HK1201377B - End handler - Google Patents

Description

End processor

Technical Field

The end effecters described herein are widely used in semiconductor manufacturing processes to process or transport pellicle frames.

Background

The end effector is typically coupled to a robot arm of a wafer fabrication tool, such as a wafer cutting tool and a wafer lithography inspection tool, to process and transport the pellicle frames. At this stage, the entire wafer that has completed processing should have been attached to the pellicle frame. The pellicle frame consists of a rigid frame, usually made of steel, which has a circular shape as seen through the portion to which the pellicle is attached, and the entire wafer that has been processed has been attached to the pellicle. When mounted to the pellicle frame, these wafers on the pellicle frame will be loaded into cassettes to allow for the next stage of processing of the wafers, which may involve inspection or testing for dicing, defects, etc. The end handler is used to load and unload the pellicle frames, as well as to move one or more pellicle frames from one location to another.

Conventionally, the end effectors include at least two fingers for supporting, manipulating, or holding an article (e.g., a film frame). These fingers are equipped with vacuum pads of various designs. In one conventional design, the vacuum pad consists of a small opening in the surface of the end effector that is attracted to the metal frame of the pellicle frame. In another design, the vacuum pad is a raised-type vacuum pad having a raised-face-up opening extending beyond the top or upper surface of the end effector to grip the membrane of the membrane frame. In these conventional designs, when vacuum pressure is applied through a fine opening in the vacuum pad, it is meant to hold the entire pellicle frame while processing and transferring from one point of the wafer processing tool to another.

The use of an end handler having a conventional vacuum pad as described above can lead to a variety of problems. In the case of a vacuum pad sucking against a metal frame, the inflexible metal surface of the pellicle frame does not create an effective vacuum seal against the vacuum suction of the pellicle frame.

In the case of a convex-type vacuum pad, the portion of the membrane in contact with the convex-type vacuum pad will irreversibly swell or deform over time. Further, the use of raised vacuum pads increases the overall thickness of the end treater and increases its difficulty entering a standard cassette for handling film frames. Standard film frame cassettes accommodate up to 25 wafers and the spacing of the film frames within the cassette is only between 5mm and 8 mm. In many instances, the gap between the wafers toward the center of the pellicle frame becomes smaller and non-uniform as the attached wafers press the pellicle down. The use of raised vacuum pads increases the overall thickness of the end handler, making it even more difficult to enter the cassette, which is otherwise a very delicate operation. Any error in its entry will result in damage to the attached valuable wafer and the end effecter itself. In some cases, it may be desirable to empty the spacer slots of the film frame to facilitate access for end handlers to retrieve or load. This means that the cassettes will have to be reloaded often, causing more downtime for the mechanized tools. This affects overall efficiency.

However, the most significant drawback of all conventional designs is that they have a weak suction force. Conventional designs involve vacuum forces by passing through fine voids on a vacuum pad (whether convex or not)Direct connectionThe use of a membrane (or metal frame) that is sucked against the membrane frame does not provide a sufficiently strong vacuum force to hold the membrane frame. The inability to apply a sufficiently large suction force is particularly acute when these pellicle frames must be moved at relatively high speeds. At higher speeds, without strong or strong vacuum forces, the pellicle frame will slide or fall off during transport.

From the foregoing discussion, it can be appreciated that there is a need to provide an end handler capable of securely gripping a film frame efficiently and quickly without causing any of the problems associated with the conventional systems described above.

Disclosure of Invention

Embodiments herein generally relate to an end handler and a method of handling a pellicle frame. The following description is applicable to the next stage (dicing, inspection or testing) in which the platform with the pellicle frame mounted thereon has been loaded into a cassette ready and ready for use in a semiconductor manufacturing process.

The end handler of the present invention includes a lower support portion to which the instrument is attached, and a support portion for supporting a film frame (not shown) on a support surface. The support section includes a support base portion having extension members (or fingers) extending from the support base portion and at least one vacuum port on the support surface to facilitate attachment of the pellicle frame to the support surface when the vacuum source is activated.

