[go: up one dir, main page]

HK1228836B - Droplet discharge device and method - Google Patents

Droplet discharge device and method Download PDF

Info

Publication number
HK1228836B
HK1228836B HK17102729.5A HK17102729A HK1228836B HK 1228836 B HK1228836 B HK 1228836B HK 17102729 A HK17102729 A HK 17102729A HK 1228836 B HK1228836 B HK 1228836B
Authority
HK
Hong Kong
Prior art keywords
plunger
flow path
liquid
discharge
liquid chamber
Prior art date
Application number
HK17102729.5A
Other languages
Chinese (zh)
Other versions
HK1228836A1 (en
Inventor
生岛和正
Original Assignee
武藏工业株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 武藏工业株式会社 filed Critical 武藏工业株式会社
Publication of HK1228836A1 publication Critical patent/HK1228836A1/en
Publication of HK1228836B publication Critical patent/HK1228836B/en

Links

Description

液滴吐出装置及方法Liquid droplet discharging device and method

本申请是申请日为2012年7月10日、申请号为201280034714.3、发明名称为液滴吐 出装置及方法的专利申请的分案申请。This application is a divisional application of a patent application filed on July 10, 2012 , with application number 201280034714.3 and invention name: Liquid Droplet Discharging Device and Method.

技术领域Technical Field

本发明涉及不管其填料的含有如何均精度良好地微量吐出自水、溶剂、试剂等的低粘性材料到焊料膏体、银膏体、粘结剂等的高粘性材料的液体材料的液滴吐出装置及方法。The present invention relates to a liquid droplet discharging device and method for accurately discharging a small amount of liquid material ranging from low-viscosity materials such as water, solvents, and reagents to high-viscosity materials such as solder paste, silver paste, and adhesives, regardless of the filler content.

背景技术Background Art

作为使用往复移动的柱塞并自吐出口吐出少量的液体材料的液滴吐出装置,到目前为止提出了各种的技术。Various techniques have been proposed so far as a liquid droplet discharge device that uses a reciprocating plunger to discharge a small amount of liquid material from a discharge port.

作为使柱塞的前端接触于阀座而吐出的类型的液滴吐出装置,例如在专利文献1中公开了作为在使液体材料自喷嘴离开之后着陆于工件的液滴吐出装置,柱塞的侧面非接触地配设于在连接于喷嘴的出口附近具有阀座的流路内,通过柱塞的前端向阀座移动并抵接于阀座,从而以液滴的状态自喷嘴吐出液体材料的装置。As a type of droplet ejection device that causes the front end of a plunger to contact a valve seat to eject liquid, for example, Patent Document 1 discloses a droplet ejection device that causes a liquid material to land on a workpiece after leaving a nozzle. The side surface of the plunger is non-contactly arranged in a flow path having a valve seat near an outlet connected to the nozzle, and the front end of the plunger moves toward the valve seat and abuts the valve seat, thereby ejecting liquid material from the nozzle in the form of droplets.

然而,若使柱塞抵接于阀座,则存在柱塞磨损而发生形状变化的问题、产生磨损粉或磨损片而污染液体材料或者夹在柱塞与阀座之间而妨碍良好的吐出的问题。However, when the plunger contacts the valve seat, there are problems such as the plunger being worn and deformed, and wear powder and flakes being generated, which contaminate the liquid material or become caught between the plunger and the valve seat and prevent good discharge.

因此,作为将柱塞的前端不接触于阀座而吐出的液滴吐出装置,申请人提出了通过使柱塞进出移动及进出停止,从而对液体材料赋予惯性力并以液滴的状态吐出的液滴吐出装置,其具备将进出停止时的柱塞的前端部的位置规定于处于其进出方向的液室的内壁附近的柱塞定位机构(专利文献2)。Therefore, as a droplet ejection device that ejects liquid without the front end of the plunger contacting the valve seat, the applicant proposed a droplet ejection device that imparts inertial force to the liquid material by moving the plunger in and out and stopping the plunger in and out, and ejects the liquid material in the form of droplets. The device has a plunger positioning mechanism that defines the position of the front end of the plunger when the plunger stops moving in and out near the inner wall of the liquid chamber in its in and out direction (patent document 2).

另外,在专利文献3中公开了通过将由驱动装置使杆端面以极小的冲程(stroke)并且以高加速度及大的力在室内部前后位移所形成的压力波在室中的材料内传播,从而配置自喷嘴开口吐出材料的流体的滴的装置。In addition, Patent Document 3 discloses a device that is configured to discharge droplets of fluid of material from a nozzle opening by propagating a pressure wave formed by a driving device causing the rod end face to displace back and forth within a chamber with an extremely small stroke, high acceleration, and large force within the chamber, thereby propagating the pressure wave within the material in the chamber.

然而,近年来,在谋求电子器械类的小型化、轻量化中,搭载于其的电子部件的小型化、轻量化正在进展。例如,从2005年前后起搭载有能够大幅地减少安装面积的称为“0402部件”的安装尺寸400μm×200μm的部件。0402部件,现状是由金属版的焊料印刷来进行安装,但是,存在在与大型部件的混合存在中需要半蚀刻等的工夫的问题。另外,也存在要求涂布量(涂布厚度)的个别控制的问题。因此,利用印刷的安装的成品率恶化。再有,为了确保印刷性,有时部件配置出现限制。However, in recent years, as electronic devices are being miniaturized and lightweighted, the electronic components mounted thereon have been miniaturized and lightweighted. For example, since around 2005, components with a mounting size of 400μm×200μm, called "0402 components," have been installed, which can significantly reduce the mounting area. 0402 components are currently mounted by solder printing on metal plates, but there is a problem that half-etching and other labor are required when mixed with large components. In addition, there is also the problem of requiring individual control of the coating amount (coating thickness). Therefore, the yield rate of mounting using printing deteriorates. In addition, in order to ensure printability, there are sometimes restrictions on component configuration.

在使用往复移动的柱塞的液滴吐出装置中,由于能够通过柱塞的动作控制液体材料,因此,不会发生这些问题。然而,到目前为止,在该种装置中还未实现使柱塞不抵接于阀座,微量(例如,着陆直径为数十~数百μm)并且高精度地滴状吐出小型部件所需要的焊料膏体等的液体。Droplet dispensing devices using a reciprocating plunger avoid these problems because the liquid material can be controlled by the plunger's movement. However, until now, such devices have not been able to accurately dispense droplets of liquids such as solder paste required for small components, without the plunger contacting the valve seat.

现有技术文献Prior art literature

专利文献Patent Literature

专利文献1:国际公开第98/10251号小册子Patent Document 1: International Publication No. 98/10251 Pamphlet

专利文献2:国际公开第2008/108097号小册子Patent Document 2: International Publication No. 2008/108097 Pamphlet

专利文献3:国际公开第98/16323号小册子Patent Document 3: International Publication No. 98/16323 Pamphlet

发明内容Summary of the Invention

发明所要解决的问题Problems to be solved by the invention

本发明的课题在于,在使用往复移动的柱塞的液滴吐出装置中,使柱塞不抵接于液室内壁(阀座)并高精度地吐出微量的液滴。An object of the present invention is to discharge a minute amount of liquid droplets with high precision in a liquid droplet discharge device using a reciprocating plunger without the plunger coming into contact with an inner wall (valve seat) of a liquid chamber.

另外,在相同的液滴吐出装置中,吐出自低粘度遍及高粘度的各种液体也是本发明要解决的问题。Furthermore, the present invention is also intended to solve the problem of discharging various liquids ranging from low viscosity to high viscosity in the same liquid droplet discharge device.

