JP2000057515A - Manufacturing method of magnetic head - Google Patents

Abstract

(57) [Summary] [PROBLEMS] To form a depth of a magnetic gap with high accuracy. SOLUTION: A front gap 1 in a magnetic core 8 is provided.
A winding groove 29 serving as a concave portion 5a that forms the front butting surface 11 and the rear butting surface 12 that constitutes 3 is formed with reference to the positioning notch 21b formed in the substrate 21.
Further, the opposing surface 9 is determined based on the positioning notch 21b.
Is subjected to cylindrical cutting.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for manufacturing a magnetic head in which a magnetic path is formed by a metal magnetic thin film.

[0002]

2. Description of the Related Art A magnetic head is mounted on a magnetic recording / reproducing apparatus such as a video tape recorder, and records and / or reproduces information signals on a magnetic recording medium (hereinafter referred to as recording / reproducing). is there.

In the magnetic recording / reproducing apparatus, digital recording for digitizing and recording signals has been promoted in order to improve the quality of music signals and image signals to be recorded / reproduced. The density and recording frequency have been increased.

By the way, as described above, the magnetic head is required to have a high output and a low noise in a high frequency region as the magnetic recording density is increased and the recording frequency is increased. The magnetic head is, for example, a so-called composite metal-in-gap type in which a metal magnetic thin film is formed on a ferrite material and then wound, or a laminated type in which a metal magnetic thin film is sandwiched between nonmagnetic ceramics. There is a head etc. Such magnetic heads are frequently used as conventional magnetic heads for video tape recorders, but have a large inductance, a low output in a high frequency region due to a reduction in output per inductance, and a digital device requiring high density and high frequency. It is difficult to sufficiently cope with recording and reproduction of signals.

In view of the above situation, a magnetic head is manufactured by a thin film forming process as described in, for example, JP-A-6-259717, "Magnetic head and manufacturing method thereof". It is said that a so-called bulk thin-film magnetic head whose impedance is reduced by shortening the path can support high frequencies.

[0006] Such a conventional bulk thin-film magnetic head 100
13 and 14, as shown in FIG. 13 and FIG.
1 is prepared, and the pair of magnetic core halves 101 is joined via a non-magnetic body 102 to form the pair.

As shown in FIG. 15, a magnetic core half 101 includes a substrate 103 having an inclined surface 103a and a substrate 1 having an inclined surface 103a.
03 thin metal magnetic film 104 formed on the inclined surface 103a
And a glass 105 formed so as to embed the metal magnetic thin film 104.

The metal magnetic thin film 104 is ground together with the inclined surface 103a of the substrate 103 to form a concave portion 104a, and a front abutting surface 106 is formed at both ends of the concave portion 104a.
And a rear butting surface 107 are constituted. The front butting surface 106 and the rear butting surface 107 are partially exposed from one main surface 101 a of the magnetic core half 101.

The magnetic core half 101 has one main surface 101a.
Front butting surface 106 and rear butting surface 107 exposed from
A coil-shaped concave portion 108 having a substantially rectangular shape centered on the rear abutting surface 107 is formed between them.

In the coil forming recess 108, a thin film coil 109 (not shown in FIGS. 13 and 15) is formed in a thin film forming step. This thin film coil 109
Is formed so as to be wound around the rear butting surface 107, and one end 109 a on the outer peripheral side thereof is connected to the terminal 110.

The bulk thin-film magnetic head 100 is shown in FIG.
As shown in FIG. 3, the pair of magnetic core halves 101
02 are formed by abutting each other. In the bulk thin film magnetic head 100, the metal magnetic thin film 1
04 front butting surfaces 106 and rear butting surfaces 107
By abutting each other via the non-magnetic body 102, as shown in FIG.
12 and a back gap 113, and a magnetic core 111 in which a magnetic path for recording and reproducing signals to and from a magnetic recording medium is generated.
Is formed. In the magnetic core 111, the front butting surface top 106a forms a front gap top 112a in a state where the pair of magnetic core halves 101 are butted.

Further, the bulk thin-film magnetic head 100 includes:
On one side of the magnetic core 111 facing the front gap 112, there is an opposing surface 100a on which the magnetic recording medium slides.
In the bulk thin-film magnetic head 100, the opposing surface 100a is formed in an arc shape in the sliding direction of the magnetic recording medium in order to regulate the contact state with the magnetic recording medium, and the contact area with the magnetic recording medium is increased. In order to regulate the contact width, a contact width regulating groove 100b formed by cutting out both side surfaces of the facing surface 100a is formed.

