HK1217368B - Resonator with reduced sensitivity to climatic variations - Google Patents
Resonator with reduced sensitivity to climatic variations Download PDFInfo
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- HK1217368B HK1217368B HK16105251.5A HK16105251A HK1217368B HK 1217368 B HK1217368 B HK 1217368B HK 16105251 A HK16105251 A HK 16105251A HK 1217368 B HK1217368 B HK 1217368B
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Description
技术领域Technical Field
本发明涉及热补偿的游丝摆轮谐振器,其中,补偿游丝对气候变化具有减小的敏感度。The present invention relates to a thermally compensated sprung balance resonator, wherein the compensating spring has a reduced sensitivity to climate changes.
背景技术Background Art
在对钟表机芯进行的剧烈冷凝试验期间,很显然机芯的工作受到影响。During the intense condensation tests conducted on the watch movement, it became apparent that the operation of the movement was affected.
发明内容Summary of the Invention
本发明的一个目的是,通过提供一种具有非金属的芯的游丝来克服上述全部或部分缺点,该非金属的芯对气候变化具有减小的敏感度。One object of the present invention is to overcome all or part of the above-mentioned drawbacks by providing a balance spring having a non-metallic core having a reduced sensitivity to climate variations.
因此,本发明涉及一种用于热补偿的游丝摆轮谐振器的补偿游丝,所述补偿游丝包括由至少一种非金属材料形成的芯,所述非金属材料包括石英或掺杂硅(或未掺杂硅),在所述芯上至少部分形成二氧化硅涂层,其特征在于,所述芯部分地涂覆有阻挡并且不渗透湿气的层,以使所述补偿游丝对气候变化具有更小的敏感度。The present invention therefore relates to a compensating spring for a thermally compensated sprung-balance resonator, comprising a core formed from at least one non-metallic material, including quartz or doped (or undoped) silicon, on which a silicon dioxide coating is at least partially formed, characterised in that the core is partially coated with a layer that blocks and impermeable to moisture, so as to render the compensating spring less sensitive to climate changes.
因此应清楚的是,即使在剧烈冷凝的情况下,补偿游丝的工作也将更少地受到破坏,使得与摆轮协作形成的谐振器的整体工作不受影响或几乎不受影响。It should therefore be clear that, even in the event of severe condensation, the operation of the compensating spring will be less disrupted, so that the overall operation of the resonator formed in cooperation with the balance wheel is not affected or is hardly affected.
根据本发明的其它有利特征:Other advantageous features according to the invention are:
-阻挡并且不渗透湿气的所述层具有小于50纳米的厚度;- said layer which is barrier and impermeable to moisture has a thickness of less than 50 nanometers;
-阻挡并且不渗透湿气的所述层包括铬、钛或钽。The layer which is a barrier and impermeable to moisture comprises chromium, titanium or tantalum.
此外,本发明还涉及一种用于钟表的热补偿的谐振器,所述谐振器包括摆轮,其特征在于,所述摆轮与根据上述任一变型的补偿游丝协作。Furthermore, the invention relates to a thermally compensated resonator for a timepiece, comprising a balance wheel, characterized in that it cooperates with a compensating balance spring according to any of the variants described above.
附图说明BRIEF DESCRIPTION OF THE DRAWINGS
由以下参照附图以非限制性方式给出的说明,本发明的其它特征和优点将更清楚显现,其中:Other characteristics and advantages of the present invention will appear more clearly from the following description given in a non-limiting manner with reference to the accompanying drawings, in which:
-图1示出根据本发明的补偿游丝;- FIG. 1 shows a compensating balance spring according to the invention;
-图2至7示出根据本发明的补偿游丝的截面的变型。- Figures 2 to 7 show variations of the cross-section of the compensation spring according to the invention.
具体实施方式DETAILED DESCRIPTION
执行了一项研究来确定钟表机芯在剧烈冷凝情况下的运行状况。研究通过骤然越过露点来执行,例如通过维持大于80%的湿度率(hygrometry rate)并通过将温度降低至少15℃。A study was carried out to determine how a watch movement would perform under severe condensation. The study was performed by suddenly crossing the dew point, for example by maintaining a hygrometry rate greater than 80% and by reducing the temperature by at least 15°C.
