HK1201378B - Apparatus and methods related to conformal coating implemented with surface mount devices - Google Patents
Apparatus and methods related to conformal coating implemented with surface mount devices Download PDFInfo
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Description
相关申请的交叉引用CROSS-REFERENCE TO RELATED APPLICATIONS
本申请要求2013年4月16日提交的、名称为“RADIO-FREQUENCY SHIELD GROUNDPATH THROUGH A SURFACE MOUNT DEIVCE”的美国临时申请No.61/812,610,以及2013年4月29日提交的、名称为“TIERED PACKAGE-LEVEL RADIO-FREQUNCY SHIELDING”的美国临时申请No.61/817,295的优先权,上述每一个的公开内容由此通过引用的方式将各自的全部内容明确地并入于此。This application claims priority to U.S. Provisional Application No. 61/812,610, filed on April 16, 2013, entitled “RADIO-FREQUENCY SHIELD GROUNDPATH THROUGH A SURFACE MOUNT DEIVCE,” and U.S. Provisional Application No. 61/817,295, filed on April 29, 2013, entitled “TIERED PACKAGE-LEVEL RADIO-FREQUNCY SHIELDING,” the disclosures of each of which are hereby expressly incorporated herein by reference in their entirety.
技术领域Technical Field
本公开总体涉及射频模块的屏蔽。The present disclosure generally relates to shielding of radio frequency modules.
背景技术Background Art
电磁(EM)场可能从对诸如RF模块的射频(RF)设备的区域上不期望的影响而产生或对诸如RF模块的射频(RF)设备的区域有不期望的影响。这种EM干扰(EMI)会降低使用该RF模块的无线设备的性能。一些RF模块可以被提供EM屏蔽以解决与EMI有关的该性能问题。Electromagnetic (EM) fields may be generated from or have an undesirable effect on the area of a radio frequency (RF) device, such as an RF module. This EM interference (EMI) can degrade the performance of wireless devices using the RF module. Some RF modules may be provided with EM shielding to address these EMI-related performance issues.
发明内容Summary of the Invention
在一些实施方式中,本公开涉及射频(RF)模块,其包括配置为容纳多个组件的封装基板。RF模块进一步包括安装在封装基板上并配置为有助于处理RF信号的RF组件。RF模块进一步包括相对于RF组件布置的RF屏蔽。RF屏蔽被配置成为RF组件提供屏蔽。RF屏蔽包括多个屏蔽焊线以及至少一个屏蔽组件。所述至少一个屏蔽组件被配置为取代一个或多个屏蔽焊线。In some embodiments, the present disclosure relates to a radio frequency (RF) module comprising a package substrate configured to accommodate a plurality of components. The RF module further comprises an RF component mounted on the package substrate and configured to facilitate processing RF signals. The RF module further comprises an RF shield disposed relative to the RF component. The RF shield is configured to provide shielding for the RF component. The RF shield comprises a plurality of shielding wires and at least one shielding assembly. The at least one shielding assembly is configured to replace one or more shielding wires.
在一些实施例中,RF模块可进一步包括在多个屏蔽焊线下实施的传导路径。传导路径可被电连接到屏蔽焊线和封装基板内的接地平面。RF屏蔽可包括至少一个沿封装基板的选定的边布置的屏蔽焊线。选定的边可基本上没有屏蔽焊线和传导路径。选定的边可基本上没有用于容纳屏蔽焊线和传导路径的余量,由此减小封装基板的总体横向面积。In some embodiments, the RF module may further include a conductive path implemented under a plurality of shielding bond wires. The conductive path may be electrically connected to the shielding bond wires and a ground plane within the package substrate. The RF shield may include at least one shielding bond wire arranged along a selected edge of the package substrate. The selected edge may be substantially free of shielding bond wires and conductive paths. The selected edge may be substantially free of margin for accommodating shielding bond wires and conductive paths, thereby reducing the overall lateral area of the package substrate.
在一些实施例中,屏蔽组件可以包括上表面和在上表面上实施的导电特征。导电特征可通过屏蔽组件电连接到RF屏蔽的接地平面。屏蔽组件上的导电特征的上部可以与RF屏蔽的上部导电层电连接。上部导电层还可以与屏蔽焊线的上部电连接。RF模块可以进一步包括密封了屏蔽焊线和屏蔽组件的至少一部分的包覆模结构,包覆模结构可以包括暴露屏蔽焊线的上部和导电特征的上部的上表面。In some embodiments, the shield assembly may include an upper surface and a conductive feature implemented on the upper surface. The conductive feature may be electrically connected to a ground plane of the RF shield through the shield assembly. An upper portion of the conductive feature on the shield assembly may be electrically connected to an upper conductive layer of the RF shield. The upper conductive layer may also be electrically connected to an upper portion of a shield bond wire. The RF module may further include an overmold structure that encapsulates the shield bond wire and at least a portion of the shield assembly, the overmold structure may include an upper surface that exposes an upper portion of the shield bond wire and an upper portion of the conductive feature.
在一些实施例中,屏蔽焊线可以包括滤波器器件。滤波器器件可以是例如CSSD滤波器。In some embodiments, the shielding bond wires may include a filter device, such as a CSSD filter.
根据一些实施方式,本公开涉及用于制造射频(RF)模块的方法。该方法包括提供被配置为容纳多个组件的封装基板。该方法进一步包括安装RF组件到封装基板上,RF组件被配置为有助于处理RF信号。该方法进一步包括形成相对于RF组件的RF屏蔽。RF屏蔽配置成为RF组件提供屏蔽。RF屏蔽包括多个屏蔽焊线以及至少一个屏蔽组件。所述至少一个屏蔽组件被配置为取代一个或多个屏蔽焊线。According to some embodiments, the present disclosure relates to a method for manufacturing a radio frequency (RF) module. The method includes providing a package substrate configured to accommodate a plurality of components. The method further includes mounting an RF component on the package substrate, wherein the RF component is configured to facilitate processing RF signals. The method further includes forming an RF shield relative to the RF component. The RF shield is configured to provide shielding for the RF component. The RF shield includes a plurality of shielding wires and at least one shielding assembly. The at least one shielding assembly is configured to replace one or more shielding wires.
在一些实施例中,形成RF屏蔽包括安装沿封装基板的选定的边布置的至少一个屏蔽组件。选定的边可基本上没有屏蔽焊线。选定的边可基本上没有用于容纳屏蔽焊线的余量,由此减小封装基板的总体横向面积。In some embodiments, forming the RF shield includes installing at least one shield assembly along a selected edge of the package substrate. The selected edge may be substantially free of shielding wire bonds. The selected edge may be substantially free of excess space for accommodating shielding wire bonds, thereby reducing the overall lateral area of the package substrate.
在一些实施方式中,本公开涉及包括天线和与天线通信的模块的无线设备。模块被配置为有助于通过天线的RF信号的发射和接收中任一个或两者。模块包括配置为容纳多个组件的封装基板。模块进一步包括安装在封装基板上且配置为有助于处理RF信号的RF组件。模块进一步包括相对于RF组件布置的RF屏蔽。RF屏蔽被配置成为RF组件提供屏蔽。RF屏蔽包括多个屏蔽焊线以及至少一个屏蔽组件。所述至少一个屏蔽组件被配置为取代一个或多个屏蔽焊线。In some embodiments, the present disclosure relates to a wireless device comprising an antenna and a module in communication with the antenna. The module is configured to facilitate either or both transmission and reception of RF signals by the antenna. The module includes a packaging substrate configured to accommodate a plurality of components. The module further includes an RF component mounted on the packaging substrate and configured to facilitate processing of RF signals. The module further includes an RF shield disposed relative to the RF component. The RF shield is configured to provide shielding for the RF component. The RF shield includes a plurality of shielding wires and at least one shielding assembly. The at least one shielding assembly is configured to replace one or more shielding wires.
根据一些实施方式,本公开涉及射频(RF)模块,其包括配置成容纳多个组件且包括接地平面的封装基板。RF模块进一步包括在封装基板之上实施的导电层。RF模块进一步包括安装在封装基板的表面贴装器件(SMD)。SMD被配置为将导电层和接地平面电连接,从而提供SMD周围的第一和第二区域之间的RF屏蔽。According to some embodiments, the present disclosure relates to a radio frequency (RF) module comprising a package substrate configured to accommodate a plurality of components and including a ground plane. The RF module further comprises a conductive layer implemented on the package substrate. The RF module further comprises a surface mount device (SMD) mounted on the package substrate. The SMD is configured to electrically connect the conductive layer and the ground plane, thereby providing RF shielding between a first and a second region surrounding the SMD.
在一些实施例中,第一区域可以在封装基板上,第二区域可以在模块外部。在一些实施例中,第一和第二区域的每一个都可以在封装基板上。In some embodiments, the first region may be on the package substrate, and the second region may be outside the module. In some embodiments, each of the first and second regions may be on the package substrate.
在一些实施例中,SMD可以包括功能组件。功能组件可以包括与导电层电接触的上部连接特征、与接地平面电接触的下部连接特征、以及配置为将导电层和接地平面电连接的至少一个互连特征。功能组件可包括功能性管芯,从而上连接特征包括形成在管芯一侧的金属层。至少一个互连特征可包括至少一个穿过管芯的传导通孔。下部连接特征可包括将穿过管芯的导电通孔和接地平面电连接的接触特征。管芯可包括射频(RF)滤波器,诸如管芯尺寸的表面声波(SAW)器件(CSSD)。管芯可以以相对于其设计的使用方向被翻转的方向安装在封装基板的表面。In some embodiments, the SMD may include a functional component. The functional component may include an upper connection feature electrically contacting the conductive layer, a lower connection feature electrically contacting the ground plane, and at least one interconnection feature configured to electrically connect the conductive layer and the ground plane. The functional component may include a functional tube core, whereby the upper connection feature includes a metal layer formed on one side of the tube core. At least one interconnection feature may include at least one conductive via passing through the tube core. The lower connection feature may include a contact feature electrically connecting the conductive via passing through the tube core to the ground plane. The tube core may include a radio frequency (RF) filter, such as a tube core-sized surface acoustic wave (SAW) device (CSSD). The tube core may be mounted on the surface of the package substrate in an orientation flipped relative to its designed direction of use.
在一些实施例中,模块可以基本上没有屏蔽焊线。在一些实施例中,模块可包括多个配置为与SMD提供屏蔽功能的屏蔽焊线。In some embodiments, the module may be substantially free of shielding wire bonds. In some embodiments, the module may include a plurality of shielding wire bonds configured to provide shielding functionality with the SMD.
在一些实施方式中,本公开涉及用于制造射频(RF)模块的方法。所述方法包括提供封装基板,其中封装基板被配置为容纳多个元件且包括接地平面。该方法进一步包括在封装基板上安装表面贴装器件(SMD)。该方法进一步包括在SMD之上形成或提供导电层,从而SMD将导电层和接地平面电连接,由此提供SMD周围的第一和第二区域之间的RF屏蔽。In some embodiments, the present disclosure relates to a method for manufacturing a radio frequency (RF) module. The method includes providing a package substrate, wherein the package substrate is configured to accommodate a plurality of components and includes a ground plane. The method further includes mounting a surface mount device (SMD) on the package substrate. The method further includes forming or providing a conductive layer above the SMD, such that the SMD electrically connects the conductive layer and the ground plane, thereby providing RF shielding between a first and a second region around the SMD.
在一些实施例中,安装SMD包括将SMD从其设计的使用方向翻转,所述SMD包含面朝上、且以翻转的方向与导电层电接触的导电特征。In some embodiments, mounting the SMD includes flipping the SMD from its designed orientation for use, the SMD including the conductive features facing upward and in electrical contact with the conductive layer in the flipped orientation.