The conventional bulk thin film magnetic head 100 is
With the above configuration, the magnetic recording medium slides on the facing surface 100a, and a magnetic path is generated in the magnetic core 111 formed by the metal magnetic thin film 104, whereby a recording signal is transmitted to the magnetic recording medium. Record and play back.

[0014]

In the above-described conventional bulk thin-film magnetic head 100, the front gap 112 is opposed to the magnetic recording medium in order to record and reproduce a recording signal with high density and high accuracy. Surface 100a
It is important to machine the depth (depth) with high precision.

In the bulk thin-film magnetic head 100, when the depth of the front gap 112 is larger than a predetermined value, the density of the magnetic flux generated on the front butting surface 106 is reduced, and the core efficiency is reduced. for that reason,
In the bulk thin-film magnetic head 100, it is required that the depth of the front gap 112 be formed as small as possible to improve the core efficiency.

However, in the conventional bulk thin-film magnetic head 100, since the magnetic core 111 is formed very small to cope with high-density and high-frequency digital signals as described above, the front gap 1
12 is difficult to machine with high precision,
If the depth of the front gap 112 is reduced by processing the distance from the front abutment surface top 106a by polishing 0a, there is a problem that the yield is reduced and the productivity is reduced.

Accordingly, the present invention provides a so-called bulk thin-film magnetic head in which a positioning notch is formed in a pair of magnetic core halves, and the front gap depth is determined with high precision based on the positioning notch. It is an object of the present invention to provide a method of manufacturing a magnetic head that can be processed into a magnetic head.

[0018]

In order to achieve the above-mentioned object, a method of manufacturing a magnetic head according to the present invention is directed to a method of manufacturing a magnetic head in which a metal magnetic thin film is formed on a substrate at an angle and a thin film coil is formed. A pair of magnetic core halves having a butted surface flattened by a non-magnetic material, butted so that end faces of the metal magnetic thin film face each other via the non-magnetic material to form a magnetic gap. In the method of manufacturing a head, a notch for positioning is formed in the substrate, and a groove for forming a front butting surface and a rear butting surface is formed on the metal magnetic thin film with reference to the notching for positioning, When cylindrical cutting is performed on the surface facing the recording medium, the cutting amount of the facing surface is defined based on the positioning notch.

Therefore, according to the method of manufacturing a magnetic head of the present invention, the front abutment surface and the opposing surface are formed with high precision positioning with respect to the positioning notch, thereby providing a front gap depth. Can be manufactured with high precision.

[0020]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, embodiments of a method for manufacturing a magnetic head according to the present invention will be described in detail with reference to the drawings. This method is applied, for example, when manufacturing the magnetic head 1 as shown in FIGS. Therefore, first, the magnetic head 1 manufactured by applying the present invention will be described.

As shown in FIGS. 1 and 2, the magnetic head 1 comprises a pair of magnetic core halves 2, 3 joined by metal diffusion bonding or the like. A pair of magnetic core halves 2,
Numeral 3 denotes a non-magnetic substrate 4 made of a MnO-NiO-based non-magnetic material, a metal magnetic thin film 5 formed on an inclined surface 4a of the non-magnetic substrate 4, and a metal magnetic thin film 5 on the non-magnetic substrate 4. And the low-melting glass 6 formed so as to cover. Also, a pair of magnetic core halves 2, 3
Has a thin-film coil 7 for excitation and / or detection of induced electromotive voltage formed at least on one side.

In the magnetic head 1, in a state where the pair of magnetic core halves 2 and 3 are joined via the gap material G,
As shown in FIG. 2 (the thin film coil 7 is not shown in FIG. 2), the metal magnetic thin film 5 has a magnetic core 8.
To form When the magnetic recording medium slides in a direction indicated by an arrow A in FIG. 2, the magnetic core 8 reproduces the signal magnetic field recorded on the magnetic recording medium or transmits the signal magnetic field to the magnetic recording medium. Record and work.

