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HK1207682B - Method of patterning electrically-conductive film on flexible substrates - Google Patents

Method of patterning electrically-conductive film on flexible substrates Download PDF

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Publication number
HK1207682B
HK1207682B HK15108133.4A HK15108133A HK1207682B HK 1207682 B HK1207682 B HK 1207682B HK 15108133 A HK15108133 A HK 15108133A HK 1207682 B HK1207682 B HK 1207682B
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conductive
ito
conductive film
substrate
curvature
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HK15108133.4A
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HK1207682A1 (en
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J.L.西
李达为
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肯特州立大学
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Publication of HK1207682B publication Critical patent/HK1207682B/en

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Description

在柔性衬底上图案化导电膜的方法Method for patterning conductive film on flexible substrate

相关申请的交叉引用CROSS-REFERENCE TO RELATED APPLICATIONS

本申请要求在2012年1月20日提交的美国临时申请号61/632,236的权益,此申请的内容以引用的方式并入本文。This application claims the benefit of U.S. Provisional Application No. 61/632,236, filed January 20, 2012, the contents of which are incorporated herein by reference.

技术领域Technical Field

总体来说,本发明涉及形成导电电极的方法。具体地说,本发明涉及在柔性衬底上形成导电电极的方法。更具体地说,本发明涉及通过控制设置在柔性衬底上的导电膜(如铟-锡-氧化物(ITO))层的破裂来形成图案化电极的方法。The present invention generally relates to methods for forming conductive electrodes. Specifically, the present invention relates to methods for forming conductive electrodes on flexible substrates. More specifically, the present invention relates to methods for forming patterned electrodes by controlling the fracture of a conductive film (e.g., indium-tin-oxide (ITO)) layer disposed on a flexible substrate.

背景技术Background Art

典型平板显示器,如LC(液晶)显示器和等离子显示器,利用真空沉积在刚性玻璃衬底上的导电的铟-锡-氧化物(ITO)薄膜来控制显示器的多种操作功能。也就是说,在所述平板显示器的生产期间,使用常规光微影技术将ITO膜图案化为光学透明的电极。另外,利用光微影技术生产平板显示器需要电极至显示器的驱动电路的精确并准确的接合,这可能是昂贵的。然而,近来平板显示器工业已试图用柔性衬底(如由柔性塑料形成的那些)代替刚性玻璃衬底的使用,同时仍然保持使用ITO或其它导电聚合物,使用改进的印刷和光微影技术来形成透明电极。Typical flat panel displays, such as LC (liquid crystal) displays and plasma displays, utilize conductive indium-tin-oxide (ITO) thin films vacuum deposited on rigid glass substrates to control various operating functions of the display. That is, during the production of the flat panel displays, the ITO films are patterned into optically transparent electrodes using conventional photolithography techniques. In addition, the production of flat panel displays using photolithography requires precise and accurate bonding of the electrodes to the display's drive circuitry, which can be expensive. However, recently the flat panel display industry has attempted to replace the use of rigid glass substrates with flexible substrates (such as those formed from flexible plastics), while still maintaining the use of ITO or other conductive polymers, using improved printing and photolithography techniques to form the transparent electrodes.

另外,虽然ITO具有许多电子应用(包括例如平板显示器和光伏器件)所需要的期望光学特性和电特性,但是ITO是脆性的,并且当其上承载ITO膜的衬底弯曲或挠曲时,ITO容易破裂。因此,使用ITO的电子器件倾向于易碎并且需要小心处理,并且在一些情况下,可导致所述电子器件的降低的生产率。相反,为ITO的替代物的导电聚合物具有比ITO更具柔性并且能够在利用印刷和光微影技术的电子器件制造工艺中使用的优点。然而,与ITO相比,导电聚合物具有多种缺点,包括减小的导电性和减小的透光性。In addition, although ITO has the desired optical and electrical properties required for many electronic applications (including, for example, flat panel displays and photovoltaic devices), ITO is brittle and easily breaks when the substrate on which the ITO film is carried is bent or flexed. Therefore, electronic devices using ITO tend to be fragile and require careful handling, and in some cases, can lead to reduced productivity of the electronic devices. In contrast, conductive polymers, which are alternatives to ITO, have the advantage of being more flexible than ITO and able to be used in electronic device manufacturing processes using printing and photolithography techniques. However, conductive polymers have various disadvantages compared to ITO, including reduced conductivity and reduced light transmittance.

