HK1221818B - Image sensor pixel with multiple storage nodes - Google Patents
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Description
技术领域Technical Field
本发明大体上涉及图像传感器,且尤其(但非排他性地)涉及包含具有多个存储节点的像素的图像传感器。The present invention relates generally to image sensors and, more particularly, but not exclusively, to image sensors including pixels having multiple storage nodes.
背景技术Background Art
图像传感器广泛用于数码相机、蜂窝电话、监控摄像机、医疗装置及汽车中。由于图像传感器应用的增加,对具有提高的图像质量及改进性能的图像传感器的需求随之增加。互补金属氧化物半导体(“COMS”)技术用于制造硅衬底上的更低成本图像传感器。一些COMS图像传感器经设计用于捕获高动态范围(“HDR”)图像。Image sensors are widely used in digital cameras, cell phones, surveillance cameras, medical devices, and automobiles. As image sensor applications increase, demand for image sensors with improved image quality and performance is also increasing. Complementary metal oxide semiconductor ("CMOS") technology is used to manufacture lower-cost image sensors on silicon substrates. Some CMOS image sensors are designed to capture high dynamic range ("HDR") images.
图像传感器的大小也正在缩小,即使消费者想要提高性能及功能。因此,设计者必须平衡向图像传感器添加特征与所述图像传感器的总体大小。为了添加HDR功能到图像传感器,一些设计者已在组合像素中使用两个光电二极管以捕获在不同光照水平处的两个不同图像。组合像素中的一个子像素可用于感测强光照条件,而组合像素中的另一子像素可用于感测弱光照条件。然而,使用两个光电二极管对可用半导体基板面具有大的影响。一些图像传感器通过捕获连续图像来产生HDR图像。然而,在捕获连续图像之间的读出时间影响最终的HDR图像,尤其当场景中包含移动的物体时。在其它情况下,例如,手势识别也诱发在短时间中捕获连续图像。Image sensors are also shrinking in size, even as consumers demand increased performance and functionality. Therefore, designers must balance adding features to image sensors with the overall size of the image sensor. To add HDR functionality to image sensors, some designers have used two photodiodes in a combined pixel to capture two different images at different light levels. One subpixel in the combined pixel can be used to sense bright light conditions, while the other subpixel in the combined pixel can be used to sense low light conditions. However, using two photodiodes has a significant impact on the available semiconductor real estate. Some image sensors produce HDR images by capturing consecutive images. However, the readout time between capturing consecutive images affects the final HDR image, especially when the scene contains moving objects. In other cases, such as gesture recognition, it is also necessary to capture consecutive images in a short period of time.
发明内容Summary of the Invention
本发明的一方面涉及一种图像传感器像素,其包括:光电二极管,其用于响应于图像光而产生图像电荷;第一存储节点;第二存储节点,其中所述第一存储节点、所述第二存储节点及所述光电二极管具有第一掺杂极性;第一转移存储栅极(“TSG”),其经耦合以将所述图像电荷从所述光电二极管转移到所述第一存储节点,其中所述第一TSG安置在所述第一存储节点的较大部分上方;第二TSG,其经耦合以将所述图像电荷从所述第一存储节点转移到所述第二存储节点,其中所述第二TSG安置在所述第二存储节点的较大部分上方;浮动扩散;及输出栅极,其经耦合以将所述图像电荷从所述第二存储节点转移到所述浮动扩散。One aspect of the present invention relates to an image sensor pixel comprising: a photodiode for generating image charge in response to image light; a first storage node; a second storage node, wherein the first storage node, the second storage node, and the photodiode have a first doping polarity; a first transfer storage gate (“TSG”) coupled to transfer the image charge from the photodiode to the first storage node, wherein the first TSG is disposed over a major portion of the first storage node; a second TSG coupled to transfer the image charge from the first storage node to the second storage node, wherein the second TSG is disposed over a major portion of the second storage node; a floating diffusion; and an output gate coupled to transfer the image charge from the second storage node to the floating diffusion.
在本发明的另一方面中,一种成像系统包括:光源,其经耦合以发出非可见光;图像传感器,其具有像素阵列,其中每一图像传感器像素包含:光电二极管,其用于响应于图像光而产生图像电荷;快门晶体管,其经耦合以复位所述光电二极管;第一存储节点;第二存储节点,其中所述第一存储节点、所述第二存储节点及所述光电二极管具有第一掺杂极性;第一转移存储栅极(“TSG”),其经耦合以将所述图像电荷从所述光电二极管转移到所述第一存储节点,其中所述第一TSG安置在所述第一存储节点的较大部分上方;第二TSG,其经耦合以将所述图像电荷从所述第一存储节点转移到所述第二存储节点,其中所述第二TSG安置在所述第二存储节点的较大部分上方;浮动扩散;及输出栅极,其经耦合以将所述图像电荷从所述第二存储节点转移所述浮动扩散;及控制器,其耦合到所述光源以产生所述非可见光的脉冲且经耦合以激活所述快门晶体管以与产生所述非可见光的所述脉冲同步复位所述光电二极管。In another aspect of the present invention, an imaging system includes: a light source coupled to emit non-visible light; an image sensor having a pixel array, wherein each image sensor pixel includes: a photodiode for generating an image charge in response to image light; a shutter transistor coupled to reset the photodiode; a first storage node; a second storage node, wherein the first storage node, the second storage node, and the photodiode have a first doping polarity; a first transfer storage gate (“TSG”) coupled to transfer the image charge from the photodiode to the first storage node, wherein the first TSG is disposed over a major portion of the first storage node; a second TSG coupled to transfer the image charge from the first storage node to the second storage node, wherein the second TSG is disposed over a major portion of the second storage node; a floating diffusion; and an output gate coupled to transfer the image charge from the second storage node to the floating diffusion; and a controller coupled to the light source to generate a pulse of the non-visible light and coupled to activate the shutter transistor to reset the photodiode in synchronization with generating the pulse of the non-visible light.
