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HK1229291B - Embossing tool and method for preparation thereof - Google Patents

Embossing tool and method for preparation thereof Download PDF

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Publication number
HK1229291B
HK1229291B HK17103218.1A HK17103218A HK1229291B HK 1229291 B HK1229291 B HK 1229291B HK 17103218 A HK17103218 A HK 17103218A HK 1229291 B HK1229291 B HK 1229291B
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Hong Kong
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gold
alloy
embossing
layer
mold
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HK17103218.1A
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Chinese (zh)
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HK1229291A1 (en
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Y-M.康
D.Q.礼
Y.李
D.A.舒尔茨
H.刘
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伊英克公司
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Publication of HK1229291A1 publication Critical patent/HK1229291A1/en
Publication of HK1229291B publication Critical patent/HK1229291B/en

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Description

压花工具及其制备方法Embossing tool and preparation method thereof

技术领域Technical Field

本发明涉及一种压花(embossing)工具,一种用于制备这种压花工具的组件,和一种用于制备这种压花工具的方法。The present invention relates to an embossing tool, an assembly for producing such an embossing tool, and a method for producing such an embossing tool.

背景技术Background Art

压花工具通常由镍、铜、合金或其它类型的复合材料制成。镍是最广泛使用的用于压花机制造的材料。Embossing tools are usually made of nickel, copper, alloys or other types of composite materials. Nickel is the most widely used material for embossing machine manufacturing.

存在一些与当前可得的压花工具有关的问题,尤其是压花后固化的材料或热压花的材料从压花工具的释放不完全。There are a number of problems associated with currently available embossing tools, particularly incomplete release of material that solidifies after embossing or heat embossed material from the embossing tool.

有许多用于使压花工具的表面改性以降低压花工具的表面与固化的或热压花的材料之间的粘附力的方法。这些方法可包括硅烷涂布、硅氧烷树脂涂布、PTFE(聚四氟乙烯)涂布或镍-PTFE复合镀敷。不幸的是,它们全部都不能得到令人满意的结果。There are many methods for modifying the surface of embossing tools to reduce the adhesion between the surface of the embossing tool and the cured or heat-embossed material. These methods may include silane coating, silicone resin coating, PTFE (polytetrafluoroethylene) coating, or nickel-PTFE composite plating. Unfortunately, none of them can produce satisfactory results.

可通过湿涂将硅氧烷树脂和PTFE施加到压花工具的表面。然而,在干燥和固化后,在微结构表面上的涂层的厚度均匀性差,这可能改变在压花工具上得到的微结构的形状。Silicone resin and PTFE can be applied to the surface of the embossing tool by wet coating. However, after drying and curing, the thickness uniformity of the coating on the microstructure surface is poor, which may change the shape of the microstructure obtained on the embossing tool.

当压花工具的表面上的微结构具有高的深宽比(aspect ratio)时,通过物理气相沉积(PVD)或化学气相沉积(CVD)的PTFE涂层已经表现出分散能力差,还表现出覆盖不均匀。此外,PTFE涂层的耐久性和机械强度差是另外的顾虑,尤其是如果压花工具需要广泛地用于大量生产时。When the microstructures on the surface of the embossing tool have a high aspect ratio, PTFE coatings deposited by physical vapor deposition (PVD) or chemical vapor deposition (CVD) have shown poor dispersion and uneven coverage. In addition, the poor durability and mechanical strength of the PTFE coating are additional concerns, especially if the embossing tool is to be widely used in mass production.

可通过电镀或化学镀(electro-less plating)工艺将镍-PTFE复合涂层施加到压花工具的表面。然而,最小的涂层厚度通常是几微米。因此,如果压花工具在其表面上具有小尺寸的微结构,尤其是窄槽,那么这种涂层可能彻底改变微结构的轮廓和深宽比,使得压花工作困难得多。Nickel-PTFE composite coatings can be applied to the surface of embossing tools by electroplating or electroless plating. However, the minimum coating thickness is typically several micrometers. Therefore, if the embossing tool has small-scale microstructures on its surface, especially narrow grooves, such coatings can drastically change the microstructure's profile and aspect ratio, making embossing much more difficult.

公布的第2016/0059442号美国专利申请和第104129779号台湾申请描述了一种在其表面上具有微结构的压花工具,使得用贵金属或贵金属合金涂布微结构的表面。该工具是通过首先使用常规光刻技术形成微结构,然后用贵金属或贵金属合金涂布这些微结构制备的。本发明涉及用于形成压花工具的该方法的变型,和涉及在该方法的过程中制备的结构。Published U.S. Patent Application No. 2016/0059442 and Taiwan Patent Application No. 104129779 describe an embossing tool having a microstructure on its surface, wherein the microstructured surface is coated with a precious metal or precious metal alloy. The tool is produced by first forming the microstructure using conventional photolithographic techniques and then coating these microstructures with a precious metal or precious metal alloy. The present invention relates to variations of this method for forming the embossing tool and to structures produced during this method.

发明内容Summary of the Invention

因此,本发明提供了一种用于制备压花工具的方法,所述方法包括:Therefore, the present invention provides a method for preparing an embossing tool, the method comprising:

a)形成具有限定所述压花工具的外形的非平面模具表面的模具;a) forming a mold having a non-planar mold surface defining the outer shape of the embossing tool;

b)在所述模具表面上涂布金或其合金层;b) coating a layer of gold or its alloy on the surface of the mold;

c)在所述金或其合金层上镀敷贱金属(base metal),以形成具有远离所述模具表面的基本上平整的表面的贱金属层;和c) plating a base metal on the gold or alloy layer to form a base metal layer having a substantially flat surface away from the mold surface; and

d)从所述金或其合金层和所述贱金属层移除所述模具,以形成一侧具有三维结构而另一侧具有基本上平整的表面的压花工具。d) removing the mold from the gold or alloy thereof layer and the base metal layer to form an embossing tool having a three-dimensional structure on one side and a substantially flat surface on the other side.

