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JP2000052217A - Tool and processing method - Google Patents

Tool and processing method

Info

Publication number
JP2000052217A
JP2000052217A JP10236601A JP23660198A JP2000052217A JP 2000052217 A JP2000052217 A JP 2000052217A JP 10236601 A JP10236601 A JP 10236601A JP 23660198 A JP23660198 A JP 23660198A JP 2000052217 A JP2000052217 A JP 2000052217A
Authority
JP
Japan
Prior art keywords
tool
processing
convex lens
center
cutting edge
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10236601A
Other languages
Japanese (ja)
Inventor
Kiyoshi Sawada
潔 沢田
Tomohiko Kawai
知彦 河合
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fanuc Corp
Original Assignee
Fanuc Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fanuc Corp filed Critical Fanuc Corp
Priority to JP10236601A priority Critical patent/JP2000052217A/en
Publication of JP2000052217A publication Critical patent/JP2000052217A/en
Pending legal-status Critical Current

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  • Grinding And Polishing Of Tertiary Curved Surfaces And Surfaces With Complex Shapes (AREA)

Abstract

PROBLEM TO BE SOLVED: To provide a processing method which does not reduce the surface coarseness at the center part of the processing form, and a forming bite tool which can manufacture a tool used in the above processing method easily. SOLUTION: This tool 3 has a cutting edge 3a with the form corresponding to the form of one side half of the convex lens 1 of a processing form. The cutting edge 3a faces to the outer side to the tool rotating center. While the tool 3 is rotated (autorotated) by making the rotation center O1 as the center, the tool 3 is revolved along the outer periphery of the convex lens 1 by making the center O2 of the convex lens 1 as the center, so as to process the convex lens 1. The peripheral part of the above convex lens 1 is processed by the rotating center O1, while the center part O2 of the convex lens 1 is processed by the peripheral part of the cutting edge 3a. At the center part of the convex lens 1, the processing speed is fast by the rotation of the tool 3, and the processing coarseness is improved. Since the tool center O1 and a specific position of the cutting edge 3a are not necessary to make coinside accuartely, the tool is manufactured easily.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】本発明は、切削加工、研削加
工方法に関し、特に、マイクロアレイ形状等の精密切削
加工、精密研削加工に適した加工方法に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a cutting method and a grinding method, and more particularly to a method suitable for precision cutting and precision grinding of a microarray or the like.

【0002】[0002]

【従来の技術】最近のマルチメディアの普及に伴って都
市部ビジネスエリアのLAN間通信や高速コンピュータ
通信だけではなく、住宅エリアにおいてもCATVやパ
ソコン通信など多種大量の情報を同時に処理伝送する要
求がますます強くなっている。これを解決する次世代の
超高速、大容量の情報処理システムとして光ファイバ
ー、面発光レーザー、マイクロレンズアレイなどを組み
合わせて現在の千倍以上にあたる毎秒1兆ビット級の超
並列光情報処理システムが盛んに研究されている。
2. Description of the Related Art With the recent spread of multimedia, there has been a demand not only for inter-LAN communication and high-speed computer communication in an urban business area, but also for simultaneous processing and transmission of a large amount of various kinds of information such as CATV and personal computer communication in a residential area. It is getting stronger. As a next-generation ultra-high-speed, large-capacity information processing system that solves this problem, ultra-parallel 1 trillion bits-per-second ultra-parallel optical information processing system, which is more than 1,000 times the current, by combining optical fibers, surface-emitting lasers, and microlens arrays, is prosperous. Has been studied.

【0003】その中で、マイクロアレイの加工に関して
は、大別して半導体製造技術を応用したフォトリソグラ
フィー技術によるものと、ダイヤモンドバイトやダイヤ
モンド砥石を用いた超精密機械加工技術によるものが提
案されている。
[0003] Among them, microarray processing has been roughly classified into a photolithography technique using a semiconductor manufacturing technique and an ultraprecision machining technique using a diamond tool or a diamond grindstone.