结果显示钟表的工作受到影响,尤其是在游丝摆轮谐振器的补偿游丝至少部分由晶体或非晶氧化硅形成的情况下。此类型的补偿游丝例如可以由掺杂或非掺杂晶体硅(其上至少部分形成有二氧化硅涂层)或由石英形成。The results show that the operation of the timepiece is affected, in particular, when the balance resonator's balance spring is formed at least partially of crystalline or amorphous silicon oxide. This type of balance spring can be formed, for example, of doped or undoped crystalline silicon (on which a silicon dioxide coating is formed at least partially) or of quartz.
研究还表明,可以通过在包括晶体或非晶氧化硅的补偿游丝上形成抵御湿气的局部屏障而将剧烈冷凝的作用最小化。Research has also shown that the effects of severe condensation can be minimized by forming a local barrier against moisture on the compensation spring consisting of crystal or amorphous silicon oxide.
由此,本发明涉及一种用于热补偿的游丝摆轮谐振器的补偿游丝,该补偿游丝包括由至少一种非金属材料形成的芯。根据本发明有利地,该芯部分地涂覆有防潮层,即阻挡并且不渗透湿气的层,以使补偿游丝对气候变化具有更小的敏感度。The present invention thus relates to a compensating spring for a thermally compensated sprung-balance resonator, comprising a core made of at least one non-metallic material. Advantageously, according to the invention, this core is partially coated with a moisture barrier, i.e., a layer that blocks and impermeable to moisture, in order to render the compensating spring less sensitive to climate changes.
根据本发明,“部分涂覆的”芯指的是不是全部涂覆,即,仅芯的一部分被涂覆,例如一个或多个面或甚至仅一个面的部分。然而,优选的是氧化部件最大限度地被涂覆,而不涂覆整个游丝。According to the invention, a “partially coated” core means not fully coated, i.e. only a portion of the core is coated, for example one or more faces or even only part of one face. However, it is preferred that the oxidized parts are coated to the greatest extent possible without coating the entire balance spring.
根据本发明,防潮层具有小于50nm的厚度,优选约10nm,以避免在机械方面影响游丝的工作。然而,防潮层的厚度可以高达几微米,但是这种情况下关于游丝摆轮谐振器的热补偿一定要考虑在内。According to the invention, the moisture-proof layer has a thickness of less than 50 nm, preferably around 10 nm, in order to avoid mechanically affecting the functioning of the balance spring. However, the thickness of the moisture-proof layer may be up to several micrometers, but in this case thermal compensation of the balance-sprung resonator must be taken into account.
此外,防潮层优选为导电的并且对磁场具有低的灵敏度,例如抗磁性的、反铁磁性的或顺磁性的。Furthermore, the moisture barrier is preferably electrically conductive and has low sensitivity to magnetic fields, such as being diamagnetic, antiferromagnetic, or paramagnetic.
以示例的方式,防潮层因此可以包括铬、钛、钽、铝、锆、氧化铝、氧化铬、铬钨合金、聚四氟乙烯(PTFE)或氮化硅(Si3N4)。然而,优选铬、钛、钽或其合金中的一种,因为它们表现出最佳结果。By way of example, the moisture barrier may thus comprise chromium, titanium, tantalum, aluminium, zirconium, aluminium oxide, chromium oxide, chromium tungsten alloy, polytetrafluoroethylene (PTFE) or silicon nitride ( Si3N4 ). However, one of chromium, titanium, tantalum or alloys thereof is preferred since they show the best results.
图1至7示出根据本发明获得的并用于对与摆轮协作形成的谐振器热补偿的游丝1的变型。补偿游丝1优选地包括与卷绕成若干圈的带5成一体的内桩3。根据本发明,补偿游丝1的至少一个带5仅部分地涂覆有层7,该层7形成湿气的屏障。Figures 1 to 7 show a variant of a balance spring 1 obtained according to the invention and intended for thermally compensating a resonator formed in conjunction with a balance wheel. Compensating spring 1 preferably comprises a collet 3 integral with a band 5 wound in several turns. According to the invention, at least one band 5 of compensating spring 1 is only partially coated with a layer 7 forming a barrier to moisture.