因此,存在对于一种低成本的将导电膜(如铟-锡-氧化物(ITO))在柔性衬底上图案化为导电电极的方法的需要。另外,存在对于一种与连续的卷装进出(roll-to-roll)制造工艺相容的将导电膜(如铟-锡-氧化物(ITO))在柔性衬底上图案化为导电电极的方法的需要。另外,还存在对于一种将导电膜(如铟-锡-氧化物(ITO))图案化为精确限定的导电电极的方法的需要。另外,存在对于一种易于执行并且消除了对于昂贵的以及对环境有害的材料和溶剂的需要的在柔性衬底上图案化导电膜(如铟-锡-氧化物(ITO))的方法的需要。Therefore, there is a need for a low-cost method for patterning a conductive film, such as indium-tin-oxide (ITO), into a conductive electrode on a flexible substrate. Furthermore, there is a need for a method for patterning a conductive film, such as indium-tin-oxide (ITO), into a conductive electrode on a flexible substrate that is compatible with a continuous roll-to-roll manufacturing process. Furthermore, there is a need for a method for patterning a conductive film, such as indium-tin-oxide (ITO), into a precisely defined conductive electrode. Furthermore, there is a need for a method for patterning a conductive film, such as indium-tin-oxide (ITO), onto a flexible substrate that is easy to perform and eliminates the need for expensive and environmentally harmful materials and solvents.

发明内容Summary of the Invention

根据上文,本发明的第一方面提供一种图案化导电膜的方法,所述方法包括:提供具有设置在其上的导电膜的柔性衬底以形成组合层、使所述柔性衬底围绕曲率半径弯曲,以及使所述曲率半径沿所述组合层移动以在所述导电膜中形成多个裂缝线,其中所述多个裂缝线中的每一对在其之间限定导电部分并且使所述导电部分电绝缘。According to the above, a first aspect of the present invention provides a method for patterning a conductive film, the method comprising: providing a flexible substrate having a conductive film disposed thereon to form a combined layer, bending the flexible substrate around a radius of curvature, and moving the radius of curvature along the combined layer to form a plurality of crack lines in the conductive film, wherein each pair of the plurality of crack lines defines a conductive portion therebetween and electrically insulates the conductive portion.

本发明的另一个方面在于提供一种图案化导电膜的方法,所述方法包括:提供具有设置在其上的导电膜的柔性衬底,以便形成细长的组合层;提供第一和第二大体平行的板,所述板通过间隙间隔开;将所述衬底的一部分附接至第一板和第二板中的每一个,以使所述组合层以曲率半径横跨所述间隙弯曲;以及使所述第一板和所述第二板中的一个相对于另一个滑动,以便使所述组合层以所述曲率半径弯曲,以便在所述导电膜中形成多个裂缝线,从而所述多个裂缝线中的每一对在其之间限定导电部分并且使所述导电部分电绝缘。Another aspect of the present invention is to provide a method for patterning a conductive film, the method comprising: providing a flexible substrate having a conductive film disposed thereon so as to form an elongated combined layer; providing first and second substantially parallel plates, the plates being separated by a gap; attaching a portion of the substrate to each of the first plate and the second plate so that the combined layer is bent across the gap at a radius of curvature; and sliding one of the first plate and the second plate relative to the other so as to bend the combined layer at the radius of curvature so as to form a plurality of crack lines in the conductive film, whereby each pair of the plurality of crack lines defines a conductive portion therebetween and electrically insulates the conductive portion.

附图说明BRIEF DESCRIPTION OF THE DRAWINGS

参考以下描述、附加权利要求和附图将更好地理解本发明的这些和其它特征和优点,其中:These and other features and advantages of the present invention will become better understood with reference to the following description, appended claims, and accompanying drawings, in which:

图1A为示出根据本发明的概念,由PET衬底和设置在其上的铟-锡-氧化物(ITO)膜形成的组合层的正视图;FIG1A is a front view showing a composite layer formed of a PET substrate and an indium-tin-oxide (ITO) film disposed thereon according to the concept of the present invention;

图1B为示出根据本发明的概念,组合的PET/ITO层围绕曲率半径弯曲以在ITO膜中形成裂缝线的正视图;FIG1B is an elevation view showing a combined PET/ITO layer being bent about a radius of curvature to form a crack line in the ITO film in accordance with the concepts of the present invention;

图1C为示出根据本发明的概念,组合的PET/ITO层已弯曲之后在ITO膜中形成的裂缝线的正视图;FIG1C is an elevation view showing a crack line formed in an ITO film after the combined PET/ITO layer has been bent, in accordance with the concepts of the present invention;

图2为根据本发明的概念,组合的PET/ITO层的透射光学显微镜图像的示意性表示,其示出在ITO膜中形成的裂缝线;FIG2 is a schematic representation of a transmission optical microscope image of a combined PET/ITO layer showing crack lines formed in the ITO film, in accordance with the concepts of the present invention;

图3为根据本发明的概念,示出组合的PET/ITO层在分开预定距离的两个平玻璃板之间滚动以在ITO膜中形成裂缝线的正视图;并且FIG3 is a front view showing a combined PET/ITO layer being rolled between two flat glass plates separated by a predetermined distance to form a crack line in the ITO film, in accordance with the concepts of the present invention; and

图4为根据本发明的概念,组合的PET/ITO层的扫描电子显微镜(SEM)图像的示意性表示,其示出在ITO膜中形成的裂缝线。4 is a schematic representation of a scanning electron microscope (SEM) image of a combined PET/ITO layer showing crack lines formed in the ITO film, in accordance with the concepts of the present invention.