A key feature of the invention relates to the design of the vacuum port on the end effector. The at least one vacuum port includes at least one pocket having at least one vacuum opening disposed adjacent a side of a pocket wall. The pockets are shallow indentations (recesses) of the surface of the end effector and have surface openings that contact the film of the film frame when the film of the film frame is loaded into the end effector. The provision of the at least one vacuum opening near the side of the pocket wall enables the above-mentioned membrane close to the edge of the pocket to be effectively sucked down against the edge of the pocket without over-bulging the membrane covering the pocket in the center. The area of the surface opening is several times the area of the opening of the vacuum opening. The size of the surface opening of the pocket depends on the flexibility of the film (or other flexible material) of the film frame. It should not be so large as to cause excessive expansion of the membrane into the cavity, which would reduce the area of the surface for the suction force if the membrane were to contact the bottom of the cavity.

Another embodiment of the present invention is to use a larger pocket (when desired) having at least one port island with a top surface that is substantially coplanar with the top surface of the end handler. Where the at least one port island is present, the sidewalls of the pocket and the sidewalls of the port island form a porous recess that is a substantially continuous open channel substantially surrounding the at least one port island, and at least one vacuum opening within the porous recess. The porous grooves support the film and prevent expansion of the film frame when a vacuum is applied through the open grooves.

The primary purpose of the above embodiments is to increase the area of the surface through which the vacuum is applied. The vacuum port of the end effector of the above-described embodiments of the present invention enables the vacuum force of the vacuum port to be significantly increased by a simple hydraulic principle; the surface opening of each pocket and the surface area of the channel opening of the gas-holed recess substantially surrounding the at least one port island are multiples of the area of the opening of the vacuum hole. The surface openings of the cavity and the recesses with air holes have a considerably larger area than the vacuum openings, which significantly (several times) increases the effective suction force than if applied directly to the membrane of the membrane frame through the at least one vacuum opening.

The air-channeled grooves and pockets are in fluid communication with a vacuum source through a vacuum opening.

It is contemplated that elements of the above-described embodiments may be varied to create other embodiments of the invention. In one embodiment, the at least one pocket may include one or more port islands. The at least one pocket and the sidewall of the port island form a continuous, vented recess around the port island. At least one vacuum opening is disposed within the vented recess, the at least one vacuum opening being in fluid communication with at least one vacuum source. In one embodiment, the at least one port island in question includes at least one pocket having at least one vacuum opening in fluid communication with a vacuum source to increase the suction force of the individual vacuum ports as a whole. In one embodiment, the vacuum port may present itself as a series of discrete pockets (with at least one vacuum opening) along the perimeter of the port island, constituting a non-continuous, vented groove. It is contemplated that in each of the above embodiments, the individual vacuum ports may include a plurality of air-vented grooves fanning out from the center (in all variations thereof) as desired to further increase the suction force by increasing the area provided by the continuous channel openings or the discontinuous pockets through the air-vented grooves.

These embodiments, as well as other advantages and features disclosed herein, will become better understood by reference to the following description and drawings. Further, it is to be understood that the features of the various embodiments described herein are not mutually exclusive and it is contemplated that other embodiments may be created by other permutations and combinations of the features of the above-described embodiments.

Drawings

In the description that follows, like parts are marked throughout the specification and the drawings with the same reference numerals. Additionally, the drawings are not to scale, emphasis instead being placed upon illustrating the principles of the invention. Various embodiments of the invention are described with reference to the following drawings, in which:

FIG. 1 illustrates an embodiment of an end handler having a vacuum port of the present invention;

FIG. 2a₁-2a₄A series of embodiments of a vacuum port comprising at least one pocket;

FIG. 2b illustrates an embodiment of a vacuum port including a pocket and a port island;

FIG. 2c illustrates an embodiment of a vacuum port including a plurality of port islands;

FIG. 2d illustrates an embodiment of a vacuum port comprising a basic configuration of at least one port island having at least one recess concentrically arranged;

FIG. 2e illustrates an embodiment of a vacuum port comprising a basic configuration of at least one pocket with a concentrically arranged port island;

FIG. 2f illustrates an embodiment of a vacuum port including a plurality of pockets forming a non-continuous vented groove;

FIG. 2g illustrates an embodiment of a vacuum port including a plurality of pockets forming a non-continuous vented groove;

