimensional graph showing the results of polishing the outer surface of the circular pipe. X axis is particle size 80-100μ
The shape and the material of the ferromagnetic material particles of m are shown, and B-Fe is a steel ball having hardness Hv (Vickers hardness) of 900, B-45Ni.
Is a 45% Ni permalloy ball, A-Fe is an iron powder of indefinite shape manufactured by a water atomizing method, and has a hardness Hv of 200 to 300, and A-45Ni is an indefinite shape of 45Ni.
Permalloy powder with hardness Hv of about 120, A-78Ni
Is an irregularly shaped 78Ni permalloy powder with a hardness Hv of 1
It is about 40. The Y axis indicates the type of abrasive grains having a grain size of 6 to 7 μm, and chromium oxide and aluminum oxide are used. Z
The axis indicates the surface roughness (μm) of the object to be polished after polishing.

【0041】なお、水アトマイズ法は、溶融した金属を
直接水などの冷却液に落として急冷することにより、凹
凸の激しい不定形状の粉末を製造する方法である。
The water atomizing method is a method for directly producing molten powder by dropping it into a cooling liquid such as water and then rapidly cooling it to form an irregularly-shaped powder having large irregularities.

【0042】図6の結果より、強磁性材粒子の形状は、
明らかに球状よりも不定形状の方が良い仕上げ効果が得
られている。また、強磁性材粒子の硬度が低くなると良
い仕上げ効果が得られることが認められる。砥粒の材質
では、酸化アルミニウムより酸化クロムの方が良い仕上
げ効果が得られた。特に、A−78Niと酸化クロムの
組み合わせが最適であり、0.08μmRyの鏡面が得
られた。
From the results shown in FIG. 6, the shape of the ferromagnetic material particles is
Apparently, the irregular shape has a better finishing effect than the spherical shape. Further, it is recognized that a good finishing effect can be obtained when the hardness of the ferromagnetic material particles is low. As for the material of the abrasive grains, chromium oxide gave a better finishing effect than aluminum oxide. In particular, the combination of A-78Ni and chromium oxide was optimal, and a mirror surface of 0.08 μmRy was obtained.

【0043】不定形状の強磁性材粒子の方がボール状の
強磁性材粒子よりも良い仕上げ効果が得られるのは次の
ように考えられる。図7に示すように、不定形状の強磁
性材粒子2Aは、不定形凹部に多数の砥粒3を保持する
ことができるのに対し、球状の強磁性材粒子2Bは砥粒
3を保持することができない。そのため、球形の場合、
少ない数の砥粒3を介して強磁性材粒子2Bにかかる背
面力が被研磨物20に対して伝達され、砥粒3に作用す
る研磨圧力が大きくなるため、擦過痕を残し、仕上げ面
が悪くなる。これに対して、不定形状の場合、不定形凹
部に保持した多数の砥粒3を介して被研磨物20に背面
力が伝達されるため、砥粒1個当たりの研磨圧力は小さ
くなるため、良好な仕上げ面が得られると考えられる。
It is considered as follows that the irregular-shaped ferromagnetic material particles can obtain a better finishing effect than the ball-shaped ferromagnetic material particles. As shown in FIG. 7, the irregular-shaped ferromagnetic material particle 2A can hold a large number of abrasive grains 3 in the irregular-shaped concave portion, while the spherical ferromagnetic material particle 2B retains the abrasive grain 3. I can't. Therefore, in the case of a sphere,
The back surface force applied to the ferromagnetic material particles 2B is transmitted to the object to be polished 20 through a small number of abrasive grains 3, and the polishing pressure acting on the abrasive grains 3 increases, leaving scratch marks and leaving a finished surface. become worse. On the other hand, in the case of the irregular shape, the back force is transmitted to the object to be polished 20 through the large number of abrasive grains 3 held in the irregular concave portion, so that the polishing pressure per abrasive grain becomes small, It is considered that a good finished surface can be obtained.

【0044】また、強磁性材粒子の硬度については、別
の実験を行った。強磁性材粒子の硬度による違いを検討
するため、Hv900の硬度の鋼球を焼鈍し、Hv30
0、Hv200まで低下させた鋼球を用い、砥粒として
酸化アルミニウムを用いて研磨を行った。その結果のグ
ラフを図8に示す。
Another experiment was conducted on the hardness of the ferromagnetic material particles. In order to study the difference due to the hardness of the ferromagnetic material particles, a steel ball with a hardness of Hv900 was annealed, and Hv30
Polishing was performed by using a steel ball reduced to 0 and Hv200 and using aluminum oxide as abrasive grains. The graph of the result is shown in FIG.

【0045】図8では、棒グラフが研磨量を示し、折れ
線グラフが表面粗さを示している。強磁性材の硬度が低
くなると研磨量が増大すると共に、仕上げ面も良好にな
る傾向を示している。
In FIG. 8, the bar graph shows the polishing amount, and the line graph shows the surface roughness. When the hardness of the ferromagnetic material decreases, the polishing amount increases and the finished surface tends to be good.

【0046】この理由は、強磁性材粒子の硬度が低くな
ると、砥粒が強磁性材表面に食い込み、砥粒が強磁性材
粒子に保持され易くなり、砥粒に伝達される研磨圧力が
増大するため、研磨量が増大すると考えられる。また、
強磁性材粒子の硬度が高いと、被研磨物の仕上げ面へ擦
過痕を残してしまうものと考えられる。したがって、強
磁性材粒子の硬度Hvは、低い方が良く、図6の結果と
併せて、ビッカース硬度Hvが300以下、好ましくは
70〜200程度が良好である。
The reason for this is that when the hardness of the ferromagnetic material particles becomes low, the abrasive grains bite into the surface of the ferromagnetic material, the abrasive grains are easily held by the ferromagnetic material particles, and the polishing pressure transmitted to the abrasive grains increases. Therefore, it is considered that the polishing amount increases. Also,
It is considered that when the hardness of the ferromagnetic material particles is high, scratch marks are left on the finished surface of the object to be polished. Therefore, the hardness Hv of the ferromagnetic material particles is preferably low, and together with the result of FIG. 6, the Vickers hardness Hv is 300 or less, preferably about 70 to 200.