解决问题的技术手段Technical means to solve the problem

第1发明为液滴吐出装置,其特征在于,具备前端构成吐出口的吐出路、柱塞、插入有柱塞的液室、使柱塞进退运动的柱塞驱动机构、以及规定柱塞的前端部的位置的柱塞定位机构,通过在柱塞的前端部与液室的内壁非接触的状态下使柱塞前进移动,从而对液体材料赋予惯性力并以液滴的状态吐出,通过使柱塞前进移动,从而自吐出口挤出形成所期望的液滴所需要的量的液体材料,接着,通过使柱塞后退移动,从而切断自吐出口挤出的液体材料并形成微量的液滴。The first invention is a liquid droplet discharge device, characterized in that it includes a discharge path with a discharge port formed at its front end, a plunger, a liquid chamber into which the plunger is inserted, a plunger drive mechanism for moving the plunger forward and backward, and a plunger positioning mechanism for determining the position of the front end of the plunger. By moving the plunger forward while the front end of the plunger is not in contact with the inner wall of the liquid chamber, an inertial force is imparted to the liquid material, causing it to be discharged in the form of droplets. By moving the plunger forward, the liquid material required to form the desired droplets is extruded from the discharge port. Subsequently, by moving the plunger backward, the liquid material extruded from the discharge port is cut off and a small amount of droplets are formed.

第2发明的特征在于,在第1发明中,吐出路由前端构成吐出口的第1流路、以及与第1流路及液室连通且直径大于第1流路的第2流路构成。The second invention is characterized in that, in the first invention, the discharge path is composed of a first flow path having a distal end forming a discharge port, and a second flow path communicating with the first flow path and the liquid chamber and having a larger diameter than the first flow path.

第3发明的特征在于,在第2发明中,在通过使柱塞后退移动从而切断自吐出口挤出的液体材料之后,进一步使柱塞后退移动,在吐出路的第1流路内或第2流路内形成气液界面,使柱塞的移动停止。The third invention is characterized in that, in the second invention, after the liquid material extruded from the discharge port is cut off by moving the plunger backward, the plunger is further moved backward to form a gas-liquid interface in the first flow path or the second flow path of the discharge path, thereby stopping the movement of the plunger.

第4发明的特征在于,在第1发明中,在通过使柱塞后退移动从而切断自吐出口挤出的液体材料之后,进一步使柱塞后退移动并在吐出路内形成气液界面,使柱塞的移动停止。The fourth invention is characterized in that, in the first invention, after the liquid material extruded from the discharge port is cut off by the backward movement of the plunger, the plunger is further backward moved to form a gas-liquid interface in the discharge path, and the movement of the plunger is stopped.

第5发明的特征在于,在第3或4发明中,在吐出路内形成气液界面,通过自停止移动的时候的柱塞的位置使柱塞前进移动,从而自吐出口挤出形成所期望的液滴所需要的量的液体材料,接着通过使柱塞后退移动,从而切断自吐出口挤出的液体材料并连续形成微量的液滴。The fifth invention is characterized in that, in the third or fourth invention, a gas-liquid interface is formed in the discharge path, the plunger is moved forward from the position of the plunger when it stops moving, thereby squeezing out the liquid material in the amount required to form the desired droplets from the discharge port, and then the plunger is moved backward to cut off the liquid material squeezed out from the discharge port and continuously form a small amount of droplets.

第6发明的特征在于,在第1~5发明的任一个发明中,吐出口的内径为数十μm以下。The sixth invention is characterized in that, in any one of the first to fifth inventions, the inner diameter of the discharge port is several tens of μm or less.

第7发明为液滴吐出方法,其特征在于,是使用液滴吐出装置,通过在柱塞的前端部与液室的内壁非接触的状态下,使柱塞前进移动,从而对液体材料赋予惯性力并以液滴的状态吐出的液滴吐出方法,液滴吐出装置具备前端构成吐出口的吐出路、柱塞、插入有柱塞的液室、使柱塞进退运动的柱塞驱动机构、以及规定柱塞的前端部的位置的柱塞定位机构,液滴吐出方法具有:挤出工序,通过使柱塞前进移动,从而自吐出口挤出形成所期望的液滴所需要的量的液体材料;以及切断工序,通过使柱塞后退移动,从而切断自该吐出口挤出的液体材料并形成微量的液滴。The seventh invention is a liquid droplet discharge method, characterized in that it is a liquid droplet discharge method using a liquid droplet discharge device, in which the plunger is moved forward while the front end of the plunger is not in contact with the inner wall of the liquid chamber, thereby imparting inertial force to the liquid material and discharging it in the form of droplets. The liquid droplet discharge device includes a discharge path with a front end constituting a discharge port, a plunger, a liquid chamber in which the plunger is inserted, a plunger driving mechanism for moving the plunger forward and backward, and a plunger positioning mechanism for determining the position of the front end of the plunger. The liquid droplet discharge method includes: an extrusion step of moving the plunger forward to extrude a required amount of liquid material from the discharge port to form desired droplets; and a cutting step of moving the plunger backward to cut the liquid material extruded from the discharge port and form a small amount of droplets.

第8发明的特征在于,在第7发明中,在切断工序后进一步具有使柱塞后退移动而在吐出路内形成气液界面并使柱塞的移动停止的吸入工序。The eighth invention is characterized in that, in the seventh invention, after the cutting step, there is further provided a suction step of moving the plunger backward to form a gas-liquid interface in the discharge path and stopping the movement of the plunger.

第9发明的特征在于,在第7或8发明中,液体材料是含有固体物质的液体材料,将挤出工序中的柱塞的前端部与液室的内壁的距离设定成大于固体物质。The ninth invention is characterized in that, in the seventh or eighth invention, the liquid material is a liquid material containing a solid substance, and the distance between the tip of the plunger and the inner wall of the liquid chamber in the extrusion step is set to be larger than the solid substance.

第10发明的特征在于,在第7~9发明的任一个发明中,吐出口的内径为数十μm以下。The tenth invention is characterized in that, in any one of the seventh to ninth inventions, the inner diameter of the discharge port is several tens of μm or less.

第11发明的特征在于,在第7~10发明的任一个发明中,液体材料的粘度为10000mPa·s以上。The eleventh invention is characterized in that, in any one of the seventh to tenth inventions, the viscosity of the liquid material is 10,000 mPa·s or more.

第12发明的特征在于,在第7~11发明的任一个发明中,挤出工序中的柱塞的前进移动距离大于紧接于该工序之后的柱塞的前端部与液室的内壁的距离。在此,挤出工序中的柱塞的前进移动距离优选为紧接于该工序之后的柱塞的前端部与液室的内壁的距离的3倍以上,更加优选为6倍以上,特别优选为10倍以上。The twelfth invention is characterized in that, in any one of the seventh to eleventh inventions, the distance the plunger moves forward during the extrusion step is greater than the distance between the tip of the plunger and the inner wall of the liquid chamber immediately after the step. Here, the distance the plunger moves forward during the extrusion step is preferably at least three times the distance between the tip of the plunger and the inner wall of the liquid chamber immediately after the step, more preferably at least six times, and particularly preferably at least ten times.

发明的效果Effects of the Invention

根据本发明,能够高精度地吐出一直以来无法不使柱塞(阀体)抵接于液室内壁(阀座)来吐出的微量的液滴。According to the present invention, it is possible to discharge a minute amount of liquid droplets with high precision, which has been impossible to discharge without causing the plunger (valve body) to abut against the inner wall of the liquid chamber (valve seat).

另外,由于阀体与阀座不接触,因而不产生摩擦片或微粒(particle),没有它们混入到材料中的担忧,可以进行无污染的微量吐出。In addition, since the valve body and valve seat do not contact each other, there is no friction or particles generated, and there is no worry of them mixing into the material, allowing for pollution-free micro-dispensing.

另外,即使在液体材料含有填料(filler)等的固体物质的情况下,也可以防止固体物质的压毁或破损所造成的吐出精度的降低,并且可以不损失液体材料的机能、性质来吐出。Furthermore, even when the liquid material contains a solid substance such as a filler, a decrease in discharge accuracy due to crushing or breaking of the solid substance can be prevented, and the liquid material can be discharged without losing its functions and properties.