FIG. 2h illustrates an embodiment of a vacuum port comprising a plurality of pockets forming a discontinuous pocket groove, the plurality of pockets having different shapes;

FIG. 2i illustrates an embodiment of a vacuum port comprising a plurality of pockets forming a discontinuous pocket with a vent, each pocket having at least one vacuum opening;

FIG. 2j illustrates an embodiment of a vacuum port comprising a plurality of concentrically arranged pockets;

FIG. 3 shows a pellicle frame that may be processed by an embodiment of the present end handler;

FIG. 4 illustrates a pellicle frame that may be used with or in addition to the end handler of this embodiment;

FIG. 5 is a top view of a process in which an end handler is used to load and unload film frames from cassettes used to receive and transport the film frames; and

fig. 6 shows an embodiment of a cassette rack with a film frame.

Detailed Description

The present disclosure relates to an end handler for facilitating handling and transporting film frames into and out of a cassette during a semiconductor manufacturing process.

Preferably, the end effector is constructed of a suitable and sufficiently strong rigid material (typically steel) to support a pellicle frame having a set of dies or an entire wafer carried on a pellicle membrane.

FIG. 1 illustrates one preferred embodiment of an end handler 100 for use in a semiconductor process or tool to handle and transport pellicle frames. The end effecter 100 includes a lower support part 110, and the lower support part 110 has a coupling slot 114 to be connected with an instrument (not shown) and a support part 120 for supporting a film frame (not shown) on a support surface 125. The support portion 120 of the end effecter is comprised of a U-shaped section including a support base member 120a, fingers or extension members 120b extending therefrom to support the pellicle frame₁And 120b₂And at least one vacuum port (142) on the support surface_a,142_b,142_c,142_dAnd 142_e) To facilitate attachment of the film frame to the support surface 125 during extraction, loading and/or transport.

Figure 3 illustrates an exemplary pellicle frame 200. As shown, the pellicle frame includes a frame 210. The frame is an annular frame having an opening 215 for receiving the membrane therein. For example, the pellicle frame may be of different sizes and shapes to accommodate wafers of different sizes and shapes. Although the present embodiment shows the support portion 120 of the end effecter 100 as having a U-shaped extension, it is contemplated that the extension may be (or conceivably be) other shapes corresponding to the shape and size of the film frame so long as the necessary support of the film frame is provided during operation of the end effecter.

The opening 215 includes a polymer membrane 220 for attaching and supporting the wafer. For example, the polymeric membrane includes at least one tacky surface. Such as the adhesive surface or mounting surface, is the surface to which the wafer is attached. The adhesive surface facilitates the retention of the wafer on the polymer layer. The wafer may be cut into dies depending on the process. For example, the wafer may be cut into dies, or singulated into individual devices or dies. In other embodiments, the wafer is uncut.

Fig. 4 shows an embodiment of the end handler 100 with the pellicle frame 200 mounted. When the film frame 200 is extracted onto the end handler 100, the film frame 200 passes through the fittingly placed positioning elements 134 on the end handler 100 in combination with the aligner 230 on the film frame_aAnd 134_bTo align. However, in the extraction of the end effecter, since the end effecter is moved to a preset position with respect to the film frame inside the magazine, the positioning of the positioning member may not be strictly necessary in practice. The vacuum port 142 when the end effector is moved to a preset position₁、142₂And 142₃Will be in communication with the polymer film of the film frame at a predetermined critical location relative to the end effector and when the vacuum is activated to effect extraction.

The end effector support 120 may be configured in different shapes and sizes to handle pellicle frames of different shapes and sizes, such as square, rectangular, circular, or oval, depending on the shape of the pellicle frame to be handled or transported. Such as the support base portion 120a abutting the receiving portion, or finger or extension member 120b₁And 120b₂。

Vacuum screen 146 includes vacuum grooves or channels (146a, 146b, 146c, and 146d) embedded within end effector 100. The vacuum screen 146 may extend from the lower mating portion 110 to the support portion 120. The vacuum screen 146 is in fluid communication with a vacuum source. Although in this embodiment, the embedded grooves or channels (146a, 146b, 146c, and 146d) are shown only in the vicinity of the base of the support portion 120a, it is contemplated that a network of vacuum grooves or channels (146a, 146b, 146c, and 146d) may be provided along the extension member 120b₁And 120b₂Or at any location of the end effecter where a vacuum port can be located (as desired or necessary). The end effector may be provided with a plurality of vacuum sources.