【0047】また、強磁性材粒子は、硬度が低いほど砥
粒の保持力が良くなり、研磨性能が向上するため、図9
に示すように、強磁性材粒子2の表面を強磁性材粒子よ
り硬度が低い材料5、例えば樹脂で被覆したコーティン
グ強磁性材粒子2Cを用いることが考えられる。このコ
ーティング材料5で強磁性材粒子2を被覆すると、図9
に示すように、砥粒3の食い込みが良くなり、被研磨物
20に対する研磨性能が向上する。また、強磁性材粒子
より硬度が低い被研磨物を研磨する場合に、コーティン
グ材料が被研磨物と硬度が同等か低ければコーティング
材料で被研磨物を傷つけることがないため、被研磨物に
強磁性材粒子で擦過痕を生じさせるおそれを解消できる
利点もある。このことは、例えば、プラスチックレンズ
等の柔らかな被研磨物の研磨などで有効である。したが
って、コーティング材料としては、このような観点か
ら、例えば、ポリアミド、ポリイミド、ポリエチレンな
どのポリオレフィン、ジエン系ポリマー、フッ素を含む
ポリマー等の熱可塑性樹脂、フェノール樹脂、エポキシ
樹脂、シリコーン系ポリマー等の熱硬化性樹脂などを例
示することができる。また、コーティング材料として
は、硬度が低い金属も採用することができ、例えば、蒸
着、CVD、スパッタリング等の方法でコーティングす
ることができる。
Further, the lower the hardness of the ferromagnetic material particles, the better the holding force of the abrasive grains and the better the polishing performance.
As shown in, it is possible to use the coated ferromagnetic material particles 2C in which the surface of the ferromagnetic material particles 2 is coated with a material 5 having a hardness lower than that of the ferromagnetic material particles, for example, a resin. When the ferromagnetic material particles 2 are coated with this coating material 5, the result shown in FIG.
As shown in FIG. 5, the abrasive grains 3 are better bited into, and the polishing performance for the object to be polished 20 is improved. Further, when polishing an object to be polished having a hardness lower than that of the ferromagnetic material particles, if the hardness of the coating material is equal to or lower than that of the object to be polished, the coating material does not damage the object to be polished. There is also an advantage that it is possible to eliminate the possibility that scratches will be generated by the magnetic material particles. This is effective, for example, in polishing a soft polishing object such as a plastic lens. Therefore, as the coating material, from this point of view, for example, polyolefin such as polyamide, polyimide, polyethylene, thermoplastic resin such as diene polymer, fluorine-containing polymer, phenol resin, epoxy resin, silicone polymer, etc. Curable resin etc. can be illustrated. Further, as the coating material, a metal having a low hardness can be adopted, and for example, it can be coated by a method such as vapor deposition, CVD and sputtering.

【0048】また、結合材は本発明にかかる磁気研磨方
法の混合磁性研磨材を構成する特徴となっている成分で
ある。結合材に要求される機能としては、砥粒を強磁性
材粒子に保持する機能、強磁性材粒子の磁気力を研磨圧
力として砥粒に伝える機能、砥粒の自生作用を促す循環
機能、砥粒と被研磨物、又は強磁性材粒子と被研磨物の
間の摩擦力を低減する潤滑機能、冷却機能、化学的研磨
機能などが挙げられる。
The binder is a characteristic component of the mixed magnetic polishing material of the magnetic polishing method according to the present invention. The functions required for the binder are the function of holding the abrasive particles to the ferromagnetic material particles, the function of transmitting the magnetic force of the ferromagnetic material particles to the abrasive particles as the polishing pressure, the circulating function of promoting the spontaneous action of the abrasive particles, and the abrasive material. Examples thereof include a lubrication function, a cooling function, and a chemical polishing function that reduce the frictional force between the particles and the object to be polished, or the ferromagnetic material particles and the object to be polished.

【0049】この結合材の融点について検討を行った。
次の表1に示す種類の結合材を用い、強磁性材粒子とし
て175μmの鋼球、砥粒として粒径4μmの酸化アル
ミニウムを用い、円管内面の研磨を行った。混合型磁性
研磨材の混合比は、強磁性材粒子:砥粒:結合材=50
容量%:25容量%:25容量%とした。その結果を図
10に示す。
The melting point of this binder was examined.
The inner surface of the circular pipe was polished using the binders of the types shown in Table 1 below, using 175 μm steel balls as the ferromagnetic material particles and aluminum oxide having a particle size of 4 μm as the abrasive grains. The mixing ratio of the mixed magnetic abrasives is as follows: ferromagnetic material particles: abrasive particles: binder = 50
% By volume: 25% by volume: 25% by volume. The result is shown in FIG.

【0050】[0050]

【表1】 [Table 1]

【0051】図10の棒グラフは研磨量を示し、折れ線
グラフは仕上げ面粗さを示している。常温で液体のGF
の研削油では、砥粒の保持力がないため、ほとんど研磨
できなかった。また、融点が65℃の金属石鹸MSも、
研磨中に溶けないため、ほとんど研磨できなかった。常
温で固体で研磨中に摩擦熱で溶融する融点を持った脂肪
酸FAI〜FAIIIが研磨量、仕上げ面とも良好な結果
が得られた。特に融点が45℃のラウリン酸(FAI)
を用いたときに、最適な研磨性能が得られた。油脂の融
点が高くなるにつれて研磨性能は次第に低下する傾向が
見られた。
The bar graph in FIG. 10 shows the polishing amount, and the line graph shows the finished surface roughness. GF that is liquid at room temperature
With the above grinding oil, almost no polishing was possible because there was no retention of the abrasive grains. Also, the metal soap MS having a melting point of 65 ° C.
Almost no polishing was possible because it did not melt during polishing. The fatty acids FAI to FAIII, which are solid at room temperature and have a melting point that melts due to frictional heat during polishing, were excellent in both the amount of polishing and the finished surface. Lauric acid (FAI) with a melting point of 45 ° C
Optimum polishing performance was obtained when using. The polishing performance tended to gradually decrease as the melting point of the oil and fat increased.

【0052】図10の結果より、結合材としては、常温
で固体、即ち、融点が30℃以上、65℃以下の油脂が
好ましいことが判明した。このことは、結合材が強磁性
材粒子と砥粒とを結合させている重要な機能を有してい
ることを示している。
From the results of FIG. 10, it was found that the binder is preferably a solid at room temperature, that is, an oil having a melting point of 30 ° C. or higher and 65 ° C. or lower. This indicates that the bonding material has an important function of bonding the ferromagnetic material particles and the abrasive particles.

【0053】更に、混合型磁性研磨材を構成する強磁性
材粒子、砥粒、結合材の混合比について検討を行った。
図11(a)は、強磁性材粒子として175μmの鋼
球、砥粒として粒径4μmの酸化アルミニウム、結合材
としてラウリン酸を用い、砥粒と結合材の混合体積比を
1:1に固定して、強磁性材粒子の混合比を変化させて
ステンレススチール管の内面を研磨したときの結果を示
している。棒グラフは研磨量を示し、折れ線グラフは仕
上げ面粗さを示している。
Further, the mixing ratio of the ferromagnetic material particles, the abrasive grains, and the binder, which compose the mixed magnetic abrasive, was examined.
FIG. 11 (a) shows a steel ball of 175 μm as a ferromagnetic material particle, aluminum oxide having a particle diameter of 4 μm as an abrasive grain, and lauric acid as a binder, and the mixing volume ratio of the abrasive grain and the binder is fixed to 1: 1. Then, the results of polishing the inner surface of the stainless steel tube by changing the mixing ratio of the ferromagnetic material particles are shown. The bar graph shows the polishing amount, and the line graph shows the finished surface roughness.