根据一些实施方式,本公开涉及包括天线和与天线通讯的模块的无线设备。模块被配置成便利于通过天线的RF信号的处理。模块包括配置为容纳多个元件并具有接地平面的封装基板。模块进一步包括在封装基板之上实施的导电层。模块进一步包括安装在封装基板上的表面贴装器件(SMD)。SMD被配置成将导电层和接地平面电连接,由此提供SMD周围的第一和第二区域之间的RF屏蔽。According to some embodiments, the present disclosure relates to a wireless device comprising an antenna and a module communicating with the antenna. The module is configured to facilitate processing of RF signals passing through the antenna. The module includes a package substrate configured to accommodate multiple components and having a ground plane. The module further includes a conductive layer implemented on the package substrate. The module further includes a surface mount device (SMD) mounted on the package substrate. The SMD is configured to electrically connect the conductive layer and the ground plane, thereby providing RF shielding between the first and second areas around the SMD.
在一些实施方式中,本公开涉及用于形成射频(RF)模块的传导路径的方法。该方法包括识别安装在封装基板上并被包覆模密封的表面贴装器件(SMD)的位置。该方法进一步包括在SMD之上的区域形成穿过包覆模的开口,以使得开口具有足够深度以暴露SMD表面的至少一部分。该方法进一步包括在包覆模上形成共形层,使共形层填充开口的至少一部分以提供开口外部的导电层的一部分和SMD的表面之间的传导路径。In some embodiments, the present disclosure relates to a method for forming a conductive path for a radio frequency (RF) module. The method includes identifying a location of a surface mount device (SMD) mounted on a package substrate and sealed by an overmold. The method further includes forming an opening through the overmold in an area above the SMD, such that the opening has a sufficient depth to expose at least a portion of the SMD surface. The method further includes forming a conformal layer on the overmold, such that the conformal layer fills at least a portion of the opening to provide a conductive path between a portion of a conductive layer outside the opening and the surface of the SMD.
在一些实施例中,共形层和SMD的表面的暴露部分的每一个可以包括导电层,这种传导路径包括电传导路径。开口的形成可以包括使用激光烧蚀包覆模。共形层的形成可以包括应用金属涂料。In some embodiments, each of the conformal layer and the exposed portion of the surface of the SMD may comprise a conductive layer, such conductive path comprising an electrical conductive path. Forming the opening may comprise using a laser ablation overmold. Forming the conformal layer may comprise applying a metallic paint.
根据一些实施方式,本公开涉及用于制造射频(RF)模块的方法。该方法包括提供配置为容纳多个元件的封装基板。该方法进一步包括在封装基板上安装表面贴装器件(SMD),SMD包括在安装时面朝上的金属层。该方法进一步包括在封装基板之上形成包覆模,使包覆模覆盖SMD。该方法进一步包括在SMD之上的区域形成穿过包覆模的开口,以暴露至少部分金属层。该方法进一步包括在包覆模之上形成导电层,使得导电层填充开口的至少一部分,以提供导电层和功能组件的金属层之间的导电路径。According to some embodiments, the present disclosure relates to a method for manufacturing a radio frequency (RF) module. The method includes providing a package substrate configured to accommodate a plurality of components. The method further includes mounting a surface mount device (SMD) on the package substrate, the SMD including a metal layer facing upward when mounted. The method further includes forming an overmold on the package substrate so that the overmold covers the SMD. The method further includes forming an opening through the overmold in an area above the SMD to expose at least a portion of the metal layer. The method further includes forming a conductive layer on the overmold so that the conductive layer fills at least a portion of the opening to provide a conductive path between the conductive layer and the metal layer of the functional component.
在一些实施例中,开口的形成可以包括使用激光烧蚀包覆模。导电层的形成可以包括应用金属涂料。In some embodiments, the forming of the openings may include ablating the overmold using a laser.The forming of the conductive layer may include applying a metallic paint.
在一些实施例中,该方法可以进一步包括在形成包覆模之前,在封装基板上形成屏蔽焊线。屏蔽焊线可以具有比SMD的高度更大的高度。包覆模可以具有基本上等于或大于屏蔽焊线的高度的高度。In some embodiments, the method may further include forming a shielding bond wire on the package substrate before forming the overmold. The shielding bond wire may have a height greater than a height of the SMD. The overmold may have a height substantially equal to or greater than a height of the shielding bond wire.
在一些实施例中,该方法可以进一步包括在形成开口之前,去除包覆模的上部,以暴露屏蔽焊线的顶部但仍然覆盖SMD。去除包覆模的上部可包括烧蚀处理,诸如微烧蚀。In some embodiments, the method may further include removing an upper portion of the overmold before forming the opening to expose the top of the shielding wire bond but still cover the SMD. Removing the upper portion of the overmold may include an ablation process, such as micro-ablation.
在一些实施例中,该方法可以进一步包括在形成开口之后,去除由开口的形成导致的残留物。去除残留物还可以导致从包覆模去除额外的材料,由此进一步暴露屏蔽焊线。去除残留物可包括烧蚀处理,诸如微烧蚀。In some embodiments, the method may further include removing residue resulting from the formation of the opening after forming the opening. Removing the residue may also result in removing additional material from the overmold, thereby further exposing the shielding wires. Removing the residue may include an ablation process, such as micro-ablation.
在一些实施例中,该方法可以进一步包括在形成导电层之前,清洁包覆模的暴露的表面以及SMD的金属层。In some embodiments, the method may further include cleaning the exposed surface of the overmold and the metal layer of the SMD before forming the conductive layer.
在一些实施例中,SMD包括功能组件。功能组件可被配置成帮助处理RF信号。In some embodiments, the SMD includes functional components that can be configured to help process RF signals.
根据一些实施方式,本公开涉及射频(RF)模块,该射频模块包括配置成容纳多个元件的封装基板,以及安装到封装基板上的表面贴装器件(SMD)。该SMD包括在安装时面朝上的金属层。RF模块进一步包括形成在封装基板上的包覆模,该包覆模的尺寸形成为覆盖SMD。RF模块进一步包括在SMD之上的区域由包覆模限定的开口,该开口具有足以暴露金属层的至少一部分的深度。RF模块还包括在包覆模之上形成的导电层,该导电层配置为填充开口的至少一部分,以提供导电层和SMD的金属层之间的电路径。According to some embodiments, the present disclosure relates to a radio frequency (RF) module comprising a package substrate configured to accommodate a plurality of components, and a surface mount device (SMD) mounted to the package substrate. The SMD includes a metal layer that faces upward when mounted. The RF module further includes an overmold formed on the package substrate, the overmold being sized to cover the SMD. The RF module further includes an opening defined by the overmold in an area above the SMD, the opening having a depth sufficient to expose at least a portion of the metal layer. The RF module also includes a conductive layer formed above the overmold, the conductive layer being configured to fill at least a portion of the opening to provide an electrical path between the conductive layer and the metal layer of the SMD.
在一些实施例中,SMD包括功能组件。功能组件可包括在管芯上形成的RF滤波器。RF滤波器可包括多个穿过管芯的传导通孔,至少一些传导通孔被电连接到金属层和RF滤波器下侧的接触特征。RF滤波器下侧的接触特征可被电连接到封装基板的接地平面,使得包覆模之上的导电层通过RF滤波器被电连接到接地平面。在一些实施例中,RF模块可进一步包括多个相对对RF滤波器布置的屏蔽焊线,屏蔽焊线被配置成有助于导电层和接地平面之间的电连接。In some embodiments, the SMD includes a functional component. The functional component may include an RF filter formed on the die. The RF filter may include a plurality of conductive vias passing through the die, at least some of the conductive vias being electrically connected to the metal layer and contact features on the underside of the RF filter. The contact features on the underside of the RF filter may be electrically connected to a ground plane of the package substrate, such that the conductive layer above the overmold is electrically connected to the ground plane through the RF filter. In some embodiments, the RF module may further include a plurality of shielding wire bonds arranged relative to the RF filter, the shielding wire bonds being configured to facilitate electrical connection between the conductive layer and the ground plane.
在一些实施例中,开口可以包含具有斜切轮廓的侧壁,使得侧壁和包覆模的表面之间的角度具有大于90度的值,由此有助于作为在开口和包覆模的表面之间的导电层过渡的改善的均匀性。导电层可以包括例如通过金属涂料形成的层。In some embodiments, the opening may include a sidewall having a chamfered profile such that the angle between the sidewall and the surface of the overmold has a value greater than 90 degrees, thereby facilitating improved uniformity of the conductive layer transition between the opening and the surface of the overmold. The conductive layer may include, for example, a layer formed by a metallic paint.
在一些实施方式中,本公开涉及具有天线和与天线通信的模块的无线设备。模块配置为有助于通过天线的RF信号的发送和接收中的任一个或两者。所述模块包含配置为容纳多个组件的封装基板。所述模块还包含安装在封装基板上的表面贴装器件(SMD)。SMD包含在安装时面朝上的金属层。所述模块还包含在封装基板之上形成的包覆模,该包覆模的尺寸形成为覆盖SMD。所述模块还包含在SMD之上的区域由包覆模限定的开口,使得该开口具有足以暴露金属层的至少一部分的深度。所述模块还包含在包覆模之上形成的导电层。该导电层配置为填充开口的至少一部分,以提供导电层和SMD的金属层之间的电路径。In some embodiments, the present disclosure relates to a wireless device having an antenna and a module that communicates with the antenna. The module is configured to facilitate either or both of the transmission and reception of RF signals through the antenna. The module includes a package substrate configured to accommodate a plurality of components. The module also includes a surface mount device (SMD) mounted on the package substrate. The SMD includes a metal layer that faces upward when installed. The module also includes an overmold formed above the package substrate, the size of the overmold being formed to cover the SMD. The module also includes an opening defined by the overmold in an area above the SMD, such that the opening has a depth sufficient to expose at least a portion of the metal layer. The module also includes a conductive layer formed above the overmold. The conductive layer is configured to fill at least a portion of the opening to provide an electrical path between the conductive layer and the metal layer of the SMD.
在一些实施例中,SMD可以是功能组件。功能组件包括例如RF滤波器。无线设备可以是配置成以与RF滤波器相关的蜂窝频带工作的蜂窝电话。In some embodiments, the SMD may be a functional component. The functional component includes, for example, an RF filter. The wireless device may be a cellular phone configured to operate in a cellular frequency band associated with the RF filter.
为了概括本公开的目的,这里已经公开了本发明的一些方面、优点和新颖的特征。应该理解的是,根据本发明的任意特定实施例并不一定能实现所有的这些优点。因此,可以以下述方式实现或执行本发明:实现或优化如这里所教导的一个优点或一组优点,而不必实现如这里可能教导或建议的其他优点。For purposes of summarizing this disclosure, some aspects, advantages, and novel features of the present invention have been disclosed herein. It should be understood that not all of these advantages are necessarily achieved according to any particular embodiment of the present invention. Thus, the present invention may be implemented or carried out in a manner that achieves or optimizes one advantage or group of advantages as taught herein without necessarily achieving other advantages as may be taught or suggested herein.
附图说明BRIEF DESCRIPTION OF THE DRAWINGS
图1描述了具有RF屏蔽的射频(RF)模块。FIG1 depicts a radio frequency (RF) module with an RF shield.
图2示出了可以被实现来制造具有如这里描述的一个或多个特征的RF模块的处理。FIG2 illustrates a process that may be implemented to fabricate an RF module having one or more features as described herein.
图3A-3C示出了一个或多个RF组件如何能被布置在RF模块以提供屏蔽功能的示例。3A-3C illustrate examples of how one or more RF components can be arranged in an RF module to provide shielding functionality.
图4示出了具有围绕封装基板的整个周边延伸的传导路径(racetrack)、以及在该传导路径上实现的屏蔽焊线的示例性模块。FIG. 4 illustrates an exemplary module having a racetrack extending around the entire perimeter of a package substrate, and shielding wire bonds implemented on the racetrack.
图5示出了包括与图4中类似组件的示例模块;然而,模块的一侧被RF组件屏蔽,从而允许省略路径(racetrack)的一部分和对应的屏蔽焊线。FIG5 shows an example module including similar components as in FIG4; however, one side of the module is shielded by the RF components, thereby allowing a portion of the racetrack and corresponding shielding wire bonds to be omitted.
图6A-6C示出了可以在RF模块中实施的屏蔽焊线的示例。6A-6C illustrate examples of shielding wire bonds that may be implemented in an RF module.