In the magnetic head 1, the facing surface 9 is formed in an arc shape in the sliding direction of the magnetic recording medium in order to regulate the state of contact with the magnetic recording medium. Also, this magnetic head 1
Has a contact width regulating groove 10 for regulating the contact area with the magnetic recording medium. The contact width regulating grooves 10 are formed on both side surfaces of the magnetic head 1 in parallel with the sliding direction of the magnetic recording medium indicated by the arrow A in FIG.

In the magnetic head 1, the metal magnetic thin film 5 is formed of a material exhibiting soft magnetism such as sendust (Fe-Al-Si alloy). The metal magnetic thin film 5 is formed on an inclined surface 4 a formed obliquely at a predetermined angle on the non-magnetic substrate 4. Therefore, when the pair of magnetic core halves 2 and 3 on which the metal magnetic thin film 5 is formed are joined via the gap material G, the magnetic core 8 slides on the magnetic recording medium as shown in FIG. It is arranged obliquely to the direction A.

The metal magnetic thin film 5 is configured such that its cross-sectional shape is substantially U-shaped. In other words, the metal magnetic thin film 5 has the concave portion 5a at the substantially central portion of the end surface on the side where the magnetic core halves 2 and 3 are joined.

For this reason, the metal magnetic thin film 5 is divided by the joining surfaces 2 a and 3 a of the magnetic core halves 2 and 3 in the front-rear direction and is exposed from the low melting point glass 6. And has the following. Then, the front butting surface 11 of the one magnetic core half 2 and the front butting surface 11 of the other magnetic core half 3 are butted via the gap material G to form the front gap 13. The rear butting surface 12 of one magnetic core half 2 and the rear butting surface 12 of the other magnetic core half 3 abut against each other to form a back gap 14.

In the front gap 13, the front gap top 1 on the back gap 14 side from the facing surface 9.
The depth up to 3a is called the depth.

The metal magnetic thin film 5 has a bonding surface 2a,
3a, the thin film coil 7 having the rear abutting surface 12 substantially at the center.
Has a coil forming recess 15 formed therein. A coil connection terminal 16 is formed in the coil forming recess 15 near the rear butting surface 12. The thin-film coil 7 is formed in the coil-forming recess 15, and the end on the center side is connected to the coil connection terminal 16.

The coil connection terminals 16 are formed with their heights adjusted so as to form the same surfaces as the joint surfaces 2a, 3a of the pair of magnetic core halves 2, 3. In the magnetic head 1, when the pair of magnetic cores 2 and 3 are joined, the pair of coil connecting terminals 16 are also joined. Thus, in the magnetic head 1, when the pair of magnetic core halves 2 and 3 are joined, the pair of thin-film coils 7 are electrically connected.

The outer peripheral end of the thin-film coil 7 is led out to the side opposite to the sliding surface of the magnetic recording medium. External connection terminals 17 are formed on the pair of magnetic core halves 2 and 3 on the side opposite to the facing surface 9. And
The outer end of the thin-film coil 7 is connected to the external connection terminal 1.
7 is connected.

The external connection terminals 17 are exposed to the side surface of the magnetic head 1 so that they can be connected to the outside by the thin film coil 7.
And can be electrically connected. The pair of external connection terminals 17 are formed at positions where the heights of the pair of magnetic core halves 2 and 3 are different from each other so that a short circuit does not occur when the pair of magnetic core halves 2 and 3 are joined. Have been.

In the magnetic head 1, the non-magnetic substrate 4 is made of a MnO-NiO-based non-magnetic material, but the present invention is not limited to this configuration. The non-magnetic substrate 4 may be made of calcium titanate, barium titanate, zirconium oxide (zirconia), alumina, alumina titanium carbide, SiO ₂ , Zn ferrite, crystallized glass, high hardness glass, or the like.

In the magnetic head 1, the non-magnetic substrate 4 has the inclined surface 4a formed obliquely at a predetermined angle. However, the inclined surface 4a may be formed at an angle of about 45 degrees. desirable. Thereby, the magnetic head 1
Improves the track width accuracy.

