JP2000056235A - Inspection microscope system - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an inspection microscope system capable of efficiently and also accurately inspecting a part to be inspected. SOLUTION: The observed image of a sample 7 projected through an objective lens 6 of a spot illumination observation system is picked up by a TV camera 10, and also, the picked up image is taken into an image processing part 23, and when an index is applied to the part to be inspected in the image, a stage coordinate for the index is calculated by a position analysis part 25, thereafter, when the index of the part required to be inspected is indicated, the part to be inspected is moved up to the visual field center of the spot illumination observation system based on the corresponding stage coordinate to the index, and by switching to a microscopic observation system, the part to be inspected is automatically moved just under the objective lens 11 of the microscopic observation system.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an inspection microscope system used for inspecting defects such as a semiconductor wafer and a liquid crystal substrate.

[0002]

2. Description of the Related Art Conventionally, in an inspection microscope system used for analyzing defects such as dust and scratches in a manufacturing process of a semiconductor wafer or a liquid crystal substrate, etc., FIG.
A microscope equipped with a spot illumination observation system as shown in FIG.

In such a microscope, first, the incident illumination from the incident illumination light source 2 inside the microscope main body 1 enters the optical path splitting cube 4 through the lens 3, and the light path splitting cube 4
The illumination light transmitted through is reflected by the mirror 5 and the objective lens 6
The sample 7 on the stage 12 is spot-illuminated via the optical path splitter 4, the reflected light from the sample 7 is reflected by the optical path dividing cube 4, and the eyepiece 9 or the TV camera 10
Then, the epi-illumination from the epi-illumination light source 2 is incident on the optical path dividing cube 4 through the lens 3 and reflected by the optical path dividing cube 4, and the specimen 7 on the stage 12 is passed through the objective lens 11. Illumination, the reflected light from the specimen 7 is transmitted through the optical path dividing cube 4, and the eyepiece 9 or the TV camera 10 is passed through the imaging lens 8.
For high-power microscope observation.

By the way, in a microscope equipped with such a spot illumination observation system, for example, as shown in FIG. When the position a to be inspected is detected below, the stage 12 is moved so that the position a to be inspected is located at the center of the visual field of the spot illumination observation system.
At the center of the field of view of the spot illumination observation system, switching to high-magnification microscope observation with the objective lens 11 is performed, and the inspection target a is automatically located directly below the objective lens 11 of the microscope observation system as shown in FIG. I have to move up.

[0005]

However, in such a configuration, the spot to be inspected is detected by the spot illumination observation system, and then to be observed with a high magnification microscope, the spot to be inspected must be spotted by the spot illumination observation system. If the position to be inspected is out of the center of the field of view of the spot illumination observation system, the position to be inspected will be moved from the microscope observation field of view when switching to high magnification microscope observation. There is a problem that it becomes unobservable.

When a plurality of inspection locations are detected by the spot illumination observation system and all of the inspection locations are to be observed with a microscope at a high magnification, a spot illumination observation system and a microscope observation system are required for each inspection location. The inspection must be performed while alternately switching between the two, and there is a problem that work efficiency is extremely poor.

Further, when there are a plurality of inspection locations in the field of view of the spot illumination observation system, if the stage is moved so that a certain inspection location becomes the center of the field of view, the other inspection locations will be in the field of view. There is also a problem that during the inspection, it is difficult to know how far the inspection has been performed.

The present invention has been made in view of the above circumstances, and has as its object to provide an inspection microscope system capable of efficiently and accurately inspecting a portion to be inspected.

[0009]

According to the first aspect of the present invention,
In an inspection microscope system having at least two observation systems having different magnifications and performing microscopic observation with a high magnification observation system based on an inspection result of a sample observed with a low magnification observation system, at least the low magnification observation system Imaging means for capturing an observation image of the sample; image processing means for enabling insertion of an index into a portion to be inspected in the image captured by the imaging means; and And control means for controlling a shift to microscopic observation by a magnification observation system.

According to a second aspect of the present invention, in the first aspect of the present invention, the control means has a position analyzing means for calculating coordinates of a stage on which the sample is mounted from an index position in the captured image. Moving the inspected portion corresponding to the index to the center of the field of view of the low-magnification observation system based on the stage coordinates calculated by the position analysis means, and switching to microscopic observation by the high-magnification observation system. ing.

