[go: up one dir, main page]

HK40100917A - High capacitance tunable multilayer capacitor and array - Google Patents

High capacitance tunable multilayer capacitor and array Download PDF

Info

Publication number
HK40100917A
HK40100917A HK42024087965.0A HK42024087965A HK40100917A HK 40100917 A HK40100917 A HK 40100917A HK 42024087965 A HK42024087965 A HK 42024087965A HK 40100917 A HK40100917 A HK 40100917A
Authority
HK
Hong Kong
Prior art keywords
adjustable
bias
adjustable multilayer
multilayer capacitor
capacitor array
Prior art date
Application number
HK42024087965.0A
Other languages
Chinese (zh)
Inventor
C·W·尼斯
A·P·里特
R·C·范阿尔斯汀
Original Assignee
京瓷Avx元器件公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 京瓷Avx元器件公司 filed Critical 京瓷Avx元器件公司
Publication of HK40100917A publication Critical patent/HK40100917A/en

Links

Description

高电容可调多层电容器和阵列High-capacitance adjustable multilayer capacitors and arrays

本申请是申请日为2018年09月17日且发明名称为“高电容可调多层电容器和阵列”的中国专利申请No.201880077505.4的分案申请。This application is a divisional application of Chinese Patent Application No. 201880077505.4, filed on September 17, 2018, entitled "High-capacitance adjustable multilayer capacitor and array".

相关申请的交叉引用Cross-references to related applications

本申请要求申请日为2017年10月2日的美国临时专利申请序列号62/566,848和申请日为2017年10月9日的美国临时专利申请序列号62/569,757的优先权,其全部内容通过引用并入本文。This application claims priority to U.S. Provisional Patent Application Serial No. 62/566,848, filed October 2, 2017, and U.S. Provisional Patent Application Serial No. 62/569,757, filed October 9, 2017, the entire contents of which are incorporated herein by reference.

背景技术Background Technology

在各种依赖于电介质的可变电介质特性的应用中,已经提出了可调电容器。对于此类电容器,零偏压下的电容通常接近其最大值,并且电容会随着施加的电压而下降。电容的变化允许这些单元可用于在滤波器、匹配网络、谐振电路以及从音频到RF和微波频率的其他应用中创建可调电路。尽管其具有这些优点,但部分由于在高功率和高电压下实现相对较低的电容值,此类电容器的使用受到了相对的限制。因此,目前需要一种具有改进的特性的电压可调的电容器,其可以在更广泛的可能应用中使用。Adjustable capacitors have been proposed for various applications that rely on the variable dielectric properties of the dielectric. For such capacitors, the capacitance at zero bias is typically close to its maximum value, and the capacitance decreases with the applied voltage. This capacitance variation allows these units to be used in filters, matching networks, resonant circuits, and other applications ranging from audio to RF and microwave frequencies to create adjustable circuits. Despite these advantages, the use of such capacitors is relatively limited, partly due to the relatively low capacitance values required at high power and high voltage. Therefore, there is a current need for a voltage-adjustable capacitor with improved characteristics that can be used in a wider range of possible applications.

发明内容Summary of the Invention

根据本公开的一个实施例,公开了一种可调多层电容器阵列。该可调多层电容器包括并联连接的多个可调多层电容器。该可调多层电容器在大于约10伏的工作电压下具有大于约0.1微法的初始电容。该可调多层电容器配置为通过向可调多层电容器阵列施加DC偏置电压而具有可调电容。该可调多层电容器具有大于约10伏的工作电压。According to one embodiment of this disclosure, an adjustable multilayer capacitor array is disclosed. The adjustable multilayer capacitor includes a plurality of adjustable multilayer capacitors connected in parallel. The adjustable multilayer capacitor has an initial capacitance greater than about 0.1 microfarads at an operating voltage greater than about 10 volts. The adjustable multilayer capacitor is configured to have adjustable capacitance by applying a DC bias voltage to the adjustable multilayer capacitor array. The adjustable multilayer capacitor has an operating voltage greater than about 10 volts.

根据本公开的另一实施例,公开了一种可调多层电容器,其包括与第一有源终端电接触的第一有源电极和与第二有源终端电接触的第二有源电极。电容器还包括与第一DC偏置终端电接触的第一DC偏置电极和与第二DC偏置终端电接触的第二DC偏置电极。电容器还包括设置在第一有源电极和第二有源电极与第一偏置电极和第二偏置电极之间的多个电介质层。电介质层的至少一部分包含可调电介质材料,其在跨第一DC偏置电极和第二DC偏置电极施加所施加的DC电压时呈现可变介电常数。可调多层电容器可以在大于约10伏的工作电压下具有大于约0.1微法的初始电容。According to another embodiment of this disclosure, an adjustable multilayer capacitor is disclosed, comprising a first active electrode in electrical contact with a first active terminal and a second active electrode in electrical contact with a second active terminal. The capacitor also includes a first DC bias electrode in electrical contact with a first DC bias terminal and a second DC bias electrode in electrical contact with a second DC bias terminal. The capacitor further includes a plurality of dielectric layers disposed between the first and second active electrodes and the first and second bias electrodes. At least a portion of the dielectric layers comprises an adjustable dielectric material exhibiting a variable dielectric constant when an applied DC voltage is applied across the first and second DC bias electrodes. The adjustable multilayer capacitor can have an initial capacitance greater than about 0.1 microfarads at an operating voltage greater than about 10 volts.

根据本公开的另一实施例,公开了一种部分可调多层电容器阵列。部分可调多层电容器阵列包括可调多层电容器,其配置为通过向部分可调多层电容器阵列施加DC偏置电压而具有可调电容。部分可调多层电容器阵列还包括不可调多层电容器,其与可调多层电容器并联连接。不可调多层电容器的电容值在向部分可调多层电容器阵列施加DC偏置电压时不可调。According to another embodiment of this disclosure, a partially adjustable multilayer capacitor array is disclosed. The partially adjustable multilayer capacitor array includes adjustable multilayer capacitors configured to have adjustable capacitance by applying a DC bias voltage to the array. The partially adjustable multilayer capacitor array also includes non-adjustable multilayer capacitors connected in parallel with the adjustable multilayer capacitors. The capacitance value of the non-adjustable multilayer capacitors is not adjustable when a DC bias voltage is applied to the partially adjustable multilayer capacitor array.

根据本公开的另一实施例,公开了一种部分可调多层电容器。部分可调多层电容器包括与第一有源终端电接触的第一有源电极和与第二有源终端电接触的第二有源电极。部分可调多层电容器还包括与第一DC偏置终端电接触的第一DC偏置电极和与第二DC偏置终端电接触的第二DC偏置电极。部分可调多层电容器还包括设置在第一有源电极和第二有源电极和第一偏置电极和第二偏置电极之间的多个电介质层。电介质层的至少一部分包含可调电介质材料,其在跨第一DC偏置电极和第二DC偏置电极施加所施加的DC电压时呈现可变介电常数。多个电介质层的不可调部分在跨所述第一DC偏置电极和第二DC偏置电极施加所施加的DC电压时不呈现可变电容。According to another embodiment of this disclosure, a partially tunable multilayer capacitor is disclosed. The partially tunable multilayer capacitor includes a first active electrode in electrical contact with a first active terminal and a second active electrode in electrical contact with a second active terminal. The partially tunable multilayer capacitor also includes a first DC bias electrode in electrical contact with a first DC bias terminal and a second DC bias electrode in electrical contact with a second DC bias terminal. The partially tunable multilayer capacitor further includes a plurality of dielectric layers disposed between the first and second active electrodes and between the first and second bias electrodes. At least a portion of the dielectric layers comprises an tunable dielectric material that exhibits a variable dielectric constant when an applied DC voltage is applied across the first and second DC bias electrodes. The non-tunable portions of the plurality of dielectric layers do not exhibit variable capacitance when an applied DC voltage is applied across the first and second DC bias electrodes.

根据本公开的另一实施例,公开了一种可调多层电容器阵列。可调多层电容器阵列可以包括并联连接的多个可调多层电容器。可调多层电容器阵列可以具有水平堆叠配置。多个可调多层电容器中的每一个的厚度可以在可调多层电容器阵列的长度方向上延伸。可调多层电容器可以配置为通过向可调多层电容器阵列施加DC偏置电压而具有可调电容。According to another embodiment of this disclosure, an adjustable multilayer capacitor array is disclosed. The adjustable multilayer capacitor array may include a plurality of adjustable multilayer capacitors connected in parallel. The adjustable multilayer capacitor array may have a horizontally stacked configuration. The thickness of each of the plurality of adjustable multilayer capacitors may extend along the length of the adjustable multilayer capacitor array. The adjustable multilayer capacitors may be configured to have adjustable capacitance by applying a DC bias voltage to the adjustable multilayer capacitor array.

本发明的其他特征和方面在下面更详细地阐述。Other features and aspects of the invention are set forth in more detail below.

附图说明Attached Figure Description

在本说明书的其余部分中,更具体地阐述了针对本领域的普通技术人员的本发明的完整且可行的公开,包括其最佳模式,并参考附图,其中:In the remainder of this specification, a full and practical disclosure of the invention, including its preferred mode, is set forth in more detail for those skilled in the art, and with reference to the accompanying drawings, wherein:

图1以曲线图示出了在一定范围的归一化偏置电压变化内通过使用当前公开的主题可实现的电容的变化;Figure 1 shows, as a graph, the capacitance variation that can be achieved using the currently disclosed subject matter within a certain range of normalized bias voltage variation;

图2A、2B和2C分别示出了根据当前公开的主题的四终端偏置多层电容器的示例性实施例的截面图、分解平面图和分解透视图;Figures 2A, 2B, and 2C show cross-sectional views, exploded plan views, and exploded perspective views of exemplary embodiments of a four-terminal biased multilayer capacitor according to the currently disclosed subject matter, respectively.

图2D示出了根据本图2A至图2C的示例性实施例的组装的装置总体侧视、俯视和端部立体图;Figure 2D shows a general side view, top view, and end perspective view of the assembled device according to the exemplary embodiments of Figures 2A to 2C;

图2E和图2F分别示出了本图2A至2D的示例性实施例的分流配置和串联配置代表图;Figures 2E and 2F respectively show representative diagrams of the shunt and cascade configurations of the exemplary embodiments of Figures 2A to 2D;

图3A、3B和3C分别示出了根据当前公开的主题的四终端可调级联配置多层电容器的示例性实施例的截面图、分解平面图和分解立体图;Figures 3A, 3B, and 3C show cross-sectional views, exploded plan views, and exploded perspective views of exemplary embodiments of a four-terminal adjustable cascaded multilayer capacitor according to the currently disclosed subject matter.

图3D和图3E分别示出了本图3A至3C的示例性实施例的分流配置和串联配置代表图;Figures 3D and 3E respectively show representative diagrams of the shunt and series configurations of the exemplary embodiments of Figures 3A to 3C;

图4A和图4B分别示出了根据当前公开的主题的四终端可调部分偏置配置多层电容器的示例性实施例的立体图和分解平面图;Figures 4A and 4B show a perspective view and an exploded plan view, respectively, of an exemplary embodiment of a multilayer capacitor with a four-terminal adjustable partial bias configuration according to the currently disclosed subject matter.

图4C示出了本图4A和图4B的示例性实施例的代表图;Figure 4C shows a representative diagram of an exemplary embodiment of Figures 4A and 4B;

图5表示根据当前公开的主题的芯片制造自动化过程(CMAP)示例性实施例,其可用于如本文公开的制造装置示例性实施例;Figure 5 illustrates an exemplary embodiment of the Chip Manufacturing Automation Process (CMAP) according to the currently disclosed subject matter, which can be used in exemplary embodiments of manufacturing apparatuses as disclosed herein;

图6示出了根据当前公开的主题的偏置的非对称多层电容器的示例性实施例的截面图;Figure 6 shows a cross-sectional view of an exemplary embodiment of a biased asymmetric multilayer capacitor according to the subject matter currently disclosed;

图7A和图7B分别示出了根据当前公开的主题的偏置的多层电容器的1:1比例重叠对称设计的示例性实施例的截面图和局部放大立体图;Figures 7A and 7B show a cross-sectional view and a partially enlarged perspective view, respectively, of an exemplary embodiment of a 1:1 scale overlapping symmetrical design of a biased multilayer capacitor according to the subject matter currently disclosed.

图7C和图7D分别示出了根据当前公开的主题的偏置的多层电容器的1:1比例重叠对称设计的另一示例性实施例的截面图和局部放大立体图;Figures 7C and 7D show a cross-sectional view and a partially enlarged perspective view, respectively, of another exemplary embodiment of a 1:1 scale overlapping symmetrical design of a biased multilayer capacitor according to the subject matter currently disclosed.

图8A示出了根据当前公开的主题的偏置的多层电容器的11:1比例非屏蔽非对称设计的示例性实施例的截面图;Figure 8A shows a cross-sectional view of an exemplary embodiment of an 11:1 scale unshielded asymmetric design of a biased multilayer capacitor according to the subject matter currently disclosed.

图8B示出了根据当前公开的主题的偏置的多层电容器的11:1比例屏蔽非对称设计的示例性实施例的截面图;Figure 8B shows a cross-sectional view of an exemplary embodiment of an 11:1 scale shielded asymmetric design of a biased multilayer capacitor according to the subject matter currently disclosed.

图9A和图9B分别示出了根据当前公开的主题的部分可调多层电容器的示例性实施例的截面图和示意图;Figures 9A and 9B show a cross-sectional view and a schematic diagram, respectively, of an exemplary embodiment of a partially adjustable multilayer capacitor according to the subject matter currently disclosed.

图10示出了根据当前公开的主题的成分混合的偏置的多层电容器的示例性实施例的截面图;Figure 10 shows a cross-sectional view of an exemplary embodiment of a biased multilayer capacitor with mixed components according to the currently disclosed subject matter;

图11A-11C分别示出了在本发明的某些实施例中的可用于有源终端和偏置终端的各种对称取向;Figures 11A-11C respectively illustrate various symmetry orientations that can be used for active terminals and biased terminals in certain embodiments of the present invention;

图12A-12C分别示出了根据当前公开的主题的方面的可调多层电容器阵列的实施例的侧视图、正视图和立体图;Figures 12A-12C show side views, front views and perspective views of embodiments of an adjustable multilayer capacitor array according to aspects of the currently disclosed subject matter;

图13A-13C分别示出了根据当前公开的主题的方面的部分可调多层电容器阵列的实施例的侧视图、正视图和立体图;以及Figures 13A-13C respectively show a side view, a front view, and a perspective view of an embodiment of a partially adjustable multilayer capacitor array according to aspects of the currently disclosed subject matter; and

图14A-14C分别示出了根据当前公开的主题的方面的可调多层电容器阵列的实施例的侧视图、正视图和立体图;以及Figures 14A-14C respectively show a side view, a front view, and a perspective view of an embodiment of an adjustable multilayer capacitor array according to aspects of the currently disclosed subject matter; and

图15示出了根据当前公开的主题的方面的可调多层电容器阵列的实施例的立体图。Figure 15 shows a perspective view of an embodiment of an adjustable multilayer capacitor array according to aspects of the currently disclosed subject matter.

在整个本说明书和附图中重复使用附图标记旨在表示其相同或类似的特征、元件或步骤。Reference numerals are used repeatedly throughout this specification and the accompanying drawings to indicate the same or similar features, elements or steps.

具体实施方式Detailed Implementation

本领域的普通技术人员应该理解,本讨论仅是示例性实施例的描述,而无意于限制本发明的更广泛的方面,所述更广泛的方面体现在示例性构造中。Those skilled in the art will understand that this discussion is merely a description of exemplary embodiments and is not intended to limit the broader aspects of the invention, which are embodied in the exemplary construction.