【0054】図11(a)に示すように、強磁性材粒子
が0容量%のときは、強磁性材粒子がないため、研磨圧
力が得られず、研磨できない。強磁性材粒子の割合が0
容量%から上がっていくと次第に研磨性能が増大し、5
0容量%のときに最も研磨量が多くなり、仕上げ面も良
好である。50容量%を超えると次第に研磨性能は低下
し、強磁性材粒子が100容量%のときは、砥粒がない
ためほとんど研磨されなくなる。
As shown in FIG. 11 (a), when the ferromagnetic material particles are 0% by volume, there is no ferromagnetic material particles, so that the polishing pressure cannot be obtained and the polishing cannot be performed. The ratio of ferromagnetic material particles is 0
The polishing performance gradually increases as the content increases from 5% to 5
When the content is 0% by volume, the polishing amount is the largest and the finished surface is good. When it exceeds 50% by volume, the polishing performance gradually decreases, and when the ferromagnetic material particles are 100% by volume, it is hardly polished because there are no abrasive grains.

【0055】また、図11(b)は強磁性材粒子は50
容量%に固定し、残り50容量%について砥粒と結合材
の混合比を変えて実験を行った結果を示している。実験
条件は図11(a)と同様である。
In FIG. 11B, the ferromagnetic material particles are 50
The results of experiments were performed by fixing the content to 50% by volume and changing the mixing ratio of the abrasive grains and the binder for the remaining 50% by volume. The experimental conditions are the same as those in FIG.

【0056】図11(b)に示すように、砥粒混合比が
0容量%のときはほとんど研磨されない。砥粒の混合比
を大きくしていくにしたがって研磨性能は向上し、25
容量%のとき(砥粒:結合材=1:1)に最も研磨量が
多く、仕上げ面も良好であった。25容量%を超える
と、次第に研磨性能が低下し、50容量%、すなわち、
結合材が0容量%のときは、結合材による砥粒の保持力
がなくなるため、ほとんど研磨されなくなる。
As shown in FIG. 11 (b), when the mixing ratio of the abrasive grains is 0% by volume, almost no polishing is performed. The polishing performance improves as the mixing ratio of abrasive grains increases, and
At the volume% (abrasive grains: binder = 1: 1), the polishing amount was the largest and the finished surface was good. When it exceeds 25% by volume, the polishing performance is gradually reduced to 50% by volume, that is,
When the content of the binder is 0% by volume, the holding force of the abrasive grains by the binder is lost, and the abrasive is hardly polished.

【0057】これらの結果より、混合型磁性研磨材の混
合比は、強磁性材粒子:砥粒:結合材=50容量%:2
5容量%:25容量%を中心として、強磁性材粒子:砥
粒:結合材=40〜70容量%:15〜35容量%:1
5〜35容量%の範囲が適当であることが判明した。
From these results, the mixing ratio of the mixed magnetic abrasive is as follows: ferromagnetic material particles: abrasive particles: binder = 50% by volume: 2
Focusing on 5% by volume: 25% by volume, ferromagnetic material particles: abrasive grains: binder = 40 to 70% by volume: 15 to 35% by volume:
It has been found that a range of 5 to 35% by volume is suitable.

【0058】この強磁性材粒子:砥粒:結合材=50容
量%:25容量%:25容量%の混合比が最も好ましい
という理由は、次のように考えられる。
The reason why the mixing ratio of this ferromagnetic material particle: abrasive particle: binding material = 50% by volume: 25% by volume: 25% by volume is most preferable is considered as follows.

【0059】強磁性材粒子が球形であると、強磁性材粒
子は、磁力線に沿って磁気抵抗を少なくするため、図1
2に示すような単純立方構造で配列することが観察され
ている。強磁性材粒子の半径をaとすると、図12に示
す立方体中の強磁性材粒子の体積は4πa/3、立方
体の体積は8aであるから、強磁性材粒子の図12に
示す立方体に占める体積比は、4/3πa/8a
π/6≒0.5236容量%となる。残りの約48容量
%が砥粒と結合材が占めることになる。強磁性材粒子間
の空隙で砥粒がある程度自由に動き回れなければならな
いため、砥粒も強磁性材粒子間の空隙に単純立方構造で
充填されると仮定すると、砥粒量は、48容量%×0.
52=25容量%、結合材は残りの23容量%となる。
この値は、実験によって得られた最適値、強磁性材粒
子:砥粒:結合材=50容量%:25容量%:25容量
%の混合比にほぼ一致する。
When the ferromagnetic material particles have a spherical shape, the ferromagnetic material particles reduce the magnetic resistance along the lines of magnetic force.
It has been observed to arrange in a simple cubic structure as shown in 2. If the radius of the ferromagnetic material particles is a, 12 volumes of ferromagnetic material particles in the cube shown in the 4πa 3/3, because the volume of the cube is 8a 3, cube shown in Figure 12 of ferromagnetic material particles The volume ratio of 4 / 3πa 3 / 8a 3 =
It becomes π / 6≈0.5236% by volume. The remaining about 48% by volume will be occupied by the abrasive grains and the binder. Since it is necessary for the abrasive grains to move around freely in the voids between the ferromagnetic material particles, assuming that the abrasive grains are also filled in the voids between the ferromagnetic material particles with a simple cubic structure, the amount of the abrasive grains is 48% by volume. × 0.
52 = 25% by volume, the binder is the remaining 23% by volume.
This value is almost the same as the optimum value obtained by the experiment, that is, the mixing ratio of ferromagnetic material particles: abrasive particles: bonding material = 50% by volume: 25% by volume: 25% by volume.