【0004】図3は凸レンズアレイの模式図である。同
じ形状のものが一定間隔で規則正しく並んでいる形状を
アレイと呼び、図3のように凸レンズ1が並んだものを
凸レンズアレイと呼ぶ。この凸レンズ1のマイクロレン
ズアレイ(アレイのピッチが250ミクロン、レンズ表
面の曲面の半径が約400ミクロン、レンズの高さが約
20ミクロン程度)2を、マイクロ形状の加工分野で主
流となっている半導体製造技術を応用したフォトグラフ
ィー技術で行うと、図4に示すように、凸レンズ面が
2.5次元近似となる。図4はフォトグラフィー技術を
用いて凸レンズ1を加工した場合の模式図である。図4
において、凸レンズ1をフォトグラフィー技術で加工す
ると、フォトグラフィー技術では基本的に平面の加工し
かできないため、凸レンズ1のような3次元曲面の加工
に対して図4で符号1´で示すような段階状の2.5次
元近似(段階状の3次元形状であるが、平面が重なって
いるということから2.5次元近似としている)の凸レ
ンズしか得られない。そのため、レンズの効率が悪いと
いう問題を抱えている。
FIG. 3 is a schematic view of a convex lens array. A shape in which the same shapes are regularly arranged at regular intervals is called an array, and a shape in which the convex lenses 1 are arranged as shown in FIG. 3 is called a convex lens array. The micro lens array 2 (the pitch of the array is 250 microns, the radius of the curved surface of the lens surface is about 400 microns, and the height of the lens is about 20 microns) 2 of the convex lens 1 is mainly used in the field of processing a micro shape. When a photolithography technique using a semiconductor manufacturing technique is used, the convex lens surface becomes a 2.5-dimensional approximation as shown in FIG. FIG. 4 is a schematic diagram when the convex lens 1 is processed by using the photography technique. FIG.
In the case where the convex lens 1 is processed by the photographic technology, the photographic technology can basically process only a flat surface. Therefore, the processing as shown by reference numeral 1 'in FIG. Only a convex lens of a 2.5-dimensional approximation (a three-dimensional step-like shape, but a two-dimensional approximation because the planes overlap) can be obtained. Therefore, there is a problem that the efficiency of the lens is low.

【0005】このフォトグラフィー技術による3次元曲
面加工では、大量生産性に優れている反面、3次元形状
を段階状近似するため、精度のよい曲面が得られないと
いう問題がある。これに対して、単結晶ダイヤモンド切
削工具など切れ味の良い工具と、非常に滑らかな送りと
超精密位置決めが可能な超精密加工機による機械加工技
術による加工は、多量生産性は劣るものの、工具を自由
に成形することで滑らかな3次元曲面にも対応すること
ができる。
[0005] The three-dimensional curved surface processing by the photography technique is excellent in mass productivity, but has a problem that a highly accurate curved surface cannot be obtained because the three-dimensional shape is approximated stepwise. On the other hand, machining with a sharp tool such as a single crystal diamond cutting tool and machining with an ultra-precision machining machine capable of extremely smooth feed and ultra-precision positioning are not suitable for mass production. By forming freely, it is possible to cope with a smooth three-dimensional curved surface.

【0006】図2は、この機械精密加工による従来から
行われている回転体の加工方法を適用し、凸レンズアレ
イ2を加工する加工方法の説明図である。凸レンズ1が
多数規則正しく並んだ凸レンズアレイ2を加工する場
合、工具として、加工しようとする凸レンズ1の中心を
通りレンズ面に垂直な断面におけるレンズ面輪郭形状の
片側半分に対応した切れ刃4aを備えた総形バイト4を
持つ1枚刃のエンドミルを用い、該総形バイト4を超精
密加工機の主軸に取り付ける。なお、図中4bは総形バ
イト4のシャンクである。そして、主軸を回転させて総
形バイト4を回転させながら、凸レンズアレイ2のピッ
チにあった所定の位置で主軸の軸方向に切り込むことに
より所望の凸レンズ1の形状を得るようにする。
FIG. 2 is an explanatory diagram of a processing method for processing the convex lens array 2 by applying the conventional processing method of a rotating body by the mechanical precision processing. When processing a convex lens array 2 in which a large number of convex lenses 1 are regularly arranged, a cutting edge 4a corresponding to one half of a lens surface contour shape in a cross section passing through the center of the convex lens 1 to be processed and perpendicular to the lens surface is provided as a tool. Using a single-flute end mill having a shaped tool 4, the shaped tool 4 is attached to the main shaft of an ultra-precision processing machine. In the figure, reference numeral 4b denotes a shank of the overall shape tool 4. Then, the desired convex lens 1 is obtained by cutting in the axial direction of the main shaft at a predetermined position corresponding to the pitch of the convex lens array 2 while rotating the forming tool 4 by rotating the main shaft.