总体来说,本发明涉及一种多层电容器,其包含插设在交替的有源电极层之间的多个电介质层。电介质层的至少一部包括可调材料,其在施加所施加的电压时呈现可变介电常数。更特别地,此类材料同样具有“电压可调系数”,其在从约10%到约90%的范围内,在一些实施例中从约20%到约80%,且在一些实施例中从约30%到约70%,其中“电压可调系数”根据以下通式来确定:In general, the present invention relates to a multilayer capacitor comprising a plurality of dielectric layers interposed between alternating active electrode layers. At least a portion of the dielectric layers comprises an adjustable material that exhibits a variable dielectric constant when an applied voltage is applied. More particularly, such material also has a “voltage adjustability factor” ranging from about 10% to about 90%, from about 20% to about 80% in some embodiments, and from about 30% to about 70% in some embodiments, wherein the “voltage adjustability factor” is determined according to the following general formula:

T=100×(ε0V)/ε0 T = 100 × ( ε₀ - ε₀ ) / ε₀

其中,in,

T是电压可调系数;T is the voltage adjustability coefficient;

ε0是所述材料在没有施加电压的情况下的静态介电常数;以及ε <sub>0</sub> is the static dielectric constant of the material without an applied voltage; and

εV是材料在施加所施加的电压(DC)后的可变介电常数。 εV is the variable dielectric constant of a material after an applied voltage (DC) is applied.

材料的静态介电常数的范围通常从约100到约25,000,在一些实施例中从约200到约10,000,且在一些实施例中从约500到约9,000,例如在范围从约-55℃到约150℃(例如25℃)的工作温度和范围从约100Hz到约1GHz(例如1kHz)的频率下根据ASTM D2149-13确定。当然,应当理解,静态介电常数的具体值通常是基于使用电容器的特定应用来选择的。当施加增加的DC偏置时,介电常数通常会在上述范围内降低。为引起介电常数的理想变化而施加的调整电压通常会相对于施加电场后电介质组分开始变为导电的电压(“击穿电压”)而有所变化,其可以在25℃的温度下根据ASTM D149-13来确定。在大多数实施例中,最大施加的DC偏置电压为电介质组分的击穿电压的约50%或更小,在一些实施例中,约30%或更小,且在一些实施例中,从约0.5%到约10%。The static dielectric constant of a material typically ranges from about 100 to about 25,000, in some embodiments from about 200 to about 10,000, and in some embodiments from about 500 to about 9,000, for example, at operating temperatures ranging from about -55°C to about 150°C (e.g., 25°C) and frequencies ranging from about 100 Hz to about 1 GHz (e.g., 1 kHz), as determined according to ASTM D2149-13. It should be understood, of course, that the specific value of the static dielectric constant is typically chosen based on the specific application using the capacitor. The dielectric constant typically decreases within the aforementioned range when an increased DC bias is applied. The adjustment voltage applied to induce the desired change in dielectric constant typically varies relative to the voltage at which the dielectric components begin to conduct after the application of an electric field (“breakdown voltage”), and can be determined according to ASTM D149-13 at a temperature of 25°C. In most embodiments, the maximum applied DC bias voltage is about 50% or less of the breakdown voltage of the dielectric component, in some embodiments about 30% or less, and in some embodiments from about 0.5% to about 10%.

如本领域中已知的,通常可以使用任意的各种可调电介质材料。特别合适的材料是其基础组分包括一种或多种铁电基相的电介质,例如钙钛矿、钨青铜材料(例如铌酸钠钡)、分层结构材料(例如钛酸铋)。合适的钙钛矿物质可以包括例如钛酸钡和相关的固溶体(例如钛酸锶钡、钛酸钡钙、钛酸锆钡、锆钛酸锶钡、锆钛酸钙钡等),钛酸铅和相关固溶体(例如锆钛酸铅,锆钛酸镧铅),钛酸铋钠等。在一个特定的实施例中,例如,可以使用化学式为BaxSr1-xTiO3的钛酸锶钡(“BSTO”),其中x从0到1,在一些实施例中从约0.15到约0.65,且在一些实施例中,从约0.25到约0.6。其他电可调电介质材料可以部分或全部代替钛酸锶。例如,一个示例是BaxCa1-xTiO3,其中x从约0.2到约0.8,且在一些实施例中,从约0.4到约0.6。其他合适的钙钛矿可以包括PbxZr1-xTiO3(“PZT”),其中x的范围从约0.05到约0.4,钛酸镧铅(“PLZT”)、钛酸铅(PbTiO3)钛酸锆钙钡(BaCaZrTiO3)、硝酸钠(NaNO3)、KNbO3、LiNbO3、LiTaO3、PbNb2O6、PbTa2O6、KSr(NbO3)和NaBa2(NbO3)5KHb2PO4。另外的复合钙钛矿可以包括A[B11/3B22/3]O3材料,其中A是BaxSr1-x(x可以是从0到1的值);B1是MgyZn1-y(y可以是从0到1的值);B2是TazNb1-z(z可以是从0到1的值)。感兴趣的潜在电介质材料可以通过在交替层中组合两个端元(end-member)组分来形成,如图10的示例性实施例所示。这样的端元组分可以在化学上相似,但是如上所述,A位掺杂剂的比例不同。例如,组分1(图10中的132)可以是通式为(A1x,A2(1-x))BO3的钙钛矿化合物,且组分2(134)可以是通式为(A1y,A2(1-y))BO3的钙钛矿,其中A1和A2来自Ba、Sr、Mg和Ca;潜在B位成员是Zr、Ti和Sn,且“x”和“y”表示每种成分的摩尔分数。化合物1的具体示例可以是(Ba0.8Sr0.2)TiO3,且化合物2可以是(Ba0.6Sr0.4)TiO3。这两种化合物可以以交替层组合在具有可调电极结构的烧结多层电容器中,如图10所示,使得每种材料的介电性质相互叠加。如果需要,钙钛矿材料也可以掺杂稀土氧化物(“REO”),例如以小于或等于5.0摩尔百分比的量,更优选地从0.1到1摩尔百分比。为此,合适的稀土氧化物掺杂剂可以例如包括钪、钇、镧、铈、镨、钕、钷、钐、铕、钆、铽、镝、钬、铒、铥和镱。As is known in the art, any variety of tunable dielectric materials can generally be used. Particularly suitable materials are dielectrics whose base components include one or more ferroelectric phases, such as perovskites, tungsten bronze materials (e.g., barium sodium niobate), and layered materials (e.g., bismuth titanate). Suitable perovskites may include, for example, barium titanate and related solid solutions (e.g., barium strontium titanate, calcium barium titanate, barium zirconium titanate, barium strontium zirconium titanate, barium calcium zirconium titanate, etc.), lead titanate and related solid solutions (e.g., lead zirconium titanate, lead lanthanum zirconium titanate), sodium bismuth titanate, etc. In a particular embodiment, for example, barium strontium titanate (“BSTO”) with the chemical formula Ba x Sr 1-x TiO 3 can be used, where x ranges from 0 to 1, from about 0.15 to about 0.65 in some embodiments, and from about 0.25 to about 0.6 in some embodiments. Other electrically tunable dielectric materials may partially or wholly replace strontium titanate. For example, one example is BaxCa 1-x TiO3 , where x ranges from about 0.2 to about 0.8, and in some embodiments from about 0.4 to about 0.6. Other suitable perovskites may include PbxZr 1-x TiO3 (“PZT”), where x ranges from about 0.05 to about 0.4, lanthanum lead titanate (“PLZT”), lead titanate ( PbTiO3 ), calcium barium zirconate titanate ( BaCaZrTiO3 ) , sodium nitrate ( NaNO3 ), KNbO3 , LiNbO3 , LiTaO3 , PbNb2O6 , PbTa2O6 , KSr( NbO3 ) , and NaBa2 ( NbO3 ) 5KHb2PO4 . Other composite perovskites may include A[B1 1/3 B2 2/3 ] O3 material, where A is BaxSr 1-x (x can be a value from 0 to 1); B1 is MgyZn 1-y (y can be a value from 0 to 1); and B2 is TazNb 1-z (z can be a value from 0 to 1). Potential dielectric materials of interest can be formed by combining two end-member components in alternating layers, as illustrated in the exemplary embodiment of FIG10. Such end-member components can be chemically similar, but as mentioned above, the proportion of dopant at the A site differs. For example, component 1 (132 in Figure 10) can be a perovskite compound with the general formula ( A1x , A2 (1-x) ) BO3 , and component 2 (134) can be a perovskite with the general formula ( A1y , A2 (1-y) ) BO3 , where A1 and A2 are derived from Ba, Sr, Mg, and Ca; potential B-site members are Zr, Ti, and Sn, and “x” and “y” represent the mole fraction of each component. Specific examples of compound 1 could be ( Ba0.8Sr0.2 ) TiO3 , and compound 2 could be ( Ba0.6Sr0.4 ) TiO3 . These two compounds can be combined in alternating layers in a sintered multilayer capacitor with an adjustable electrode structure, as shown in Figure 10, such that the dielectric properties of each material are superimposed. If desired, perovskite materials may also be doped with rare earth oxides (“REO”), for example, in an amount less than or equal to 5.0 mole percent, more preferably from 0.1 to 1 mole percent. For this purpose, suitable rare earth oxide dopants may include, for example, scandium, yttrium, lanthanum, cerium, praseodymium, neodymium, promethium, samarium, europium, gadolinium, terbium, dysprosium, holmium, erbium, thulium, and ytterbium.

不管采用什么特定材料,可调电介质材料的使用可以允许通过由偏置终端施加DC偏置电压来调节所得的电容器的电容。更特别地,电容器包含与第一有源终端(例如,输入终端)电接触的一组第一有源电极和与第二有源终端(例如,输出终端)电接触的一组第二有源电极。电容器还包含与第一DC偏置终端电接触的一组第一DC偏置电极和与第二DC偏置终端电接触的一组第二DC偏置电极。当设置在电路中时,DC电源(例如,电池、恒压电源、多输出电源、DC-DC转换器等)可以通过第一偏置终端和第二偏置终端(它们通常是双极的,因为它们具有相反的极性)向电容器提供DC偏置。电极和终端可以由本领域已知的多种不同金属中的任何一种形成,例如贵金属(例如,银、金、钯、铂等)、贱金属(例如,铜、锡、镍等),等等,及其各种组合。电介质层插设在相应的有源电极和偏置电极之间。Regardless of the specific material used, the use of an tunable dielectric material allows the capacitance of the resulting capacitor to be adjusted by applying a DC bias voltage from the bias terminals. More specifically, the capacitor includes a set of first active electrodes in electrical contact with a first active terminal (e.g., an input terminal) and a set of second active electrodes in electrical contact with a second active terminal (e.g., an output terminal). The capacitor also includes a set of first DC bias electrodes in electrical contact with a first DC bias terminal and a set of second DC bias electrodes in electrical contact with a second DC bias terminal. When arranged in a circuit, a DC power supply (e.g., a battery, a constant voltage power supply, a multi-output power supply, a DC-DC converter, etc.) can provide DC bias to the capacitor through the first and second bias terminals (which are typically bipolar because they have opposite polarities). The electrodes and terminals can be formed from any of a variety of different metals known in the art, such as noble metals (e.g., silver, gold, palladium, platinum, etc.), base metals (e.g., copper, tin, nickel, etc.), and various combinations thereof. A dielectric layer is interposed between the respective active and bias electrodes.

I.可调多层电容器I. Adjustable multilayer capacitor

无论采用什么特定配置,本发明人发现,通过选择性地控制电介质层的厚度和数目,可以实现紧凑、可调的电容器,该电容器在中至高工作电压范围内在高电容值范围内具有优异的可调性,同时还提供了极低的等效串联电阻。在一些实施例中,电容器可以组成阵列,如后续部分中更详细地描述。在其他实施例中,这些电容器可以用作单独的部件。单独的可调多层电容器可以用于需要高电容的应用中,例如0.1微法(“μF”)或更高的值,在一些实施例中约1μF或更高,在一些实施例中约10μF或更高,且在一些实施例中200μF或更高。例如,这样的电容器可以提供调整能力,其初始电容值的范围从0.1至100μF,在一些实施例中从约0.5μF至约50μF,在一些实施例中从约1μF至约40μF,且在一些实施例中从约2μF至约30μF。电容可调整的程度可以根据需要变化。例如,电容可以如下调节:从电容器的初始电容(即在没有施加DC偏置电压的情况下)的约10%到约100%,在一些实施例中,从约20%到约95%,且在一些实施例中,从初始的电容的约30%到约80%。Regardless of the specific configuration employed, the inventors have discovered that by selectively controlling the thickness and number of dielectric layers, compact, adjustable capacitors can be achieved that exhibit excellent adjustability over a high capacitance range within a medium to high operating voltage range, while also providing extremely low equivalent series resistance. In some embodiments, the capacitors can be arranged in an array, as described in more detail later. In other embodiments, these capacitors can be used as individual components. Individual adjustable multilayer capacitors can be used in applications requiring high capacitance, such as values of 0.1 microfarads (“μF”) or higher, about 1 μF or higher in some embodiments, about 10 μF or higher in some embodiments, and 200 μF or higher in some embodiments. For example, such capacitors can provide adjustment capabilities with initial capacitance values ranging from 0.1 to 100 μF, from about 0.5 μF to about 50 μF in some embodiments, from about 1 μF to about 40 μF in some embodiments, and from about 2 μF to about 30 μF in some embodiments. The degree of capacitance adjustability can be varied as needed. For example, the capacitance can be adjusted from about 10% to about 100% of the initial capacitance of the capacitor (i.e., without the application of a DC bias voltage), in some embodiments from about 20% to about 95%, and in some embodiments from about 30% to about 80% of the initial capacitance.

如上所述,单独的可调电容器可以呈现低ESR。在一些实施例中,单独的可调电容器的等效串联电阻(ESR)的范围可以从约50毫欧(mΩ)或更低,在一些实施例中,约20mΩ或更低,在一些实施例中,约10mΩ或更低。例如,在一些实施例中,可调电容器的ESR的范围可以从约1mΩ到约50mΩ,在一些实施例中从约5mΩ到约40mΩ,且在一些实施例中从约5mΩ到约20mΩ。As described above, individual adjustable capacitors can exhibit low ESR. In some embodiments, the equivalent series resistance (ESR) of an individual adjustable capacitor can range from about 50 milliohms (mΩ) or less, in some embodiments about 20 mΩ or less, and in some embodiments about 10 mΩ or less. For example, in some embodiments, the ESR of the adjustable capacitor can range from about 1 mΩ to about 50 mΩ, in some embodiments from about 5 mΩ to about 40 mΩ, and in some embodiments from about 5 mΩ to about 20 mΩ.

如上述,单独的可调电容器可以在中或高工作电压下工作。工作电压可以称为DC偏置电压(即,跨偏置电极的电压)和/或信号电压(即,跨有源电极的电压)。工作电压通常会相对于施加电场后电介质组分开始变为导电的电压(即“击穿电压”)而有所变化,其可以在25℃的温度下根据ASTM D149-13来确定。在大多数实施例中,工作电压为电介质组分的击穿电压的约50%或更小,在一些实施例中,约30%或更小,且在一些实施例中,从约0.5%到约10%。As described above, individual adjustable capacitors can operate at medium or high operating voltages. The operating voltage can be referred to as the DC bias voltage (i.e., the voltage across the bias electrode) and/or the signal voltage (i.e., the voltage across the active electrode). The operating voltage typically varies relative to the voltage at which the dielectric component begins to conduct after an electric field is applied (i.e., the "breakdown voltage"), and can be determined according to ASTM D149-13 at a temperature of 25°C. In most embodiments, the operating voltage is about 50% or less of the breakdown voltage of the dielectric component; in some embodiments, about 30% or less; and in some embodiments, from about 0.5% to about 10%.