【0060】本発明にかかる磁気研磨方法では、混合型
磁性研磨材の混合比にはこのように最適な範囲が存在す
る。しかし、被研磨物は回転や振動等を与えられるた
め、回転運動の遠心力等で砥粒と結合材は研磨中に飛散
しやすい。そのため、研磨中に混合型磁性研磨材の混合
比が変化することから、混合型磁性研磨材の混合比を最
適な範囲を保つように、研磨中に砥粒と結合材のいずれ
か一方又は両方を適宜補充するようにすることが好まし
い。
In the magnetic polishing method according to the present invention, there is such an optimum range for the mixing ratio of the mixed magnetic polishing material. However, since the object to be polished is subjected to rotation, vibration, etc., the abrasive grains and the binder are likely to be scattered during polishing due to the centrifugal force of the rotary motion. Therefore, since the mixing ratio of the mixed magnetic abrasive changes during polishing, one or both of the abrasive grains and the binder may be maintained during polishing so as to keep the mixing ratio of the mixed magnetic abrasive in the optimum range. Is preferably replenished appropriately.

【0061】また、研磨では、加工が進むにつれて被研
磨物の仕上げ面粗さは向上してくるが、仕上げ面粗さに
応じた最適な砥粒径及び強磁性材粒子径に交換すると、
より仕上げ面が向上する。そのため、研磨中に、混合型
磁性研磨材の一部又は全部を入れ替えることが好まし
い。本発明にかかる磁気研磨方法では、混合型磁性研磨
材を入れ替えるのは容易である。励磁コイルの電源をO
FFにすると、強磁性材粒子の磁気吸引力がなくなるた
め、被研磨物の運動や外部磁気吸引装置などで磁性研磨
材を容易に除去することができる。その後、電磁石をO
Nしながらより仕上げ面にあった小さめの強磁性材粒
子、砥粒、結合材を供給し、再び研磨することで、仕上
げ面にあった磁性研磨材を入れ替えることができ、良好
な仕上げ面を得ることができる。研磨中に、磁性研磨材
の入れ替えを複数回行っても勿論良い。
Further, in the polishing, the finished surface roughness of the object to be polished is improved as the processing progresses, but when the abrasive grain diameter and the ferromagnetic material particle diameter are changed to the optimum ones according to the finished surface roughness,
The finished surface is improved. Therefore, it is preferable to replace part or all of the mixed magnetic abrasive during polishing. In the magnetic polishing method according to the present invention, it is easy to replace the mixed magnetic polishing material. Turn on the excitation coil power
When it is set to FF, the magnetic attraction force of the ferromagnetic material particles disappears, so that the magnetic abrasive material can be easily removed by the movement of the object to be polished or an external magnetic attraction device. After that, turn on the electromagnet
While supplying the smaller ferromagnetic material particles, abrasive grains, and binder that are more suitable to the finished surface and polishing again, the magnetic abrasive material that was on the finished surface can be replaced, and a good finished surface can be obtained. Obtainable. Of course, the magnetic abrasive may be replaced a plurality of times during polishing.

【0062】また、混合型磁性研磨材は、強磁性材粒
子、砥粒、結合材以外の成分を研磨の目的に応じて適宜
配合することは差しつかえない。
In the mixed magnetic abrasive, components other than the ferromagnetic material particles, the abrasive grains, and the binder may be appropriately blended according to the purpose of polishing.

【0063】本発明にかかる磁気研磨方法では、上述し
た研磨条件を組み合わせることによって、研磨性能を従
来より向上させることができる。例えば、SK3の円管
外面を、強磁性材粒子として粒径80〜100μmの不
定形状78Niを50容量%、砥粒として粒径6〜7μ
mの酸化クロムを25容量%、結合材としてパルミチン
酸を25容量%の混合比で用いた混合型磁性研磨材を用
いた場合、一工程の研磨で初期粗さ5〜8μmRyを
0.08μmRyの鏡面に仕上げることができた。
In the magnetic polishing method according to the present invention, the polishing performance can be improved more than before by combining the above-mentioned polishing conditions. For example, on the outer surface of the circular tube of SK3, 50% by volume of irregular shape 78Ni having a particle size of 80 to 100 μm as ferromagnetic material particles and a particle size of 6 to 7 μ as abrasive grains are used.
In the case of using a mixed type magnetic abrasive containing 25% by volume of chromium oxide and 25% by volume of palmitic acid as a binder, the initial roughness of 5 to 8 μmRy was 0.08 μmRy in one step of polishing. I was able to finish it to a mirror surface.

【0064】また、SUS304の円管内面を、強磁性
材粒子として粒径175μmの鋼球を50容量%、砥粒
として粒径4μmの酸化アルミニウムを25容量%、結
合材としてラウリン酸を25容量%の混合比で用いた混
合型磁性研磨材を用いた場合、一工程の研磨で初期粗さ
10〜15μmRyを0.9μmRyに仕上げることが
できた。
On the inner surface of the circular tube of SUS304, 50% by volume of steel balls having a particle size of 175 μm as ferromagnetic material particles, 25% by volume of aluminum oxide having a particle size of 4 μm as abrasive grains, and 25% by volume of lauric acid as a binder. When the mixed magnetic abrasive used at a mixing ratio of 10% was used, the initial roughness of 10 to 15 μmRy could be finished to 0.9 μmRy by one-step polishing.

【0065】本発明にかかる磁気研磨方法は、例えば、
ステンレススチール製のパイプや瓶などの内面の研磨、
金属管や棒の外面の研磨、金型の研磨、プラスチックレ
ンズを製造するためのガラス型の研磨、プラスチックレ
ンズやガラスレンズの研磨等複雑形状や普通の工具で研
磨できない面の研磨に有効である。
The magnetic polishing method according to the present invention includes, for example,
Polishing the inner surface of stainless steel pipes and bottles,
It is effective for polishing the outer surface of metal tubes and rods, polishing of molds, polishing of glass molds for manufacturing plastic lenses, polishing of plastic lenses and glass lenses, and polishing of surfaces that cannot be polished by ordinary tools. .