In the magnetic head 1, the metal magnetic thin film 5 is formed of a material exhibiting soft magnetism such as Sendust (Fe-Al-Si alloy), but is not limited to such a material. Absent. The metal magnetic thin film 5 is made of, for example, Fe-Ta-N alloy, Fe-Al alloy, Fe-Si
-Co alloy, Fe-Ga-Si alloy, Fe-Ga-Si
-Ru alloy, Fe-Al-Ge alloy, Fe-Ga-Ge
Alloy, Fe-Si-Ge alloy, Fe-Co-Si-Al
An alloy or a crystalline alloy such as an Fe—Ni alloy may be used. Alternatively, the metal magnetic thin film 5 is made of Fe, Co,
An alloy composed of one or more elements of Ni and one or more elements of P, C, B, Si, or
1, Ge, Be, Sn, In, Mo, W, Ti, Mn,
Metal-metalloid amorphous alloys typified by alloys containing Cr, Zr, Hf, Nb, etc .;
It may be made of an amorphous alloy such as a metal-metal amorphous alloy containing a transition metal such as f or Zr and a rare earth element as main components. Further, the metal magnetic thin film 5
May be a nitrided soft magnetic alloy or a carbonized soft magnetic alloy.

Further, the metal magnetic thin film 5 may be constituted by a metal magnetic thin film composed of a single layer, but it is preferable that a nonmagnetic thin film layer and a magnetic thin film layer are alternately laminated. Thus, the magnetic head 1 can have high sensitivity in a higher frequency range.

The magnetic head 1 configured as described above is
When reproducing a magnetic signal recorded on the magnetic recording medium, a signal magnetic field from the magnetic recording medium is applied around the front gap 13. When the direction of the applied signal magnetic field changes, the direction of the magnetic flux flowing through the magnetic core 8 changes. As a result, in the magnetic head 1, electromagnetic induction occurs, and a predetermined current flows through the thin-film coil 7.

When a magnetic signal is recorded on a magnetic recording medium using the magnetic head 1, a predetermined current is supplied to the thin-film coil 7. And this magnetic head 1
The magnetic core 8 is generated by the magnetic field generated from the thin film coil 7.
A predetermined magnetic flux flows through the. Thereby, this magnetic head 1
Then, a leakage magnetic field is generated across the front gap 13. The magnetic head 1 records a magnetic signal by applying the leakage magnetic field to a magnetic recording medium.

Next, a method of manufacturing a magnetic head according to the present invention will be described in detail with reference to the drawings.

When manufacturing the magnetic head 1 described above,
A plurality of magnetic core halves 2 and 3 are formed on the same substrate.
Then, the magnetic head 1 bonds the pair of the substrates,
It is formed by cutting into individual magnetic heads 1.

First, to manufacture the magnetic head 1,
As shown in FIG. 3, a substantially flat substrate 21 is prepared. This substrate 21 is to be the non-magnetic substrate 4 of the magnetic head 1, and is made of a non-magnetic material such as MnO-NiO. The substrate 21 has a thickness of about 2 mm, for example.
The length and width are set to about 30 mm.

As shown in FIG. 3, the substrate 21 has positioning notches 21b formed on both side surfaces 21a. The positioning notch 21b is used as a reference position for forming a winding groove 29, an opposing surface 9, and a contact width regulating groove 10 which will be described later. Therefore, the positioning notches 21b need to be provided by the number of rows of the magnetic core halves 2 and 3 to be formed.

Next, as shown in FIG.
The first groove processing is performed on one main surface 21c. In the first groove processing, a plurality of magnetic core forming grooves 24 are formed in parallel with one principal surface 21c by a grindstone or the like so as to have an angle of, for example, about 45 °. And the substrate 2
In FIG. 1, a plurality of inclined surfaces 21d are formed by the magnetic core forming grooves 24 formed by the first groove processing.

The inclined surface 21d formed here preferably has an inclination angle of about 25 to 60 ° with respect to the plane of the substrate, but is preferably 35 to 5 in consideration of preventing a pseudo gap and track width accuracy.
A tilt angle of about 0 ° is more preferable. The magnetic core forming groove 24 formed by the first groove processing had a depth of 130 μm and a width of 150 μm.

Next, as shown in FIG. 5, a metal magnetic thin film 27 is formed on the entire surface of the substrate 21 on which the inclined surface 21d is formed. In this film forming step, the metal magnetic thin film 27
Is formed so that three metallic magnetic materials are laminated via a nonmagnetic layer. This metal magnetic thin film 27 is formed, for example, by a PVD method such as a magnetron sputtering method or the like.
The film is formed by a VD method or the like.

