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HK40116681A - Structure and corresponding method for improving adhesion between base material and resilient material layer - Google Patents

Structure and corresponding method for improving adhesion between base material and resilient material layer Download PDF

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HK40116681A
HK40116681A HK62025104702.8A HK62025104702A HK40116681A HK 40116681 A HK40116681 A HK 40116681A HK 62025104702 A HK62025104702 A HK 62025104702A HK 40116681 A HK40116681 A HK 40116681A
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Hong Kong
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substrate
elastic material
material layer
layer
improving adhesion
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Chinese (zh)
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金相杓
尹承鎭
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可么多么2022
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Description

改善基材和弹性材料层之间的附着力的结构及相应方法Structures and corresponding methods for improving adhesion between the substrate and the elastic material layer

相关申请的交叉引用Cross-references to related applications

本申请主张于2022年4月12日提交的美国实用专利申请号17/718,674的优先权,其全部内容通过引用并入本文。This application claims priority to U.S. Utility Patent Application No. 17/718,674, filed April 12, 2022, the entire contents of which are incorporated herein by reference.

背景技术Background Technology

1.所属的技术范围1. Scope of technology

本发明涉及一种硅化合物层,用于提高基板(base substrate)与弹性材料层(resilient material layer)之间的附着力。This invention relates to a silicon compound layer for improving the adhesion between a base substrate and a resilient material layer.

2.先前技术2. Prior Art

具有结合到弹性材料层的基板的物体(objects)具有很高的实用性并且被广泛用于各种应用中。该基板可以由玻璃、金属、塑料等形成。具体地,包括粘合到作为弹性材料的硅橡胶层(silicon rubber layer)的基板的物体可以用于例如家庭用品、汽车部件和电子元件中婴儿奶瓶、护目镜、卫浴产品,涉及耐热性和/或透明性和化学安全性。Objects having a substrate bonded to an elastic material layer are highly practical and widely used in a variety of applications. This substrate can be formed from glass, metal, plastic, etc. Specifically, objects including substrates bonded to a silicone rubber layer as an elastic material can be used in, for example, household goods, automotive parts, and electronic components such as baby bottles, goggles, and bathroom products, involving heat resistance and/or transparency and chemical safety.

通常,弹性材料透过增强硅橡胶层的粘合特性、在基板(base substrate)的表面上施加底漆(primer)以及使用粘合剂将硬化的硅橡胶和基板材料附着而结合到基板。然而,增强硅橡胶层的粘合特性通常是透过添加高反应性材料(例如,碳功能硅烷(carbonfunctional silane))来实现,然此会导致物体的耐热性差以及容易变形的缺失。此外,在注塑成型(injection molding)过程中,反应性材料也会粘附在模具本身,使成型过程的品质难以控制。Typically, elastic materials are bonded to a substrate by enhancing the adhesive properties of the silicone rubber layer, applying a primer to the surface of the base substrate, and using adhesives to attach the cured silicone rubber and substrate material. However, enhancing the adhesive properties of the silicone rubber layer is usually achieved by adding highly reactive materials (e.g., carbon functional silanes), which can lead to poor heat resistance and easy deformation of the material. Furthermore, during injection molding, reactive materials can also adhere to the mold itself, making it difficult to control the quality of the molding process.

此外,在基板表面上施加底漆,其涉及施加、干燥和烘烤底漆的复杂过程,并且会由于不均匀施加底漆而产生缺陷。虽然还有其他方法可以提高基板的粘合性能(例如紫外线照射、电浆处理和电晕处理),但这些其他方法并不能充分提高对基材(base material)的粘合(附着)性能,而且通常需要危险的工作环境和昂贵的机具。此外,使用粘合剂将硅橡胶层贴附到基材也可能很困难,因为粘合剂通常具有较差的耐热性或耐久性并且可能在制造过程中被破坏。Furthermore, applying a primer to the substrate surface involves a complex process of application, drying, and baking, and defects can arise due to uneven primer application. While other methods exist to improve substrate adhesion (e.g., UV irradiation, plasma treatment, and corona treatment), these methods do not adequately enhance adhesion to the base material and typically require hazardous working environments and expensive equipment. Additionally, attaching silicone rubber layers to the substrate using adhesives can be challenging because adhesives often have poor heat resistance or durability and may be damaged during manufacturing.

发明内容Summary of the Invention

实施例涉及一种制品(article of manufacture),其包括基板、基板上的硅化合物层和硅化合物层表面上的弹性材料层。硅化合物层具有以Ra为单位的在50nm和600nm之间的表面粗糙度。The embodiments relate to an article of manufacture comprising a substrate, a silicon compound layer on the substrate, and an elastic material layer on the surface of the silicon compound layer. The silicon compound layer has a surface roughness in Ra between 50 nm and 600 nm.

在一个或多个实施例中,上述的硅化合物层的厚度小于1000nm但大于50nm。In one or more embodiments, the thickness of the silicon compound layer described above is less than 1000 nm but greater than 50 nm.

在一个或多个实施例中,上述的硅化合物层是SiOxCyHz层。In one or more embodiments, the silicon compound layer described above is a SiOxCyHz layer.

在一个或多个实施例中,上述的SiOxCyHz层包括重量百分比28-30%的硅、重量百分比60-65%的氧、重量百分比0-1%的碳和重量百分比6-9%的氢。In one or more embodiments, the SiOxCyHz layer described above comprises 28-30% silicon by weight, 60-65% oxygen by weight, 0-1% carbon by weight, and 6-9% hydrogen by weight.

在一个或多个实施例中,上述的基板包括热塑性聚合物、热固性聚合物、硅橡胶、金属和玻璃中的至少一种。In one or more embodiments, the substrate described above includes at least one of thermoplastic polymer, thermosetting polymer, silicone rubber, metal, and glass.

在一个或多个实施例中,上述的热塑性聚合物为聚丙烯(PP)、聚酯砜(PES)、聚苯砜(PPSU)、聚酰胺(PA)、tritan、聚碳酸酯(PC)、尼龙中的至少一种。In one or more embodiments, the thermoplastic polymer described above is at least one of polypropylene (PP), polyester sulfone (PES), polyphenylene sulfone (PPSU), polyamide (PA), tritan, polycarbonate (PC), and nylon.

