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IT201900024946A1 - Testa di misura con un contatto migliorato tra sonde di contatto e fori guida - Google Patents

Testa di misura con un contatto migliorato tra sonde di contatto e fori guida

Info

Publication number
IT201900024946A1
IT201900024946A1 IT102019000024946A IT201900024946A IT201900024946A1 IT 201900024946 A1 IT201900024946 A1 IT 201900024946A1 IT 102019000024946 A IT102019000024946 A IT 102019000024946A IT 201900024946 A IT201900024946 A IT 201900024946A IT 201900024946 A1 IT201900024946 A1 IT 201900024946A1
Authority
IT
Italy
Prior art keywords
contact
guide holes
probe head
improved
probes
Prior art date
Application number
IT102019000024946A
Other languages
English (en)
Original Assignee
Technoprobe Spa
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Technoprobe Spa filed Critical Technoprobe Spa
Priority to IT102019000024946A priority Critical patent/IT201900024946A1/it
Priority to KR1020227024760A priority patent/KR20220116267A/ko
Priority to CN202080088536.7A priority patent/CN114829951A/zh
Priority to PCT/EP2020/086962 priority patent/WO2021123120A1/en
Priority to JP2022537769A priority patent/JP2023507475A/ja
Priority to EP20829922.2A priority patent/EP4078197A1/en
Priority to TW109145116A priority patent/TWI865696B/zh
Priority to US17/783,452 priority patent/US12105118B2/en
Priority to PH1/2022/551520A priority patent/PH12022551520A1/en
Publication of IT201900024946A1 publication Critical patent/IT201900024946A1/it

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/073—Multiple probes
    • G01R1/07307—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
    • G01R1/07314—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card the body of the probe being perpendicular to test object, e.g. bed of nails or probe with bump contacts on a rigid support
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/073—Multiple probes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/06711—Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
    • G01R1/06716—Elastic
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/06711—Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
    • G01R1/06733—Geometry aspects
    • G01R1/06738—Geometry aspects related to tip portion
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/06711—Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
    • G01R1/06755—Material aspects
    • G01R1/06761—Material aspects related to layers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/073—Multiple probes
    • G01R1/07307—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
    • G01R1/07357—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card with flexible bodies, e.g. buckling beams

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Geometry (AREA)
  • Measuring Leads Or Probes (AREA)
  • Tests Of Electronic Circuits (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
IT102019000024946A 2019-12-20 2019-12-20 Testa di misura con un contatto migliorato tra sonde di contatto e fori guida IT201900024946A1 (it)

Priority Applications (9)

Application Number Priority Date Filing Date Title
IT102019000024946A IT201900024946A1 (it) 2019-12-20 2019-12-20 Testa di misura con un contatto migliorato tra sonde di contatto e fori guida
KR1020227024760A KR20220116267A (ko) 2019-12-20 2020-12-18 콘택 프로브와 가이드 홀 사이의 콘택이 향상된 테스트 헤드
CN202080088536.7A CN114829951A (zh) 2019-12-20 2020-12-18 接触探针和引导孔之间的接触改进型测试头
PCT/EP2020/086962 WO2021123120A1 (en) 2019-12-20 2020-12-18 A testing head with an improved contact between contact probes and guide holes
JP2022537769A JP2023507475A (ja) 2019-12-20 2020-12-18 コンタクトプローブとガイド穴との間の改善された接触を備えた試験ヘッド
EP20829922.2A EP4078197A1 (en) 2019-12-20 2020-12-18 A testing head with an improved contact between contact probes and guide holes
TW109145116A TWI865696B (zh) 2019-12-20 2020-12-18 在接觸探針與導孔之間具有改善接觸的測試頭
US17/783,452 US12105118B2 (en) 2019-12-20 2020-12-18 Testing head with an improved contact between contact probes and guide holes
PH1/2022/551520A PH12022551520A1 (en) 2019-12-20 2020-12-18 A testing head with an improved contact between contact probes and guide holes

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
IT102019000024946A IT201900024946A1 (it) 2019-12-20 2019-12-20 Testa di misura con un contatto migliorato tra sonde di contatto e fori guida

Publications (1)

Publication Number Publication Date
IT201900024946A1 true IT201900024946A1 (it) 2021-06-20

Family

ID=70228511

Family Applications (1)

Application Number Title Priority Date Filing Date
IT102019000024946A IT201900024946A1 (it) 2019-12-20 2019-12-20 Testa di misura con un contatto migliorato tra sonde di contatto e fori guida

Country Status (9)

