[go: up one dir, main page]

IT201700057086A1 - Risonatore microelettromeccanico con migliorate caratteristiche elettriche - Google Patents

Risonatore microelettromeccanico con migliorate caratteristiche elettriche

Info

Publication number
IT201700057086A1
IT201700057086A1 IT102017000057086A IT201700057086A IT201700057086A1 IT 201700057086 A1 IT201700057086 A1 IT 201700057086A1 IT 102017000057086 A IT102017000057086 A IT 102017000057086A IT 201700057086 A IT201700057086 A IT 201700057086A IT 201700057086 A1 IT201700057086 A1 IT 201700057086A1
Authority
IT
Italy
Prior art keywords
microelettromechanical
resonator
electrical characteristics
improved electrical
improved
Prior art date
Application number
IT102017000057086A
Other languages
English (en)
Inventor
Gabriele Gattere
Alessandro Tocchio
Carlo Valzasina
Original Assignee
St Microelectronics Srl
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by St Microelectronics Srl filed Critical St Microelectronics Srl
Priority to IT102017000057086A priority Critical patent/IT201700057086A1/it
Priority to US15/978,958 priority patent/US10501310B2/en
Priority to EP18172940.1A priority patent/EP3407492B1/en
Priority to CN201810510456.0A priority patent/CN108933578B/zh
Priority to CN201820784678.7U priority patent/CN208479584U/zh
Publication of IT201700057086A1 publication Critical patent/IT201700057086A1/it

Links

Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/24—Constructional features of resonators of material which is not piezoelectric, electrostrictive, or magnetostrictive
    • H03H9/2405—Constructional features of resonators of material which is not piezoelectric, electrostrictive, or magnetostrictive of microelectro-mechanical resonators
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • B81B3/0064—Constitution or structural means for improving or controlling the physical properties of a device
    • B81B3/0081—Thermal properties
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • B81B3/0018—Structures acting upon the moving or flexible element for transforming energy into mechanical movement or vice versa, i.e. actuators, sensors, generators
    • B81B3/0021—Transducers for transforming electrical into mechanical energy or vice versa
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B7/00—Microstructural systems; Auxiliary parts of microstructural devices or systems
    • B81B7/0009—Structural features, others than packages, for protecting a device against environmental influences
    • B81B7/0019—Protection against thermal alteration or destruction
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B7/00—Microstructural systems; Auxiliary parts of microstructural devices or systems
    • B81B7/0009—Structural features, others than packages, for protecting a device against environmental influences
    • B81B7/0022—Protection against electrostatic discharge
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B7/00—Microstructural systems; Auxiliary parts of microstructural devices or systems
    • B81B7/008—MEMS characterised by an electronic circuit specially adapted for controlling or driving the same
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B7/00—Microstructural systems; Auxiliary parts of microstructural devices or systems
    • B81B7/0083—Temperature control
    • B81B7/0087—On-device systems and sensors for controlling, regulating or monitoring
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02244—Details of microelectro-mechanical resonators
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02244—Details of microelectro-mechanical resonators
    • H03H9/02338—Suspension means
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02244—Details of microelectro-mechanical resonators
    • H03H9/02433—Means for compensation or elimination of undesired effects
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/24—Constructional features of resonators of material which is not piezoelectric, electrostrictive, or magnetostrictive
    • H03H9/2405—Constructional features of resonators of material which is not piezoelectric, electrostrictive, or magnetostrictive of microelectro-mechanical resonators
    • H03H9/2431—Ring resonators
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02244—Details of microelectro-mechanical resonators
    • H03H9/02433—Means for compensation or elimination of undesired effects
    • H03H2009/0244—Anchor loss
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02244—Details of microelectro-mechanical resonators
    • H03H9/02433—Means for compensation or elimination of undesired effects
    • H03H2009/0248—Strain

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Computer Hardware Design (AREA)
  • General Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • Health & Medical Sciences (AREA)
  • Thermal Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Micromachines (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
IT102017000057086A 2017-05-25 2017-05-25 Risonatore microelettromeccanico con migliorate caratteristiche elettriche IT201700057086A1 (it)

Priority Applications (5)

Application Number Priority Date Filing Date Title
IT102017000057086A IT201700057086A1 (it) 2017-05-25 2017-05-25 Risonatore microelettromeccanico con migliorate caratteristiche elettriche
US15/978,958 US10501310B2 (en) 2017-05-25 2018-05-14 Microelectromechanical resonator with improved electrical features
EP18172940.1A EP3407492B1 (en) 2017-05-25 2018-05-17 Microelectromechanical resonator with improved electrical features
CN201810510456.0A CN108933578B (zh) 2017-05-25 2018-05-24 具有改进的电气特征的微机电谐振器
CN201820784678.7U CN208479584U (zh) 2017-05-25 2018-05-24 具有改进的电气特征的微机电谐振器以及电子设备

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
IT102017000057086A IT201700057086A1 (it) 2017-05-25 2017-05-25 Risonatore microelettromeccanico con migliorate caratteristiche elettriche

Publications (1)

Publication Number Publication Date
IT201700057086A1 true IT201700057086A1 (it) 2018-11-25

Family

ID=59859577

Family Applications (1)

Application Number Title Priority Date Filing Date
IT102017000057086A IT201700057086A1 (it) 2017-05-25 2017-05-25 Risonatore microelettromeccanico con migliorate caratteristiche elettriche

Country Status (4)