在一个或多个实施例中,上述的弹性材料层为选自液体硅橡胶(LSR)、热固化橡胶(HCR)硅胶及其组合的材料。In one or more embodiments, the aforementioned elastic material layer is a material selected from liquid silicone rubber (LSR), thermosetting rubber (HCR), silicone, and combinations thereof.

在一个或多个实施例中,上述的基板为PPSU,弹性材料层为硅橡胶。In one or more embodiments, the substrate is PPSU and the elastic material layer is silicone rubber.

在一个或多个实施例中,上述的硅化合物层系使用电浆增强化学气相沉积(PECVD)沉积在基板上。In one or more embodiments, the aforementioned silicon compound layer system is deposited on a substrate using plasma-enhanced chemical vapor deposition (PECVD).

在一个或多个实施例中,上述的电浆增强化学气相沉积(PECVD)是透过将前体六甲基二硅氧烷(HMDSO)与反应性气体氧气(O2)在电浆下反应来进行的。In one or more embodiments, the plasma-enhanced chemical vapor deposition (PECVD) described above is performed by reacting the precursor hexamethyldisiloxane (HMDSO) with the reactive gas oxygen ( O2 ) under plasma conditions.

实施例还涉及制造制品(manufacturing an article of manufacture)的方法。执行电浆增强化学气相沉积(PECVD)以在制品的基板上沉积硅化合物层。弹性材料层形成于硅化合物层的表面上。The embodiments also relate to a method of manufacturing an article of manufacture. Plasma-enhanced chemical vapor deposition (PECVD) is performed to deposit a silicon compound layer on a substrate of the article. An elastic material layer is formed on the surface of the silicon compound layer.

在一个或多个实施例中,上述的硅化合物层的厚度小于1000nm但大于50nm。In one or more embodiments, the thickness of the silicon compound layer described above is less than 1000 nm but greater than 50 nm.

在一个或多个实施例中,上述的硅化合物层具有以Ra为单位的在50nm和600nm之间的表面粗糙度。In one or more embodiments, the silicon compound layer described above has a surface roughness in Ra between 50 nm and 600 nm.

在一个或多个实施例中,上述的硅化合物层是SiOxCyHz层。In one or more embodiments, the silicon compound layer described above is a SiOxCyHz layer.

在一个或多个实施例中,上述的SiOxCyHz层包括重量百分比28-30%的硅、重量百分比60-65%的氧、重量百分比0-1%的碳和重量百分比6-9%的氢。In one or more embodiments, the SiOxCyHz layer described above comprises 28-30% silicon by weight, 60-65% oxygen by weight, 0-1% carbon by weight, and 6-9% hydrogen by weight.

在一个或多个实施例中,上述的基板包括热塑性聚合物、热固性聚合物、硅橡胶、金属和玻璃中的至少一种。In one or more embodiments, the substrate described above includes at least one of thermoplastic polymer, thermosetting polymer, silicone rubber, metal, and glass.

在一个或多个实施例中,上述的热塑性聚合物为聚丙烯(PP)、聚酯砜(PES)、聚苯砜(PPSU)、聚酰胺(PA)、tritan、聚碳酸酯(PC)、尼龙中的至少一种。In one or more embodiments, the thermoplastic polymer described above is at least one of polypropylene (PP), polyester sulfone (PES), polyphenylene sulfone (PPSU), polyamide (PA), tritan, polycarbonate (PC), and nylon.

在一个或多个实施例中,上述的弹性材料层为选自液体硅橡胶(LSR)、热固化橡胶(HCR)硅胶及其组合的材料。In one or more embodiments, the aforementioned elastic material layer is a material selected from liquid silicone rubber (LSR), thermosetting rubber (HCR), silicone, and combinations thereof.

在一个或多个实施例中,上述的基板为聚苯砜(PPSU),弹性材料层为硅橡胶。In one or more embodiments, the substrate is polyphenylsulfone (PPSU) and the elastic material layer is silicone rubber.

在一个或多个实施例中,上述的电浆增强化学气相沉积(PECVD)是透过将前体六甲基二硅氧烷(HMDSO)与反应性气体氧气(O2)在电浆下反应来进行的。In one or more embodiments, the plasma-enhanced chemical vapor deposition (PECVD) described above is performed by reacting the precursor hexamethyldisiloxane (HMDSO) with the reactive gas oxygen ( O2 ) under plasma conditions.

在一个或多个实施例中,其中形成弹性材料层包括将液态形式的弹性材料注入模具中,该模具放置有沉积有弹性材料层的基板。In one or more embodiments, forming the elastic material layer includes injecting an elastic material in liquid form into a mold on which a substrate on which the elastic material layer is deposited is placed.

附图简要说明Brief description of the attached figures

[图1]显示根据一个实施例的将弹性材料层结合到基板的方法的流程图。[Figure 1] shows a flowchart of a method for bonding an elastic material layer to a substrate according to one embodiment.

[图2]显示根据一个实施例的基底、硅化合物层和弹性材料层的结构。[Figure 2] shows the structure of a substrate, a silicon compound layer, and an elastic material layer according to one embodiment.

[图3]显示根据比较实例,在聚合物材料基板的表面上没有沉积任何硅化合物层的表面所截取的截面图。[Figure 3] shows a cross-sectional view of a polymer material substrate surface on which no silicon compound layer has been deposited, according to a comparative example.

[图4A-图4C]显示根据一些实施例,穿过聚合物材料基板的表面截取的横截面图,每个基板具有厚度低于阈值水准和粗糙度低于阈值水准的硅化合物层。[Figures 4A-4C] show cross-sectional views taken through the surface of a polymer material substrate according to some embodiments, each substrate having a silicon compound layer with a thickness below a threshold level and a roughness below a threshold level.

[图5A-图5C]显示根据一些实施例,穿过聚合物材料基板的表面截取的横截面图,每个基板具有厚度低于阈值且粗糙度在阈值范围内的硅化合物层。[Figures 5A-5C] show cross-sectional views taken through the surface of a polymer material substrate according to some embodiments, each substrate having a silicon compound layer with a thickness below a threshold and a roughness within the threshold range.

[图6]显示根据一个实施例,横跨具有厚度高于阈值且粗糙度在阈值范围内的硅化合物层的聚合物材料基板的表面所截取的截面图。[Figure 6] shows a cross-sectional view taken across the surface of a polymer material substrate having a silicon compound layer with a thickness above a threshold and a roughness within a threshold range, according to one embodiment.