具体实施方式DETAILED DESCRIPTION

提出一种将设置在柔性衬底上的导电膜图案化以形成导电电极的方法。具体来说,将可包含铟-锡-氧化物(ITO)或其它合适材料的薄导电膜10涂覆在柔性衬底20上,以形成组合层30,如图1A中所示。一方面,柔性衬底20可包含聚对苯二甲酸乙二酯(PET)以及任何其它合适的柔性材料,例如像塑料。可使用任何合适的工艺,例如像溅射或真空沉积,将ITO膜10涂覆或以其它方式设置在柔性衬底20上。一旦将ITO膜10设置在柔性衬底20上,就向组合层30施加应力,以使ITO膜10破裂成为电绝缘的导电部分。确切地说,使ITO膜10破裂的能力是其脆性(即,不能维持尺寸变化而不断裂)以及衬底20被挠曲的能力导致的。A method for patterning a conductive film disposed on a flexible substrate to form a conductive electrode is proposed. Specifically, a thin conductive film 10, which may comprise indium-tin-oxide (ITO) or other suitable material, is coated on a flexible substrate 20 to form a composite layer 30, as shown in FIG1A . In one aspect, the flexible substrate 20 may comprise polyethylene terephthalate (PET) and any other suitable flexible material, such as, for example, plastic. The ITO film 10 may be coated or otherwise disposed on the flexible substrate 20 using any suitable process, such as, for example, sputtering or vacuum deposition. Once the ITO film 10 is disposed on the flexible substrate 20, stress is applied to the composite layer 30 to cause the ITO film 10 to break into electrically insulating conductive portions. Specifically, the ability to cause the ITO film 10 to break is due to its brittleness (i.e., its inability to sustain dimensional changes without breaking) and the ability of the substrate 20 to be flexed.

为了使导电ITO膜10破裂或以其它方式将其图案化,通过机械挠曲或通过热应力的施加向ITO膜10施加应力。通过使组合层30以待讨论的方式弯曲来实现机械挠曲,弯曲的曲率半径从而相反地控制施加至衬底20和ITO膜10的机械应力的量值。也就是说,用于形成弯曲的曲率半径越小,施加到衬底20和ITO膜10上的机械应力的量越大。或者,在对组合层30热处理的情况下,衬底20和导电ITO膜10具有不同的热膨胀系数,以使温度的改变将产生机械应变,所述机械应变用于在导电ITO膜10中产生裂缝线In order to crack the conductive ITO film 10 or otherwise pattern it, stress is applied to the ITO film 10 by mechanical bending or by application of thermal stress. Mechanical bending is achieved by bending the combined layer 30 in the manner to be discussed, with the radius of curvature of the bend thus inversely controlling the amount of mechanical stress applied to the substrate 20 and the ITO film 10. That is, the smaller the radius of curvature used to form the bend, the greater the amount of mechanical stress applied to the substrate 20 and the ITO film 10. Alternatively, in the case of heat treatment of the combined layer 30, the substrate 20 and the conductive ITO film 10 have different coefficients of thermal expansion so that changes in temperature will produce mechanical strain that is used to produce a crack line in the conductive ITO film 10.

因此,在将ITO膜10设置在柔性衬底20上之后,通过使衬底20弯曲来向组合层30施加机械应力,以便具有指定为“R”的曲率半径。一方面,曲率半径R可通过简单地使组合层30在其自身弯曲来产生,或通过使组合部分围绕大体圆柱部分32(如杆)弯曲来产生,以使组合层围绕曲率半径R延伸设定量,例如像约180度,如图1B中所示。施加至导电ITO膜10的弯曲应力在ITO膜10中形成多个均匀间隔的裂缝线40,如图1C和图2中所示。裂缝线40在ITO膜10中形成为以与组合层30正在弯曲的方向大体垂直的方向延伸的线。另外,间隔的裂缝线40在其之间在ITO膜10中限定大体均匀的导电带或导电部分50。另外,应了解,裂缝线40使相邻导电带或导电部分50彼此电绝缘,从而允许导电部分50充当导电电极。Thus, after the ITO film 10 is disposed on the flexible substrate 20, a mechanical stress is applied to the combined layer 30 by bending the substrate 20 so as to have a radius of curvature designated as "R." In one aspect, the radius of curvature R can be generated by simply bending the combined layer 30 on itself, or by bending the combined portion around a generally cylindrical portion 32 (e.g., a rod) so that the combined layer extends about the radius of curvature R by a set amount, such as, for example, approximately 180 degrees, as shown in FIG. 1B . The bending stress applied to the conductive ITO film 10 forms a plurality of evenly spaced crack lines 40 in the ITO film 10, as shown in FIG. 1C and FIG. 2 . The crack lines 40 are formed in the ITO film 10 as lines extending in a direction generally perpendicular to the direction in which the combined layer 30 is being bent. Additionally, the spaced crack lines 40 define generally uniform conductive strips or portions 50 in the ITO film 10 therebetween. Furthermore, it should be appreciated that the crack lines 40 electrically isolate adjacent conductive strips or portions 50 from one another, thereby allowing the conductive portions 50 to function as conductive electrodes.