例如,可调电容器可以在大于约10V的AC电压(例如,峰间振幅)下工作,在一些实施例中大于约50V,且在一些实施例中大于约100V。例如,在一些实施例中,可调电容器可以在范围从约10V至约300V的电压下工作,在一些实施例中,从约15V至约150V,且在一些实施例中从约20V至约100V。在一些实施例中,可调电容器可以在大于约10V的DC电压下工作,在一些实施例中大于约50V,且在一些实施例中大于约100V。例如,在一些实施例中,可调电容器可以在范围从约10V至约300V的电压下工作,在一些实施例中,从约15V至约150V,且在一些实施例中从约20V至约100V。在一些实施例中,可调电容器可以在具有AC分量和DC分量的电压下工作。For example, the adjustable capacitor can operate at an AC voltage greater than about 10V (e.g., peak-to-peak amplitude), greater than about 50V in some embodiments, and greater than about 100V in some embodiments. For example, in some embodiments, the adjustable capacitor can operate at a voltage ranging from about 10V to about 300V, from about 15V to about 150V in some embodiments, and from about 20V to about 100V in some embodiments. In some embodiments, the adjustable capacitor can operate at a DC voltage greater than about 10V, greater than about 50V in some embodiments, and greater than about 100V in some embodiments. For example, in some embodiments, the adjustable capacitor can operate at a voltage ranging from about 10V to about 300V, from about 15V to about 150V in some embodiments, and from about 20V to about 100V in some embodiments. In some embodiments, the adjustable capacitor can operate at a voltage having both AC and DC components.

类似地,可调电容器可以使用一定范围的中到高施加的DC偏置电压而可调。例如,在一些实施例中,DC偏置电压可以大于约10V,在一些实施例中大于约50V,且在一些实施例中大于约100V。例如,在一些实施例中,DC偏置电压的范围可以从约10V到约300V,在一些实施例中从约15V到约150V,且在一些实施例中从约20V到约100V。Similarly, the adjustable capacitor can be adjusted using a range of medium to high applied DC bias voltages. For example, in some embodiments, the DC bias voltage can be greater than about 10V, in some embodiments greater than about 50V, and in some embodiments greater than about 100V. For example, in some embodiments, the range of the DC bias voltage can be from about 10V to about 300V, in some embodiments from about 15V to about 150V, and in some embodiments from about 20V to about 100V.

在一些实施例中,电介质层的厚度的范围可以从约0.5微米(μm)到约50μm,在一些实施例中从约1μm到约40μm,且在一些实施例中从约2μm到约15μm。电极层的厚度的范围可以从约0.5μm到约3.0μm,在一些实施例中从约1μm到约2.5um,且在一些实施例中从约1μm到约2μm,例如,约1.5μm。In some embodiments, the thickness of the dielectric layer can range from about 0.5 micrometers (μm) to about 50 μm, from about 1 μm to about 40 μm in some embodiments, and from about 2 μm to about 15 μm in some embodiments. The thickness of the electrode layer can range from about 0.5 μm to about 3.0 μm, from about 1 μm to about 2.5 μm in some embodiments, and from about 1 μm to about 2 μm in some embodiments, for example, about 1.5 μm.

有源电极和偏置电极层的总数可以变化。例如,在一些实施例中,有源电极层的总数的范围可以从2到约1,000,在一些实施例中从约10到约700,且在一些实施例中从约100到约500。例如,在一些实施例中,偏置电极的总数的范围可以从2到约1,000,且在一些实施例中从约10到约500。应该理解的是,在附图中描绘和本文中描述的电极层和偏置层的数目仅是说明性的。The total number of active electrode and bias electrode layers can vary. For example, in some embodiments, the total number of active electrode layers can range from 2 to about 1,000, in some embodiments from about 10 to about 700, and in some embodiments from about 100 to about 500. For example, in some embodiments, the total number of bias electrodes can range from 2 to about 1,000, and in some embodiments from about 10 to about 500. It should be understood that the number of electrode layers and bias layers depicted in the accompanying drawings and described herein are illustrative only.

在一些实施例中,电容器可以是紧凑的,使得其提供高电容,同时占据其所安装的表面的小体积和/或表面积。因此,例如,电容器可以非常适合安装在印刷电路板上。单独的电容器的长度的范围例如可以是从约1mm到约50mm,在一些实施例中从约2mm到约35mm,在一些实施例中从约3mm到约10mm,在一些实施例中从约3mm到约7mm。单独的电容器的宽度的范围例如可以是从约1mm到约50mm,在一些实施例中从约2mm到约35mm,在一些实施例中从约3mm到约10mm,在一些实施例中从约3mm到约7mm。In some embodiments, the capacitor may be compact, enabling it to provide high capacitance while occupying a small volume and/or surface area on the surface on which it is mounted. Therefore, for example, the capacitor may be well-suited for mounting on a printed circuit board. The length of an individual capacitor may range, for example, from about 1 mm to about 50 mm, from about 2 mm to about 35 mm in some embodiments, from about 3 mm to about 10 mm in some embodiments, and from about 3 mm to about 7 mm in some embodiments. The width of an individual capacitor may range, for example, from about 1 mm to about 50 mm, from about 2 mm to about 35 mm in some embodiments, from about 3 mm to about 10 mm in some embodiments, and from about 3 mm to about 7 mm in some embodiments.

类似地,电容器可以具有低轮廓,例如适于安装在电路板上。单独的电容器的厚度的范围例如可以是从约1mm到约50mm,在一些实施例中从约2mm到约35mm,在一些实施例中从约3mm到约10mm,在一些实施例中从约2mm到约4mm。Similarly, capacitors can have a low profile, for example, suitable for mounting on a circuit board. The thickness of an individual capacitor can range, for example, from about 1 mm to about 50 mm, from about 2 mm to about 35 mm in some embodiments, from about 3 mm to about 10 mm in some embodiments, and from about 2 mm to about 4 mm in some embodiments.

在替代实施例中,可调多层电容器的初始电容值可以是约100皮法(“pF”)或更高,在一些实施例中约10,000pF或更高,在一些实施例中从约100,000pF到约10,000,000pF,在一些实施例中从约200,000pF到5,000,000pF,且在一些实施例中从约400,000pF到约3,500,000pF。在一些实施例中,部分可调多层电容器的初始电容值的范围可以从0.5到50,000,000pF,在一些实施例中从约100,000pF到约10,000,000pF,在一些实施例中从约200,000pF到5,000,000pF,且在一些实施例中从约400,000pF到约3,500,000pF。同样,在其他实施例中,电容器可以用于需要低电容的应用中,例如小于100pF的值,在一些实施例中约50pF或更低,在一些实施例中从约0.5到约30pF,且在一些实施例中从约1到约10pF。可调多层电容器可以配置为具有任何合适的初始电容值。In alternative embodiments, the initial capacitance value of the adjustable multilayer capacitor may be about 100 picofarads (“pF”) or higher, in some embodiments about 10,000 pF or higher, in some embodiments from about 100,000 pF to about 10,000,000 pF, in some embodiments from about 200,000 pF to 5,000,000 pF, and in some embodiments from about 400,000 pF to about 3,500,000 pF. In some embodiments, the initial capacitance value of a portion of the adjustable multilayer capacitor may range from 0.5 to 50,000,000 pF, in some embodiments from about 100,000 pF to about 10,000,000 pF, in some embodiments from about 200,000 pF to 5,000,000 pF, and in some embodiments from about 400,000 pF to about 3,500,000 pF. Similarly, in other embodiments, the capacitor can be used in applications requiring low capacitance, such as values less than 100 pF, about 50 pF or less in some embodiments, from about 0.5 to about 30 pF in some embodiments, and from about 1 to about 10 pF in some embodiments. The adjustable multilayer capacitor can be configured to have any suitable initial capacitance value.

II.部分可调多层电容器II. Partially Adjustable Multilayer Capacitors

此外,本公开的方面涉及部分可调的单独的多层电容器。与等效的完全可调多层电容器相比,部分可调多层电容器可以以改进的分辨率或精度可调。在一些实施例中,施加的电压的每单位变化,部分可调多层电容器可以提供较小的电容变化,从而实现更精确的调整。Furthermore, aspects of this disclosure relate to partially adjustable individual multilayer capacitors. Compared to an equivalent fully adjustable multilayer capacitor, a partially adjustable multilayer capacitor can be adjusted with improved resolution or accuracy. In some embodiments, the partially adjustable multilayer capacitor can provide a smaller capacitance change per unit change in the applied voltage, thereby achieving more precise adjustment.

与等效的完全可调多层电容器相比,部分可调多层电容器可以在较小的电容值范围内可调。例如,完全可调电容器可以是例如从初始电容值的约10%到约95%可调的。这可以通过向范围从最大DC偏置电压的0%到100%的完全可调电容器施加DC偏置电压来完成。与之相比,在相同的施加的DC偏置电压范围内,大小相当的部分可调多层电容器仅可从初始电容值的约50%调整到约95%。因此,施加的电压的每单位变化,部分可调多层电容器可以提供较小的电容变化。在一些实施例中,部分可调多层电容器可以从初始电容值的约20%到约95%可调,在一些实施例中从约30%到约95%,在一些实施例中从约40%到约95%,在一些实施例中从约50%到约95%,在一些实施例中从约60%到约95%,在一些实施例中从约70%到约95%,且在一些实施例中从初始电容值的约80%到约95%。Compared to an equivalent fully adjustable multilayer capacitor, a partially adjustable multilayer capacitor can be adjusted over a smaller range of capacitance values. For example, a fully adjustable capacitor can be adjustable from, for instance, about 10% to about 95% of its initial capacitance value. This can be accomplished by applying a DC bias voltage to a fully adjustable capacitor that ranges from 0% to 100% of its maximum DC bias voltage. In contrast, a comparable partially adjustable multilayer capacitor can only be adjusted from about 50% to about 95% of its initial capacitance value over the same applied DC bias voltage range. Therefore, for every unit change in the applied voltage, the partially adjustable multilayer capacitor can provide a smaller capacitance change. In some embodiments, the partially adjustable multilayer capacitor can be adjusted from about 20% to about 95% of its initial capacitance value, from about 30% to about 95% in some embodiments, from about 40% to about 95% in some embodiments, from about 50% to about 95% in some embodiments, from about 60% to about 95% in some embodiments, from about 70% to about 95% in some embodiments, and from about 80% to about 95% in some embodiments.

在一些实施例中,部分可调多层电容器可以用于需要高电容的应用中,例如0.1μF或更高的值,在一些实施例中约1μF或更高,在一些实施例中约10μF或更高,且在一些实施例中200μF或更高。例如,这样的电容器可以提供调整能力,其初始电容值的范围从0.1至100μF,在一些实施例中从约0.5μF至约50μF,在一些实施例中从约1μF至约40μF,且在一些实施例中从约2μF至约30μF。In some embodiments, the partially adjustable multilayer capacitor can be used in applications requiring high capacitance, such as values of 0.1 μF or higher, about 1 μF or higher in some embodiments, about 10 μF or higher in some embodiments, and 200 μF or higher in some embodiments. For example, such a capacitor can provide adjustment capability with an initial capacitance value ranging from 0.1 to 100 μF, from about 0.5 μF to about 50 μF in some embodiments, from about 1 μF to about 40 μF in some embodiments, and from about 2 μF to about 30 μF in some embodiments.

替代地,在其他实施例中,部分可调多层电容器的初始电容值可以是约100皮法(“pF”)或更高,在一些实施例中约10,000pF或更高,在一些实施例中从约100,000pF到约10,000,000pF,在一些实施例中从约200,000pF到5,000,000pF,且在一些实施例中从约400,000pF到约3,500,000pF。在一些实施例中,部分可调多层电容器的初始电容值的范围可以从0.5到50,000,000pF,在一些实施例中从约100,000pF到约10,000,000pF,在一些实施例中从约200,000pF到5,000,000pF,且在一些实施例中从约400,000pF到约3,500,000pF。同样,在一些替代实施例中,电容器可以用于需要低电容的应用中,例如小于100pF的值,在一些实施例中约50pF或更低,在一些实施例中从约0.5到约30pF,且在一些实施例中从约1到约10pF。部分可调多层电容器可以配置为具有任何合适的初始电容值。Alternatively, in other embodiments, the initial capacitance value of the partially adjustable multilayer capacitor may be about 100 picofarads (“pF”) or higher, about 10,000 pF or higher in some embodiments, from about 100,000 pF to about 10,000,000 pF in some embodiments, from about 200,000 pF to 5,000,000 pF in some embodiments, and from about 400,000 pF to about 3,500,000 pF in some embodiments. In some embodiments, the initial capacitance value of the partially adjustable multilayer capacitor may range from 0.5 to 50,000,000 pF, from about 100,000 pF to about 10,000,000 pF in some embodiments, from about 200,000 pF to 5,000,000 pF in some embodiments, and from about 400,000 pF to about 3,500,000 pF in some embodiments. Similarly, in some alternative embodiments, the capacitor can be used in applications requiring low capacitance, such as values less than 100 pF, about 50 pF or less in some embodiments, from about 0.5 to about 30 pF in some embodiments, and from about 1 to about 10 pF in some embodiments. Partially adjustable multilayer capacitors can be configured to have any suitable initial capacitance value.

如上所述,在一些实施例中,可调电容器可以在紧凑的部件中提供在高电容值范围内的可调性。高初始电容和较小的整体尺寸的组合的特征可以是较高的体积效率。例如,可调多层电容器可以具有与初始电容值相关联的初始体积效率。初始体积效率可以如下计算:阵列的初始电容(即,未施加DC偏置电压的情况下)除以阵列的体积。在一些实施例中,初始体积效率可以大于约每立方厘米10微法(“μF/cc”),在一些实施例中大于约40μF/cc,在一些实施例中大于100μF/cc,且在一些实施例中大于300μF/cc。例如,在一些实施例中,初始体积效率的范围可以从约10μF/cc到约500μF/cc,在一些实施例中从约20μF/cc到约300μF/cc,在一些实施例中从约40μF/cc到约250μF/cc。As described above, in some embodiments, adjustable capacitors can provide adjustability over a high capacitance range within a compact component. The combination of high initial capacitance and small overall size can result in high volumetric efficiency. For example, an adjustable multilayer capacitor can have an initial volumetric efficiency associated with its initial capacitance value. Initial volumetric efficiency can be calculated as the initial capacitance of the array (i.e., without a DC bias voltage applied) divided by the volume of the array. In some embodiments, the initial volumetric efficiency can be greater than about 10 microfarads (“μF/cc”), greater than about 40 μF/cc in some embodiments, greater than 100 μF/cc in some embodiments, and greater than 300 μF/cc in some embodiments. For example, in some embodiments, the range of initial volumetric efficiency can be from about 10 μF/cc to about 500 μF/cc, from about 20 μF/cc to about 300 μF/cc in some embodiments, and from about 40 μF/cc to about 250 μF/cc in some embodiments.