[图7]显示根据一个实施例,横跨具有厚度低于阈值和粗糙度高于阈值范围的硅化合物层的聚合物材料基板的表面所截取的截面图。[Figure 7] shows a cross-sectional view taken across the surface of a polymer material substrate having a silicon compound layer with a thickness below a threshold and a roughness above a threshold, according to one embodiment.

具体实施方式Detailed Implementation

在此,本发明的实施例系参照附图所说明。然而,本发明公开的原理可以以许多不同的形式体现,并且不应被解释为仅限于本发明所阐述的实施例。在说明中,可以省略习知特征和技术的细节,以避免不必要地模糊实施例的特征。在附图中,附图中相同的附图标记表示相同的元件。为清楚起见,附图的形状、大小和区域等可能被放大。Hereinafter, embodiments of the present invention are described with reference to the accompanying drawings. However, the principles disclosed in the present invention can be embodied in many different forms and should not be construed as being limited to the embodiments set forth herein. Details of known features and techniques may be omitted in the description to avoid unnecessarily obscuring the characteristics of the embodiments. In the drawings, the same reference numerals denote the same elements. For clarity, the shapes, sizes, and areas of the drawings may be enlarged.

本发明的实施例涉及具有与弹性材料层结合的基板的制品(articles ofmanufacture)以及用于制造此类制品的方法。在基板(base substrate)上沉积具有预定表面粗糙度的硅化合物层,弹性材料层形成在硅化合物层上,以增强基板与弹性材料层之间的附着力。上述的硅化合物层,可以使用电浆增强化学气相沉积(PECVD)方法沉积,平均厚度小于1000nm、并且以Ra为单位的表面粗糙度为50nm至600nm。此类制品可用作高耐热部件(例如,汽车部件和电子元件)或透明且化学安全的部件(例如,婴儿奶瓶、护目镜和浴室产品)。Embodiments of the present invention relate to articles of manufacture having a substrate bonded to an elastic material layer, and methods for manufacturing such articles. A silicon compound layer having a predetermined surface roughness is deposited on the base substrate, and an elastic material layer is formed on the silicon compound layer to enhance the adhesion between the substrate and the elastic material layer. The aforementioned silicon compound layer can be deposited using a plasma-enhanced chemical vapor deposition (PECVD) method, with an average thickness of less than 1000 nm and a surface roughness of 50 nm to 600 nm in Ra. Such articles can be used as high-heat-resistant components (e.g., automotive parts and electronic components) or transparent and chemically safe components (e.g., baby bottles, goggles, and bathroom products).

将弹性材料层结合到基底的方法Methods of bonding elastic material layers to a substrate

图1显示出根据一个实施例,将弹性材料层结合到基板的方法的流程图。以下实施例均以硅橡胶层(silicone rubber layer)作为弹性材料层为范例进行说明,但不限于此,弹性材料层可以采用不同的材料。Figure 1 shows a flowchart of a method for bonding an elastic material layer to a substrate according to one embodiment. The following embodiments use a silicone rubber layer as an example of the elastic material layer, but are not limited to this; different materials can be used for the elastic material layer.

首先,为物体准备基板(步骤102)。基板可以由热塑性聚合物、热固性聚合物、硅橡胶、金属,例如不锈钢、铝、金、银、铜、铁、无机材料,例如,氧化铝、氧化钛和玻璃等材料的其中的一所形成。特别地,当基板包括热塑性聚合物时,基板可以由聚丙烯(PP)、聚酯砜(PES)、聚苯砜(PPSU)、聚酰胺(PA)、tritan、聚碳酸酯(PC)和尼龙所形成。这些热塑性聚合物具有高耐热性和抗冲击性。因此,这类包括热塑性聚合物的基板有利于应用在医疗设备、婴儿产品、厨房产品以及类似需要于高温和湿气中反覆灭菌等应用中。First, a substrate is prepared for the object (step 102). The substrate can be formed from one of the following materials: thermoplastic polymer, thermosetting polymer, silicone rubber, metal, such as stainless steel, aluminum, gold, silver, copper, iron, or inorganic materials, such as alumina, titanium dioxide, and glass. In particular, when the substrate includes a thermoplastic polymer, it can be formed from polypropylene (PP), polyester sulfone (PES), polyphenylene sulfone (PPSU), polyamide (PA), tritan, polycarbonate (PC), and nylon. These thermoplastic polymers have high heat resistance and impact resistance. Therefore, substrates containing thermoplastic polymers are advantageous for use in medical devices, baby products, kitchen products, and similar applications requiring repeated sterilization in high temperature and humidity.

然后,执行沉积方法,以在基板上沉积硅化合物层(步骤104)。硅化合物层可以是主要为二氧化硅的SiOxCyHz层。特别地,SiOxCyHz层具有低于1000nm的平均厚度和以Ra为单位的从50nm到600nm的表面粗糙度。Ra表示与层表面的中线的轮廓高度偏差的绝对值的算术平均值。SiOxCyHz的表面粗糙度和厚度的范围对硅胶(silicone)粘附到基板的有效性,是基于以下参照图3到图7所详细描述的实验确定的。Then, a deposition method is performed to deposit a silicon compound layer on the substrate (step 104). The silicon compound layer may be a SiOxCyHz layer, which is mainly silicon dioxide. In particular, the SiOxCyHz layer has an average thickness of less than 1000 nm and a surface roughness from 50 nm to 600 nm in Ra. Ra represents the arithmetic mean of the absolute values of the profile height deviations from the midline of the layer surface. The range of surface roughness and thickness of SiOxCyHz for the effectiveness of silicone adhesion to the substrate was determined based on experiments described in detail below with reference to Figures 3 to 7.

硅化合物层(例如,SiOxCyHz层)的表面粗糙度可以使用原子力显微镜(atomicforce microscopy,AFM)来测量,如Ichiko Misuzu et al.,于11thLaser Metrology forPrecision Measurement and Inspection in Industry 2014(September 2-5,2014)会议所发表“Profile Surface Roughness Measurement Using Metrological Atomic ForceMicroscopy and Uncertainty Evaluation”论文所描述的,其全部内容透过引用并入本文。以下面参考图3至图7所描述的范例的表面粗糙度是使用相同的方法测量。The surface roughness of silicon compound layers (e.g., SiOxCyHz layers) can be measured using atomic force microscopy (AFM), as described in the paper "Profile Surface Roughness Measurement Using Metallological Atomic Force Microscopy and Uncertainty Evaluation" presented by Ichiko Misuzu et al. at the 11th Laser Metrology for Precision Measurement and Inspection in Industry 2014 (September 2-5, 2014), the entire contents of which are incorporated herein by reference. The surface roughness of the examples described below with reference to Figures 3 through 7 was measured using the same method.