本发明的另一方面涉及一种捕获图像的方法,其中在图像传感器像素的阵列中的每一图像传感器像素执行方法,所述方法包括:响应于第一图像光而利用光电二极管积累第一图像电荷;将所述第一图像电荷从所述光电二极管转移到第二存储节点,其中所述第一图像电荷在转移期间流过第一存储节点到所述第二存储节点;在将所述第一图像电荷转移到所述第二存储节点之后,利用全局快门信号复位所述光电二极管;响应于第二图像光而利用所述光电二极管积累第二图像电荷,其中积累所述第二图像电荷发生在复位所述光电二极管之后;将所述第二图像电荷转移到所述第一存储节点,同时所述第一图像电荷存储在所述第二存储节点中;将所述第一图像电荷从所述第二存储节点转移到浮动扩散用于读出,其中所述第二存储节点耦合在所述第一存储节点与所述浮动扩散之间;及将所述第二图像电荷从所述第一存储节点转移到所述浮动扩散用于读出,其中所述第二图像电荷在转移期间流过所述第二存储节点到所述浮动扩散。Another aspect of the present invention relates to a method of capturing an image, wherein each image sensor pixel in an array of image sensor pixels performs a method, the method comprising: accumulating a first image charge with a photodiode in response to first image light; transferring the first image charge from the photodiode to a second storage node, wherein the first image charge flows through the first storage node to the second storage node during the transfer; resetting the photodiode using a global shutter signal after transferring the first image charge to the second storage node; accumulating a second image charge with the photodiode in response to second image light, wherein accumulating the second image charge occurs after resetting the photodiode; transferring the second image charge to the first storage node while the first image charge is stored in the second storage node; transferring the first image charge from the second storage node to a floating diffusion for readout, wherein the second storage node is coupled between the first storage node and the floating diffusion; and transferring the second image charge from the first storage node to the floating diffusion for readout, wherein the second image charge flows through the second storage node to the floating diffusion during the transfer.
附图说明BRIEF DESCRIPTION OF THE DRAWINGS
参考以下诸图描述本发明的非限制性及非穷尽实施例,其中除非另有指定,否则相似参考数字是指贯穿各种视图的相似部分。Non-limiting and non-exhaustive embodiments of the present invention are described with reference to the following figures, wherein like reference numerals refer to like parts throughout the various views unless otherwise specified.
图1为说明根据本发明的实施例的包含具有多个存储节点的像素的像素阵列的成像系统的一个实例的示意框图。1 is a schematic block diagram illustrating one example of an imaging system including a pixel array having pixels with multiple storage nodes, according to an embodiment of the present invention.
图2A为根据本发明的实施例的包含多个存储节点的实例像素的横截面图。2A is a cross-sectional view of an example pixel including multiple storage nodes, according to an embodiment of the present invention.
图2B为根据本发明的实施例的包含多个存储节点的实例像素的布局的平面图。2B is a plan view of a layout of an example pixel including multiple storage nodes according to an embodiment of the present invention.
图2C为说明根据本发明的实施例的图2A的实例像素的电模型的示意图。2C is a schematic diagram illustrating an electrical model of the example pixel of FIG. 2A , according to an embodiment of the invention.
图3为根据本发明的实施例的操作具有多个存储节点的像素的实例方法。3 illustrates an example method of operating a pixel having multiple storage nodes according to an embodiment of the present invention.
具体实施方式DETAILED DESCRIPTION
本文描述用于捕获具有具有多个存储节点的像素的图像的系统及方法。在以下描述中,阐述众多特定细节以提供对所述实施例的透彻理解。然而,所属领域的技术人员将认识到,能够在不具有一或多个特定细节的情况下或在具有其它方法、组件、材料等等的情况下实践本文所描述的技术。在其它情况下,未展示或详细地描述众所周知的结构、材料或操作以避免混淆某些方面。This document describes systems and methods for capturing images having pixels with multiple storage nodes. In the following description, numerous specific details are set forth to provide a thorough understanding of the embodiments. However, one skilled in the art will recognize that the techniques described herein can be practiced without one or more of the specific details, or with other methods, components, materials, and the like. In other instances, well-known structures, materials, or operations are not shown or described in detail to avoid obscuring certain aspects.
贯穿本说明书的对“一个实施例”或“一实施例”的参考意指结合实施例所描述的特定特征、结构或特性包含于本发明的至少一个实施例中。因此贯穿本说明书的各种地方的短语“在一个实施例中”或“在一实施例中”的出现未必皆是指同一实施例。此外,特定特征、结构或特性能够以任何合适方式组合于一或多个实施例中。Reference throughout this specification to "one embodiment" or "an embodiment" means that a particular feature, structure, or characteristic described in connection with the embodiment is included in at least one embodiment of the present invention. Thus, the appearances of the phrases "in one embodiment" or "in an embodiment" in various places throughout this specification are not necessarily all referring to the same embodiment. Furthermore, the particular features, structures, or characteristics may be combined in any suitable manner in one or more embodiments.
