IT1112625B - PERFECTED EQUIPMENT FOR ION IMPLANTATION - Google Patents

PERFECTED EQUIPMENT FOR ION IMPLANTATION

Info

Publication number: IT1112625B
Authority: IT; Italy
Prior art keywords: ion implantation; perfected; equipment; perfected equipment; implantation
Prior art date: 1977-05-05

Application number

IT22795/78A

Other languages

Italian (it)

Other versions

IT7822795A0 (en

Original Assignee

Ibm

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1977-05-05

Filing date

1978-04-28

Publication date

1986-01-20

1977-05-05 Priority claimed from US05/794,275 external-priority patent/US4118630A/en

1977-05-05 Priority claimed from US05/794,276 external-priority patent/US4135097A/en

1978-04-28 Application filed by Ibm filed Critical Ibm

1978-04-28 Publication of IT7822795A0 publication Critical patent/IT7822795A0/en

1986-01-20 Application granted granted Critical

1986-01-20 Publication of IT1112625B publication Critical patent/IT1112625B/en

Classifications

- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/026—Means for avoiding or neutralising unwanted electrical charges on tube components
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/244—Detectors; Associated components or circuits therefor
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/244—Detection characterized by the detecting means
- H01J2237/24405—Faraday cages
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/245—Detection characterised by the variable being measured
- H01J2237/24507—Intensity, dose or other characteristics of particle beams or electromagnetic radiation

Landscapes

Chemical & Material Sciences (AREA)
Analytical Chemistry (AREA)
Physical Vapour Deposition (AREA)

IT22795/78A 1977-05-05 1978-04-28 PERFECTED EQUIPMENT FOR ION IMPLANTATION IT1112625B (en)

Applications Claiming Priority (2)

Application Number	Priority Date	Filing Date	Title
US05/794,275 US4118630A (en)	1977-05-05	1977-05-05	Ion implantation apparatus with a cooled structure controlling the surface potential of a target surface
US05/794,276 US4135097A (en)	1977-05-05	1977-05-05	Ion implantation apparatus for controlling the surface potential of a target surface

Publications (2)

Publication Number	Publication Date
IT7822795A0 IT7822795A0 (en)	1978-04-28
IT1112625B true IT1112625B (en)	1986-01-20

Family

ID=27121491

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
IT22795/78A IT1112625B (en)	1977-05-05	1978-04-28	PERFECTED EQUIPMENT FOR ION IMPLANTATION

Country Status (5)

Country	Link
DE (1)	DE2819114C3 (en)
FR (1)	FR2389998B1 (en)
GB (1)	GB1584224A (en)
IT (1)	IT1112625B (en)
NL (1)	NL7804691A (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
FR2490873A1 (en) *	1980-09-24	1982-03-26	Varian Associates	METHOD AND DEVICE FOR PRODUCING IMPROVED NEUTRALIZATION OF POSITIVE ION BEAM
FR2793951B1 (en) *	1999-05-21	2001-08-17	Centre Nat Etd Spatiales	PROCESS AND INSTALLATION FOR PROCESSING A SUBSTRATE SUCH AS AN INTEGRATED CIRCUIT WITH A FOCUSED BEAM OF ELECTRICALLY NEUTRAL PARTICLES

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US2890342A (en) *	1954-09-29	1959-06-09	Gen Electric	System for charge neutralization
US3313969A (en) *	1966-03-25	1967-04-11	Boeing Co	Charged particle deflecting apparatus having hemispherical electrodes
US3507709A (en) *	1967-09-15	1970-04-21	Hughes Aircraft Co	Method of irradiating dielectriccoated semiconductor bodies with low energy electrons
US3997846A (en) *	1975-06-30	1976-12-14	International Business Machines Corporation	Method and apparatus for electrostatic deflection of high current ion beams in scanning apparatus
US4011449A (en) *	1975-11-05	1977-03-08	Ibm Corporation	Apparatus for measuring the beam current of charged particle beam
US4013891A (en) *	1975-12-15	1977-03-22	Ibm Corporation	Method for varying the diameter of a beam of charged particles

1978
- 1978-03-23 FR FR7809182A patent/FR2389998B1/fr not_active Expired
- 1978-04-07 GB GB13696/78A patent/GB1584224A/en not_active Expired
- 1978-04-28 IT IT22795/78A patent/IT1112625B/en active
- 1978-04-29 DE DE2819114A patent/DE2819114C3/en not_active Expired
- 1978-05-02 NL NL7804691A patent/NL7804691A/en not_active Application Discontinuation

Also Published As

Publication number	Publication date
DE2819114C3 (en)	1982-03-04
GB1584224A (en)	1981-02-11
FR2389998B1 (en)	1981-11-20
NL7804691A (en)	1978-11-07
DE2819114A1 (en)	1978-11-16
FR2389998A1 (en)	1978-12-01
IT7822795A0 (en)	1978-04-28
DE2819114B2 (en)	1981-07-16

Publication	Publication Date	Title
GB2095503B (en)	1983-01-26	Focusing system
FI800090A7 (en)	1981-05-20	ION TREATMENT DEVICES
AU511889B2 (en)	1980-09-11	Ion implantation apparatus
JPS5464460A (en)	1979-05-24	Ion implantation method
BR8001716A (en)	1980-11-18	WETTING SOLID TREATMENT EQUIPMENT
IT1074004B (en)	1985-04-17	ION IMPLANTATION EQUIPMENT
ES501456A0 (en)	1982-06-16	PERFECTED ELECTRODE
BE876396R (en)	1979-11-21	PERFECTED GUN
DE3061183D1 (en)	1983-01-05	Surgical mask
IT1109994B (en)	1985-12-23	PERFECTED REPRODUCTION EQUIPMENT
IT1148843B (en)	1986-12-03	PERFECTED EQUIPMENT FOR IMPLANTING OR BOMBARDING A TARGET WITH IONS
IT1104815B (en)	1985-10-28	NITROSAMINE DENITROSATION PROCEDURE
ZA785108B (en)	1979-08-29	Agents for combating plant bacterioses
JPS55113701A (en)	1980-09-02	Insecticide aid
JPS5614940A (en)	1981-02-13	Electrode system
ES495814A0 (en)	1981-10-16	PARTICLE DEPOWLING PROCEDURE
DE3070563D1 (en)	1985-05-30	ION IMPLANTATION APPARATUS
IT1070563B (en)	1985-03-29	IMPROVED EQUIPMENT FOR ION IMPLANTATION
IT1112625B (en)	1986-01-20	PERFECTED EQUIPMENT FOR ION IMPLANTATION
JPS53123798A (en)	1978-10-28	Ion generator
JPS53140498A (en)	1978-12-07	Ion source
JPS53112696A (en)	1978-10-02	Ion generator
JPS5482796A (en)	1979-07-02	Ion source
JPS5452461A (en)	1979-04-25	Ion source
GB1543530A (en)	1979-04-04	Ion source