[0011] The invention according to claim 3 is the invention according to claim 1 or 2.
In the invention described above, different types of indices to be inserted into the inspection location in the captured image are set according to the type of the inspection location.

As a result, according to the first aspect of the present invention,
By assigning an index to the inspected location, even if there are a plurality of inspected locations on the sample, these inspected locations can be recognized separately from others.

According to the second aspect of the present invention, the stage coordinates calculated by the position analysis means based on the index are:
Since the inspection position corresponding to the index can be automatically moved to a predetermined position, the inspection position can be efficiently observed by the high-magnification observation system. According to the third aspect of the present invention, different types of indices can be set according to the type of the inspection location, so that the type of the inspection location, such as a defect, can be easily identified.

[0014]

Embodiments of the present invention will be described below with reference to the drawings. (First Embodiment) FIG. 1 shows a schematic configuration of an inspection microscope system to which the present invention is applied. In the figure,
Reference numeral 21 denotes a microscope body having an observation system with spot illumination.
The microscope main body 21 is the same as that described in FIG. 11, and the same portions are denoted by the same reference numerals.

The TV camera 1 of such a microscope main body 21
0 is connected to the first display unit 22. The first display unit 22 displays an image captured by the TV camera 10.

An image processing section 23 is connected to the first display section 22. The image processing unit 23 includes the TV camera 10
This is for performing image processing on the image captured in step (1) and inserting an index into this image.

The image processing unit 23 is connected to a second display unit 24, a position analysis unit 25, and a stage driving unit 26. The second display unit 24 is for displaying an image in which the index has been inserted by the image processing of the image processing unit 23. The position analysis unit 25 calculates the stage coordinates from the index inserted by the image processing of the image processing unit 23. Then, the stage driving unit 26 is provided with the position analysis unit 2
The stage coordinates calculated in step 5 are temporarily stored, and the stage 12 of the microscope main body 21 is driven based on these stage coordinates.

Next, the operation of the embodiment configured as described above will be described. First, for each observation system with spot illumination and the microscope observation system of the microscope main body 21, captured images are taken into the image processing unit 23 from the TV camera 10, and the center of these images is replaced with stage coordinates. 12 is calculated using a standard sample. In this case, a sample having known distances Sx and Sy is placed on the stage 12, and a captured image of the sample is taken into the image processing unit 23 and displayed on the second display unit 24. Here, as shown in FIG. 2, assuming that the number of pixels in the X direction of the image captured by the image processing unit 23 is Nx and the number of pixels in the Y direction is Ny, the distance per pixel in the X direction and the Y direction is x = Sx / Nx, y = Sy / Ny.

Accordingly, the distance on the image can be converted into the distance on the stage 12 from this equation, and the stage coordinates can be calculated from the reference point and the index position on the image. When inspecting the specimen 7 from this state, the flowchart shown in FIG. 3 is executed. First, in step 301, when the sample 7 on the stage 12 is spot-illuminated via the objective lens 6 of the spot illumination observation system, the reflected light from the sample 7 is reflected by the optical path dividing cube 4, the imaging lens 8 and the eyepiece 9 Alternatively, the light is incident on the TV camera 10, the eye observation of the inspected portion is performed by the eyepiece 9, and the observation image captured by the TV camera 10 is displayed on the first display unit 22 and the image processing unit 23. It is taken in.

If an inspected portion to be magnified and observed is found from the observation image displayed on the first display section 22, an instruction is given in step 302 to give an index to the inspected portion. Then, an image to which an index is attached by the image processing of the image processing unit 23 is displayed on the second display unit 24, and the stage coordinates are calculated by the position analysis unit 25 for the index attached to the inspection location. Then, it is sent to the stage drive unit 26 and registered.