【0066】次に、プラスチックレンズ等の非磁性材料
の研磨に適した本発明の磁気研磨装置について図13を
参照して説明する。この磁気研磨装置30は、垂直方向
に略コ字状のヨーク31が配置されている。このヨーク
31に励磁コイル13が巻回され、この励磁コイルに電
力を供給する電源は電力を変えることができる可変電源
33となっている。可変電源33からの電力が励磁コイ
ル13に供給されて直流電磁石34を構成するようにな
っており、可変電源33で直流電磁石34のパワーを調
節することができるようになっている。また、ヨーク3
1の上側部分の上方に、垂直下向きのスピンドル35が
回転可能に配置され、このスピンドルに磁性材料で構成
された円柱状の回転磁極36が垂直方向に取り付けら
れ、この回転磁極36の側面がヨーク31上側部分の端
面に近接又は当接し、回転磁極の下端面がヨークの下側
部分の磁極面37と対向する磁極面36aになってい
る。また、図示しない被研磨物支持装置が設けられ、ヨ
ーク下側磁極の上端面に被研磨物20を配置して、被研
磨物20に図示しない加振機を介して振動や揺動等の水
平方向の運動を与えることができるようになっている。
Next, a magnetic polishing apparatus of the present invention suitable for polishing a non-magnetic material such as a plastic lens will be described with reference to FIG. In this magnetic polishing device 30, a substantially U-shaped yoke 31 is arranged in the vertical direction. The exciting coil 13 is wound around the yoke 31, and the power source for supplying power to the exciting coil is a variable power source 33 capable of changing the power. The power from the variable power source 33 is supplied to the exciting coil 13 to configure the DC electromagnet 34, and the power of the DC electromagnet 34 can be adjusted by the variable power source 33. Also, the yoke 3
A vertically downward spindle 35 is rotatably arranged above the upper portion of the first magnet 1, and a cylindrical rotating magnetic pole 36 made of a magnetic material is vertically attached to the spindle, and the side surface of the rotating magnetic pole 36 is a yoke. Reference numeral 31 is a magnetic pole surface 36a that is close to or abuts the end surface of the upper portion, and the lower end surface of the rotating magnetic pole faces the magnetic pole surface 37 of the lower portion of the yoke. Further, an object support device (not shown) is provided, the object 20 is arranged on the upper end surface of the lower magnetic pole of the yoke, and the object 20 is horizontally moved by a vibrator (not shown) such as vibration or rocking. It is possible to give directional movement.

【0067】また、ヨーク31には磁束数を検出する磁
束数測定器39が配置され、図示しない制御装置によ
り、磁束数が減少したときは可変電源33から電磁石3
4への電力供給を増大させ、磁束数が増大したときは可
変電源33から電磁石34への電力供給を減少させるよ
うに制御するようになっている。
Further, a magnetic flux number measuring device 39 for detecting the magnetic flux number is arranged on the yoke 31, and a controller (not shown) controls the variable power source 33 to the electromagnet 3 when the magnetic flux number decreases.
4 is increased, and when the number of magnetic fluxes is increased, the variable power source 33 is controlled so as to decrease the power supply to the electromagnet 34.

【0068】更に、回転磁極36の磁極面36aと被研
磨物との間の空隙に強磁性材、砥粒及び結合材を供給す
る磁性研磨材供給装置40が設けられている。
Further, there is provided a magnetic abrasive material supplying device 40 for supplying a ferromagnetic material, abrasive grains and a bonding material into the space between the magnetic pole surface 36a of the rotating magnetic pole 36 and the object to be polished.

【0069】この装置でプラスチックレンズなどの非磁
性材料の被研磨物を研磨するときは、被研磨物20を被
研磨物支持装置に取り付けて、被研磨物20を回転磁極
36の磁極面36aとヨーク31下部の磁極37間の空
隙部に配置し、可変電源33をONにして電磁石34か
ら磁界を発生させる。そして、磁性研磨材供給装置40
から所定の配合比で強磁性材、砥粒、及び結合材を供給
し、被研磨物20に運動を与えると共に、スピンドル3
5を回転させる。これにより、強磁性材粒子2が結合材
の溶融に伴って磁力線に沿ってブラシ状に整列し、磁気
ブラシ6として機能する。この磁気ブラシ6はスピンド
ル35の回転に伴って回転し、被研磨物20の運動と併
せて被研磨物20との間に相対運動が発生し、磁気ブラ
シ状の強磁性材粒子に対して結合材で保持されている砥
粒によって、被研磨物20が研磨される。
When polishing an object to be polished of a non-magnetic material such as a plastic lens with this apparatus, the object to be polished 20 is attached to the object supporting device, and the object to be polished 20 serves as the magnetic pole surface 36a of the rotary magnetic pole 36. It is arranged in the space between the magnetic poles 37 below the yoke 31, and the variable power supply 33 is turned on to generate a magnetic field from the electromagnet 34. Then, the magnetic abrasive material supply device 40
The ferromagnetic material, the abrasive grains, and the bonding material are supplied from a predetermined mixing ratio to give movement to the object to be polished 20, and the spindle 3
Rotate 5. As a result, the ferromagnetic material particles 2 are arranged in a brush shape along the lines of magnetic force as the binder melts, and function as the magnetic brush 6. The magnetic brush 6 rotates with the rotation of the spindle 35, and a relative motion occurs with the object to be polished 20 together with the motion of the object to be polished 20, and the magnetic brush 6 is coupled to the ferromagnetic material particles in the shape of the magnetic brush. The object to be polished 20 is polished by the abrasive grains held by the material.

【0070】この磁気研磨装置における磁束の流れL
は、図13に示すように、ヨーク31、回転磁極36、
強磁性材粒子2、下部磁極37の順になっており、強磁
性材粒子2と下部磁極37の間の非磁性材の被研磨物2
0が磁気抵抗となっている。
Magnetic flux flow L in this magnetic polishing apparatus
13, as shown in FIG. 13, a yoke 31, a rotating magnetic pole 36,
The ferromagnetic material particles 2 and the lower magnetic pole 37 are arranged in this order, and the non-magnetic material to be polished 2 between the ferromagnetic material particles 2 and the lower magnetic pole 37 is formed.
0 is the magnetic resistance.

【0071】プラスチックレンズのように、加工位置に
よって厚みが異なる非磁性材の被研磨物では、被研磨物
の厚さが変化すると、厚いところでは磁気抵抗が増大し
て磁束数が減少し、強磁性材粒子の被研磨物への押し付
け力が弱くなって砥粒の食い込みが少なくなる結果、研
磨性能が悪くなる。そのため、被研磨物の厚みが異なる
部分では仕上げが異なることになり、研磨ムラが生じる
ことになる。
In an object to be polished made of a non-magnetic material such as a plastic lens, the thickness of which varies depending on the processing position, when the thickness of the object to be polished changes, the magnetic resistance increases and the number of magnetic flux decreases at a thick portion, resulting in a strong magnetic field. The pressing force of the magnetic material particles against the object to be polished is weakened and the abrasive grains are less bite, resulting in poor polishing performance. As a result, the finishes differ in the parts having different thicknesses, and uneven polishing occurs.

