IL178321A0 - Optical inspection system - Google Patents

Optical inspection system

Info

Publication number: IL178321A0
Authority: IL; Israel
Prior art keywords: inspection system; optical inspection; optical; inspection
Prior art date: 2006-09-26

Application number

IL178321A

Other versions

IL178321A (en

Original Assignee

Orbotech Ltd

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

2006-09-26

Filing date

2006-09-26

Publication date

2007-02-11

2006-09-26 Application filed by Orbotech Ltd filed Critical Orbotech Ltd

2006-09-26 Priority to IL178321A priority Critical patent/IL178321A/en

2007-02-11 Publication of IL178321A0 publication Critical patent/IL178321A0/en

2007-09-04 Priority to KR20070089249A priority patent/KR20080028278A/en

2007-09-06 Priority to JP2007231102A priority patent/JP2008083044A/en

2007-09-07 Priority to TW96133429A priority patent/TW200815746A/en

2007-09-14 Priority to CN200710153935.3A priority patent/CN101153854B/en

2014-08-31 Publication of IL178321A publication Critical patent/IL178321A/en

Classifications

- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
- G01N21/63—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
- G01N21/64—Fluorescence; Phosphorescence

Landscapes

Health & Medical Sciences (AREA)
Physics & Mathematics (AREA)
General Physics & Mathematics (AREA)
Life Sciences & Earth Sciences (AREA)
Chemical & Material Sciences (AREA)
Analytical Chemistry (AREA)
Biochemistry (AREA)
General Health & Medical Sciences (AREA)
Immunology (AREA)
Pathology (AREA)
Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)

IL178321A 2006-09-26 2006-09-26 Optical inspection system IL178321A (en)

Priority Applications (5)

Application Number	Priority Date	Filing Date	Title
IL178321A IL178321A (en)	2006-09-26	2006-09-26	Optical inspection system
KR20070089249A KR20080028278A (en)	2006-09-26	2007-09-04	Optical Inspection System and Method of Electrical Circuit Devices
JP2007231102A JP2008083044A (en)	2006-09-26	2007-09-06	Optical inspection system and optical inspection method
TW96133429A TW200815746A (en)	2006-09-26	2007-09-07	System and method for optical inspection of electrical circuit devices
CN200710153935.3A CN101153854B (en)	2006-09-26	2007-09-14	Optical detection system

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
IL178321A IL178321A (en)	2006-09-26	2006-09-26	Optical inspection system

Publications (2)

Publication Number	Publication Date
IL178321A0 true IL178321A0 (en)	2007-02-11
IL178321A IL178321A (en)	2014-08-31

Family

ID=39255622

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
IL178321A IL178321A (en)	2006-09-26	2006-09-26	Optical inspection system

Country Status (5)

Country	Link
JP (1)	JP2008083044A (en)
KR (1)	KR20080028278A (en)
CN (1)	CN101153854B (en)
IL (1)	IL178321A (en)
TW (1)	TW200815746A (en)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
TW201716167A (en) *	2011-08-18	2017-05-16	奧寶科技有限公司	Inspection/repair/reinspection system for electrical circuits and laser writing system
CN111079564B (en)	2019-11-27	2021-06-01	奥特斯科技(重庆)有限公司	Method for handling a component carrier, optical inspection apparatus and computer-readable medium
CN111307817B (en) *	2020-02-12	2021-04-09	武汉大学	Online detection method and system for PCB production process of intelligent production line
JP7507669B2 (en)	2020-11-25	2024-06-28	新光電気工業株式会社	Complex oxide and ultraviolet detection device
EP4020314A1 (en) *	2020-12-23	2022-06-29	Siemens Aktiengesellschaft	Method and device for optical quality control during manufacture of printed circuit boards
US11922619B2 (en)	2022-03-31	2024-03-05	Kla Corporation	Context-based defect inspection
US11921052B2 (en)	2022-03-31	2024-03-05	Kla Corporation	Inspection with previous step subtraction

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US4758888A (en) *	1987-02-17	1988-07-19	Orbot Systems, Ltd.	Method of and means for inspecting workpieces traveling along a production line

2006
- 2006-09-26 IL IL178321A patent/IL178321A/en not_active IP Right Cessation
2007
- 2007-09-04 KR KR20070089249A patent/KR20080028278A/en not_active Withdrawn
- 2007-09-06 JP JP2007231102A patent/JP2008083044A/en active Pending
- 2007-09-07 TW TW96133429A patent/TW200815746A/en unknown
- 2007-09-14 CN CN200710153935.3A patent/CN101153854B/en active Active

Also Published As

Publication number	Publication date
KR20080028278A (en)	2008-03-31
TW200815746A (en)	2008-04-01
CN101153854A (en)	2008-04-02
CN101153854B (en)	2015-08-19
IL178321A (en)	2014-08-31
JP2008083044A (en)	2008-04-10

Publication	Publication Date	Title
GB0821538D0 (en)	2008-12-31	Optical inspection
EP2028516A4 (en)	2012-07-18	Optical system
GB2449290B (en)	2010-09-22	An optical system
GB2452668B (en)	2009-10-14	Optical apparatus
IL197589A0 (en)	2009-12-24	Three dioda optical bridge system
GB2451989B (en)	2011-02-23	Stent inspection system
GB2455600B (en)	2012-05-16	Lens system
IL177618A0 (en)	2007-02-11	Substrate- guided optical device
TWI315417B (en)	2009-10-01	Optical system for taking image
EP2142845A4 (en)	2011-04-20	Solid state optical system
GB2443051B (en)	2010-10-20	Optical turnaround
IL192667A0 (en)	2009-02-11	Catadioptric optical system for scatterometry
TWI348038B (en)	2011-09-01	Lens apparatus
GB2443975B (en)	2011-12-21	Optical navigation system
TWI339728B (en)	2011-04-01	Inspection system
GB0721060D0 (en)	2007-12-05	Optical inspection
EP2054664A4 (en)	2014-01-08	Task light
GB0822777D0 (en)	2009-01-21	Optical apparatus
TWI350386B (en)	2011-10-11	Optical projection system
GB0603437D0 (en)	2006-04-05	Optical cable testing
EP1975602A4 (en)	2013-12-04	Optical analyzer
IL178321A0 (en)	2007-02-11	Optical inspection system
GB2434878B (en)	2009-03-11	Wide angled optical system
DE602006003616D1 (en)	2008-12-24	Optical system
GB0702181D0 (en)	2007-03-14	Optical device

Legal Events

Date	Code	Title
2014-12-31	FF	Patent granted
2014-12-31	KB	Patent renewed
2016-08-31	KB	Patent renewed
2021-04-29	MM9K	Patent not in force due to non-payment of renewal fees