继续参考图1A至图1B,先前讨论的通过组合层30的机械弯曲施加的应力可根据以下方法进行计算。应了解,出于以下讨论的目的,导电膜10的厚度通常比衬底20薄几个数量级。因此,当计算施加至组合层30的应力时,导电膜10的厚度忽略不计,如以下所呈现。确切地说,参考图1B,在其中衬底20由PET形成并且围绕具有曲率半径“R”的弯曲部分32弯曲180度的情况下,邻近弯曲部分32的曲率半径R的衬底20内表面的长度等于πR。衬底20的外表面具有比其内表面更长的长度,这允许衬底20适应指定为“T1”的衬底膜20的厚度。另外,衬底20的长度等于πT1,并且衬底20围绕其弯曲的曲率半径增加至R+T1,得到膜的总长π(R+T1)。因此,应力可表示为衬底20适应弯曲所需要的长度的相对增加,并且由以下方程式定义:其简化为T1/R。因此,衬底厚度20与用于使组合层30弯曲的弯曲部分32的曲率半径R的比限定了施加至组合层30的应力,其最终导致在导电ITO膜10中形成裂缝线40。Continuing with reference to Figures 1A-1B, the stress applied by mechanical bending of the combined layer 30, previously discussed, can be calculated according to the following method. It should be understood that for the purposes of the following discussion, the thickness of the conductive film 10 is typically several orders of magnitude thinner than that of the substrate 20. Therefore, when calculating the stress applied to the combined layer 30, the thickness of the conductive film 10 is neglected, as presented below. Specifically, referring to Figure 1B, in the case where the substrate 20 is formed of PET and is bent 180 degrees about a curved portion 32 having a radius of curvature "R," the length of the inner surface of the substrate 20 adjacent to the radius of curvature R of the curved portion 32 is equal to πR. The outer surface of the substrate 20 has a longer length than its inner surface, which allows the substrate 20 to accommodate the thickness of the substrate film 20, designated as " T1 ." Furthermore, the length of the substrate 20 is equal to πT1 , and the radius of curvature about which the substrate 20 is bent is increased to R + T1 , resulting in a total length of the film of π(R + T1 ). Therefore, stress can be expressed as the relative increase in length required for substrate 20 to accommodate bending, and is defined by the following equation: which simplifies to T 1 /R. Therefore, the ratio of substrate thickness 20 to the radius of curvature R of curved portion 32 used to bend combined layer 30 defines the stress applied to combined layer 30, which ultimately results in the formation of crack line 40 in conductive ITO film 10.

换句话说,由于柔性衬底20围绕由弯曲部分32提供的曲率半径R弯曲,如图1B中所示,所以衬底20的外表面伸长和/或衬底的内表面收缩由曲率半径R和衬底的厚度T1限定的量,以便适应弯曲。衬底20外表面的长度将比围绕弯曲的衬底20的内表面的长度长衬底20厚度T1的π倍,如图1B中所示。因此,由弯曲诱导的应力的相对量等于衬底20的厚度T1相对于正用于使组合层30弯曲的弯曲部分32的曲率半径R的比。例如,在其中衬底20包括由具有约7密耳或约0.17mm的厚度T1的PET形成的衬底并且围绕具有1mm的曲率半径R的弯曲部分32紧密弯曲的情况下,衬底20长度的改变%将为17%,这足以在ITO膜10中产生裂缝线40。In other words, as flexible substrate 20 bends around the radius of curvature R provided by curved portion 32, as shown in FIG1B , the outer surface of substrate 20 stretches and/or the inner surface of substrate 20 contracts by an amount defined by radius of curvature R and substrate thickness T1 to accommodate the bend. The length of the outer surface of substrate 20 will be longer than the length of the inner surface of substrate 20 around the bend by π times the thickness T1 of substrate 20, as shown in FIG1B . Therefore, the relative amount of stress induced by the bend is equal to the ratio of the thickness T1 of substrate 20 relative to the radius of curvature R of curved portion 32 being used to bend combined layer 30. For example, in the case where substrate 20 comprises a substrate formed of PET having a thickness T1 of approximately 7 mils, or approximately 0.17 mm, and is tightly bent around curved portion 32 having a radius of curvature R of 1 mm, the percent change in length of substrate 20 will be 17%, which is sufficient to generate crack line 40 in ITO film 10.