硅化合物层(例如,SiOxCyHz层)的厚度可以透过分析扫描电子显微镜(scanningelectron microscopy,SEM)的影像来确定。首先,用铂涂层预处理有或没有硅化合物的基板表面,以防止对硅化合物层造成任何损坏。然后,使用聚焦离子束(focus ion beam,FIB)处理预处理表面。然后使用SEM撷取经由FIB处理的表面的横截面。然后分析撷取影像的像素以确定影像中多个点的厚度。将多个点所取得的厚度的平均值作为硅化合物层的厚度。The thickness of the silicon compound layer (e.g., a SiOxCyHz layer) can be determined by analyzing images obtained using a scanning electron microscope (SEM). First, the substrate surface, with or without silicon compound, is pretreated with a platinum coating to prevent any damage to the silicon compound layer. Then, the pretreated surface is treated with a focused ion beam (FIB). A cross-section of the FIB-treated surface is then captured using SEM. The pixels of the captured image are then analyzed to determine the thickness at multiple points within the image. The average thickness obtained at these multiple points is taken as the thickness of the silicon compound layer.

在一个实施例中,具有表面粗糙度的硅化合物层是透过进行电浆增强化学沉积(PECVD)以沉积硅化合物层来实现的。在一种情况下,PECVD制程可以在相对低温和低压的条件下进行以获得基板上的硅化合物层的期望表面粗糙度。其中,PECVD制程的压力可以为1×10-2至1Torr,并且在PECVD制程的至少一部分或全部过程中基板的温度可以为50℃至200℃。上述PECVD制程中可以使用含硅的前躯气体(Si-containing precursor gas)和反应性气体(reactive gas)。含硅前驱物是六甲基二硅氧烷(hexamethyldisiloxane,HMDSO),反应气体是氧气(O2)。In one embodiment, the silicon compound layer with surface roughness is achieved by depositing the silicon compound layer through plasma-enhanced chemical deposition (PECVD). In one case, the PECVD process can be performed under relatively low temperature and low pressure conditions to obtain the desired surface roughness of the silicon compound layer on the substrate. The pressure of the PECVD process can be from 1 × 10⁻² to 1 Torr, and the temperature of the substrate can be from 50°C to 200°C during at least part or all of the PECVD process. A silicon-containing precursor gas and a reactive gas can be used in the above-described PECVD process. The silicon-containing precursor is hexamethyldisiloxane (HMDSO), and the reactive gas is oxygen ( O₂ ).

经由这种PECVD制程所形成的硅化合物层可以是SiOxCyHz层。在一个或多个实施例中,硅、氧、碳和氢的比例分别在28-30wt%、60-65wt%、0-1wt%和6-9wt%的范围内,wt%表示重量百分比。硅化合物层的组成可以使用,例如本领域众所周知的卢瑟福背散射光谱法(Rutherford Backscattering Spectroscopy,RBS)-弹性反冲检测(ElasticRecoil Detection,ERD)法来确定。The silicon compound layer formed via this PECVD process can be a SiOxCyHz layer. In one or more embodiments, the proportions of silicon, oxygen, carbon, and hydrogen are in the ranges of 28-30 wt%, 60-65 wt%, 0-1 wt%, and 6-9 wt%, respectively, where wt% represents weight percentage. The composition of the silicon compound layer can be determined using, for example, Rutherford Backscattering Spectroscopy (RBS)-Elastic Recoil Detection (ERD), a method well-known in the art.

复参照图1,弹性材料层形成在硅化合物层的表面上(步骤106)。具体地,弹性材料层(resilient layer)可以透过具有表面粗糙度在阈值范围内的硅化合物层的表面上涂覆弹性材料来形成。其作用是提高基板和所得弹性材料层之间的粘合力(附着力)。其中,弹性材料可以是液体硅橡胶(LSR)、热固化橡胶(HCR)或其组合。Referring again to Figure 1, an elastic material layer is formed on the surface of the silicon compound layer (step 106). Specifically, the elastic material layer can be formed by coating an elastic material onto the surface of a silicon compound layer having a surface roughness within a threshold range. Its function is to improve the adhesion between the substrate and the resulting elastic material layer. The elastic material can be liquid silicone rubber (LSR), thermosetting rubber (HCR), or a combination thereof.

在一个实施例中,透过将包括基板和硅化合物层的物体放置或固定在注塑机(射出成形机具)的模具中,并填充模具,将弹性材料施加到具有硅化合物层的基板上具有弹性材料的射出机将弹性材料涂布于硅化合物层的表面。In one embodiment, an elastic material is applied to the substrate having a silicon compound layer by placing or fixing an object comprising a substrate and a silicon compound layer in a mold of an injection molding machine (injection molding machine) and filling the mold. The injection molding machine applies the elastic material to the surface of the silicon compound layer.

在一个实施例中,在沉积硅化合物层之前,对基板的表面进行电浆处理。进行电浆处理减少了基板上的污染或其他颗粒,并能导致基板和沈积的硅化合物层之间的附着力提高。In one embodiment, the surface of the substrate is plasma-treated before depositing the silicon compound layer. Plasma treatment reduces contaminants or other particles on the substrate and can lead to improved adhesion between the substrate and the deposited silicon compound layer.

进一步地,可以在形成弹性材料层之前对硅化合物层的表面进行电离制程(ionization process)。尽管硅化合物层的相对高的表面粗糙度改善了与弹性材料层的物理性和机械性粘合,但是执行电离制程可以透过增加硅化合物层的表面的表面能(surfaceenergy)来进一步改善粘合(附着力)。Furthermore, an ionization process can be performed on the surface of the silicon compound layer before forming the elastic material layer. Although the relatively high surface roughness of the silicon compound layer improves the physical and mechanical adhesion to the elastic material layer, performing the ionization process can further improve the adhesion by increasing the surface energy of the silicon compound layer.

