[go: up one dir, main page]

IN2009KN02420A - - Google Patents

Download PDF

Info

Publication number
IN2009KN02420A
IN2009KN02420A IN2420KON2009A IN2009KN02420A IN 2009KN02420 A IN2009KN02420 A IN 2009KN02420A IN 2420KON2009 A IN2420KON2009 A IN 2420KON2009A IN 2009KN02420 A IN2009KN02420 A IN 2009KN02420A
Authority
IN
India
Prior art keywords
radiation
target material
concerns
scanner
path
Prior art date
Application number
Other languages
English (en)
Inventor
Jari Ruuttu
Vesa Myllymäki
Reijo Lappalainen
Lasse Pulli
Juha Mäkitalo
Sampo Ylätalo
Original Assignee
Picodeon Ltd Oy
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from FI20070158A external-priority patent/FI20070158L/fi
Application filed by Picodeon Ltd Oy filed Critical Picodeon Ltd Oy
Publication of IN2009KN02420A publication Critical patent/IN2009KN02420A/en

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24Vacuum evaporation
    • C23C14/28Vacuum evaporation by wave energy or particle radiation
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/08Devices involving relative movement between laser beam and workpiece
    • B23K26/082Scanning systems, i.e. devices involving movement of the laser beam relative to the laser head
    • B23K26/0821Scanning systems, i.e. devices involving movement of the laser beam relative to the laser head using multifaceted mirrors, e.g. polygonal mirror
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/062Shaping the laser beam, e.g. by masks or multi-focusing by direct control of the laser beam
    • B23K26/0622Shaping the laser beam, e.g. by masks or multi-focusing by direct control of the laser beam by shaping pulses
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/067Dividing the beam into multiple beams, e.g. multifocusing
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/067Dividing the beam into multiple beams, e.g. multifocusing
    • B23K26/0673Dividing the beam into multiple beams, e.g. multifocusing into independently operating sub-beams, e.g. beam multiplexing to provide laser beams for several stations
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/08Devices involving relative movement between laser beam and workpiece
    • B23K26/082Scanning systems, i.e. devices involving movement of the laser beam relative to the laser head
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32Gas-filled discharge tubes
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32Gas-filled discharge tubes
    • H01J37/32009Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32321Discharge generated by other radiation
    • H01J37/32339Discharge generated by other radiation using electromagnetic radiation

Landscapes

  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Mechanical Engineering (AREA)
  • Plasma & Fusion (AREA)
  • Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • Materials Engineering (AREA)
  • Analytical Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Electromagnetism (AREA)
  • Physical Vapour Deposition (AREA)
  • Laser Beam Processing (AREA)
  • X-Ray Techniques (AREA)
  • Coating By Spraying Or Casting (AREA)
IN2420KON2009 2007-02-23 2008-02-22 IN2009KN02420A (fi)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FI20070158A FI20070158L (fi) 2006-02-23 2007-02-23 Järjestely
PCT/FI2008/050083 WO2008102062A2 (en) 2007-02-23 2008-02-22 Method and arrangement for photon ablation of a target

Publications (1)

Publication Number Publication Date
IN2009KN02420A true IN2009KN02420A (fi) 2015-08-07

Family

ID=39636924

Family Applications (1)

Application Number Title Priority Date Filing Date
IN2420KON2009 IN2009KN02420A (fi) 2007-02-23 2008-02-22

Country Status (8)

Country Link
US (1) US8828506B2 (fi)
EP (1) EP2137336B1 (fi)
JP (1) JP5666138B2 (fi)
KR (1) KR101565099B1 (fi)
DK (1) DK2137336T3 (fi)
IL (1) IL199623A0 (fi)
IN (1) IN2009KN02420A (fi)
WO (1) WO2008102062A2 (fi)