在一个实施方案中,随后将步骤d)中制备的所述压花工具包裹在滚筒上。所述模具可以通过以下形成:在基材上涂布光刻胶材料,将所述光刻胶材料暴露于辐射,和移除所述光刻胶的曝光的区域或未曝光的区域。In one embodiment, the embossing tool prepared in step d) is then wrapped around a roller.The mold can be formed by coating a photoresist material on a substrate, exposing the photoresist material to radiation, and removing either the exposed or unexposed areas of the photoresist.

本发明还提供了一种用于制备压花工具的组件,所述组件包括:The present invention also provides an assembly for preparing an embossing tool, the assembly comprising:

具有非平面模具表面的模具;molds having non-planar mold surfaces;

设置在所述模具表面上并且贴合所述模具表面的金或其合金层;和a layer of gold or its alloy disposed on the mold surface and conforming to the mold surface; and

远离所述模具表面的在所述金或其合金层的相对侧上的贱金属层,所述贱金属层具有与所述金或其合金层接触的三维结构,和在其远离所述金或其合金层的一侧上的基本上平整的表面。A base metal layer on the opposite side of the gold or alloy layer away from the mold surface, the base metal layer having a three-dimensional structure in contact with the gold or alloy layer and a substantially flat surface on the side away from the gold or alloy layer.

附图说明BRIEF DESCRIPTION OF THE DRAWINGS

图1A和图1B示出了一般的压花工艺。1A and 1B illustrate a general embossing process.

图2示出了用于在压花工具的表面上形成微结构的现有技术的方法。FIG. 2 shows a prior art method for forming a microstructure on the surface of an embossing tool.

图3是贯穿如前文提到的US2016/0059442中描述的现有技术的压花工具的横截面,所述压花工具具有三维微结构和镀敷于其表面上的贵金属(例如金)。FIG3 is a cross-section through a prior art embossing tool as described in the aforementioned US 2016/0059442, having a three-dimensional microstructure and a precious metal (eg, gold) plated on its surface.

图4示出了前文提到的US2016/0059442中描述的用于形成压花工具的方法。FIG4 illustrates the method for forming an embossing tool described in the aforementioned US 2016/0059442.

图5示出了本发明的用于形成压花工具的方法。FIG. 5 illustrates the method of the present invention for forming an embossing tool.

图6A是显示由使用常规压花工具的压花工艺制造的物体的表面的照片。FIG. 6A is a photograph showing the surface of an object produced by an embossing process using a conventional embossing tool.

图6B是显示由使用本发明的压花工具的压花工艺制造的物体的表面的照片。FIG. 6B is a photograph showing the surface of an object produced by an embossing process using the embossing tool of the present invention.

具体实施方式DETAILED DESCRIPTION

图1A和图1B示出了使用压花工具(11)的压花工艺,在压花工具(11)表面上有三维微结构(被圈出的)。如图1B中所示,在将压花工具(11)施加到可固化压花组合物或可热压花材料(12),并且所述压花组合物固化(例如通过辐射)或可热压花材料通过热和压力变得有压花之后,将固化的或热压花的材料从压花工具释放(见图1B)。然而,使用常规压花工具时,由于固化的或热压花的材料与压花工具的表面之间的不希望的强粘附力,固化的或热压花的材料有时不能从工具完全释放。在这种情况下,可能有一些固化的或热压花的材料被转移至压花工具的表面或粘在压花工具的表面上,在由该工艺形成的物体上留下不均匀的表面。Figures 1A and 1B illustrate an embossing process using an embossing tool (11) having a three-dimensional microstructure (circled) on its surface. As shown in Figure 1B, after the embossing tool (11) is applied to a curable embossing composition or heat-embossable material (12), and the embossing composition is cured (e.g., by radiation) or the heat-embossable material is embossed by heat and pressure, the cured or heat-embossed material is released from the embossing tool (see Figure 1B). However, when using conventional embossing tools, the cured or heat-embossed material is sometimes not fully released from the tool due to undesirably strong adhesion between the cured or heat-embossed material and the surface of the embossing tool. In such cases, some of the cured or heat-embossed material may be transferred to or adhere to the surface of the embossing tool, leaving an uneven surface on the object formed by the process.

如果该物体形成于诸如透明导电层或聚合物层的支撑层上,则该问题甚至更明显。如果固化的或热压花的材料与支撑层之间的粘附力比固化的或热压花的材料与压花工具的表面之间的粘附力更弱,那么固化的或热压花的材料从压花工具释放的过程就可能导致物体从支撑层分离。This problem is even more pronounced if the object is formed on a support layer, such as a transparent conductive layer or polymer layer. If the adhesion between the cured or heat-embossed material and the support layer is weaker than the adhesion between the cured or heat-embossed material and the surface of the embossing tool, then the release of the cured or heat-embossed material from the embossing tool may cause the object to separate from the support layer.

在一些情况下,物体可形成于堆叠层上,而在这种情况下,如果任何两个相邻的层之间的粘附力比固化的或热压花的材料与压花工具的表面之间的粘附力更弱,那么固化的或热压花的材料从压花工具释放的过程就可以导致这两个层之间的分裂。In some cases, the object may be formed from stacked layers, in which case the release of the cured or heat-embossed material from the embossing tool may result in a split between any two adjacent layers if the adhesion between the two layers is weaker than the adhesion between the cured or heat-embossed material and the surface of the embossing tool.

