IE20010600A1 - Fume extraction for laser machining - Google Patents
Fume extraction for laser machiningInfo
- Publication number
- IE20010600A1 IE20010600A1 IE20010600A IE20010600A IE20010600A1 IE 20010600 A1 IE20010600 A1 IE 20010600A1 IE 20010600 A IE20010600 A IE 20010600A IE 20010600 A IE20010600 A IE 20010600A IE 20010600 A1 IE20010600 A1 IE 20010600A1
- Authority
- IE
- Ireland
- Prior art keywords
- gas
- fume extraction
- head
- apertures
- laser machining
- Prior art date
Links
- 238000003754 machining Methods 0.000 title claims abstract description 26
- 238000000605 extraction Methods 0.000 title claims abstract description 22
- 239000003517 fume Substances 0.000 title claims abstract description 21
- 239000007789 gas Substances 0.000 claims abstract description 32
- 238000000034 method Methods 0.000 claims abstract description 9
- 238000010276 construction Methods 0.000 description 2
- 238000002679 ablation Methods 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000000356 contaminant Substances 0.000 description 1
- 231100001261 hazardous Toxicity 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Landscapes
- Laser Beam Processing (AREA)
Abstract
The invention relates to laser machining and particularly to fume extraction. A method is provided for removal of debris generated during a laser machining process comprising sucking gas from a machining area through a fume extraction head having a gas inlet and a conical section to create a cyclone effect. In one embodiment the gas inlet comprise a first set of apertures to allow inlet of the gas. In a further embodiment the fume extraction head comprises a second set to apertures to allow an assist gas to be delivered.
Description
Introduction “Fume extraction for laser machining”
The invention relates to laser machining, and particularly to fume extraction.
Statements of Invention
According to the invention, there is provided a method for removal of debris generated during a laser machining process comprising sucking gas from the machining area through a fume extraction head having a gas inlet and a conical section to create a cyclone effect.
In one embodiment, the gas is sucked through apertures positioned to deliver the gas to the inside of the conical section at high pressure such that a helical path flowing upward is formed.
In another embodiment, the gas is sucked through a second set of apertures to allow an assist gas to be delivered.
According to another aspect, the invention provides a fume extraction head comprising a conical section to create a cyclone effect.
In one embodiment, the head comprises a set of apertures to allow inlet of a gas.
In another embodiment, the head comprises a second set of apertures to allow an assist gas to be delivered.
Detailed Description of the Invention
OPEN TO PUBL Γ ?NSP£CTION
UNDER SECTION 28 AND RULE 23
JNL No. n*
ΙΕΟ 1 06 00
2The invention will be more clearly understood from the following description of some embodiments thereof, given by way of example only with reference to the accompanying drawings in which:Fig. 1 is a perspective view of a fume extraction head on a machining station;
Fig. 2 is a cross-sectional view of the head; and
Fig. 3 is a cross-sectional cut-away view showing gas flow within a conical section.
Referring to Fig. 1 a fume extraction head is located over a machining area, and the head is illustrated in detail in Figs. 2 and 3.
Laser machining and processing stations generate particulate and gaseous debris as a result of the machining process. In particular, the process of laser photo-ablation through the use of high peak power Q switched laser systems as used in high throughput manufacturing systems, results in the generation of large amounts of submicron and micron sized particles as well as various gases and chemical emissions. This debris is hazardous to environment and to human health and accordingly must be removed as effectively as possible from the machining region for disposal.
A second requirement of the laser machining head is that it has the capability to deliver an assist gas to the machining front to assist the machining process.
For standard moving mirror delivery laser processing systems achieving fume extraction and assist gas delivery is not a difficult task as the gas nozzle can move with the laser positioning system. In galvanometer based scanning systems however, the task is more complicated as only the beam location changes and there is no moving fixture to allow extraction or delivery with the moving beam.
IE 0 1 06 0 0
-3The invention presented in this patent application enables fume extraction and assist gas delivery over larger areas such as those used in galvanometer based XY scanning systems. The fume extraction head is designed around the principle of formation of a confined cyclone which carries debris away from the substrate material being processed. By delivering gas inputs at the base of a conical section a cyclone effect is created. The cyclone carries debris to a lower pressure region higher in the conical section and eventually the debris is extracted by a standard fume extraction system.