Families Citing this family (25)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
PL1793187T3 (pl) * 2004-09-21 2012-07-31 G & I Irtech S L Sposób i urządzenie do spiekania i/lub suszenia sproszkowanych materiałów z użyciem promieniowania podczerwonego
EP1993778A2 (en) * 2006-02-23 2008-11-26 Picodeon Ltd OY Coating with carbon nitride and carbon nitride coated product
EP1993779A2 (en) * 2006-02-23 2008-11-26 Picodeon Ltd OY Coating on a metal substrate and a coated metal product
FI20070889A7 (fi) * 2007-11-21 2009-05-22 Picodeon Ltd Oy Pinnankäsittelymenetelmä
DK2159300T3 (da) * 2008-08-25 2012-02-27 Solmates Bv Fremgangsmåde til deponering af et materiale
US9283638B2 (en) * 2011-11-25 2016-03-15 Rofin-Baasel Lasertech Gmbh & Co. Kg Device for forming longitudinally spaced grooves or slits into a material web with a focused laser beam
US10835313B2 (en) * 2014-01-30 2020-11-17 Medlumics S.L. Radiofrequency ablation catheter with optical tissue evaluation
FI126769B (fi) 2014-12-23 2017-05-15 Picodeon Ltd Oy Majakkatyyppinen skanneri pyörivällä peilillä ja rengasmaisella kohtiolla
WO2016106062A1 (en) 2014-12-23 2016-06-30 Bridgestone Americas Tire Operations, Llc Actinic radiation curable polymeric mixtures, cured polymeric mixtures and related processes
ITRM20150111A1 (it) * 2015-03-16 2016-09-16 Lorusso Alessio Sistema di movimentazione meccatronica per una macchina per la prototipazione rapida
DE102015004163B4 (de) * 2015-04-01 2017-03-23 Primes Gmbh Vorrichtung und Verfahren zur Bestimmung von Eigenschaften eines Laserstrahls
US9812305B2 (en) 2015-04-27 2017-11-07 Advanced Energy Industries, Inc. Rate enhanced pulsed DC sputtering system
US11049702B2 (en) 2015-04-27 2021-06-29 Advanced Energy Industries, Inc. Rate enhanced pulsed DC sputtering system
US10522300B2 (en) 2015-05-26 2019-12-31 National Research Council Of Canada Metallic surface with karstified relief, forming same, and high surface area metallic electrochemical interface
US10373811B2 (en) * 2015-07-24 2019-08-06 Aes Global Holdings, Pte. Ltd Systems and methods for single magnetron sputtering
EP3390006B1 (en) 2015-12-17 2021-01-27 Bridgestone Americas Tire Operations, LLC Additive manufacturing cartridges and processes for producing cured polymeric products by additive manufacturing
WO2018081053A1 (en) 2016-10-27 2018-05-03 Bridgestone Americas Tire Operations, Llc Processes for producing cured polymeric products by additive manufacturing
KR101906854B1 (ko) * 2017-07-25 2018-10-11 한전원자력연료 주식회사 이동형 핵연료 집합체 구조 변형 측정장비
EP3540090A1 (en) * 2018-03-12 2019-09-18 Solmates B.V. Method for pulsed laser deposition
DE102018003675A1 (de) * 2018-05-04 2019-11-07 Siltectra Gmbh Verfahren zum Abtrennen von Festkörperschichten von Kompositstrukturen aus SiC und einer metallischen Beschichtung oder elektrischen Bauteilen
EP3587620A1 (en) * 2018-06-28 2020-01-01 Solmates B.V. Device for pulsed laser deposition and a substrate with a substrate surface for reduction of particles on the substrate
DE102019116560A1 (de) * 2019-01-22 2020-07-23 Hegla Gmbh & Co. Kg Vorrichtung und Verfahren zum Trennen einer Verbundsicherheitsglastafel
US12099217B2 (en) * 2020-09-23 2024-09-24 Innoviz Technologies Ltd. Ultra-light optical element
US20240102151A1 (en) * 2021-01-27 2024-03-28 MAX-PLANCK-Gesellschaft zur Förderung der Wissenschaften e.V. Thermal laser evaporation system
US12104885B2 (en) * 2022-03-29 2024-10-01 United States Of America As Represented By The Secretary Of The Navy Laser induced plasma targets for use as an electromagnetic testbed