当固化的压花组合物或热压花的材料不能很好地贴附至某些支撑层时,上文描述的这些问题尤其是被顾虑的。例如,如果支撑层是聚合物层,则在它们中的一个是亲水的而另一个是疏水的情况下,聚合物层与固化的或热压花的压花组合物之间的粘附力弱。因此,优选的是,压花组合物和支撑层两者都是疏水的,或者两者都是亲水的。These issues are particularly concerning when the cured embossing composition or heat-embossed material does not adhere well to certain support layers. For example, if the support layer is a polymer layer, then if one of the layers is hydrophilic and the other is hydrophobic, the adhesion between the polymer layer and the cured or heat-embossed embossing composition is weak. Therefore, it is preferred that both the embossing composition and the support layer be hydrophobic or both be hydrophilic.

作为实例,用于形成压花层或支撑层的合适的疏水组合物可以包括热塑性材料、热固性材料或其前驱物。热塑性材料或热固性材料前驱物的实例可以是多官能丙烯酸酯或甲基丙烯酸酯、多官能乙烯基醚、多官能环氧化物和其低聚物或聚合物。As an example, suitable hydrophobic compositions for forming the embossing layer or the support layer may include thermoplastic materials, thermosetting materials, or precursors thereof. Examples of thermoplastic materials or thermosetting material precursors may be multifunctional acrylates or methacrylates, multifunctional vinyl ethers, multifunctional epoxides, and oligomers or polymers thereof.

用于形成压花层或支撑层的合适的亲水性组合物可以包括极性低聚物或聚合物材料。如在第7,880,958号美国专利中所描述的,这样的极性低聚物或聚合物材料可以选自由以下组成的组:具有至少一个诸如硝基(-NO2)、羟基(-OH)、羧基(-COO)、烷氧基(-OR,其中R是烷基)、卤素(例如氟、氯、溴或碘)、氰基(-CN)和磺酸基(sultanate)(-SO3)等的基团的低聚物或聚合物。极性聚合物材料的玻璃化转变温度优选在约100℃以下,且更优选在约60℃以下。合适的极性低聚物或聚合物材料的具体实例可包括但不限于,聚乙烯醇、聚丙烯酸、聚(甲基丙烯酸2-羟基乙酯)、多羟基官能化的聚酯丙烯酸酯(诸如BOE1025,BomarSpecialties Co,Winsted,CT)或烷氧基化丙烯酸酯,诸如乙氧基化壬基苯酚丙烯酸酯(例如,SR504,Sartomer Company),乙氧基化三羟甲基丙烷三丙烯酸酯(例如,SR9035,Sartomer Company)或乙氧基化季戊四醇四丙烯酸酯(例如,来自Sartomer Company的SR494)。Suitable hydrophilic compositions for forming the embossing layer or the support layer may include polar oligomers or polymers. As described in U.S. Pat. No. 7,880,958, such polar oligomers or polymers may be selected from the group consisting of oligomers or polymers having at least one group such as a nitro group (—NO 2 ), a hydroxyl group (—OH), a carboxyl group (—COO), an alkoxy group (—OR, wherein R is an alkyl group), a halogen group (e.g., fluorine, chlorine, bromine, or iodine), a cyano group (—CN), and a sulfonic acid group (—SO 3 ). The glass transition temperature of the polar polymer material is preferably below about 100° C., and more preferably below about 60° C. Specific examples of suitable polar oligomeric or polymeric materials can include, but are not limited to, polyvinyl alcohol, polyacrylic acid, poly(2-hydroxyethyl methacrylate), polyhydroxy-functionalized polyester acrylates (such as BOE 1025, Bomar Specialties Co., Winsted, CT), or alkoxylated acrylates, such as ethoxylated nonylphenol acrylate (e.g., SR504, Sartomer Company), ethoxylated trimethylolpropane triacrylate (e.g., SR9035, Sartomer Company), or ethoxylated pentaerythritol tetraacrylate (e.g., SR494 from Sartomer Company).

方法1:Method 1:

图2示出了一种用于在压花工具的表面上形成微结构的现有技术的方法。FIG. 2 shows a prior art method for forming a microstructure on the surface of an embossing tool.

本文使用的术语“压花工具”可以是压花套筒(embossing sleeve)、压花滚筒(embossing drum)或其它形式的压花工具。虽然仅有压花套筒的制备示于图2中,但该方法也可以用于制备压花滚筒。术语“压花”滚筒或套筒指的是在其外表面上具有三维微结构的滚筒或套筒。使用术语“压花滚筒”,以将其与在外表面上不具有三维微结构的平滑滚筒(plain drum)区别开。As used herein, the term "embossing tool" may refer to an embossing sleeve, an embossing drum, or other forms of embossing tool. Although only the preparation of an embossing sleeve is shown in FIG2 , the method can also be used to prepare an embossing drum. The term "embossing" drum or sleeve refers to a drum or sleeve having a three-dimensional microstructure on its outer surface. The term "embossing drum" is used to distinguish it from a plain drum that does not have a three-dimensional microstructure on its outer surface.

可以直接将压花滚筒用作压花工具。当将压花套筒用于压花时,通常将其安装在平滑滚筒上,以允许压花套筒转动。The embossing cylinder can be used directly as the embossing tool. When an embossing sleeve is used for embossing, it is usually mounted on a smooth cylinder to allow the embossing sleeve to rotate.

压花滚筒或套筒(21)通常是由导电材料形成的,所述导电材料如金属(例如铝、铜、锌、镍、铬、钛或钴等)、由上述金属中的任何金属得到的合金、或不锈钢。可以使用不同的材料形成滚筒或套筒。例如,滚筒或套筒的中心可以由不锈钢形成,并且将镍层夹在不锈钢和最外层之间,最外层可以是铜层。The embossing roller or sleeve (21) is typically formed of a conductive material such as a metal (e.g., aluminum, copper, zinc, nickel, chromium, titanium, or cobalt), an alloy derived from any of the above metals, or stainless steel. A variety of materials may be used to form the roller or sleeve. For example, the center of the roller or sleeve may be formed of stainless steel, with a nickel layer sandwiched between the stainless steel and an outermost layer, which may be a copper layer.

