ITTO980585A0 - Modulo di trasporto - Google Patents
Modulo di trasportoInfo
- Publication number
- ITTO980585A0 ITTO980585A0 IT98TO000585A ITTO980585A ITTO980585A0 IT TO980585 A0 ITTO980585 A0 IT TO980585A0 IT 98TO000585 A IT98TO000585 A IT 98TO000585A IT TO980585 A ITTO980585 A IT TO980585A IT TO980585 A0 ITTO980585 A0 IT TO980585A0
- Authority
- IT
- Italy
- Prior art keywords
- transport form
- transport
- Prior art date
Links
Classifications
-
- H10P72/50—
-
- H10P72/1912—
-
- H10P72/1914—
-
- H10P72/1918—
-
- H10P72/1921—
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US08/891,644 US6010008A (en) | 1997-07-11 | 1997-07-11 | Transport module |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| ITTO980585A0 true ITTO980585A0 (it) | 1998-07-03 |
| ITTO980585A1 ITTO980585A1 (it) | 2000-01-03 |
| IT1304687B1 IT1304687B1 (it) | 2001-03-28 |
Family
ID=25398582
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| IT1998TO000585A IT1304687B1 (it) | 1997-07-11 | 1998-07-03 | Contenitore richiudibile per conservare e trasportare fette disemiconduttore |
Country Status (10)
| Country | Link |
|---|---|
| US (2) | US6010008A (it) |
| JP (4) | JP4206149B2 (it) |
| KR (1) | KR100507952B1 (it) |
| CN (3) | CN1107005C (it) |
| DE (1) | DE19830640A1 (it) |
| FR (1) | FR2768135B1 (it) |
| GB (1) | GB2327298B (it) |
| IT (1) | IT1304687B1 (it) |
| NL (2) | NL1009466C2 (it) |
| SG (1) | SG72840A1 (it) |
Families Citing this family (86)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US8028978B2 (en) * | 1996-07-15 | 2011-10-04 | Semitool, Inc. | Wafer handling system |
| US6390754B2 (en) * | 1997-05-21 | 2002-05-21 | Tokyo Electron Limited | Wafer processing apparatus, method of operating the same and wafer detecting system |
| US6010008A (en) * | 1997-07-11 | 2000-01-04 | Fluoroware, Inc. | Transport module |
| US6736268B2 (en) * | 1997-07-11 | 2004-05-18 | Entegris, Inc. | Transport module |
| US6428729B1 (en) * | 1998-05-28 | 2002-08-06 | Entegris, Inc. | Composite substrate carrier |
| US6871741B2 (en) * | 1998-05-28 | 2005-03-29 | Entegris, Inc. | Composite substrate carrier |
| US6216874B1 (en) * | 1998-07-10 | 2001-04-17 | Fluoroware, Inc. | Wafer carrier having a low tolerance build-up |
| US6082540A (en) * | 1999-01-06 | 2000-07-04 | Fluoroware, Inc. | Cushion system for wafer carriers |
| US6193430B1 (en) * | 1999-03-18 | 2001-02-27 | Aesop, Inc. | Quasi-kinematic coupling and method for use in assembling and locating mechanical components and the like |
| JP3916342B2 (ja) * | 1999-04-20 | 2007-05-16 | 信越ポリマー株式会社 | 基板収納容器 |
| US6389707B1 (en) | 2000-08-17 | 2002-05-21 | Motorola, Inc. | Wafer container having electrically conductive kinematic coupling groove to detect the presence of the wafer container on a support surface, the support surface, and method |
| US6389706B1 (en) | 2000-08-17 | 2002-05-21 | Motorola, Inc. | Wafer container having electrically conductive kinematic coupling groove, support surface with electrically conductive kinematic coupling pin, transportation system, and method |