III.可调多层电容器阵列III. Adjustable multilayer capacitor array

本公开的方面还涉及可调多层电容器阵列。无论采用什么特定配置,本发明人发现,通过选择性地控制单独的电容器中的电介质层的厚度、单独的电容器中的电介质层的数目、阵列中的电容器的物理配置、阵列中的电容器的数目,可以实现紧凑且可调的电容器,该电容器在中至高工作电压范围内在高电容值范围内具有优异的可调性,同时还提供了极低的等效串联电阻。因此,可调电容器阵列可以用于需要高电容的应用中,例如0.1μF或更高的值,在一些实施例中约1μF或更高,在一些实施例中10μF或更高,且在一些实施例中1000μF或更高。例如,这样的电容器可以提供调整能力,其初始电容值的范围从0.1至1000μF,在一些实施例中从约1μF至约500μF,在一些实施例中从约5μF至约300μF,且在一些实施例中从约50μF至约250μF。电容可调整的程度可以根据需要变化。例如,电容可以如下调节:从约10%到约100%,在一些实施例中从约20%到约95%,且在一些实施例中,从其初始值的约30%到约80%。This disclosure also relates to adjustable multilayer capacitor arrays. Regardless of the specific configuration, the inventors have found that by selectively controlling the thickness of the dielectric layer in individual capacitors, the number of dielectric layers in individual capacitors, the physical configuration of the capacitors in the array, and the number of capacitors in the array, compact and adjustable capacitors can be achieved that exhibit excellent adjustability over a high capacitance range in the medium to high operating voltage range, while also providing extremely low equivalent series resistance. Therefore, adjustable capacitor arrays can be used in applications requiring high capacitance, such as values of 0.1 μF or higher, about 1 μF or higher in some embodiments, 10 μF or higher in some embodiments, and 1000 μF or higher in some embodiments. For example, such capacitors can provide adjustment capabilities with initial capacitance values ranging from 0.1 to 1000 μF, from about 1 μF to about 500 μF in some embodiments, from about 5 μF to about 300 μF in some embodiments, and from about 50 μF to about 250 μF in some embodiments. The degree of capacitance adjustability can be varied as needed. For example, the capacitance can be adjusted from about 10% to about 100%, from about 20% to about 95% in some embodiments, and from about 30% to about 80% of its initial value in some embodiments.

如上所述,可调电容器阵列可以提供极低的等效串联电阻(ESR)。例如,在一些实施例中,可调电容器阵列的ESR可以是约10mΩ或更低,在一些实施例中约8mΩ或更低,在一些实施例中约4mΩ或更低。例如,在一些实施例中,可调电容器阵列的ESR的范围可以从约0.01mΩ到约10mΩ,在一些实施例中从约0.1mΩ到约8mΩ,在一些实施例中从约1mΩ到约4mΩ。As described above, adjustable capacitor arrays can provide extremely low equivalent series resistance (ESR). For example, in some embodiments, the ESR of the adjustable capacitor array can be about 10 mΩ or less, in some embodiments about 8 mΩ or less, and in some embodiments about 4 mΩ or less. For example, in some embodiments, the ESR of the adjustable capacitor array can range from about 0.01 mΩ to about 10 mΩ, in some embodiments from about 0.1 mΩ to about 8 mΩ, and in some embodiments from about 1 mΩ to about 4 mΩ.

如上所述,在一些实施例中,可调电容器阵列可以在中到高工作电压下工作。例如,可调电容器阵列可以在大于约10V的电压下工作,在一些实施例中大于约50V,且在一些实施例中大于约100V。例如,在一些实施例中,可调电容器阵列可以在范围从约10V到约300V的电压下操作,在一些实施例中从约15V到约150V,且在一些实施例中从约20V到约100V。As described above, in some embodiments, the adjustable capacitor array can operate at medium to high operating voltages. For example, the adjustable capacitor array can operate at voltages greater than about 10V, greater than about 50V in some embodiments, and greater than about 100V in some embodiments. For example, in some embodiments, the adjustable capacitor array can operate at voltages ranging from about 10V to about 300V, from about 15V to about 150V in some embodiments, and from about 20V to about 100V in some embodiments.

类似地,可调电容器阵列可以在中到高电压的范围内可调。例如,在一些实施例中,DC偏置电压可以大于约10V,在一些实施例中大于约50V,且在一些实施例中大于约100V。例如,在一些实施例中,DC偏置电压的范围可以从约10V到约300V,在一些实施例中从约15V到约150V,且在一些实施例中从约20V到约100V。Similarly, the adjustable capacitor array can be adjustable over a medium to high voltage range. For example, in some embodiments, the DC bias voltage can be greater than about 10V, in some embodiments greater than about 50V, and in some embodiments greater than about 100V. For example, in some embodiments, the DC bias voltage can range from about 10V to about 300V, in some embodiments from about 15V to about 150V, and in some embodiments from about 20V to about 100V.

在一些实施例中,可调电容器堆叠可以具有“水平堆叠”配置,如下面更详细地解释。这可以提供具有低轮廓的部件,其在高电容值的范围内提供可调性。另外,“水平堆叠”配置可以提供改进的机械稳定性和散热。In some embodiments, the adjustable capacitor stack may have a “horizontal stack” configuration, as explained in more detail below. This can provide components with a low profile that offer adjustability over a range of high capacitance values. Additionally, the “horizontal stack” configuration can provide improved mechanical stability and heat dissipation.

高电容和较小的整体尺寸的组合的特征可以是较高的体积效率。例如,可调多层电容器阵列可以具有与初始电容值相关联的初始体积效率。初始体积效率可以如下计算:阵列的初始电容(即,未施加DC偏置电压的情况下)除以阵列的体积。在一些实施例中,初始体积效率可以大于约每立方厘米10μF/cc,在一些实施例中大于约40μF/cc,在一些实施例中大于100μF/cc,且在一些实施例中大于300μF/cc。例如,在一些实施例中,初始体积效率的范围可以从约10μF/cc到约500μF/cc,在一些实施例中从约20μF/cc到约300μF/cc,在一些实施例中从约40μF/cc到约250μF/cc。The combination of high capacitance and small overall size can result in high volumetric efficiency. For example, an adjustable multilayer capacitor array can have an initial volumetric efficiency associated with an initial capacitance value. The initial volumetric efficiency can be calculated as the array's initial capacitance (i.e., without a DC bias voltage applied) divided by the array's volume. In some embodiments, the initial volumetric efficiency can be greater than about 10 μF/cc per cubic centimeter, greater than about 40 μF/cc in some embodiments, greater than 100 μF/cc in some embodiments, and greater than 300 μF/cc in some embodiments. For example, in some embodiments, the initial volumetric efficiency can range from about 10 μF/cc to about 500 μF/cc, from about 20 μF/cc to about 300 μF/cc in some embodiments, and from about 40 μF/cc to about 250 μF/cc in some embodiments.

在一些实施例中,电容器阵列可以是紧凑的,使得其提供高电容,同时占据其所安装的表面的小表面积。因此,例如,电容器阵列可以非常适合安装在印刷电路板上。例如,电容器阵列的长度的范围可以例如是约5毫米(mm)到约50mm,且在一些实施例中从约10mm到约30mm。电容器阵列的宽度的范围可以例如是从约3mm到约15mm,且在一些实施例中从约5mm到约10mm。In some embodiments, the capacitor array can be compact, providing high capacitance while occupying a small surface area on the surface on which it is mounted. Therefore, for example, the capacitor array can be ideally suited for mounting on a printed circuit board. For example, the length of the capacitor array can range from about 5 millimeters (mm) to about 50 mm, and in some embodiments from about 10 mm to about 30 mm. The width of the capacitor array can range from, for example, from about 3 mm to about 15 mm, and in some embodiments from about 5 mm to about 10 mm.

类似地,电容器阵列可以具有低轮廓,例如适于安装在电路板上。在一些实施例中,电容器阵列的高度的范围可以例如是从约3mm到约15mm,且在一些实施例中从约4mm到约10mm。Similarly, the capacitor array can have a low profile, for example, suitable for mounting on a circuit board. In some embodiments, the height of the capacitor array can range from, for example, from about 3 mm to about 15 mm, and in some embodiments from about 4 mm to about 10 mm.

在一些实施例中,可调电容器阵列可以包括2到24个电容器,在一些实施例中3到12个电容器,且在一些实施例中4到6个电容器。在其他实施例中,可调电容器阵列可以包括多于24个电容器。In some embodiments, the adjustable capacitor array may include 2 to 24 capacitors, 3 to 12 capacitors in some embodiments, and 4 to 6 capacitors in some embodiments. In other embodiments, the adjustable capacitor array may include more than 24 capacitors.

IV.部分可调多层电容器阵列IV. Partially Adjustable Multilayer Capacitor Array

此外,在一些实施例中,部分可调多层电容器阵列可以以类似于上述部分可调多层电容器的方式提供改进的调整分辨率或精度。在一些实施例中,部分可调多层电容器阵列可以例如包括并联连接的可调电容器和不可调电容器。这可以提供具有高初始电容值的阵列,其以如上所述的类似方式以比不可调多层电容器更高的精度可调。例如,在一些实施例中,部分可调多层电容器阵列可以从初始电容值(在没有施加DC偏置电压的情况下)的约20%到约100%可调,在一些实施例中从约30%到约95%,在一些实施例中从约40%到约90%,在一些实施例中从约50%到约85%,在一些实施例中从约60%到约85%,在一些实施例中从约70%到约85%,且在一些实施例中从初始电容值的约80%到约85%。Furthermore, in some embodiments, a partially adjustable multilayer capacitor array can provide improved adjustment resolution or accuracy in a manner similar to that described above for partially adjustable multilayer capacitors. In some embodiments, a partially adjustable multilayer capacitor array may, for example, include adjustable and non-adjustable capacitors connected in parallel. This can provide an array with a high initial capacitance value that is adjustable with higher accuracy than a non-adjustable multilayer capacitor in a manner similar to that described above. For example, in some embodiments, a partially adjustable multilayer capacitor array can be adjusted from about 20% to about 100% of the initial capacitance value (without applying a DC bias voltage), from about 30% to about 95% in some embodiments, from about 40% to about 90% in some embodiments, from about 50% to about 85% in some embodiments, from about 60% to about 85% in some embodiments, from about 70% to about 85% in some embodiments, and from about 80% to about 85% of the initial capacitance value in some embodiments.

在一些实施例中,部分可调多层电容器阵列可以用于需要高电容的应用中,例如0.1μF或更高的值,在一些实施例中约1μF或更高,在一些实施例中约10μF或更高,在一些实施例中约100μF或更高,且在一些实施例中1000μF或更高。例如,这样的电容器可以提供调整能力,其初始电容值的范围从0.1至1000μF,在一些实施例中从约0.5μF至约500μF,在一些实施例中从约1μF至约50μF,且在一些实施例中从约2μF至约40μF。In some embodiments, the partially adjustable multilayer capacitor array can be used in applications requiring high capacitance, such as values of 0.1 μF or higher, about 1 μF or higher in some embodiments, about 10 μF or higher in some embodiments, about 100 μF or higher in some embodiments, and 1000 μF or higher in some embodiments. For example, such capacitors can provide adjustment capabilities with initial capacitance values ranging from 0.1 to 1000 μF, from about 0.5 μF to about 500 μF in some embodiments, from about 1 μF to about 50 μF in some embodiments, and from about 2 μF to about 40 μF in some embodiments.

替代地,在其他实施例中,部分可调多层电容器阵列的初始电容值可以是约100皮法(“pF”)或更高,在一些实施例中约10,000pF或更高,在一些实施例中从约100,000pF到约10,000,000pF,在一些实施例中从约200,000pF到5,000,000pF,且在一些实施例中从约400,000pF到约3,500,000pF。在一些实施例中,部分可调多层电容器阵列的初始电容值的范围可以从0.5到50,000,000pF,在一些实施例中从约100,000pF到约10,000,000pF,在一些实施例中从约200,000pF到5,000,000pF,且在一些实施例中从约400,000pF到约3,500,000pF。同样,在其他实施例中,电容器阵列可以用于需要低电容的应用中,例如小于100pF的值,在一些实施例中约50pF或更低,在一些实施例中从约0.5到约30pF,且在一些实施例中从约1到约10pF。部分可调多层电容器阵列可以配置为具有任何合适的初始电容值。Alternatively, in other embodiments, the initial capacitance value of the partially adjustable multilayer capacitor array may be about 100 picofarads (“pF”) or higher, about 10,000 pF or higher in some embodiments, from about 100,000 pF to about 10,000,000 pF in some embodiments, from about 200,000 pF to 5,000,000 pF in some embodiments, and from about 400,000 pF to about 3,500,000 pF in some embodiments. In some embodiments, the initial capacitance value of the partially adjustable multilayer capacitor array may range from 0.5 to 50,000,000 pF, from about 100,000 pF to about 10,000,000 pF in some embodiments, from about 200,000 pF to 5,000,000 pF in some embodiments, and from about 400,000 pF to about 3,500,000 pF in some embodiments. Similarly, in other embodiments, the capacitor array can be used in applications requiring low capacitance, such as values less than 100 pF, about 50 pF or less in some embodiments, from about 0.5 to about 30 pF in some embodiments, and from about 1 to about 10 pF in some embodiments. A partially adjustable multilayer capacitor array can be configured to have any suitable initial capacitance value.

在一些实施例中,部分可调电容器阵列可以包括2到24个电容器,在一些实施例中3到12个电容器,且在一些实施例中4到6个电容器。在其他实施例中,部分可调电容器阵列可以包括多于24个电容器。In some embodiments, the partially adjustable capacitor array may include 2 to 24 capacitors, 3 to 12 capacitors in some embodiments, and 4 to 6 capacitors in some embodiments. In other embodiments, the partially adjustable capacitor array may include more than 24 capacitors.

V.具体实施例的讨论V. Discussion of Specific Implementations

现在将更详细地描述本发明的各种实施例。Various embodiments of the invention will now be described in more detail.

图1以曲线图形式示出了在一定范围的归一化偏置电压变化内可实现的电容的变化。具体来说,水平轴将归一化的偏置电压绘制为装置的额定电压的百分比,例如从0%到150%。如图所示,装置有效电容的相应变化在垂直轴上绘制,以从没有任何偏置情况下的电容值的变化的百分比表示。如该图1的曲线图所示,沿着相对的直线曲线,归一化偏置电压量的150%的增加接近无偏置电容值的80%减少,如所示出的。以此方式,根据当前公开的主题的电压可调电容器装置有助于在一定范围的使用条件下使效率最大化。Figure 1 illustrates, in graph form, the achievable capacitance variation within a certain range of normalized bias voltage variations. Specifically, the horizontal axis plots the normalized bias voltage as a percentage of the device's rated voltage, for example, from 0% to 150%. As shown, the corresponding change in the device's effective capacitance is plotted on the vertical axis as a percentage change from the capacitance value without any bias. As the graph in Figure 1 shows, along the relative straight lines, a 150% increase in the normalized bias voltage approaches an 80% decrease in the unbiased capacitance value, as illustrated. In this way, the voltage-adjustable capacitor device according to the currently disclosed subject matter helps to maximize efficiency under a range of operating conditions.