图7A-7D示出了如何可以通过一个或多个屏蔽组件制造接地连接的各个示例。7A-7D illustrate various examples of how ground connections may be made through one or more shield assemblies.
图8A示出了可以使用一个或多个屏蔽组件实施内部模块RF屏蔽的模块的示例性配置。FIG. 8A illustrates an exemplary configuration of a module that may implement internal module RF shielding using one or more shielding assemblies.
图8B示出了图8A的屏蔽配置的更具体示例。FIG8B shows a more specific example of the shielding configuration of FIG8A .
图9A描述了可用作图8A和8B的屏蔽组件的示例性功能组件的剖视图。9A depicts a cross-sectional view of an exemplary functional assembly that may be used as the shield assembly of FIGS. 8A and 8B .
图9B示出了在期望的使用方向安装在封装基板上的图9A的功能组件。FIG. 9B shows the functional components of FIG. 9A mounted on a package substrate in a desired orientation for use.
图10A示出了在一些实施方式中可以翻转类似于图9A的管芯的功能组件用于安装。FIG. 10A shows that in some embodiments a functional assembly similar to the die of FIG. 9A can be flipped for mounting.
图10B示出了翻转的管芯被安装在封装基板上的安装配置。FIG. 10B shows a mounting configuration in which the flipped die is mounted on a package substrate.
图10C示出了示例性封装配置,其中包覆模材料262显示为横向环绕图10B的安装管芯。FIG. 10C illustrates an exemplary packaging configuration in which overmold material 262 is shown laterally surrounding the mounted die of FIG. 10B .
图11A描述了用于提供在RF模块和屏蔽组件上的导电层之间电连接的示例性配置。FIG. 11A depicts an exemplary configuration for providing electrical connections between conductive layers on an RF module and a shield assembly.
图11B描述了可以由图11A的配置提供的屏蔽电路径。FIG. 11B depicts a shielded electrical path that may be provided by the configuration of FIG. 11A .
图12A-12E示出了穿过包覆模层形成的开口如何能够允许RF模块的导电层和屏蔽组件的导电层之间形成电连接的示例。12A-12E illustrate examples of how openings formed through an overmold layer can allow electrical connections to be formed between a conductive layer of an RF module and a conductive layer of a shield assembly.
图13A-13F示出了如何能够利用诸如激光烧蚀的技术形成穿过包覆模的开口以有助于模块的导电层和屏蔽组件的金属层之间的电连接的示例。13A-13F illustrate examples of how techniques such as laser ablation can be used to form openings through the overmold to facilitate electrical connection between the conductive layer of the module and the metal layer of the shield assembly.
图14示出了可以被实施以实现图13A-13F的示例性模块制造阶段的处理。FIG. 14 illustrates a process that may be implemented to achieve the exemplary module fabrication stages of FIGs. 13A-13F.
图15A-15C示出了一个或多个可被实施以有利于如这里描述的电连接的开口的布置的示例。15A-15C illustrate examples of one or more arrangements of openings that may be implemented to facilitate electrical connections as described herein.
图16描述了具有这里描述的一个或多个有利特征的示例性无线设备。FIG16 depicts an example wireless device having one or more advantageous features described herein.
具体实施方式DETAILED DESCRIPTION
这里提供的标题(如果有的话)仅仅是为了方便,并不必然影响所要求的发明的范围和含义。The headings provided herein, if any, are for convenience only and do not necessarily affect the scope and meaning of the claimed invention.
这里公开的是为有源或无源RF器件提供射频(RF)隔离或屏蔽的各种设备和方法。出于描述的目的,将理解的是RF可以包括具有与无线设备相关联的频率或频率范围的电磁信号。RF还可以包括在电子设备内辐射的电磁信号,无论该电子设备是否作为无线设备工作。RF也可以包括与典型的电磁干扰(EMI)影响相关的信号或噪声。Disclosed herein are various devices and methods for providing radio frequency (RF) isolation or shielding for active or passive RF devices. For purposes of this description, it will be understood that RF may include electromagnetic signals having a frequency or frequency range associated with wireless devices. RF may also include electromagnetic signals radiated within an electronic device, whether or not the electronic device operates as a wireless device. RF may also include signals or noise associated with typical electromagnetic interference (EMI) effects.
出于描述的目的,将理解,这种RF器件可包括配置成在RF范围工作以有助于发送和/或接收RF信号的器件,以及可以通过RF信号或噪声影响其它器件或被RF信号或噪声影响的器件。这种RF器件的非限制性示例可包括具有或不具有RF电路的半导体管芯。这种RF相关的器件的非限制性示例可包括诸如电感器和电容器、甚至是导体的一段的离散器件。For purposes of this description, it will be understood that such RF devices may include devices configured to operate in the RF range to facilitate transmission and/or reception of RF signals, as well as devices that may affect other devices through RF signals or noise or be affected by RF signals or noise. Non-limiting examples of such RF devices may include semiconductor dies with or without RF circuitry. Non-limiting examples of such RF-related devices may include discrete devices such as inductors and capacitors, or even a section of a conductor.
出于描述的目的,将理解,取决于使用的上下文,术语隔离和屏蔽可以互换使用。例如,被屏蔽的RF器件可包含来自另一个源的RF信号被部分或全部阻止的状况。在另一示例中,被隔离的RF器件可包含RF信号(例如噪声和/或积极产生的信号)被部分或全部阻止到达其它器件。除非使用的上下文有明确说明,否则将理解,屏蔽和隔离术语的每一个可包括上述功能中的任一个或两个。For the purposes of this description, it will be understood that the terms isolation and shielding can be used interchangeably, depending on the context of use. For example, a shielded RF device can include a condition in which RF signals from another source are partially or completely blocked. In another example, an isolated RF device can include a condition in which RF signals (e.g., noise and/or actively generated signals) are partially or completely blocked from reaching other devices. Unless the context of use clearly indicates otherwise, it will be understood that each of the terms shielding and isolation can include either or both of the aforementioned functions.
图1描述了具有RF屏蔽102的RF模块100。RF屏蔽102被显示为包括可以安置和/或配置一个或多个组件以提供屏蔽功能的部分104。这里更详细的描述了能够如何配置该组件部分的各种示例。1 depicts an RF module 100 having an RF shield 102. The RF shield 102 is shown as including a portion 104 where one or more components can be positioned and/or configured to provide a shielding function. Various examples of how such component portions can be configured are described in greater detail herein.
在图1中,示例性模块100可包括被配置成容纳多个组件的封装基板120(例如,层叠基板)。这样的组件可包括,例如,具有诸如RF电路的集成电路(IC)的管芯122。一个或多个表面贴装器件(SMDs)124同样可安装在封装基板120上,以有助于模块100的各种功能。在一些实施例中,模块100可进一步包括密封RF屏蔽102、组件部分104、管芯122和SMD124中的一些或全部的包覆模结构。1 , an exemplary module 100 may include a package substrate 120 (e.g., a laminate substrate) configured to house a plurality of components. Such components may include, for example, a die 122 having an integrated circuit (IC) such as an RF circuit. One or more surface mount devices (SMDs) 124 may also be mounted on the package substrate 120 to facilitate various functions of the module 100. In some embodiments, the module 100 may further include an overmold structure that encapsulates some or all of the RF shield 102, the component portion 104, the die 122, and the SMDs 124.
图2示出了可以被实施以制造具有如这里描述的一个或多个特征的模块(例如,图1中的模块100)的处理110。在块112中,可以提供RF组件。在块114中,RF组件可被安置并安装在封装基板上,以和屏蔽焊线一起提供RF屏蔽功能。这种屏蔽焊线可在安装RF组件之前或之后形成。这里更详细的描述这种RF组件的安置的示例。在块116中,可以形成有利于RF屏蔽功能的一个或多个接地连接。这里更详细的描述这种接地连接的示例。尽管这里在屏蔽焊线的上下文中描述了各种示例,将理解的是本公开的一个或多个特征也可以没有这种屏蔽焊线、利用其它类型的RF屏蔽技术、不使用任何其它屏蔽技术、或它们的任意组合而实现。FIG2 shows a process 110 that can be implemented to manufacture a module (e.g., module 100 in FIG1 ) having one or more features as described herein. In block 112, an RF component can be provided. In block 114, the RF component can be positioned and mounted on a package substrate to provide an RF shielding function together with shielding wires. Such shielding wires can be formed before or after the RF component is installed. Examples of the placement of such RF components are described in more detail herein. In block 116, one or more ground connections that facilitate the RF shielding function can be formed. Examples of such ground connections are described in more detail herein. Although various examples are described herein in the context of shielding wires, it will be understood that one or more features of the present disclosure can also be implemented without such shielding wires, using other types of RF shielding technology, without using any other shielding technology, or any combination thereof.
图3A-3C示出了能够如何安装一个或多个RF组件130以在模块100周边或模块100周边附近形成一个或多个屏蔽部分104的非限制性示例。这种屏蔽部分与多个屏蔽焊线106一起能够形成RF屏蔽,并在RF屏蔽的内侧和外侧之间提供RF屏蔽。尽管在大体被RF屏蔽包围的区域的RF屏蔽的上下文中进行了描述,但将理解的是,本公开的一个或多个特征还可以被实现为在都在模块100上的两个区域之间提供RF屏蔽。3A-3C illustrate non-limiting examples of how one or more RF components 130 can be mounted to form one or more shielding portions 104 around or near the perimeter of the module 100. Such shielding portions, along with a plurality of shielding wire bonds 106, can form an RF shield and provide RF shielding between the inner and outer sides of the RF shield. Although described in the context of RF shielding of an area generally surrounded by the RF shield, it will be understood that one or more features of the present disclosure can also be implemented to provide RF shielding between two areas both on the module 100.
图3A示出了在一些实施例中,屏蔽部分104可以沿模块100周边提供在选定侧。周边的剩余侧可设置多个屏蔽焊线106。示例性屏蔽部分104被显示为包括第一和第二组件130a,130b。屏蔽部分104中可以有更多或更少数量的元件。这样的组件可以是有源RF组件、无源组件、或它们的一些组合。FIG3A illustrates that in some embodiments, a shielding portion 104 can be provided on selected sides along the perimeter of the module 100. A plurality of shielding wire bonds 106 can be provided on the remaining sides of the perimeter. An exemplary shielding portion 104 is shown as including first and second components 130 a, 130 b. A greater or lesser number of components can be included in the shielding portion 104. Such components can be active RF components, passive components, or some combination thereof.
图3B示出了在一些实施例中,模块100的不止一侧可以设置屏蔽部分104a,104b。在示例中,第一屏蔽部分104a被显示为包括第一和第二组件130a,130b;第二屏蔽部分104b被显示为包括一个组件130c。在屏蔽部分104a,104b的每一个中,可以有更多或更少数量的组件。这种组件可以是有源RF组件、无源组件或它们的一些组合。在图3B的示例中,周边的剩余侧可设置多个屏蔽焊线106。FIG3B illustrates that in some embodiments, shielding sections 104a, 104b may be provided on more than one side of module 100. In the example, first shielding section 104a is shown as including first and second components 130a, 130b; second shielding section 104b is shown as including a single component 130c. Each of shielding sections 104a, 104b may contain a greater or lesser number of components. Such components may be active RF components, passive components, or some combination thereof. In the example of FIG3B , multiple shielding wire bonds 106 may be provided on the remaining sides of the perimeter.
图3C示出了在一些实施例中,屏蔽部分104并非必须占据整侧。例如,具有组件130的屏蔽部分104被显示为沿选定侧安置,屏蔽焊线106在组件130的左右。将理解,在一些实施例中,这种屏蔽焊线106可设置在组件130的左或右。此外,模块的给定侧可设置不止一个组件(有源、无源或它们的一些组合);并且可以安置这种组件并且沿该侧具有或不具有一个或多个屏蔽焊线。FIG3C illustrates that in some embodiments, shield portion 104 does not necessarily occupy an entire side. For example, shield portion 104 with component 130 is shown positioned along a selected side, with shielding wire bonds 106 to the left and right of component 130. It will be appreciated that, in some embodiments, such shielding wire bonds 106 may be positioned to the left or right of component 130. Furthermore, more than one component (active, passive, or some combination thereof) may be positioned on a given side of a module; and such components may be positioned with or without one or more shielding wire bonds along that side.