After that, the assignment of the index to the inspection location on the specimen 7 is completed, and in step 303, the second display unit 2
4. Specify the index of the inspected part you want to magnify and observe on 4.
The stage coordinates corresponding to the specified index are read,
The stage 12 of the microscope main body 21 is driven based on the stage coordinates. In this case, the inspected portion provided with the index designated by the stage 12 is moved to the center of the field of view of the spot illumination observation system, and thereafter, when switching to high-magnification observation by the microscope observation system, the inspected portion is automatically moved to the microscope. It is moved to just below the objective lens 11 of the observation system.

In this state, when the specimen 7 on the stage 12 is illuminated through the objective lens 11 in step 304, the reflected light from the specimen 7 is reflected by the optical path dividing cube 4, the eyepiece lens 9 or The incident light is incident on the TV camera 10, and this time, an enlarged observation of the inspected portion is performed by the eyepiece 9, and an enlarged observation image captured by the TV camera 10 is displayed on the first display unit 22.

Thereafter, the operations of steps 303 and 304 described above are repeated until it is determined in step 305 that the magnified observation has been completed for the inspected portion indicated by the index.

Therefore, by doing so, the image processing unit 2
If the inspected portions to be magnified and observed are found from the observation image of the sample 7 taken in 3, an index is assigned to these inspected portions, so that a plurality of inspected portions exist on the sample 7. Even if the inspection is performed, these inspection locations can be distinguished from each other and recognized, so that the inspection locations to be inspected cannot be lost during the inspection, and the inspection of each inspection location based on each index can be efficiently performed. In addition, it can be performed accurately.

Further, only by instructing the indices, the position to be inspected corresponding to the indices is automatically set to the center of the field of view of the spot illumination observation system by the stage coordinates calculated by the position analysis unit 25 based on the positions of these indices. Because it can be moved, high-magnification observation of each inspected point can be performed continuously, compared to the conventional method that performs inspection while switching between spot illumination observation system and microscope observation system for each inspected point. In addition, the inspection of the inspected position can be performed efficiently.

In the above description, the inspection image for the specimen 7 is taken in by the observation system with spot illumination.
The inspection image may be captured by a low-magnification objective lens of a microscope observation system. Further, in the above, from the observation image, to find the inspected portion to be observed enlarged, to give an index, and then by instructing these indices, it is possible to observe the enlarged image of each inspected portion, for example, A list of inspected portions to which an index is assigned from the inspection result of the inspection system of the above is received, and based on this list, as described above, the present invention can also be applied to a review inspection in which an enlarged image of each inspected portion can be observed. . (Second Embodiment) In the first embodiment, a uniform index is provided in correspondence with a portion to be inspected to be magnified. However, in the second embodiment, a portion to be inspected is provided. Is assigned a different symbol for each type of defect.

Since the schematic configuration of the inspection microscope system to which the second embodiment is applied is the same as that of FIG. 1 described in the first embodiment, the description will be omitted with reference to FIG. .

In this case, as shown in the flow chart shown in FIG. 4, when the observation image of the specimen 7 is projected on the eyepiece 9 or the TV camera 10 through the objective lens 6 of the spot illumination observation system in step 401, The naked eye observation is performed by the eyepiece 9, and the observation image captured by the TV camera 10 is displayed on the first display unit 22 and is captured by the image processing unit 23.

If the inspection location is found from the observation image on the first display unit 22, an instruction is given in step 402 to give an index to the inspection location. In this case, different symbols are given according to the type of the defect, such as □ for a defect to be inspected, flaw for a scratch, Δ for a foreign substance, and Δ for unevenness. Then, an image marked with a symbol according to the type of defect by the image processing in the image processing unit 23 is displayed on the second display unit 24, and
Stage coordinates are calculated for these symbols by the position analysis unit 25 and sent to the stage drive unit 26 for registration.

Thereafter, the assignment of the symbols on the sample 7 is completed,
In step 403, when the symbol of the inspected portion to be magnified and observed on the second display unit 24 is designated, the stage driving unit 26
The stage coordinates corresponding to the symbol specified by are read out, and the stage 12 of the microscope main body 21 is driven based on the stage coordinates. In this case, when the defect with the designated symbol is moved to the center of the field of view of the spot illumination observation system, and then switched to high magnification observation by the microscope observation system, the defect is automatically moved to the objective lens 11 of the microscope observation system. Moved to just below.

