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IT1158180B - Piastra pieghevole di silicio con elementi estensimetrici a semiconduttore piezoresistenti integrati - Google Patents

Piastra pieghevole di silicio con elementi estensimetrici a semiconduttore piezoresistenti integrati

Info

Publication number
IT1158180B
IT1158180B IT52392/78A IT5239278A IT1158180B IT 1158180 B IT1158180 B IT 1158180B IT 52392/78 A IT52392/78 A IT 52392/78A IT 5239278 A IT5239278 A IT 5239278A IT 1158180 B IT1158180 B IT 1158180B
Authority
IT
Italy
Prior art keywords
piezoresistic
extensimetric
semi
conductive
integrated
Prior art date
Application number
IT52392/78A
Other languages
English (en)
Italian (it)
Other versions
IT7852392A0 (it
Inventor
Frank Loffler
Original Assignee
Telton Geraete & Regler Werke
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Telton Geraete & Regler Werke filed Critical Telton Geraete & Regler Werke
Publication of IT7852392A0 publication Critical patent/IT7852392A0/it
Application granted granted Critical
Publication of IT1158180B publication Critical patent/IT1158180B/it

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0051—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance
    • G01L9/0052—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements
    • G01L9/0054—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements integral with a semiconducting diaphragm
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N39/00—Integrated devices, or assemblies of multiple devices, comprising at least one piezoelectric, electrostrictive or magnetostrictive element covered by groups H10N30/00 – H10N35/00

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Pressure Sensors (AREA)
  • Force Measurement Appropriate To Specific Purposes (AREA)
  • Measuring Fluid Pressure (AREA)
IT52392/78A 1977-12-29 1978-12-20 Piastra pieghevole di silicio con elementi estensimetrici a semiconduttore piezoresistenti integrati IT1158180B (it)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DD7700202998A DD133714A1 (de) 1977-12-29 1977-12-29 Silizium-biegeplatte mit integrierten piezoresistiven halbleiter-dehnmesselementen

Publications (2)

Publication Number Publication Date
IT7852392A0 IT7852392A0 (it) 1978-12-20
IT1158180B true IT1158180B (it) 1987-02-18

Family

ID=5511095

Family Applications (1)

Application Number Title Priority Date Filing Date
IT52392/78A IT1158180B (it) 1977-12-29 1978-12-20 Piastra pieghevole di silicio con elementi estensimetrici a semiconduttore piezoresistenti integrati

Country Status (5)

Country Link
DD (1) DD133714A1 (de)
DE (1) DE2844893A1 (de)
GB (1) GB2011707B (de)
IT (1) IT1158180B (de)
SE (1) SE7813216L (de)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60128673A (ja) * 1983-12-16 1985-07-09 Hitachi Ltd 半導体感圧装置
US4672853A (en) * 1984-10-30 1987-06-16 Burr-Brown Corporation Apparatus and method for a pressure-sensitive device
FR2653197B1 (fr) * 1989-10-12 1991-12-27 Vulcanic Procede d'etancheification d'une extremite d'element de chauffage electrique et element etancheifie par ce procede.
FR2653271B1 (fr) * 1989-10-13 1994-06-10 Schlumberger Ind Sa Capteur a semi-conducteurs.
JP3009239B2 (ja) * 1991-04-02 2000-02-14 本田技研工業株式会社 半導体センサ
US5397911A (en) * 1991-04-02 1995-03-14 Honda Giken Kogyo Kabushiki Kaisha Semiconductor sensor with plural gate electrodes
CN105318830B (zh) * 2015-12-04 2018-03-02 浙江工业大学 横向偏差六敏感栅全桥混合叉指金属应变片
CN105333812B (zh) * 2015-12-04 2018-06-29 浙江工业大学 横向分布五敏感栅中叉指金属应变片
US10296148B2 (en) 2016-08-31 2019-05-21 Synaptics Incorporated Full-bridge strain-gauge array of finger thermal compensation

Also Published As

Publication number Publication date
DE2844893A1 (de) 1979-07-05
DD133714A1 (de) 1979-01-17
GB2011707B (en) 1982-06-16
GB2011707A (en) 1979-07-11
SE7813216L (sv) 1979-06-30
IT7852392A0 (it) 1978-12-20

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