在一些实施方式中,使用一个或多个屏蔽组件代替一个或多个屏蔽焊线可提供诸如减小模块面积的有利特征。例如,考虑如下RF屏蔽配置,在该屏蔽配置中屏蔽焊线通过基本上沿模块的整个周边伸展的传导路径连接到接地平面。这样的配置通常需要沿周边的余量(margin)以容纳传导路径和屏蔽焊线。因此,通过沿模块给定侧提供一个或多个组件,并形成通过这样的组件促进的接地连接,路径和对应的屏蔽焊线可以从给定侧移除。由于不再需要沿着给定侧的余量,模块的该部分可以被移除,由此减小了模块的总体横向面积。In some embodiments, using one or more shielding components instead of one or more shielding wire bonds can provide advantageous features such as reducing the module area. For example, consider the following RF shielding configuration in which the shielding wire bonds are connected to the ground plane via a conductive path that extends substantially along the entire perimeter of the module. Such a configuration typically requires a margin along the perimeter to accommodate the conductive path and the shielding wire bonds. Therefore, by providing one or more components along a given side of the module and forming a ground connection facilitated by such components, the path and the corresponding shielding wire bonds can be removed from the given side. Since the margin along the given side is no longer required, that portion of the module can be removed, thereby reducing the overall lateral area of the module.
图4通过举例的方式示出了具有围绕封装基板142的整个周边延伸的传导路径(racetrack)144的示例性模块140。多个屏蔽焊线106显示为沿由路径144定义的线提供。在由路径144定义的边界内显示了各种元件,包括集成电路(IC)管芯122和滤波器130a,130b。如此处描述的,路径144外侧期望或需要的余量对封装基板142的总横向尺寸d1×d2有贡献。4 illustrates, by way of example, an exemplary module 140 having a conductive racetrack 144 extending around the entire perimeter of a package substrate 142. A plurality of shielding wire bonds 106 are shown provided along the line defined by the racetrack 144. Various components, including an integrated circuit (IC) die 122 and filters 130a, 130b, are shown within the boundaries defined by the racetrack 144. As described herein, the margin desired or required outside of the racetrack 144 contributes to the overall lateral dimensions d1×d2 of the package substrate 142.
在图5中,示例模块150被显示为包括与图4中类似的组件(例如,IC管芯122和滤波器130a,130b)。然而,尽管封装基板152的四侧中的三个包括路径154和多个屏蔽焊线106,封装基板152的第四侧156(图5的示例中的右侧)不包括路径或屏蔽焊线。因此,第四侧156不需要在其它三侧中存在余量。这样,第四侧路径和屏蔽焊线所需的区域可以从封装基板152去除。In FIG5 , an example module 150 is shown as including components similar to those in FIG4 (e.g., IC die 122 and filters 130 a, 130 b). However, while three of the four sides of package substrate 152 include paths 154 and a plurality of shielding wire bonds 106, a fourth side 156 of package substrate 152 (the right side in the example of FIG5 ) does not include any paths or shielding wire bonds. Therefore, fourth side 156 does not require the margins found on the other three sides. Thus, the area required for the paths and shielding wire bonds on the fourth side can be removed from package substrate 152.
在图5的具体示例中,尺寸d2可以与图4中的示例大致相同。然而,图4的尺寸d1现在可被减少△d,以产生减小的尺寸d3。在一些实施例中,这种减小的量△d通常可以是实施第四侧路径和对应的屏蔽焊线所需要的面积。In the specific example of FIG5, dimension d2 can be substantially the same as in the example of FIG4. However, dimension d1 of FIG4 can now be reduced by Δd to produce a reduced dimension d3. In some embodiments, this reduction by Δd can generally be the area required to implement the fourth side path and the corresponding shield bond wire.
在图5的具体示例中,滤波器130a,130b可以是例如芯片尺寸SAW(表面声波)器件(CSSDs),诸如商业可获得的Taiyo Yuden CSSD滤波器。每一个滤波器可以包括或配备有接地的顶表面,这种接地的顶表面可被用于形成一个或多个电连接以有助于RF屏蔽功能。5 , filters 130 a, 130 b may be, for example, chip-scale SAW (surface acoustic wave) devices (CSSDs), such as commercially available Taiyo Yuden CSSD filters. Each filter may include or be equipped with a grounded top surface that may be used to form one or more electrical connections to facilitate RF shielding functionality.
在一些实施方式中,这里描述的与屏蔽组件130一起使用的RF屏蔽焊线106可以以多种方式来配置。图6A-6C示出了这种屏蔽焊线106的非限制性示例。在图6A中,具有可变形配置的屏蔽焊线106被显示为形成在封装基板54(例如层叠基板)上的焊垫52a,52b上。关于这种焊线配置的其它细节可在国际公开No.WO2010/014103(2008年7月31日提交的、题目为“SEMICONDUCTOR PACKAGE WITH INTERGRATED INTERFERENCE SHIELDING AND METHOD OFMANUFACTURE THEREOF”的国际申请No.PCT/US2008/071832)中获得,该国际申请的公开内容通过引用整体合并于此。In some embodiments, the RF shielding wire bonds 106 used with the shield assembly 130 described herein can be configured in a variety of ways. Figures 6A-6C illustrate non-limiting examples of such shielding wire bonds 106. In Figure 6A, shielding wire bonds 106 having a deformable configuration are shown as being formed on pads 52a, 52b on a package substrate 54 (e.g., a laminate substrate). Additional details regarding such wire bond configurations can be found in International Publication No. WO 2010/014103 (International Application No. PCT/US2008/071832, filed July 31, 2008, entitled "SEMICONDUCTOR PACKAGE WITH INTERGRATED INTERFERENCE SHIELDING AND METHOD OF MANUFACTURE THEREOF"), the disclosure of which is incorporated herein by reference in its entirety.
在图6B中,拱形屏蔽焊线50被显示为形成在封装基板54(例如层叠基板)上的焊垫52a,52b上。关于这种焊线配置的其它细节可在题目为“OVERMOLDED SEMICONDUCTORPACKAGE WITH A WIREB OND CAGE FOR EMISHIELDING”的美国专利No.8,399,972中获得,该美国专利的公开内容通过引用整体合并于此。In FIG6B , arched shielding wire bonds 50 are shown formed on bonding pads 52 a, 52 b on a package substrate 54 (e.g., a laminate substrate). Additional details regarding this wire bond configuration can be found in U.S. Patent No. 8,399,972, entitled “OVERMOLDED SEMICONDUCTOR PACKAGE WITH A WIREBOND CAGE FOR EMISHIELDING,” the disclosure of which is incorporated herein by reference in its entirety.
图6C示出了在一些实施例中,屏蔽焊线不需要是弯曲的或具有在封装基板上开始和结束的端点。在封装基板54上开始并在封装基板54之上的位置结束的焊线结构106显示为形成在焊垫52上。这种焊线配置的其它细节可在上面提到的美国专利No.8,399,972中获得。也可以使用屏蔽焊线的其它配置。FIG6C shows that in some embodiments, the shielding bond wire need not be curved or have endpoints that start and end on the package substrate. A bond wire structure 106 that starts on the package substrate 54 and ends at a location above the package substrate 54 is shown formed on the bonding pad 52. Further details of this bond wire configuration can be found in the aforementioned U.S. Patent No. 8,399,972. Other configurations of shielding bond wires can also be used.
图7A-7D示出了可以如何通过一个或多个屏蔽组件130制造接地连接的各种非限制性示例。在图7A的示例配置160中,屏蔽组件130(例如,RF滤波器)被描述为通过触垫162a,162b安装在封装基板56上。在封装基板中,至少一个这种触垫可以是电连接到接地平面的接地焊垫。屏蔽组件130的上表面被显示为包括导电层164。在一些实施例中,这样的导电层164可电连接到接地焊垫,并由此连接到接地平面。7A-7D illustrate various non-limiting examples of how ground connections can be made through one or more shielding assemblies 130. In the example configuration 160 of FIG. 7A , the shielding assembly 130 (e.g., an RF filter) is depicted as being mounted on the package substrate 56 via contact pads 162 a, 162 b. In the package substrate, at least one such contact pad can be a ground pad electrically connected to a ground plane. The upper surface of the shielding assembly 130 is shown as including a conductive layer 164. In some embodiments, such a conductive layer 164 can be electrically connected to the ground pad and, thereby, to the ground plane.
相对于屏蔽组件130定位的是形成在焊垫52a,52b上的示例屏蔽焊线106。如上面引用的美国专利No.8,399,972中描述的,所述焊垫可在封装基板中电连接到接地平面。同样如上面引用的美国专利No.8,399,972中描述的,屏蔽焊线106的上部58可从包覆模结构56露出,以便允许形成与导电层60的电连接。导电层60、屏蔽焊线106以及接地平面的这种布置允许内部区域和外部区域之间和/或模块边界内的所选区域之间的RF信号、RF噪声、电磁干涉(EMI)等等的屏蔽。Positioned relative to the shield assembly 130 are exemplary shielding bond wires 106 formed on the pads 52a, 52b. As described in the above-referenced U.S. Patent No. 8,399,972, the bond pads can be electrically connected to a ground plane in the package substrate. Also as described in the above-referenced U.S. Patent No. 8,399,972, the upper portion 58 of the shielding bond wires 106 can be exposed from the overmold structure 56 to allow for electrical connection to the conductive layer 60. This arrangement of the conductive layer 60, the shielding bond wires 106, and the ground plane allows for shielding of RF signals, RF noise, electromagnetic interference (EMI), etc. between interior and exterior areas and/or between selected areas within the module boundary.
如图7A中所示,导电层60可与屏蔽组件130的导电层164电连接。因此,前述屏蔽布置可扩展到屏蔽组件130取代一个或多个屏蔽焊线106的区域。7A , the conductive layer 60 may be electrically connected to the conductive layer 164 of the shield assembly 130 . Thus, the aforementioned shielding arrangement may be extended to areas where the shield assembly 130 replaces one or more shielding wire bonds 106 .
在示例中示出,导电层164的上表面的高度被描述为h。在一些实施方式中,屏蔽焊线106可以适当的确定尺寸,以便其高度也近似h。In the example shown, the height of the upper surface of the conductive layer 164 is depicted as h. In some embodiments, the shield bond wires 106 can be appropriately sized so that their height is also approximately h.
在图7A的示例中,导电层164被描述成横向延伸以基本覆盖屏蔽组件130的单层。图7B示出了在一些实施例中,这种导电层不需要覆盖屏蔽组件130的整个上部。在示例配置170中,导电层174显示为仅仅覆盖了屏蔽组件130的上表面的部分。剩余区域显示为被包覆模结构覆盖。In the example of FIG7A , conductive layer 164 is depicted as a single layer extending laterally to substantially cover shield assembly 130. FIG7B illustrates that in some embodiments, such a conductive layer need not cover the entire upper portion of shield assembly 130. In example configuration 170, conductive layer 174 is shown covering only a portion of the upper surface of shield assembly 130. The remaining area is shown as being covered by an overmold structure.
在一些实施例中,图7A和7B的导电层164,174中的每一个可以是单个连续片。在一些实施例中,导电层164,174中的每一个可以包括电连接到接地焊垫的多个导电特征。也可以实施其它配置。In some embodiments, each of the conductive layers 164, 174 of Figures 7A and 7B can be a single continuous sheet. In some embodiments, each of the conductive layers 164, 174 can include multiple conductive features electrically connected to a ground pad. Other configurations can also be implemented.
图7C示出了在一些实施例中,屏蔽焊线和屏蔽组件的高度不需要相同。在示例配置180中,屏蔽焊线106被描述成具有高度h1,并且屏蔽组件130之上的导电层164的上表面被描述成具有比h1小的高度h2。当例如屏蔽组件130具有相对低的轮廓(profile)的时候,可以出现这种配置。7C shows that in some embodiments, the heights of the shielding wirebond and the shield assembly do not need to be the same. In the example configuration 180, the shielding wirebond 106 is depicted as having a height h1, and the upper surface of the conductive layer 164 above the shield assembly 130 is depicted as having a height h2 that is less than h1. This configuration may occur when, for example, the shield assembly 130 has a relatively low profile.