From this state, when an observation image of the specimen 7 on the stage 12 is projected onto the eyepiece 9 or the TV camera 10 via the objective lens 11 in step 404, the eyepiece 9 performs enlarged observation of a defect. And TV
The enlarged observation image captured by the camera 10 is displayed on the first display unit 22.

Thereafter, the operations of the above-described steps 403 and 404 are repeated until it is determined in step 405 that the magnified observation has been completed for the defect marked with each symbol. Therefore, in this manner, the type of the defect at the inspected portion can be confirmed by a different symbol provided according to the type of the defect on the specimen 7, and the high magnification observation can be performed. In addition, more accurate inspection can be performed.

In this embodiment, the inspected portion is given a different symbol depending on the type of defect, but different colors depending on the type of defect, for example, scratches are red, foreign particles are blue, and uneven The same effect can be expected even if an index having a different color such as yellow is given. (Third Embodiment) In the first embodiment, the index given to the inspected portion is indicated so that the inspected portion corresponding to the index can be enlarged and observed. In the embodiment, the inspection locations corresponding to these indices can be enlarged and observed in the order of registration of the indices assigned to the inspection locations.

Since the schematic configuration of the inspection microscope system to which the third embodiment is applied is the same as that of FIG. 1 described in the first embodiment, the description will be omitted with reference to FIG. .

In this case, as shown in the flow chart shown in FIG. 5, when the observation image of the sample 7 is projected on the eyepiece 9 or the TV camera 10 through the objective lens 6 of the spot illumination observation system in step 501, The naked eye observation is performed by the eyepiece 9, and the observation image captured by the TV camera 10 is displayed on the first display unit 22 and is captured by the image processing unit 23.

If an inspected portion to be magnified and observed is found from the observation image displayed on the first display section 22, an instruction is given in step 502 to give an index to the inspected portion. Then, an image provided with an index by the image processing of the image processing unit 23 is displayed on the second display unit 24, and the position analysis unit 25 changes the stage coordinates with respect to the index provided for the inspected location. It is calculated, sent to the stage drive unit 26, and registered. Hereinafter, the stage coordinates for the index given for each inspected location are registered in order.

After that, the assignment of the index to the inspected portion on the specimen 7 is completed, and when an enlargement observation of the inspected portion is instructed in step 503, among the indices registered in the stage driving section 26, the index is registered first. The stage coordinates corresponding to the index are read, and the stage 12 of the microscope main body 21 is driven based on the stage coordinates. In this case, the position to be inspected with the first index is moved to the center of the field of view of the spot illumination observation system, and then switched to high magnification observation by the microscope observation system. The lens is moved to a position directly below the lens 11.

From this state, when an observation image of the sample 7 on the stage 12 is projected onto the eyepiece 9 or the TV camera 10 through the objective lens 11 in step 504, the eyepiece 9 performs enlarged observation of a defect. And TV
The enlarged observation image captured by the camera 10 is displayed on the first display unit 22.

Thereafter, in step 505, the stage coordinates corresponding to each index are read out in the order of registration until it is determined that the magnified observation has been completed for each inspected point, and the operations in steps 503 and 504 are repeated. .

Accordingly, since it is possible to perform the enlarged observation of each inspected portion in the registration order of the indices assigned to the inspected portions on the specimen 7, the inspection work can be performed more efficiently. . (Fourth Embodiment) In the second embodiment, different symbols are added according to the type of defect as a portion to be inspected, and these symbols are designated so that the inspected portion corresponding to each symbol is determined. Although the magnified observation is enabled, in the fourth embodiment,
Only those requiring magnified observation are marked with different symbols.

Since the schematic configuration of the inspection microscope system to which the fourth embodiment is applied is the same as that of FIG. 1 described in the first embodiment, the description will be omitted with reference to FIG. .

In this case, as shown in the flow chart shown in FIG. 6, when the observation image of the specimen 7 is projected on the eyepiece 9 or the TV camera 10 through the objective lens 6 of the spot illumination observation system in step 601, The naked eye observation is performed by the eyepiece 9, and the observation image captured by the TV camera 10 is displayed on the first display unit 22 and is captured by the image processing unit 23.