【0072】本発明の磁気研磨装置は、磁束の変化を検
出する磁束数測定器39により磁束数の変化が検出され
ると可変電源33からの電磁石34への電力を調整して
磁束数が一定になるように構成されている。そのため、
被研磨物20の厚い部分を研磨するときは、磁束数が減
少するため、電磁石34への電力を増加させて研磨力を
増加させ、被研磨物20の厚さの薄い部分を研磨すると
きは、磁束数が増加するため、電磁石34への電力供給
を減少させて研磨力を減少させることができるため、被
研磨物20の厚さによらず、一定の研磨圧力で均一に研
磨することができ、研磨ムラが生じにくくなっている。
In the magnetic polishing apparatus of the present invention, when the change of the magnetic flux number is detected by the magnetic flux number measuring device 39 for detecting the change of the magnetic flux, the electric power from the variable power source 33 to the electromagnet 34 is adjusted so that the magnetic flux number is constant. Is configured to be. for that reason,
When polishing a thick portion of the object to be polished 20, the number of magnetic fluxes decreases. Therefore, when the electric power to the electromagnet 34 is increased to increase the polishing force, and when polishing a thin portion of the object to be polished 20, Since the number of magnetic fluxes increases, the power supply to the electromagnet 34 can be reduced to reduce the polishing force. Therefore, regardless of the thickness of the workpiece 20, the polishing can be performed uniformly with a constant polishing pressure. It is possible, and uneven polishing is less likely to occur.

【0073】そのため、本発明の磁気研磨装置30は、
プラスチック、ガラス、ステンレススチール、黄銅等の
非磁性材料で構成され、厚さが部分的に異なるレンズ、
レンズ製造用ガラス型、金型等の被研磨物に対する研磨
に好適に用いることができる。
Therefore, the magnetic polishing apparatus 30 of the present invention is
Lens made of non-magnetic material such as plastic, glass, stainless steel, brass, etc., with partially different thickness,
It can be suitably used for polishing an object to be polished such as a glass mold for lens production and a metal mold.

【0074】また、磁性研磨材供給装置40を設けてい
るので、研磨中に失われた砥粒や結合材を供給し、上述
した磁性研磨材の最適の範囲の混合比を保つようにする
ようにすることができる。
Further, since the magnetic abrasive supply device 40 is provided, the abrasive particles and the binder lost during polishing are supplied so that the mixing ratio in the optimum range of the magnetic abrasive described above is maintained. Can be

【0075】更に、仕上げ面の粗さに応じて磁性研磨材
を交換する場合も、電磁石34の可変電源33をOFF
にすると、磁性研磨材はスピンドル35の回転や外部吸
引装置により容易に除去できると共に、新しい磁性研磨
材の供給も、磁性研磨材供給装置40で速やかに行うこ
とができる。
Further, even when the magnetic polishing material is replaced according to the roughness of the finished surface, the variable power source 33 of the electromagnet 34 is turned off.
In this case, the magnetic abrasive can be easily removed by the rotation of the spindle 35 and the external suction device, and new magnetic abrasive can be quickly supplied by the magnetic abrasive supply device 40.

【0076】なお、本発明の磁気研磨装置は、通常の強
磁性材と砥粒とを一体化させた磁性砥粒を用いることが
でき、磁性研磨材の種類に制限はない。
The magnetic polishing apparatus of the present invention can use magnetic abrasive grains in which an ordinary ferromagnetic material and abrasive grains are integrated, and the type of magnetic abrasive material is not limited.

【0077】また、上述した磁気研磨装置では、ヨーク
の下側部分は被加工物を受けるように広くなっている
が、通常と同様に回転磁極と対向するような磁極として
も勿論良い。
Further, in the above-mentioned magnetic polishing apparatus, the lower portion of the yoke is wide so as to receive the workpiece, but it is of course possible to form the magnetic pole so as to face the rotating magnetic pole as usual.

【0078】[0078]

【発明の効果】本発明の磁気研磨方法によれば、磁性研
磨材として強磁性材粒子、砥粒及び結合材を用いる磁気
研磨方法における研磨量や仕上げ面といった研磨性能を
向上させることができた。
According to the magnetic polishing method of the present invention, the polishing performance such as the polishing amount and the finished surface in the magnetic polishing method using the ferromagnetic material particles, the abrasive grains and the binder as the magnetic polishing material can be improved. .

【0079】また、本発明の磁気研磨装置は、厚さが部
分的に異なる非磁性材料の被研磨物を一定の研磨圧力で
研磨でき、厚さによらず均一に研磨できる。
Further, the magnetic polishing apparatus of the present invention can polish an object to be polished of a non-magnetic material having partially different thicknesses with a constant polishing pressure, and can uniformly polish regardless of the thickness.

【図面の簡単な説明】[Brief description of drawings]

【図1】磁性研磨材を用いる磁気研磨方法を模式的に示
すもので、(a)は、円筒外面の研磨、(b)は、円筒
内面の研磨の場合を示している。
FIG. 1 schematically shows a magnetic polishing method using a magnetic abrasive, where (a) shows polishing of the outer surface of a cylinder and (b) shows polishing of the inner surface of the cylinder.

【図2】混合型磁性研磨材を用いる磁気研磨方法の研磨
機構を説明する模式図である。
FIG. 2 is a schematic diagram illustrating a polishing mechanism of a magnetic polishing method using a mixed magnetic abrasive.

【図3】砥粒と強磁性材粒子の粒径比を変えた場合の研
磨量を示すグラフであり、(a)は円管外面の研磨、
(b)は円管内面の研磨の場合を示している。
FIG. 3 is a graph showing the polishing amount when the particle diameter ratio of abrasive grains and ferromagnetic material particles is changed, and (a) is the polishing of the outer surface of the circular pipe,
(B) shows the case of polishing the inner surface of the circular pipe.

【図4】砥粒の粒径が大きくなると強磁性材粒子から伝
達される研磨力が少なくなることを説明する模式図であ
る。
FIG. 4 is a schematic view for explaining that the polishing force transmitted from the ferromagnetic material particles decreases as the particle size of the abrasive particles increases.

【図5】砥粒の粒径が被研磨材の初期表面粗さより小さ
いと研磨できないことを説明する模式図である。
FIG. 5 is a schematic diagram illustrating that polishing cannot be performed if the grain size of the abrasive grains is smaller than the initial surface roughness of the material to be polished.

【図6】強磁性材粒子の材質と形状及び砥粒の材質を変
えた場合の研磨後の表面粗さを示すグラフである。
FIG. 6 is a graph showing the surface roughness after polishing when the material and shape of the ferromagnetic material particles and the material of the abrasive grains are changed.

【図7】強磁性材粒が不定形の場合と球形の場合の研磨
機構を説明する模式図である。
FIG. 7 is a schematic diagram illustrating a polishing mechanism when the ferromagnetic material grains have an irregular shape and a spherical shape.

【図8】強磁性材粒子の硬度を変えた場合の研磨量と表
面粗さを示すグラフである。
FIG. 8 is a graph showing the polishing amount and the surface roughness when the hardness of the ferromagnetic material particles is changed.

【図9】強磁性材粒子の表面をコーティングしたコーテ
ィング強磁性材粒子による研磨の機構を説明する模式図
である。
FIG. 9 is a schematic diagram for explaining the mechanism of polishing by the coated ferromagnetic material particles in which the surfaces of the ferromagnetic material particles are coated.