如果高度差h3(h1减h2)足够大,通过固体导电层在导电层60和164之间形成电连接可能是不希望的或不现实的。为了形成电连接,可以在导电层164上提供一个或多个尺寸减小的屏蔽焊线182,以便焊线182的顶部184与导电层60电接触。在一些实施例中,尺寸减小的屏蔽焊线182的形状可以类似于屏蔽焊线106的形状。在一些实施例中,两种形状可以不同。If the height difference h3 (h1 minus h2) is large enough, it may be undesirable or impractical to form an electrical connection between conductive layers 60 and 164 through a solid conductive layer. To form an electrical connection, one or more reduced-size shield bond wires 182 may be provided on conductive layer 164 so that the tops 184 of the bond wires 182 are in electrical contact with conductive layer 60. In some embodiments, the shape of the reduced-size shield bond wires 182 may be similar to the shape of shield bond wire 106. In some embodiments, the two shapes may be different.
图7D示出了在一些实施例中,通过图7C的示例中的多个尺寸减小的屏蔽焊线182桥接的额外高度还可以以其它方式被占用。在示例配置200中,额外屏蔽组件202显示为定位在屏蔽组件130之上。在额外组件202的上表面上的导电层206显示为与导电层60电接触,并且导电层206可电连接到接地焊垫(例如,焊垫204a,204b中的任一个或两者)。焊垫204a,204b显示为与相应的导电层164a,164b电接触。如这里描述的,导电层164a,164b中的任一个或两者可电连接到接地平面。FIG7D illustrates that in some embodiments, the additional height bridged by the multiple reduced-size shielding wire bonds 182 in the example of FIG7C can also be occupied in other ways. In the example configuration 200, the additional shielding assembly 202 is shown positioned above the shielding assembly 130. A conductive layer 206 on the upper surface of the additional assembly 202 is shown in electrical contact with the conductive layer 60, and the conductive layer 206 can be electrically connected to a ground pad (e.g., either or both of the pads 204a, 204b). The pads 204a, 204b are shown in electrical contact with the corresponding conductive layers 164a, 164b. As described herein, either or both of the conductive layers 164a, 164b can be electrically connected to a ground plane.
在一些实施例中,额外组件202可是有助于模块的操作的有源或无源器件。在一些实施例中,额外组件202可以是配置为提供导电层60和164之间的前述电桥的哑(dummy)器件。In some embodiments, additional component 202 may be an active or passive device that facilitates the operation of the module. In some embodiments, additional component 202 may be a dummy device configured to provide the aforementioned electrical bridge between conductive layers 60 and 164 .
在参考图1-7描述的各种示例中,RF屏蔽功能包括一个或多个屏蔽组件(130)和多个屏蔽焊线(106)的一些组合。进一步的,一些这样的组合在总体围绕封装基板上的区域以便提供该区域的内部和外部之间的RF屏蔽功能的上下文中描述。In various examples described with reference to Figures 1-7, RF shielding functionality includes some combination of one or more shielding components (130) and a plurality of shielding wire bonds (106). Further, some such combinations are described in the context of generally surrounding an area on a package substrate to provide RF shielding functionality between an interior and exterior of the area.
如此处描述的,将理解,与使用屏蔽组件(130)相关联的一个或多个特征可以以其它配置实现。例如,可以实现一个或多个屏蔽组件(130)(具有或没有屏蔽焊线)以提供同一模块的第一和第二区域之间的RF屏蔽,而不必限定的大致的封闭区域。在这种模块内RF屏蔽不包括屏蔽焊线的配置中,使用必需的组件作为屏蔽组件并且缺少屏蔽焊线可以使封装工艺更有效并节省成本。As described herein, it will be appreciated that one or more features associated with the use of shielding assemblies (130) may be implemented in other configurations. For example, one or more shielding assemblies (130) (with or without shielding wire bonds) may be implemented to provide RF shielding between first and second regions of the same module without necessarily defining a generally enclosed area. In such configurations where the intra-module RF shielding does not include shielding wire bonds, the use of the necessary components as shielding assemblies and the absence of shielding wire bonds may make the packaging process more efficient and save costs.
图8A示出了模块100的示例配置,其中模块内RF屏蔽可以用一个或多个屏蔽组件130实施。三个示例屏蔽组件130a,130b,130c显示为提供在第一区域"A″和第二区域"B″之间的RF屏蔽210,这两个区域是同一模块100的一部分。在示例显示中,模块100不包括任何屏蔽焊线。然而,可以实施屏蔽焊线以提供例如模块100的内部和外部位置之间的RF屏蔽。FIG8A illustrates an example configuration of a module 100 in which intra-module RF shielding may be implemented using one or more shield assemblies 130. Three example shield assemblies 130a, 130b, and 130c are shown providing RF shielding 210 between a first region "A" and a second region "B," both of which are part of the same module 100. In the example shown, the module 100 does not include any shielding wire bonds. However, shielding wire bonds may be implemented to provide RF shielding between, for example, interior and exterior locations of the module 100.
图8B示出了图8A的模块内屏蔽配置的更详细示例。示例性前端模块(FEM)100显示为包括功率放大器(PA)管芯,该功率放大器管芯具有配置用来提供多模式多频带(MMMB)能力的PA电路。可以通过一个或多个频带开关、各个滤波器、各个双工器以及天线开关来有助于这种PA电路在不同蜂窝频带和/或不同模式中的操作。FIG8B shows a more detailed example of the intra-module shielding configuration of FIG8A . An exemplary front-end module (FEM) 100 is shown including a power amplifier (PA) die having PA circuitry configured to provide multi-mode multi-band (MMMB) capability. Operation of such PA circuitry in different cellular frequency bands and/or different modes may be facilitated by one or more band switches, filters, duplexers, and antenna switches.
在图8B中显示的示例中,假定位于一个区域(例如区域A)的频带开关212幅射RF信号和/或噪声以影响位于另一区域(例如区域B)的双工器214(例如B4频带双工器)的工作。这种已知的组件对可以在模块中被分开至可能或实际的程度;然而,可能期望保护B4双工器214避开来自频带开关212的幅射的RF信号/噪声。In the example shown in FIG8B , it is assumed that a band switch 212 located in one region (e.g., region A) radiates RF signals and/or noise that affect the operation of a duplexer 214 (e.g., a B4 band duplexer) located in another region (e.g., region B). This known pair of components can be separated within the module to the extent possible or practical; however, it may be desirable to protect the B4 duplexer 214 from the radiated RF signals/noise from the band switch 212.
在一些实施例中,RF滤波器设备可用作屏蔽组件。例如,一些或所有滤波器,诸如B1滤波器130a、B3滤波器130b、B25滤波器130c和B17滤波器,可以如此处描述的定位和配置以提供模块内屏蔽功能。在图8中示出的示例中,B1滤波器130a和B3滤波器130b可位于B4双工器214附近,以便提供避开来自频带开关212的RF幅射(如箭头216描述的)的影响的RF屏蔽。In some embodiments, RF filter devices can be used as shielding components. For example, some or all filters, such as B1 filter 130a, B3 filter 130b, B25 filter 130c, and B17 filter, can be positioned and configured as described herein to provide in-module shielding functionality. In the example shown in FIG8 , B1 filter 130a and B3 filter 130b can be located near B4 duplexer 214 to provide RF shielding from the effects of RF radiation (as depicted by arrow 216) from band switch 212.
在一些实施例中,图8A和8B的一些或所有屏蔽组件130可以是功能组件。出于描述的目的,将理解,功能组件可以包括作为模块的RF设计的一部分并因此提供一些RF相关功能的器件(有源或无源)。如这里描述的,诸如CSSD滤波器的滤波器设备可以是这种功能组件。还将理解,功能组件可以包括可以是或可以不是模块的RF设计的一部分的器件(有源或无源),模块的RF设计包括通过器件、在器件周围或它们的一些组合的连接特性。例如,如这里更详细描述的,这种器件可以包括提供或能够提供在器件的两个相对侧之间的电连接路径的穿过基板通孔(through-substrate-vias)。将理解,前述元件也可用作此处参照图1-7描述的屏蔽组件。In some embodiments, some or all of the shielding components 130 of Figures 8A and 8B can be functional components. For the purpose of description, it will be understood that a functional component can include a device (active or passive) that is part of the RF design of the module and therefore provides some RF-related functions. As described herein, a filter device such as a CSSD filter can be such a functional component. It will also be understood that a functional component can include a device (active or passive) that may or may not be part of the RF design of the module, and the RF design of the module includes connection features through the device, around the device, or some combination thereof. For example, as described in more detail herein, such a device can include through-substrate vias that provide or can provide an electrical connection path between two opposing sides of the device. It will be understood that the aforementioned elements can also be used as the shielding components described herein with reference to Figures 1-7.
图9A描述了可用作图8A和8B的功能组件之一的示例功能组件130的剖视图。在图9A中,功能组件130按其意图的传统使用来定向,其中在管芯基板220的一侧上的金属层228面朝下以安装到封装基板232(图9B)。在一些实施例中,该金属层(228)可在管芯制造期间使用;然而,在完成的管芯中可以使用或可以不使用金属层228。在一些实施例中,金属层228可作为管芯的地来工作。FIG9A depicts a cross-sectional view of an example functional assembly 130 that can be used as one of the functional assemblies of FIG8A and FIG8B . In FIG9A , the functional assembly 130 is oriented as intended for conventional use, with the metal layer 228 on one side of the die substrate 220 facing downward for mounting to the package substrate 232 ( FIG9B ). In some embodiments, this metal layer (228) can be used during die fabrication; however, the metal layer 228 may or may not be used in the finished die. In some embodiments, the metal layer 228 can function as a ground for the die.
管芯基板220的另一侧显示为包括多个电触垫226a,226b,226c。所述触垫的一些(例如226a,226b)可被用于信号、功率等等;一些(例如226c)可被用作接地触点。The other side of the die substrate 220 is shown to include a plurality of electrical contact pads 226a, 226b, 226c. Some of the contact pads (eg, 226a, 226b) may be used for signals, power, etc.; some (eg, 226c) may be used as ground contacts.
如图9A中进一步显示的,功能组件130可以包括多个穿过管芯通孔222a,222b,222c,222d。在一些实施例中,这种通孔可被配置以提供例如管芯的两侧之间的电连接、热传导路径、或他们的一些组合。在一些实施例中,这样的通孔中的一些可以在管芯制造期间使用,但在完成的管芯可以不使用。在示例中显示,通孔222c显示为提供触垫226c和金属层228(例如,提供接地连接)之间的电连接。可以利用其它通孔(222a,222b,222d)来将热引导到金属层以从管芯散热。As further shown in FIG. 9A , the functional component 130 may include a plurality of through-die vias 222 a, 222 b, 222 c, 222 d. In some embodiments, such vias may be configured to provide, for example, an electrical connection between two sides of the die, a thermal conduction path, or some combination thereof. In some embodiments, some of such vias may be used during die fabrication but may not be used in the finished die. In the example shown, via 222 c is shown as providing an electrical connection between contact pad 226 c and metal layer 228 (e.g., to provide a ground connection). Other vias (222 a, 222 b, 222 d) may be utilized to conduct heat to the metal layer to dissipate heat from the die.
在图9B的示例安装配置230中,金属层228可以被固定(例如焊接)到接地焊垫236,以便物理安装管芯并提供管芯的地到模块的地之间的电连接。管芯的非接地触垫(例如,226a,226b)可电连接到他们各自在封装基板232上的触垫(例如,234a,234b)。9B , metal layer 228 can be secured (e.g., soldered) to ground pads 236 to physically mount the die and provide an electrical connection between the die's ground and the module's ground. The die's non-ground contact pads (e.g., 226 a, 226 b) can be electrically connected to their respective contact pads (e.g., 234 a, 234 b) on package substrate 232.