In one embodiment, the head is for debris and gas extraction in laser machining stations. In particular, in vision guided laser machining stations it is critical that the surface of the wafer remains clean and free from debris during the process of fiducial alignment.
During the machining process it is essential that debris is prevented form landing on the wafer as it can adhere to the surface and be difficult to remove. Debris generated form the cut process also needs to be moved away from the machining beam.
When debris is generated in the laser machining process it is necessary to remove it form the kerf immediately in order to prevent the debris form absorbing the laser radiation.
Another embodiment of the invention is realised through the same configuration. Often in laser machining it is necessary to use a gas jet to speed up or modify the machining process for improved quality or speed of machining. The same gas can be used for fume extraction or alternatively different gasses may be delivered to the fume extract and gas assist sections of the body.
The construction of head allows very effective removal of contaminants because there is a confined cyclone.
ItO 10080
-4The invention is not limited to the embodiments described but may be varied in construction and detail.
Claims (8)
1. A method for removal of debris generated during a laser machining process comprising sucking gas from the machining area through a fume extraction 5 head having a gas inlet and a conical section to create a cyclone effect.
2. A method as claimed in claim 1, wherein the gas is sucked through apertures positioned to deliver the gas to the inside of the conical section at high pressure such that a helical path flowing upward is formed.
3. A method as claimed in claim 1 or 2, wherein the gas is sucked through a second set of apertures to allow an assist gas to be delivered.
4. A method substantially as described with reference to the drawings.
5. A fume extraction head comprising a conical section to create a cyclone effect.
6. A fume extraction head as claimed in claim 5, wherein the head comprises a 20 set of apertures to allow inlet of a gas.
7. A fume extraction head as claimed in claim 5 or 6, wherein the head comprises a second set of apertures to allow an assist gas to be delivered. 25
8. A fume extraction substantially as described with reference to the drawings.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| IE20010600A IE20010600A1 (en) | 2000-12-15 | 2001-06-27 | Fume extraction for laser machining |
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| IE20001015 | 2000-12-15 | ||
| IE20010600A IE20010600A1 (en) | 2000-12-15 | 2001-06-27 | Fume extraction for laser machining |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| IE20010600A1 true IE20010600A1 (en) | 2002-06-26 |
Family
ID=27665773
Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| IE20010599A IES20010599A2 (en) | 2000-12-15 | 2001-06-27 | Fume extraction for laser machining |
| IE20010600A IE20010600A1 (en) | 2000-12-15 | 2001-06-27 | Fume extraction for laser machining |
Family Applications Before (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| IE20010599A IES20010599A2 (en) | 2000-12-15 | 2001-06-27 | Fume extraction for laser machining |
Country Status (1)
| Country | Link |
|---|---|
| IE (2) | IES20010599A2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2005118210A1 (en) * | 2004-05-28 | 2005-12-15 | Cambridge Display Technology Limited | Apparatus and method using a gas vortex for extracting debris during laser ablation |
-
2001
- 2001-06-27 IE IE20010599A patent/IES20010599A2/en not_active IP Right Cessation
- 2001-06-27 IE IE20010600A patent/IE20010600A1/en not_active IP Right Cessation
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2005118210A1 (en) * | 2004-05-28 | 2005-12-15 | Cambridge Display Technology Limited | Apparatus and method using a gas vortex for extracting debris during laser ablation |
| GB2428398A (en) * | 2004-05-28 | 2007-01-31 | Cambridge Display Tech Ltd | Apparatus and method using a gas vortex for extracting debris during laser ablation |
| GB2428398B (en) * | 2004-05-28 | 2008-01-02 | Cambridge Display Tech Ltd | Apparatus and method using a gas vortex for extracting debris during laser ablation |
Also Published As
| Publication number | Publication date |
|---|---|
| IES20010599A2 (en) | 2001-11-28 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| MM4A | Patent lapsed |