| US6632068B2 (en) * | 2000-09-27 | 2003-10-14 | Asm International N.V. | Wafer handling system |
| JP3955724B2 (ja) * | 2000-10-12 | 2007-08-08 | 株式会社ルネサステクノロジ | 半導体集積回路装置の製造方法 |
| US20020114686A1 (en) * | 2000-12-04 | 2002-08-22 | Phil Glynn | Wafer carrier with stacking adaptor plate |
| WO2002055392A2 (en) * | 2001-01-09 | 2002-07-18 | Microtome Precision, Inc. | Apparatus and method for transporting a container |
| KR100694601B1 (ko) * | 2001-01-17 | 2007-03-13 | 삼성전자주식회사 | 웨이퍼 적재 장치 |
| US6923325B2 (en) | 2001-07-12 | 2005-08-02 | Entegris, Inc. | Horizontal cassette |
| TWI233912B (en) * | 2001-08-27 | 2005-06-11 | Entegris Inc | Modular carrier system for housing semiconductor wafer disks and similar inventory, and method of manufacturing the same |
| US20030188990A1 (en) * | 2001-11-14 | 2003-10-09 | Bhatt Sanjiv M. | Composite kinematic coupling |
| WO2003042059A1 (en) * | 2001-11-14 | 2003-05-22 | Entegris, Inc. | Wafer enclosure sealing arrangement for wafer containers |
| WO2003042073A1 (en) * | 2001-11-14 | 2003-05-22 | Entegris, Inc. | Wafer support attachment for a semi-conductor wafer transport container |
| WO2003046952A2 (en) * | 2001-11-27 | 2003-06-05 | Entegris, Inc | Semiconductor component handling device having an electrostatic dissipating film |
| EP1458634A1 (en) * | 2001-11-27 | 2004-09-22 | Entegris, Inc. | Front opening wafer carrier with path to ground effectuated by door |
| US7121414B2 (en) * | 2001-12-28 | 2006-10-17 | Brooks Automation, Inc. | Semiconductor cassette reducer |
| CN100429133C (zh) * | 2002-01-15 | 2008-10-29 | 诚实公司 | 晶片运载器上的门和带有沙漏型槽的闭锁装置 |
| US7175026B2 (en) | 2002-05-03 | 2007-02-13 | Maxtor Corporation | Memory disk shipping container with improved contaminant control |
| US20040074808A1 (en) * | 2002-07-05 | 2004-04-22 | Entegris, Inc. | Fire retardant wafer carrier |
| JP4146718B2 (ja) * | 2002-12-27 | 2008-09-10 | ミライアル株式会社 | 薄板支持容器 |
| US7677394B2 (en) * | 2003-01-09 | 2010-03-16 | Brooks Automation, Inc. | Wafer shipping container |
| JP2004235516A (ja) | 2003-01-31 | 2004-08-19 | Trecenti Technologies Inc | ウエハ収納治具のパージ方法、ロードポートおよび半導体装置の製造方法 |
| TW581096U (en) * | 2003-03-05 | 2004-03-21 | Power Geode Technology Co Ltd | Wafer carrier and grip lever apparatus thereof |
| US7347329B2 (en) * | 2003-10-24 | 2008-03-25 | Entegris, Inc. | Substrate carrier |
| US7182203B2 (en) * | 2003-11-07 | 2007-02-27 | Entegris, Inc. | Wafer container and door with vibration dampening latching mechanism |
| US7316325B2 (en) * | 2003-11-07 | 2008-01-08 | Entegris, Inc. | Substrate container |
| TWI276580B (en) * | 2003-12-18 | 2007-03-21 | Miraial Co Ltd | Lid unit for thin-plate supporting container |
| US20050155874A1 (en) * | 2004-01-21 | 2005-07-21 | Noah Chen | SMIF box and loading system of reticle |
| US7328727B2 (en) * | 2004-04-18 | 2008-02-12 | Entegris, Inc. | Substrate container with fluid-sealing flow passageway |
| JP4573566B2 (ja) * | 2004-04-20 | 2010-11-04 | 信越ポリマー株式会社 | 収納容器 |
| TWI267483B (en) * | 2004-08-16 | 2006-12-01 | Ind Tech Res Inst | Clean container module |