图10A示出了在一些实施方式中,与图9A的管芯基本上相同或相似的功能组件130可以被翻转,从而金属层228现在面朝上。图10B示出了翻转的管芯被安装到封装基板252上的安装配置。在一些实施例中,封装基板252可配置有触垫(例如,254a,254b,254c),以便利于物理安装(例如,通过焊接)和与他们各自的管芯的触垫(例如,226a,226b,226c)电连接。通过封装基板252(例如,层叠基板)内的各个连接特性(没有示出),触垫254a,254b,254c可被电连接到它们各自的模块终端或模块地。FIG10A shows that in some embodiments, a functional component 130 substantially identical or similar to the die of FIG9A can be flipped over so that the metal layer 228 is now facing upward. FIG10B shows a mounting configuration in which the flipped die is mounted on a package substrate 252. In some embodiments, the package substrate 252 can be configured with contact pads (e.g., 254a, 254b, 254c) to facilitate physical mounting (e.g., by soldering) and electrical connection to the contact pads (e.g., 226a, 226b, 226c) of their respective die. The contact pads 254a, 254b, 254c can be electrically connected to their respective module terminals or module ground via various connection features (not shown) within the package substrate 252 (e.g., a stacking substrate).
如在图10B中进一步所示,不是以前述方式连接的通孔(例如,222a,222b,222d)可通过例如依次电连接(未示出)到模块地的一个或多个球接头256而被电接地。在一些实施例中,这种模块地可以包括一个或多个接地平面,其在封装基板252的表面下提供RF屏蔽功能。10B , vias (e.g., 222 a, 222 b, 222 d) that are not connected in the aforementioned manner can be electrically grounded, for example, by one or more ball joints 256 that are in turn electrically connected (not shown) to a module ground. In some embodiments, such a module ground can include one or more ground planes that provide RF shielding beneath the surface of the package substrate 252.
图10C示出了示例性封装配置260,其中包覆模材料262显示为横向环绕安装的管芯。此外,金属材料264显示为形成或提供在包覆模262(例如,如参考图7描述的)上,并与管芯的金属层228电接触。10C illustrates an exemplary packaging configuration 260 in which overmold material 262 is shown laterally surrounding the mounted die. Additionally, metal material 264 is shown formed or provided on overmold 262 (eg, as described with reference to FIG. 7 ) and in electrical contact with metal layer 228 of the die.
如在图10C中所示,金属层264通过管芯的金属层228、一个或多个穿过管芯的传导通孔(例如222a,222b,222c,222d)、以及它们各自的管芯到封装基板的连接特征(例如256,226c,254c)与封装基板252内的接地平面电接触。如所示,传导通孔222a,222b,222c,222d可提供横向RF屏蔽功能(例如,图8A和8B中区域A和B之间的模块间屏蔽),其可以通过电连接的上(金属层264)屏蔽平面和下(接地平面)屏蔽平面而增强。As shown in FIG10C , metal layer 264 electrically contacts the ground plane within package substrate 252 through the die's metal layer 228, one or more through-die conductive vias (e.g., 222 a, 222 b, 222 c, 222 d), and their respective die-to-package substrate connection features (e.g., 256, 226 c, 254 c). As shown, conductive vias 222 a, 222 b, 222 c, 222 d can provide lateral RF shielding functionality (e.g., inter-module shielding between regions A and B in FIG8A and 8B ), which can be enhanced by electrically connecting the upper (metal layer 264) shielding plane and the lower (ground plane) shielding plane.
在图10A-10C中显示的示例中,可以看出功能组件130(例如,CSSD滤波器管芯)可提供双重功能——一个用于滤波,另一个用于提供RF屏蔽。还要注意,翻转的安装配置还可以去除使用连接焊线电连接功能组件130的触垫的需求。在一些情况中,这种没有连接焊线是有利的。在一些实施例中,并且如这里描述的,如这里描述的屏蔽组件可以是下述组件:其提供或有助于用于屏蔽功能的电连接,还作为与对应的模块相关联的电路的功能部件。使用用于双重目的这种屏蔽组件可以允许例如减小或优化模块所需的空间。10A-10C , it can be seen that the functional component 130 (e.g., a CSSD filter die) can provide dual functionality—one for filtering and another for providing RF shielding. Note also that the flipped mounting configuration can also eliminate the need to use bonding wires to electrically connect the pads of the functional component 130. In some cases, this absence of bonding wires can be advantageous. In some embodiments, and as described herein, a shielding assembly as described herein can be an assembly that provides or facilitates electrical connections for a shielding function and also serves as a functional component of circuitry associated with a corresponding module. Using such a shielding assembly for dual purposes can allow, for example, a reduction or optimization of the space required for a module.
如这里描述的,可能存在包覆模结构的高度大于屏蔽组件的高度的情况(例如,图7C和7D的示例)。图11A描述了用于提供在RF模块100上的导电层264和屏蔽组件130之间的电连接510的示例性配置500。如这里描述的,这种电连接可通过密封屏蔽组件130的包覆模结构262的层形成。屏蔽组件130显示为被安装在包括接地平面504的封装基板252上。利用与导电层264相关联的电节点A和屏蔽组件130之间的电连接510,可以在节点A和与接地平面504相关联的节点B之间形成电路径502(见图11B)。这种电路径可包括导电层264、电连接510、一个或多个在屏蔽组件130上、周围和/或穿过屏蔽组件130的电路径、一个或多个在屏蔽组件130和封装基板252之间的电连接、以及在封装基板252内的一个或多个电连接。As described herein, there may be situations where the height of the overmold structure is greater than the height of the shield assembly (e.g., the examples of Figures 7C and 7D). Figure 11A depicts an exemplary configuration 500 for providing an electrical connection 510 between the conductive layer 264 on the RF module 100 and the shield assembly 130. As described herein, this electrical connection can be formed by a layer of the overmold structure 262 that seals the shield assembly 130. The shield assembly 130 is shown mounted on a package substrate 252 that includes a ground plane 504. Utilizing the electrical connection 510 between an electrical node A associated with the conductive layer 264 and the shield assembly 130, an electrical path 502 can be formed between node A and a node B associated with the ground plane 504 (see Figure 11B). This electrical path may include the conductive layer 264, the electrical connection 510, one or more electrical paths on, around, and/or through the shield assembly 130, one or more electrical connections between the shield assembly 130 and the package substrate 252, and one or more electrical connections within the package substrate 252.
在一些实施例中,屏蔽组件130可以是功能组件,诸如RF滤波器件。此处更详细的描述了这种功能组件以及使用该功能组件以提供RF屏蔽功能的示例。In some embodiments, shielding assembly 130 can be a functional assembly, such as an RF filter device. Such functional assemblies and examples of using the functional assemblies to provide RF shielding functionality are described in more detail herein.
图12A-12E示出了穿过包覆模层的开口可以如何允许在RF模块的导电层532和功能组件130的导电层之间形成电连接(图11中的510)的示例。12A-12E illustrate examples of how openings through the overmold layer may allow electrical connections ( 510 in FIG. 11 ) to be formed between the conductive layer 532 of the RF module and the conductive layer of the functional component 130 .
如这里描述的,功能组件130可以包括作为模块的RF设计的一部分并因而提供一些涉及RF功能的器件(有源或无源)。诸如CSSD(芯片尺寸SAW(表面声波)器件)滤波器的器件可以是这样的功能组件。As described herein, functional components 130 may include devices (active or passive) that are part of the module's RF design and thus provide some RF-related functionality. Devices such as CSSD (Chip Scale SAW (Surface Acoustic Wave) Device) filters may be such functional components.
类似于图10A,图12A描述了示例性功能组件130的剖视图。在显示的示例中,功能组件130显示为被翻转,以便金属层228面朝上。示例性穿过管芯的传导通孔222a-222d中的一些或全部可以电连接到金属层228。这种穿过管芯的传导通孔中的一些可被电连接到在功能组件130的目前的底表面上形成的一个或多个触垫226。这种触垫226中的一些可被电连接到在功能组件130内形成的电路(例如,信号输入、信号输出、功率)。10A , FIG12A depicts a cross-sectional view of an exemplary functional assembly 130. In the example shown, the functional assembly 130 is shown flipped over so that the metal layer 228 faces upward. Some or all of the exemplary through-die conductive vias 222a-222d can be electrically connected to the metal layer 228. Some of these through-die conductive vias can be electrically connected to one or more contact pads 226 formed on the bottom surface of the functional assembly 130. Some of these contact pads 226 can be electrically connected to circuits (e.g., signal input, signal output, power) formed within the functional assembly 130.
类似于图10B,图12B示出了翻转的管芯130安装在封装基板252上的安装配置。在一些实施例中,封装基板252可以包括触垫(例如,254a,254b,254c),以便利于物理安装(例如,通过焊接)以及与它们各自在管芯的触垫(例如,226a,226b,226c)电连接。通过封装基板252(例如,层叠基板)内的各种连接特征(未示出),触垫254a,254b,254c可被电连接到它们各自的模块终端或模块地。Similar to FIG10B , FIG12B shows a mounting configuration in which the flipped die 130 is mounted on a package substrate 252. In some embodiments, the package substrate 252 may include contact pads (e.g., 254a, 254b, 254c) to facilitate physical mounting (e.g., by soldering) and electrical connection to their respective contact pads (e.g., 226a, 226b, 226c) on the die. The contact pads 254a, 254b, 254c may be electrically connected to their respective module terminals or module ground via various connection features (not shown) within the package substrate 252 (e.g., a laminate substrate).
如在图12B中进一步所示,不是以前述方式连接的通孔(例如222a,222b,222d)可通过例如依次电连接(未示出)到模块地的球接头256而被电接地。因此,金属层228通过传导通孔中的一些或全部被电连接到模块地。在一些实施例中,这种模块地可包括一个或多个在封装基板252的表面下提供RF屏蔽功能的接地平面。As further shown in FIG12B , vias (e.g., 222a, 222b, 222d) that are not connected in the aforementioned manner can be electrically grounded, for example, by ball joints 256 that are in turn electrically connected (not shown) to module ground. Thus, metal layer 228 is electrically connected to module ground through some or all of the conductive vias. In some embodiments, such module ground can include one or more ground planes that provide RF shielding beneath the surface of package substrate 252.
图12C示出了其中包覆模262已经形成在封装基板252上并且覆盖翻转的管芯130的金属层228的示例配置。因此,对于图12C中显示的示例配置,在包覆模262上形成的导电层(未示出)将不和金属层228直接电接触。12C shows an example configuration in which an overmold 262 has been formed on the package substrate 252 and covers the metal layer 228 of the flipped die 130. Therefore, for the example configuration shown in FIG12C , a conductive layer (not shown) formed on the overmold 262 will not make direct electrical contact with the metal layer 228.
图12D示出了示例配置520,其中开口522已经穿过包覆模262的一部分形成在金属层228上。可以形成开口522,以便在金属层228的上部产生暴露表面524。这种开口可利用多种技术形成,包括例如激光钻孔或烧蚀。此处更详细地描述了通过激光烧蚀形成该开口的示例。尽管在这样的上下文下进行描述,但是将理解,也可以利用其它开口形成技术(例如,机械钻孔或化学刻蚀)。FIG12D shows an example configuration 520 in which an opening 522 has been formed on the metal layer 228 through a portion of the overmold 262. The opening 522 can be formed so as to produce an exposed surface 524 on the upper portion of the metal layer 228. Such an opening can be formed using a variety of techniques, including, for example, laser drilling or ablation. An example of forming the opening by laser ablation is described in more detail herein. Although described in this context, it will be understood that other opening formation techniques (e.g., mechanical drilling or chemical etching) can also be used.
图12E示出了示例配置530,其中导电层532已经形成在包覆模262和开口522上。在一些实施例中,导电层532可提供开口522周围的区域、开口522的壁、以及通过开口522暴露的金属层228的表面524之中的连续覆盖。因此,导电层532作为整体可以与金属层228电接触,由此与模块的接地平面(未示出)电接触。12E shows an example configuration 530 in which a conductive layer 532 has been formed over overmold 262 and opening 522. In some embodiments, conductive layer 532 may provide continuous coverage of the area surrounding opening 522, the walls of opening 522, and the surface 524 of metal layer 228 exposed through opening 522. Thus, conductive layer 532 as a whole may be in electrical contact with metal layer 228, and thereby with a ground plane (not shown) of the module.