【図10】融点の異なる結合材を用いて円管内面の研磨
を行った場合の研磨量と表面粗さを示すグラフである。
FIG. 10 is a graph showing the amount of polishing and the surface roughness when the inner surface of a circular pipe is polished using binders having different melting points.

【図11】混合型磁性研磨材の混合比を変えて研磨した
ときの研磨量と表面粗さを示すグラフであり、(a)は
強磁性材粒子の混合比、(b)は砥粒の混合比を変えた
場合を示している。
FIG. 11 is a graph showing a polishing amount and a surface roughness when polishing is performed by changing a mixing ratio of a mixed magnetic abrasive, (a) is a mixing ratio of ferromagnetic material particles, and (b) is an abrasive grain. The case where the mixing ratio is changed is shown.

【図12】強磁性材粒子が磁力線に沿って単純立方構造
で配列した状態を示す模式図である。
FIG. 12 is a schematic diagram showing a state in which ferromagnetic material particles are arranged in a simple cubic structure along lines of magnetic force.

【図13】本発明の磁気研磨装置の構成を示す構成図で
ある。
FIG. 13 is a configuration diagram showing a configuration of a magnetic polishing apparatus of the present invention.

【図14】従来の磁気研磨方法で用いられていた磁気砥
粒の構造を示す断面図である。
FIG. 14 is a sectional view showing a structure of magnetic abrasive grains used in a conventional magnetic polishing method.

【符号の説明】[Explanation of symbols]

1…混合型磁性研磨材、2…強磁性材粒子、3…砥粒、
4…結合材、10…ヨーク、11,12…磁極、13…
励磁コイル、14,15…電磁石、20…被研磨物、3
0…磁気研磨装置、31…ヨーク、33…可変電源、3
4…電磁石、35…スピンドル、36…回転磁極、36
a…磁極面、37…下部磁極、39…磁束数測定器、4
0…磁性研磨材供給装置
1 ... Mixed magnetic abrasive, 2 ... Ferromagnetic material particles, 3 ... Abrasive particles,
4 ... Binder, 10 ... Yoke, 11, 12 ... Magnetic pole, 13 ...
Excitation coil, 14, 15 ... Electromagnet, 20 ... Object to be polished, 3
0 ... Magnetic polishing device, 31 ... Yoke, 33 ... Variable power supply, 3
4 ... Electromagnet, 35 ... Spindle, 36 ... Rotating magnetic pole, 36
a ... magnetic pole surface, 37 ... lower magnetic pole, 39 ... magnetic flux number measuring device, 4
0 ... Magnetic abrasive supply device

フロントページの続き (72)発明者 宮沢 信 長野県諏訪市大和3丁目3番5号 セイコ ーエプソン株式会社内 Fターム(参考) 3C058 AA07 AA09 AA12 AB01 AB04 CA01 CA03 CA04 CA06 CA07 CB01 CB03 CB10 DA02 DA11Continued front page    (72) Inventor Shin Miyazawa             Seiko, 3-3-3 Yamato, Suwa City, Nagano Prefecture             -In Epson Corporation F-term (reference) 3C058 AA07 AA09 AA12 AB01 AB04                       CA01 CA03 CA04 CA06 CA07                       CB01 CB03 CB10 DA02 DA11

Claims (10)