| US7720558B2 (en) | 2004-09-04 | 2010-05-18 | Applied Materials, Inc. | Methods and apparatus for mapping carrier contents |
| JP4509713B2 (ja) * | 2004-09-13 | 2010-07-21 | 大日商事株式会社 | ウエハキャリア |
| JP2006173331A (ja) * | 2004-12-15 | 2006-06-29 | Miraial Kk | 収納容器 |
| WO2006087894A1 (ja) * | 2005-02-03 | 2006-08-24 | Shin-Etsu Polymer Co., Ltd. | 固定キャリア、固定キャリアの製造方法、固定キャリアの使用方法、及び基板収納容器 |
| JP4584023B2 (ja) * | 2005-05-17 | 2010-11-17 | 信越ポリマー株式会社 | 基板収納容器及びその製造方法 |
| JP5123851B2 (ja) * | 2005-07-08 | 2013-01-23 | クロッシング オートメーション インコーポレイテッド | 加工物を格納するための加工物容器 |
| US20100310351A1 (en) * | 2006-03-30 | 2010-12-09 | Tokyo Electron Limited | Method for handling and transferring a wafer case, and holding part used therefor |
| JP4681485B2 (ja) | 2006-03-30 | 2011-05-11 | 東京エレクトロン株式会社 | ウエハケースの運用方法、ウエハケースの搬送方法及びウエハケース搬送用保持部品 |
| JP4716928B2 (ja) * | 2006-06-07 | 2011-07-06 | 信越ポリマー株式会社 | ウェーハ収納容器 |
| KR100772845B1 (ko) * | 2006-06-21 | 2007-11-02 | 삼성전자주식회사 | 반도체 디바이스 제조설비에서의 웨이퍼 수납장치 |
| US20080006559A1 (en) * | 2006-07-07 | 2008-01-10 | Entegris, Inc. | Substrate carrier and handle |
| JP2009543374A (ja) * | 2006-07-07 | 2009-12-03 | インテグリス・インコーポレーテッド | ウエハカセット |
| JP4841383B2 (ja) * | 2006-10-06 | 2011-12-21 | 信越ポリマー株式会社 | 蓋体及び基板収納容器 |
| CN101219720B (zh) * | 2007-01-10 | 2010-11-03 | 财团法人工业技术研究院 | 具弹性定位结构的洁净容器 |
| EP2122014A4 (en) * | 2007-02-28 | 2014-09-17 | Entegris Inc | CLEANING SYSTEM FOR A SUBSTRATE CONTAINER |
| JP4842879B2 (ja) * | 2007-04-16 | 2011-12-21 | 信越ポリマー株式会社 | 基板収納容器及びそのハンドル |
| JP2009087972A (ja) * | 2007-09-27 | 2009-04-23 | Tokyo Electron Ltd | 基板収容機構及び半導体製造装置 |
| WO2010090276A1 (ja) * | 2009-02-06 | 2010-08-12 | シャープ株式会社 | カセット |
| TWI363030B (en) * | 2009-07-10 | 2012-05-01 | Gudeng Prec Industral Co Ltd | Wafer container with top flange structure |
| US8813964B2 (en) * | 2009-08-26 | 2014-08-26 | Texchem Advanced Products Incorporated Sdn. Bhd. | Wafer container with recessed latch |
| US8109390B2 (en) | 2009-08-26 | 2012-02-07 | Texchem Advanced Products Incorporated Sdn Bhd | Wafer container with overlapping wall structure |
| US8556079B2 (en) * | 2009-08-26 | 2013-10-15 | Texchem Advanced Products Incorporated Sdn Bhd | Wafer container with adjustable inside diameter |
| JP5318800B2 (ja) * | 2010-03-04 | 2013-10-16 | 信越ポリマー株式会社 | 基板収納容器 |
| KR101851250B1 (ko) | 2010-10-19 | 2018-04-24 | 엔테그리스, 아이엔씨. | 로봇식 플랜지를 구비한 전면 개방형 웨이퍼 컨테이너 |
| KR20140035377A (ko) * | 2011-05-03 | 2014-03-21 | 인티그리스, 인코포레이티드 | 입자 쉴드를 가지는 웨이퍼 용기 |
| US9312157B2 (en) | 2011-08-12 | 2016-04-12 | Entegris, Inc. | Wafer carrier |
| TWI431712B (zh) * | 2011-09-20 | 2014-03-21 | 家登精密工業股份有限公司 | 大型前開式晶圓盒 |
| US9117863B1 (en) * | 2013-05-16 | 2015-08-25 | Seagate Technology Llc | Cassette configurations to support platters having different diameters |
| JP6030758B2 (ja) * | 2013-05-29 | 2016-11-24 | ミライアル株式会社 | 基板収納容器 |
| US10566226B2 (en) | 2014-11-11 | 2020-02-18 | Applied Materials, Inc. | Multi-cassette carrying case |
| KR20170088411A (ko) | 2014-12-01 | 2017-08-01 | 엔테그리스, 아이엔씨. | 기재 수용기 밸브 조립체 |
| WO2017011564A1 (en) | 2015-07-13 | 2017-01-19 | Entegris, Inc. | Substrate container with enhanced containment |