Country Link
US (1) US12105118B2 (it)
EP (1) EP4078197A1 (it)
JP (1) JP2023507475A (it)
KR (1) KR20220116267A (it)
CN (1) CN114829951A (it)
IT (1) IT201900024946A1 (it)
PH (1) PH12022551520A1 (it)
TW (1) TWI865696B (it)
WO (1) WO2021123120A1 (it)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI891862B (zh) * 2020-08-04 2025-08-01 義大利商探針科技公司 電子裝置的探針頭的接觸探針
IT202000030194A1 (it) * 2020-12-09 2022-06-09 Technoprobe Spa Sonda di contatto per teste di misura di dispositivi elettronici e relativa testa di misura
IT202100032882A1 (it) * 2021-12-29 2023-06-29 Technoprobe Spa Sonda di contatto per teste di misura di dispositivi elettronici e relativa testa di misura
IT202200026205A1 (it) * 2022-12-21 2024-06-21 Technoprobe Spa Testa di misura perfezionata comprendente una guida dotata di metallizzazioni
KR102802787B1 (ko) * 2023-03-15 2025-05-07 (주)티에스이 반도체 소자 테스트용 프로브 헤드
IT202300008133A1 (it) * 2023-04-26 2024-10-26 Technoprobe Spa Testa di misura avente sonde di contatto con proprietà elastiche migliorate
KR102866843B1 (ko) * 2023-05-02 2025-10-01 (주)티에스이 반도체 소자 테스트용 프로브 헤드
WO2024228506A1 (ko) * 2023-05-02 2024-11-07 (주)티에스이 저항구조체를 갖는 반도체 소자 테스트용 프로브 헤드
KR102843592B1 (ko) * 2023-07-07 2025-08-07 윌테크놀러지(주) 초단 길이의 좌굴 mems 프로브를 갖는 반도체 패키지 테스트 장치
US20240125815A1 (en) * 2023-07-19 2024-04-18 Translarity, Inc. Socketed Probes
CN116840526B (zh) * 2023-09-01 2023-10-31 江苏协和电子股份有限公司 一种针头、使用该针头的pcb板检测设备及使用方法
CN118604409B (zh) * 2024-08-07 2024-12-03 苏州华兴源创科技股份有限公司 一种探针及探针模组

Citations (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20020048954A1 (en) * 1998-11-30 2002-04-25 Yu Zhou Contact structure and production method thereof and probe contact assembly using same
WO2008100101A1 (en) * 2007-02-16 2008-08-21 Phicom Corporation Probe card including a plurality of connectors and method of bonding the connectors to a substrate of the probe card
US20120295490A1 (en) * 2011-05-17 2012-11-22 Richard Schneider Inter-board connection system with compliant flexible pin deformation prevention
US20140118016A1 (en) * 2012-10-31 2014-05-01 Formfactor, Inc. Probes With Spring Mechanisms For Impeding Unwanted Movement In Guide Holes
EP2924446A1 (en) * 2014-03-25 2015-09-30 MPI Corporation Vertical probe device
WO2016087369A2 (en) * 2014-12-04 2016-06-09 Technoprobe S.P.A. Testing head comprising vertical probes
WO2018108790A1 (en) * 2016-12-16 2018-06-21 Technoprobe S.P.A. Testing head having improved frequency properties
WO2018108777A1 (en) * 2016-12-16 2018-06-21 Technoprobe S.P.A. Probe head for a testing apparatus of electronic devices with enhanced filtering properties
WO2018153963A1 (en) * 2017-02-24 2018-08-30 Technoprobe S.P.A. Vertical probe testing head with improved frequency properties
WO2019091946A1 (en) * 2017-11-09 2019-05-16 Technoprobe S.P.A. Contact probe for a testing head for testing high-frequency devices

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW200301360A (en) * 2001-12-03 2003-07-01 Advantest Corp Contact structure and production method thereof and probe contact assembly using same
JP2006162422A (ja) * 2004-12-07 2006-06-22 Japan Electronic Materials Corp プローブカード
TW200739083A (en) * 2005-09-30 2007-10-16 Sv Probe Pte Ltd Cantilever probe structure for a probe card assembly
US10006938B2 (en) * 2012-01-04 2018-06-26 Formfactor, Inc. Probes with programmable motion
CN109507456A (zh) * 2017-09-15 2019-03-22 中华精测科技股份有限公司 探针装置及其导板

Patent Citations (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20020048954A1 (en) * 1998-11-30 2002-04-25 Yu Zhou Contact structure and production method thereof and probe contact assembly using same
WO2008100101A1 (en) * 2007-02-16 2008-08-21 Phicom Corporation Probe card including a plurality of connectors and method of bonding the connectors to a substrate of the probe card
US20120295490A1 (en) * 2011-05-17 2012-11-22 Richard Schneider Inter-board connection system with compliant flexible pin deformation prevention
US20140118016A1 (en) * 2012-10-31 2014-05-01 Formfactor, Inc. Probes With Spring Mechanisms For Impeding Unwanted Movement In Guide Holes
EP2924446A1 (en) * 2014-03-25 2015-09-30 MPI Corporation Vertical probe device
WO2016087369A2 (en) * 2014-12-04 2016-06-09 Technoprobe S.P.A. Testing head comprising vertical probes
WO2018108790A1 (en) * 2016-12-16 2018-06-21 Technoprobe S.P.A. Testing head having improved frequency properties
WO2018108777A1 (en) * 2016-12-16 2018-06-21 Technoprobe S.P.A. Probe head for a testing apparatus of electronic devices with enhanced filtering properties
WO2018153963A1 (en) * 2017-02-24 2018-08-30 Technoprobe S.P.A. Vertical probe testing head with improved frequency properties
WO2019091946A1 (en) * 2017-11-09 2019-05-16 Technoprobe S.P.A. Contact probe for a testing head for testing high-frequency devices

Also Published As

Publication number Publication date
CN114829951A (zh) 2022-07-29
WO2021123120A1 (en) 2021-06-24
TWI865696B (zh) 2024-12-11
JP2023507475A (ja) 2023-02-22
KR20220116267A (ko) 2022-08-22
US12105118B2 (en) 2024-10-01
PH12022551520A1 (en) 2024-01-22
EP4078197A1 (en) 2022-10-26
US20230029150A1 (en) 2023-01-26
TW202124973A (zh) 2021-07-01

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