附图说明BRIEF DESCRIPTION OF THE DRAWINGS

图1是用于说明柱塞的位置与液体材料的状态的关系的、液滴吐出装置的主要部分的侧面剖视图,(a)显示第1阶段,(b)显示第2阶段,(c)显示第3阶段,(d)显示第4阶段,(e)显示第5阶段,(f)显示第6阶段,(g)显示第7阶段,(h)显示第8阶段。Figure 1 is a side sectional view of the main part of the droplet ejection device for illustrating the relationship between the position of the plunger and the state of the liquid material, (a) shows the first stage, (b) shows the second stage, (c) shows the third stage, (d) shows the fourth stage, (e) shows the fifth stage, (f) shows the sixth stage, (g) shows the seventh stage, and (h) shows the eighth stage.

图2是柱塞及吐出路的形状的变形构成例,(a)显示第1构成例,(b)显示第2阶构成例,(c)显示第3构成例,(d)显示第4构成例,(e)显示第5构成例,(f)显示第6构成例,(g)显示第7构成例,(h)显示第8构成例。Figure 2 shows examples of deformation of the shape of the plunger and the discharge path, (a) shows the first example, (b) shows the second example, (c) shows the third example, (d) shows the fourth example, (e) shows the fifth example, (f) shows the sixth example, (g) shows the seventh example, and (h) shows the eighth example.

图3是具备柱塞定位机构的液滴吐出装置的侧面剖视图,(a)显示使移动构件进出的状态,(b)显示使移动构件后退的状态。3 is a side sectional view of a liquid droplet discharge device equipped with a plunger positioning mechanism, (a) showing a state where a moving member is advanced and extended, and (b) showing a state where the moving member is retracted.

具体实施方式DETAILED DESCRIPTION

本发明涉及通过插入于与液室连通的插入孔且前端非接触于液室内的内壁而进退移动的柱塞的进退移动,从而自形成于柱塞的进出方向的吐出路的前端的吐出口吐出液体材料的技术。若使用本发明的技术,即不管其填料的含有如何均能够从吐出口以液滴的状态高精度且微量地吐出自低粘性遍及高粘性的液体材料。The present invention relates to a technique for discharging a liquid material from a discharge port formed at the distal end of a discharge path in the plunger's forward and backward directions by the forward and backward movement of a plunger inserted into an insertion hole communicating with a liquid chamber, with the distal end moving forward and backward without contacting the inner wall of the liquid chamber. The technique of the present invention enables precise and minute discharge of liquid materials, ranging from low-viscosity to high-viscosity, in the form of droplets from the discharge port, regardless of the filler content.

根据本发明,可以微量吐出自水、溶剂、试剂等的低粘性材料到焊料膏体、银膏体、粘结剂等的高粘性材料的液体材料。本发明具有也能够应用于不适合于焊膏(creamsolder)那样的喷墨中的吐出的高粘度的液体材料的特征。在此,所谓高粘度的液体材料,是指例如粘度10000~500000mPa·s的液体。特别是使柱塞(阀体)不抵接于液室内壁(阀座)而以滴状微量吐出粘度20000mPa·s~500000mPa·s的液体,进一步而言粘度30000mPa·s~500000mPa·s的液体,是在一直以来的工业水平中无法实现的。According to the present invention, liquid materials ranging from low-viscosity materials such as water, solvents, and reagents to high-viscosity materials such as solder paste, silver paste, and adhesives can be discharged in minute amounts. The present invention has the characteristic of being applicable to high-viscosity liquid materials that are not suitable for discharge in inkjet printing, such as solder paste (creamsolder). Here, the so-called high-viscosity liquid material refers to, for example, a liquid with a viscosity of 10,000 to 500,000 mPa·s. In particular, it has been impossible to discharge a liquid with a viscosity of 20,000 to 500,000 mPa·s in a minute amount in the form of drops without the plunger (valve body) abutting against the inner wall (valve seat) of the liquid chamber, and further, a liquid with a viscosity of 30,000 to 500,000 mPa·s, in the form of drops, at the current industrial level.

所谓本发明中的微量吐出,是指例如着陆直径为数十~数百μm的液滴、或者体积为1nl以下(优选为0.1~0.5nl以下)的液滴的吐出。本发明具有即使是数十μm以下(优选为30μm以下)的吐出口径也可以形成液滴的特征。Micro-discharge in the present invention refers to the discharge of droplets with landing diameters of tens to hundreds of μm, or droplets with a volume of 1 nl or less (preferably 0.1 to 0.5 nl or less). The present invention is characterized by the ability to form droplets even with a discharge orifice diameter of tens of μm or less (preferably 30 μm or less).

以下,根据图1说明用于实施本发明的方式的一个例子。Hereinafter, an example of a mode for implementing the present invention will be described with reference to FIG. 1 .

图1是液滴吐出装置(分配器(dispenser))的主要部分剖视图。首先,对液滴吐出装置的主要部分(吐出部)的构造进行说明。Fig. 1 is a cross-sectional view of a main portion of a liquid droplet discharge device (dispenser). First, the structure of the main portion (discharge portion) of the liquid droplet discharge device will be described.

图1所示的吐出部具备柱塞(plunger)30、液室50、插入孔51、送液路52及吐出路12。The discharge portion shown in FIG. 1 includes a plunger 30 , a liquid chamber 50 , an insertion hole 51 , a liquid supply path 52 , and a discharge path 12 .

液室50是柱塞的前端部31所位于的充满液体材料的空间。图1所示的液室50具有上面、侧面及底面并构成为圆筒形状。The liquid chamber 50 is a space filled with a liquid material and where the plunger tip 31 is located. The liquid chamber 50 shown in FIG1 has a top surface, side surfaces, and a bottom surface and is formed in a cylindrical shape.

在液室50的上面设置有插入孔51。柱塞30插入于插入孔51,柱塞30的前端位于液室50内。液室50的宽度(直径)宽于柱塞30的宽度(直径),柱塞30的外周与液室50的侧面一直处于非接触的状态。柱塞30连接于未图示的柱塞驱动机构,以相对于吐出路12靠近或远离的方式进行直线前进运动。图1中,将前端部31的形状作为平面,但是,并不限定于此,例如,也可以作为球状,或者作为凹状,或者作为前端尖细形状,或者在与吐出路12相对的位置设置突起。在图2(a)~(g)中,显示柱塞的前端部31的形状例。An insertion hole 51 is provided on the upper surface of the liquid chamber 50. The plunger 30 is inserted into the insertion hole 51, and the front end of the plunger 30 is located in the liquid chamber 50. The width (diameter) of the liquid chamber 50 is wider than the width (diameter) of the plunger 30, and the outer periphery of the plunger 30 is always in a non-contact state with the side surface of the liquid chamber 50. The plunger 30 is connected to a plunger drive mechanism not shown in the figure, and moves forward in a straight line in a manner of approaching or moving away from the discharge path 12. In Figure 1, the shape of the front end portion 31 is shown as a plane, but it is not limited to this. For example, it can also be spherical, or concave, or have a tapered front end, or a protrusion can be provided at a position opposite to the discharge path 12. Figures 2(a) to (g) show examples of the shape of the front end portion 31 of the plunger.

在液室50的侧面设置有送液路52。液体材料自未图示的液体材料贮留容器等的液体材料供给部,经由该送液路52,被供给至液室50。A liquid supply path 52 is provided on a side surface of the liquid chamber 50 . The liquid material is supplied to the liquid chamber 50 through the liquid supply path 52 from a liquid material supply portion such as a liquid material storage container (not shown).