复合结构Composite structure

图2显示根据一个实施例,包括基板110、硅化合物层130和弹性材料层120的复合结构100。以下复合结构100可以形成物品的一部分或整体,并且可以透过执行结合图1中详细描述的步骤获得。Figure 2 shows a composite structure 100 according to one embodiment, including a substrate 110, a silicon compound layer 130, and an elastic material layer 120. This composite structure 100 can form part or all of an article and can be obtained by performing the steps described in detail in conjunction with Figure 1.

基板110形成为复合结构100的基底材料,并且可以由结合图1所示方法的步骤102所描述的材料和特性形成。弹性材料层120为由复合结构100形成的物体提供纹理(texture)和抗冲击性,并且可以由结合上述图1所描述的形成弹性材料层材料和特性的步骤106所形成。The substrate 110 is formed as the base material of the composite structure 100 and can be formed using the materials and properties described in conjunction with step 102 of the method shown in FIG. 1. The elastic material layer 120 provides texture and impact resistance to the object formed from the composite structure 100 and can be formed using step 106 of forming the elastic material layer, in conjunction with the materials and properties described above in FIG. 1.

硅化合物层130形成于基板110与弹性材料层120之间,由结合图1所示方法的步骤104所描述的材料和特性形成。特别地,与弹性材料层120交界的硅化合物层130的表面可以具有在阈值范围内的表面粗糙度以改善弹性材料层120与基板110的键结(bonding)。硅化合物层130也可以具有低于阈值的平均厚度。在一实施例中,基板110可由PPSU形成,弹性材料层120可由硅橡胶(silicone rubber)形成,而硅化合物层130可具有50nm至600nm的表面粗糙度且平均厚度小于1000nm,但超过50奈米。A silicon compound layer 130 is formed between the substrate 110 and the elastic material layer 120, and is formed using the materials and properties described in conjunction with step 104 of the method shown in FIG. 1. Specifically, the surface of the silicon compound layer 130 at the interface with the elastic material layer 120 may have a surface roughness within a threshold range to improve the bonding between the elastic material layer 120 and the substrate 110. The silicon compound layer 130 may also have an average thickness below a threshold. In one embodiment, the substrate 110 may be formed of PPSU, the elastic material layer 120 may be formed of silicone rubber, and the silicon compound layer 130 may have a surface roughness of 50 nm to 600 nm and an average thickness of less than 1000 nm but more than 50 nm.

实验结果Experimental results

在以下范例中,测试了硅胶(silicone)对使用SiOxCyHz层的PPSU制成的婴儿奶瓶容器的粘附性(adhesion)。在范例中,执行电离制程以活化PPSU的表面,然后使用涉及HMDSO作为含Si前驱物和O2作为反应性气体的PECVD制程来形成SiOxCyHz层。然后将具有SiOxCyHz层的婴儿奶瓶形式的PPSU基材放入射出成形机(injection molding machine)的模具中,然后在模具中填充LSR硅胶。然后冷却具有LSR硅胶的PPSU基材以固化硅胶。在透过SiOxCyHz层将硅胶(silicone)附着到PPSU之后,将婴儿奶瓶在2个大气压的沸水中浸泡预定时间,以确定PPSU和硅胶(silicone)之间的粘附性(adhesion)是否得以保持。在SiOxCyHz层和硅胶(silicone)之间没有放置单独的粘合剂以将硅胶黏附到PPSU基材。In the following example, the adhesion of silicone to a baby bottle container made of PPSU with a SiOxCyHz layer was tested. In this example, an ionization process was performed to activate the surface of the PPSU, and then a SiOxCyHz layer was formed using a PECVD process involving HMDSO as a Si-containing precursor and O2 as a reactive gas. The PPSU substrate in the form of a baby bottle with the SiOxCyHz layer was then placed in a mold of an injection molding machine, and LSR silicone was filled into the mold. The PPSU substrate with the LSR silicone was then cooled to cure the silicone. After the silicone was adhered to the PPSU through the SiOxCyHz layer, the baby bottle was immersed in boiling water at 2 atmospheres for a predetermined time to determine whether the adhesion between the PPSU and the silicone was maintained. No separate adhesive was placed between the SiOxCyHz layer and the silicone to bond the silicone to the PPSU substrate.

图3是根据比较范例,在没有沉积任何SiOxCyHz层的情况下横跨PPSU基板和硅胶(silicone)的表面截取的横截面视图的扫描电子显微镜(SEM)图像。因此,SiOxCyHz层的厚度为零,PPSU基板的粗糙度小于5nm(Ra)。在没有SiOxCyHz层的情况下,硅胶(silicone)甚至在浸入沸水中之前就与PPSU分离了。Figure 3 is a scanning electron microscope (SEM) image of a cross-sectional view taken across the surfaces of the PPSU substrate and silicone, according to a comparative example, without any SiOxCyHz layer deposited. Therefore, the thickness of the SiOxCyHz layer is zero, and the roughness of the PPSU substrate is less than 5 nm (Ra). Without the SiOxCyHz layer, the silicone separates from the PPSU even before immersion in boiling water.

图4A至4C是根据一些实施例横跨具有低于阈值粗糙度水平的SiO xC yH z层的PPSU基板的表面所截取的截面图的SEM影像。亦即,SiOxCyHz层的粗糙度低于50nm(Ra)。图4A是PPSU基板的SEM影像,其中SiOxCyHz层的平均厚度为42.8nm并且SiOxCyHz层的粗糙度为0.26nm(Ra)。图4B是PPSU基板的SEM影像,其中SiOxCyHz层的厚度为197nm并且SiOxCyHz层的粗糙度为11.15nm(Ra)。在此范例中,执行三个单独的PECVD循环以获得最终厚度的SiOxCyHz层。图4C是PPSU基板的SEM图像,其中SiOxCyHz层的厚度为721nm并且SiOxCyHz层的粗糙度为25.64nm(Ra)。在如图4A至4C所示的范例中,硅胶(silicone)最初附着在PPSU基材上,但当基材和硅胶浸入沸水中30小时后分离。因此,这些实施例表明,如果SiOxCyHz层的粗糙度低于50nm(Ra),即使SiOxCyHz层的厚度小于1000nm,硅胶也不能充分附着到基板上。Figures 4A to 4C are SEM images of cross-sectional views taken across the surface of a PPSU substrate with a SiOxCyHz layer having a roughness level below a threshold, according to some embodiments. That is, the roughness of the SiOxCyHz layer is less than 50 nm (Ra). Figure 4A is an SEM image of the PPSU substrate where the average thickness of the SiOxCyHz layer is 42.8 nm and the roughness of the SiOxCyHz layer is 0.26 nm (Ra). Figure 4B is an SEM image of the PPSU substrate where the thickness of the SiOxCyHz layer is 197 nm and the roughness of the SiOxCyHz layer is 11.15 nm (Ra). In this example, three separate PECVD cycles are performed to obtain the final thickness of the SiOxCyHz layer. Figure 4C is an SEM image of the PPSU substrate where the thickness of the SiOxCyHz layer is 721 nm and the roughness of the SiOxCyHz layer is 25.64 nm (Ra). In the examples shown in Figures 4A to 4C, the silicone initially adhered to the PPSU substrate, but separated after the substrate and silicone were immersed in boiling water for 30 hours. Therefore, these examples demonstrate that if the roughness of the SiOxCyHz layer is less than 50 nm (Ra), the silicone cannot adequately adhere to the substrate even if the thickness of the SiOxCyHz layer is less than 1000 nm.