供选择地,所述压花滚筒或套筒(21)可由其外表面上具有导电涂层或导电种晶层(seed layer)的非导电材料形成。Alternatively, the embossing cylinder or sleeve (21) may be formed from a non-conductive material having a conductive coating or a conductive seed layer on its outer surface.

在滚筒或套筒(21)的外表面上涂布感光材料(22)之前,如图2的步骤B中所示,可使用精密研磨和抛光以确保滚筒或套筒的外表面的光滑度。Before coating the photosensitive material (22) on the outer surface of the drum or sleeve (21), as shown in step B of FIG. 2, precision grinding and polishing may be used to ensure the smoothness of the outer surface of the drum or sleeve.

在步骤B中,将感光材料(22),例如光刻胶,涂布在滚筒或套筒(21)的外表面上。感光材料可以是正型(positive tone)、负型(negative tone)或双重型(dual tone)。感光材料也可以是化学增幅型光刻胶(chemically amplified photoresist)。可以使用浸涂、喷涂或环涂(ring coating)进行涂布。在干燥和/或烘烤后,感光材料经历暴露于辐射源,如步骤C中所示。In step B, a photosensitive material (22), such as a photoresist, is applied to the outer surface of the roller or sleeve (21). The photosensitive material can be positive tone, negative tone, or dual tone. The photosensitive material can also be a chemically amplified photoresist. Coating can be performed using dip coating, spray coating, or ring coating. After drying and/or baking, the photosensitive material is exposed to a radiation source, as shown in step C.

供选择地,感光材料(22)可以是干膜光刻胶(其通常是有市售的),其被层压到滚筒或套筒(21)的外表面上。当使用干膜时,也可将其暴露于如下文所描述的辐射源。Alternatively, the photosensitive material (22) may be a dry film photoresist (which is commonly available commercially) which is laminated to the outer surface of the cylinder or sleeve (21). When a dry film is used, it may also be exposed to a radiation source as described below.

在步骤C中,使用合适的光源(23),例如IR、UV、电子束或激光,以对涂布于滚筒或套筒(21)上的感光材料或层压于滚筒或套筒(21)上的干膜光刻胶(22)进行曝光。光源可以是连续光或者脉冲光。任选地使用光掩模(24)以限定待形成的三维微结构。根据微结构,曝光可以是步进式、连续式或其组合。In step C, a suitable light source (23), such as IR, UV, electron beam or laser, is used to expose the photosensitive material coated on the roller or sleeve (21) or the dry film photoresist (22) laminated on the roller or sleeve (21). The light source can be continuous light or pulsed light. A photomask (24) is optionally used to define the three-dimensional microstructure to be formed. Depending on the microstructure, the exposure can be step-by-step, continuous or a combination thereof.

曝光之后显影之前,感光材料(22)可经历曝光后处理,例如烘烤。根据感光材料的类型,通过使用显影剂将移除曝光的区域或未曝光的区域。显影之后沉积(例如电镀、化学镀、物理气相沉积、化学气相沉积或溅射沉积)之前,在其外表面上具有图案化感光材料(25)的滚筒或套筒(如步骤D中所示)可经历烘烤或全面曝光。图案化感光材料的厚度优选大于待形成的三维微结构的深度或高度。After exposure and before development, the photosensitive material (22) may undergo post-exposure treatment, such as baking. Depending on the type of photosensitive material, the exposed areas or the unexposed areas will be removed by using a developer. After development and before deposition (e.g., electroplating, chemical plating, physical vapor deposition, chemical vapor deposition, or sputtering deposition), the roller or sleeve having the patterned photosensitive material (25) on its outer surface (as shown in step D) may undergo baking or full exposure. The thickness of the patterned photosensitive material is preferably greater than the depth or height of the three-dimensional microstructure to be formed.

可以将金属或合金(例如,镍、钴、铬、铜、锌或由上述金属中的任何金属得到的合金)电镀和/或化学镀于滚筒或套筒上。将镀敷材料(26)沉积在滚筒或套筒的外表面上未被图案化感光材料覆盖的区域中。沉积厚度优选小于感光材料的厚度,如步骤E中所示。通过调节镀敷条件,例如阳极与阴极(即滚筒或套筒)之间的距离(如果使用电镀),滚筒或套筒的转动速度和/或镀敷溶液的循环,可将沉积物在整个滚筒或套筒区域上的厚度变化控制为小于1%。A metal or alloy (e.g., nickel, cobalt, chromium, copper, zinc, or alloys derived from any of the foregoing metals) may be electroplated and/or electrolessly plated onto the drum or sleeve. The plating material (26) is deposited on the outer surface of the drum or sleeve in areas not covered by the patterned photosensitive material. The deposited thickness is preferably less than the thickness of the photosensitive material, as shown in step E. By adjusting the plating conditions, such as the distance between the anode and cathode (i.e., the drum or sleeve) (if electroplating is used), the rotation speed of the drum or sleeve, and/or the circulation of the plating solution, the thickness variation of the deposit over the entire drum or sleeve area can be controlled to be less than 1%.

供选择地,在使用电镀以沉积镀敷材料(26)的情况下,通过在阴极(即滚筒或套筒)与阳极之间插入非导电厚度均匀器(thickness uniformer),可以控制沉积物在滚筒或套筒的整个表面上的厚度变化,如第8,114,262号美国专利中所描述的。Alternatively, where electroplating is used to deposit the plating material (26), the thickness variation of the deposit across the surface of the roller or sleeve can be controlled by inserting a non-conductive thickness uniformer between the cathode (i.e., roller or sleeve) and the anode, as described in U.S. Patent No. 8,114,262.

