HK1114356B - Bent microstructures - Google Patents

Description

Curved microstructures

Technical Field

The present invention relates to a device or an apparatus for sampling, transporting or processing, respectively, of a fluid medium, a microstructure comprising at least one device or apparatus, a method for using said device or structure and for producing a device or structure, respectively, according to the preamble of claim 1.

Background

For the sampling or processing, respectively, of fluid samples, for example, in particular in the analytical field, for example, in particular in the medical or pharmaceutical sector, so-called pipette or capillary tubes or a plurality of pipette microstructures are used. In the course of increasing the efficiency of the analytical laboratory, increasing the economy, and also due to the smaller sampling volumes in the field, the instruments used, such as in particular the pipette or pipette structures, become more precise and more complex. For this purpose, for example, several pipette designs from Zymark or Caliper include up to 384 so-called pipette tips for sampling quantities in the range of 2 to 100 nl.

In EP1388369 a microfluidic system is proposed which can be used in a micro-array system comprising channel elastic probes, comprising at least one capillary channel. The proposed spring beam with non-matching channels, e.g. a stressed metal beam, bends away from the substrate when released. The channel spring probes are arranged on the substrate by using specific production steps, and the substrate is covered with a multilayer coating, thereby obtaining spring characteristics.

Disclosure of Invention

The subject matter of the invention consists of proposing the ability to further refine or improve in microtechnical process steps, in particular in the analysis, implementation of test series, sampling, sample distribution by capillary electrophoresis, capillary chromatography by using Nano-or microsystems, and the feasibility of improving automation.

The present invention proposes to use curved or curved fluidic devices or corresponding fluidic instruments or 3D structures instead of the nl or μ l range "straight" devices proposed in EP1388369, which are planar 2D structures or channel elastic probes arranged on a substrate. For example, out-of-plane sampling devices are proposed for sampling, transporting and/or processing of fluid media, which comprise at least one longitudinally extending strip-like section in the plane of the substrate, comprising a fluid channel, such as a pipette or capillary or needle, respectively, for sampling or processing, which is designed to be curved or arcuate, extending beyond the plane of the substrate at least in one position.

By "curved" in the sense of the present invention is meant a substrate that is beyond the original substantially plane, for example produced by a specific bending action by etching a substrate that is pre-structured in a three-dimensional structure, the curved portion of the original surface substrate protruding out of the plane of the substrate. In particular, capillary channels or grooves may be formed which extend into or beyond the plane of the substrate.

Surprisingly and contrary to any hypothesis, it could be verified in experiments that the flow in e.g. the so-called capillary grooves and especially in open fluid channels also acts with "wrap angles" in the μ l and nanoliter range. The open channel or open channels may be inside as well as outside the radius of curvature at the bending location.

The same procedure applies to structures comprising a plurality of devices or apparatuses, which comprise liquid channels in the micro-liter or nano-liter range, respectively, which comprise at least one bending location or structure, respectively, as described above.

It goes without saying that the flow characteristics of the fluid in the capillary groove or the fluid channel depend on the geometry of the inner wall surface and the surface finish or coating. The surface is preferably hydrophilic if a water-based solution or fluid, and more hydrophilic if a more oily fluid. In summary, it can be said that the contact angle between the fluid and the surface should be small.

In the prior art, so-called 3D structures are known, wherein a capillary for sampling is bonded and/or arranged on a so-called "hyperplane" structure, such as the channel elastic probe proposed in EP 1388369.

For these structures, the production costs are very high and the production method is also complex and prone to errors. In addition, for such structures, closed liquid channels have to be used, which means that so-called closed capillaries are often proposed in the prior art. Also for the elastic probe proposed in EP1388369, a plurality of structures must be applied on the substrate to obtain elastic properties.

In contrast to the materials usually used today for producing pipettes or capillaries, i.e. for producing the device according to the invention or the structures respectively comprising a plurality of devices or instruments, which are preferably plastically deformable, for example metals, polymers which are at least partly plastic and the above-mentioned materials are usually used, which usually comprise only one layer.