If an inspected portion to be magnified and observed is found from the observation image displayed on the first display section 22, an instruction is given in step 602 to give an index to the inspected portion. In this case, different symbols are given according to the type of the defect, such as □ for a defect to be inspected, flaw for a scratch, Δ for a foreign substance, and Δ for unevenness. At this time, for defects requiring enlarged observation, a circle is provided as an enlarged display mark instead of these symbols.

Then, an image marked with a symbol in accordance with the type of defect by the image processing in the image processing unit 23 is displayed on the second display unit 24. The stage coordinates are calculated, sent to the stage drive unit 26, and registered.

Thereafter, in step 603, when the enlarged display mark 指定 is designated on the second display section 24, the stage coordinates corresponding to the enlarged display mark 指定 designated by the stage driving section 26 are read out, and the stage coordinates are read out. , The stage 12 of the microscope main body 21 is driven. In this case, when the defect with the designated symbol is moved to the center of the field of view of the spot illumination observation system, and then switched to high magnification observation by the microscope observation system, the defect is automatically moved to the objective lens 11 of the microscope observation system. Moved to just below.

From this state, when an observation image of the specimen 7 on the stage 12 is projected onto the eyepiece 9 or the TV camera 10 via the objective lens 11 in step 604, the eyepiece 9 performs enlarged observation of the defect. And TV
The enlarged observation image captured by the camera 10 is displayed on the first display unit 22.

Thereafter, the operations of steps 603 and 604 described above are repeated until it is determined in step 605 that the magnified observation has been completed for the defect marked with the enlarged display mark ○.

Accordingly, in this way, the type of defect at the inspected location can be confirmed by different symbols given according to the type of defect on the specimen 7, and an enlarged display mark ○ is added thereto. Since only the inspected portion is observed at a high magnification, more efficient inspection can be performed.

In this embodiment, a different symbol is attached to the inspected portion according to the type of the defect, and a defect requiring an enlarged observation is provided with an enlarged display mark ○. Different colors depending on the type of defect, for example, scratches are red, foreign matter is blue, unevenness is yellow, etc., and different colors are given indices, and defects that require magnified observation may be further colored differently. Similar effects can be expected. (Fifth Embodiment) In the first embodiment, a uniform index is given in accordance with the inspected part to be magnified. However, in the fifth embodiment, magnified observation is performed. Identification numbers are given to required inspection locations.

Since the schematic configuration of the inspection microscope system to which the fourth embodiment is applied is the same as that of FIG. 1 described in the first embodiment, the description will be omitted with reference to FIG. .

In this case, as shown in the flowchart of FIG. 7, when the observation image of the sample 7 is projected on the eyepiece 9 or the TV camera 10 via the objective lens 6 of the spot illumination observation system in step 701, The naked eye observation is performed by the eyepiece 9, and the observation image captured by the TV camera 10 is displayed on the first display unit 22 and is captured by the image processing unit 23.

When an inspected portion to be magnified and observed is found from the observation image displayed on the first display section 22, an identification number is assigned as an index to the inspected portion requiring the magnified observation in step 702.

Then, images to which identification numbers are given by the image processing in the image processing section 23 are displayed on the second display section 24, and the stage coordinates are calculated by the position analysis section 25 for these identification numbers, and the stage drive is performed. It is sent to the unit 26 and registered.

Thereafter, in step 703, when the identification number of the inspected portion to be magnified and observed on the second display unit 24 is designated, the stage coordinates corresponding to the identification number designated by the stage driving unit 26 are read out. The stage 12 of the microscope main body 21 is driven based on the stage coordinates. In this case, the inspected portion having the designated identification number is moved to the center of the field of view of the spot illumination observation system, and thereafter, when switching to high magnification observation by the microscope observation system, a defect is automatically generated in the objective lens 11 of the microscope observation system. Moved to just below.

From this state, when an observation image of the sample 7 on the stage 12 is projected onto the eyepiece 9 or the TV camera 10 via the objective lens 11 in step 704, the eyepiece 9 performs enlarged observation of the defect. And TV
The enlarged observation image captured by the camera 10 is displayed on the first display unit 22.