带5具有长度l、厚度e和高度h。它包括由至少一种材料11、11b、13b、15b、11c、17c、19c、11d、13d、15d、17d、19d、11e、13e、15e、17e、19e、11f、21f形成的芯9a、9b、9c、9c、9e、9f。The strip 5 has a length l, a thickness e and a height h. It comprises a core 9a, 9b, 9c, 9c, 9e, 9f formed of at least one material 11, 11b, 13b, 15b, 11c, 17c, 19c, 11d, 13d, 15d, 17d, 19d, 11e, 13e, 15e, 17e, 19e, 11f, 21f.
根据图2至7的变型,芯9a、9b、9c、9d、9e、9f可以由单独一种材料11a形成,例如石英,或由几种材料11b、13b、15b、11c、17c、19c、11d、13d、15d、17d、19d、11e、13e、15e、17e、19e、11f、21f形成。According to the variants of Figures 2 to 7, the cores 9a, 9b, 9c, 9d, 9e, 9f can be formed from a single material 11a, for example quartz, or from several materials 11b, 13b, 15b, 11c, 17c, 19c, 11d, 13d, 15d, 17d, 19d, 11e, 13e, 15e, 17e, 19e, 11f, 21f.
当芯9b、9c、9d、9e、9f由若干种材料形成时,它可以在游丝1的带5被部分地涂覆防潮(即阻挡并且不渗透湿气)的层7之前以若干种材料全部涂覆11d、13d、15d、17d、19d、11e、13e、15e、17e、19e、11f、21f或部分涂覆11b、13b、15b、11c、17c、19c。When the core 9b, 9c, 9d, 9e, 9f is formed from several materials, it can be fully coated with 11d, 13d, 15d, 17d, 19d, 11e, 13e, 15e, 17e, 19e, 11f, 21f or partially coated with 11b, 13b, 15b, 11c, 17c, 19c of several materials before the band 5 of the balance spring 1 is partially coated with the layer 7 that is waterproof (that is, it blocks and does not penetrate moisture).
每个涂层13b、15b、17c、19c、13d、15d、17d、19d、13e、15e、17e、19e可以是相同类型和相同厚度或不同类型和不同厚度。以示例的方式,芯9b、9c、9d、9e、9f可以包括掺杂或未掺杂硅11b、11c、11d、11e、11f,其上至少部分形成二氧化硅涂层13b、15b、17c、19c、13d、15d、17d、19d、13e、15e、17e、19e、21f。Each coating 13b, 15b, 17c, 19c, 13d, 15d, 17d, 19d, 13e, 15e, 17e, 19e can be of the same type and the same thickness or of different types and different thicknesses. By way of example, the cores 9b, 9c, 9d, 9e, 9f can include doped or undoped silicon 11b, 11c, 11d, 11e, 11f, on which the silicon dioxide coating 13b, 15b, 17c, 19c, 13d, 15d, 17d, 19d, 13e, 15e, 17e, 19e, 21f is at least partially formed.
如图2-7中所示,局部涂层7可以出现在厚度e的全部或部分上以及/或高度h的全部或部分上以及/或长度l的全部或部分上,而游丝没有被整体涂覆。然而,优选的是氧化部件最大限度被涂覆,如图3和4中的情况,其中优选氧化涂层13b、15b、17c、19c被防潮的层7保护。As shown in Figures 2 to 7 , a partial coating 7 may be present over all or part of the thickness e and/or all or part of the height h and/or all or part of the length l, without the balance spring being entirely coated. However, it is preferred that the oxidized components are coated to the greatest extent possible, as is the case in Figures 3 and 4 , wherein the oxidized coatings 13b, 15b, 17c, 19c are preferably protected by a moisture-proof layer 7.
本发明还涉及一种制造用于热补偿的游丝摆轮谐振器的补偿游丝1的方法,包括以下步骤:The invention also relates to a method for manufacturing a compensation spring 1 for a thermally compensated sprung balance resonator, comprising the following steps:
a)形成包括热补偿的芯9a、9b、9c、9d、9e、9f的游丝,该热补偿的芯由至少一种材料11a、11b、13b、15b、11c、17c、19c、11d、13d、15d、17d、19d、11e、13e、15e、17e、19e、11f、21f形成;a) forming a balance spring comprising a thermally compensated core 9a, 9b, 9c, 9d, 9e, 9f formed from at least one material 11a, 11b, 13b, 15b, 11c, 17c, 19c, 11d, 13d, 15d, 17d, 19d, 11e, 13e, 15e, 17e, 19e, 11f, 21f;
b)用至少一个防潮的层7部分地涂覆芯9a、9b、9c、9d、9e、9f,以使游丝1对气候变化的敏感度更低。b) Partially coating the cores 9a, 9b, 9c, 9d, 9e, 9f with at least one moisture-proof layer 7, in order to make the balance spring 1 less sensitive to climate changes.