Fig. 5 shows a top view of a process 400 in which end handler 100 is used to load or unload film frames 200 from a standard magazine 410 for holding and transporting the film frames. Fig. 6 shows a front view of the magazine 410. The magazine is configured to mount a plurality of film frames 200 for use in a manufacturing process_1-nThe container of (1). As discussed, during the manufacturing process, the pellicle frame is used to process wafers or diced dies attached to the pellicle film of the pellicle frame. A standard magazine is configured to mount 25 eight inch film frames (e.g., 25 ═ n), corresponding to typical batch sizes used for semiconductor fabrication of eight inch wafers. In this regard, the end handler will only be able to travel within the minimal space between each pair of parallel slots. The spacing between two adjacent pellicle frames is typically 5mm to 8 mm. As will be explained below, embodiments of the end effecter of the present invention have a very thin cross section and allow the end effecter to easily enter the magazine to extract or load the film frame.

FIG. 2a₁Is the true of the inventionIllustration of an embodiment of a null port 142. The most basic configuration of the at least one vacuum port 142 includes at least one pocket 190, and each pocket 190 has at least one vacuum opening 160 disposed therein. The pocket 190 is a shallow indentation (recess) formed from the surface of the end effecter and has a surface opening 192 that contacts the film of the film frame when the film is loaded into the end effecter 100. In FIG. 2a₄In one embodiment shown, the at least one vacuum opening may be provided at the bottom of the pocket and near the wall 191 thereof, or on the wall 191 of the pocket 190. The at least one vacuum opening 160 of suitable size disposed near or on the wall 191 of the pocket 190 may allow the membrane 220 above and near the edge of the pocket 190 to be effectively drawn too far down against the edge of the pocket without causing the membrane 220 near the center of the pocket to bulge downward. The area of the surface opening 192 of the recess 190 that can communicate with the film 220 is several times the area of the opening of the vacuum opening 160. The size of the surface opening 192 of the pocket 190 depends on the flexibility of the film (or other flexible material) of the film frame. It should also not be so large as to cause the membrane to expand excessively downward into the cavity when the vacuum is applied. It is clear that this recess can have different shapes and sizes as desired or needed. FIG. 2a₂And 2a₃Other embodiments of vacuum ports having different shaped and sized pockets are shown.

FIG. 2b is another embodiment of the present invention wherein the vacuum port 142 includes at least one cavity 190 having at least one port island 126, the port island 126 having a top surface that is substantially coplanar with the top surface of the end effector 125. In the presence of at least port island 126, the recess 190 becomes a vented recess 151 that is essentially a continuous open channel that substantially surrounds the at least one port island 126; and the vented recess 151 has at least one vacuum opening 160 disposed in the vented recess 151. The vacuum openings 160 may be located at the bottom of the vented recess or at the sidewalls of the vented recess. The at least one vacuum opening 160 opens to the vented recess 151 and is in fluid communication with the vacuum source 112 through the vacuum screen 146. The channels of the vented grooves 151 open to the membrane 220 and communicate with the membrane when the membrane of the membrane frame is loaded into the end handler. When a vacuum is applied, the vented recess 151 will draw the membrane down while the at least one port island 126 supports the membrane 220 and prevents it from expanding.

The above-described embodiment of the vacuum port 142 of the end effector enables the vacuum force of the vacuum port to be significantly increased by a simple hydraulic principle; the surface opening 192 of each pocket 190 and the surface area of the channel opening of the gas-channeled groove 151 substantially surrounding the at least one port island 126, respectively, are multiples of the open area of the vacuum holes. By the relatively large area of the surface opening of the cavity 192 and the respective air-vent groove 151, when the vacuum source 112 is activated and has been applied directly to the membrane of the membrane frame, the vacuum force will be applied against the membrane 220 in comparison to the vacuum openings, which significantly increases (by a factor of) the effective suction force if applied through the at least one vacuum opening 160.

