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IL142115A0 - Fluoride additive containing chemical mechanical polishing slurry and method for use of same - Google Patents

Fluoride additive containing chemical mechanical polishing slurry and method for use of same

Info

Publication number
IL142115A0
IL142115A0 IL14211501A IL14211501A IL142115A0 IL 142115 A0 IL142115 A0 IL 142115A0 IL 14211501 A IL14211501 A IL 14211501A IL 14211501 A IL14211501 A IL 14211501A IL 142115 A0 IL142115 A0 IL 142115A0
Authority
IL
Israel
Prior art keywords
same
mechanical polishing
chemical mechanical
polishing slurry
additive containing
Prior art date
Application number
IL14211501A
Original Assignee
Cabot Microelectronics Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US08/659,419 external-priority patent/US5993686A/en
Application filed by Cabot Microelectronics Corp filed Critical Cabot Microelectronics Corp
Priority to IL14211501A priority Critical patent/IL142115A0/en
Publication of IL142115A0 publication Critical patent/IL142115A0/en

Links

IL14211501A 1996-06-06 2001-03-20 Fluoride additive containing chemical mechanical polishing slurry and method for use of same IL142115A0 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
IL14211501A IL142115A0 (en) 1996-06-06 2001-03-20 Fluoride additive containing chemical mechanical polishing slurry and method for use of same

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US08/659,419 US5993686A (en) 1996-06-06 1996-06-06 Fluoride additive containing chemical mechanical polishing slurry and method for use of same
IL12091297A IL120912A (en) 1996-06-06 1997-05-26 Fluoride additive containing aqueous chemical mechanical polishing slurry and method for use of same
IL14211501A IL142115A0 (en) 1996-06-06 2001-03-20 Fluoride additive containing chemical mechanical polishing slurry and method for use of same

Publications (1)

Publication Number Publication Date
IL142115A0 true IL142115A0 (en) 2002-03-10

Family

ID=26323431

Family Applications (2)

Application Number Title Priority Date Filing Date
IL14163101A IL141631A0 (en) 1996-06-06 2001-02-25 Fluoride additive containing chemical mechanical polishing slurry and method for use of same
IL14211501A IL142115A0 (en) 1996-06-06 2001-03-20 Fluoride additive containing chemical mechanical polishing slurry and method for use of same

Family Applications Before (1)

Application Number Title Priority Date Filing Date
IL14163101A IL141631A0 (en) 1996-06-06 2001-02-25 Fluoride additive containing chemical mechanical polishing slurry and method for use of same

Country Status (1)

Country Link
IL (2) IL141631A0 (en)

Also Published As

Publication number Publication date
IL141631A0 (en) 2002-03-10

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