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IT1203839B - PROCEDURE FOR MAKING AN OVEN COMPONENT - Google Patents

PROCEDURE FOR MAKING AN OVEN COMPONENT

Info

Publication number
IT1203839B
IT1203839B IT19769/87A IT1976987A IT1203839B IT 1203839 B IT1203839 B IT 1203839B IT 19769/87 A IT19769/87 A IT 19769/87A IT 1976987 A IT1976987 A IT 1976987A IT 1203839 B IT1203839 B IT 1203839B
Authority
IT
Italy
Prior art keywords
procedure
making
oven component
oven
component
Prior art date
Application number
IT19769/87A
Other languages
Italian (it)
Other versions
IT8719769A0 (en
Inventor
Matsuo Shuichi
Tanaka Takashi
Sakashita Isao
Original Assignee
Toshiba Ceramics Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Ceramics Co filed Critical Toshiba Ceramics Co
Publication of IT8719769A0 publication Critical patent/IT8719769A0/en
Application granted granted Critical
Publication of IT1203839B publication Critical patent/IT1203839B/en

Links

IT19769/87A 1986-07-31 1987-03-19 PROCEDURE FOR MAKING AN OVEN COMPONENT IT1203839B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP61178800A JPS6335452A (en) 1986-07-31 1986-07-31 Manufacture of structural member for semiconductor diffusion furnace

Publications (2)

Publication Number Publication Date
IT8719769A0 IT8719769A0 (en) 1987-03-19
IT1203839B true IT1203839B (en) 1989-02-23

Family

ID=16054866

Family Applications (1)

Application Number Title Priority Date Filing Date
IT19769/87A IT1203839B (en) 1986-07-31 1987-03-19 PROCEDURE FOR MAKING AN OVEN COMPONENT

Country Status (2)

Country Link
JP (1) JPS6335452A (en)
IT (1) IT1203839B (en)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01282153A (en) * 1988-05-06 1989-11-14 Shin Etsu Chem Co Ltd Silicon carbide-based reaction tube
JPH01282152A (en) * 1988-05-06 1989-11-14 Shin Etsu Chem Co Ltd Silicon carbide-based reaction tube
JPH0382117A (en) * 1989-08-25 1991-04-08 Toshiba Ceramics Co Ltd Manufacture of jig for semiconductor wafer treatment
JP3642446B2 (en) * 1996-08-01 2005-04-27 東芝セラミックス株式会社 Semiconductor wafer processing tool
US6673198B1 (en) 1999-12-22 2004-01-06 Lam Research Corporation Semiconductor processing equipment having improved process drift control
EP1184355B1 (en) 2000-02-15 2006-12-13 Toshiba Ceramics Co., Ltd. METHOD FOR MANUFACTURING Si-SiC MEMBER FOR SEMICONDUCTOR HEAT TREATMENT
US6506254B1 (en) 2000-06-30 2003-01-14 Lam Research Corporation Semiconductor processing equipment having improved particle performance
US6890861B1 (en) 2000-06-30 2005-05-10 Lam Research Corporation Semiconductor processing equipment having improved particle performance
JP7778106B2 (en) * 2023-03-28 2025-12-01 日本碍子株式会社 Ceramic body and method of manufacturing same

Also Published As

Publication number Publication date
IT8719769A0 (en) 1987-03-19
JPS6335452A (en) 1988-02-16
JPH0310592B2 (en) 1991-02-14

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Legal Events

Date Code Title Description
TA Fee payment date (situation as of event date), data collected since 19931001

Effective date: 19970329