To secure the film frame 200 to the end handler 100 during handling (loading, extraction or transport) of the device, at least one vacuum port 142 is adapted to be disposed on the support surface such that when the at least one vacuum port 142 is activated, the at least one vacuum port 142 will be in communication with the film 220 of the film frame to facilitate a suction force that can effectively secure the entire film frame down to the surface of the support surface. When the vacuum source 112 is activated, the pockets 190 and the vented recesses 151, respectively, of the various embodiments, in communication with the membrane of the membrane frame, will draw the membrane from the open channels of the pockets and the vented recesses 151, respectively, to provide a vacuum seal that effectively holds the membrane frame 200 down.

Unlike conventional systems in which the fine vacuum openings on the vacuum port directly contact the film or metal of the film frame and provide suction to the film, the vacuum openings 160 of the present embodiment do not directly contact the film 220. When the vacuum source 112 is activated, the vacuum opening 160 is positioned therein and is in fluid communication with the pocket 190 or the vented groove 151 such that a vacuum force is applied through the pocketThe open surface of the pocket 192 or open channel generally surrounding the vented recess 151 of the port island 126 is applied. In one embodiment as shown in fig. 2b, the open channel is continuous and surrounds the port island 126. In another embodiment, as shown in FIG. 2f, the vacuum port may be formed with a plurality of pockets (190a, 190b, 190c, etc.) that simultaneously form a discontinuous, fittingly arranged, vented recess 151_eAnd 151_fTo provide an effective suction force at strategic locations that secures the pellicle frame down.

The various deformed pockets 190 and the vented recesses 151 are in fluid communication with the membrane 220, providing a relatively larger surface area to exert the suction force of the membrane against the membrane frame. The vacuum suction force is generated by at least one vacuum opening 160 located within a pocket 190 or a vented recess 151 that is in fluid communication with the vacuum source 112. Due to the plurality of vacuum ports that are fittingly placed on the end handler, the suction force achieved through the open channels of the pockets or vented recesses 151 of these vacuum ports significantly amplifies the suction force that the vacuum openings 160 exert on the membrane 220 (e.g., if the vacuum openings 160 are in direct contact with the membrane 220). The increased force may significantly increase the suction force applied to secure the pellicle frame 200 and may cause the pellicle frame to be held more securely at higher speeds. The increased force may be calculated via application of a simple hydraulic principle. It can also be calibrated and controlled by software.

When activated, the at least one vacuum port 142 temporarily attaches the end handler membrane (of the membrane frame) to the end handler for transport. When the transport is complete, the at least one vacuum port 142 is deactivated to detach the membrane 220 from the end handler.

The presence of the port island 126 is important. Because the top surface of port island 126 and the surface of the end effector surrounding the vented recess 151 are coplanar or substantially flush, port island 126 ensures that the at least one vacuum port 142 does not swell or deform the membrane 220 when a vacuum is applied. In effect, the port island 126 provides support and prevents expansion of the membrane 220 when suction is applied. Accordingly, the vented groove 151 should not be too wide to cause the flexible membrane to expand downward without support. Vacuum port 142 (non-raised) end handler the coplanarity of the end handler with the surface of the end handler ensures that an end handler so designed can have a very fine profile and the strongest suction.

Although the vacuum screen 146 is described as a continuous cycle connecting the vacuum source 112 to the at least one vacuum port 142 through the vacuum opening 160, other configurations of the vacuum screen 146 may be useful or desirable as the case may be. For example, a non-continuous cycle of vacuum screens may also be useful, particularly when there is a need to apply non-uniform force from each of the at least one vacuum ports, in which case multiple vacuum sources connected to the vacuum ports, respectively, may be required.

Unlike the end effecter in the conventional system in which the total thickness is increased due to the protruded vacuum port, the entire profile of the vacuum port 142 in the end effecter 100 of the present embodiment remains slim because the vacuum port 142 is not protruded. This means that the end effecter can more easily access the tiny space (approximately 5mm to 8 mm) between each pair of slots in the cartridge for extraction or loading. As previously mentioned, the extraction and loading of the pellicle frame is a very delicate operation due to the space constraints between the pellicle frames, which are made narrow by the weight of the wafers (of the pellicle frame) which are typically dropped by the weight of the wafers it carries. End handlers with thicker profiles are prone to damage the wafer when entering the cassette. Small variations in thickness have a large effect on the ease of entering the cassette. To avoid damage, the cassette cannot load one film frame in each pair of slots, but every other pair of slots is left empty to provide the space needed for an end handler with a thicker profile. This reduces the overall efficiency of the semiconductor instrument.