图5A至5C是根据一些实施例中,横跨具有预定范围内的粗糙度的SiOxCyHz层的PPSU基板的表面所截取的截面图的SEM影像。亦即,SiOxCyHz层的粗糙度为50nm(Ra)以上且低于600nm(Ra)。图5A是PPSU基板的SEM图像,其中SiOxCyHz层的平均厚度为127.3nm并且SiOxCyHz层的粗糙度为56.85nm(Ra)。图5B是PPSU基板的SEM影像,其中SiOxCyHz层的平均厚度为263.1nm并且SiOxCyHz层的粗糙度为203.4nm(Ra)。图5C是PPSU基板的SEM影像,其中SiOxCyHz层的平均厚度为400.7nm并且SiOxCyHz层的粗糙度为454nm(Ra)。在如图5A至5C的范例中所示,硅胶附着在PPSU基板上,甚至在基板和硅胶浸入沸水中50小时后仍保持附着在基板上。因此,这些范例表明,如果SiOxCyHz层的粗糙度在50nm(Ra)至600nm(Ra)的阈值范围内且SiOxCyHz层的平均厚度在小于1000奈米。Figures 5A to 5C are SEM images of cross-sectional views taken across the surface of a PPSU substrate with a SiOxCyHz layer having a roughness within a predetermined range, according to some embodiments. That is, the roughness of the SiOxCyHz layer is 50 nm (Ra) or more and less than 600 nm (Ra). Figure 5A is an SEM image of a PPSU substrate where the average thickness of the SiOxCyHz layer is 127.3 nm and the roughness of the SiOxCyHz layer is 56.85 nm (Ra). Figure 5B is an SEM image of a PPSU substrate where the average thickness of the SiOxCyHz layer is 263.1 nm and the roughness of the SiOxCyHz layer is 203.4 nm (Ra). Figure 5C is an SEM image of a PPSU substrate where the average thickness of the SiOxCyHz layer is 400.7 nm and the roughness of the SiOxCyHz layer is 454 nm (Ra). As shown in the examples in Figures 5A to 5C, the silicone adheres to the PPSU substrate and remains adhered even after the substrate and silicone have been immersed in boiling water for 50 hours. Therefore, these examples demonstrate that if the roughness of the SiOxCyHz layer is within the threshold range of 50 nm (Ra) to 600 nm (Ra) and the average thickness of the SiOxCyHz layer is less than 1000 nanometers.

图6是根据一些实施例中,横跨PPSU基板表面截取的横截面视图的SEM影像,其中SiOxCyHz层的粗糙度在阈值范围内,但SiOxCyHz层的平均厚度高于阈值水平。具体而言,SiOxCyHz层的平均厚度为1,207.9nm,SiOxCyHz层的粗糙度为224.1nm(Ra)。在本范例中,硅胶最初附着在PPSU基板上,但在沸水中浸泡30小时后与基板分离。此范例表明,如果SiOxCyHz层的厚度大于1000nm,则硅胶无法充分附着到基板上。Figure 6 is a SEM image of a cross-sectional view taken across the surface of a PPSU substrate according to some embodiments, where the roughness of the SiOxCyHz layer is within a threshold range, but the average thickness of the SiOxCyHz layer is above the threshold level. Specifically, the average thickness of the SiOxCyHz layer is 1,207.9 nm, and the roughness of the SiOxCyHz layer is 224.1 nm (Ra). In this example, the silicone initially adhered to the PPSU substrate but separated from the substrate after immersion in boiling water for 30 hours. This example demonstrates that if the thickness of the SiOxCyHz layer is greater than 1000 nm, the silicone cannot adequately adhere to the substrate.

图7是根据一个实施例,横跨具有低于阈值水平的厚度和高于阈值范围的粗糙度的硅化合物层的PPSU基板的表面所截取的截面图。在如图7所示的例子中,SiOxCyHz层的厚度为256.6nm,SiOxCyHz层的粗糙度为732nm(Ra)。在本范例中,硅胶最初附着在PPSU基板上,但在沸水中浸泡30小时后与基板分离。该范例表明,如果SiOxCyHz层的粗糙度超过600nm(Ra),即使SiOxCyHz层的厚度低于1000nm,硅胶也不能充分附着到基板上。Figure 7 is a cross-sectional view of the surface of a PPSU substrate with a silicon compound layer having a thickness below a threshold level and a roughness above a threshold range, according to one embodiment. In the example shown in Figure 7, the SiOxCyHz layer has a thickness of 256.6 nm and a roughness of 732 nm (Ra). In this example, the silicone initially adhered to the PPSU substrate but separated from it after immersion in boiling water for 30 hours. This example demonstrates that if the roughness of the SiOxCyHz layer exceeds 600 nm (Ra), the silicone cannot adequately adhere to the substrate even if the thickness of the SiOxCyHz layer is less than 1000 nm.

