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IT1115712B - Apparecchiatura perfezionata per la fabbricazione di circuiti integrati - Google Patents

Apparecchiatura perfezionata per la fabbricazione di circuiti integrati

Info

Publication number
IT1115712B
IT1115712B IT20895/77A IT2089577A IT1115712B IT 1115712 B IT1115712 B IT 1115712B IT 20895/77 A IT20895/77 A IT 20895/77A IT 2089577 A IT2089577 A IT 2089577A IT 1115712 B IT1115712 B IT 1115712B
Authority
IT
Italy
Prior art keywords
manufacture
integrated circuits
improved equipment
equipment
improved
Prior art date
Application number
IT20895/77A
Other languages
English (en)
Original Assignee
Ibm
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ibm filed Critical Ibm
Application granted granted Critical
Publication of IT1115712B publication Critical patent/IT1115712B/it

Links

Classifications

    • H10P14/6309—
    • H10P14/416—
    • H10P14/6322—
    • H10P14/6334—
    • H10P14/6682—
    • H10P14/69215—
    • H10P14/69433—
    • H10P36/03—
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S148/00—Metal treatment
    • Y10S148/037—Diffusion-deposition
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S148/00—Metal treatment
    • Y10S148/06—Gettering
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S148/00—Metal treatment
    • Y10S148/085—Isolated-integrated
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S148/00—Metal treatment
    • Y10S148/122—Polycrystalline
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S257/00—Active solid-state devices, e.g. transistors, solid-state diodes
    • Y10S257/928—Active solid-state devices, e.g. transistors, solid-state diodes with shorted PN or schottky junction other than emitter junction
IT20895/77A 1976-04-02 1977-03-04 Apparecchiatura perfezionata per la fabbricazione di circuiti integrati IT1115712B (it)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US05/672,906 US4053335A (en) 1976-04-02 1976-04-02 Method of gettering using backside polycrystalline silicon

Publications (1)

Publication Number Publication Date
IT1115712B true IT1115712B (it) 1986-02-03

Family

ID=24700519

Family Applications (1)

Application Number Title Priority Date Filing Date
IT20895/77A IT1115712B (it) 1976-04-02 1977-03-04 Apparecchiatura perfezionata per la fabbricazione di circuiti integrati

Country Status (6)

Country Link
US (1) US4053335A (it)
JP (1) JPS52120777A (it)
CA (1) CA1079863A (it)
DE (1) DE2714413A1 (it)
FR (1) FR2346856A1 (it)
IT (1) IT1115712B (it)

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JP6593369B2 (ja) * 2017-02-21 2019-10-23 株式会社村田製作所 半導体チップが実装されたモジュール、及び半導体チップ実装方法
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Also Published As

Publication number Publication date
JPS52120777A (en) 1977-10-11
FR2346856A1 (fr) 1977-10-28
FR2346856B1 (it) 1980-01-11
DE2714413A1 (de) 1977-10-20
CA1079863A (en) 1980-06-17
US4053335A (en) 1977-10-11

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