在液室50的底面设置有与外部连通的吐出路12。通过柱塞的进出移动,从而液体材料自吐出路12前端的吐出口11被吐出至外部。吐出口11的内径例如为10~100μm。吐出路12的形状不限定于圆柱状,也可以作为设置前端变细那样的锥的形状(参照图2(e)、(g))。另外,也可以由具有吐出口的第1流路21以及直径大于第1流路的第2流路22构成(参照图2(f)),此时,也可以将第2流路22形成为圆锥台形状(参照图2(a)~(d))。在与吐出路的吐出口侧相比使液室侧为大径的情况下,实现了流入吐出路的液体材料被加速了的效果。A discharge path 12 connected to the outside is provided on the bottom surface of the liquid chamber 50. The liquid material is discharged to the outside from the discharge port 11 at the front end of the discharge path 12 by the in-and-out movement of the plunger. The inner diameter of the discharge port 11 is, for example, 10 to 100 μm. The shape of the discharge path 12 is not limited to a cylindrical shape, and may also be a tapered shape with a tapered front end (refer to FIG. 2 (e) and (g)). In addition, it may also be composed of a first flow path 21 having a discharge port and a second flow path 22 having a diameter larger than that of the first flow path (refer to FIG. 2 (f)). In this case, the second flow path 22 may also be formed into a truncated cone shape (refer to FIG. 2 (a) to (d)). When the diameter of the liquid chamber side is made larger than that of the discharge port side of the discharge path, the effect of accelerating the liquid material flowing into the discharge path is achieved.

在吐出路的长度过长的情况下,无法良好地进行液滴的切断,特别是在高粘度的液体材料中,容易发生该问题。因此,优选吐出路12由将孔设置于液室内的壁面53的孔口(orifice)而形成。吐出路的长度例如为100μm~1000μm。另外,也可以在液室内的壁面53设置直径大于柱塞30的凹陷,在更接近于吐出口的位置形成与柱塞的前端部31相对的面。此时,自与柱塞的前端部31相对的凹陷内的面至吐出口11为止成为吐出路12(参照图2(f))。另外,也可以将壁面53作为吐出路12所位于的中央部分成为薄壁的曲面(参照图2(g))。When the length of the discharge path is too long, the droplets cannot be cut off well, and this problem is likely to occur in liquid materials with high viscosity. Therefore, it is preferred that the discharge path 12 is formed by an orifice (orifice) in which a hole is set on the wall 53 in the liquid chamber. The length of the discharge path is, for example, 100 μm to 1000 μm. In addition, a depression having a diameter larger than that of the plunger 30 can be provided on the wall 53 in the liquid chamber, and a surface opposite to the front end 31 of the plunger can be formed at a position closer to the discharge port. In this case, the surface in the depression opposite to the front end 31 of the plunger to the discharge port 11 becomes the discharge path 12 (refer to FIG. 2 (f)). In addition, the wall 53 can also be made into a thin-walled curved surface as the central part where the discharge path 12 is located (refer to FIG. 2 (g)).

作为柱塞驱动机构,可以例示马达、压电元件、弹簧等的弹性体、利用气压等的致动器。柱塞驱动机构能够根据用途采用适当的机构,但是,在想吐出自低粘度遍及高粘度的各种的液体的情况下,优选使用能够在一定范围内调整柱塞的冲程的机构(压电元件以外的驱动机构)。进行微量吐出的时候的柱塞的冲程例如为5~1000μm,但是,优选在吐出高粘度的液体的时候加长冲程,例如为50~1000μm。As the plunger drive mechanism, an elastic body such as a motor, a piezoelectric element, a spring, or an actuator using air pressure can be exemplified. The plunger drive mechanism can adopt an appropriate mechanism according to the application. However, when it is desired to discharge a variety of liquids ranging from low viscosity to high viscosity, it is preferable to use a mechanism (a drive mechanism other than a piezoelectric element) that can adjust the plunger stroke within a certain range. The plunger stroke when performing a micro-discharge is, for example, 5 to 1000 μm. However, it is preferable to extend the stroke to, for example, 50 to 1000 μm when discharging a high-viscosity liquid.

最进出位置上的柱塞的前端部的位置由柱塞定位机构规定。为了对处于柱塞的进出方向的液体材料赋予充分的惯性力,柱塞的端面和与柱塞的前端部31相对的液室的壁面53的距离优选设定成充分狭窄。由于随着吐出路(喷嘴)的内径变小,需要加大柱塞赋予液体材料的力,因此,伴随于此,柱塞的端面与液室的壁面的距离(间隙)也需要变小。The position of the plunger's tip at the most advanced position is determined by the plunger positioning mechanism. To impart sufficient inertial force to the liquid material in the plunger's advanced and indirect directions, the distance between the plunger's end face and the liquid chamber wall 53 facing the plunger's tip 31 is preferably set to be sufficiently narrow. As the inner diameter of the discharge path (nozzle) decreases, the force imparted by the plunger to the liquid material must increase. Consequently, the distance (gap) between the plunger's end face and the liquid chamber wall must also decrease.

例如,为了由高粘度的液体形成着陆直径300μm以下的液滴,间隙优选设定在1~50μm的范围内,更加优选设定在1~30μm的范围内。然而,在液体材料中含有填料等的固体物质的情况下,设定最进出位置,以使间隙大于固体物质。例如在液体材料为具有平均粒径10μm的颗粒的焊膏的情况下,间隙需要大于10μm(优选使间隙为固体物质的大小(粒径)的1.5倍以上)。这是因为,会产生焊料的颗粒被压毁,层叠于吐出路的流入口附近而使吐出精度显著降低的问题。For example, in order to form droplets with a landing diameter of less than 300 μm from a high-viscosity liquid, the gap is preferably set in the range of 1 to 50 μm, and more preferably in the range of 1 to 30 μm. However, in the case where the liquid material contains solid substances such as fillers, the maximum entry and exit positions are set so that the gap is larger than the solid substance. For example, in the case where the liquid material is a solder paste with particles with an average particle size of 10 μm, the gap needs to be larger than 10 μm (preferably the gap is 1.5 times the size (particle size) of the solid substance). This is because there will be a problem that the solder particles are crushed and stacked near the inlet of the discharge path, which significantly reduces the discharge accuracy.

柱塞定位机构也规定最后退位置上的柱塞的前端部的位置。其原因在于,在吐出低粘度的液体材料的情况下,若以某种程度的速度移动柱塞,则能够赋予形成液滴所需要的惯性力,但是,在吐出高粘度的液体材料的情况下,为了更高速地移动柱塞,需要将冲程设定成更长。一般而言,在微量吐出粘度高的液体(例如,粘度10000mPa·s以上的液体)的时候,需要将冲程设定成充分大于间隙。柱塞的冲程优选为其最进出位置上的间隙的3倍以上,更优选为6倍以上,特别优选为10倍以上。The plunger positioning mechanism also specifies the position of the front end of the plunger in the most retracted position. The reason is that when discharging a low-viscosity liquid material, if the plunger is moved at a certain speed, the inertial force required to form a droplet can be imparted. However, when discharging a high-viscosity liquid material, in order to move the plunger at a higher speed, the stroke needs to be set to be longer. Generally speaking, when discharging a small amount of a high-viscosity liquid (for example, a liquid with a viscosity of 10,000 mPa·s or more), the stroke needs to be set to be sufficiently larger than the gap. The stroke of the plunger is preferably more than 3 times the gap at its most in-and-out position, more preferably more than 6 times, and particularly preferably more than 10 times.

一边参照图3一边说明柱塞定位机构的一个例子。在此说明的柱塞定位机构公开于专利文献2。An example of the plunger positioning mechanism will be described with reference to Fig. 3. The plunger positioning mechanism described here is disclosed in Patent Document 2.

柱塞的最进出位置的决定按照如下顺序进行。The plunger's most advanced and exited positions are determined in the following order.