Thereafter, the operations of steps 703 and 704 described above are repeated until it is determined in step 705 that the magnified observation has been completed for the inspected portion with the identification number.

Therefore, in this manner, the inspected portions located at the center of the visual field can be easily recognized from the identification numbers assigned to these inspected portions. (Sixth Embodiment) In the second embodiment, different symbols are added according to the type of defect which is the inspected location, and these symbols are designated so that the inspected location corresponding to each symbol is determined. Although the magnified observation is enabled, in the sixth embodiment, each symbol is further provided with an identification number.

Note that the schematic configuration of the inspection microscope system to which the sixth embodiment is applied is the same as that of FIG. 1 described in the first embodiment, and the description will be omitted with reference to FIG. .

In this case, as shown in the flow chart shown in FIG. 8, when the observation image of the sample 7 is projected on the eyepiece 9 or the TV camera 10 through the objective lens 6 of the spot illumination observation system in step 801, The naked eye observation is performed by the eyepiece 9, and the observation image captured by the TV camera 10 is displayed on the first display unit 22 and is captured by the image processing unit 23.

If an inspected portion to be magnified and observed is found from the observation image displayed on the first display section 22, an instruction is given in step 802 to give an index to the inspected portion. In this case, different symbols are given according to the type of the defect, such as □ for a defect to be inspected, flaw for a scratch, Δ for a foreign substance, and Δ for unevenness, and an identification number along with these symbols.

Then, by the image processing in the image processing section 23, an image provided with a symbol in accordance with the defect type is displayed on the second display section 24 together with the identification number. The stage coordinates are calculated, sent to the stage drive unit 26, and registered.

Thereafter, in step 803, when the identification number of the inspected portion to be magnified and observed on the second display unit 24 is designated, the stage coordinates corresponding to the identification number designated by the stage driving unit 26 are read out. The stage 12 of the microscope main body 21 is driven based on the stage coordinates. In this case, when the defect with the designated identification number is moved to the center of the field of view of the spot illumination observation system, and then switched to high magnification observation by the microscope observation system, the defect is automatically replaced by the objective lens 11 of the microscope observation system. Is moved to just below.

From this state, when the observation image of the specimen 7 on the stage 12 is projected onto the eyepiece 9 or the TV camera 10 via the objective lens 11 in step 804, the defect observation is performed by the eyepiece 9. And TV
The enlarged observation image captured by the camera 10 is displayed on the first display unit 22.

Thereafter, the operations of steps 803 and 804 are repeated until it is determined in step 805 that the magnified observation has been completed for the defect with the identification number.

Therefore, the same effect as that of the fifth embodiment can be expected even in this case. In this embodiment, different symbols are assigned to the inspected portions according to the types of defects and identification numbers are assigned. However, different colors depending on the types of defects, for example, scratches are red, The same effect can be expected by giving indices of different colors, such as blue for foreign matter and yellow for unevenness, and adding an identification number. (Seventh Embodiment) In the above-described fifth embodiment,
An identification number is assigned to an inspected portion that requires magnified observation so that it can be understood from this identification number which inspected portion in the center of the visual field corresponds. In the seventh embodiment, The inspection location at the center of the visual field can be understood by a change in color.

Note that the schematic configuration of the inspection microscope system to which the seventh embodiment is applied is the same as that of FIG. 1 described in the first embodiment, and the description will be omitted with reference to FIG. .

First, the automatic operation will be described. In this case, as shown in the flowchart of FIG.
In step 901, the objective lens 6 of the spot illumination observation system
When the observation image of the specimen 7 is projected onto the eyepiece 9 or the TV camera 10 through the camera, the eye observation is performed by the eyepiece 9 and the observation image captured by the TV camera 10 is displayed on the first display unit 22. And the image processing unit 2
3

If an inspected part to be magnified and observed is found from the observation image displayed on the first display unit 22, an instruction is given in step 902 to give an index to the inspected part. In this case, different symbols are used depending on the type of the defect, such as □ if the inspected portion is a defect, □ for a scratch, △ for a foreign material, and ◇ for an unevenness (or red for the scratch, blue for the foreign material, yellow for the unevenness, etc.). Indexes with different colors).