图1为说明根据本发明的实施例的成像系统100的一实例的示意框图。成像系统100包含实例像素阵列102、控制电路108、读出电路104及功能逻辑106。像素阵列102耦合到控制电路108及读出电路104。读出电路104耦合到功能逻辑106。1 is a schematic block diagram illustrating an example of an imaging system 100 according to an embodiment of the present invention. Imaging system 100 includes an example pixel array 102, control circuitry 108, readout circuitry 104, and function logic 106. Pixel array 102 is coupled to control circuitry 108 and readout circuitry 104. Readout circuitry 104 is coupled to function logic 106.
在一个实例中,像素阵列102为成像传感器或像素107(例如,像素P1、P2、…、Pn)的二维(2D)阵列。在一个实例中,每一像素107为具有多个存储节点的COMS成像像素。如所说明,将每一像素107布置成行(例如,行R1到Ry)及列(例如,列C1到Cx)以获取人员、位置、对象等等的图像数据,其能够随后用于呈现人员、位置、对象等等的图像。In one example, pixel array 102 is a two-dimensional (2D) array of imaging sensors or pixels 107 (e.g., pixels P1, P2, ..., Pn). In one example, each pixel 107 is a CMOS imaging pixel having multiple storage nodes. As illustrated, each pixel 107 is arranged in rows (e.g., rows R1 to Ry) and columns (e.g., columns C1 to Cx) to acquire image data of a person, location, object, etc., which can then be used to render an image of the person, location, object, etc.
在每一像素107已获取其图像数据或图像电荷之后,所述图像数据由读出电路104通过读出列112读出且随后转移到功能逻辑106。在各种实例中,读出电路104可包含放大电路、模/数(ADC)转换电路或其它电路。功能逻辑106可仅存储图像数据或甚至通过应用后图像效果(例如,裁剪、旋转、移除红眼、调整亮度、调整对比度或以其它方式)操纵图像数据。在一个实例中,读出电路104可沿读出列线一次读出一行图像数据(已说明)或可使用各种其它技术读出图像数据(未说明),例如,串行读出或同时完全并行读出全部像素。由像素107的不同光电二极管产生的图像电荷可在不同时间段期间被单独地读出。After each pixel 107 has acquired its image data or image charge, the image data is read out by readout circuitry 104 via readout columns 112 and then transferred to function logic 106. In various examples, readout circuitry 104 may include amplification circuitry, analog-to-digital (ADC) conversion circuitry, or other circuitry. Function logic 106 may simply store the image data or even manipulate the image data by applying post-image effects (e.g., cropping, rotating, removing red eye, adjusting brightness, adjusting contrast, or otherwise). In one example, readout circuitry 104 may read out image data one row at a time along a readout column line (illustrated) or may use various other techniques (not illustrated) to read out image data, such as serial readout or fully parallel readout of all pixels simultaneously. The image charge generated by different photodiodes of pixel 107 may be read out separately during different time periods.
为了捕获由像素阵列102接收的图像光所产生的图像,控制电路108耦合到像素阵列102以控制像素阵列102的操作特性。举例来说,控制电路108可产生用于控制图像获取的快门信号。在一个实例中,所述快门信号为全局快门信号,其用于同时使像素阵列102内的所有像素107能够在单一获取窗口期间同时获取其相应图像数据。在一个实施例中,成像系统100包含光源175,其经耦合以照明场景或场景的拍摄对象。光源175产生非可见光。在一个实施例中,光源175包含红外发光二极管(“LED”)。在所说明的实施例中,控制电路108经耦合以控制光源175。控制电路可发送导致光源175发出非可见光的脉冲的光信号到光源175以照明场景或拍摄对象。控制电路108可经配置以同步快门信号与非可见光的脉冲,使得非可见光的脉冲照明场景或拍摄对象且像素阵列102的像素107捕获来自所述场景或拍摄对象的脉冲非可见光的反射。To capture an image generated by image light received by pixel array 102, control circuitry 108 is coupled to pixel array 102 to control operational characteristics of pixel array 102. For example, control circuitry 108 may generate a shutter signal for controlling image acquisition. In one example, the shutter signal is a global shutter signal that simultaneously enables all pixels 107 within pixel array 102 to simultaneously acquire their respective image data during a single acquisition window. In one embodiment, imaging system 100 includes a light source 175 coupled to illuminate a scene or a subject within the scene. Light source 175 generates non-visible light. In one embodiment, light source 175 includes an infrared light emitting diode ("LED"). In the illustrated embodiment, control circuitry 108 is coupled to control light source 175. The control circuitry may send a light signal to light source 175 that causes light source 175 to emit pulses of non-visible light to illuminate the scene or subject. Control circuitry 108 may be configured to synchronize the shutter signal with the pulses of non-visible light so that the pulses of non-visible light illuminate a scene or subject and pixels 107 of pixel array 102 capture reflections of the pulsed non-visible light from the scene or subject.