【特許請求の範囲】[Claims] 【請求項1】 強磁性材粒子、砥粒及び結合材を主成分
として用いた混合型磁性研磨材を磁気吸引力で被研磨物
に圧接させながら、これらの混合型磁性研磨材と被研磨
物とを相対運動させることにより、前記被研磨物を研磨
する磁気研磨方法において、 前記強磁性材粒子が、不定形状粒子であることを特徴と
する磁気研磨方法。
1. A mixed magnetic polishing material containing ferromagnetic material particles, abrasive grains, and a binder as main components while being pressed against the object to be polished by a magnetic attractive force, and the mixed magnetic abrasive material and the object to be polished. In the magnetic polishing method for polishing the object to be polished by relatively moving and, the ferromagnetic material particles are irregularly shaped particles.
【請求項2】 強磁性材粒子、砥粒及び結合材を主成分
として用いた混合型磁性研磨材を磁気吸引力で被研磨物
に圧接させながら、これらの混合型磁性研磨材と被研磨
物とを相対運動させることにより、前記被研磨物を研磨
する磁気研磨方法において、 前記強磁性材粒子のビッカース硬度Hvが、300以下
であることを特徴とする磁気研磨方法。
2. A mixed magnetic polishing material containing ferromagnetic material particles, abrasive grains and a binder as main components while being pressed against the object to be polished by a magnetic attractive force, and the mixed magnetic abrasive material and the object to be polished. In the magnetic polishing method for polishing the object to be polished by relatively moving and, the Vickers hardness Hv of the ferromagnetic material particles is 300 or less.
【請求項3】 強磁性材粒子、砥粒及び結合材を主成分
として用いた混合型磁性研磨材を磁気吸引力で被研磨物
に圧接させながら、これらの混合型磁性研磨材と被研磨
物とを相対運動させることにより、前記被研磨物を研磨
する磁気研磨方法において、 前記強磁性材粒子が、該強磁性材粒子より硬度が低い材
料で被覆されていることを特徴とする磁気研磨方法。
3. A mixed magnetic abrasive containing ferromagnetic material particles, abrasive grains, and a binder as main components while being pressed against the object to be polished by a magnetic attraction force. In a magnetic polishing method for polishing the object to be polished by relatively moving and, the ferromagnetic material particles are coated with a material having a hardness lower than that of the ferromagnetic material particles. .
【請求項4】 強磁性材粒子、砥粒及び結合材を主成分
として用いた混合型磁性研磨材を磁気吸引力で被研磨物
に圧接させながら、これらの混合型磁性研磨材と被研磨
物とを相対運動させることにより、前記被研磨物を研磨
する磁気研磨方法において、 前記結合材が、融点が30〜65℃の油脂であることを
特徴とする磁気研磨方法。
4. A mixed magnetic polishing material containing ferromagnetic material particles, abrasive grains, and a binder as main components while being pressed against the object to be polished by a magnetic attractive force, and the mixed magnetic abrasive material and the object to be polished. In the magnetic polishing method for polishing the object to be polished by relatively moving and, the binder is an oil or fat having a melting point of 30 to 65 ° C., wherein
【請求項5】 請求項4記載の磁気研磨方法において、 前記結合材が、ラウリン酸であることを特徴とする磁気
研磨方法。
5. The magnetic polishing method according to claim 4, wherein the binder is lauric acid.
【請求項6】 強磁性材粒子、砥粒及び結合材を主成分
として用いた混合型磁性研磨材を磁気吸引力で被研磨物
に圧接させながら、これらの混合型磁性研磨材と被研磨
物とを相対運動させることにより、前記被研磨物を研磨
する磁気研磨方法において、 前記混合型磁性研磨材が、前記強磁性材粒子が40〜7
0容量%、前記砥粒が15〜35容量%、前記結合材が
15〜35容量%の混合比で構成されていることを特徴
とする磁気研磨方法。
6. A mixed magnetic abrasive containing ferromagnetic material particles, abrasive grains, and a binder as main components while being pressed against the object to be polished by a magnetic attraction force, and the mixed magnetic abrasive and the object to be polished. In the magnetic polishing method for polishing the object to be polished by relatively moving and, the mixed magnetic abrasive has 40 to 7 ferromagnetic particles.
A magnetic polishing method characterized in that the mixing ratio is 0% by volume, the abrasive grains are 15 to 35% by volume, and the binder is 15 to 35% by volume.
【請求項7】 請求項6記載の磁気研磨方法において、 研磨中に前記混合型磁性研磨材の混合比の範囲を維持す
るように各成分を供給することを特徴とする磁気研磨方
法。
7. The magnetic polishing method according to claim 6, wherein each component is supplied so as to maintain the range of the mixing ratio of the mixed magnetic abrasive during polishing.
【請求項8】 強磁性材粒子、砥粒及び結合材を主成分
として用いた混合型磁性研磨材を磁気吸引力で被研磨物
に圧接させながら、これらの混合型磁性研磨材と被研磨
物とを相対運動させることにより、前記被研磨物を研磨
する磁気研磨方法において、 研磨中に前記磁性研磨材の一部又は全部を交換すること
を特徴とする磁性研磨方法。
8. A mixed magnetic polishing material containing ferromagnetic material particles, abrasive grains and a binder as main components while being pressed against the object to be polished by a magnetic attractive force, and the mixed magnetic abrasive material and the object to be polished. In the magnetic polishing method for polishing the object to be polished by relatively moving and, a part or all of the magnetic polishing material is exchanged during polishing.
【請求項9】 磁気回路を構成するヨークと電磁石、及
び該電磁石へ電力を供給する電源を備え、前記磁気回路
中の空隙部に配置した被研磨物に磁性研磨材を磁気吸引
力で圧接させ、これらの被研磨物と磁性研磨材とを相対
運動させて前記被研磨物を研磨する磁気研磨装置におい
て、 前記磁気回路の磁束数の変化を検出する磁束数測定器を
備え、この磁束数測定器により磁束数の変化に応じて前
記電源の電力を変化させて、前記磁気回路の磁束数を保
つように制御することを特徴とする磁気研磨装置。
9. A yoke comprising a magnetic circuit, an electromagnet, and a power supply for supplying electric power to the electromagnet, the magnetic polishing material being pressed against the object to be polished arranged in the void portion of the magnetic circuit by a magnetic attraction force. In the magnetic polishing apparatus for polishing the object to be polished by relatively moving the object to be polished and the magnetic abrasive, a magnetic flux number measuring device for detecting a change in the number of magnetic flux of the magnetic circuit is provided, and the magnetic flux number is measured. The magnetic polishing apparatus is characterized in that the electric power of the power source is changed by a device according to the change in the number of magnetic fluxes, and control is performed so as to maintain the number of magnetic fluxes in the magnetic circuit.
【請求項10】 請求項9記載の磁気研磨装置におい
て、 前記磁性研磨材を構成する成分の一部又は全部を前記被
研磨物に供給する供給装置を備えることを特徴とする磁
気研磨装置。
10. The magnetic polishing apparatus according to claim 9, further comprising a supply device that supplies a part or all of the components constituting the magnetic polishing material to the object to be polished.
JP10237466A 1998-08-24 1998-08-24 Magnetic polishing method and magnetic polishing apparatus Withdrawn JP2000061810A (en)

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Publication Number Publication Date
JP2000061810A true JP2000061810A (en) 2000-02-29

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ID=17015759

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WO2005005099A1 (en) * 2003-07-15 2005-01-20 Hoya Corporation Method and device for manufacturing substrate for magnetic disk, and method of manufacturing magnetic disk
JP2009255274A (en) * 2008-03-26 2009-11-05 Fuji Xerox Co Ltd Method of renewing surface of resin-made exterior finishing material, and business equipment having resin-made exterior finishing material with surface renewed by the method
CN105514247A (en) * 2014-09-25 2016-04-20 上海六晶科技股份有限公司 Surface treatment method of LED electronic packaging chip
CN106938410A (en) * 2017-04-17 2017-07-11 辽宁科技大学 The burnishing device and its method of big L/D ratio internal surface of elongated tube
CN111922815A (en) * 2020-06-10 2020-11-13 南通宝得利机械制造有限公司 Low-dust efficient metal plate polishing device
CN113649860A (en) * 2021-08-23 2021-11-16 益路恒丰衡水沥青科技有限公司 Device and method for precisely machining inner surface of variable-cross-section waveguide pipe of rubber powder activation equipment

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2005005099A1 (en) * 2003-07-15 2005-01-20 Hoya Corporation Method and device for manufacturing substrate for magnetic disk, and method of manufacturing magnetic disk
US7175511B2 (en) 2003-07-15 2007-02-13 Hoya Corporation Method of manufacturing substrate for magnetic disk, apparatus for manufacturing substrate for magnetic disk, and method of manufacturing magnetic disk
JP2009255274A (en) * 2008-03-26 2009-11-05 Fuji Xerox Co Ltd Method of renewing surface of resin-made exterior finishing material, and business equipment having resin-made exterior finishing material with surface renewed by the method
CN105514247A (en) * 2014-09-25 2016-04-20 上海六晶科技股份有限公司 Surface treatment method of LED electronic packaging chip
CN106938410A (en) * 2017-04-17 2017-07-11 辽宁科技大学 The burnishing device and its method of big L/D ratio internal surface of elongated tube
CN111922815A (en) * 2020-06-10 2020-11-13 南通宝得利机械制造有限公司 Low-dust efficient metal plate polishing device
CN113649860A (en) * 2021-08-23 2021-11-16 益路恒丰衡水沥青科技有限公司 Device and method for precisely machining inner surface of variable-cross-section waveguide pipe of rubber powder activation equipment
CN113649860B (en) * 2021-08-23 2022-05-24 益路恒丰衡水沥青科技有限公司 Device and method for precisely machining inner surface of variable-cross-section waveguide pipe of rubber powder activation equipment

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