在镀敷后,可通过剥离剂(例如有机溶剂或水溶液)剥离图案化感光材料(25)。可以任选地采用精密抛光,以确保沉积物(26)在整个滚筒或套筒上的可接受的厚度变化和粗糙度。After plating, the patterned photosensitive material (25) can be stripped by a stripper (eg, an organic solvent or aqueous solution). Precision polishing can optionally be employed to ensure acceptable thickness variation and roughness of the deposit (26) across the drum or sleeve.

图2的步骤F示出了贯穿具有在其上形成的三维图案微结构的压花滚筒或套筒的横截面。Step F of FIG. 2 shows a cross section through an embossing cylinder or sleeve having a three-dimensional pattern of microstructures formed thereon.

如上述US2016/0059442中所述,已经发现,如果用贵金属或其合金涂布压花工具的表面,则压花工具可以具有改善的释放性能。换句话说,作为在压花工具的表面上形成三维微结构之后的后处理步骤,可以将贵金属或其合金(31)涂布于压花工具的整个表面上,如图3中所示。As described in the aforementioned US2016/0059442, it has been found that if the surface of the embossing tool is coated with a noble metal or an alloy thereof, the embossing tool can have improved release properties. In other words, as a post-processing step after forming a three-dimensional microstructure on the surface of the embossing tool, the noble metal or an alloy thereof (31) can be coated on the entire surface of the embossing tool, as shown in FIG3.

术语“贵金属”可以包括金、银、铂、钯和其它更不常见的金属,诸如钌、铑、锇或铱。在这些贵金属中,本发明人已经发现金及其合金在降低固化的或热压花的材料与压花工具的表面之间的粘附力方面是最有效的。当固化的或热压花的材料具有以下成分中的一种或多种时,该优点尤其明显:聚丙烯酸酯、聚甲基丙烯酸甲酯(PMMA)、聚甲基丙烯酸乙酯(PEMA)、聚碳酸脂(PC)、聚氯乙烯(PVC)、聚苯乙烯(PS)、聚酯、聚酰胺、聚氨酯、聚烯烃、聚乙烯醇缩丁醛和其共聚物。在这些固化的或热压花的材料中,特别优选基于丙烯酸酯或甲基丙烯酸酯的聚合物。The term "noble metal" may include gold, silver, platinum, palladium and other less common metals such as ruthenium, rhodium, osmium or iridium. Of these noble metals, the inventors have found that gold and its alloys are most effective in reducing the adhesion between the cured or hot-embossed material and the surface of the embossing tool. This advantage is particularly evident when the cured or hot-embossed material has one or more of the following components: polyacrylates, polymethyl methacrylate (PMMA), polyethyl methacrylate (PEMA), polycarbonate (PC), polyvinyl chloride (PVC), polystyrene (PS), polyesters, polyamides, polyurethanes, polyolefins, polyvinyl butyral and copolymers thereof. Of these cured or hot-embossed materials, polymers based on acrylates or methacrylates are particularly preferred.

在本发明中,也可以使用一种或多种贵金属和非贵金属的合金。合金中合适的非贵金属可以包括但不限于,铜、锡、钴、镍、铁、铟、锌或钼。在合金中,也可以存在多于一种的贵金属和/或多于一种的非贵金属。合金中非贵金属的总重量百分比可以在0.001%-50%的范围内,优选在0.001%-10%的范围内。In the present invention, alloys of one or more noble metals and non-noble metals may also be used. Suitable non-noble metals in the alloys may include, but are not limited to, copper, tin, cobalt, nickel, iron, indium, zinc, or molybdenum. More than one noble metal and/or more than one non-noble metal may also be present in the alloy. The total weight percentage of non-noble metals in the alloy may range from 0.001% to 50%, preferably from 0.001% to 10%.

可以通过电镀、化学沉积、溅射涂膜或气相沉积实现贵金属或合金的涂布。在一个实施方案中,可以在30-70℃的温度下和在3-8的pH范围内使用基于氰化物的中性金、酸性硬金或金冲击镀电解质。可以在40-70℃的温度下和在0.1-3的pH范围内用酸性氯化物电解质镀敷铂和钯。一些贵金属或其合金的碱性电解质可商购得到,且也可用于本发明。The coating of precious metals or alloys can be achieved by electroplating, chemical deposition, sputter coating, or vapor deposition. In one embodiment, a cyanide-based neutral gold, acidic hard gold, or gold strike plating electrolyte can be used at a temperature of 30-70°C and a pH range of 3-8. Platinum and palladium can be plated using an acidic chloride electrolyte at a temperature of 40-70°C and a pH range of 0.1-3. Alkaline electrolytes for some precious metals or their alloys are commercially available and can also be used in the present invention.

表面上的贵金属或其合金优选具有次微米级厚度,因此其不导致对微结构的轮廓的任何显著改变。贵金属或其合金的厚度可以在0.001-10微米的范围内,优选在0.001-3微米的范围内。The noble metal or its alloy on the surface preferably has a submicron thickness so that it does not cause any significant changes to the profile of the microstructure. The thickness of the noble metal or its alloy may be in the range of 0.001-10 microns, preferably in the range of 0.001-3 microns.

方法2:Method 2:

供选择地,如上述US2016/0059442中所描述的,三维微结构可以在平整基材上形成,如图4中所示。Alternatively, as described in the aforementioned US 2016/0059442, a three-dimensional microstructure may be formed on a flat substrate, as shown in FIG. 4 .

在图4的步骤A中,将感光材料(42)涂布于基材层(41)(例如玻璃基材)上。如上所述,感光材料可以是正型、负型或双重型。感光材料也可以是化学增幅型光刻胶。可以使用浸涂、喷涂、狭缝模头涂布或旋转涂布进行涂布。在干燥和/或烘烤之后,使感光材料通过光掩模(未示出)暴露于合适的光源(未示出)。In step A of FIG4 , a photosensitive material (42) is applied to a substrate layer (41) (e.g., a glass substrate). As described above, the photosensitive material can be positive, negative, or dual. The photosensitive material can also be a chemically amplified photoresist. Coating can be performed using dip coating, spray coating, slot die coating, or spin coating. After drying and/or baking, the photosensitive material is exposed to a suitable light source (not shown) through a photomask (not shown).