首先,将电磁切换阀72切换成外部与前方活塞室43连通的状态,旋转移动构件40,移动构件40成为移动至最前方的状态。由于前方活塞室43向外部开放,因此,活塞33通过盘簧45的作用而相对于主体71向前方移动,前方抵接部32抵接于前方止动器(stopper)41而停止。接着,通过旋转测微器(micrometer)69并使后方止动器42前进而接触于后方抵接部34,从而固定柱塞30和主体71。First, the electromagnetic switching valve 72 is switched to a state where the front piston chamber 43 is in communication with the outside, and the movable member 40 is rotated, moving the movable member 40 to its forwardmost position. Since the front piston chamber 43 is open to the outside, the piston 33 is moved forward relative to the main body 71 by the action of the coil spring 45, and the front abutment portion 32 abuts the front stopper 41, stopping. Next, the micrometer 69 is rotated, and the rear stopper 42 is advanced until it contacts the rear abutment portion 34, thereby securing the plunger 30 and the main body 71.

向前方移动主体71,在后方止动器42与后方抵接部34接触的状态下固定。柱塞30的前端部31在接触于液室50的内壁的接触位置13固定。旋转移动构件40,向后方仅移动移动构件40并规定最进出位置,将驱动单元70固定于底座构件73。The main body 71 is moved forward and fixed with the rear stopper 42 in contact with the rear abutment portion 34. The front end portion 31 of the plunger 30 is fixed at the contact position 13 where it contacts the inner wall of the liquid chamber 50. The moving member 40 is rotated, and only the moving member 40 is moved rearward to define the maximum forward and backward position, and the drive unit 70 is fixed to the base member 73.

通过以上的作业,可以将柱塞30的进出时停止位置调整为柱塞30的前端部31不接触于液室50的所期望的位置。By the above operation, the stop position of the plunger 30 during the in-and-out movement can be adjusted to a desired position where the tip portion 31 of the plunger 30 does not contact the liquid chamber 50 .

柱塞的最后退位置的决定按照如下顺序进行。The final retracted position of the plunger is determined in the following procedure.

旋转测微器46,使后方止动器42后退,决定吐出时的柱塞30的后退时移动量。若决定了柱塞30的后退时移动量,则以测微器46不旋转的方式,由未图示的固定螺丝等的旋转锁紧构件来固定测微器46。通过以上的作业,柱塞30的最后退位置的设定作业完成。The micrometer 46 is rotated to retract the rear stopper 42, thereby determining the amount of retraction of the plunger 30 during dispensing. Once the amount of retraction of the plunger 30 has been determined, the micrometer 46 is secured with a rotation locking member, such as a setscrew (not shown), to prevent rotation. This completes the process of setting the plunger 30's fully retracted position.

本发明的液滴吐出装置,代表性的是以一边相对移动工件与吐出口一边吐出液体材料的方式进行使用。液滴吐出装置安装于XYZ驱动机构,与载置了工件的工作台相对移动。本发明中,由于液体成为液滴并自吐出口分离,并着陆于工件,因此,可以将吐出口保持于一定的高度并水平移动。The droplet discharge device of the present invention is typically used to discharge liquid material while moving a workpiece and a discharge port relative to each other. The droplet discharge device is attached to an XYZ drive mechanism and moves relative to a worktable on which the workpiece is mounted. In the present invention, since the liquid forms droplets, separates from the discharge port, and lands on the workpiece, the discharge port can be maintained at a constant height while being moved horizontally.

如果也存在在一个作业位置吐出一滴的情况,则有时也通过将多滴吐出至相同的场所来确保所期望的量。由于如果增加每一注(shot)的吐出量则着陆直径变宽,因此,在不想加宽着陆直径的情况下,优选以数注确保所期望量。本发明的液滴吐出装置能够高速且连续地吐出微量的液体,例如,可以以每秒100注以上的高速节拍进行动作。If a single droplet is discharged from a single working location, it may be possible to ensure the desired volume by discharging multiple drops into the same location. Increasing the volume per shot widens the landing diameter, so if a wider landing diameter is undesirable, it is preferable to ensure the desired volume with multiple shots. The droplet discharge device of the present invention is capable of discharging minute amounts of liquid continuously and at high speeds, for example, operating at a high rate of over 100 shots per second.

其次,说明柱塞的位置与液体材料的状态的关系。Next, the relationship between the position of the plunger and the state of the liquid material will be described.

图1(a)显示吐出动作开始时的初始状态。在该初始状态中,柱塞30的前端部31在一连串的吐出动作中,处在相对于吐出路12最远的位置的动作开始位置。另外,液室50及吐出路12处于被液体材料充满的状态。此时,吐出路12的吐出口11侧,也可以是吸入微量的外气(空气)的状态。Figure 1(a) shows the initial state at the start of the dispensing operation. In this initial state, the tip 31 of the plunger 30 is at its starting position, farthest from the dispensing passage 12 during the series of dispensing operations. Furthermore, the liquid chamber 50 and the dispensing passage 12 are filled with liquid material. At this point, the discharge port 11 side of the dispensing passage 12 may also be drawing in a small amount of external air.

图1(b)显示自图1(a)的柱塞的动作开始位置使柱塞前进移动并使吐出路12内的液体材料到达至吐出口(吐出路12的吐出口侧端面)的状态。FIG1(b) shows a state where the plunger is moved forward from the plunger operation start position of FIG1(a) and the liquid material in the discharge path 12 reaches the discharge port (the discharge port side end surface of the discharge path 12).

此时,通过柱塞30的前进移动,液室50内的液体材料被送入至吐出路12内,吐出路12内的液体材料到达吐出路12前端的吐出口11。由此,存在于吐出路12内的外气(空气)向外吐出。At this time, the plunger 30 moves forward, and the liquid material in the liquid chamber 50 is sent into the discharge path 12. The liquid material in the discharge path 12 reaches the discharge port 11 at the front end of the discharge path 12. As a result, the external air (air) in the discharge path 12 is discharged to the outside.

图1(c)显示自图1(b)的柱塞的位置进一步使柱塞前进移动的状态。在该状态下,到达吐出口的液体材料不向吐出口的外侧被切断而被挤出。Fig. 1(c) shows a state where the plunger is further moved forward from the position of the plunger in Fig. 1(b). In this state, the liquid material reaching the discharge port is not cut off and is squeezed out of the discharge port.

图1(d)显示在自图1(c)的柱塞的位置进一步使柱塞前进移动之后使柱塞的前进移动停止的状态。FIG1(d) shows a state in which the plunger is further advanced from the position of the plunger in FIG1(c) and then the forward movement of the plunger is stopped.

此时,液体材料不是在自液室50至最前端为止之间被切断,而是进一步自作为吐出路12的前端的吐出口11向外侧被挤出。At this time, the liquid material is not cut off between the liquid chamber 50 and the front end, but is further squeezed outward from the discharge port 11 which is the front end of the discharge path 12 .

还有,优选至此为止的柱塞30的前进移动强势地进行,柱塞30的停止急遽地停止。It is preferable that the forward movement of the plunger 30 up to this point is performed strongly, and the stop of the plunger 30 is performed abruptly.

在该状态下,柱塞30的前端部31在一连串的吐出动作中,处于相对于吐出路12最近位置的最进出位置。通过柱塞30移动至最进出位置,从而形成所期望的大小的液滴所需要的量的液体材料向吐出口11的外侧被挤出。最进出位置根据液体材料的种类或形成的液滴的大小而不同,但是,无论在哪种情况下,柱塞30的前端部31均不接触于液室内面。In this state, the tip 31 of the plunger 30 is at its most advanced position relative to the discharge path 12 during a series of discharge operations. As the plunger 30 moves to its most advanced position, the amount of liquid material required to form droplets of the desired size is extruded outward from the discharge port 11. The most advanced position varies depending on the type of liquid material and the size of the droplets to be formed, but in either case, the tip 31 of the plunger 30 does not contact the interior of the liquid chamber.

图1(e)显示自图1(d)的柱塞的位置(最进出位置)使柱塞略微后退移动的状态。FIG1(e) shows a state where the plunger is slightly moved backward from the position of the plunger in FIG1(d) (the most advanced position).