On the one hand, the production of the components or instruments proposed by the invention, such as pipettes and capillaries or the entire structure, is very simple, since the components or instruments comprising the fluid channels usually comprise only one layer and can be bent in a simple manner. In addition, the metal strip may serve as a foundation, which may be processed using well-known photolithography processes, such as by etching, to form the fluid channels. Open channels may be formed, for example, on one or both sides of a small metal strip, and a film may be used to cover the open channels to form further more closed channels. Possible production processes for producing the components or devices according to the invention, like etching, stamping, bending, etc., respectively, will be described hereinafter with reference to the drawings.

An advantage of the instrument or device proposed according to the invention is that the sampling or handling of the sample is made easier by using curved or arc-shaped members, such as pipettes or capillaries comprising the instrument, since it does not have to be moved in a more or less perpendicular manner against the surface of the substrate from which the sample has to be removed. For example, a pipette or capillary comprising the device may be moved from one side in a more or less parallel manner over the surface of the substrate to remove the sample. While also allowing for the removal or handling of multiple samples in a simple manner by employing the structure of the present invention in a limited dimensional condition. Various advantages of the devices or components and structures respectively proposed by the present invention will be described in more detail below with reference to the accompanying drawings.

Furthermore, a method of sampling, transporting and/or treating a fluid medium, in particular by using the above-described device or the above-described structure, is described. According to the method of the invention, a pipette or capillary, such as a needle or structure comprising a plurality of pipettes or capillaries, is used and fluid is delivered along a location where a sample is to be sampled or processed, said location being curved or bent, respectively.

Further preferred aspects or embodiments of the component, the device and the corresponding structures and methods are characterized by the independent claims.

The device, apparatus or structure according to the invention, respectively, is particularly suitable for diagnostic or analytical processes in the fields of chemistry, medicine, microbiology, pharmacy, etc. The invention will be explained in more detail with reference to the drawings.

Drawings

In the figure:

figures 1a-1c show in perspective view an embodiment of a meandering fluid channel,

figures 2a and 2b show in perspective a curved member comprising a needle-like tip,

figures 3a and 3b show in perspective a curved member comprising a pointed end,

figures 4a and 4b show in perspective view the reservoir and the fluid member for sampling,

figure 4c shows a cross-sectional view taken along the line I-I of figures 4a and 4b,

figures 5a and 5b show in perspective view a simple immersion of a curved fluidic member into a wool or nonwoven member,

figures 6a and 6b schematically show in perspective view the treatment of fluid from a curved fluidic member according to the principle of a pen,

figure 7 schematically shows a so-called multi-way array with mixing zones created by using a fluid member like a pen,

figures 8a and 8b show the transfer of sample from the fluidic device to the fluidic device by overlapping contacts of the capillaries,

figure 9 schematically shows in perspective view the transfer of fluid between two fluid members by using an additional positioning member,

fig. 10 shows an example of a steel CD etched on both sides in a top view, outside of which a needle-like fluidic member may be bent in order to form the structure of the invention,

figure 11 shows in side perspective view a structure formed out of the CD of figure 10,

figure 12 shows another configuration similar to that shown in figure 11,

fig. 13a-13d show in top view, cross-sectional views from the side, an elastic leaf spring-like fluidic member arranged on a CD, and actuated with an actuating member for processing a sample,

figures 14a and 14b show an example of the arrangement of a mechanical transmission on a leaf spring in order to form a structure according to the invention,

figures 15a and 15b show planar microstructures and curved "hyperplane" microstructures formed in a conventional manner,

figures 16a-16f illustrate a possible approach for forming fluid channels in a fluid member of the present invention,

FIG. 17a shows a microfluidic device with a curved distance member, an

Figure 17b shows a stacking of the plurality of microfluidic devices shown in figure 17 a.

Detailed Description

In fig. 1a-1c are shown schematically and in perspective views three embodiments of how the fluid channels are arranged on a single fluid member of a "wrap angle" of the fluid structure of the invention. Fig. 1a shows a curved member 1 comprising two layers with closed channels, including a curve 2.

Figure 1b shows a layer of curved members 3 comprising an open "inner" channel with a bend of, for example, approximately 90 degrees.

Finally fig. 1c shows a layer of curved structures 5 comprising "outer" open channels and bends 2.