| US10124492B2 (en) | 2015-10-22 | 2018-11-13 | Lam Research Corporation | Automated replacement of consumable parts using end effectors interfacing with plasma processing system |
| US20170115657A1 (en) | 2015-10-22 | 2017-04-27 | Lam Research Corporation | Systems for Removing and Replacing Consumable Parts from a Semiconductor Process Module in Situ |
| US10062599B2 (en) | 2015-10-22 | 2018-08-28 | Lam Research Corporation | Automated replacement of consumable parts using interfacing chambers |
| US9881820B2 (en) * | 2015-10-22 | 2018-01-30 | Lam Research Corporation | Front opening ring pod |
| US10361108B2 (en) * | 2015-12-14 | 2019-07-23 | Solarcity Corporation | Ambidextrous cassette and methods of using same |
| TWI633619B (zh) * | 2016-03-29 | 2018-08-21 | 辛耘企業股份有限公司 | 晶圓轉向裝置 |
| US10388554B2 (en) | 2016-04-06 | 2019-08-20 | Entegris, Inc. | Wafer shipper with purge capability |
| DE102016113925A1 (de) | 2016-07-28 | 2018-02-01 | Infineon Technologies Ag | Waferbox, Wafer-Stapelhilfe, Waferträger, Wafer-Transportsystem, Verfahren zum Beladen einer Waferbox mit Wafern und Verfahren zum Entnehmen von Wafern aus einer Waferbox |
| CN111348300A (zh) * | 2020-01-14 | 2020-06-30 | 河南省银丰生物工程技术有限公司 | 一种用于细胞培养的实验样本存放盒 |
| TWI746045B (zh) * | 2020-07-07 | 2021-11-11 | 家登精密工業股份有限公司 | 基板載具鎖扣結構 |
| CN113264286A (zh) * | 2021-06-01 | 2021-08-17 | 长鑫存储技术有限公司 | 光罩保护盒及光罩传送设备 |
| US12125726B2 (en) * | 2021-07-19 | 2024-10-22 | Changxin Memory Technologies, Inc. | Mask pod and semiconductor device |
| CN117981068A (zh) * | 2021-08-27 | 2024-05-03 | 未来儿股份有限公司 | 基板收纳容器及其制造方法以及盖体侧基板支承部 |
| KR102733146B1 (ko) * | 2023-04-10 | 2024-11-25 | 주식회사 삼에스코리아 | 기판수납용기의 탑 플랜지의 체결구조 |
Family Cites Families (45)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US324671A (en) * | 1885-08-18 | Frying-pan | ||
| US2936189A (en) * | 1959-02-27 | 1960-05-10 | Peter Begelman | Receptacle safety latch means |
| US4532970A (en) * | 1983-09-28 | 1985-08-06 | Hewlett-Packard Company | Particle-free dockable interface for integrated circuit processing |
| US4534389A (en) * | 1984-03-29 | 1985-08-13 | Hewlett-Packard Company | Interlocking door latch for dockable interface for integrated circuit processing |
| DE3413837A1 (de) * | 1984-04-12 | 1985-10-17 | Wacker-Chemitronic Gesellschaft für Elektronik-Grundstoffe mbH, 8263 Burghausen | Verpackung fuer halbleiterscheiben |
| US4815912A (en) * | 1984-12-24 | 1989-03-28 | Asyst Technologies, Inc. | Box door actuated retainer |
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| US5915562A (en) * | 1996-07-12 | 1999-06-29 | Fluoroware, Inc. | Transport module with latching door |
| US6010008A (en) * | 1997-07-11 | 2000-01-04 | Fluoroware, Inc. | Transport module |
| US6736268B2 (en) * | 1997-07-11 | 2004-05-18 | Entegris, Inc. | Transport module |
| JP3838786B2 (ja) * | 1997-09-30 | 2006-10-25 | 信越ポリマー株式会社 | 精密基板収納容器及びその位置決め構造並びに精密基板収納容器の位置決め方法 |
| TWI237305B (en) * | 1998-02-04 | 2005-08-01 | Nikon Corp | Exposure apparatus and positioning apparatus of substrate receiving cassette |