除了上述实验,还使用PPSU以外的材料作为基板进行了实验。具体而言,根据ASTMD1002的搭接剪切测试(lap-shear tests)使用两个试样进行,其中每个试样都沉积有硅化合物层(例如SiOxCyHz层)。然后将LSR涂覆在沉积有硅化合物层的一个样品件的表面上。然后将另一个试样片与沈积有面向LSR涂覆表面的硅化合物层的表面重叠。压制样品片以使LSR达到预定厚度(例如,1mm),然后烘烤以将LSR固化成硅胶。然后将两块试件沿相反方向拉动,测试试件重叠部分的破坏剪力(failure shear)。In addition to the experiments described above, experiments were conducted using materials other than PPSU as substrates. Specifically, lap-shear tests were performed according to ASTM D1002 using two specimens, each with a deposited silicon compound layer (e.g., a SiOxCyHz layer). LSR was then coated onto the surface of one specimen with the deposited silicon compound layer. Another specimen was then overlapped with the surface having the deposited silicon compound layer facing the LSR-coated surface. The specimen was pressed to achieve a predetermined LSR thickness (e.g., 1 mm) and then baked to cure the LSR into silicone. The two specimens were then pulled in opposite directions to test the failure shear of the overlapping portion of the specimens.

测量不同材料(例如聚碳酸酯(polycarbonate)、玻璃、聚丙烯(polypropylene)和不锈钢)作为试样材料在失效前的最大剪切力,以测试硅化合物对这些材料的适用性。SiOxCyHz层利用在与图5A至图5C的范例类似的PECVD条件下沉积。因此,假定图5A至5C的厚度小于1000nm且粗糙度在50nm(Ra)至600nm(Ra)的范围内。对有或没有SiOxCyHz层的每种材料进行三次搭接剪切试验(lap-shear tests),并比较平均最大剪切力。结果如下:The suitability of silicon compounds for these materials was tested by measuring the maximum shear force before failure of different materials (e.g., polycarbonate, glass, polypropylene, and stainless steel) as test samples. The SiOxCyHz layer was deposited under PECVD conditions similar to those in Figures 5A to 5C. Therefore, it was assumed that the thickness of the materials in Figures 5A to 5C was less than 1000 nm and the roughness was in the range of 50 nm (Ra) to 600 nm (Ra). Three lap-shear tests were performed on each material with and without the SiOxCyHz layer, and the average maximum shear force was compared. The results are as follows:

[表1][Table 1]

如表1所示,当SiOxCyHz层沉积在样品材料上时,最大剪切力显着增加。在不锈钢的情况下,由于沉积SiOxCyHz层而增加的剪切力约为691倍。虽然仅使用PPSU、聚碳酸酯、玻璃、聚丙烯和不锈钢作为基板的材料,但预计在其他材料中也会有类似的结果。As shown in Table 1, the maximum shear force increases significantly when a SiOxCyHz layer is deposited on the sample materials. In the case of stainless steel, the increase in shear force due to the deposition of the SiOxCyHz layer is approximately 691 times. Although only PPSU, polycarbonate, glass, polypropylene, and stainless steel were used as substrate materials, similar results are expected in other materials.

以上所述系为本发明的较佳实施例,凡此领域的技艺者应得以领会其系用以说明本发明,而非用以限定本发明所主张的专利权范围,其专利保护范围当视后附的申请专利范围及其等同领域而定。凡熟悉此领域的技艺者,在不脱离本专利精神或范围内,所作的更动或润饰,均属于本发明所揭示精神下所完成的等效改变或设计,且应包含在下述的申请专利范围内。The above description is a preferred embodiment of the present invention. Those skilled in the art should understand that it is used to illustrate the invention and not to limit the scope of the patent rights claimed by the invention. The scope of patent protection shall be determined by the appended claims and their equivalents. Any modifications or refinements made by those skilled in the art without departing from the spirit or scope of this patent are equivalent changes or designs made under the spirit disclosed in this invention and should be included within the scope of the following claims.

Claims (21)