若柱塞30后退移动,则占据液室50内的柱塞的容积的比例减少,向朝着液室50内的方向的力作用在吐出路12内的液体材料。伴随于此,向吐出路12内拉回的力也作用在存在于吐出口11的外侧的液体材料(与吐出路12内的液体材料相连接的挤出后的液体材料)。因此,在自吐出口挤出的液体材料上,向柱塞的前进方向的惯性力起作用,并且向柱塞的后退方向的力发生作用,从而开始形成液滴。即,自与吐出路12内的液体材料相连接的吐出口11挤出的液体材料在吐出口附近的部分受到切断作用。If the plunger 30 moves backward, the proportion of the plunger's volume within the liquid chamber 50 that it occupies decreases, and a force pulling the liquid material toward the liquid chamber 50 acts on the liquid material within the discharge path 12. This force also acts on the liquid material outside the discharge port 11 (the extruded liquid material connected to the liquid material within the discharge port 12) pulling the liquid material back toward the discharge port 12. Therefore, the inertial force acting in the forward direction of the plunger and the force acting in the backward direction of the plunger act on the liquid material extruded from the discharge port, causing droplets to begin to form. In other words, the liquid material extruded from the discharge port 11 connected to the liquid material within the discharge port 12 is sheared off near the discharge port.

图1(f)显示自图1(e)的柱塞的位置进一步使柱塞后退移动的状态。FIG1(f) shows a state where the plunger is further moved backward from the position of the plunger in FIG1(e).

若进一步使柱塞30后退移动,则相对于自吐出口11挤出的液体材料的切断作用进一步加强。由此,自与吐出路12连续的吐出口11挤出的液体材料在吐出口附近的部分被切断,形成液滴。If the plunger 30 is further moved backward, the cutting effect on the liquid material extruded from the discharge port 11 is further strengthened. As a result, the liquid material extruded from the discharge port 11 continuous with the discharge path 12 is cut near the discharge port, forming droplets.

图1(f)中,将从吐出路12连续的一侧的液体材料的切断位置附近与切断了的一侧的液体材料的切断位置附近的任一者均描绘成细丝状。一般而言,高粘性材料中多成为这样的丝状,但是,也依赖于材料的特性、温度、或湿度等的环境条件等,由于是高粘性材料,因此,未必显示这样的丝状的方式。In FIG1(f), both the area near the cutoff point of the liquid material on the side continuing from the discharge path 12 and the area near the cutoff point of the liquid material on the side being cut are depicted as filaments. Generally speaking, high-viscosity materials often form such filaments, but this may not necessarily be the case with high-viscosity materials, depending on the material properties and environmental conditions such as temperature and humidity.

图1(g)显示自图1(f)的柱塞的位置进一步使柱塞后退移动的状态。自吐出口11挤出的液体材料中残留于吐出路12侧的液体材料通过柱塞30的后退移动而被吸入至吐出路12内。1( g ) shows a state where the plunger is further moved backward from the position of the plunger in FIG1( f ). The liquid material remaining on the discharge path 12 side of the liquid material extruded from the discharge port 11 is sucked into the discharge path 12 by the backward movement of the plunger 30 .

在下一次的吐出中配备并优选吐出路12的吐出口11侧为吸入微量的外气(空气)的状态。即,优选为气液界面存在于吐出路12内的状态。通过这样做,能够防止液体材料的干燥,另外,能够防止吐出作业待机时因滴液而污染周边环境。在此,应留意的是不将外气(空气)越过吐出路12而吸入至液室50。其原因在于,若将外气(空气)吸入至液室50,则对吐出精度带来不良影响。In the next discharge, the discharge port 11 side of the discharge path 12 is preferably configured to be in a state where a small amount of external air (air) is sucked in. That is, it is preferred that a gas-liquid interface exists in the discharge path 12. By doing so, it is possible to prevent the liquid material from drying out, and it is also possible to prevent the surrounding environment from being polluted by dripping during the discharge operation standby. Here, it should be noted that external air (air) is not sucked into the liquid chamber 50 across the discharge path 12. The reason is that if external air (air) is sucked into the liquid chamber 50, it will have an adverse effect on the discharge accuracy.

另外,在吐出路12通过具有第1流路21及第2流路22而成的情况下,在第1流路21与第2流路22的边界不构成台阶的情况下,气液界面也可以存在于第1流路21、第2流路22或它们的边界的任一者(例如,图2(a)、(b)那样的流路形状的情况)。另外,如图2(f)所示,即使在第1流路21与第2流路22的边界构成台阶的情况下,如果没有形成气泡,则也能够将外气(空气)吸入至第2流路22。还有,也可以以锥平滑地连接圆柱形状的第1流路21与圆柱形状的第2流路22的边界而构成。Furthermore, when the discharge passage 12 is formed by having the first flow passage 21 and the second flow passage 22, the gas-liquid interface may exist in either the first flow passage 21, the second flow passage 22, or the boundary therebetween, even if the boundary therebetween does not form a step (e.g., in the case of the flow passage shapes shown in FIG. 2(a) and (b)). Furthermore, as shown in FIG. 2(f), even if the boundary therebetween forms a step, external air (air) can be drawn into the second flow passage 22 if no bubbles are formed. Alternatively, the boundary between the cylindrical first flow passage 21 and the cylindrical second flow passage 22 may be smoothly connected by a taper.

图1(h)显示自图1(g)的柱塞的位置进一步使柱塞后退移动并成为动作结束位置的状态。图1(a)~(h)是用于形成一滴的一连串的动作。结束一次吐出的时候的柱塞的位置成为较最进出位置更后退的位置。在该状态下,吐出路12的吐出口11侧吸入微量的外气(空气)。即使将外气(空气)吸入至吐出路12内,在空气未到达液室50的范围内,则也不会产生气泡的问题。由于若外气流入到液室50内,则成为吐出量的偏差等的原因,因此,需要避免。为了连续地进行下一个吐出动作,优选将柱塞的动作结束位置作为动作开始位置。Figure 1(h) shows a state where the plunger is further moved backward from the position of the plunger in Figure 1(g) and becomes the end position of the action. Figures 1(a) to (h) are a series of actions for forming a drop. The position of the plunger when one discharge is completed becomes a position further back than the most in-and-out position. In this state, a small amount of external air (air) is sucked into the discharge port 11 side of the discharge path 12. Even if external air (air) is sucked into the discharge path 12, there will be no problem of bubbles as long as the air does not reach the liquid chamber 50. Since if external air flows into the liquid chamber 50, it will cause deviations in the discharge amount, etc., it is necessary to avoid this. In order to continuously perform the next discharge action, it is preferable to use the end position of the plunger as the start position of the action.

在完全地结束吐出动作的情况下,优选由柱塞30的前端部31堵塞吐出路12,防止液体材料自吐出口11流出。When the discharge operation is completely completed, the discharge path 12 is preferably blocked by the distal end portion 31 of the plunger 30 to prevent the liquid material from flowing out of the discharge port 11 .

以下,根据实施例说明本发明的详细情况,本发明完全不限定于实施例。Hereinafter, the present invention will be described in detail based on examples, but the present invention is not limited to the examples at all.

实施例1Example 1

使用图1所示的液滴吐出装置,进行液滴的形成。实施例1所使用的液体材料是焊料膏体(粘度45000mPa·s),含有平均颗粒6μm的填料。本实施例中吐出的1个液滴的量为0.2nl,着陆直径为120μm。一边相对移动工件与吐出口一边以每秒100注的节拍将数十个液滴形成于工件上,由测定器进行测定之后,能够确认形成有均匀的形状的点。Droplets were formed using the droplet ejection device shown in Figure 1. The liquid material used in Example 1 was solder paste (viscosity 45,000 mPa·s) containing filler with an average particle size of 6 μm. The volume of each ejected droplet in this example was 0.2 nl, and the landing diameter was 120 μm. While the workpiece and the ejection port were moving relative to each other, dozens of droplets were deposited on the workpiece at a rate of 100 drops per second. Measurements with a measuring instrument confirmed the formation of uniformly shaped dots.