现在参考图2A-2D,现在将更详细地描述可以根据本发明形成的电容器10的一个特定实施例。如图所示,电容器10包含多个电介质层12,它们相对于两组分离的有源电极14和20和两组分离的偏置电极22和26交替堆叠。电容器可以是六面体,例如矩形体。在所示的实施例中,第一有源终端16电连接到第一有源电极14,且第二有源终端18电连接到第二有源电极20。第一偏置电极22经由延伸到电容器10的侧面的延伸构件24(例如,接片)与第一DC偏置(+)终端30电连接。类似地,第二偏置电极26经由延伸构件28与第二DC偏置(-)终端32电连接。因此,所得的电容器10包含四个(4)分离的终端。在一些实施例中,有源终端16、18可以绕在电容器10的相应的端部周围,以提供用于将电容器10电连接到电路中的较大终端16、18。DC偏置终端30、32可以配置为不延伸电容器10的整个侧面的带。然而,在其他实施例中,DC偏置终端30、32可以替代地绕在电容器10的侧面周围,且有源终端16、18可以配置为不沿着电容器的整个端部延伸的带。Referring now to Figures 2A-2D, a particular embodiment of a capacitor 10 that may be formed according to the invention will now be described in more detail. As shown, the capacitor 10 comprises a plurality of dielectric layers 12 that are alternately stacked relative to two sets of separate active electrodes 14 and 20 and two sets of separate bias electrodes 22 and 26. The capacitor may be hexahedral, such as rectangular. In the illustrated embodiment, a first active terminal 16 is electrically connected to a first active electrode 14, and a second active terminal 18 is electrically connected to a second active electrode 20. A first bias electrode 22 is electrically connected to a first DC bias (+) terminal 30 via an extension member 24 (e.g., a tab) extending to the side of the capacitor 10. Similarly, a second bias electrode 26 is electrically connected to a second DC bias (-) terminal 32 via an extension member 28. Thus, the resulting capacitor 10 comprises four (4) separate terminals. In some embodiments, the active terminals 16, 18 may be wrapped around the respective ends of the capacitor 10 to provide larger terminals 16, 18 for electrically connecting the capacitor 10 to a circuit. DC bias terminals 30, 32 may be configured as strips that do not extend across the entire side of capacitor 10. However, in other embodiments, DC bias terminals 30, 32 may alternatively be wrapped around the side of capacitor 10, and active terminals 16, 18 may be configured as strips that do not extend along the entire end of capacitor.

图2E和图2F分别示出了本图2A至2D的示例性实施例的分流配置和串联配置代表图。如图所示,还为分流配置提供了相对于偏置输入的接地34。Figures 2E and 2F show representative diagrams of shunt and series configurations of the exemplary embodiments of Figures 2A to 2D, respectively. As shown, a ground 34 relative to the bias input is also provided for the shunt configuration.

在上述实施例中,堆叠有源电极使得每个交替的电极连接到相对的终端。在某些实施例中,可以通过使用“级联”配置将交替的层连接到相同的终端,在该级联配置中,每组有源电极横向地间隔开而不是以堆叠方式。这种级联的电容器49的一个实施例在图3A-3C中示出。如图所示,电容器49包含多个电介质层44,它们相对于两组分离的有源电极36和40和两组分离的偏置电极46和50布置。在所示的实施例中,在这一实例中,第一有源终端38与第一有源电极36电连接,且第二有源终端42电连接到第二有源电极40。第一偏置电极46经由延伸到电容器49的侧面的延伸构件48与第一DC偏置(-)终端54电连接。类似地,第二偏置电极50经由延伸构件52与第二DC偏置(+)终端56电连接。图3D和图3E分别示出了本图3A至3C的示例性实施例的分流配置和串联配置代表图。如图所示,还为分流配置提供了相对于偏置输入的接地58。In the above embodiments, stacking active electrodes connects each alternating electrode to an opposite terminal. In some embodiments, alternating layers can be connected to the same terminal using a “cascaded” configuration, in which each set of active electrodes is laterally spaced rather than stacked. An embodiment of such a cascaded capacitor 49 is shown in Figures 3A-3C. As shown, the capacitor 49 includes a plurality of dielectric layers 44 arranged relative to two separate sets of active electrodes 36 and 40 and two separate sets of bias electrodes 46 and 50. In the illustrated embodiment, in this example, a first active terminal 38 is electrically connected to a first active electrode 36, and a second active terminal 42 is electrically connected to a second active electrode 40. The first bias electrode 46 is electrically connected to a first DC bias (-) terminal 54 via an extension member 48 extending to the side of the capacitor 49. Similarly, the second bias electrode 50 is electrically connected to a second DC bias (+) terminal 56 via an extension member 52. Figures 3D and 3E show representative diagrams of shunt and series configurations of the exemplary embodiments of Figures 3A to 3C, respectively. As shown, a ground 58 relative to the bias input is also provided for the shunt configuration.

图4A-4C示出了根据本发明的可以以部分级联配置形成的电容器59的另一实施例。电容器59被视为“部分级联的”,是因为总有源电容区域的仅局部区域60被偏置(见图4A)。如图所示,偏置浮置电极的添加允许施加外部电压以改变由其他因素和特征确定的总电容的介电性能。如这些图所示,电介质层62可以相对于第一组有源电极64和第二组有源电极66、第一组偏置电极68和第二组偏置电极72以及多个浮置电极76交替堆叠。第一有源电极64与第一有源终端78电连接,而第二有源电极66与第二有源终端80电连接。第一偏置电极68经由延伸到电容器59的侧面的延伸构件70与第一DC偏置(+)终端82电连接。类似地,第二偏置电极72经由延伸构件74与第二DC偏置(-)终端84电连接。应当理解,图4A所示的电极层的数目仅是说明性的。Figures 4A-4C illustrate another embodiment of a capacitor 59 that can be formed in a partially cascaded configuration according to the invention. The capacitor 59 is considered “partially cascaded” because only a localized region 60 of the total active capacitance region is biased (see Figure 4A). As shown, the addition of the bias floating electrodes allows an external voltage to be applied to change the dielectric properties of the total capacitance, which are determined by other factors and characteristics. As shown in these figures, dielectric layers 62 can be alternately stacked relative to a first set of active electrodes 64 and a second set of active electrodes 66, a first set of bias electrodes 68 and a second set of bias electrodes 72, and a plurality of floating electrodes 76. The first active electrode 64 is electrically connected to a first active terminal 78, while the second active electrode 66 is electrically connected to a second active terminal 80. The first bias electrode 68 is electrically connected to a first DC bias (+) terminal 82 via an extension member 70 extending to the side of the capacitor 59. Similarly, the second bias electrode 72 is electrically connected to a second DC bias (-) terminal 84 via an extension member 74. It should be understood that the number of electrode layers shown in Figure 4A is merely illustrative.

在图7A和7B中示出了根据本公开的方面的又一个实施例。在该实施例中,第一组有源电极114和第二组有源电极120分别以交替的1:1比例图案与第一组偏置电极122和第二组偏置电极126堆叠。参考图7B,在一些实施例中,偏置电极122、126的引线124、128可以配置为凸出的接片。引线124、128可以以如图2D所示的完成形式接触DC偏置终端30、32。应当理解,图7A和7B所示的电极层的数目仅是说明性的。Figures 7A and 7B illustrate yet another embodiment according to aspects of this disclosure. In this embodiment, the first set of active electrodes 114 and the second set of active electrodes 120 are stacked with the first set of bias electrodes 122 and the second set of bias electrodes 126 in an alternating 1:1 scale pattern. Referring to Figure 7B, in some embodiments, the leads 124, 128 of the bias electrodes 122, 126 may be configured as protruding tabs. The leads 124, 128 may contact the DC bias terminals 30, 32 in the manner shown in Figure 2D. It should be understood that the number of electrode layers shown in Figures 7A and 7B is merely illustrative.

在图7C和7D中示出了根据本公开的方面的另一实施例。在该实施例中,有源电极114、120可以包括相应的引线125和127,它们可以配置为凸出的接片。引线125、127可以与图7D所示的相应的有源终端16、18电连接。这可以在电容器的层的边缘之间、特别是在层的角部处提供改进的层压,这可以导致更稳健的电容器。此外,该配置可以减少制造期间分层问题的发生。Another embodiment according to aspects of this disclosure is illustrated in Figures 7C and 7D. In this embodiment, the active electrodes 114, 120 may include corresponding leads 125 and 127, which may be configured as protruding tabs. The leads 125, 127 may be electrically connected to the corresponding active terminals 16, 18 shown in Figure 7D. This can provide improved lamination between the edges of the capacitor layers, particularly at the corners of the layers, which can result in a more robust capacitor. Furthermore, this configuration can reduce the occurrence of delamination problems during manufacturing.

此外,可以选择接片124、125、126、127的相应的宽度以提供与相应的电极114、120、122、126的更大的电接触(例如,具有较小的电阻)。此外,可以选择与DC偏置电极122、126相关联的接片124、128的宽度和终端30、32的宽度,以避免偏置电极终端30、32和信号电极终端16、18之间的接触。例如,在一些实施例中,接片124、125、126、127可以沿着电容器的边缘的10%或更多延伸,在一些实施例中30%或更多,在一些实施例中60%或更多。应当理解,图7A-7D所示的电极层的数目仅是说明性的。Furthermore, the respective widths of the tabs 124, 125, 126, and 127 can be selected to provide greater electrical contact (e.g., with lower resistance) with the respective electrodes 114, 120, 122, and 126. Additionally, the widths of the tabs 124 and 128 associated with the DC bias electrodes 122 and 126, and the widths of the terminals 30 and 32, can be selected to avoid contact between the bias electrode terminals 30 and 32 and the signal electrode terminals 16 and 18. For example, in some embodiments, the tabs 124, 125, 126, and 127 may extend 10% or more along the edge of the capacitor, in some embodiments 30% or more, and in some embodiments 60% or more. It should be understood that the number of electrode layers shown in Figures 7A-7D is merely illustrative.

在上述实施例中,电极通常采用“对称”配置,因为第一有源电极和第二有源电极之间的距离(或电介质厚度)与第一偏置电极和第二偏置电极之间的距离大致相同。然而,在某些实施例中,可能期望改变该厚度以实现“非对称”配置。例如,第一有源电极和第二有源电极之间的距离可以小于第一偏置电极和第二偏置电极之间的距离。在另外的其他实施例中,第一有源电极和第二有源电极之间的距离可以大于第一偏置电极和第二偏置电极之间的距离。这可能会增加针对给定水平的施加的DC偏置而施加的DC场,这将增加给定DC偏置电压的可调性的水平,以及其他。这样的布置还可以允许针对相对适中的DC电压的相对较大的可调性,并且允许使用具有适中可调性的材料(具有潜在的较低损耗和温度/频率可变性)。虽然可以以多种方式实现这种不对称配置,但是通常期望在每对有源电极之间使用附加的“浮置”偏置电极。例如,参考图6,示出了这种非对称电容器的一个实施例,其包含相应的第一有源电极114和第二有源电极120,分别与第一偏置电极122和第二偏置电极126结合。In the above embodiments, the electrodes are typically arranged in a “symmetrical” configuration because the distance (or dielectric thickness) between the first and second active electrodes is approximately the same as the distance between the first and second bias electrodes. However, in some embodiments, it may be desirable to vary this thickness to achieve an “asymmetrical” configuration. For example, the distance between the first and second active electrodes may be smaller than the distance between the first and second bias electrodes. In other still embodiments, the distance between the first and second active electrodes may be greater than the distance between the first and second bias electrodes. This may increase the DC field applied for a given level of applied DC bias, which will increase the level of adjustability of a given DC bias voltage, among others. Such an arrangement may also allow for relatively large adjustability for a relatively moderate DC voltage and allows for the use of materials with moderate adjustability (with potentially lower losses and temperature/frequency variability). While this asymmetrical configuration can be implemented in various ways, it is generally desirable to use an additional “floating” bias electrode between each pair of active electrodes. For example, referring to FIG6, an embodiment of such an asymmetric capacitor is shown, which includes a corresponding first active electrode 114 and a second active electrode 120, which are coupled to a first bias electrode 122 and a second bias electrode 126, respectively.

图8A示出了非对称电容器的另一实施例,其中每第11个电极是有源电极而不是偏置电极(11:1比例设计)。在这种情况下,每个这样的相应的有源电极(例如,AC电极)可以由一对具有相反极性的DC偏置电极界定。因此,可以跨每个AC电极生成偏置场。这样的配置可以在AC信号和DC偏置电压的两个极性之间提供电容耦合,反之亦然。每个AC电极214、220可以设置在一对具有相反极性的偏置电极222、226之间。第一组偏置电极222可以都具有相同的极性,第二组偏置电极226(以虚线示出)可以都具有与第一组偏置电极222相反的相应的极性。该配置可以在每个AC电极214、220与两个DC偏置极性之间提供电容耦合。Figure 8A illustrates another embodiment of the asymmetric capacitor, where every 11th electrode is an active electrode rather than a bias electrode (11:1 ratio design). In this case, each such corresponding active electrode (e.g., an AC electrode) can be defined by a pair of DC bias electrodes with opposite polarities. Therefore, a bias field can be generated across each AC electrode. This configuration provides capacitive coupling between the two polarities of the AC signal and the DC bias voltage, and vice versa. Each AC electrode 214, 220 can be positioned between a pair of bias electrodes 222, 226 with opposite polarities. The first set of bias electrodes 222 can all have the same polarity, and the second set of bias electrodes 226 (shown in dashed lines) can all have a corresponding polarity opposite to that of the first set of bias electrodes 222. This configuration provides capacitive coupling between each AC electrode 214, 220 and the two DC bias polarities.

图8B示出了根据当前公开的主题的偏置的多层电容器的11:1比例屏蔽非对称设计的示例性实施例的截面图。这类似于图8所示的示例,不同之处在于每个AC电极314、320都由一对具有相同极性的DC电极(322或326)界定。一组置电极322可以都具有相同的极性,且其他组的偏置电极326(以虚线示出)可以都具有相反的极性。虽然具有相同极性的两个DC电极(322或326)之间的材料不能提供调整,但该材料可以潜在地为AC信号提供屏蔽,减少了相关的噪声。这样的配置还可提供仅具有单个DC偏置极性的第一组AC电极314中的每一个之间的耦合。类似地,这样的配置可以仅在第二组AC电极320和相反的DC偏置极性之间提供电容耦合。应当理解,图8和图9所示的电极层的数目仅是说明性的。Figure 8B shows a cross-sectional view of an exemplary embodiment of an 11:1 scale shielded asymmetric design of a biased multilayer capacitor according to the subject matter currently disclosed. This is similar to the example shown in Figure 8, except that each AC electrode 314, 320 is defined by a pair of DC electrodes (322 or 326) of the same polarity. One set of bias electrodes 322 may all have the same polarity, and the other set of bias electrodes 326 (shown in dashed lines) may all have opposite polarities. While the material between the two DC electrodes (322 or 326) of the same polarity does not provide adjustment, it can potentially provide shielding for the AC signal, reducing associated noise. Such a configuration also provides coupling between each of the first set of AC electrodes 314 having only a single DC bias polarity. Similarly, such a configuration can provide capacitive coupling only between the second set of AC electrodes 320 and the opposite DC bias polarity. It should be understood that the number of electrode layers shown in Figures 8 and 9 is merely illustrative.

图9A示出了根据当前公开的主题的方面的部分可调多层电容器400的示例性实施例的截面图。部分可调多层电容器400可以包括与第一有源终端404电连接的第一组AC电极402和与第二有源终端408电连接的第二组AC电极406。部分可调多层电容器400还可以包括DC偏置电极410,其配置为跨越一个或多个可变电介质区域412施加DC偏置电压,使得可变电介质区域412的介电常数如上更详细地讨论般变化。部分可调多层电容器400还可以包括不可调区域414,其不是通过施加DC偏置电压可调的。例如,在一些实施例中,不可调区域414可以不包含任何DC偏置电极410。替代地,在其他实施例中,不可调区域414可以包含不与任何终端连接的电极,使得可以没有DC偏置电压施加在不可调区域414内。因此,在一些实施例中,不可调部分402中的电介质材料的电容可以不受跨越DC偏置电极410施加的DC偏置电压的影响。Figure 9A shows a cross-sectional view of an exemplary embodiment of a partially adjustable multilayer capacitor 400 according to aspects of the currently disclosed subject matter. The partially adjustable multilayer capacitor 400 may include a first set of AC electrodes 402 electrically connected to a first active terminal 404 and a second set of AC electrodes 406 electrically connected to a second active terminal 408. The partially adjustable multilayer capacitor 400 may also include a DC bias electrode 410 configured to apply a DC bias voltage across one or more variable dielectric regions 412, such that the dielectric constant of the variable dielectric regions 412 varies as discussed in more detail above. The partially adjustable multilayer capacitor 400 may also include a non-adjustable region 414 that is not adjustable by applying a DC bias voltage. For example, in some embodiments, the non-adjustable region 414 may not contain any DC bias electrode 410. Alternatively, in other embodiments, the non-adjustable region 414 may contain electrodes not connected to any terminal, such that no DC bias voltage can be applied within the non-adjustable region 414. Therefore, in some embodiments, the capacitance of the dielectric material in the non-adjustable portion 402 may be unaffected by the DC bias voltage applied across the DC bias electrode 410.