图2A为根据本发明的实施例的包含多个存储节点的实例像素207的横截面图及图2B为根据本发明的实施例的像素207的实例布局的平面图。像素207可用作像素阵列102中的像素107。像素207包含全局快门(“GS”)栅极290、钉扎层204、光电二极管205、第一转移存储栅极(“TSG”)251、第一存储节点210、第二转移存储栅极(“TSG”)、第二存储节点220、输出栅极280及浮动扩散230。像素207安置在衬底203内。衬底203为图2A中的P型掺杂半导体衬底。光电二极管205、第一存储节点210、第二存储节点220及浮动扩散230与衬底203相反掺杂,所述掺杂为图2A中的N型掺杂。FIG2A is a cross-sectional view of an example pixel 207 including multiple storage nodes according to an embodiment of the present invention, and FIG2B is a plan view of an example layout of pixel 207 according to an embodiment of the present invention. Pixel 207 can be used as pixel 107 in pixel array 102. Pixel 207 includes a global shutter ("GS") gate 290, a pinned layer 204, a photodiode 205, a first transfer storage gate ("TSG") 251, a first storage node 210, a second transfer storage gate ("TSG"), a second storage node 220, an output gate 280, and a floating diffusion 230. Pixel 207 is disposed within substrate 203. Substrate 203 is a P-type doped semiconductor substrate in FIG2A. Photodiode 205, first storage node 210, second storage node 220, and floating diffusion 230 are doped opposite to substrate 203, which is an N-type doping in FIG2A.
图2C为说明根据本发明的实施例的像素207的电模型。晶体管TX0 289包含全局快门栅极290。当TX0 289被激活(例如,由快门栅极290上的数字高电压激活)时,光电二极管205被预充电到电压VDD 299。晶体管TX1 209包含第一转移存储栅极(“TSG”)251。当TX1209被激活(例如,由TSG 251上的数字高电压激活)时,由光电二极管205产生的图像电荷被转移到第一存储节点210。晶体管TX2 219包含第二转移存储栅极(“TSG”)252。当TX2 219被激活(例如,由TSG 252上的数字高电压激活)时,图像电荷从第一存储节点210被转移到第二存储节点220。晶体管TX3 229包含输出栅极280。当TX3 229被激活(例如,由输出栅极280上的数字高电压激活)时,图像电荷从第二存储节点220被转移到浮动扩散230。FIG2C illustrates an electrical model of pixel 207 according to an embodiment of the present invention. Transistor TX0 289 includes a global shutter gate 290. When TX0 289 is activated (e.g., by a digital high voltage on shutter gate 290), photodiode 205 is precharged to voltage VDD 299. Transistor TX1 209 includes a first transfer storage gate ("TSG") 251. When TX1 209 is activated (e.g., by a digital high voltage on TSG 251), image charge generated by photodiode 205 is transferred to a first storage node 210. Transistor TX2 219 includes a second transfer storage gate ("TSG") 252. When TX2 219 is activated (e.g., by a digital high voltage on TSG 252), image charge from first storage node 210 is transferred to a second storage node 220. Transistor TX3 229 includes an output gate 280. When TX3 229 is activated (eg, by a digital high voltage on output gate 280 ), image charge is transferred from second storage node 220 to floating diffusion 230 .
源极跟随器SF晶体管242放大由浮动扩散230内的图像电荷所产生的图像信号,且行选择晶体管SEL 243经激活以将经放大的图像信号带到读出列212上以用于读出。为了复位浮动扩散230到电压VDD 299,复位晶体管241被激活。通过复位浮动扩散230及读出所述复位浮动扩散以建立基线读出且随后从图像信号减去所述基线读出以产生经噪声校正图像信号,像素207可执行被称作相关双采样(“CDS”)的读出技术。Source follower SF transistor 242 amplifies the image signal generated by the image charge within floating diffusion 230, and row select transistor SEL 243 is activated to bring the amplified image signal onto readout column 212 for readout. Reset transistor 241 is activated to reset floating diffusion 230 to voltage VDD 299. By resetting floating diffusion 230 and reading out the reset floating diffusion to establish a baseline readout and then subtracting the baseline readout from the image signal to produce a noise-corrected image signal, pixel 207 can perform a readout technique known as correlated double sampling ("CDS").
光电二极管205经配置以响应于接收图像光275而产生图像电荷。在图2A中,P型掺杂钉扎层204安置在光电二极管205上方以形成经钉扎的光电二极管。也在图2A中,第一TSG251安置在第一存储节点210的较大部分上方且第二TSG 252安置在第二存储节点220的较大部分上方。第一TSG 251及第二TSG 252归因于其串行性质及直接邻近接近性,可被称作级联转移存储栅极。此配置允许像素207以独特操作模式操作,同时也减少所需用于执行所述独特操作模式的像素区域。Photodiode 205 is configured to generate image charge in response to receiving image light 275. In FIG2A , a P-type doped pinning layer 204 is disposed above photodiode 205 to form a pinned photodiode. Also in FIG2A , a first TSG 251 is disposed above a major portion of a first storage node 210 and a second TSG 252 is disposed above a major portion of a second storage node 220. Due to their serial nature and immediate proximity, first TSG 251 and second TSG 252 may be referred to as cascaded transfer storage gates. This configuration allows pixel 207 to operate in a unique operating mode while also reducing the pixel area required to execute the unique operating mode.
图3为根据本发明的实施例的操作像素207的实例过程300。出现在过程300中的一些或全部过程框中的顺序不应被视为限制性的。而是,受益于本发明的所属领域的技术人员将理解,一些过程框可以未经说明的各种顺序执行,或甚至并行执行。FIG3 is an example process 300 for operating pixel 207 according to an embodiment of the present invention. The order in which some or all of the process blocks in process 300 appear should not be considered limiting. Rather, those skilled in the art having benefit of this disclosure will understand that some of the process blocks may be performed in various orders not illustrated, or even in parallel.