实施例2Example 2

使用图1所示的液滴吐出装置,进行液滴的形成。实施例2所使用的液体材料是Ag膏体(粘度28000mPa·s),含有1~10μm的框架状的填料。本实施例中吐出的1个液滴的量为0.17nl,着陆直径为100μm。一边相对移动工件与吐出口一边以每秒250注的节拍将数十个液滴形成于工件上,由测定器进行测定之后,能够确认形成有均匀的形状的点。The droplet ejection device shown in Figure 1 is used to form droplets. The liquid material used in Example 2 is an Ag paste (viscosity 28000mPa·s) containing a frame-shaped filler of 1 to 10μm. The amount of one droplet ejected in this example is 0.17nl, and the landing diameter is 100μm. While the workpiece and the ejection port are relatively moved, dozens of droplets are formed on the workpiece at a rate of 250 injections per second. After measurement by a measuring instrument, it can be confirmed that points with uniform shapes are formed.

产业上的可利用性Industrial applicability

根据本发明,可以使柱塞(阀体)不抵接于液室内壁(阀座)而精度良好且微量地吐出在电子、半导体的市场上困难的材料。例如,可以不压毁含有焊料膏体那样的软的金属材料的膏体材料,并且能够没有吐出装置内的堵塞而连续地吐出。向对基板上的小型部件的搭载工序或太阳能电池的制造工序的应用等、本发明的应用范围广。According to the present invention, it is possible to precisely and minutely discharge materials that are difficult to obtain in the electronics and semiconductor markets without the plunger (valve body) contacting the inner wall (valve seat) of the liquid chamber. For example, paste materials containing soft metal materials such as solder paste can be discharged continuously without causing clogging within the dispensing device. The present invention has a wide range of applications, including processes for mounting small components on substrates and manufacturing solar cells.

另外,由于阀体与阀座不接触,因而不产生摩擦片或微粒,没有它们混入到材料中的担忧(即无污染),因此,也适合于食品或药品行业等中的利用。In addition, since the valve body and the valve seat do not contact each other, no friction plates or particles are generated, and there is no worry about them mixing into the material (i.e., no pollution). Therefore, it is also suitable for use in the food or pharmaceutical industries.

另外,由于不会没有必要地破坏其构造而飞翔吐出填料等的颗粒、固体物质、凝胶体、构造体等,因此,可以有效地防止这些破坏物所造成的喷嘴堵塞。In addition, since the structure is not destroyed unnecessarily to cause particles of fillers, solid materials, gels, structures, etc. to fly and be discharged, clogging of the nozzle caused by these destructive objects can be effectively prevented.

符号的说明Explanation of symbols

11 吐出口11 Spit

12 吐出路12 Spit Road

13 接触位置13 Contact position

21 第1流路21 1st flow path

22 第2流路22 2nd flow path

30 柱塞30 plunger

31 前端部31 front end

32 前方抵接部32 front contact portion

33 活塞33 Piston

34 后方抵接部34 rear contact portion

40 移动构件40 Moving Components

41 前方止动器41 Front stopper

42 后方止动器42 rear stopper

43 前方活塞室43 front piston chamber

44 后方活塞室44 Rear piston chamber

45 盘簧45 coil spring

46 测微器46 Micrometer

50 液室50 liquid chamber

51 插入孔51 Insertion hole

52 送液路52 Liquid delivery path

53 与柱塞相对的液室的壁面53 The wall of the liquid chamber opposite to the plunger

71 主体71 Subject

72 电磁切换阀72 Solenoid switching valve

73 底座构件73 base components

74 吐出块74 spit out block

Claims (13)