图13A-13F示出了如何能够利用激光烧蚀形成穿过包覆模的开口以有助于模块的导电层和功能组件的金属层之间的电连接的示例。图13A示出了其中诸如滤波器器件的功能组件130和屏蔽焊线106安装到封装基板252上的示例配置。尽管在功能组件130和屏蔽焊线106两者一起实现的上下文中进行了描述,将理解的是,一个或多个与穿过包覆模的一部分的电连接的形成相关联的特征也可在没有屏蔽焊线106的情况下实施。还将理解的是,功能组件130包括上部金属层(例如,图12中的228)。13A-13F illustrate examples of how laser ablation can be used to form openings through the overmold to facilitate electrical connections between the conductive layer of the module and the metal layer of the functional component. FIG13A shows an example configuration in which a functional component 130, such as a filter device, and shielding wire bonds 106 are mounted to a package substrate 252. Although described in the context of implementing both the functional component 130 and the shielding wire bonds 106 together, it will be understood that one or more features associated with forming electrical connections through a portion of the overmold can also be implemented without the shielding wire bonds 106. It will also be understood that the functional component 130 includes an upper metal layer (e.g., 228 in FIG12).
图13B示出了其中包覆模262已经形成在封装基板252上的模块制造的示例阶段。包覆模262显示为基本上密封了屏蔽焊线106。包覆模262的上部表面540可以暴露或可以不暴露屏蔽焊线106的顶部(图13C中的58)。13B illustrates an example stage of module fabrication in which an overmold 262 has been formed on the package substrate 252. The overmold 262 is shown as substantially encapsulating the shield bond wires 106. An upper surface 540 of the overmold 262 may or may not expose the tops of the shield bond wires 106 (58 in FIG. 13C).
在显示的示例中,屏蔽焊线106的高度比功能组件130的高度大。因此,包覆模262显示为覆盖功能组件130的上表面。In the example shown, the height of the shield bond wires 106 is greater than the height of the functional component 130. Thus, the overmold 262 is shown covering the upper surface of the functional component 130.
图13C示出了其中已经从上表面(图3B中的540)去除了材料以便产生新的上表面542的示例性阶段。可以选择去除的材料的量,使得屏蔽焊线106的顶部58充分暴露,以允许与形成在新的上表面542上的导电层的电连接。在一些实施方式中,材料的这种去除可通过微烧蚀来完成。13C shows an exemplary stage in which material has been removed from the upper surface (540 in FIG. 3B ) to create a new upper surface 542. The amount of material removed can be selected so that the tops 58 of the shielding wire bonds 106 are sufficiently exposed to allow electrical connection to the conductive layer formed on the new upper surface 542. In some embodiments, this removal of material can be accomplished by micro-ablation.
图13D示出了其中将激光束554应用至功能组件130之上的区域以便融化包覆模材料并形成开口552的阶段550。在一些实施方式中,包覆模材料可包括例如环氧塑封料(EMCs)。对于这种示例性材料,可利用具有在例如355nm到1060nm的范围内的波长的激光形成开口。13D shows a stage 550 where a laser beam 554 is applied to an area above the functional component 130 to melt the overmold material and form an opening 552. In some embodiments, the overmold material may include, for example, epoxy molding compounds (EMCs). For such exemplary materials, the opening may be formed using a laser having a wavelength in the range of, for example, 355 nm to 1060 nm.
在一些实施方式中,可以应用激光束554,直到功能组件130的上表面556(例如,金属层)充分暴露至形成电连接。利用上述示例激光,操作功率下的束总体可以从金属表面556反射。因此,大量进入或穿过金属层的过燃的可能性降低。In some embodiments, the laser beam 554 can be applied until the upper surface 556 (e.g., metal layer) of the functional component 130 is sufficiently exposed to form an electrical connection. With the example lasers described above, the beam at the operating power can generally be reflected from the metal surface 556. Thus, the likelihood of overburning substantially into or through the metal layer is reduced.
在一些实施方式中,激光束554可被聚焦以便例如在烧蚀位置提供期望的横向束尺寸。这种聚焦的束可以具有圆锥形,由此导致开口552具有与上表面542形成大于90度角的斜切壁(chamfered wall)。这种斜切轮廓可以有助于形成改善的导电层的覆盖。In some embodiments, the laser beam 554 can be focused to provide a desired transverse beam size, for example, at the ablation location. Such a focused beam can have a conical shape, thereby resulting in the opening 552 having a chamfered wall that forms an angle greater than 90 degrees with the upper surface 542. Such a chamfered profile can help to form improved coverage of the conductive layer.
图13E示出了其中通过激光形成的开口552可以被清洁以便例如去除表面556上的激光烧蚀残留物的示例性阶段560。在一些实施方式中,这种清洁可通过类似于图13C的微烧蚀示例的微烧蚀来实现。13E illustrates an exemplary stage 560 in which the opening 552 formed by the laser can be cleaned, for example, to remove laser ablation residue on the surface 556. In some embodiments, such cleaning can be accomplished by microablation similar to the microablation example of FIG. 13C.
在一些实施方式中,整个模块(以及在模块阵列在面板中被制造的情况中,整个面板)可经历微烧蚀处理以清洁开口552。这种对于微烧蚀的暴露可以导致包覆模材料被进一步去除,从而产生新表面544。在一些实施方式中,在这种微烧蚀处理中,大约1到5μm的包覆模材料可以被去除。In some embodiments, the entire module (and, in the case where an array of modules is fabricated in a panel, the entire panel) can undergo a micro-ablation process to clean the openings 552. This exposure to micro-ablation can result in further removal of the overmold material, thereby creating a new surface 544. In some embodiments, approximately 1 to 5 μm of overmold material can be removed during this micro-ablation process.
在执行微烧蚀的示例阶段(图13C到13E),将理解的是,示例图并非必须按比例绘制。因此,与图13E相关联的微烧蚀可以比图13C的微烧蚀去除更多或更少量的包覆模材料。In the example stages of performing microablation (FIGS. 13C to 13E), it will be understood that the example figures are not necessarily drawn to scale. Thus, the microablation associated with FIG. 13E may remove a greater or lesser amount of overmold material than the microablation of FIG. 13C.
图13E示出了包覆模材料的这种的进一步的去除进一步暴露屏蔽焊线106。在一些实施方式中,屏蔽焊线106的暴露部分的这种增加可以有助于形成与导电层的改善的电连接。13E shows that this further removal of the overmold material further exposes the shield bond wires 106. In some embodiments, this increase in the exposed portion of the shield bond wires 106 can help form an improved electrical connection with the conductive layer.
在一些实施方式中,可以实施漂洗处理以去除来自微烧蚀处理的残留物,并制备包覆模262的表面(544,556)和功能组件130的暴露的金属层。In some embodiments, a rinse process may be performed to remove residue from the micro-ablation process and prepare the surfaces ( 544 , 556 ) of the overmold 262 and the exposed metal layer of the functional component 130 .
图13F示出了其中已经应用导电层572以便基本上覆盖包覆模表面544、开口552的墙558、以及功能组件130的暴露的金属表面556的示例阶段570。导电层572还显示为已经覆盖了屏蔽焊线106的暴露的上部。因此,导电层572现在通过屏蔽焊线106和功能组件130电连接到接地平面(未示出)。13F illustrates an example stage 570 in which a conductive layer 572 has been applied to substantially cover the overmold surface 544, the walls 558 of the opening 552, and the exposed metal surface 556 of the functional component 130. The conductive layer 572 is also shown to have covered the exposed upper portions of the shield bond wires 106. Thus, the conductive layer 572 is now electrically connected to a ground plane (not shown) through the shield bond wires 106 and the functional component 130.
在一些实施方式中,导电层574可以包括通过喷射来应用的金属涂料。这种金属涂料的各种示例在例如名为“SEMICONDUCTOR PACKAGE HAVING A METAL PAINT LAYER”的美国专利申请公开No.2013/0335288中有更详细的描述,该公开的内容通过引用整体并入于此。In some embodiments, conductive layer 574 can include a metallic paint applied by spraying. Various examples of such metallic paints are described in more detail, for example, in U.S. Patent Application Publication No. 2013/0335288, entitled “SEMICONDUCTOR PACKAGE HAVING A METAL PAINT LAYER,” the contents of which are incorporated herein by reference in their entirety.
图14示出了可以被实施以完成参考图13A-13F描述的示例模块制造阶段的处理600。在方框602中,功能组件可以被安装在封装基板上。在方框604中,可以相对于功能组件形成一个或多个屏蔽焊线。在方框606中,可以形成包覆模结构以密封功能组件和屏蔽焊线。在方框608中,可以执行第一烧蚀以暴露屏蔽焊线的上部。在一些实施方式中,这种烧蚀处理可以包括微烧蚀处理。在方框610中,可以形成穿过包覆模的开口,以暴露功能组件的金属层的至少一部分。在一些实施方式中,这种开口可通过激光烧蚀形成。在方框612中,可以执行第二烧蚀处理,以进一步暴露屏蔽焊线,并从功能组件的暴露的金属层的表面去除残留物。在一些实施方式中,这种烧蚀处理可以包括微烧蚀处理。在方框614中,包覆模的暴露的表面和金属层表面可以被清洁。在方框616中,可以形成上部导电层,以覆盖屏蔽焊线的暴露部分和功能组件的金属层的暴露部分。在一些实施方式中,上部导电层可通过金属涂料的喷射应用来形成。FIG14 illustrates a process 600 that may be implemented to complete the example module manufacturing stages described with reference to FIG13A-13F . In block 602, a functional component may be mounted on a package substrate. In block 604, one or more shielding wire bonds may be formed relative to the functional component. In block 606, an overmold structure may be formed to seal the functional component and the shielding wire bonds. In block 608, a first ablation may be performed to expose the upper portions of the shielding wire bonds. In some embodiments, this ablation process may include a micro-ablation process. In block 610, an opening may be formed through the overmold to expose at least a portion of the metal layer of the functional component. In some embodiments, this opening may be formed by laser ablation. In block 612, a second ablation process may be performed to further expose the shielding wire bonds and remove residue from the surface of the exposed metal layer of the functional component. In some embodiments, this ablation process may include a micro-ablation process. In block 614, the exposed surface of the overmold and the metal layer surface may be cleaned. In block 616 , an upper conductive layer may be formed to cover the exposed portions of the shield bond wires and the exposed portions of the metal layer of the functional component. In some embodiments, the upper conductive layer may be formed by spray application of a metallic paint.
在一些实施方式中,涉及图13的示例阶段和图14的处理框中的一些的额外细节可在美国专利申请公开No.2013/0335288中找到。将理解的是,然而,本公开的一个或多个特征还可以与其它配置一起实施。例如,包覆模材料的去除并非必须需要通过微烧蚀来执行。在另一个示例中,上导电层的形成并非必须要通过金属涂料的喷射应用来执行。In some embodiments, additional details regarding the example stages of FIG. 13 and some of the process blocks of FIG. 14 can be found in U.S. Patent Application Publication No. 2013/0335288. It will be appreciated, however, that one or more features of the present disclosure may also be implemented with other configurations. For example, removal of the overmold material need not necessarily be performed by micro-ablation. In another example, formation of the upper conductive layer need not necessarily be performed by spray application of a metallic coating.
在这里描述的各种示例中,在在功能组件(130)上形成一个开口的上下文中描述开口(图12中的522,以及图13中的552)。将理解的是,可以形成并使用超过一个开口,以有助于上导电层和功能组件之间超过一个的电连接。例如,如果给定的功能组件具有相对较大的横向尺寸,则可能期望形成多个这种电连接。In various examples described herein, the opening (522 in FIG. 12 , and 552 in FIG. 13 ) is described in the context of forming one opening in the functional component (130). It will be understood that more than one opening may be formed and used to facilitate more than one electrical connection between the upper conductive layer and the functional component. For example, if a given functional component has a relatively large lateral dimension, it may be desirable to form multiple such electrical connections.