或者,还可通过向组合层30应用热变化,以便相对于导电ITO膜10的尺寸改变衬底20的尺寸来在导电ITO膜中形成裂缝线40。也就是说,如果柔性衬底20的热膨胀系数显著不同于导电膜10,那么可通过加热或冷却组合层30来在导电膜10中产生裂缝线40。另外,如果热膨胀系数对于柔性衬底20是各向同性的,那么组合层30的温度变化将在导电膜10中产生随机对准的裂缝线。或者,可能使用以一个方向均匀拉伸的柔性衬底20。将组合层30加热至玻璃转变温度以上将产生衬底20的在一个方向上的大的均匀收缩,所述收缩可用于在导电膜10中产生均匀的裂缝线,类似于由先前讨论的弯曲技术产生的那些。Alternatively, crack lines 40 can also be formed in the conductive ITO film by applying thermal changes to the combined layer 30 to change the dimensions of the substrate 20 relative to the dimensions of the conductive ITO film 10. That is, if the coefficient of thermal expansion of the flexible substrate 20 is significantly different from that of the conductive film 10, then crack lines 40 can be generated in the conductive film 10 by heating or cooling the combined layer 30. Additionally, if the coefficient of thermal expansion is isotropic for the flexible substrate 20, then temperature changes in the combined layer 30 will produce randomly aligned crack lines in the conductive film 10. Alternatively, it is possible to use a flexible substrate 20 that is uniformly stretched in one direction. Heating the combined layer 30 above the glass transition temperature will produce a large, uniform contraction of the substrate 20 in one direction, which can be used to produce uniform crack lines in the conductive film 10, similar to those produced by the bending techniques discussed previously.

因此,导电膜10中形成的裂缝线40用于破坏或至少大大减小导电膜10的导电性,并且因此用于使导电膜10的相邻的导电部分或导电带50电绝缘。因此,导电ITO膜10的受控破裂允许形成规则间隔的裂缝线40,这允许所述工艺用于在具有精确形状和尺寸的导电膜10中形成电极图案。例如,可通过均匀地滚动涂有铟-锡-氧化物(ITO)薄膜10的聚酯PET衬底20来产生分开5-10微米的均匀的裂缝线40。ITO膜10中的裂缝形成为垂直于弯曲方向的线。Thus, the crack lines 40 formed in the conductive film 10 serve to destroy or at least greatly reduce the conductivity of the conductive film 10 and, therefore, to electrically insulate adjacent conductive portions or strips 50 of the conductive film 10. Thus, controlled fracturing of the conductive ITO film 10 allows for the formation of regularly spaced crack lines 40, which allows the process to be used to form electrode patterns in the conductive film 10 with precise shapes and dimensions. For example, uniform crack lines 40 separated by 5-10 microns can be produced by uniformly rolling a polyester PET substrate 20 coated with an indium-tin-oxide (ITO) thin film 10. Cracks in the ITO film 10 are formed as lines perpendicular to the bending direction.

在实验评估期间,通过将组合层30定位在通过具有预定距离的间隙112间隔开的两个厚的、相对的平玻璃板100与110之间来在导电ITO膜10中形成裂缝40,如图3中所示。应了解,板100、110可由任何合适的材料(例如像铝)形成。一方面,板100和110可通过滚动间隔件114分开,所述滚动间隔件114如圆柱形杆或其它可滚动物品或辊,如球轴承或珠粒,以维持板100、110处于大体平行布置,以限定待向组合层30赋予的曲率半径并且促进板100、110相对于彼此的移动。确切地说,组合层30被定位,以使柔性衬底20的一个端部附接到玻璃板100的内表面120,而柔性衬底20的另一个端部附接到另一个玻璃板110的内表面130,如图3中所示。接下来,组合层30在两个板100、110之间滚动,ITO膜10和衬底20从而被弯曲由曲率半径R限定的量,所述曲率半径R由间隙112的大小确定。一方面,在此构型中,柔性衬底20弯曲约180度。因此,裂缝线40在ITO膜10中沿弯曲或沿曲率轴R形成,以便适应由通过间隙112限定的曲率半径r施加的应力。例如,图4示出通过使组合层30弯曲产生的裂缝线40的SEM(扫描电子显微镜)图像,其中板100、110被间隔,以使间隙112向组合层30赋予1mm的曲率半径。During experimental evaluation, cracks 40 were formed in the conductive ITO film 10 by positioning the combined layer 30 between two thick, opposing flat glass plates 100 and 110 separated by a gap 112 having a predetermined distance, as shown in FIG3 . It should be understood that the plates 100, 110 can be formed from any suitable material, such as, for example, aluminum. In one aspect, the plates 100 and 110 can be separated by a rolling spacer 114, such as a cylindrical rod or other rollable object or roller, such as a ball bearing or a bead, to maintain the plates 100, 110 in a generally parallel arrangement to define the radius of curvature to be imparted to the combined layer 30 and to facilitate movement of the plates 100, 110 relative to each other. Specifically, the combined layer 30 was positioned so that one end of the flexible substrate 20 was attached to the inner surface 120 of the glass plate 100, while the other end of the flexible substrate 20 was attached to the inner surface 130 of the other glass plate 110, as shown in FIG3 . Next, the combined layer 30 is rolled between the two plates 100 and 110, thereby bending the ITO film 10 and substrate 20 by an amount defined by a radius of curvature R, which is determined by the size of the gap 112. On the one hand, in this configuration, the flexible substrate 20 is bent approximately 180 degrees. As a result, a crack line 40 is formed in the ITO film 10 along the bend or along the axis of curvature R to accommodate the stress applied by the radius of curvature r defined by the gap 112. For example, FIG. 4 shows an SEM (scanning electron microscope) image of a crack line 40 produced by bending the combined layer 30, where the plates 100 and 110 are spaced apart so that the gap 112 imparts a radius of curvature of 1 mm to the combined layer 30.