【0007】この加工方法の利点は、各レンズ1の加工
工程で機械の1軸しか使用していないため、機械の運動
精度の影響を受け難いことと、加工時間が短いことであ
る。しかし反面、総形バイト4の切れ刃4aの頂点aを
目に見えない工具回転中心に正確に合わせて工具4を形
成しなければならないため、非常に工具製作が困難であ
るという問題がある。
The advantage of this processing method is that since only one axis of the machine is used in the processing step of each lens 1, it is hardly affected by the movement accuracy of the machine, and the processing time is short. However, on the other hand, since the tool 4 must be formed by accurately aligning the apex a of the cutting edge 4a of the forming tool 4 with the invisible center of rotation of the tool, there is a problem that it is very difficult to manufacture the tool.

【0008】また、工具4の回転中心軸と被加工物であ
る凸レンズの中心軸が一致していることから、凸レンズ
1の中心近傍では加工速度が非常に遅く(レンズ中心で
は速度「0」)、この部分は加工毟れなど表面粗さの低
下を引き起こしてしまうという欠点がある。
Further, since the central axis of rotation of the tool 4 and the central axis of the convex lens which is the workpiece are coincident, the processing speed is very slow near the center of the convex lens 1 (the speed is "0" at the center of the lens). However, this portion has a drawback that it causes a decrease in surface roughness such as processing tears.

【0009】[0009]

【発明が解決しようとする課題】本発明の目的は、上記
従来技術の欠点を改善し、被加工物の中心部において表
面粗さの低下を招ない加工方法を提供すると共に、その
加工方法で使用する工具の製作が容易な総形バイトの工
具を提供することにある。
SUMMARY OF THE INVENTION It is an object of the present invention to provide a working method which solves the above-mentioned drawbacks of the prior art and which does not cause a decrease in surface roughness at the center of a workpiece. An object of the present invention is to provide a tool having a full-sized cutting tool in which a tool to be used is easily manufactured.

【0010】[0010]

【課題を解決するための手段】本発明の工具は、回転体
の軸近傍を含む凸曲面を加工する総形工具であって、前
記曲面に沿う形状の総形用の切れ刃又は砥石を備え、こ
の切れ刃又は砥石は、工具の先端部において工具回転中
心軸に対して外側に向いて形成されている。この工具を
用いて加工する際には、工具を回転中心軸を中心に回転
させると共に、加工形状の中心軸の周りに沿って工具を
公転させて被加工物を加工する。これによって凸形状の
加工形状を加工することができる。
A tool according to the present invention is a full-form tool for machining a convex curved surface including the vicinity of an axis of a rotating body, and is provided with a cutting edge or a grindstone for forming a shape along the curved surface. The cutting edge or whetstone is formed at the tip of the tool so as to face outward with respect to the tool rotation center axis. When processing using this tool, the workpiece is processed by rotating the tool about a rotation center axis and revolving the tool along the center axis of the processing shape. Thereby, a convex processing shape can be processed.

【0011】[0011]

【発明の実施の形態】以下本発明の一実施形態を説明す
る。図1は本発明の一実施形態における工具、及びこの
工具を使用した加工方法一実施形態である。
DESCRIPTION OF THE PREFERRED EMBODIMENTS One embodiment of the present invention will be described below. FIG. 1 shows a tool according to an embodiment of the present invention and a working method using the tool.