在过程框305中,第一图像电荷积累在光电二极管205中。全局快门信号可经由全局快门栅极290激活TX0 289以在此第一积累周期之前对光电二极管205预充电。在第一积累周期之后,在过程框310中,所述第一图像电荷从光电二极管205被转移到第二存储节点220。为了将所述第一图像电荷从光电二极管205转移到第二存储节点220,正电压被施加到第一TSG 251以激活TX0 209且将所述图像电荷从光电二极管205转移到第一存储节点210。随后,负电压被施加到第一TSG 251而正电压被施加到第二TSG 252以激活TX2 219,从而将所述第一图像电荷从第一存储节点210转移到第二存储节点220。在已经过足够的时间以允许所述第一图像电荷转移到第二存储节点220之后,负电压被施加到第二TSG 252以将所述第一图像电荷陷入及存储在第二存储节点220内的第二TSG 252下方。In process block 305, a first image charge is accumulated in the photodiode 205. A global shutter signal may activate TX0 289 via the global shutter gate 290 to pre-charge the photodiode 205 prior to this first accumulation period. After the first accumulation period, in process block 310, the first image charge is transferred from the photodiode 205 to the second storage node 220. To transfer the first image charge from the photodiode 205 to the second storage node 220, a positive voltage is applied to the first TSG 251 to activate TX0 209 and transfer the image charge from the photodiode 205 to the first storage node 210. Subsequently, a negative voltage is applied to the first TSG 251 and a positive voltage is applied to the second TSG 252 to activate TX2 219, thereby transferring the first image charge from the first storage node 210 to the second storage node 220. After sufficient time has elapsed to allow the first image charge to transfer to second storage node 220 , a negative voltage is applied to second TSG 252 to trap and store the first image charge beneath second TSG 252 within second storage node 220 .
在过程框315中,光电二极管205由被激活的全局快门栅极290复位,所述全局快门栅极将光电二极管205预充电回到电压VDD 299。在光电二极管205复位之后,其开始在第二积累周期期间积累第二图像电荷(过程框320)。在第二积累周期之后,通过经由第一TSG251激活TX1 209,所述第二图像电荷被转移到第一存储节点210(过程框325)。在已经过足够的时间以允许所述第二图像电荷转移到第一存储节点210之后,负电压被施加到第一TSG251以将所述第二图像电荷陷入及存储在第一存储节点200内的第一TSG 251下方。因此,像素207能够在第一积累周期期间产生所述第一图像电荷且将所述第一图像电荷存储在第二存储节点220中,同时也在第二积累周期期间利用光电二极管205产生所述第二图像电荷且将所述第二图像电荷存储在第一存储节点210中。这允许像素207在不受读出序列的速度的限制的情况下,快速捕获来自两个不同曝光(例如,第一积累周期及第二积累周期)的图像信号以捕获两个不同曝光。此外,像素207可利用单一光电二极管205及与具有两个单独像素相比减少的晶体管数量捕获两个图像信号。此减少的晶体管数量允许像素阵列102中的增加的光电二极管区域(且因此增加的量子效率)及减少的晶体管区域,这提高图像传感器100的成像能力。In process block 315, photodiode 205 is reset by the activated global shutter gate 290, which pre-charges photodiode 205 back to voltage VDD 299. After photodiode 205 is reset, it begins accumulating a second image charge during a second accumulation period (process block 320). Following the second accumulation period, the second image charge is transferred to first storage node 210 by activating TX1 209 via first TSG 251 (process block 325). After sufficient time has elapsed to allow the second image charge to transfer to first storage node 210, a negative voltage is applied to first TSG 251 to trap and store the second image charge beneath first TSG 251 within first storage node 200. Thus, pixel 207 is able to generate and store the first image charge in second storage node 220 during the first accumulation period, while also generating and storing the second image charge in first storage node 210 using photodiode 205 during the second accumulation period. This allows pixel 207 to quickly capture image signals from two different exposures (e.g., a first accumulation period and a second accumulation period) without being limited by the speed of the readout sequence to capture two different exposures. Furthermore, pixel 207 can capture two image signals using a single photodiode 205 and a reduced number of transistors compared to having two separate pixels. This reduced number of transistors allows for increased photodiode area (and therefore increased quantum efficiency) and reduced transistor area in pixel array 102, which improves the imaging capabilities of image sensor 100.
在读出像素207之前,负电压可施加到第一TSG 251及第二TSG 252两者,同时所述第一图像电荷存储在第二存储节点220中且同时所述第二图像电荷存储在第一存储节点210中。光电二极管205可响应于第三图像光而产生第三图像电荷,同时所述第一及第二图像电荷存储在像素207内以被读出。应理解,第三级联转移存储栅极可与第一TSG 251及第二TSG 252串联添加以增加存储来自第三积累周期的第三图像电荷的能力。Before reading out pixel 207, a negative voltage can be applied to both first TSG 251 and second TSG 252 while the first image charge is stored in second storage node 220 and while the second image charge is stored in first storage node 210. Photodiode 205 can generate a third image charge in response to a third image light while the first and second image charges are stored within pixel 207 for readout. It should be understood that a third cascade transfer storage gate can be added in series with first TSG 251 and second TSG 252 to increase the ability to store the third image charge from the third accumulation period.