因此,一方面,预期的是,限定导电部分50的宽度的将裂缝线40分开的距离随着用于使组合层30弯曲的曲率半径R的增加而增加,从而所述分开的量取决于多种其它指标,包括但不限于:ITO膜10的厚度,以及ITO膜10和衬底20的柔性和脆性。例如,对于1毫米或更小的曲率半径,裂缝线分开约2-8微米,如图2和图3中所示。在另一个实施例中,约2mm的曲率半径可产生分开约10-20微米的裂缝线。Thus, in one aspect, it is expected that the distance separating crack lines 40, which defines the width of conductive portion 50, increases with increasing radius of curvature R used to bend combined layer 30, with the amount of separation depending on a variety of other factors, including, but not limited to, the thickness of ITO film 10, and the flexibility and brittleness of ITO film 10 and substrate 20. For example, for a radius of curvature of 1 mm or less, crack lines are separated by approximately 2-8 microns, as shown in Figures 2 and 3. In another embodiment, a radius of curvature of approximately 2 mm can produce crack lines separated by approximately 10-20 microns.

接着,在ITO膜10已弯曲以在其中形成裂缝线40之后,当沿裂缝线40测量时,ITO膜10的导电性基本上保持不变,而与用于完成弯曲过程的曲率半径R无关。对于利用近似1mm或更小的紧密或小曲率半径R的弯曲,垂直于所形成的裂缝线40所测量的电导率降低超过一个数量级。以下表1示出作为弯曲曲率半径R的函数的ITO膜10的并联电阻和垂直电阻(电导率的倒数),其中示出虽然垂直电导率(即,垂直于裂缝线40的方向上的电导率)随着减少的曲率半径R而减少,但其并不消除。Next, after the ITO film 10 has been bent to form a crack line 40 therein, the conductivity of the ITO film 10, when measured along the crack line 40, remains substantially unchanged, regardless of the curvature radius R used to complete the bending process. For bending with a tight or small curvature radius R of approximately 1 mm or less, the conductivity measured perpendicular to the formed crack line 40 decreases by more than an order of magnitude. Table 1 below shows the parallel resistance and vertical resistance (the inverse of conductivity) of the ITO film 10 as a function of the bending curvature radius R, showing that although the vertical conductivity (i.e., the conductivity in the direction perpendicular to the crack line 40) decreases with decreasing curvature radius R, it does not disappear.

或者,可将裂缝线40扩大以增大平行于和垂直于裂缝线40的方向所测量的电导率的差分。例如,使用稀HCL的光化学蚀刻可用于去除裂缝线40中保留的ITO的任何残余物,所述残余物将促进裂缝线40两端的电传导。因此,裂缝线40的电导率进一步减小。Alternatively, the crack line 40 may be enlarged to increase the difference in conductivity measured parallel to and perpendicular to the crack line 40. For example, photochemical etching using dilute HCl may be used to remove any remnants of ITO remaining in the crack line 40, which would promote electrical conduction across the crack line 40. As a result, the conductivity of the crack line 40 is further reduced.

另外,为了进一步减小裂缝线40的电导率,可在垂直于裂缝线40的方向上单轴向地拉伸衬底20。单轴向拉伸已显示将电导率的差分再提高一个数量级至超过500:1。Additionally, to further reduce the conductivity of the crack line 40, the substrate 20 may be uniaxially stretched in a direction perpendicular to the crack line 40. Uniaxial stretching has been shown to increase the difference in conductivity by another order of magnitude to over 500:1.