【0012】この実施形態では、回転体の加工方法及び
その工具として、凸レンズアレイ2を加工する加工方
法、及び該加工に使用する総形工具を示している。線対
称である凸レンズ1を加工する工具として、加工対象の
凸レンズ1の中心を通るレンズ面垂直断面における輪郭
形状の片側半分の形状に合わせた総形加工用の切れ刃3
aを先端端面部に備えた総形バイト3を用いる。この工
具3は、切れ刃3aが外側に向き、切れ刃3aの回転中
心部で加工対象の凸レンズ1の周辺部を加工し、切れ刃
3aの周辺部で凸レンズ1の中心部を加工するように切
れ刃3aが形成されている。すなわち、図2に示した従
来の工具4と比較し、加工部の切れ刃が外側に向き、レ
ンズ底面の円の略半径分オフセットして総形バイト3が
形成されている。この工具3の回転中心軸O1 と回転中
心側の切れ刃3aの開始位置は必ずしも一致する必要は
ない。なお、図1において3bは工具3のシャンクであ
る。
In this embodiment, as a method of processing a rotating body and a tool therefor, a method of processing a convex lens array 2 and a forming tool used for the processing are shown. As a tool for processing the convex lens 1 which is axisymmetric, a cutting edge 3 for full-form processing adapted to one half of a contour shape in a vertical cross section of a lens surface passing through the center of the convex lens 1 to be processed.
A full-form cutting tool 3 having a at the tip end face is used. In the tool 3, the cutting edge 3a faces outward, the peripheral portion of the convex lens 1 to be processed is processed at the center of rotation of the cutting edge 3a, and the central portion of the convex lens 1 is processed at the peripheral portion of the cutting edge 3a. A cutting edge 3a is formed. That is, as compared with the conventional tool 4 shown in FIG. 2, the cutting edge of the processed portion is directed outward, and the full-length cutting tool 3 is formed offset by a substantially radius of a circle on the bottom surface of the lens. The rotation center axis O1 of the tool 3 and the start position of the cutting edge 3a on the rotation center side do not necessarily have to coincide with each other. In FIG. 1, reference numeral 3b denotes a shank of the tool 3.

【0013】このような工具3を用いて凸レンズアレイ
2の凸レンズ(回転体)1を加工する際には、直交する
X,Y,Zの3軸を有する工作機械の主軸にこの工具3
取り付け、凸レンズアレイ2を形成する被加工物をテー
ブルに取り付ける。例えば、主軸がZ軸方向に移動し、
かつ、テーブルがX,Y方向に移動する工作機械を用い
て、工具を被加工物(凸レンズアレイ2)の所望位置に
位置決めし、主軸を回転させることによって工具3を回
転させながらZ軸方向に切り込み、かつ加工しようとす
る凸リンズの中心02 を中心にしてレンズ底面の円に沿
うように主軸(Z軸)をテーブル(X−Y平面)に対し
て公転運動させ、この公転1周で1切り込み分のレンズ
加工を終了する。順次切り込みを行い、上記自転と公転
を行うことによって凸レンズ1の加工を行い、切り込み
量の総計が所定目標量に達したならば、この凸レンズ1
の加工を終了する。なお、上記公転運動は、X,Y軸の
2軸平面を円運動するように直線2軸(X,Y軸)を制
御して行う。
When processing the convex lens (rotating body) 1 of the convex lens array 2 using such a tool 3, the tool 3 is attached to the main axis of a machine tool having three orthogonal X, Y, and Z axes.
Attach, the workpiece to form the convex lens array 2 is attached to the table. For example, the main axis moves in the Z-axis direction,
In addition, using a machine tool in which the table moves in the X and Y directions, the tool is positioned at a desired position on the workpiece (convex lens array 2), and the spindle is rotated to rotate the tool 3 in the Z-axis direction. The main axis (Z axis) is revolved with respect to the table (XY plane) along the circle on the bottom surface of the lens around the center 02 of the convex ring to be cut and processed. The lens processing for the cut is completed. The convex lens 1 is machined by sequentially making cuts and performing the above-described rotation and revolution, and when the total amount of cuts reaches a predetermined target amount, the convex lens 1 is processed.
Processing of is ended. The orbital motion is performed by controlling two linear axes (X and Y axes) so as to make a circular motion on a two-axis plane of X and Y axes.

【0014】以上のように工具3(主軸)を、その回転
中心O1 を中心に回転(自転)させながら、加工しよう
とする凸レンズの中心O2 を中心にレンズ底面の円に沿
うように工具3(主軸)を被加工物に対して相対移動さ
せ公転させることによって、凸レンズ1の加工を行う。
そして凸レンズ1をアレイ状に加工するには、工具3を
被加工物(テーブル)に対して相対的にアレイの1ピッ
チ分オフセットして位置決めし上述した動作を行うこと
によって、凸レンズアレイ2を加工する。
As described above, while rotating (rotating) the tool 3 (spindle) about its rotation center O 1, the tool 3 (spindle) extends along the circle on the bottom of the lens about the center O 2 of the convex lens to be processed. The convex lens 1 is processed by moving the main shaft relative to the workpiece and revolving it.
To process the convex lens 1 into an array, the tool 3 is offset relative to the workpiece (table) by one pitch of the array and positioned, and the above-described operation is performed. I do.