供选择地,感光材料(42)可以是被层压于基材(41)上的干膜光刻胶(其通常是可商购的)。也可将干膜暴露于如上所述的光源。Alternatively, the photosensitive material (42) can be a dry film photoresist (which is commonly available commercially) laminated onto the substrate (41). The dry film can also be exposed to a light source as described above.

在步骤B中,在曝光后,根据感光材料的类型,通过使用显影剂将移除感光材料的曝光区域或未曝光区域。在显影后在步骤C之前,具有剩余的感光材料(42)的基材层(41)可以经历烘烤或全面曝光。剩余的感光材料的厚度应当与待形成的三维微结构的深度或高度相同。In step B, after exposure, the exposed or unexposed areas of the photosensitive material are removed by using a developer, depending on the type of photosensitive material. After development, the substrate layer (41) with the remaining photosensitive material (42) can be baked or fully exposed before step C. The thickness of the remaining photosensitive material should be the same as the depth or height of the three-dimensional microstructure to be formed.

在步骤C中,将导电种晶层(43)涂布于剩余的感光材料(42)上和基材(41)上未被感光材料占据的区域中。导电种晶层通常由银形成。In step C, a conductive seed layer (43) is applied over the remaining photosensitive material (42) and the areas on the substrate (41) not occupied by the photosensitive material. The conductive seed layer is typically formed of silver.

在步骤D中,将金属或合金(44)(例如,镍、钴、铬、铜、锌或由上述金属中的任何金属得到的合金)电镀和/或化学镀于被导电种晶层覆盖的表面上,并且进行镀敷工艺直到在图案化的感光材料上有足够的镀敷的材料厚度(h)。图4中的厚度(h)优选为25-5000微米,且更优选为25-1000微米。In step D, a metal or alloy (44) (e.g., nickel, cobalt, chromium, copper, zinc, or alloys derived from any of the above metals) is electroplated and/or electrolessly plated on the surface covered by the conductive seed layer, and the plating process is performed until a sufficient plated material thickness (h) is formed on the patterned photosensitive material. The thickness (h) in FIG4 is preferably 25-5000 microns, and more preferably 25-1000 microns.

在镀敷后,将镀敷的材料(44)与被剥落的基材层(41)分离。感光材料(42)连同导电种晶层(43)一起被移除。可以通过剥离剂(例如有机溶剂或水溶液)将感光材料移除。可以通过酸性溶液(例如含硫/含氮混合物)或可商购的化学剥离剂将导电种晶层(43)移除,只留下一侧具有三维结构且另一侧平整的金属片(44)。After plating, the plated material (44) is separated from the stripped substrate layer (41). The photosensitive material (42) is removed along with the conductive seed layer (43). The photosensitive material can be removed using a stripper (e.g., an organic solvent or aqueous solution). The conductive seed layer (43) can be removed using an acidic solution (e.g., a sulfur/nitrogen mixture) or a commercially available chemical stripper, leaving only a metal sheet (44) with a three-dimensional structure on one side and a flat surface on the other.

可将精密抛光应用于金属片(44),此后,可以直接使用平滑的垫片(shim)用于压花。供选择地,可以将其安装(例如包裹)在外表面上具有三维微结构的滚筒上,以形成压花工具。A precision polish can be applied to the metal sheet (44), after which the smooth shim can be used directly for embossing. Alternatively, it can be mounted (eg wrapped) on a roller having a three-dimensional microstructure on its outer surface to form an embossing tool.

如上文所述,贵金属或其合金最终被涂布在压花工具的整个表面上。如上所述,金或其合金相比其它贵金属和合金是优选的。As mentioned above, the precious metal or its alloy is finally coated on the entire surface of the embossing tool.As mentioned above, gold or its alloy is preferred over other precious metals and alloys.

方法3:Method 3:

图5示出了本发明的方法。该方法与图4的方法类似,但经过简化。图5的步骤A和步骤B与图4的相应步骤相同。然而,在图5的步骤C中,涂布金或其合金层(53)而不是诸如银的导电种晶层。FIG5 shows the method of the present invention. The method is similar to the method of FIG4 , but simplified. Steps A and B of FIG5 are the same as the corresponding steps of FIG4 . However, in step C of FIG5 , a layer of gold or its alloy (53) is applied instead of a conductive seed layer such as silver.

因此,在图5的步骤E中,在将镀敷的材料(54)从基材(51)分离之后,只有感光材料(52)需要被移除,金或合金涂层(53)与在一侧上具有三维结构,而另一侧上是平整表面的金属片(54)保留在一起。Therefore, in step E of Figure 5, after separating the plated material (54) from the substrate (51), only the photosensitive material (52) needs to be removed, and the gold or alloy coating (53) remains together with the metal sheet (54) having a three-dimensional structure on one side and a flat surface on the other side.

可以直接使用金属片用于压花。供选择地,可将其安装于滚筒上。在本发明的该方法中,不需要有单独的涂布步骤以在压花工具的表面上形成金或合金层。The metal sheet can be used directly for embossing. Alternatively, it can be mounted on a roller. In the method of the present invention, there is no need for a separate coating step to form a gold or alloy layer on the surface of the embossing tool.

本发明的压花工具适用于如第6,930,818号美国专利中所描述的微压花工艺。微压花工艺制造被间隔壁分开的杯状微单元,诸如MICROCUPS(注册商标)。这些微单元可填充有包含分散于溶剂或溶剂混合物中的带电粒子的电泳流体。填充的微单元形成电泳显示膜。当夹在电极层之间时,电泳显示膜形成电泳装置。The embossing tool of the present invention is suitable for use in a micro-embossing process as described in U.S. Patent No. 6,930,818. The micro-embossing process produces cup-shaped microcells separated by partitions, such as MICROCUPS (registered trademark). These microcells can be filled with an electrophoretic fluid containing charged particles dispersed in a solvent or solvent mixture. The filled microcells form an electrophoretic display film. When sandwiched between electrode layers, the electrophoretic display film forms an electrophoretic device.