Further, the metal magnetic thin film 27 is not limited to the one having a plurality of metal magnetic layers, and may have a structure of a single metal magnetic layer, but has a high sensitivity in a higher frequency region. In order to obtain this, it is desirable that the metal magnetic layer has a laminated structure in which the metal magnetic layer is divided into a plurality. Thereby, the metal magnetic thin film 27 can reduce the eddy current loss and obtain high sensitivity in a higher frequency region.

In this embodiment, the metal magnetic thin film 27
Is, for example, 4 μm of Fe—Al—Si alloy (Sendust).
m and alumina of 0.15 μm are alternately laminated and three layers of Fe—Al—Si alloy layer are provided. When the metal magnetic thin film 27 is formed in a plurality of layers, alumina, SiO ₂ and Si
Materials such as O are used alone or in combination. The thickness of the non-magnetic layer is set to such an extent that insulation between adjacent metal magnetic layers can be obtained.

Next, as shown in FIG.
A second groove is formed on the surface on which the groove 7 is formed in a direction substantially orthogonal to the magnetic core forming groove 24. In the second groove processing, a separation groove 28 formed to separate the magnetic core 8 into a predetermined size, and a winding for forming a magnetic gap in each magnetic core 8 separated by the separation groove 28. Wire groove 29
And are formed.

At this time, the winding groove 29 is formed by being positioned with reference to the positioning notch 21b of the substrate 21. Thereby, as described later, it becomes easy to process the depth of the front gap 13 in the magnetic head 1 with high precision in a later step.

Specifically, in the present embodiment, the top of the winding groove 29 is formed to be 20 μm from the end face of the positioning notch 21b toward the separation groove 28. That is, in the present embodiment, the front gap apex 13a of the magnetic head 1 is 20 μm below the positioning notch 21b. The position of the winding groove 29 from the positioning notch 21b may be determined in advance, and is not limited to 20 μm.

At this time, portions other than the metal magnetic thin film 27 formed on the inclined surface 21d, that is, the metal magnetic thin film 27 formed at the bottom of the magnetic core forming groove 24 are removed by grinding.

Here, the separation groove 28 is a groove for forming each magnetic core 8 by magnetically separating the magnetic core 8 in the front-rear direction on the substrate 21 and forming a closed magnetic path in each magnetic core 8. is there. Although two separation grooves 28 are formed in the example of FIG. 6, it is necessary to provide as many as the number of rows of the magnetic core halves 2 and 3 to be formed. In addition, the separation groove 28 must be formed so as to have a depth enough to completely cut the metal magnetic thin film 27 in order to magnetically separate the magnetic cores 8 arranged in the front-rear direction. is there. Specifically, the separation groove 28 has a depth of 150 μm from the bottom of the magnetic core forming groove 24, that is, 280 μm from the main surface 21 c of the substrate 21.
And the depth.

On the other hand, the winding groove 29 forms a concave portion 5 a formed in the metal magnetic thin film 27 in the magnetic head 1 described above. Therefore, the winding groove 29 is formed by the magnetic core 8 having the front butting surface 11 and the rear butting surface 12.
In order to form the concave portion 15 for coil formation, it is necessary to form the metal magnetic thin film 27 at a depth that does not cut it. Therefore, the cross section of the metal magnetic thin film 27 is exposed on the surface of the winding groove 29.

The shape of the winding groove 29 is determined according to the lengths of the front butting surface 11 and the rear butting surface 12. Here, the width is about 140 μm, and And the length of the rear butting surface 12 was 85 μm. The winding groove 29 may have such a depth that the metal magnetic thin film 27 is not cut. However, if the winding groove 29 is too deep, there is a possibility that the magnetic path length becomes longer and the efficiency of magnetic flux transmission is reduced. The winding groove 29 is
Although the depth depends on the thickness of the thin film coil 7 formed in a step described later, it is set to 20 μm here.

Further, the shape of the winding groove 29 is not limited, but here, the front butting surface 1 serving as the front gap top 13 a in the magnetic head 1.
The side surface on one side is an inclined surface 29a of about 45 °. Thereby, the magnetic core 8 has a structure in which the magnetic flux is concentrated on the opposing surface 9 side, thereby improving the sensitivity.

Next, as shown in FIG. 7, a low-melting glass melted on one main surface 21c of the substrate 21 on which the magnetic core forming groove 24, the separation groove 28 and the winding groove 29 are formed as described above. 30 is filled. Thereafter, the low-melting glass 30 is cooled and solidified, and the surface of the solidified low-melting glass 30 is subjected to a flattening process.