【0015】上述したように、本発明の工具3は、該工
具の回転中心部の切れ刃3aで被加工物の加工形状の周
辺部(凸レンズの周辺部)を加工し、被加工物の中心部
(凸レンズの中心部)を工具の周辺部の切れ刃3aで加
工するから、被加工物の中心部(凸レンズの中心部)
は、工具回転(自転)により高速の切削速度で加工され
ることになり、中心部に毟れ等が生じることはなく、表
面粗さの低下を招くことはない。また加工形状の周辺部
は工具が公転することにより加工されるので、この部分
も面粗さの低下を招くことはない。面粗さの調整は、工
具回転数と送り速度に関係するので、要求精度に応じ
て、これらのパラメータを調整することによって行えば
よい。
As described above, in the tool 3 of the present invention, the peripheral portion (the peripheral portion of the convex lens) of the processing shape of the workpiece is processed by the cutting edge 3a at the center of rotation of the tool. Since the portion (the central portion of the convex lens) is machined with the cutting edge 3a around the tool, the central portion of the workpiece (the central portion of the convex lens)
Is processed at a high cutting speed by tool rotation (rotation), so that there is no tearing at the center and no reduction in surface roughness is caused. Further, since the peripheral portion of the processing shape is processed by revolving the tool, this portion does not cause a decrease in surface roughness. Since the adjustment of the surface roughness is related to the number of rotations of the tool and the feed speed, the adjustment may be performed by adjusting these parameters according to the required accuracy.

【0016】さらに、本発明のこの加工方法では、工具
回転中心O1 と、工具3の切れ刃3aの特定な位置を正
確に合わせる必要がない。すなわち、図2に示した従来
例のように切れ刃の頂点aを回転中心軸O1 に合わせる
必要がなく、工具作成が容易となる。
Further, in this machining method of the present invention, it is not necessary to exactly match the tool rotation center O1 with the specific position of the cutting edge 3a of the tool 3. That is, unlike the conventional example shown in FIG. 2, it is not necessary to align the vertex a of the cutting edge with the rotation center axis O1, and the tool can be easily prepared.

【0017】なお、上記実施形態では、総形バイト(総
形フライス)の先端端面部を切れ刃3aとした工具3の
例を示したが、切れ刃の代わりに砥石とした工具とする
ことによって研削加工を行うようにすることもできる。
また、上述した凸レンズの加工以外にも、回転体で凸面
形状の加工形状を加工する場合に本発明を適用して中心
部の加工面粗さを改善し、かつ、工具製作を容易にする
ものである。
In the above embodiment, the example of the tool 3 having the cutting edge 3a at the tip end face of the forming tool (form milling tool) has been described. Grinding may be performed.
In addition to the above-described processing of the convex lens, the present invention is applied to the case where the processing of the convex shape is processed by the rotating body to improve the processing surface roughness of the central portion and facilitate the tool production. It is.

【0018】[0018]

【発明の効果】本発明の工具は、回転体の軸近傍を含む
凸曲面を加工する総形工具において、切れ刃又は砥石の
回転周辺部で加工形状の中心部を加工するようにしたか
ら、加工形状の中心部の加工面粗さが低下することはな
く、加工面精度のよい加工ができる。これにより、マイ
クロレンズアレイなどのアレイ状のマクロ形状の回転体
凸曲面部の機械加工を可能にした。また、工具の加工部
の特定な位置と工具回転中心を正確に一致させる必要が
なく、工具の製作が容易である。
According to the tool of the present invention, in the forming tool for machining a convex curved surface including the vicinity of the axis of the rotating body, the center of the machining shape is machined around the cutting edge or the rotating periphery of the grindstone. The processing surface roughness at the center of the processing shape does not decrease, and processing with high processing surface accuracy can be performed. As a result, the machining of the convex curved surface portion of the rotating body in the form of a macro such as a microlens array is enabled. Further, it is not necessary to exactly match the specific position of the processing portion of the tool with the center of rotation of the tool, and the tool can be easily manufactured.

【図面の簡単な説明】[Brief description of the drawings]

【図1】本発明の一実施形態の工具と加工方法を説明す
る説明図である。
FIG. 1 is an explanatory diagram illustrating a tool and a machining method according to an embodiment of the present invention.

【図2】従来の機械精密加工による凸レンズアレイの加
工方法を説明する説明図である。
FIG. 2 is an explanatory diagram illustrating a conventional method for processing a convex lens array by mechanical precision processing.