为了读出像素207,在过程框330中,所述第一图像电荷从第二存储节点220被转移到浮动扩散230以用于使用晶体管241、242及243读出,如上文所描述。如上文所描述,可通过对来自浮动扩散230的基线读出进行采样来执行CDS以建立来自像素207的基线信号。值得注意的是,CDS仍可通过复位浮动扩散230而使用像素207来实施,同时仍将所述第一图像电荷及所述第二图像电荷两者分别保持在第一TSG 251及第二TSG 252下方。To read out pixel 207, in process block 330, the first image charge is transferred from second storage node 220 to floating diffusion 230 for readout using transistors 241, 242, and 243, as described above. As described above, CDS can be performed by sampling the baseline readout from floating diffusion 230 to establish a baseline signal from pixel 207. Notably, CDS can still be implemented using pixel 207 by resetting floating diffusion 230 while still maintaining both the first and second image charges beneath first and second TSGs 251, 252, respectively.
在过程框330之后,在过程框335中,所述第二图像电荷从第一存储节点210被转移到浮动扩散230。所述第二图像电荷在转移期间流过第二存储节点220到浮动扩散230。TX2219经由第二TSG 252激活以将所述第二图像电荷从第一存储节点210转移到第二存储节点220,且TX3 229经由输出栅极280激活以将所述第二图像电荷从第二存储节点220转移到浮动扩散230。TX2 219及TX3 229可同时经激活以促进所述第二图像信号到浮动扩散230的转移。After process block 330, in process block 335, the second image charge is transferred from first storage node 210 to floating diffusion 230. The second image charge flows through second storage node 220 to floating diffusion 230 during the transfer. TX2 219 is activated via second TSG 252 to transfer the second image charge from first storage node 210 to second storage node 220, and TX3 229 is activated via output gate 280 to transfer the second image charge from second storage node 220 to floating diffusion 230. TX2 219 and TX3 229 may be activated simultaneously to facilitate the transfer of the second image signal to floating diffusion 230.
再次参考图2A,说明第一存储节点210被掩埋在衬底203中,使得P型掺杂衬底的层安置在第一存储节点210与第一TSG 251之间。类似地,说明第二存储节点220被掩埋在衬底203中,使得P型掺杂衬底的层安置在第二存储节点220与第二TSG 252之间。由于相应图像电荷存储在其相应存储节点(其为经掩埋的存储节点)中,故经存储的图像电荷较不易受到沿衬底203之间的界面流动的暗电流及将TX1 209、TX2 219及TX3 229的栅极与衬底203隔离的绝缘层(未说明)的影响。相反,由于归因于暗电流所述图像电荷消散,故例如电荷耦合装置(“CCD”)不能有效地将图像电荷存储在其栅极下方。由于负栅极电压驱动所述图像电荷(以电子的形式)远离在衬底绝缘层界面处的暗电流,故在图像电荷存储在所述栅极下方的同时将负电压施加到第一TSG 251及第二TSG 252也可将所述图像电荷保存在第一TSG251及第二TSG 252下方。使第一TSG 251安置在第一存储节点210的大部分(至少较大部分)上方允许施加到第一TSG 251的负电压对存储在第一存储节点210中的所述第二图像电荷的位置产生更多影响。类似地,使第二TSG 252安置在第二存储节点220的大部分(至少较大部分)上方允许施加到第二TSG 252的负电压对存储在第二存储节点220中的所述第二图像电荷的位置产生更多影响。2A , a first storage node 210 is illustrated as being buried in substrate 203, with a layer of P-type doped substrate disposed between first storage node 210 and first TSG 251. Similarly, a second storage node 220 is illustrated as being buried in substrate 203, with a layer of P-type doped substrate disposed between second storage node 220 and second TSG 252. Because respective image charges are stored in their respective storage nodes (which are buried storage nodes), the stored image charges are less susceptible to dark current flowing along the interface between substrate 203 and the insulating layer (not illustrated) isolating the gates of TX1 209, TX2 219, and TX3 229 from substrate 203. In contrast, a charge-coupled device (“CCD”), for example, cannot effectively store image charge beneath its gate because the image charge dissipates due to dark current. Because a negative gate voltage drives the image charge (in the form of electrons) away from dark current at the substrate-insulator interface, applying a negative voltage to the first TSG 251 and the second TSG 252 while the image charge is stored beneath the gates also preserves the image charge beneath the first TSG 251 and the second TSG 252. Positioning the first TSG 251 over a substantial portion (at least a larger portion) of the first storage node 210 allows the negative voltage applied to the first TSG 251 to have a greater influence on the location of the second image charge stored in the first storage node 210. Similarly, positioning the second TSG 252 over a substantial portion (at least a larger portion) of the second storage node 220 allows the negative voltage applied to the second TSG 252 to have a greater influence on the location of the second image charge stored in the second storage node 220.
可利用像素207的特征捕获HDR图像,其中像素阵列102的像素207中的所述第一图像电荷(在第一积累周期期间捕获)用于创建第一图像,且其中阵列102的像素207中的所述第二图像电荷(在第二后续积累周期期间捕获)用于创建第二图像。随后使用所述第一及第二图像可产生HDR图像。因而,第一积累周期及第二积累周期可具有不同的持续时间以捕获不同曝光以产生HDR图像。有利的是,所述第一及第二图像电荷可用第一积累周期与第二积累周期之间的非常短的时间来捕获,因为像素207在不受读出电路104的速度的限制的情况下,可将所述第一及第二图像电荷存储在像素207内以捕获后续图像。The characteristics of pixel 207 can be utilized to capture an HDR image, wherein the first image charge in pixel 207 of pixel array 102 (captured during a first accumulation period) is used to create a first image, and wherein the second image charge in pixel 207 of array 102 (captured during a second, subsequent accumulation period) is used to create a second image. An HDR image can then be generated using the first and second images. Thus, the first and second accumulation periods can have different durations to capture different exposures to generate an HDR image. Advantageously, the first and second image charges can be captured in a very short time between the first and second accumulation periods because pixel 207 can store the first and second image charges within pixel 207 for capturing subsequent images without being limited by the speed of readout circuitry 104.