1.一种改善基材和弹性材料层之间的附着力的结构,包括:1. A structure for improving the adhesion between a substrate and an elastic material layer, comprising: 基板;substrate; 硅化合物层形成于该基板上,该硅化合物层的表面粗糙度以Ra为单位,介于50nm和600nm之间;以及A silicon compound layer is formed on the substrate, and the surface roughness of the silicon compound layer, measured in Ra, is between 50 nm and 600 nm; and 弹性材料层位于该硅化合物层的一表面上。An elastic material layer is located on one surface of the silicon compound layer. 2.如权利要求1所述的改善基材和弹性材料层之间的附着力的结构,其中上述的硅化合物层的厚度小于1000nm但大于50nm。2. The structure for improving adhesion between the substrate and the elastic material layer as described in claim 1, wherein the thickness of the silicon compound layer is less than 1000 nm but greater than 50 nm. 3.如权利要求2所述的改善基材和弹性材料层之间的附着力的结构,其中上述的硅化合物层为SiOxCyHz层。3. The structure for improving adhesion between the substrate and the elastic material layer as described in claim 2, wherein the silicon compound layer is a SiOxCyHz layer. 4.如权利要求3所述的改善基材和弹性材料层之间的附着力的结构,其中上述的SiOxCyHz层包括重量百分比28-30%的硅、重量百分比60-65%的氧、重量百分比0-1%的碳和重量百分比6-9%的氢。4. The structure for improving adhesion between the substrate and the elastic material layer as described in claim 3, wherein the SiOxCyHz layer comprises 28-30% silicon by weight, 60-65% oxygen by weight, 0-1% carbon by weight, and 6-9% hydrogen by weight. 5.如权利要求1所述的改善基材和弹性材料层之间的附着力的结构,其中上述的基板包括热塑性聚合物、热固性聚合物、硅橡胶、金属和玻璃中的至少一种。5. The structure for improving adhesion between a substrate and an elastic material layer as described in claim 1, wherein the substrate comprises at least one of a thermoplastic polymer, a thermosetting polymer, silicone rubber, a metal, and glass. 6.如权利要求5所述的改善基材和弹性材料层之间的附着力的结构,其中上述的热塑性聚合物包含聚丙烯(PP)、聚酯砜(PES)、聚苯砜(PPSU)、聚酰胺(PA)、tritan、聚碳酸酯(PC)、尼龙中的至少一种。6. The structure for improving adhesion between the substrate and the elastic material layer as described in claim 5, wherein the thermoplastic polymer comprises at least one of polypropylene (PP), polyester sulfone (PES), polyphenylene sulfone (PPSU), polyamide (PA), tritan, polycarbonate (PC), and nylon. 7.如权利要求1所述的改善基材和弹性材料层之间的附着力的结构,其中上述的弹性材料层为选自液体硅橡胶(LSR)、热固化橡胶(HCR)硅胶及其组合的材料。7. The structure for improving adhesion between the substrate and the elastic material layer as described in claim 1, wherein the elastic material layer is a material selected from liquid silicone rubber (LSR), thermosetting rubber (HCR), silicone, and combinations thereof. 8.如权利要求3所述的改善基材和弹性材料层之间的附着力的结构,其中上述的基板为聚苯砜(PPSU),该弹性材料层为硅橡胶。8. The structure for improving adhesion between the substrate and the elastic material layer as described in claim 3, wherein the substrate is polyphenylsulfone (PPSU) and the elastic material layer is silicone rubber. 9.如权利要求1所述的改善基材和弹性材料层之间的附着力的结构,其中上述的硅化合物层系使用电浆增强化学气相沉积(PECVD)沉积在该基板上。9. The structure for improving adhesion between the substrate and the elastic material layer as described in claim 1, wherein the silicon compound layer is deposited on the substrate using plasma-enhanced chemical vapor deposition (PECVD). 10.如权利要求9所述的改善基材和弹性材料层之间的附着力的结构,其中上述的电浆增强化学气相沉积(PECVD)系透过将前体六甲基二硅氧烷(HMDSO)与反应性气体氧气(O2)在电浆下反应来进行。10. The structure for improving adhesion between the substrate and the elastic material layer as described in claim 9, wherein the plasma-enhanced chemical vapor deposition (PECVD) is performed by reacting the precursor hexamethyldisiloxane (HMDSO) with the reactive gas oxygen ( O2 ) under plasma conditions. 11.一种改善基材和弹性材料层之间的附着力的方法,包括:11. A method for improving the adhesion between a substrate and an elastic material layer, comprising: 执行电浆增强化学气相沉积(PECVD),以在一制品的基板上沉积一硅化合物层;以及Perform plasma-enhanced chemical vapor deposition (PECVD) to deposit a silicon compound layer on a substrate of an article; and 形成一弹性材料层形成于该硅化合物层的一表面上。An elastic material layer is formed on one surface of the silicon compound layer. 12.如权利要求11所述的改善基材和弹性材料层之间的附着力的方法,其中上述的硅化合物层的厚度小于1000nm但大于50nm。12. The method for improving adhesion between a substrate and an elastic material layer as described in claim 11, wherein the thickness of the silicon compound layer is less than 1000 nm but greater than 50 nm. 13.如权利要求12所述的改善基材和弹性材料层之间的附着力的方法,其中上述的硅化合物层具有以Ra为单位的在50nm和600nm之间的表面粗糙度。13. The method for improving adhesion between a substrate and an elastic material layer as described in claim 12, wherein the silicon compound layer has a surface roughness in Ra units between 50 nm and 600 nm. 14.如权利要求11所述的改善基材和弹性材料层之间的附着力的方法,其中上述的硅化合物层为SiOxCyHz层。14. The method for improving adhesion between a substrate and an elastic material layer as described in claim 11, wherein the silicon compound layer is a SiOxCyHz layer. 15.如权利要求14所述的改善基材和弹性材料层之间的附着力的方法,其中上述的SiOxCyHz层包括重量百分比28-30%的硅、重量百分比60-65%的氧、重量百分比0-1%的碳和重量百分比6-9%的氢。15. The method for improving adhesion between a substrate and an elastic material layer as described in claim 14, wherein the SiOxCyHz layer comprises 28-30% by weight silicon, 60-65% by weight oxygen, 0-1% by weight carbon, and 6-9% by weight hydrogen. 16.如权利要求11所述的改善基材和弹性材料层之间的附着力的方法,其中上述的基板包括热塑性聚合物、热固性聚合物、硅橡胶、金属和玻璃中的至少一种。16. The method for improving adhesion between a substrate and an elastic material layer as described in claim 11, wherein the substrate comprises at least one of a thermoplastic polymer, a thermosetting polymer, silicone rubber, a metal, and glass. 17.如权利要求16所述的改善基材和弹性材料层之间的附着力的方法,其中上述的热塑性聚合物包含聚丙烯(PP)、聚酯砜(PES)、聚苯砜(PPSU)、聚酰胺(PA)、tritan、聚碳酸酯(PC)、尼龙中的至少一种。17. The method for improving adhesion between a substrate and an elastic material layer as described in claim 16, wherein the thermoplastic polymer comprises at least one of polypropylene (PP), polyester sulfone (PES), polyphenylene sulfone (PPSU), polyamide (PA), tritan, polycarbonate (PC), and nylon. 18.如权利要求11所述的改善基材和弹性材料层之间的附着力的方法,其中上述的弹性材料层为选自液体硅橡胶(LSR)、热固化橡胶(HCR)硅胶及其组合的材料。18. The method for improving adhesion between a substrate and an elastic material layer as described in claim 11, wherein the elastic material layer is a material selected from liquid silicone rubber (LSR), thermosetting rubber (HCR), silicone, and combinations thereof. 19.如权利要求11所述的改善基材和弹性材料层之间的附着力的方法,其中上述的基板为聚苯砜(PPSU),该弹性材料层为硅橡胶。19. The method for improving adhesion between a substrate and an elastic material layer as described in claim 11, wherein the substrate is polyphenylsulfone (PPSU) and the elastic material layer is silicone rubber. 20.如权利要求11所述的改善基材和弹性材料层之间的附着力的方法,其中上述执行电浆增强化学气相沉积(PECVD)包括将前体六甲基二硅氧烷(HMDSO)与反应性气体氧气(O2)在电浆下反应来进行。20. The method for improving adhesion between a substrate and an elastic material layer as claimed in claim 11, wherein performing plasma-enhanced chemical vapor deposition (PECVD) comprises reacting the precursor hexamethyldisiloxane (HMDSO) with the reactive gas oxygen (O2) under plasma conditions. 21.如权利要求11所述的改善基材和弹性材料层之间的附着力的方法,其中形成上述弹性材料层包括将液态形式的弹性材料注入模具中,该模具放置有沉积该弹性材料层的该基板。21. The method for improving adhesion between a substrate and an elastic material layer as claimed in claim 11, wherein forming the elastic material layer comprises injecting an elastic material in liquid form into a mold on which the substrate on which the elastic material layer is deposited is placed.
HK62025104702.8A 2022-04-12 2023-01-10 Structure and corresponding method for improving adhesion between base material and resilient material layer HK40116681A (en)

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