【図3】凸レンズアレイの模式図である。FIG. 3 is a schematic diagram of a convex lens array.

【図4】フォトグラフィー技術を用いて凸レンズを加工
した場合の模式図である。
FIG. 4 is a schematic diagram when a convex lens is processed by using a photography technique.

【符号の説明】[Explanation of symbols]

1 凸レンズ 2 凸レンズアレイ 3 工具 3a 切れ刃 3b シャンク 4 工具 4a 切れ刃 4b シャンク Reference Signs List 1 convex lens 2 convex lens array 3 tool 3a cutting edge 3b shank 4 tool 4a cutting edge 4b shank

Claims (5)

【特許請求の範囲】[Claims] 【請求項1】 回転体の軸近傍を含む凸曲面を加工する
総形工具であって、前記曲面に沿う形状の総形用の切れ
刃を、工具の先端部において工具回転中心軸に対して外
側に向いて形成した工具。
1. A forming tool for machining a convex curved surface including the vicinity of an axis of a rotating body, wherein a cutting edge for forming in a shape along the curved surface is formed at a tip end of the tool with respect to a tool rotation center axis. Tool formed outward.
【請求項2】 前記切れ刃の代わりに砥石を用いた請求
項1記載の工具。
2. The tool according to claim 1, wherein a whetstone is used in place of said cutting edge.
【請求項3】 請求項1若しくは請求項2記載の工具を
用い、該工具を回転中心軸を中心に回転させると共に、
加工形状の中心軸の周りに沿って公転させて被加工物を
加工する加工方法。
3. The tool according to claim 1 or 2, wherein the tool is rotated about a rotation center axis.
A processing method for processing a workpiece by revolving around a central axis of a processing shape.
【請求項4】 前記加工形状は線対称で凸面形状である
請求項3記載の加工方法。
4. The processing method according to claim 3, wherein the processing shape is line-symmetric and convex.
【請求項5】 凸レンズの加工である請求項4記載の加
工方法。
5. The processing method according to claim 4, wherein the processing is processing of a convex lens.
JP10236601A 1998-08-10 1998-08-10 Tool and processing method Pending JP2000052217A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10236601A JP2000052217A (en) 1998-08-10 1998-08-10 Tool and processing method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10236601A JP2000052217A (en) 1998-08-10 1998-08-10 Tool and processing method

Publications (1)

Publication Number Publication Date
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ID=17003071

Family Applications (1)

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Country Status (1)

Country Link
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CN102275082A (en) * 2010-06-03 2011-12-14 发那科株式会社 Machine tool with tool holder, and machining method using machine tool
JP2012035365A (en) * 2010-08-06 2012-02-23 Hitachi High-Technologies Corp Cutting tool and method for machining emboss shape
CN102513899A (en) * 2011-12-31 2012-06-27 哈尔滨工业大学 Single-direction inclined-shaft profiling precision grinding method of array optical elements of micro circular troughs
CN105364641A (en) * 2015-11-19 2016-03-02 浙江工业大学 Micro semi-ring female die array-mode lapping and polishing method and device
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Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20020001942A (en) * 2000-06-21 2002-01-09 김명오 A method griding for made of ston-tile
CN102275082A (en) * 2010-06-03 2011-12-14 发那科株式会社 Machine tool with tool holder, and machining method using machine tool
JP2011251383A (en) * 2010-06-03 2011-12-15 Fanuc Ltd Tool holder with variable tool rotation radius, machine tool with tool, and machining method using the machine tool
US8950300B2 (en) 2010-06-03 2015-02-10 Fanuc Corporation Tool holder with variable tool rotation radius, machine tool with tool holder, and machining method using machine tool
JP2012035365A (en) * 2010-08-06 2012-02-23 Hitachi High-Technologies Corp Cutting tool and method for machining emboss shape
CN102513899A (en) * 2011-12-31 2012-06-27 哈尔滨工业大学 Single-direction inclined-shaft profiling precision grinding method of array optical elements of micro circular troughs
CN105364641A (en) * 2015-11-19 2016-03-02 浙江工业大学 Micro semi-ring female die array-mode lapping and polishing method and device
CN117817545A (en) * 2022-06-09 2024-04-05 长春设备工艺研究所 Non-constant-height-surface constant-speed grinding device for small narrow circular ring surface tool

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