Next, as shown in FIG. 8, a terminal groove 31 is formed by subjecting the solidified low-melting glass 30 to grinding using a grindstone or the like. The terminal groove 31 is formed so as to be located immediately above the above-described separation groove 28, and has a width and a depth of 100 μm. Then, a good conductor such as Cu is filled in the terminal groove 31 by a plating method or the like.
After that, a flattening process is performed. The good conductor such as Cu filled in the terminal groove 31 becomes the external connection terminal 17 in the magnetic head 1 described above.

Next, as shown in FIG.
The coil forming recesses 15 are formed by performing an etching process on 0, and a thin film coil 7 is formed in the coil forming recesses 15 in a thin film.

The concave portion 15 for forming a coil is formed in a substantially rectangular shape having the rear abutting surface 12 substantially at the center thereof.
It is formed by performing an etching process on portions other than the terminal 2 and the coil connection terminal 16. The coil forming recess 15 has a groove 15a reaching the terminal groove 31 from one end thereof.

Thereafter, a thin film coil 7 is formed in the coil forming recess 15. The thin-film coil 7 has one end 7a disposed on the coil connection terminal 16 and the rear abutting surface 1.
It has a shape wound many times so as to draw a circle centered at 2. The thin-film coil 7 is drawn out into a groove 15 a formed at one end of the coil forming recess 15, and the other end 7 b is electrically connected to an external connection terminal 17 made of a good conductor filled in a terminal groove 31. Connecting.

When the thin film coil 7 is formed, first, the above-described coil shape is patterned with a photoresist. Next, Cu is formed in the coil forming recess 15.
And the like are formed into a thin film by a technique such as plating so as to have a thickness of about 3 μm. Then, by removing the photoresist, the thin film coil 7 having a patterned coil shape can be formed. In forming the thin-film coil 7, not only the plating method described above but also a sputtering method or a vapor deposition method can be used.

Next, a protective layer (not shown) for protecting the thin-film coil 7 from contact with the outside air is formed. This protective layer is formed so as to fill the coil forming recess 15 in which the above-mentioned thin film coil 7 is formed. The protective layer is preferably formed of a non-magnetic insulating material that is not removed by the oxygen ashing.

Specifically, as a non-magnetic insulating material, Al
Examples thereof include oxides such as ₂ O ₃ , Ta ₂ O ₅ , SiO ₂ , ZrO ₂ , and TiO ₂ and inorganic substances such as glass. Here, as the protective film, Al ₂ O ₃ was sputtered to a thickness of 0.4 μm.
m was formed over the entire surface of the substrate 21. At this time, the protective film also covers the front butting surface 11 and the rear butting surface 12 which are exposed on one main surface of the substrate 21, but the portions covering these are removed in a step described later. Note that this protective film can be formed only in a predetermined region by using a so-called mask sputtering method or a lift-off method. Examples of the method for forming the protective film include, besides the sputtering method, an evaporation method and spin coating of coating type SiO ₂ .

Next, as shown in FIG. 10, a substrate 21 in which a plurality of magnetic core halves 2 and 3 are formed in parallel is formed with one magnetic core half 2 and the other magnetic core half 3 in one row. Then, the magnetic core half block 33 is formed.

The magnetic core half block 33 is mirror-finished by polishing one main surface 33a. At this time, the front butting surface 11 and the rear butting surface 12 covered with the protective film are exposed to the outside.

Next, as shown in FIG. 11, a pair of magnetic core half blocks 33 is accurately positioned to perform metal diffusion bonding. At this time, the pair of magnetic core half blocks 33
Is precisely positioned by applying Au patterning to the joint portion and aligning the end faces of the positioning notches 21b so that the upper ends of the front butting surfaces 11 face each other. Then, by applying a predetermined temperature and pressure to the pair of butted magnetic core half blocks 33, metal diffusion bonding is performed to produce a magnetic head block 38.

As described above, the front butting surfaces 11 of the pair of magnetic core half-blocks 33 are rear butted by accurately aligning the end surfaces of the positioning notches 21b so that the upper ends of the front butting surfaces 10 face each other. The surfaces 12 and the coil connection terminals 15 can be accurately opposed to each other.

In this embodiment, the metal diffusion bonding is performed by patterning Au.
The pair of magnetic core half blocks 33 may be joined using an adhesive, water glass, or the like.