| US6428729B1 (en) * | 1998-05-28 | 2002-08-06 | Entegris, Inc. | Composite substrate carrier |
| US6267245B1 (en) * | 1998-07-10 | 2001-07-31 | Fluoroware, Inc. | Cushioned wafer container |
| US6082540A (en) * | 1999-01-06 | 2000-07-04 | Fluoroware, Inc. | Cushion system for wafer carriers |
| US6389032B1 (en) * | 1999-02-11 | 2002-05-14 | International Business Machines Corporation | Internet voice transmission |
| JP3916342B2 (ja) * | 1999-04-20 | 2007-05-16 | 信越ポリマー株式会社 | 基板収納容器 |
| JP3556519B2 (ja) * | 1999-04-30 | 2004-08-18 | 信越ポリマー株式会社 | 基板収納容器の識別構造及び基板収納容器の識別方法 |
| TW511649U (en) * | 2001-09-12 | 2002-11-21 | Ind Tech Res Inst | Wafer retainer |
-
1997
- 1997-07-11 US US08/891,644 patent/US6010008A/en not_active Expired - Lifetime
-
1998
- 1998-06-15 KR KR10-1998-0022242A patent/KR100507952B1/ko not_active Expired - Lifetime
- 1998-06-22 NL NL1009466A patent/NL1009466C2/nl not_active IP Right Cessation
- 1998-07-03 IT IT1998TO000585A patent/IT1304687B1/it active
- 1998-07-06 SG SG1998001595A patent/SG72840A1/en unknown
- 1998-07-09 DE DE19830640A patent/DE19830640A1/de not_active Withdrawn
- 1998-07-10 CN CN98115700A patent/CN1107005C/zh not_active Expired - Lifetime
- 1998-07-10 JP JP19603598A patent/JP4206149B2/ja not_active Expired - Lifetime
- 1998-07-10 CN CNB021506906A patent/CN1308194C/zh not_active Expired - Fee Related
- 1998-07-10 FR FR9808899A patent/FR2768135B1/fr not_active Expired - Lifetime
- 1998-07-10 CN CNB2004100040611A patent/CN1285492C/zh not_active Expired - Lifetime
- 1998-07-10 GB GB9815090A patent/GB2327298B/en not_active Expired - Fee Related
-
1999
- 1999-04-19 NL NL1011828A patent/NL1011828C2/nl not_active IP Right Cessation
-
2005
- 2005-07-15 JP JP2005207380A patent/JP2005320071A/ja active Pending
- 2005-10-11 JP JP2005296446A patent/JP4324586B2/ja not_active Expired - Lifetime
- 2005-10-11 JP JP2005296445A patent/JP4324585B2/ja not_active Expired - Lifetime
-
2008
- 2008-05-12 US US12/119,240 patent/US20080302700A1/en not_active Abandoned
Also Published As
| Publication number | Publication date |
|---|---|
| CN1285492C (zh) | 2006-11-22 |
| JP4206149B2 (ja) | 2009-01-07 |
| JP2006080546A (ja) | 2006-03-23 |
| JP2005320071A (ja) | 2005-11-17 |
| NL1011828A1 (nl) | 1999-05-31 |
| CN1308194C (zh) | 2007-04-04 |
| ITTO980585A1 (it) | 2000-01-03 |
| JP2006100837A (ja) | 2006-04-13 |
| CN1107005C (zh) | 2003-04-30 |
| CN1515475A (zh) | 2004-07-28 |
| SG72840A1 (en) | 2000-05-23 |
| GB9815090D0 (en) | 1998-09-09 |
| JP4324585B2 (ja) | 2009-09-02 |
| JP4324586B2 (ja) | 2009-09-02 |
| IT1304687B1 (it) | 2001-03-28 |
| NL1009466C2 (nl) | 1999-04-29 |
| CN1541913A (zh) | 2004-11-03 |
| CN1205297A (zh) | 1999-01-20 |
| DE19830640A1 (de) | 1999-01-14 |
| FR2768135B1 (fr) | 2005-08-05 |
| FR2768135A1 (fr) | 1999-03-12 |
| KR100507952B1 (ko) | 2005-11-25 |
| GB2327298B (en) | 2002-12-11 |
| KR19990013418A (ko) | 1999-02-25 |
| JPH1191864A (ja) | 1999-04-06 |
| GB2327298A (en) | 1999-01-20 |
| NL1011828C2 (nl) | 1999-11-04 |
| US6010008A (en) | 2000-01-04 |
| US20080302700A1 (en) | 2008-12-11 |
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