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4987007A (en) * 1988-04-18 1991-01-22 Board Of Regents, The University Of Texas System Method and apparatus for producing a layer of material from a laser ion source
JP3336682B2 (ja) 1992-07-02 2002-10-21 住友電気工業株式会社 硬質炭素膜
JP3255469B2 (ja) * 1992-11-30 2002-02-12 三菱電機株式会社 レーザ薄膜形成装置
JPH0855821A (ja) * 1994-08-16 1996-02-27 Nec Corp 薄膜形成装置および薄膜形成方法
US6063455A (en) 1995-10-09 2000-05-16 Institute For Advanced Engineering Apparatus for manufacturing diamond film having a large area and method thereof
AUPO912797A0 (en) * 1997-09-11 1997-10-02 Australian National University, The Ultrafast laser deposition method
WO2000022184A1 (en) 1998-10-12 2000-04-20 The Regents Of The University Of California Laser deposition of thin films
JP2004188437A (ja) 2002-12-09 2004-07-08 Fuji Photo Film Co Ltd 微細傾斜面の加工方法
JP2005097698A (ja) 2003-09-26 2005-04-14 Kansai Electric Power Co Inc:The 酸化物薄膜の形成方法
JP4436162B2 (ja) 2004-03-16 2010-03-24 株式会社リコー レーザ加工装置
JP4534543B2 (ja) 2004-03-19 2010-09-01 凸版印刷株式会社 超短パルスレーザーによる材料加工方法
KR101193874B1 (ko) 2004-07-30 2012-10-26 미쓰보시 다이야몬도 고교 가부시키가이샤 기판의 수직크랙 형성방법 및 수직크랙 형성장치
US20100181706A1 (en) 2005-07-13 2010-07-22 Jari Ruuttu Radiation Arrangement
FI20060178L (fi) 2006-02-23 2007-08-24 Picodeon Ltd Oy Pinnoitusmenetelmä

Also Published As

Publication number Publication date
JP5666138B2 (ja) 2015-02-12
EP2137336B1 (en) 2014-04-02
JP2010519051A (ja) 2010-06-03
KR20090116740A (ko) 2009-11-11
IL199623A0 (en) 2010-04-15
EP2137336A2 (en) 2009-12-30
KR101565099B1 (ko) 2015-11-03
DK2137336T3 (da) 2014-07-07
WO2008102062A3 (en) 2009-03-12
US8828506B2 (en) 2014-09-09
US20100196624A1 (en) 2010-08-05
WO2008102062A2 (en) 2008-08-28

Similar Documents

Publication Publication Date Title
IN2009KN02420A (fi)
TW201129938A (en) Personal mapping system
WO2009152127A3 (en) Techniques for providing a multimode ion source
PH12012501667B1 (en) Micro-needle device and preparation method
WO2007006850A3 (en) Radiation arrangement
WO2012077120A3 (en) Natural formulations
IN2014DN09439A (fi)
WO2010102116A3 (en) Photovoltaic cell having multiple electron donors
WO2008157497A3 (en) Method of treating tissue
SG2013071303A (en) Methods for preparing composition, sheet comprising the composition and electrode comprising the sheet
BR112014014508A2 (pt) composição
WO2010021524A3 (ko) 유기 전자 소자 재료 및 이를 이용한 유기 전자 소자
NZ610871A (en) An aerosol generating system with prevention of condensate leakage
EP2108203A4 (en) CATHODE ACTIVE MATERIAL AND SECONDARY BATTERY COMPRISING THIS MATERIAL
MX2009013174A (es) Interruptor de vacio.
WO2012012672A3 (en) Use of organic and organometallic high dielectric constant material for improved energy storage devices and associated methods
AU2011209318A8 (en) Upper structure for footwear and footwear comprising the same
WO2010025325A3 (en) Fluoropolymer laminate
WO2009137095A3 (en) Compositions and methods for modulating an immune response
MX345433B (es) Composicion de polimero.
BR112019013005A2 (pt) espécie de metschnikowia isolada, método para produzir xilitol, xilitol bioderivado e composição
AU318496S (en) Vacuum cleaner grille
PH12013500076A1 (en) Cellulosic material
WO2011140060A3 (en) Thermal evaporation sources with separate crucible for holding the evaporant material
WO2011156212A3 (en) Methods to degrade sludge from pulp and paper manufacturing