图9B示出了图9A所示的部分可调多层电容器的示意图。在该实施例中,不可调区域414与一个或多个可变电介质区域412并联连接。跨越DC偏置终端施加DC偏置电压可以改变(多个)可调区域412的电容,但是不改变不可调区域414的电容。这可以导致,与等效的完全可调多层电容器相比,部分可调多层电容器在较小的电容值范围内可调。因此,施加的DC偏置电压的每单位变化,电容的变化可以小于等效的完全可调多层电容器。因此,部分可调多层电容器可以提供更大的调整分辨率或精度。Figure 9B shows a schematic diagram of the partially adjustable multilayer capacitor shown in Figure 9A. In this embodiment, the non-adjustable region 414 is connected in parallel with one or more variable dielectric regions 412. Applying a DC bias voltage across the DC bias terminal can change the capacitance of the adjustable region(s) 412(s) but not the capacitance of the non-adjustable region 414. This results in the partially adjustable multilayer capacitor being adjustable over a smaller range of capacitance values compared to an equivalent fully adjustable multilayer capacitor. Therefore, for every unit change in the applied DC bias voltage, the change in capacitance can be smaller than that of an equivalent fully adjustable multilayer capacitor. Thus, the partially adjustable multilayer capacitor can provide greater adjustment resolution or accuracy.

在一些实施例中,有源和DC偏置终端关于电容器的轴线对称地设置。例如,在一个实施例中,电容器可以包含在纵向方向上间隔开的相对的第一端部区域和第二端部区域,以及在横向方向上间隔开的第二侧面区域和第二侧面区域。在某些实施例中,有源终端可以位于电容器的相应的端部区域处,而DC偏置终端可以位于电容器的相应的侧面区域处。当对称地布置时,有源终端和/或DC偏置终端可以距延伸穿过电容器的几何中心的纵向和/或横向轴线等距地间隔。例如,参考图11(a),示出了电容器1000的一个实施例,其包含纵向轴线“x”和横向轴线“y”,它们彼此垂直且延伸穿过几何中心“C”。在该特定实施例中,电容器1000包含相应的第一有源终端1100和第二有源终端1120,它们位于电容器1000的端部区域处且关于轴线“x”和“y”居中。类似地,电容器1000包含第一偏置终端1140和第二偏置终端1160,它们位于电容器1000的侧面区域处且也关于轴线“x”和“y”居中。In some embodiments, the active and DC bias terminals are arranged symmetrically about the axis of the capacitor. For example, in one embodiment, the capacitor may include opposing first and second end regions spaced apart in the longitudinal direction, and second and second side regions spaced apart in the transverse direction. In some embodiments, the active terminals may be located at the respective end regions of the capacitor, while the DC bias terminals may be located at the respective side regions of the capacitor. When arranged symmetrically, the active terminals and/or DC bias terminals may be equidistant from the longitudinal and/or transverse axes extending through the geometric center of the capacitor. For example, referring to FIG11(a), an embodiment of capacitor 1000 is shown, which includes a longitudinal axis “x” and a transverse axis “y” that are perpendicular to each other and extend through the geometric center “C”. In this particular embodiment, capacitor 1000 includes corresponding first active terminals 1100 and second active terminals 1120, which are located at the end regions of capacitor 1000 and centered about the axes “x” and “y”. Similarly, capacitor 1000 includes a first bias terminal 1140 and a second bias terminal 1160, which are located in the side region of capacitor 1000 and are also centered about the axes “x” and “y”.

在某些实施例中,还可能期望将两个或更多个终端定位在电容器的同一侧。例如,在图11(b)中,示出了电容器2000的一个实施例,其包含位于同一侧面区域的第一有源终端2100和第二有源终端2140。电容器2000还包含第一偏置终端2160和第二偏置终端2120,它们都位于与有源终端相对的另一侧面区域。尽管有源终端2100和2140仅位于侧面区域,但它们仍可以对称地布置,因为它们都定位为距轴线“x”和“y”等距。类似地,偏置终端2160和2120也定位为距轴线“x”和“y”等距。在上述实施例中,第一有源终端和第一偏置终端定位为与相应的第二有源终端和第二偏置终端相对。当然,这不是必需的。例如,在图11(c)中,示出了电容器3000,其包含相应的第一有源电极终端3100和第二有源电极终端3160,它们以偏移配置位于相对的侧面区域。尽管如此,第一有源终端3100和第二有源终端3160仍对称地布置,因为它们都定位为距轴线“x”和“y”等距。类似地,电容器3000还包含第一偏置终端3120和第二偏置终端3140,它们以偏置配置位于相对的侧面区域,但距轴线“x”和“y”等距。在其他实施例中,终端(例如偏置终端和/或有源电极终端)可以如上所述关于“x”和“y”轴线非对称地配置。In some embodiments, it may be desirable to position two or more terminals on the same side of the capacitor. For example, in Figure 11(b), an embodiment of capacitor 2000 is shown, which includes a first active terminal 2100 and a second active terminal 2140 located in the same side region. Capacitor 2000 also includes a first bias terminal 2160 and a second bias terminal 2120, both located in the opposite side region to the active terminals. Although active terminals 2100 and 2140 are located only in the side regions, they can still be arranged symmetrically because they are both positioned equidistant from axes “x” and “y”. Similarly, bias terminals 2160 and 2120 are also positioned equidistant from axes “x” and “y”. In the above embodiments, the first active terminal and the first bias terminal are positioned opposite the corresponding second active terminal and the second bias terminal. Of course, this is not necessary. For example, in Figure 11(c), a capacitor 3000 is shown, which includes corresponding first active electrode terminals 3100 and second active electrode terminals 3160, which are located in an offset configuration in opposite side regions. Nevertheless, the first active terminals 3100 and second active terminals 3160 are still arranged symmetrically because they are both positioned equidistant from axes “x” and “y”. Similarly, the capacitor 3000 also includes a first bias terminal 3120 and a second bias terminal 3140, which are located in an offset configuration in opposite side regions, but are equidistant from axes “x” and “y”. In other embodiments, the terminals (e.g., bias terminals and/or active electrode terminals) may be configured asymmetrically about the “x” and “y” axes as described above.

当前公开的主题同样包含用于改进电压可调装置的相关和/或相应方法,例如包括此类装置的生产,以及它们与相关电路的组合使用。作为另一示例,图5表示芯片制造自动化过程(CMAP)86,其可结合本文所公开的制造装置示例性实施例使用。如图所示,过程86可以包括多个连续的阶段,在某些情况下包括三个烘箱,其具有插入的陶瓷工位(interceding ceramic station)或其他步骤/方面,例如使用筛头或升降机和传送带特征,如示意性地示出的。本领域普通技术人员将理解,连续步骤的确切提供将取决于制造本文公开的示例性装置实施例中的哪一个(或其修改)。另外,所指示的各个步骤仅旨在表示所指示步骤的类型,并不表示所需要使用所指示步骤的一般性质以外的其他方面。例如,筛头步骤可以涉及将不锈钢丝网与电极糊剂一起用于电极层的丝网粘贴,或者可以实践用于该步骤的其他技术。例如,可以实践更常规的交替堆叠和层压(使用胶带)的步骤。在任一过程(或其他过程)中,本领域普通技术人员将认识到,可以实践所选择的步骤以制造针对当前公开的主题的给定应用所选择的特定设计。The subject matter disclosed herein also includes related and/or corresponding methods for improving voltage-adjustable devices, such as the production of such devices and their combined use with associated circuitry. As another example, Figure 5 illustrates a Chip Manufacturing Automation Process (CMAP) 86, which can be used in conjunction with exemplary embodiments of the manufacturing apparatus disclosed herein. As shown, process 86 may include multiple successive stages, and in some cases, three ovens with interceding ceramic stations or other steps/aspects, such as using sieves or elevator and conveyor features, as schematically illustrated. Those skilled in the art will understand that the exact provision of successive steps will depend on which (or a modification thereof) of the exemplary apparatus embodiments disclosed herein is being manufactured. Furthermore, the individual steps indicated are intended only to indicate the type of step indicated and do not imply the need for other aspects beyond the general nature of the indicated step. For example, a sieve step may involve screen bonding a stainless steel wire mesh together with an electrode paste for an electrode layer, or other techniques may be practiced for this step. For example, more conventional steps of alternating stacking and lamination (using tape) may be practiced. In any process (or other process), those skilled in the art will recognize that the chosen steps can be practiced to produce a particular design chosen for a given application of the subject matter currently disclosed.

参照图12A-12C,可通过以“水平堆叠”配置布置单独的电容器10来形成可调多层电容器阵列4000。单独的电容器可以例如参考图2和图7所描述的来配置。与单个电容器10相比,堆叠的电容器堆叠4000可以提供增加的电容和减小的ESR。此外,堆叠的电容器阵列400可以允许例如在印刷电路板上的更容器的制造和安装。此外,堆叠的电容器阵列400可以提供改进的机械稳定性和散热。Referring to Figures 12A-12C, an adjustable multilayer capacitor array 4000 can be formed by arranging individual capacitors 10 in a "horizontally stacked" configuration. Individual capacitors can be configured, for example, with reference to the descriptions in Figures 2 and 7. Compared to a single capacitor 10, the stacked capacitor array 4000 can provide increased capacitance and reduced ESR. Furthermore, the stacked capacitor array 400 can allow for the fabrication and mounting of more capacitors, for example, on a printed circuit board. Additionally, the stacked capacitor array 400 can provide improved mechanical stability and heat dissipation.

在一些实施例中,电容器阵列4000的电容器10可以并联地连接。例如,第一引线框4002可以连接每个第一有源终端16,且第二引线框4004可以连接每个第二有源终端18。第一单个引线4006可以连接每个第一DC偏置终端30,且第二单个引线4008可以连接每个第二DC偏置终端32。在一些实施例中,DC偏置终端30、32可以绕在电容器的侧面周围,如图12B和12C所示。该配置可以在DC偏置终端30、32与每个偏置终端30、32所连接的相应的偏置电极之间提供改进的机械和/或电连接。此外,这样的配置为可以在相邻的电容器10的各个第一DC偏置终端30和各个第二DC偏置终端32之间提供改进的电连接。这可以提供更加弹性的阵列4000。In some embodiments, the capacitors 10 of the capacitor array 4000 can be connected in parallel. For example, a first lead frame 4002 can connect to each first active terminal 16, and a second lead frame 4004 can connect to each second active terminal 18. A first single lead 4006 can connect to each first DC bias terminal 30, and a second single lead 4008 can connect to each second DC bias terminal 32. In some embodiments, the DC bias terminals 30, 32 can be wound around the sides of the capacitors, as shown in Figures 12B and 12C. This configuration can provide improved mechanical and/or electrical connections between the DC bias terminals 30, 32 and the corresponding bias electrodes to which each bias terminal 30, 32 is connected. Furthermore, such a configuration can provide improved electrical connections between the respective first DC bias terminals 30 and the respective second DC bias terminals 32 of adjacent capacitors 10. This can provide a more flexible array 4000.

在其他实施例中,DC偏置终端30、32可以仅设置在电容器10的侧表面上,如图12A所示。这样的配置可以允许电容器10更紧密地布置在阵列4000中,例如导致更紧凑的阵列4000。In other embodiments, DC bias terminals 30, 32 may be disposed only on the side surface of capacitor 10, as shown in FIG12A. Such a configuration allows capacitor 10 to be arranged more closely in array 4000, resulting in, for example, a more compact array 4000.

通过跨越第一单个引线4006和第二单个引线4008施加DC偏置电压,可以将DC偏置电压施加到阵列4000内的每个电容器10。为了清楚起见,从图12A和图12B中省略了单个引线4006、4008。第一引线框4002和第二引线框4004中的每一个可以包括多个引线4010,其从电容器阵列4000延伸以连接到电路中,例如连接到印刷电路板。在一些实施例中,引线4010可以是笔直的,如图12A所示,而在其他实施例中,引线4010可以向外弯曲成“J”配置,如图12B所示。在另外的其他实施例中,引线4010可以向内弯曲或具有用于安装的任何其他合适的配置。A DC bias voltage can be applied to each capacitor 10 within the array 4000 by applying a DC bias voltage across the first single lead 4006 and the second single lead 4008. For clarity, the single leads 4006, 4008 are omitted from Figures 12A and 12B. Each of the first lead frame 4002 and the second lead frame 4004 may include a plurality of leads 4010 extending from the capacitor array 4000 for connection to circuitry, such as a printed circuit board. In some embodiments, the leads 4010 may be straight, as shown in Figure 12A, while in other embodiments, the leads 4010 may be bent outwards in a “J” configuration, as shown in Figure 12B. In still other embodiments, the leads 4010 may be bent inwards or have any other suitable configuration for mounting.

可调多层电容器阵列4000可以在长度方向4014上具有长度4012,在宽度方向4018上具有宽度4016,且在高度方向4022上具有高度4020。每个电容器10可以布置为“水平堆叠”配置,使得多个可调多层电容器10中的每一个的厚度在阵列4000的长度方向4014上延伸。如图12A和图12B所示,阵列4000的高度4020可以包括阵列4000与阵列4000所安装的表面之间的间隙距离4021(以虚线示出)。间隙距离4021可以在阵列400(包括终端32)的底表面与阵列4000所安装的表面之间测得。引线框4002、4004可以将阵列4000支撑在表面上。间隙距离4021可以有助于将阵列4000与表面热隔离和/或使阵列4000从表面中的应变机械解耦。The adjustable multilayer capacitor array 4000 may have a length 4012 in the length direction 4014, a width 4016 in the width direction 4018, and a height 4020 in the height direction 4022. Each capacitor 10 may be arranged in a "horizontally stacked" configuration such that the thickness of each of the plurality of adjustable multilayer capacitors 10 extends in the length direction 4014 of the array 4000. As shown in Figures 12A and 12B, the height 4020 of the array 4000 may include a gap distance 4021 (shown in dashed lines) between the array 4000 and the surface on which the array 4000 is mounted. The gap distance 4021 may be measured between the bottom surface of the array 400 (including terminal 32) and the surface on which the array 4000 is mounted. Lead frames 4002, 4004 may support the array 4000 on the surface. The gap distance 4021 may help to thermally insulate the array 4000 from the surface and/or decouple the array 4000 from strain mechanics in the surface.