Next, as shown in FIG. 12, the magnetic head block 38 is separated into individual magnetic heads 1.

At this time, first, the magnetic head block 38
Is cut in the longitudinal direction on the basis of the positioning notch 21b in order to expose the surface serving as the facing surface 9 on which the magnetic recording medium slides. And the magnetic head block 3
On the exposed surface 8, the exposed surface is subjected to a cylindrical cutting process so as to have a cylindrical shape. Thereafter, the contact width regulating groove 10 is ground in the magnetic head block 38 based on the positioning notch 21b. The contact width regulating grooves 10 are formed at portions corresponding to both side surfaces of the facing surface 9 of each magnetic head 1 separated from the magnetic head block 38.

In the magnetic head block 38, as described above, the facing surface 9 is machined with high precision to a predetermined position because it is machined with the positioning notch 21b as a reference. For this reason, the depth which is the depth from the facing surface 9 to the front gap top 13a in the magnetic head 1 can be reduced. Therefore, in the magnetic head 1, the density of the magnetic flux generated in the front gap 13 is increased, and the core efficiency is improved.

In the magnetic head block 38,
Since the contact width regulating groove 10 is processed based on the positioning notch 21b, it is ground with high precision to a predetermined depth. For this reason, in the magnetic head 1, the shape of the magnetic core 8 cut out by the contact width regulating groove 10 can be determined with high accuracy, and the core efficiency of the magnetic core 8 does not decrease.

Specifically, in the present embodiment, the contact width regulating groove 10 is ground to a position of 20 μm from the end face of the positioning notch 21b toward the facing surface 9. The contact width regulating groove 10 is provided in the sliding direction A of the magnetic recording medium.
Are formed so as to be substantially parallel to. The position of the contact width regulating groove 10 from the positioning notch 21b may be determined in advance, and is not limited to 20 μm.

The magnetic head block 38 corresponds to FIG.
2 are separated into individual magnetic heads 1 by cutting at the portion indicated by the line BB in FIG.

In this embodiment, the opposing surface 9 is polished so that the front gap 13 of the magnetic head 1 has an azimuth angle of 20 degrees, and the contact width regulating groove 10 is ground. It is assumed that the cut surface of the magnetic head block 38 is inclined and separated. The magnetic head block 38 performs the above-described polishing of the facing surface 9, grinding of the contact width regulating groove 10, and cutting of the individual magnetic heads 1 so that the front gap 13 has a predetermined azimuth angle. The azimuth angle is not limited to 20 degrees.

As described above, according to the method of manufacturing a magnetic head according to the present invention, the depth of the front gap 13 in the manufactured magnetic head 1 can be formed accurately and with high precision.

Hereinafter, a description will be given of a case where the electromagnetic conversion characteristics of the magnetic head 1 manufactured according to the embodiment of the present invention and the conventional magnetic head are measured under the following conditions. The magnetic head used for the measurement was DV
C (Digital Video Cassette)
After bonding to the head base, the external terminal plate and the thin-film coil 7 of the magnetic head 1 were connected by wire bonding.

Measurement conditions of magnetic head Measuring equipment: Drum tester Recording medium: Adv. ME tape Sliding speed: 10.2 m / s As a result of the measurement, in the conventional magnetic head, the variation in the reproduction output was about 3σ = 4 dB. Further, in the magnetic head 1 manufactured according to the embodiment of the present invention, the variation of the reproduction output was within 3σ = 1.5 dB. That is,
Magnetic head 1 manufactured based on the embodiment of the present invention
Has less variation in reproduction output as compared with a conventional magnetic head.

The result of this measurement shows that the depth accuracy of the contact width regulating groove in the conventional magnetic head is about ± 10 μm, whereas the magnetic head 1 manufactured according to the embodiment of the present invention has 21, the winding groove 29, the facing surface 9, and the positioning notch 21 b formed in advance.
The depth of the front gap 13 of the magnetic head 1 and the depth of the contact width regulating groove 10 are formed with high accuracy by the position of the contact width regulating groove 10 being determined with high precision. It is.

Therefore, according to the method of manufacturing a magnetic head according to the present invention, the depth of the front gap can be formed with high precision in a so-called bulk thin film magnetic head.