实施例Example

实施例1Example 1

在该实施例中,制备了两种压花工具(即阳模)。这些模具依据上文所述的方法中的一种由镍形成。In this example, two embossing tools (ie, male dies) were prepared. These dies were formed from nickel according to one of the methods described above.

这些镍模具中的一种的表面未处理。在50℃的温度和pH5下,进一步用基于氰化物的镀金电解质对形成的其它镍模具进行电镀,以在其表面上得到具有0.5微米的厚度的金涂层。The surface of one of these nickel molds was not treated. The other nickel mold formed was further electroplated with a cyanide-based gold plating electrolyte at a temperature of 50° C. and pH 5 to obtain a gold coating having a thickness of 0.5 μm on the surface thereof.

为了测试这两种压花模具,制备基于水的聚合物层流体和压花组合物。聚合物层流体是根据第7,880,958号美国专利制备的,并且其具有聚乙烯醇作为主要成分。该压花组合物是根据第7,470,386号美国专利制备的,并且其具有多官能丙烯酸酯作为主要成分。To test the two embossing dies, a water-based polymer layer fluid and an embossing composition were prepared. The polymer layer fluid was prepared according to U.S. Patent No. 7,880,958 and contained polyvinyl alcohol as a primary component. The embossing composition was prepared according to U.S. Patent No. 7,470,386 and contained a multifunctional acrylate as a primary component.

首先使用3号Meyer刮涂棒(drawdown bar)将聚合物流体涂布在PET(聚对苯二甲酸乙二醇酯)基材上。干燥的聚合物层具有0.5微米的厚度。The polymer fluid was first coated onto a PET (polyethylene terephthalate) substrate using a Meyer drawdown bar No. 3. The dried polymer layer had a thickness of 0.5 microns.

用甲乙酮(MEK)稀释压花组合物,然后将其涂在PET基材的聚合物层侧上,目标干燥厚度25微米。The embossing composition was diluted with methyl ethyl ketone (MEK) and then coated on the polymer layer side of the PET substrate with a target dry thickness of 25 microns.

使用这两种压花模具,在160°F(71℃)下在50psi(350kPa)的压力下用通过PET基材背面的UV曝光(0.068J/cm2,Fusion UV,D灯)分别地对涂层进行干燥和压花。Using both embossing dies, the coatings were dried and embossed separately with UV exposure (0.068 J/ cm2 , Fusion UV, D lamp) through the back side of the PET substrate at 160°F (71°C) under 50 psi (350 kPa) pressure.

图6A是通过使用镍压花模具制备的膜的表面的显微照片。可以看出,因为固化的材料与镍金属之间的强粘附力,得到的膜上的一些固化的材料已经被转移至镍模具或粘在镍模具上,在得到的膜上留下不均匀的表面。Fig. 6A is a micrograph of the surface of a film prepared by using a nickel embossing die. It can be seen that due to the strong adhesion between the solidified material and the nickel metal, some of the solidified material on the resulting film has been transferred to the nickel die or stuck to the nickel die, leaving an uneven surface on the resulting film.

使用镀金的镍模具时,固化的压花材料与金金属表面完全分开,在得到的膜上留下光滑的表面,如图6B中所示。这是由于以下事实:镀金的表面降低了模具表面与固化的材料之间的粘附力,使得模具更容易从固化的材料释放。When a gold-plated nickel mold was used, the solidified embossed material separated completely from the gold metal surface, leaving a smooth surface on the resulting film, as shown in Figure 6B. This is due to the fact that the gold-plated surface reduced the adhesion between the mold surface and the solidified material, making the mold easier to release from the solidified material.

实施例2Example 2

在该实施例中,制备了几种压花工具(即阳模)。这些模具根据上文所述的方法中的一种由镍形成。用与实施例1中使用的电解质浴(electrolyte bath)相同的电解质浴以0.5微米的金对形成的镍模具中的一种进一步进行电镀。In this example, several embossing tools (i.e., male molds) were prepared. These molds were formed from nickel according to one of the methods described above. One of the nickel molds was further electroplated with 0.5 microns of gold using the same electrolyte bath as used in Example 1.

对形成的镍模具中的三种进一步进行硅烷表面处理。就硅烷处理而言,将聚二甲基硅氧烷(Gelest,Inc.)添加到95%正丙醇和5%DI水的混合物中,预先用乙酸将该混合物调到pH4.5。分别制备0.25%、1%和2wt%的三种浓度的聚二甲基硅氧烷溶液。将镍模具分别浸入不同浓度的硅烷溶液中10分钟,然后在100℃下烘烤过夜,以在微结构的表面上得到硅烷涂层。Three of the resulting nickel molds were further subjected to silane surface treatment. For the silane treatment, polydimethylsiloxane (Gelest, Inc.) was added to a mixture of 95% n-propanol and 5% DI water, which had been previously adjusted to pH 4.5 with acetic acid. Three polydimethylsiloxane solutions were prepared at concentrations of 0.25%, 1%, and 2% by weight. The nickel molds were immersed in each of the silane solutions for 10 minutes and then baked at 100°C overnight to obtain a silane coating on the surface of the microstructures.

压花测试材料和条件与实施例1中所使用的测试材料和条件相同。使用镀金的镍模具时,所有的固化的压花材料完全地从金金属表面分离。然而,无论处理溶液中的聚二甲基硅氧烷浓度如何,得到的膜上的固化的压花材料多于约50%的区域已经被转移至经硅烷处理的镍模具表面或粘在经硅烷处理的镍模具表面上。The embossing test materials and conditions were the same as those used in Example 1. When using a gold-plated nickel mold, all of the cured embossed material completely separated from the gold metal surface. However, regardless of the polydimethylsiloxane concentration in the processing solution, more than about 50% of the area of the cured embossed material on the resulting film had been transferred to or adhered to the silane-treated nickel mold surface.

