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IT1048711B - DEVICE FOR DEPOSING SILICON ON THE SURFACE OF A U-SHAPED SILICON SUPPORT BODY - Google Patents

DEVICE FOR DEPOSING SILICON ON THE SURFACE OF A U-SHAPED SILICON SUPPORT BODY

Info

Publication number
IT1048711B
IT1048711B IT2925375A IT2925375A IT1048711B IT 1048711 B IT1048711 B IT 1048711B IT 2925375 A IT2925375 A IT 2925375A IT 2925375 A IT2925375 A IT 2925375A IT 1048711 B IT1048711 B IT 1048711B
Authority
IT
Italy
Prior art keywords
silicon
support body
deposing
shaped
shaped silicon
Prior art date
Application number
IT2925375A
Other languages
Italian (it)
Original Assignee
Siemens Ag
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from DE19742454592 external-priority patent/DE2454592A1/en
Application filed by Siemens Ag filed Critical Siemens Ag
Application granted granted Critical
Publication of IT1048711B publication Critical patent/IT1048711B/en

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B33/00—Silicon; Compounds thereof
    • C01B33/02—Silicon
    • C01B33/021—Preparation
    • C01B33/027—Preparation by decomposition or reduction of gaseous or vaporised silicon compounds other than silica or silica-containing material
    • C01B33/035—Preparation by decomposition or reduction of gaseous or vaporised silicon compounds other than silica or silica-containing material by decomposition or reduction of gaseous or vaporised silicon compounds in the presence of heated filaments of silicon, carbon or a refractory metal, e.g. tantalum or tungsten, or in the presence of heated silicon rods on which the formed silicon is deposited, a silicon rod being obtained, e.g. Siemens process
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Bending Of Plates, Rods, And Pipes (AREA)
  • Silicon Compounds (AREA)
  • Shaping Of Tube Ends By Bending Or Straightening (AREA)
IT2925375A 1974-11-18 1975-11-13 DEVICE FOR DEPOSING SILICON ON THE SURFACE OF A U-SHAPED SILICON SUPPORT BODY IT1048711B (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE19742454592 DE2454592A1 (en) 1974-11-18 1974-11-18 DEVICE FOR DEPOSITING SILICON ON THE SURFACE OF A U-SHAPED SUPPORT BODY MADE OF SILICON
DE19752505540 DE2505540A1 (en) 1974-11-18 1975-02-10 Silicon U-shaped support prodn - used as a substrate for silicon deposition from the gas phase

Publications (1)

Publication Number Publication Date
IT1048711B true IT1048711B (en) 1980-12-20

Family

ID=25767990

Family Applications (1)

Application Number Title Priority Date Filing Date
IT2925375A IT1048711B (en) 1974-11-18 1975-11-13 DEVICE FOR DEPOSING SILICON ON THE SURFACE OF A U-SHAPED SILICON SUPPORT BODY

Country Status (3)

Country Link
JP (1) JPS5173924A (en)
DE (1) DE2505540A1 (en)
IT (1) IT1048711B (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6268977B2 (en) * 2013-11-25 2018-01-31 住友電気工業株式会社 Manufacturing method of bent optical fiber
JP2016016999A (en) * 2014-07-04 2016-02-01 信越化学工業株式会社 Silicon core wire and polycrystalline silicon rod manufacturing equipment for manufacturing polycrystalline silicon rod
WO2021024889A1 (en) 2019-08-02 2021-02-11 株式会社トクヤマ Silicon core wire for depositing polycrystalline silicon and production method therefor

Also Published As

Publication number Publication date
JPS5173924A (en) 1976-06-26
DE2505540A1 (en) 1976-08-19

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