根据本发明,步骤a)可以这样实现:在希望的板中刻蚀出游丝的预期图案以形成芯9a、9b、9c、9d、9e、9f的全部或部分11a、11b、11c、11d、11e、11f。在晶体硅和石英的示例中,可以设想深反应离子刻蚀(DRIE)来实现步骤a)。According to the invention, step a) can be achieved by etching the desired pattern of the balance spring in the desired plate to form all or part 11a, 11b, 11c, 11d, 11e, 11f of the cores 9a, 9b, 9c, 9d, 9e, 9f. In the case of crystalline silicon and quartz, deep reactive ion etching (DRIE) can be envisaged to achieve step a).
当然,步骤a)还包括部分或全部涂覆从第一阶段的刻蚀获得的游丝的至少一个第二阶段13b、15b、17c、19c、13d、15d、17d、19d、13e、15e、17e、19e、21f以完成芯9b、9c、9d、9e、9f。当在步骤a)的第一阶段中已经刻蚀了掺杂或未掺杂的晶体硅片时,该第二阶段例如可以包括用于形成二氧化硅的热氧化作用。Of course, step a) also comprises the partial or complete coating of at least one second stage 13b, 15b, 17c, 19c, 13d, 15d, 17d, 19d, 13e, 15e, 17e, 19e, 21f of the balance spring obtained by etching in the first stage, so as to complete the core 9b, 9c, 9d, 9e, 9f. When a doped or undoped crystalline silicon wafer has already been etched in the first stage of step a), this second stage may, for example, consist of a thermal oxidation process to form silicon dioxide.
步骤b)允许沉积具有小于50nm并且优选地约10nm的厚度的至少一个防潮层7。步骤b)例如可以通过任何薄层沉积方法来完成,例如气相沉积,以优选地沉积铬、钛或钽,或其合金中的一种,它们也有利地是对磁场不敏感的导电材料。Step b) allows the deposition of at least one moisture barrier layer 7 having a thickness of less than 50 nm and preferably of the order of 10 nm. Step b) can be carried out, for example, by any thin-layer deposition method, such as vapor deposition, to preferably deposit one of chromium, titanium or tantalum, or alloys thereof, which are also advantageously electrically conductive materials that are insensitive to magnetic fields.
当然,本发明不限于所示的示例,而可以具有本领域技术人员可以想到的各种变型和替代。特别地,可以设想能形成防潮屏障的任意材料,不限于铬、钛或钽,或其合金中的一种,甚至不限于说明书中提到的其它材料。Of course, the invention is not limited to the examples shown, but can be subjected to various modifications and alternatives that will occur to a person skilled in the art. In particular, any material capable of forming a moisture barrier can be envisaged, not limited to chromium, titanium or tantalum, or one of their alloys, or even to the other materials mentioned in the description.
在钟表包括使得游丝可视的部件的情况下,例如“镂空”钟表或具有透明后盖的钟表,还可以根据防潮材料的特定颜色来选择防潮材料,以改善其美学外观。In the case of a timepiece comprising a component making the balance spring visible, such as a “skeleton” timepiece or a timepiece with a transparent back, the moisture-proof material may also be chosen according to its particular colour so as to improve its aesthetic appearance.
Claims (10)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| EP20130159870 EP2781968A1 (en) | 2013-03-19 | 2013-03-19 | Resonator that is less sensitive to climate variations |
| EP13159870.8 | 2013-03-19 | ||
| PCT/EP2014/052833 WO2014146833A2 (en) | 2013-03-19 | 2014-02-13 | Resonator with reduced sensitivity to climatic variations |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| HK1217368A1 HK1217368A1 (en) | 2017-01-06 |
| HK1217368B true HK1217368B (en) | 2019-09-20 |
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