Then, an image provided with a symbol (or color index) according to the type of defect by the image processing in the image processing unit 23 is displayed on the second display unit 24, and the symbol (or color index) is Stage coordinates are calculated by the position analysis unit 25, sent to the stage drive unit 26, and registered in order.

After that, when magnifying observation is instructed in step 903, among the symbols (or color indices) registered in the stage drive unit 26, the stage coordinates corresponding to the first registered symbol (or color indices) are read. The stage 12 of the microscope main body 21 is driven based on the stage coordinates. In this case, the inspected portion to which the designated symbol (or color index) is attached is moved to the center of the visual field of the spot illumination observation system. Then, in step 904, the color of the symbol (or color index) moved to the center of the field of view is changed, and then the mode is switched to high-magnification observation by the microscope observation system. 11 is moved to just below.

From this state, when an observation image of the sample 7 on the stage 12 is projected onto the eyepiece 9 or the TV camera 10 via the objective lens 11 in step 905, the eyepiece 9 performs enlarged observation of the defect. And TV
The enlarged observation image captured by the camera 10 is displayed on the first display unit 22.

Thereafter, the stage coordinates corresponding to each index are read out in the order of registration until it is determined in step 906 that the magnified observation has been completed for each inspected point, and the operations in steps 903, 904, and 905 described above are performed. Repeated.

Next, the manual operation will be described. In this case, as shown in the flowchart of FIG. 9B, when a registered symbol (or color index) is designated in step 907, a stage corresponding to the designated symbol (or color index) is designated in step 908. The coordinates are read, and the stage 12 of the microscope main body 21 is driven based on the stage coordinates. In this case, the inspected portion to which the designated symbol (or color index) is attached is moved to the center of the visual field of the spot illumination observation system. Then, the color of the symbol (or color index) moved to the center of the field of view is changed, and then the mode is switched to high-magnification observation by the microscope observation system. Be moved. Others are the same as FIG. 9A.

Therefore, even in this case, the inspected portion located at the center of the visual field can be easily recognized from the change in the color of the symbol (or the color index). (Eighth Embodiment) In the above-described embodiment, when an index assigned to a location to be inspected is designated, the location to be inspected corresponding to the designated index can be magnified and observed, or
In order to register the indices assigned to the inspected locations, the inspected locations corresponding to these indices can be enlarged and observed.
In the eighth embodiment, an inspected portion corresponding to an index is selected so that the moving distance of the stage is the shortest, so that enlarged observation is possible.

In this case, as shown in the flowchart shown in FIG. 10, in step 1001, the observation image of the sample 7 is changed through the objective lens 6 of the spot illumination observation system.
Alternatively, when the image is projected on the TV camera 10, the naked eye observation is performed by the eyepiece 9, the observation image captured by the TV camera 10 is displayed on the first display unit 22, and is captured by the image processing unit 23.

If an inspected portion to be magnified and observed is found from the observation image displayed on the first display unit 22, an instruction is given in step 1002 to give an index to the inspected portion.
In this case, different symbols are used depending on the type of the defect, such as □ if the inspected portion is a defect, □ for a scratch, △ for a foreign material, and ◇ for an unevenness (or red for the scratch, blue for the foreign material, yellow for the unevenness, etc.).
Indexes with different colors).

Then, by the image processing in the image processing section 23, an image provided with a symbol (or color index) in accordance with the type of defect is displayed on the second display section 24, and these symbols (or color index) are displayed. ) Are calculated by the position analysis unit 25, sent to the stage drive unit 26, and registered in order.

Thereafter, when magnifying observation is instructed, in step 1003, the stage coordinates of the symbol (or color index) located at the shortest distance from the stage coordinates of the symbol (or color index) at the center of the current visual field are read. At the same time, the shortest movement path of the stage 12 with respect to the stage coordinates is searched. Then, in step 1004,
When the inspection position of the newly read stage coordinates is moved to the center of the field of view of the spot illumination observation system, and then switched to high magnification observation by the microscope observation system, the inspection position is automatically set to the objective lens of the microscope observation system. 11 is moved to just below.