另外,使用上述ITO破裂工艺形成导电电极的方法可用于形成聚合物分散的液晶(PDLC)光闸或窗口。另外,裂缝线40的平行方向与垂直方向之间的差分电导率允许裂缝线40之间的各个导电部分50用于寻址应用,这通过仅在衬底20的部分的两端形成电接触来对适当的导电部分50充电来达成。因为电场可在裂缝线40两端导电,所以还取决于所施加电场的频率,在较小程度上对未寻址导电部分50进行充电。另外,差分电导率将允许在所述应用中使用低得多的频率。Additionally, the method of forming conductive electrodes using the aforementioned ITO fracture process can be used to form polymer dispersed liquid crystal (PDLC) shutters or windows. Furthermore, the differential conductivity between the parallel and perpendicular directions of the crack lines 40 allows individual conductive portions 50 between the crack lines 40 to be used for addressing applications. This is achieved by charging the appropriate conductive portions 50 by forming electrical contacts only at both ends of a portion of the substrate 20. Because the electric field can conduct electricity across the crack lines 40, the non-addressed conductive portions 50 are charged to a lesser extent, depending on the frequency of the applied electric field. Furthermore, the differential conductivity allows for the use of much lower frequencies in such applications.

另一方面,可用作多种电子器件(如LCD(液晶显示器))的地址线的由连续的裂缝线40之间的空间因此限定的导电部分50可通过使导电膜10在交叉方向上破裂来形成,以形成用于在多种电子应用中使用的多路复用地址线。例如,一方面,相邻裂缝线40之间的分开可如此形成为约5-20微米,这同时导致所形成的导电部分或导电带50的宽度也为约5-20微米。因此,因为目前商业上生产的平板显示器的像素大小约为100-200微米,所以用于将包括导电部分50的电极耦接至显示器的驱动电路的接合工艺不需要相同的高度准确的对准,而当使用典型光微影图案化ITO带或部分时所述对准将是必需的。On the other hand, conductive portions 50 defined by the spaces between successive crack lines 40, which can be used as address lines for various electronic devices, such as LCDs (liquid crystal displays), can be formed by fracturing the conductive film 10 in intersecting directions to form multiplexed address lines for use in various electronic applications. For example, in one aspect, the separation between adjacent crack lines 40 can be formed to be approximately 5-20 microns, which also results in the width of the formed conductive portions or strips 50 being approximately 5-20 microns. Therefore, because the pixel size of currently commercially produced flat panel displays is approximately 100-200 microns, the bonding process used to couple the electrodes including the conductive portions 50 to the display's driver circuitry does not require the same highly accurate alignment that would be required when patterning ITO strips or sections using typical photolithography.

基于上文,本发明的优点易于显而易见。本发明的主要优点是提供了一种方法,所述方法用于将导电膜(如铟-锡-氧化物(ITO))在柔性衬底上图案化为形成用于多种电子器件应用的电极的电绝缘的导电部分。本发明的另一个优点是将导电膜(如铟-锡-氧化物(ITO))在柔性衬底上图案化为ITO的单独的导电部分的方法易于执行并且可在现有连续卷装进出工艺上实施,而不需要目前所使用的复杂的光微影或印刷工艺。本发明的一个另外的优点是将导电膜(如铟-锡-氧化物(ITO))在柔性衬底上图案化的方法允许将电极接合至显示器驱动电路或其它电路,而不需要在其之间的准确对准,所述对准在传统的光微影图案化的ITO带或部分中是需要的,这降低了平板显示器的成本和制造复杂度。本发明的另一个优点是将导电膜(如铟-锡-氧化物(ITO))在柔性衬底上图案化的方法可在高产量并且低成本的工艺中实施。本发明的另一个优点是将导电膜(如铟-锡-氧化物(ITO))在柔性衬底上图案化的方法使用可靠并且经济的工艺来生产彼此绝缘的导电ITO部分。本发明的另一个优点是将导电膜(如铟-锡-氧化物(ITO))在柔性衬底上图案化的方法仅需要其上承载ITO膜的衬底的受控弯曲以形成导电ITO线。本发明的另一个优点是将导电膜(如铟-锡-氧化物(ITO))在柔性衬底上图案化的方法在将承载ITO膜的衬底挠曲和/或拉伸时立即形成裂缝,以便在所形成的裂缝之间形成导电部分。本发明的另一个优点是将导电膜(如铟-锡-氧化物(ITO))在柔性衬底上图案化的方法允许以以下方式形成导电电极:无源电极间区域最小化,而有源电极区域最大化。Based on the foregoing, the advantages of the present invention are readily apparent. A primary advantage of the present invention is that a method is provided for patterning a conductive film, such as indium-tin-oxide (ITO), on a flexible substrate into electrically insulating, conductive portions that form electrodes for a variety of electronic device applications. Another advantage of the present invention is that the method for patterning a conductive film, such as indium-tin-oxide (ITO), on a flexible substrate into individual conductive portions of ITO is simple to perform and can be implemented on existing roll-to-roll processes, without requiring the complex photolithographic or printing processes currently used. A further advantage of the present invention is that the method for patterning a conductive film, such as indium-tin-oxide (ITO), on a flexible substrate allows electrodes to be bonded to display driver circuitry or other circuitry without requiring the precise alignment therebetween, as is required in conventional photolithographically patterned ITO strips or portions, which reduces the cost and manufacturing complexity of flat panel displays. Another advantage of the present invention is that the method for patterning a conductive film, such as indium-tin-oxide (ITO), on a flexible substrate can be implemented in a high-throughput and low-cost process. Another advantage of the present invention is that the method of patterning a conductive film such as indium-tin-oxide (ITO) on a flexible substrate uses a reliable and economical process to produce conductive ITO portions that are insulated from each other. Another advantage of the present invention is that the method of patterning a conductive film such as indium-tin-oxide (ITO) on a flexible substrate requires only controlled bending of the substrate carrying the ITO film thereon to form the conductive ITO lines. Another advantage of the present invention is that the method of patterning a conductive film such as indium-tin-oxide (ITO) on a flexible substrate immediately forms cracks when the substrate carrying the ITO film is flexed and/or stretched so that conductive portions are formed between the formed cracks. Another advantage of the present invention is that the method of patterning a conductive film such as indium-tin-oxide (ITO) on a flexible substrate allows for the formation of conductive electrodes in a manner that minimizes the inactive inter-electrode area and maximizes the active electrode area.