Country Link
US (1) US10501310B2 (it)
EP (1) EP3407492B1 (it)
CN (2) CN208479584U (it)
IT (1) IT201700057086A1 (it)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
IT201700057094A1 (it) * 2017-05-25 2018-11-25 St Microelectronics Srl Dispositivo micro-elettro-meccanico con ridotta sensibilita' alla temperatura e relativo processo di fabbricazione
IT201700057086A1 (it) * 2017-05-25 2018-11-25 St Microelectronics Srl Risonatore microelettromeccanico con migliorate caratteristiche elettriche
CN109905086B (zh) * 2019-02-26 2021-05-18 华中科技大学 一种基于多谐振器耦合结构的mems振荡器
WO2020258176A1 (zh) * 2019-06-27 2020-12-30 瑞声声学科技(深圳)有限公司 一种差分谐振器及mems传感器
IT201900017546A1 (it) 2019-09-30 2021-03-30 St Microelectronics Srl Dispositivo a pulsante mems resistente all'acqua, dispositivo di ingresso comprendente il dispositivo a pulsante mems e apparecchio elettronico
IT202100006257A1 (it) 2021-03-16 2022-09-16 St Microelectronics Srl Dispositivo a pulsante mems resistente all'acqua, package alloggiante il dispositivo a pulsante e metodo di fabbricazione del dispositivo a pulsante
CN218274459U (zh) * 2021-03-16 2023-01-10 意法半导体股份有限公司 按钮装置

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20110127621A1 (en) * 2008-06-25 2011-06-02 Fumio Kimura Electrostatic vibrator and electronic apparatus
US20120262026A1 (en) * 2011-04-18 2012-10-18 Freescale Semiconductor, Inc. Mems device with central anchor for stress isolation
US20140252509A1 (en) * 2013-03-05 2014-09-11 Stmicroelectronics S.R.L. Mems device and corresponding micromechanical structure with integrated compensation of thermo-mechanical stress
US20160169931A1 (en) * 2014-12-11 2016-06-16 Stmicroelectronics S.R.L. Z-axis microelectromechanical detection structure with reduced drifts
US20170108530A1 (en) * 2015-10-14 2017-04-20 Stmicroelectronics S.R.L. Microelectromechanical sensor device with reduced stress sensitivity

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3651671B2 (ja) * 2001-08-30 2005-05-25 株式会社東芝 マイクロメカニカルスイッチ及びその製造方法
JP3744479B2 (ja) * 2001-09-28 2006-02-08 株式会社村田製作所 表面波装置及び通信機
CN100568721C (zh) * 2007-03-29 2009-12-09 上海大学 静电致动串联式射频微滤波器
US7880246B2 (en) * 2007-11-29 2011-02-01 Stichting Imec Nederland Microstructure with enlarged mass and electrode area for kinetic to electrical energy conversion
EP2544370B1 (en) * 2011-07-06 2020-01-01 Nxp B.V. MEMS resonator
CN104380602B (zh) * 2012-07-06 2017-06-09 株式会社大真空 压电振动片及使用该压电振动片的压电振动器件
IT201700057086A1 (it) * 2017-05-25 2018-11-25 St Microelectronics Srl Risonatore microelettromeccanico con migliorate caratteristiche elettriche

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20110127621A1 (en) * 2008-06-25 2011-06-02 Fumio Kimura Electrostatic vibrator and electronic apparatus
US20120262026A1 (en) * 2011-04-18 2012-10-18 Freescale Semiconductor, Inc. Mems device with central anchor for stress isolation
US20140252509A1 (en) * 2013-03-05 2014-09-11 Stmicroelectronics S.R.L. Mems device and corresponding micromechanical structure with integrated compensation of thermo-mechanical stress
US20160169931A1 (en) * 2014-12-11 2016-06-16 Stmicroelectronics S.R.L. Z-axis microelectromechanical detection structure with reduced drifts
US20170108530A1 (en) * 2015-10-14 2017-04-20 Stmicroelectronics S.R.L. Microelectromechanical sensor device with reduced stress sensitivity

Also Published As

Publication number Publication date
CN108933578A (zh) 2018-12-04
US10501310B2 (en) 2019-12-10
EP3407492A1 (en) 2018-11-28
CN208479584U (zh) 2019-02-05
EP3407492B1 (en) 2020-03-11
CN108933578B (zh) 2023-03-03
US20180339898A1 (en) 2018-11-29

Similar Documents

Publication Publication Date Title
EP3574547C0 (en) WAVEGUIDE ASSEMBLY
EP3813341A4 (en) TERMINAL DEVICE
EP3557369A4 (en) TERMINAL
EP3659420A4 (en) ELECTRIC UNIT
EP3360454A4 (en) ELECTRIC VACUUM CLEANER
IT201700057086A1 (it) Risonatore microelettromeccanico con migliorate caratteristiche elettriche
EP3813342A4 (en) TERMINAL DEVICE
EP3580792A4 (en) BATTERY TERMINAL ASSEMBLY
EP3496112A4 (en) GUIDE PASTE
PL3258561T3 (pl) Izolator
FR3048822B1 (fr) Raccord electrique
FR3066650B1 (fr) Bornier
EP3726538A4 (en) Conductive paste
EP3419028A4 (en) conductive paste
EP3591753A4 (en) PROTON-CONDUCTING ELECTROLYTE
EP3731346C0 (de) Anschlussklemme
EP3758342A4 (en) TERMINAL DEVICE
EP3907830C0 (de) Aussenleiteranordnung
EP3467855C0 (de) Elektrische baueinheit
EP3648115A4 (en) CONDUCTIVE PASTE
EP3582062A4 (en) Terminal
FI11883U1 (fi) Sähkökytkin
PL3774584T3 (pl) Pojemnik z elementami izolacyjnymi
EP3558537C0 (de) Elektrofilter
DE112017002984A5 (de) Bedienterminal