参考图13A-13C,部分可调多层电容器阵列5000可以通过以“水平堆叠”配置布置可调多层电容器10和不可调电容器5002(即,不具有调整能力的电容器)来形成。类似于图12A-12C所示的实施例,部分可调多层电容器阵列5000可以包括连接可调多层电容器10的每个第一有源终端16的第一引线框4002和连接可调多层电容器10的每个第二有源终端19的第二引线框4004。此外,第一单个引线4006可以连接可调多层电容器10的每个第一DC偏置终端30,且第二单个引线4008可以连接可调多层电容器10的每个第二DC偏置终端32。为了清楚起见,从图13A和图13B中省略了单个引线4006、4008。类似于参考图12A-12C所述的阵列4000,部分可调阵列5000的可调电容器10可以包括DC偏置终端30、32,它们绕在电容器10的侧面周围,如图13B和图13C所示。在其他实施例中,DC偏置终端30、32可以仅沉积在可调电容器的侧表面上,例如,如图13A所示。Referring to Figures 13A-13C, a partially adjustable multilayer capacitor array 5000 can be formed by arranging adjustable multilayer capacitors 10 and non-adjustable capacitors 5002 (i.e., capacitors without adjustment capability) in a "horizontally stacked" configuration. Similar to the embodiment shown in Figures 12A-12C, the partially adjustable multilayer capacitor array 5000 may include a first lead frame 4002 connecting each first active terminal 16 of the adjustable multilayer capacitors 10 and a second lead frame 4004 connecting each second active terminal 19 of the adjustable multilayer capacitors 10. Furthermore, a first single lead 4006 may connect to each first DC bias terminal 30 of the adjustable multilayer capacitors 10, and a second single lead 4008 may connect to each second DC bias terminal 32 of the adjustable multilayer capacitors 10. For clarity, the single leads 4006 and 4008 are omitted from Figures 13A and 13B. Similar to the array 4000 described with reference to Figures 12A-12C, the adjustable capacitor 10 of the partially adjustable array 5000 may include DC bias terminals 30, 32, which are wrapped around the sides of the capacitor 10, as shown in Figures 13B and 13C. In other embodiments, the DC bias terminals 30, 32 may be deposited only on the side surfaces of the adjustable capacitor, for example, as shown in Figure 13A.

部分可调多层电容器阵列5000可以以类似于上文参考图9A和图9B所述的部分可调多层电容器400的方式提供改进的调整分辨率或精度。当使用单个引线4006、4008跨阵列的DC偏置电极30、32施加最大DC偏置电压时,不可调电容器5002可以增加阵列5000的最小电容。The partially adjustable multilayer capacitor array 5000 can provide improved adjustment resolution or accuracy in a manner similar to the partially adjustable multilayer capacitor 400 described above with reference to Figures 9A and 9B. The non-adjustable capacitor 5002 can increase the minimum capacitance of the array 5000 when the maximum DC bias voltage is applied across the array's DC bias electrodes 30, 32 using a single lead 4006, 4008.

参考图14A-14C,在一些实施例中,底部端接的阵列6000可以形成为具有沿着阵列6000的底表面布置的第一DC偏置终端30和第二DC偏置终端32。例如,每个电容器10可以具有沿着同一侧布置的相应的第一DC偏置终端30和第二DC偏置终端32。在其他实施例中,DC偏置终端30、32可以均沿着阵列4000的顶表面设置。然而,DC偏置终端30、32可以具有任何适当的配置。Referring to Figures 14A-14C, in some embodiments, the bottom-terminated array 6000 may be configured to have a first DC bias terminal 30 and a second DC bias terminal 32 arranged along the bottom surface of the array 6000. For example, each capacitor 10 may have a corresponding first DC bias terminal 30 and second DC bias terminal 32 arranged along the same side. In other embodiments, the DC bias terminals 30, 32 may both be disposed along the top surface of the array 4000. However, the DC bias terminals 30, 32 may have any suitable configuration.

图14A-14C所示的配置可以提供一些优点,包括例如,易于安装、改进的机械耐用性等。例如,DC偏置终端30、32可以更容易地与阵列400所安装的表面(例如,印刷电路板)上的相应的终端连接。在一些实施例中,单个引线4006、4008可以将相应的DC偏置终端30、32与安装表面上的相应的终端连接。然而,在其他实施例中,DC偏置终端可以例如通过焊接与安装表面上的相应的终端直接连接,而不使用单个引线4006、4008。The configurations shown in Figures 14A-14C offer several advantages, including, for example, ease of installation and improved mechanical durability. For instance, DC bias terminals 30, 32 can be more easily connected to corresponding terminals on the surface on which the array 400 is mounted (e.g., a printed circuit board). In some embodiments, a single lead 4006, 4008 can connect the corresponding DC bias terminals 30, 32 to the corresponding terminals on the mounting surface. However, in other embodiments, the DC bias terminals can be directly connected to the corresponding terminals on the mounting surface, for example, by soldering, without using a single lead 4006, 4008.

此外,可以采用上述底部端接的配置以类似于参考图13A-13C所述的实施例的方式来形成部分调整的电容器阵列。例如,在一些实施例中,底部端接的可调电容器10的组合可以以类似于上文参考图13A-13C所述的部分可调阵列5000的方式与不可调电容器5002并联连接。Furthermore, the bottom-terminated configuration described above can be used to form a partially adjustable capacitor array in a manner similar to the embodiments described with reference to Figures 13A-13C. For example, in some embodiments, the combination of bottom-terminated adjustable capacitors 10 can be connected in parallel with non-adjustable capacitors 5002 in a manner similar to the partially adjustable array 5000 described above with reference to Figures 13A-13C.

在其他实施例中,第一组可调电容器10(其具有布置在相对的侧表面上的DC偏置终端30、32,例如如图12A-12C所示)可以用于与第二组可调电容器10(其具有布置在相同的侧表面上(例如在底表面上)的DC偏置终端30、32,例如如图14A-14C所示)形成阵列。这样的配置可以允许第一DC偏置电压施加到第一组可调电容器10且允许不同于第一DC偏置电压的第二DC偏置电压施加到第二组可调电容器10。这可以提供可调阵列4000,其可以基于两个不同的DC偏置电压来调整。在另外的其他实施例中,例如,第一组可调电容器10(其具有布置在底表面上的DC偏置终端30、32)可以与第二组可调电容器10(其具有布置在顶表面上的DC偏置终端30、32)连接成阵列。该配置还可以允许第一DC偏置电压施加到第一组可调电容器10且允许不同于第一DC偏置电压的第二DC偏置电压施加到第二组可调电容器10。这可以提供可调阵列4000,其可以基于两个不同的DC偏置电压来调整。In other embodiments, a first set of adjustable capacitors 10 (having DC bias terminals 30, 32 arranged on opposing side surfaces, as shown in Figures 12A-12C) can be used to form an array with a second set of adjustable capacitors 10 (having DC bias terminals 30, 32 arranged on the same side surfaces (e.g., on the bottom surface), as shown in Figures 14A-14C). This configuration allows a first DC bias voltage to be applied to the first set of adjustable capacitors 10 and allows a second DC bias voltage, different from the first DC bias voltage, to be applied to the second set of adjustable capacitors 10. This can provide an adjustable array 4000 that can be adjusted based on two different DC bias voltages. In yet another embodiment, for example, the first set of adjustable capacitors 10 (having DC bias terminals 30, 32 arranged on the bottom surface) can be connected in an array with the second set of adjustable capacitors 10 (having DC bias terminals 30, 32 arranged on the top surface). This configuration also allows a first DC bias voltage to be applied to the first set of adjustable capacitors 10 and a second DC bias voltage, different from the first DC bias voltage, to be applied to the second set of adjustable capacitors 10. This can provide an adjustable array 4000 that can be adjusted based on two different DC bias voltages.

本领域普通技术人员将理解,具有本文所述和所示的各种配置的可调电容器的另外的其他组合可以形成除本文具体描述的之外的其他阵列。类似地,具有本文所述和所示配置的可调和不可调电容器的其他组合也是可能的。Those skilled in the art will understand that other combinations of adjustable capacitors having the various configurations described and shown herein can form arrays other than those specifically described herein. Similarly, other combinations of adjustable and non-adjustable capacitors having the configurations described and shown herein are also possible.

参考图15,在一些实施例中,电容器阵列4000可以具有垂直堆叠配置。垂直堆叠电容器阵列4000可以类似地具有与一些或所有的第一有源终端16连接的第一引线框4002,且第二引线框4004可以与一些或所有的第二有源终端18连接。第一单个引线4006可以连接一些或所有的第一DC偏置终端30,且第二单个引线4008可以连接一些或所有的第二DC偏置终端32。因此,垂直堆叠电容器阵列4000可以在一些实施例中配置为完全可调电容器阵列,且在其他实施例中配置为部分可调电容器阵列。在一些实施例中,垂直堆叠阵列可以形成为在同一侧具有两个偏置终端30、32,例如使用可调电容器10,其配置为上文参考图14A-14C所示的底部端接可调阵列所述的电容器10。类似地,不同可调和/或不可调电容器的组合可以组合成垂直堆叠阵列4000,如上文参考水平堆叠阵列4000、5000所描述的。Referring to FIG. 15, in some embodiments, the capacitor array 4000 may have a vertically stacked configuration. The vertically stacked capacitor array 4000 may similarly have a first lead frame 4002 connected to some or all of the first active terminals 16, and a second lead frame 4004 connected to some or all of the second active terminals 18. A first single lead 4006 may connect to some or all of the first DC bias terminals 30, and a second single lead 4008 may connect to some or all of the second DC bias terminals 32. Therefore, the vertically stacked capacitor array 4000 may be configured as a fully adjustable capacitor array in some embodiments and as a partially adjustable capacitor array in other embodiments. In some embodiments, the vertically stacked array may be formed with two bias terminals 30, 32 on the same side, for example using an adjustable capacitor 10 configured to bottom-terminate the capacitor 10 described in the adjustable array as shown above with reference to FIGS. 14A-14C. Similarly, combinations of different adjustable and/or non-adjustable capacitors can be combined into a vertical stacked array 4000, as described above with reference to horizontal stacked arrays 4000 and 5000.

上文参考图12-14所述的水平堆叠配置可以为包括大量的电容器的电容器阵列提供改进的机械稳定性。例如,对于包括多于五个电容器的阵列,垂直堆叠阵列的高度可能变得不适于例如安装到印刷电路板的表面。此外,这样的阵列的高度可能使得阵列在机械上变得不稳定。然而,对于具有少量电容器的阵列,例如五个或更少的电容器,垂直堆叠阵列可以提供较小的足印和较低的轮廓。The horizontal stacking configuration described above with reference to Figures 12-14 can provide improved mechanical stability for capacitor arrays comprising a large number of capacitors. For example, for arrays comprising more than five capacitors, the height of a vertically stacked array may become unsuitable for mounting, for example, to a surface on a printed circuit board. Furthermore, the height of such an array may make the array mechanically unstable. However, for arrays with a small number of capacitors, such as five or fewer, a vertically stacked array can provide a smaller footprint and a lower profile.

VI.应用VI. Application

本发明的电容器可用于多种应用中,包括例如功率转换电路。在高电容和电压下的可调性可允许电路性能的优化。其他应用可以包括负载点滤波器电路和可变负载电路中的平滑电容器。其他合适的应用可以包括例如波导、RF应用(例如延迟线)、天线结构、匹配网络、谐振电路以及其他应用。The capacitor of this invention can be used in a variety of applications, including, for example, power conversion circuits. Adjustability at high capacitance and voltage allows for optimization of circuit performance. Other applications may include smoothing capacitors in point-of-load filter circuits and variable-load circuits. Other suitable applications may include, for example, waveguides, RF applications (e.g., delay lines), antenna structures, matching networks, resonant circuits, and others.

测试方法Test methods

电容capacitance

电容可以根据MIL-STD-202方法305测量,使用Keithley 3330Precision LCZ仪表,DC偏置为0.0伏、1.1伏或2.1伏(1伏均方根正弦信号)。工作频率为1KHz,温度为约25℃。相对湿度可以为25%或85%.Capacitance can be measured according to MIL-STD-202 Method 305 using a Keithley 3330 Precision LCZ instrument with a DC bias of 0.0V, 1.1V, or 2.1V (1V RMS sine wave). The operating frequency is 1kHz, and the temperature is approximately 25°C. The relative humidity can be 25% or 85%.

等效串联电阻(ESR)Equivalent series resistance (ESR)

等效串联电阻可以使用Keithley 2400、2602或3330Precision LCZ仪表来测量,DC偏置为0.0伏、1.1伏或2.1伏(0.5伏峰间正弦信号),工作频率为10KHz、50KHz或100KHz。可以测试各种温度和相对湿度水平。例如,温度可以为23℃、85℃或105℃,且相对湿度可以为25%或85%。Equivalent series resistance can be measured using a Keithley 2400, 2602, or 3330 Precision LCZ meter with DC bias of 0.0V, 1.1V, or 2.1V (0.5V peak-to-peak sinusoidal signal) and operating frequencies of 10kHz, 50kHz, or 100kHz. Various temperature and relative humidity levels can be measured. For example, temperatures can be 23°C, 85°C, or 105°C, and relative humidity can be 25% or 85%.

示例Example

根据本公开的方面的可调多层电容器阵列的示例在表1中提供:Examples of adjustable multilayer capacitor arrays according to aspects of this disclosure are provided in Table 1:

表1:示例可调多层电容器阵列Table 1: Example of an adjustable multilayer capacitor array

表1中列出的初始电容可以是未施加DC偏置电压的阵列的电容。阵列可以从初始电容的约10%到约95%可调。The initial capacitance listed in Table 1 can be the capacitance of the array without an applied DC bias voltage. The array can be adjusted from approximately 10% to approximately 95% of the initial capacitance.

在不脱离本发明的精神和范围的情况下,本领域的普通技术人员可以实践本发明的这些和其他修改和变化。另外,应当理解,各个实施例的各方面可以全部或部分互换。此外,本领域普通技术人员将理解,以上描述仅是示例性的,并且无意于限制在所附权利要求中进一步描述的本发明。These and other modifications and variations of the invention can be practiced by those skilled in the art without departing from the spirit and scope of the invention. Furthermore, it should be understood that aspects of the various embodiments can be interchanged in whole or in part. Moreover, those skilled in the art will understand that the above description is merely exemplary and is not intended to limit the invention further described in the appended claims.