因此,可见本发明的目标已由以上呈现的结构以及其使用方法满足。虽然根据专利法规,仅详细呈现并描述了最佳模式和优选实施方案,但是应了解,本发明不限于此或由此限制。因此,为了认识本发明的真实范围和宽度,应对以下权利要求进行参考。Thus, it can be seen that the objects of the present invention have been met by the structures and methods of use presented above. Although, in accordance with the patent statutes, only the best mode and preferred embodiments have been presented and described in detail, it should be understood that the present invention is not limited thereto or thereby. Therefore, for an appreciation of the true scope and breadth of the present invention, reference should be made to the following claims.

Claims (8)

1.一种图案化导电膜的方法,所述方法包括:1. A method for patterning a conductive film, the method comprising: 提供具有设置在其上的导电膜的柔性衬底,以便形成细长的组合层;A flexible substrate with a conductive film disposed thereon is provided to form an elongated composite layer; 将所述组合层定位在间隔开的第一板和第二板之间形成的间隙;The composite layer is positioned in the gap formed between the spaced-apart first and second plates; 将所述组合层的第一部分附接至靠近所述间隙的所述第一板的内表面;The first portion of the composite layer is attached to the inner surface of the first plate near the gap; 将所述组合层的第二部分附接至靠近所述间隙的所述第二板的内表面,其中所述板的所述组合层的所述第一部分和所述第二部分的附接在所述组合层中形成弯曲,该组合层以曲率半径横跨所述间隙定位在所述第一板和所述第二板之间;以及A second portion of the composite layer is attached to the inner surface of the second plate adjacent to the gap, wherein the attachment of the first and second portions of the composite layer to the plates forms a bend in the composite layer, which is positioned between the first and second plates across the gap with a radius of curvature; and 使所述板中的一个相对于另一个移动以围绕所述曲率半径滚动在所述第一板和所述第二板之间的所述组合层,The combined layer between the first and second plates is caused to move relative to the other, so as to roll around the radius of curvature. 其中,所述移动步骤在所述导电膜中形成多个裂缝线,从而所述多个裂缝线中的每一对在其之间限定导电部分并且使所述导电部分电绝缘。The moving step involves forming a plurality of slits in the conductive film, such that each pair of the plurality of slits defines a conductive portion therebetween and electrically insulates the conductive portion. 2.根据权利要求1所述的方法,其中所述导电膜的厚度小于所述衬底的厚度。2. The method according to claim 1, wherein the thickness of the conductive film is less than the thickness of the substrate. 3.根据权利要求1所述的方法,其中执行所述移动步骤,以使所述组合层围绕所述曲率半径弯曲约180度。3. The method of claim 1, wherein the moving step is performed to bend the composite layer about 180 degrees around the radius of curvature. 4.根据权利要求1所述的方法,其中所述曲率半径为约1mm。4. The method according to claim 1, wherein the radius of curvature is about 1 mm. 5.根据权利要求1所述的方法,其中所述导电膜包含铟-锡-氧化物ITO。5. The method according to claim 1, wherein the conductive film comprises indium tin oxide (ITO). 6.根据权利要求5所述的方法,其中所述衬底包含聚对苯二甲酸乙二酯PET。6. The method of claim 5, wherein the substrate comprises polyethylene terephthalate (PET). 7.根据权利要求1所述的方法,其中所述第一板和所述第二板通过至少一个辊间隔开。7. The method of claim 1, wherein the first plate and the second plate are spaced apart by at least one roller. 8.根据权利要求1所述的方法,其中执行所述移动步骤以使所述组合层持续弯曲。8. The method of claim 1, wherein the moving step is performed to cause the composite layer to bend continuously.
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