除了捕获共同HDR图像,还可利用像素207以产生红外照明HDR图像。举例来说,红外照明HDR图像具有在汽车及监控成像背景中的应用。为了利用图像系统100产生红外照明HDR图像,光源175发出红外光的第一脉冲以照明场景或拍摄对象。控制电路108启动第一全局快门到像素107以捕获由第一曝光周期中的场景反射的红外光的所述第一脉冲。来自由所述场景反射的所述第一脉冲的所述红外光为第一图像光。控制电路108耦合到光源175以产生红外光的第一脉冲且经耦合以与产生红外光的第一脉冲同步产生第一全局快门信号(其瞬间激活全局快门晶体管TX0 289以复位光电二极管205)以捕获所述第一图像光。随后,光源175产生第二红外光脉冲以由场景或场景的拍摄对象反射。控制电路108启动第二全局快门到像素107以捕获由第二曝光周期中的场景反射的红外光的第二脉冲。来自由所述场景反射的所述第二脉冲的所述红外光为第二图像光。控制电路108耦合到光源175以产生红外光的第二脉冲且经耦合以与产生红外光的第二脉冲同步产生第二全局快门信号(其瞬间激活全局快门晶体管TX0 289以复位光电二极管205)以捕获所述第二图像光。In addition to capturing a common HDR image, pixel 207 can also be used to generate an infrared-illuminated HDR image. For example, infrared-illuminated HDR images have applications in automotive and surveillance imaging. To generate an infrared-illuminated HDR image using imaging system 100, light source 175 emits a first pulse of infrared light to illuminate a scene or subject. Control circuit 108 activates a first global shutter to pixel 107 to capture the first pulse of infrared light reflected from the scene during a first exposure period. The infrared light from the first pulse reflected from the scene is the first image light. Control circuit 108 is coupled to light source 175 to generate the first pulse of infrared light and is coupled to generate a first global shutter signal (which momentarily activates global shutter transistor TX0 289 to reset photodiode 205) synchronously with the first pulse of infrared light to capture the first image light. Subsequently, light source 175 generates a second pulse of infrared light to be reflected from the scene or subject. Control circuit 108 activates a second global shutter to pixel 107 to capture the second pulse of infrared light reflected from the scene during a second exposure period. The infrared light from the second pulse reflected by the scene is the second image light. Control circuit 108 is coupled to light source 175 to generate the second pulse of infrared light and is coupled to generate a second global shutter signal (which momentarily activates global shutter transistor TX0 289 to reset photodiode 205) in synchronization with the generation of the second pulse of infrared light to capture the second image light.
所述第一红外脉冲及所述第二红外脉冲可具有不同的强度。所述第一红外脉冲及所述第二红外脉冲也可具有不同的持续时间。用于捕获所述第一图像光的第一曝光周期的持续时间及用于捕获所述第二图像光的第二曝光周期的持续时间可分别对应于所述第一红外脉冲的持续时间及所述第二红外脉冲的持续时间。The first infrared pulse and the second infrared pulse may have different intensities. The first infrared pulse and the second infrared pulse may also have different durations. The duration of a first exposure period for capturing the first image light and the duration of a second exposure period for capturing the second image light may correspond to the duration of the first infrared pulse and the duration of the second infrared pulse, respectively.
像素207响应于来自所送第一红外光脉冲的所述第一图像光而产生第一图像电荷,且响应于来自所述第二红外光脉冲的所述第二图像光而产生第二图像电荷。所述第一图像电荷被转移到像素207的第二存储节点220以用于存储,如上文所描述。类似地,所述第二图像电荷可以被转移到第一存储节点210以用于存储。像素207内的所述第一及第二图像电荷的存储允许第一曝光周期与第二曝光周期之间非常短的时间周期,因此减少第一红外照明图像与第二红外照明图像之间的运动伪影。来自像素207的所述第一图像电荷及所述第二图像电荷的读出也可根据本发明的实施例来执行,以产生用于红外照明HDR图像的产生的第一及第二红外照明图像。Pixel 207 generates a first image charge in response to the first image light from the transmitted first infrared light pulse, and generates a second image charge in response to the second image light from the second infrared light pulse. The first image charge is transferred to the second storage node 220 of pixel 207 for storage, as described above. Similarly, the second image charge can be transferred to the first storage node 210 for storage. The storage of the first and second image charges within pixel 207 allows for a very short time period between the first exposure period and the second exposure period, thereby reducing motion artifacts between the first infrared illumination image and the second infrared illumination image. Readout of the first and second image charges from pixel 207 can also be performed according to embodiments of the present invention to generate first and second infrared illumination images for use in the generation of an infrared illumination HDR image.