图15A示出了被包覆模262密封的功能组件130的平面视图。显示为形成了一个开口(522,552),以便有助于如这里描述的电连接。这种开口可以相对于功能组件130在中心或可以不在中心。15A shows a plan view of the functional component 130 sealed by the overmold 262. An opening (522, 552) is shown formed to facilitate electrical connections as described herein. This opening may or may not be centered relative to the functional component 130.
图15B显示了其中在功能组件130上形成多个开口(522,552)的示例配置。在一些实施例中,这种开口通常沿选定的线排列。15B shows an example configuration in which a plurality of openings (522, 552) are formed in the functional component 130. In some embodiments, such openings are generally arranged along selected lines.
图15C显示了在一些实施例中,多个开口(522,552)还可以在两个维度中横向布置。例如,开口可被布置在二维阵列中。15C shows that in some embodiments, the plurality of openings (522, 552) can also be arranged laterally in two dimensions. For example, the openings can be arranged in a two-dimensional array.
在这里的各种示例中,共形(conformal)导电层(例如,图13F中的572)以及其与SMD(例如,130)的暴露的金属表面的接触在形成电传导路径以有助于共形导电层和封装基板的接地平面之间的接地路径的上下文下进行了描述。然而,将理解的是,与形成为以便与SMD的上表面接触的这种共形层相关的一个或多个特征还可用来提供SMD和共形层之间的其它传导路径。例如,热可以从SMD转移通过其上表面并通过传导到达共形层。在这种应用中,共形层和SMD的上表面中的任一个或两者可被配置为提供良好的热传导性能,并且可以包括或可以不包括电传导性能。In various examples herein, a conformal conductive layer (e.g., 572 in FIG. 13F ) and its contact with the exposed metal surface of an SMD (e.g., 130) are described in the context of forming an electrically conductive path to facilitate a ground path between the conformal conductive layer and the ground plane of the package substrate. However, it will be understood that one or more features associated with such a conformal layer formed so as to contact the upper surface of the SMD can also be used to provide other conductive paths between the SMD and the conformal layer. For example, heat can be transferred from the SMD through its upper surface and reach the conformal layer by conduction. In such applications, either or both of the conformal layer and the upper surface of the SMD can be configured to provide good thermal conductivity and may or may not include electrical conductivity.
这里出于描述的目的,表面贴装器件(SMD)可以包括可安装在基板上的任意器件,诸如利用各种表面贴装技术的封装基板。在一些实施例中,SMD可以包括可安装在封装基板且具有上表面的任意器件。在一些实施例中,这种上表面可以比弯曲焊线的上部更大。SMD可以包括有源和/或无源组件;且这种组件可以被配置用于RF和/或其它应用。所述SMD在这里还被称为例如RF组件、组件、滤波器、CSSD、屏蔽组件、功能组件等。将理解的是,这些术语可以在它们各自的上下文中可互换地使用。For the purposes of description herein, a surface mount device (SMD) may include any device that can be mounted on a substrate, such as a package substrate utilizing various surface mount technologies. In some embodiments, an SMD may include any device that can be mounted on a package substrate and has an upper surface. In some embodiments, such an upper surface may be larger than the upper portion of a bent wire bond. An SMD may include active and/or passive components; and such components may be configured for RF and/or other applications. The SMD is also referred to herein as, for example, an RF component, a component, a filter, a CSSD, a shielding component, a functional component, etc. It will be understood that these terms may be used interchangeably in their respective contexts.
在一些实施方式中,这里描述的具有一个或多个特征的器件和/或电路可包括在诸如无线设备的RF设备中。这种器件和/或电路可以以如在这里描述的模块形式,或以它们的一些组合直接在无线设备中实施。在一些实施例中,这种无线设备可包括例如蜂窝电话、智能手机、具有或不具有电话功能的手持式无线设备、无线平板等。In some embodiments, the devices and/or circuits having one or more features described herein may be included in an RF device such as a wireless device. Such devices and/or circuits may be implemented directly in the wireless device in a modular form as described herein, or in some combination thereof. In some embodiments, such a wireless device may include, for example, a cellular phone, a smartphone, a handheld wireless device with or without telephone functionality, a wireless tablet, and the like.
图16描述了具有这里描述的一个或多个有利特征的示例无线设备700。在具有一个或多个如这里描述的特征的模块100的环境中,所述模块可以总体通过虚线方框100来描述,并且可作为前端模块(FEM)来实施。无线设备700中的其它模块也受益于如这里描述的一个或多个特征的实施。FIG16 illustrates an example wireless device 700 having one or more advantageous features described herein. In the context of a module 100 having one or more features as described herein, the module may be generally depicted by the dashed box 100 and may be implemented as a front-end module (FEM). Other modules within the wireless device 700 may also benefit from the implementation of one or more features as described herein.
PA(功率放大器)712可以接收来自收发器710的它们各自的RF信号,收发器710可以被配置和操作以产生将被放大和发送的RF信号,并且处理接收的信号。收发器710显示为与基带子系统708交互,基带子系统708被配置为提供适合于用户的数据和/或声音信号和适合于收发器710的RF信号之间的转换。收发器710还被显示为连接到被配置成管理用于无线设备的操作的功率的功率管理组件706。这种功率管理还可控制基带子系统708和模块100的操作。PA (power amplifier) 712 can receive their respective RF signals from transceiver 710, which can be configured and operated to generate RF signals to be amplified and transmitted, and process received signals. Transceiver 710 is shown interacting with baseband subsystem 708, which is configured to provide conversion between data and/or voice signals suitable for the user and RF signals suitable for transceiver 710. Transceiver 710 is also shown connected to power management component 706, which is configured to manage power for operation of the wireless device. Such power management can also control the operation of baseband subsystem 708 and module 100.
基带子系统708显示为连接到用户界面702,以有助于提供到用户和从用户接收的声音和/或数据的各种输入和输出。基带子系统708还可以连接到存储器704,存储器704配置成存储数据和/或指令,以有助于无线设备的操作,和/或为用户提供存储信息。Baseband subsystem 708 is shown connected to user interface 702 to facilitate providing various inputs and outputs of sound and/or data to and from the user. Baseband subsystem 708 may also be connected to memory 704, which is configured to store data and/or instructions to facilitate operation of the wireless device and/or provide stored information to the user.
在示例无线设备700中,PA712的输出显示为将被匹配(经由各自的匹配电路714)并通过频带选择开关716、它们各自的双工器718以及天线开关720路由到天线722。在一些实施例中,每个双工器718可以允许使用共同的天线同时进行发射和接收操作(例如722)。在图16中,接收的信号显示为路由到包括例如一个或多个低噪声放大器(LNAs)的″Rx″路径(未示出)。In the example wireless device 700, the output of the PA 712 is shown as being matched (via respective matching circuits 714) and routed to the antenna 722 via a band select switch 716, their respective duplexers 718, and an antenna switch 720. In some embodiments, each duplexer 718 can allow for simultaneous transmit and receive operations (e.g., 722) using a common antenna. In FIG16, received signals are shown as being routed to an "Rx" path (not shown) that includes, for example, one or more low noise amplifiers (LNAs).
许多其它的无线设备配置可以利用一个或多个这里描述的特征。例如,无线设备并不要求是多频带设备。在另一示例中,无线设备可以包括额外的天线,诸如分集天线,以及额外的连接特征,诸如Wi-Fi、蓝牙和GPS。Many other wireless device configurations can utilize one or more of the features described herein. For example, a wireless device is not required to be a multi-band device. In another example, a wireless device can include additional antennas, such as a diversity antenna, and additional connectivity features, such as Wi-Fi, Bluetooth, and GPS.
除非上下文清楚地另外要求,贯穿说明书和权利要求,词语“包括”和“包含”等应解释为包含性的含义,而非排他性或穷举性的含义;也就是说,解释为“包括,但不限于”的含义。如这里通常使用的,词语“耦合”指两个或多个元件可以直接连接或通过一个或多个中间元件连接。此外,当在本申请中使用时,词语“这里”、“上面”、“下面”和类似意思的词语应指代本申请整体,而非本申请的任何特定部分。如上下文允许,上面的具体实施方式中的、使用单数或复数的词语也可以分别包括复数或单数。词语“或”参考两个或多个项的列表时,该词语覆盖该词语的全部下列解释:列表中的任何项,列表中的全部项以及列表中的项的任何组合。Unless the context clearly requires otherwise, throughout the specification and claims, the words "comprises" and "comprising" and the like should be interpreted in an inclusive sense, and not in an exclusive or exhaustive sense; that is, in the sense of "including, but not limited to". As generally used herein, the word "coupled" means that two or more elements can be connected directly or through one or more intermediate elements. In addition, when used in this application, the words "herein", "above", "below" and words of similar meaning shall refer to this application as a whole and not to any particular part of this application. Where the context permits, words in the above specific embodiments that use the singular or plural may also include the plural or singular, respectively. When the word "or" refers to a list of two or more items, the word covers all of the following interpretations of the word: any item in the list, all items in the list, and any combination of items in the list.
实施例的上面的详细描述不意图是穷举性的或将本发明限制为上面公开的精确形式。虽然为了说明的目的在上面描述了本发明的具体实施例和示例,但是如相关领域技术人员将认识到的,各种等效变型可能在本发明的范围内。例如,虽然以给定顺序呈现处理或方框,替换实施例可以以不同顺序进行具有步骤的例程,或采用具有方框的系统,并且可以删除、移动、添加、细分、组合和/或修改一些处理或方框。可以以各种不同方式实现这些处理或方框中的每一个。此外,虽然处理或方框有时被示出为串行进行,可替换地,这些处理或方框可以并行进行,或可以在不同时间进行。The above detailed description of the embodiment is not intended to be exhaustive or to limit the invention to the precise form disclosed above. Although specific embodiments and examples of the present invention have been described above for illustrative purposes, various equivalent modifications may be within the scope of the present invention as will be appreciated by those skilled in the relevant art. For example, although processes or blocks are presented in a given order, alternative embodiments may perform routines with steps in different orders, or adopt systems with blocks, and may delete, move, add, subdivide, combine and/or modify some processes or blocks. Each of these processes or blocks may be implemented in various ways. In addition, although processes or blocks are sometimes shown as being performed serially, alternatively, these processes or blocks may be performed in parallel, or may be performed at different times.
这里提供的本发明的教导可以应用于其他系统,不一定是上面描述的系统。可以结合上面描述的各种实施例的元件和动作以提供进一步的实施例。The teachings of the invention provided herein can be applied to other systems, not necessarily the system described above.The elements and acts of the various embodiments described above can be combined to provide further embodiments.
虽然已描述了本发明的某些实施例,但是这些实施例仅通过示例呈现,并且不意图限制本公开的范围。实际上,这里描述的新颖的方法和系统可以以各种其他形式实施;此外,可以做出这里描述的方法和系统的形式的各种省略、替代和改变,而不背离本公开的精神。所附权利要求及其等效物意图覆盖将落入本公开的范围和精神内的这种形式或变型。Although certain embodiments of the present invention have been described, these embodiments are presented by way of example only and are not intended to limit the scope of the present disclosure. Indeed, the novel methods and systems described herein may be embodied in a variety of other forms; furthermore, various omissions, substitutions, and changes in the form of the methods and systems described herein may be made without departing from the spirit of the present disclosure. The accompanying claims and their equivalents are intended to cover such forms or modifications as would fall within the scope and spirit of the present disclosure.
Claims (20)
Applications Claiming Priority (8)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US201361812610P | 2013-04-16 | 2013-04-16 | |
| US61/812,610 | 2013-04-16 | ||
| US201361817295P | 2013-04-29 | 2013-04-29 | |
| US61/817,295 | 2013-04-29 | ||
| US14/252,719 | 2014-04-14 | ||
| US14/252,717 | 2014-04-14 | ||
| US14/252,717 US9788466B2 (en) | 2013-04-16 | 2014-04-14 | Apparatus and methods related to ground paths implemented with surface mount devices |
| US14/252,719 US9419667B2 (en) | 2013-04-16 | 2014-04-14 | Apparatus and methods related to conformal coating implemented with surface mount devices |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| HK1201378A1 HK1201378A1 (en) | 2015-08-28 |
| HK1201378B true HK1201378B (en) | 2019-09-06 |
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