Although FIG. 1 illustrates one embodiment of the present end effector in which the at least one vacuum port 142 has a pocket 190, it is contemplated thatThe empty ports may take on any other desired or useful number, shape and size configuration. FIG. 2b illustrates an embodiment of a vacuum port having at least one cavity of a port island. FIG. 2 illustrates a structure including at least two port islands 126_aAnd 126_bAnd is formed by a recess 151 with air holes_bAn example of a surrounding vacuum port 142. Other embodiments are possible, if desired, with the port island shaped like a rectangle or triangle or other geometric shape.

FIG. 2d represents another embodiment of an end effector wherein the port island 126 of its vacuum port has at least one port pocket 190_aThe pocket has at least one vacuum opening 160 while the top surface of the port island 126 remains flush or coplanar with the surrounding surface of the end handler. FIGS. 2f and 2g represent various embodiments in which the vacuum port has a plurality of port pockets 190 with at least one vacuum opening 160_b、190_cAnd/or 190_dAnd (4) forming. These port pockets can be considered as non-continuous open channels that form a pocket with an air vent. Fig. 2h, 2i and 2j are other permutations of pockets and port islands showing, but not limited to, the configuration of vacuum ports. FIG. 2j shows a vacuum port comprising a plurality of pockets surrounding a port island comprising a plurality of smaller pockets.

Fig. 2e represents another embodiment of the vacuum port 142, wherein the basic configuration of the vacuum port 142 of the embodiment represented by fig. 2b is repeated concentrically outward. In this embodiment, the vacuum port may have a plurality of port islands (126a and 126b) and a plurality of vented recesses (151d and 151c) configured concentrically outward, and wherein the port islands 126a and 126b are coplanar with each other and with a surrounding surface of the end effector.

If a greater suction force is required to be applied to a greater area of the bond represented by the vacuum port without expanding or deforming the membrane of the membrane frame, it is necessary to employ a further embodiment as shown in figures 2c, 2d, 2e, 2f and 2 g. The coplanarity of the port island with the peripheral surface of the end effector ensures that while suction is applied through the vented groove, it can provide support to the membrane against bulging, especially when the area over which suction is applied through the vacuum port is large. It is also contemplated that if different suction forces need to be applied to different vacuum ports located at strategic points of the end effector, different vacuum sources are in fluid communication with the associated vacuum ports.

The present treatment system and method is particularly useful when the articles to be treated are made of materials that are soft (or flexible) and substantially non-porous materials.

Although FIG. 1 shows vacuum port 142 positioned at support base portion 120a of end effector 100_a、142_b、142_c、142_dAnd 142_eIt is contemplated that the at least one vacuum port may be located elsewhere on the end effector, if desired. For example, the at least one vacuum port may be provided on a finger of the end effector to facilitate a better grip.

Such as the end effecters described above, for use in processing pellicle frames in semiconductor manufacturing processes. It should be understood that the end handler can be used to handle any item having a flexible surface. The end effecter can also be used in other types of manufacturing processes. For example, the end effecter may be applied to other industries or applications.

Claims (16)

1. An end handler, comprising:

a mating part for mating with an apparatus; and

a support portion adapted to provide support for a film or film frame on a support surface of the support portion, the support portion comprising:

the base part is supported and the supporting base part is provided with a plurality of supporting grooves,

an extension member extending from the support base portion, an

The configuration of at least one vacuum port is such that,

wherein the configuration of the at least one vacuum port includes at least one vacuum port to distribute suction,

wherein the at least one vacuum port is comprised of at least one indentation in a support surface of the support,

at least one vacuum opening in fluid communication with at least one vacuum source for applying a different suction force to the respective vacuum opening, wherein the at least one vacuum opening is disposed within each of the at least one indentation,

wherein the indentations have surface openings with an area larger than at least one vacuum opening to increase the suction applied to the film and film frame when the vacuum source is activated, and

wherein the configuration of the at least one vacuum port is such that the remaining surface of the support portion is not recessed, continuing to provide direct support to the film or film frame on the support surface, thereby reducing distortion and twisting of the film while the configuration of the at least one vacuum port provides a distributed amplified suction force on the film or film frame.