From this state, when an observation image of the specimen 7 on the stage 12 is projected onto the eyepiece 9 or the TV camera 10 via the objective lens 11 in step 1005, the eyepiece 9 performs enlarged observation of a defect. And T
The enlarged observation image captured by the V camera 10 is displayed on the first display unit 22.

Thereafter, in step 1006, the stage coordinates corresponding to each index are read out in the order of registration until it is determined that the magnified observation has been completed for each inspected point, and the operations in steps 1004 and 1005 are repeated. .

Accordingly, since it is possible to move to the center of the field of view while searching for the shortest moving distance for each inspected portion in this way, the work efficiency for magnified observation is greatly improved. Can be.

[0082]

As described above, according to the present invention, even if a plurality of inspected portions exist on a sample, the inspected portions can be indexed by assigning an index to the inspected portions. Since it can be recognized separately from others, the part to be inspected is not lost during the inspection, and the inspection of the inspected part based on each index can be performed efficiently and accurately.

Also, by simply pointing the indices, the inspection position corresponding to the indices is automatically moved to the center of the field of view of the spot illumination observation system by the stage coordinates calculated by the position analysis means based on the positions of these indices. As a result, it is possible to continuously perform high-magnification observation of each inspected point, compared to the conventional method of performing inspection while alternately switching the spot illumination observation system and the microscope observation system for each inspected point. The inspection of the inspected position can be performed efficiently.

Further, different types of indices are set according to the type of the inspected portion, and the type of the inspected portion, such as a defect, can be easily identified. Therefore, the inspection order is determined according to the type of the index. By doing so, it is possible to perform inspections with higher efficiency.

[Brief description of the drawings]

FIG. 1 is a diagram showing a schematic configuration of a first embodiment of the present invention.

FIG. 2 is an exemplary view for explaining a method of converting a distance on an image into a distance on a stage according to the first embodiment;

FIG. 3 is a flowchart illustrating the operation of the first embodiment.

FIG. 4 is a flowchart illustrating the operation of the second embodiment of the present invention.

FIG. 5 is a flowchart illustrating an operation according to the third embodiment of the present invention.

FIG. 6 is a flowchart illustrating an operation according to the fourth embodiment of the present invention.

FIG. 7 is a flowchart illustrating an operation according to the fifth embodiment of the present invention.

FIG. 8 is a flowchart for explaining the operation of the sixth embodiment of the present invention.

FIG. 9 is a flowchart illustrating the operation of the seventh embodiment of the present invention.

FIG. 10 is a flowchart illustrating an operation according to the eighth embodiment of the present invention.

FIG. 11 is a diagram showing a schematic configuration of a conventional inspection microscope system.

FIG. 12 is a diagram for explaining the operation of a conventional inspection microscope system.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 ... Microscope main body 2 ... Epi-illumination light source 3 ... Lens 4 ... Optical path division cube 5 ... Mirror 6 ... Objective lens 7 ... Sample 8 ... Image forming lens 9 ... Eyepiece 10 ... TV camera 11 ... Objective lens 12 ... Stage 21 ... Microscope Main unit 22: First display unit 23: Image processing unit 24: Second display unit 25: Position analysis unit 26: Stage drive unit

Claims (3)

[Claims] 1. An inspection microscope system having at least two observation systems having different magnifications and performing microscopic observation with a high-magnification observation system based on an inspection result of a sample observed by a low-magnification observation system, wherein: Imaging means for capturing an observation image of a sample by a magnification observation system; image processing means for enabling an index to be inserted into a portion to be inspected in an image captured by the imaging means; and index inserted by the image processing means Control means for controlling a shift to microscopic observation by the high-magnification observation system based on the above. 2. The apparatus according to claim 1, wherein the control unit includes a position analysis unit that calculates a coordinate of a stage on which the sample is mounted from an index position in the captured image, based on the stage coordinates calculated by the position analysis unit. The inspection microscope system according to claim 1, wherein an inspection location corresponding to the index is moved to a center of a field of view of the low-magnification observation system, and is switched to microscopic observation by the high-magnification observation system. 3. The inspection microscope according to claim 1, wherein different types of indices to be inserted into the inspection location in the captured image are set according to the type of the inspection location. system.