在手势识别背景中,也可利用像素阵列102中的像素207来产生环境光调整的图像。为了利用图像系统100产生环境光调整的图像,光源175发出红外光的第一脉冲以照明场景或拍摄对象。控制电路108启动第一全局快门到像素207以捕获由第一曝光周期中的场景反射的红外光的所述第一脉冲。来自由所述场景反射的所述第一脉冲的所述红外光为第一图像光。控制电路108耦合到光源175以产生红外光的第一脉冲且经耦合以与产生红外光的第一脉冲同步产生第一全局快门信号(其瞬间激活全局快门晶体管TX0 289以复位光电二极管205)以捕获所述第一图像光。所述第一图像光包含来自所述红外脉冲的红外光及来自所述场景的环境光两者。In the context of gesture recognition, pixels 207 in pixel array 102 can also be used to generate ambient light-adjusted images. To generate an ambient light-adjusted image using imaging system 100, light source 175 emits a first pulse of infrared light to illuminate a scene or subject. Control circuit 108 activates a first global shutter to pixel 207 to capture the first pulse of infrared light reflected from the scene during a first exposure period. The infrared light from the first pulse reflected from the scene is first image light. Control circuit 108 is coupled to light source 175 to generate the first pulse of infrared light and is coupled to generate a first global shutter signal (which momentarily activates global shutter transistor TX0 289 to reset photodiode 205) in synchronization with the generation of the first pulse of infrared light to capture the first image light. The first image light includes both infrared light from the infrared pulse and ambient light from the scene.
在跟随第一曝光周期的第二曝光中,无红外光从光源175发出且控制电路108启动第二全局快门到像素107以从场景捕获仅环境光作为用于第二图像的第二图像光。第二曝光周期持续与第一曝光周期相同的持续时间。为了产生环境光调整的图像,由所述第二图像减去所述第一图像以消除场景中的环境光,仅留下红外光图像。隔离环境光调整的图像中的场景中的红外光帮助图像识别算法更好地确定强环境光环境中的手势输入。包含像素207的图像传感器在手势识别背景中尤其有用,因为像素207能够用第一曝光周期与第二曝光周期之间非常短的时间捕获两个连续图像,这减少运动模糊伪影及提高手势识别清晰度。In the second exposure following the first exposure cycle, no infrared light is emitted from light source 175, and control circuitry 108 activates a second global shutter to pixel 107 to capture only ambient light from the scene as second image light for the second image. The second exposure cycle lasts the same duration as the first exposure cycle. To produce an ambient-light-adjusted image, the first image is subtracted from the second image to remove ambient light from the scene, leaving only an infrared-light image. Isolating infrared light from the scene in the ambient-light-adjusted image helps image recognition algorithms better determine gesture inputs in strong ambient light environments. Image sensors including pixel 207 are particularly useful in the context of gesture recognition because pixel 207 can capture two consecutive images with a very short time between the first and second exposure cycles, which reduces motion blur artifacts and improves gesture recognition clarity.
上文所解释的过程就计算机软件及硬件而言来描述。所描述的技术可构成在有形的或非暂时性机器(例如,计算机)可读存储媒体内体现的机器可执行指令,所述指令在由机器执行时,将导致所述机器执行所描述的操作。此外,所述过程可在硬件内体现,例如,专用集成电路(“ASIC”)或其它硬件。The processes explained above are described in terms of computer software and hardware. The described techniques may constitute machine-executable instructions embodied in a tangible or non-transitory machine (e.g., computer) readable storage medium, which, when executed by a machine, will cause the machine to perform the described operations. In addition, the processes may be embodied in hardware, such as an application-specific integrated circuit ("ASIC") or other hardware.
有形的非暂时性机器可读存储媒体包含提供(例如,存储)呈可由机器(例如,计算机、网络装置、个人数字助理、制造工具、具有一或多个处理器的集合的任何装置等等)访问的形式的信息的任何机构。举例来说,机器可读存储媒体包含可记录/不可记录媒体(例如,只读存储器(ROM)、随机存取存储器(RAM)、磁盘存储媒体、光存储媒体、快闪存储器装置等等)。Tangible, non-transitory machine-readable storage media include any mechanism that provides (e.g., stores) information in a form accessible by a machine (e.g., a computer, a network device, a personal digital assistant, a manufacturing tool, any device having a collection of one or more processors, etc.). For example, machine-readable storage media include recordable/non-recordable media (e.g., read-only memory (ROM), random-access memory (RAM), magnetic disk storage media, optical storage media, flash memory devices, etc.).
本发明的所说明的实施例的以上描述(包含摘要中所描述的内容)并不意图为穷尽性的或将本发明限于所揭示的具体形式。尽管本文出于说明性目的描述了本发明的特定实施例及针对本发明的实例,但所属领域的技术人员将认识到,在本发明的范围内,各种修改都是可能的。The above description of the illustrated embodiments of the present invention (including what is described in the Abstract) is not intended to be exhaustive or to limit the invention to the precise forms disclosed. Although specific embodiments of the invention and examples thereof have been described herein for illustrative purposes, those skilled in the art will recognize that various modifications are possible within the scope of the invention.
依据以上详细描述可对本发明做出这些修改。以下权利要求书中使用的术语不应解释为将本发明限于本说明书中所揭示的特定实施例。而是,本发明的范围完全由以下权利要求书确定,将根据权利要求解释的既定原则解释以下权利要求书。These modifications may be made to the invention in light of the above detailed description. The terms used in the following claims should not be construed to limit the invention to the specific embodiments disclosed in the specification. Rather, the scope of the invention is to be determined entirely by the following claims, which are to be construed in accordance with established doctrines of claim interpretation.
Claims (18)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US14/557,075 US9461088B2 (en) | 2014-12-01 | 2014-12-01 | Image sensor pixel with multiple storage nodes |
| US14/557,075 | 2014-12-01 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| HK1221818A1 HK1221818A1 (en) | 2017-06-09 |
| HK1221818B true HK1221818B (en) | 2019-12-13 |
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