2. The end handler of claim 1, wherein the at least one vacuum opening is disposed on the bottom and adjacent to the sidewall or on the sidewall of the at least one vacuum port.

3. The end handler of any of the preceding claims, wherein the indentation of the at least one support surface forms a vacuum port comprising at least one channel having at least one vacuum opening such that the remainder of the support surface is not recessed and is surrounded by the deepest channel forming at least one island coplanar with the support surface such that the deepest channel surrounds the island comprising the non-recessed support surface.

4. The end handler of claim 1, wherein the at least one vacuum port comprises at least one indentation such that a remaining portion of the support surface is not recessed, remaining coplanar with the support surface.

5. The end handler of claim 1, wherein each of the at least one indentation is configurable to have a different shape and size.

6. The end handler of claim 3, wherein the at least one channel constitutes a continuous air-vented groove, the groove configurable to different sizes and shapes.

7. The end handler of claim 3, wherein the at least one island has at least one indentation, each indentation having at least one vacuum opening therein and in fluid communication with at least one vacuum source.

8. The end handler of claim 1, wherein the at least one vacuum port comprises a configuration of at least one vacuum port.

9. The end handler of claim 8, wherein the configuration of the at least one vacuum port comprises repeating a configuration comprising at least one island in the at least one indentation being concentrically outward such that a first one of the at least one island is spatially disposed within a first one of the at least one indentation and constitutes a first air-channeled recess and further spatially disposed in a larger second one of the at least one island, a second one of the at least one island is spatially disposed in a larger second one of the at least one indentation and constitutes a second air-channeled recess surrounding the second island, and so on such that a penultimate indentation and its island, and the air-channeled recess, will be spatially disposed in a larger final island located in the larger final indentation, while forming a final air-channeled recess around the larger final island.

10. The end handler of claim 8, wherein the configuration of the at least one vacuum port comprises repeating a configuration comprising indentations within concentric outward islands such that a first indentation is located within a first island and the first indentation and the first island are spatially disposed within a second larger indentation and so on such that the penultimate indentation and island will be spatially disposed within a larger final indentation.

11. The end handler of claim 7, wherein the configuration of the at least one vacuum port consists of repeating a configuration comprising a plurality of indentations disposed in any particular shape and size island and concentrically outward.

12. The end handler of claim 1, wherein the at least one vacuum port is located on the support base member.

13. The end handler of claim 1, wherein the at least one vacuum port is located on the extension member.

14. The end handler of claim 1, wherein the vacuum source comprises a first vacuum source, a second vacuum source, or a subsequent vacuum source, each of the first vacuum source, the second vacuum source, and the subsequent vacuum source having a different vacuum force in fluid communication with the selected at least one vacuum port.

15. The end handler of claim 14, wherein the vacuum force applied to the film frame through the at least one vacuum port is adjusted by software control.

16. A method of processing a pellicle frame, comprising:

providing a mating portion for mating with an instrument;

forming a supporting portion to support a film or a film frame on a supporting surface of the supporting portion;

providing a support base portion for the support portion;

extending an extension member from the support base portion;

providing an arrangement of at least one vacuum port;

wherein the configuration of the at least one vacuum port includes at least one vacuum port to distribute suction;

wherein the at least one vacuum port is comprised of at least one indentation in a support surface of the support portion;

providing at least one vacuum opening in fluid communication with at least one vacuum source for applying a different suction force to each vacuum opening;

wherein the indentations have surface openings with an area larger than at least one vacuum opening to increase the suction applied on the film and film frame when the vacuum source is activated, and

the configuration of the at least one vacuum port is configured such that the remaining surface of the support portion is not recessed, continuing to provide direct support for the film or film frame on the support surface, thereby reducing distortion and twisting of the film while the configuration of the at least one vacuum port provides a distributed amplified suction force on the film or film frame.