Claims (35)

1.一种可调多层电容器阵列,包括并联连接的多个可调多层电容器,其中所述可调多层电容器阵列在大于约10伏的工作电压下具有大于约0.1微法的初始电容值,以及其中所述可调多层电容器配置为通过向所述可调多层电容器阵列施加DC偏置电压而具有可调电容。1. An adjustable multilayer capacitor array comprising a plurality of adjustable multilayer capacitors connected in parallel, wherein the adjustable multilayer capacitor array has an initial capacitance value greater than about 0.1 microfarads at an operating voltage greater than about 10 volts, and wherein the adjustable multilayer capacitors are configured to have adjustable capacitance by applying a DC bias voltage to the adjustable multilayer capacitor array. 2.如权利要求1所述的可调多层电容器阵列,其中所述施加的DC偏置电压的范围从约10伏到约300伏。2. The adjustable multilayer capacitor array of claim 1, wherein the applied DC bias voltage ranges from about 10 volts to about 300 volts. 3.如权利要求2所述的可调多层电容器阵列,其中所述施加的DC偏置电压的范围从约100伏到约300伏。3. The adjustable multilayer capacitor array of claim 2, wherein the applied DC bias voltage ranges from about 100 volts to about 300 volts. 4.如权利要求1所述的可调多层电容器阵列,其中所述可调多层电容器具有与所述初始电容值相关联的初始体积效率,且所述初始体积效率大于约每立方厘米10微法。4. The adjustable multilayer capacitor array of claim 1, wherein the adjustable multilayer capacitor has an initial volumetric efficiency associated with the initial capacitance value, and the initial volumetric efficiency is greater than about 10 microfarads per cubic centimeter. 5.如权利要求1所述的可调多层电容器阵列,其中所述初始体积效率的范围从约每立方厘米10微法到约每立方厘米500微法。5. The adjustable multilayer capacitor array of claim 1, wherein the initial volumetric efficiency ranges from about 10 microfarads per cubic centimeter to about 500 microfarads per cubic centimeter. 6.如权利要求1所述的可调多层电容器阵列,其中所述可调多层电容器阵列的初始电容值大于约1μF。6. The adjustable multilayer capacitor array of claim 1, wherein the initial capacitance value of the adjustable multilayer capacitor array is greater than about 1 μF. 7.如权利要求1所述的可调多层电容器阵列,其中所述可调多层电容器的电容可从所述初始电容值的约10%调节至约95%。7. The adjustable multilayer capacitor array of claim 1, wherein the capacitance of the adjustable multilayer capacitor is adjustable from about 10% to about 95% of the initial capacitance value. 8.如权利要求1所述的可调多层电容器阵列,其中所述可调多层电容器阵列的等效串联电阻小于约10mΩ。8. The adjustable multilayer capacitor array of claim 1, wherein the equivalent series resistance of the adjustable multilayer capacitor array is less than about 10 mΩ. 9.如权利要求1所述的可调多层电容器阵列,其中所述可调多层电容器阵列具有水平堆叠配置,其中所述多个可调多层电容器中的每一个的厚度在所述可调多层电容器阵列的长度方向上延伸。9. The adjustable multilayer capacitor array of claim 1, wherein the adjustable multilayer capacitor array has a horizontally stacked configuration, and the thickness of each of the plurality of adjustable multilayer capacitors extends in the length direction of the adjustable multilayer capacitor array. 10.如权利要求1所述的可调多层电容器阵列,其中所述多个可调多层电容器包括五个或更多个可调多层电容器。10. The adjustable multilayer capacitor array of claim 1, wherein the plurality of adjustable multilayer capacitors comprises five or more adjustable multilayer capacitors. 11.如权利要求1所述的可调多层电容器阵列,还包括至少一个多层电容器,其不配置为由施加的电压而可调。11. The adjustable multilayer capacitor array of claim 1, further comprising at least one multilayer capacitor not configured to be adjustable by an applied voltage. 12.如权利要求1所述的电容器,其中所述可调多层电容器阵列的长度从约5mm到约50mm。12. The capacitor of claim 1, wherein the length of the adjustable multilayer capacitor array is from about 5 mm to about 50 mm. 13.如权利要求1所述的电容器,其中所述可调多层电容器阵列的宽度从约3mm到约15mm。13. The capacitor of claim 1, wherein the width of the adjustable multilayer capacitor array is from about 3 mm to about 15 mm. 14.如权利要求1所述的电容器,其中所述可调多层电容器阵列的高度从约3mm到约15mm。14. The capacitor of claim 1, wherein the height of the adjustable multilayer capacitor array is from about 3 mm to about 15 mm. 15.如权利要求1所述的可调多层电容器阵列,其中所述多个可调多层电容器中的每一个包括:15. The adjustable multilayer capacitor array of claim 1, wherein each of the plurality of adjustable multilayer capacitors comprises: 与第一有源终端电接触的第一有源电极;The first active electrode that is in electrical contact with the first active terminal; 与第二有源终端电接触的第二有源电极;The second active electrode is in electrical contact with the second active terminal; 与第一DC偏置终端电接触的第一DC偏置电极;以及The first DC bias electrode is in electrical contact with the first DC bias terminal; and 与第二DC偏置终端电接触的第二DC偏置电极;以及The second DC bias electrode is in electrical contact with the second DC bias terminal; and 设置在所述第一有源电极和所述第二有源电极与所述第一偏置电极和所述第二偏置电极之间的多个电介质层,Multiple dielectric layers are disposed between the first active electrode and the second active electrode and between the first bias electrode and the second bias electrode. 其中所述电介质层的至少一部分包含可调电介质材料,所述可调电介质材料在跨所述第一DC偏置电极和所述第二DC偏置电极施加所施加的DC电压时呈现可变介电常数。At least a portion of the dielectric layer comprises an tunable dielectric material that exhibits a variable dielectric constant when an applied DC voltage is applied across the first DC bias electrode and the second DC bias electrode. 16.如权利要求15所述的可调多层电容器阵列,还包括:16. The adjustable multilayer capacitor array of claim 15, further comprising: 与每个第一有源终端连接的第一引线框;以及The first lead frame connected to each first active terminal; and 与每个第二有源终端连接的第二引线框。A second lead frame connected to each second active terminal. 17.如权利要求15所述的可调多层电容器阵列,还包括与每个第一DC偏置终端连接的第一单个引线和与第二DC偏置终端连接的第二单个引线。17. The adjustable multilayer capacitor array of claim 15, further comprising a first single lead connected to each first DC bias terminal and a second single lead connected to a second DC bias terminal. 18.如权利要求15所述的可调多层电容器阵列,其中所述多个可调多层电容器中的至少一个的多个电介质层的厚度的范围从约0.5微米到约50微米。18. The adjustable multilayer capacitor array of claim 15, wherein the thickness of the plurality of dielectric layers of at least one of the plurality of adjustable multilayer capacitors ranges from about 0.5 micrometers to about 50 micrometers. 19.如权利要求15所述的可调多层电容器阵列,其中所述多个可调多层电容器中的至少一个所包括的电介质层的数目的范围从约10到约700。19. The adjustable multilayer capacitor array of claim 15, wherein the number of dielectric layers included in at least one of the plurality of adjustable multilayer capacitors ranges from about 10 to about 700. 20.如权利要求15所述的电容器,其中所述多个可调多层电容器中的至少一个的第一有源电极和第二有源电极的总数的范围从约100到约500。20. The capacitor of claim 15, wherein the total number of the first active electrode and the second active electrode of at least one of the plurality of adjustable multilayer capacitors ranges from about 100 to about 500. 21.如权利要求15所述的电容器,其中所述多个可调多层电容器中的至少一个所包括的电介质材料具有从约10%到约95%的电压可调系数,其中所述电压可调系数根据以下通式来确定:21. The capacitor of claim 15, wherein at least one of the plurality of adjustable multilayer capacitors comprises a dielectric material having a voltage adjustability factor from about 10% to about 95%, wherein the voltage adjustability factor is determined according to the following general formula: T=100×(ε0V)/ε0 T = 100 × ( ε₀ - ε₀ ) / ε₀ 其中,in, T是所述电压可调系数;T is the voltage adjustability coefficient; ε0是所述材料在没有施加电压的情况下的静态介电常数;并且ε <sub>0</sub> is the static dielectric constant of the material without an applied voltage; and εV是所述材料在施加所施加的电压(DC)后的所述可变介电常数。 εV is the variable dielectric constant of the material after the applied voltage (DC) is applied. 22.如权利要求21所述的电容器,其中所述多个可调多层电容器中的至少一个所包括的电介质材料的静态介电常数从约100到约10,000,如在25℃的工作温度和1kHz的频率下根据ASTM D2149-13所确定的。22. The capacitor of claim 21, wherein at least one of the plurality of adjustable multilayer capacitors comprises a dielectric material having a static dielectric constant from about 100 to about 10,000, as determined according to ASTM D2149-13 at an operating temperature of 25°C and a frequency of 1 kHz. 23.如权利要求21所述的电容器,其中所述多个可调多层电容器中的至少一个所包括的电介质材料包括一个或多个铁电基相。23. The capacitor of claim 21, wherein at least one of the plurality of adjustable multilayer capacitors comprises a dielectric material comprising one or more ferroelectric phases. 24.如权利要求21所述的电容器,其中所述多个可调多层电容器中的至少一个所包括的电介质材料是钙钛矿、钨青铜材料、分层结构材料或其组合。24. The capacitor of claim 21, wherein at least one of the plurality of adjustable multilayer capacitors comprises a perovskite, tungsten bronze, layered structure material, or a combination thereof as the dielectric material. 25.一种电路,包括如权利要求15所述的可调多层电容器阵列和通过所述第一DC偏置终端和所述第二DC偏置终端向所述电容器提供DC偏置电压的电源。25. A circuit comprising an adjustable multilayer capacitor array as claimed in claim 15 and a power supply providing a DC bias voltage to the capacitors via a first DC bias terminal and a second DC bias terminal. 26.一种可调多层电容器,包括:26. An adjustable multilayer capacitor, comprising: 与第一有源终端电接触的第一有源电极;The first active electrode that is in electrical contact with the first active terminal; 与第二有源终端电接触的第二有源电极;The second active electrode is in electrical contact with the second active terminal; 与第一DC偏置终端电接触的第一DC偏置电极;The first DC bias electrode is in electrical contact with the first DC bias terminal; 与第二DC偏置终端电接触的第二DC偏置电极;以及The second DC bias electrode is in electrical contact with the second DC bias terminal; and 设置在所述第一有源电极和所述第二有源电极与所述第一偏置电极和所述第二偏置电极之间的多个电介质层,Multiple dielectric layers are disposed between the first active electrode and the second active electrode and between the first bias electrode and the second bias electrode. 其中所述电介质层的至少一部分包含可调电介质材料,所述可调电介质材料在跨所述第一DC偏置电极和所述第二DC偏置电极施加所施加的DC电压时呈现可变介电常数,At least a portion of the dielectric layer comprises a tunable dielectric material that exhibits a variable dielectric constant when an applied DC voltage is applied across the first DC bias electrode and the second DC bias electrode. 且其中所述可调多层电容器在大于约10伏的工作电压下具有大于约0.1微法的初始电容。Furthermore, the adjustable multilayer capacitor described herein has an initial capacitance greater than approximately 0.1 microfarads at an operating voltage greater than approximately 10 volts. 27.如权利要求26所述的电容器,其中所施加的DC电压大于约100伏。27. The capacitor of claim 26, wherein the applied DC voltage is greater than about 100 volts. 28.如权利要求26所述的电容器,其中所述多个电介质层的不可调部分在跨所述第一DC偏置电极和所述第二DC偏置电极施加所施加的DC电压时不呈现可变电容。28. The capacitor of claim 26, wherein the non-adjustable portion of the plurality of dielectric layers does not exhibit variable capacitance when an applied DC voltage is applied across the first DC bias electrode and the second DC bias electrode. 29.如权利要求26所述的电容器,其中所述多个电介质层的不可调部分不包括任何偏置电极。29. The capacitor of claim 26, wherein the non-adjustable portion of the plurality of dielectric layers does not include any bias electrodes. 30.如权利要求26所述的电容器,其中所述多个电介质层的不可调部分包括不与任何偏置终端连接的偏置电极。30. The capacitor of claim 26, wherein the non-adjustable portion of the plurality of dielectric layers includes a bias electrode not connected to any bias terminal. 31.一种可调多层电容器阵列,包括并联连接的多个可调多层电容器,其中所述可调多层电容器阵列具有水平堆叠配置,其中所述多个可调多层电容器中的每一个的厚度在所述可调多层电容器阵列的长度方向上延伸,并且其中所述可调多层电容器配置为通过向所述可调多层电容器阵列施加DC偏置电压而具有可调电容。31. An adjustable multilayer capacitor array comprising a plurality of adjustable multilayer capacitors connected in parallel, wherein the adjustable multilayer capacitor array has a horizontally stacked configuration, wherein the thickness of each of the plurality of adjustable multilayer capacitors extends in the length direction of the adjustable multilayer capacitor array, and wherein the adjustable multilayer capacitors are configured to have adjustable capacitance by applying a DC bias voltage to the adjustable multilayer capacitor array. 32.如权利要求31所述的可调多层电容器阵列,还包括:32. The adjustable multilayer capacitor array of claim 31, further comprising: 至少一个不可调多层电容器,其与所述多个可调多层电容器并联连接。At least one non-adjustable multilayer capacitor is connected in parallel with the plurality of adjustable multilayer capacitors. 33.如权利要求31所述的可调多层电容器阵列,其中所述多个可调多层电容器中的每一个包括:33. The adjustable multilayer capacitor array of claim 31, wherein each of the plurality of adjustable multilayer capacitors comprises: 与第一有源终端电接触的第一有源电极;The first active electrode that is in electrical contact with the first active terminal; 与第二有源终端电接触的第二有源电极;The second active electrode is in electrical contact with the second active terminal; 与第一DC偏置终端电接触的第一DC偏置电极;The first DC bias electrode is in electrical contact with the first DC bias terminal; 与第二DC偏置终端电接触的第二DC偏置电极;以及The second DC bias electrode is in electrical contact with the second DC bias terminal; and 设置在所述第一有源电极和所述第二有源电极与所述第一偏置电极和所述第二偏置电极之间的多个电介质层,Multiple dielectric layers are disposed between the first active electrode and the second active electrode and between the first bias electrode and the second bias electrode. 其中所述电介质层的至少一部分包含可调电介质材料,所述可调电介质材料在跨所述第一DC偏置电极和所述第二DC偏置电极施加所述所施加的DC电压时呈现可变介电常数。At least a portion of the dielectric layer comprises an tunable dielectric material that exhibits a variable dielectric constant when the applied DC voltage is applied across the first DC bias electrode and the second DC bias electrode. 34.如权利要求33所述的可调多层电容器阵列,其中:34. The adjustable multilayer capacitor array as described in claim 33, wherein: 所述多个可调多层电容器中的每一个的第一DC偏置电极沿着所述可调多层电容器阵列的底表面设置;并且The first DC bias electrode of each of the plurality of adjustable multilayer capacitors is disposed along the bottom surface of the adjustable multilayer capacitor array; and 所述多个可调多层电容器中的每一个的第二DC偏置电极沿着所述可调多层电容器阵列的顶表面设置。The second DC bias electrode of each of the plurality of adjustable multilayer capacitors is disposed along the top surface of the adjustable multilayer capacitor array. 35.如权利要求33所述的可调多层电容器阵列,其中:35. The adjustable multilayer capacitor array as described in claim 33, wherein: 所述多个可调多层电容器中的每一个的第一DC偏置电极沿着所述可调多层电容器阵列的底表面设置;并且The first DC bias electrode of each of the plurality of adjustable multilayer capacitors is disposed along the bottom surface of the adjustable multilayer capacitor array; and 所述多个可调多层电容器中的每一个的第二DC偏置电极沿着所述可调多层电容器阵列的底表面设置。The second DC bias electrode of each of the plurality of adjustable multilayer capacitors is disposed along the bottom surface of the adjustable multilayer capacitor array.
HK42024087965.0A 2017-10-02 2024-02-29 High capacitance tunable multilayer capacitor and array HK40100917A (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US62/566,848 2017-10-02
US62/569,757 2017-10-09

Publications (1)

Publication Number Publication Date
HK40100917A true HK40100917A (en) 2024-05-10

Family

ID=

Similar Documents

Publication Publication Date Title
JP7546541B2 (en) Voltage Tunable Multilayer Capacitor
CN111433870B (en) High capacitance tunable multilayer capacitor and array
CN102087918B (en) Variable capacitance device
JP2023110020A (en) High voltage tunable multilayer capacitor
JP7706507B2 (en) System and method for controlling a voltage adjustable stacked capacitor - Patents.com
HK40100917A (en) High capacitance tunable multilayer capacitor and array
HK40026709A (en) High capacitance tunable multilayer capacitor and array
HK40026709B (en) High capacitance tunable multilayer capacitor and array
HK40089581A (en) High voltage tunable multilayer capacitor
TW202226746A (en) System and method for mixing radiofrequency signals
HK40022348A (en) High voltage tunable multilayer capacitor
HK40050736B (en) System and method for controlling a voltage tunable multilayer capacitor
HK40050736A (en) System and method for controlling a voltage tunable multilayer capacitor
HK1256200B (en) Voltage tunable multilayer capacitor
KR102057915B1 (en) Multilayer capacitor