该实施例表明固化的材料从镀金的表面比从硅烷处理的表面更容易释放。This example demonstrates that the cured material releases more readily from a gold-plated surface than from a silane-treated surface.

Claims (15)

1.一种用于制备压花工具的方法,所述方法包括:1. A method for preparing embossing tools, the method comprising: a)形成具有限定所述压花工具的外形的非平面模具表面的模具;a) A mold having a non-planar mold surface that defines the shape of the embossing tool; b)在所述模具表面上沉积金或其合金层,其中所述金或其合金层具有0.5-10微米的厚度;b) Deposit a layer of gold or its alloy on the surface of the mold, wherein the gold or its alloy has a thickness of 0.5-10 micrometers; c)在所述金或其合金层上沉积贱金属,以形成具有远离所述模具表面的基本上平整的表面的贱金属层;和c) Depositing a base metal onto the gold or its alloy layer to form a base metal layer having a substantially flat surface away from the mold surface; and d)从所述金或其合金层和所述贱金属层移除所述模具,以形成一侧具有三维结构而另一侧具有基本上平整的表面的压花工具。d) Remove the mold from the gold or its alloy layer and the base metal layer to form an embossing tool with a three-dimensional structure on one side and a substantially flat surface on the other side. 2.根据权利要求1所述的方法,其中然后将步骤d)中制备的所述压花工具包裹在滚筒上。2. The method according to claim 1, wherein the embossing tool prepared in step d) is then wrapped around a roller. 3.根据权利要求1所述的方法,其中所述模具通过以下形成:在基材上涂布光刻胶材料,将所述光刻胶材料暴露于辐射,和移除所述光刻胶的曝光的区域或未曝光的区域。3. The method of claim 1, wherein the mold is formed by: coating a photoresist material on a substrate, exposing the photoresist material to radiation, and removing the exposed or unexposed areas of the photoresist. 4.根据权利要求1所述的方法,其中所述金合金包含金和以下中的一种或多种:铜、锡、钴、镍、铁、铟、锌和钼。4. The method of claim 1, wherein the gold alloy comprises gold and one or more of the following: copper, tin, cobalt, nickel, iron, indium, zinc, and molybdenum. 5.根据权利要求4所述的方法,其中所述合金中的非贵金属的总重量在0.001-50%的范围内。5. The method according to claim 4, wherein the total weight of non-precious metals in the alloy is in the range of 0.001-50%. 6.根据权利要求4所述的方法,其中所述合金中的非贵金属的总重量在0.001-10%的范围内。6. The method according to claim 4, wherein the total weight of non-precious metals in the alloy is in the range of 0.001-10%. 7.根据权利要求1所述的方法,其中所述金或其合金层具有0.5-3微米的厚度。7. The method of claim 1, wherein the gold or its alloy layer has a thickness of 0.5-3 micrometers. 8.根据权利要求1所述的方法,其中所述贱金属包括镍、钴、铬、铜和锌中的任一种或多种。8. The method of claim 1, wherein the base metal comprises one or more of nickel, cobalt, chromium, copper and zinc. 9.根据权利要求1所述的方法,其中所述贱金属层的最小厚度在25-5000微米的范围内。9. The method of claim 1, wherein the minimum thickness of the base metal layer is in the range of 25-5000 micrometers. 10.根据权利要求1所述的方法,其中所述贱金属层的最小厚度在25-1000微米的范围内。10. The method of claim 1, wherein the minimum thickness of the base metal layer is in the range of 25-1000 micrometers. 11.一种用于制备压花工具的组件,所述组件包括:11. A component for preparing an embossing tool, the component comprising: 具有非平面模具表面的模具;A mold with a non-planar mold surface; 设置在所述模具表面上和并且贴合所述模具表面的金或其合金层,其中所述金或其合金层具有0.5-10微米的厚度;和A gold or alloy layer disposed on and adhered to the surface of the mold, wherein the gold or alloy layer has a thickness of 0.5-10 micrometers; and 远离所述模具表面的在所述金或其合金层的相对侧上的贱金属层,所述贱金属层具有与所述金或其合金层接触的三维结构,和在其远离所述金或其合金层的一侧上的基本上平整的表面。A base metal layer on the opposite side of the gold or alloy layer away from the mold surface, the base metal layer having a three-dimensional structure in contact with the gold or alloy layer and a substantially flat surface on its side away from the gold or alloy layer. 12.根据权利要求11所述的组件,其中所述金合金包含金和以下中的一种或多种:铜、锡、钴、镍、铁、铟、锌和钼。12. The component of claim 11, wherein the gold alloy comprises gold and one or more of the following: copper, tin, cobalt, nickel, iron, indium, zinc, and molybdenum. 13.根据权利要求11所述的组件,其中所述合金中的非贵金属的总重量在0.001-50%的范围内。13. The component of claim 11, wherein the total weight of non-precious metals in the alloy is in the range of 0.001-50%. 14.根据权利要求11所述的组件,其中所述贱金属包含镍、钴、铬、铜和锌中的任一种或多种。14. The component of claim 11, wherein the base metal comprises one or more of nickel, cobalt, chromium, copper, and zinc. 15.根据权利要求11所述的组件,其中所述贱金属层的最小厚度在25-5000微米的范围内。15. The component of claim 11, wherein the minimum thickness of the base metal layer is in the range of 25-5000 micrometers.
HK17103218.1A 2015-08-31 2017-03-29 Embossing tool and method for preparation thereof HK1229291B (en)

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HK1229291B true HK1229291B (en) 2020-12-18

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