1.一种液滴吐出装置,其特征在于,1. A droplet ejection device, characterized in that, 具备:前端构成吐出口的吐出路、柱塞、插入有柱塞的液室、使柱塞进退运动的柱塞驱动机构、以及规定柱塞的前端部的位置的柱塞定位机构,通过在柱塞的外周与液室的侧壁一直非接触的状态下使柱塞前进移动,从而对液体材料赋予惯性力并以液滴的状态吐出,It comprises: a discharge path forming a discharge port at its front end, a plunger, a liquid chamber into which the plunger is inserted, a plunger drive mechanism for moving the plunger forward and backward, and a plunger positioning mechanism for defining the position of the front end of the plunger. By moving the plunger forward without contacting the outer circumference of the plunger with the side wall of the liquid chamber, it imparts inertial force to the liquid material and discharges it in the form of droplets. 通过反复进行在切断通过柱塞的移动而自吐出口挤出的液体材料之后,使柱塞后退移动并在吐出路内形成气液界面的工序,从而连续形成液滴,并且通过在柱塞的前端部与液室的内面非接触的状态下使柱塞前进移动,从而对液体材料赋予惯性力并以液滴的状态吐出。By repeatedly performing the process of cutting off the liquid material squeezed out of the outlet by the movement of the plunger, moving the plunger backward and forming a gas-liquid interface in the discharge path, droplets are continuously formed. Furthermore, by moving the plunger forward without contacting the inner surface of the liquid chamber at the front end of the plunger, inertial force is applied to the liquid material, which is then discharged in the form of droplets. 2.如权利要求1所述的液滴吐出装置,其特征在于,2. The droplet ejection device as described in claim 1, characterized in that, 吐出路由前端构成吐出口的第1流路、以及与第1流路及液室连通且直径大于第1流路的第2流路构成,The discharge route consists of a first flow path forming the discharge outlet at the front end, and a second flow path that is connected to the first flow path and the liquid chamber and has a diameter larger than the first flow path. 在吐出路的第1流路内或第2流路内形成气液界面。A gas-liquid interface is formed in the first or second flow path of the discharge path. 3.一种液滴吐出装置,其特征在于,3. A droplet ejection device, characterized in that, 具备:前端构成吐出口的吐出路、柱塞、插入有柱塞的液室、使柱塞进退运动的柱塞驱动机构、以及规定柱塞的前端部的位置的柱塞定位机构,通过在柱塞的前端部与液室的内面非接触的状态下使柱塞前进移动,从而对液体材料赋予惯性力并以液滴的状态吐出,It comprises: a discharge path forming a discharge port at its front end, a plunger, a liquid chamber into which the plunger is inserted, a plunger drive mechanism for moving the plunger forward and backward, and a plunger positioning mechanism for defining the position of the front end of the plunger. By moving the plunger forward without contacting the inner surface of the liquid chamber, it imparts inertial force to the liquid material and discharges it in the form of droplets. 吐出路由前端构成吐出口且直径小于柱塞的第1流路、以及与第1流路及液室连通且至少液室侧相比于柱塞为大径的第2流路构成,第1流路和第2流路的边界构成台阶或角,The discharge route consists of a first flow path, whose front end forms the discharge outlet and whose diameter is smaller than that of the plunger, and a second flow path, which communicates with the first flow path and the liquid chamber and has a larger diameter than the plunger at least on the liquid chamber side. The boundary between the first flow path and the second flow path forms a step or an angle. 通过使柱塞前进移动至第2流路内为止,从而从吐出口挤出形成所期望的液滴所需要的量的液体材料,接着,通过使柱塞后退移动,从而切断自吐出口挤出的液体材料并形成液滴。By moving the plunger forward into the second flow path, the amount of liquid material required to form the desired droplet is extruded from the outlet. Then, by moving the plunger backward, the liquid material extruded from the outlet is cut off and a droplet is formed. 4.如权利要求1、2或3所述的液滴吐出装置,其特征在于,4. The droplet ejection device as described in claim 1, 2, or 3, characterized in that, 吐出口的内径为10~100μm。The inner diameter of the discharge port is 10–100 μm. 5.一种液滴吐出方法,其特征在于,5. A method for ejecting droplets, characterized in that, 是使用液滴吐出装置,在柱塞的外周与液室的侧壁一直非接触的状态下使柱塞前进移动,从而对液体材料赋予惯性力并以液滴的状态吐出的液滴吐出方法,This method uses a droplet ejection device to advance the plunger while maintaining a non-contact relationship between the plunger's outer circumference and the side wall of the liquid chamber, thereby imparting inertial force to the liquid material and ejecting it as droplets. 液滴吐出装置具备前端构成吐出口的吐出路、柱塞、插入有柱塞的液室、使柱塞进退运动的柱塞驱动机构、以及规定柱塞的前端部的位置的柱塞定位机构,The droplet ejection device includes an ejection path forming an ejection port at its front end, a plunger, a liquid chamber into which the plunger is inserted, a plunger drive mechanism for moving the plunger forward and backward, and a plunger positioning mechanism for determining the position of the front end of the plunger. 液滴吐出方法具有:Droplet ejection methods have the following characteristics: 切断工序,切断通过柱塞的移动而自吐出口挤出的液体材料并形成液滴;The cutting process cuts off the liquid material extruded from the outlet by the movement of the plunger and forms droplets; 吸入工序,在切断工序之后,使柱塞后退移动并在吐出路内形成气液界面;以及In the intake process, after the cut-off process, the plunger retracts and moves to form a gas-liquid interface in the discharge path; and 通过反复进行切断工序和吸入工序,从而连续形成液滴的工序,A process that continuously forms droplets by repeatedly performing cutting and suction processes. 在切断工序中,通过在柱塞的前端部与液室的内面非接触的状态下使柱塞前进移动,从而对液体材料赋予惯性力并以液滴的状态吐出。In the cutting process, the plunger is moved forward without contacting the inner surface of the liquid chamber, thereby imparting an inertial force to the liquid material and ejecting it in the form of droplets. 6.如权利要求5所述的液滴吐出方法,其特征在于,6. The droplet ejection method as described in claim 5, characterized in that, 吐出路由前端构成吐出口的第1流路、以及与第1流路及液室连通且直径大于第1流路的第2流路构成,The discharge route consists of a first flow path forming the discharge outlet at the front end, and a second flow path that is connected to the first flow path and the liquid chamber and has a diameter larger than the first flow path. 在吸入工序中,在吐出路的第1流路内或第2流路内形成气液界面。During the intake process, a gas-liquid interface is formed in the first or second flow path of the exhaust path. 7.如权利要求5所述的液滴吐出方法,其特征在于,7. The droplet ejection method as described in claim 5, characterized in that, 液体材料是含有固体物质的液体材料,将切断工序中的柱塞的前端部与液室的内面的距离设定成大于固体物质。The liquid material is a liquid material containing solid substances. The distance between the front end of the plunger and the inner surface of the liquid chamber in the cutting process is set to be greater than that of the solid substance. 8.如权利要求5所述的液滴吐出方法,其特征在于,8. The droplet ejection method as described in claim 5, characterized in that, 切断工序中的柱塞的前进移动距离大于紧接于前进移动之后的柱塞的前端部与液室的内面的距离。In the cutting process, the forward movement distance of the plunger is greater than the distance between the front end of the plunger immediately following the forward movement and the inner surface of the liquid chamber. 9.一种液滴吐出方法,其特征在于,9. A method for ejecting droplets, characterized in that, 是使用液滴吐出装置,在柱塞的前端部与液室的内面非接触的状态下使柱塞前进移动,从而对液体材料赋予惯性力并以液滴的状态吐出的液滴吐出方法,This method uses a droplet ejection device to advance the plunger without contacting the inner surface of the liquid chamber, thereby imparting inertial force to the liquid material and ejecting it as a droplet. 液滴吐出装置具备前端构成吐出口的吐出路、柱塞、插入有柱塞的液室、使柱塞进退运动的柱塞驱动机构、以及规定柱塞的前端部的位置的柱塞定位机构,The droplet ejection device includes an ejection path forming an ejection port at its front end, a plunger, a liquid chamber into which the plunger is inserted, a plunger drive mechanism for moving the plunger forward and backward, and a plunger positioning mechanism for determining the position of the front end of the plunger. 吐出路由前端构成吐出口且直径小于柱塞的第1流路、以及与第1流路及液室连通且至少液室侧相比于柱塞为大径的第2流路构成,第1流路和第2流路的边界构成台阶或角,The discharge route consists of a first flow path, whose front end forms the discharge outlet and whose diameter is smaller than that of the plunger, and a second flow path, which communicates with the first flow path and the liquid chamber and has a larger diameter than the plunger at least on the liquid chamber side. The boundary between the first flow path and the second flow path forms a step or an angle. 液滴吐出方法具有:Droplet ejection methods have the following characteristics: 挤出工序,通过使柱塞前进移动至第2流路内为止,从而自吐出口挤出形成所期望的液滴所需要的量的液体材料;以及The extrusion process involves advancing the plunger into the second flow path, thereby extruding the required amount of liquid material from the outlet to form the desired droplets; and 切断工序,通过使柱塞后退移动而切断自吐出口挤出的液体材料并形成液滴。The cutting process involves cutting off the liquid material extruded from the outlet and forming droplets by moving the plunger backward. 10.如权利要求9所述的液滴吐出方法,其特征在于,10. The droplet ejection method as described in claim 9, characterized in that, 液体材料是含有固体物质的液体材料,将挤出工序中的柱塞的前端部与液室的内面的距离设定成大于固体物质。Liquid material is a liquid material containing solid substances. The distance between the front end of the plunger and the inner surface of the liquid chamber in the extrusion process is set to be greater than that of the solid substance. 11.如权利要求9或10所述的液滴吐出方法,其特征在于,11. The droplet ejection method as described in claim 9 or 10, characterized in that, 挤出工序中的柱塞的前进移动距离大于紧接于该工序之后的柱塞的前端部与液室的内面的距离。In the extrusion process, the forward movement distance of the plunger is greater than the distance between the front end of the plunger immediately following the process and the inner surface of the liquid chamber. 12.如权利要求5、6、9或10所述的液滴吐出方法,其特征在于,12. The droplet ejection method as described in claim 5, 6, 9 or 10, characterized in that, 吐出口的内径为10~100μm。The inner diameter of the discharge port is 10–100 μm. 13.如权利要求5、6、9或10所述的液滴吐出方法,其特征在于,13. The droplet ejection method as described in claim 5, 6, 9 or 10, characterized in that, 液体材料的粘度为10000mPa·s以上。The viscosity of the liquid material is above 10000 mPa·s.
HK17102729.5A 2011-07-11 2017-03-17 Droplet discharge device and method HK1228836B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2011-152594 2011-07-11

Publications (2)

Publication Number Publication Date
HK1228836A1 HK1228836A1 (en) 2017-11-10
HK1228836B true HK1228836B (en) 2019-12-06

Family

ID=

Similar Documents

Publication Publication Date Title
CN103747885B (en) Droplet discharge device and method
KR102012303B1 (en) Liquid material discharge apparatus and method
CN101678391B (en) Method and apparatus for discharging liquid material
JP6177291B2 (en) Droplet ejection apparatus and method
JP5856332B1 (en) Micro fluid discharge method and micro fluid dispenser
KR20040074003A (en) Method and device for discharging fluid
JP7123398B2 (en) fluid ejector
HK1228836B (en) Droplet discharge device and method
CN102470391B (en) Method and apparatus for discharging liquid material, and program
CN101119804A (en) Systems, valves and methods for spraying viscous liquids
Wong et al. Jettable fluid space and jetting characteristics of a microprint head
HK1228836A1 (en) Droplet discharge device and method
JP2019150798A (en) Coating method and device of liquid material
KR20190071589A (en) Microvolume-liquid coating method and microvolume-liquid dispenser
HK1193377B (en) Droplet discharge device and method
JP6285510B2 (en) Liquid material discharge apparatus and method
CN120569263A (en) Liquid drop ejecting device
HK1236882A1 (en) Liquid material discharge apparatus and method
JP2006226726A (en) Dispensing component
HK1195283B (en) Liquid material discharge apparatus and method