Note that the positioning notch 21b is
The width and depth may be such that they do not touch the cut surface for cutting the one inclined surface 21 d and the magnetic core half block 33.
The positioning notch 21b is provided on both sides 2 of the substrate 21.
It is desirable to form a pair at a position symmetrical in 1a. Thus, the positioning notch 21b serves as an accurate reference for positioning the substrate 21 in a direction orthogonal to the side surfaces 21a.

In the above description, the positioning notch 21b of the substrate 21 is used as a position reference only when the winding groove 29, the facing surface 9 and the contact width regulating groove 10 are formed. The notch 21b may be used as a reference for a position when forming each part such as the coil forming recess 15 and the thin-film coil 7 or a reference for a position when cutting the magnetic core half block 33. .

[0082]

As described above, according to the method of manufacturing a magnetic head according to the present invention, the front butting surface and the rear butting surface are formed on the metal magnetic thin film with the positioning notch formed in the substrate as a reference for positioning. A magnetic head in which the depth of the magnetic gap is processed with high precision can be manufactured by forming the groove to be formed and performing cylindrical cutting on the surface facing the magnetic recording medium.

Therefore, according to the method of manufacturing the magnetic head of the present invention, the core efficiency of the magnetic head can be improved by forming the depth of the magnetic gap as small as possible.

[Brief description of the drawings]

FIG. 1 is an exploded perspective view showing a magnetic head according to the present invention.

FIG. 2 is a perspective view of a main part showing an opposing surface of the magnetic head.

FIG. 3 is a view for explaining the method for manufacturing the magnetic head according to the present invention, and is a perspective view showing a substrate.

FIG. 4 is a view for explaining the same method, and is a perspective view showing a substrate on which first groove processing has been performed.

FIG. 5 is a view for explaining the same method, and is a perspective view showing a substrate on which a first metal magnetic thin film is formed.

FIG. 6 is a view for explaining the same method, and is a perspective view showing a substrate on which a second groove processing has been performed.

FIG. 7 is a view for explaining the same method, and is a perspective view showing the substrate in a state where each groove is filled with low-melting glass.

FIG. 8 is a view for explaining the same method, and is a perspective view showing a substrate in which terminal grooves are formed in low-melting glass.

FIG. 9 is a view for explaining the same method, and is a perspective view of an essential part showing a substrate on which a concave portion for forming a coil is formed.

FIG. 10 is a view for explaining the same method, and is a perspective view showing a magnetic core half block.

FIG. 11 is a diagram for explaining the same method, and is a perspective view showing a state where a pair of magnetic core half blocks are butted.

FIG. 12 is a diagram for explaining the same method, and is a perspective view showing a magnetic head block.

FIG. 13 is a perspective view of a main part showing a facing surface of a conventional magnetic head.

FIG. 14 is an exploded perspective view showing a conventional magnetic head.

FIG. 15 is a perspective view of a main part of a substrate when a conventional magnetic head is manufactured.

[Explanation of symbols]

1 magnetic head, 4 non-magnetic substrate, 4a inclined surface, 5
Metal magnetic thin film, 5a concave portion, 6 low melting point glass, 8 magnetic core, 10 width control groove, 11 front butting surface, 1
3 front gap, 13a top of front gap, 14 back gap, G gap material, 21 substrate, 29 winding groove

Claims (3)

[Claims] 1. A pair of magnetic core halves having a metal magnetic thin film formed obliquely on a substrate, a concave portion in which a thin film coil is formed, and an abutting surface made of a non-magnetic material, are flattened. In a method of manufacturing a magnetic head in which a magnetic gap is formed by abutting end faces of magnetic thin films so as to face each other with a non-magnetic material therebetween, a notch for positioning is formed in the substrate, and the notch for positioning is used as a reference. As described above, the metal magnetic thin film is subjected to groove processing for forming a front abutting surface and a rear abutting surface, and when a cylindrical cutting process is performed on a surface facing the magnetic recording medium, the facing notch is used with respect to the positioning notch. A method for manufacturing a magnetic head, comprising defining a cutting amount of a surface. 2. A method for forming a width regulating groove on a facing surface of a magnetic recording medium, comprising the steps of:
2. The method according to claim 1, wherein the depth of the contact width regulating groove is defined. 3. A method according to claim 1, wherein said pair of magnetic core halves are abutted on said positioning notch so that end faces of said metal magnetic thin film face each other via a non-magnetic material. The manufacturing method of the magnetic head described.