Fig. 2a and 2b each show a needle-like curved member. Fig. 2a shows a curved needle member 7 with an inner open channel and a needle tip 6. Fig. 2b shows a curved needle member 9 with an outer open channel and a needle tip 10. The curved fluid member configured as a needle may be used for sampling from a well plate or for sampling bodily fluids directly or for treating fluids into a human or animal body by piercing.

The curved or arced fluid member may also be configured as a tip, as shown in fig. 3a and 3 b. Fig. 3a also shows a curved tip 11 with an inner open channel and a flat cutting tip 12, while fig. 3b shows a curved tip 13 with an outer open channel comprising a flat cutting tip. Also, the spike may be used to sample from a well plate. The tip need only be immersed in the fluid and the capillary tube automatically filled. Of course other forms or designs of tip or needle-like members are possible, such as members comprising semi-circular ends, members comprising ends of a wave-like structure, the end regions of which may comprise capillaries or a plurality of capillaries, which may be closed or open as described above.

Experiments have shown that a "wrap angle" flow works well, in particular with open fluid channels. Regardless of whether the open channel (capillary) is at the inside or outside surface of the bend radius.

In fig. 4a, which shows schematically and in perspective view a well disc 21 as a liquid source, the open grooves 23 are arranged in a closed circle in relation to the circular disc. The open recess 23 is supplied by a so-called well reservoir. Sampling or processing of a sample may be performed by employing a fluidic member such as that shown in fig. 1-3 in the following manner: a flat plate, such as the well plate 21 shown in fig. 4 with open grooves 23, serves as the liquid source for the fluid device. Sampling can be performed by immersing the fluidic members 9 (only one member is shown) into the grooves (in contact with the fluid). The capillary action (capillary force) of the flexure means must then be greater than that of the grooves arranged on the disc. This can be achieved, for example, by using smaller capillary sizes or larger capillary aspect ratios.

To ensure that the disk or CD groove is always filled with fluid, an etched well reservoir 25 is preferably arranged. These wells may be filled using conventional methods, for example by using a pipette. The disc may remain stationary or may rotate so that sampling may be performed at any location around the circular groove.

In fig. 4b, a similar plate-shaped well plate 21 'is shown, which, in contrast to fig. 4a, has a straight groove 23' connected to a marginal well reservoir 25. The collection of the fluid sample can also be performed by using fluidic members 9 (only one member is shown) immersed in the grooves 23'. Like the well plate 21 shown in fig. 4a, the plate-shaped plate 21 'of fig. 4b can be moved in the longitudinal direction so that sampling can be performed along the entire length of the groove 23'.

Fig. 4c shows a cross-sectional view along the line I-I of fig. 4a and 4 b. It is indicated that the dimensions of the well 25 are slightly larger than the dimensions of the corresponding groove 23 or 23', respectively. It is thus easy to fill these wells 25 and, on the other hand, by using the wells it is possible to ensure that the groove 23 or 23', respectively, is filled with the respective fluid medium for sample correction.

The advantages of the invention or the device according to the invention, respectively, are shown very clearly in fig. 4, since the curved fluidic component can be guided over the disk parallel to the disk surface, so that sampling can be performed even in cases where the local dimensional proportion is limited. In other words, if a conventional pipette is used, the space above the well plate 21 must be correspondingly open or empty, whereas with the fluid member of the invention a relatively small space above the surface is sufficient.

In the following fig. 5-7, possible examples of sample processing will be explained in more detail. The processing of the sample is performed in fig. 5a and 5b by simply dipping a curved fluid member into a wool or non-woven fabric member 31. In fig. 5a the sample is shown being processed into the wool 31 from the tip member 13, whereas in fig. 5b the sample is processed into the wool 31 from the needle-like submerged end 9.

The processing of the sample may also be performed by the pointed end of a curved fluidic member contacting on a flat surface, as shown in fig. 6a and 6 b. Fig. 6a shows the principle of using a pen with a member 7 having an internal open capillary. The fluid member 7 is preferably stretched to form a strip 33 containing the treatment liquid. Fig. 6b in contrast shows the principle of a pen using a member with an open outer capillary. The fluidic member 9 is preferably urged to form a strip 35 containing the treatment liquid. Of course the fluid member 7 may also be pushed while the fluid member 9 may be stretched to form a corresponding strip. Finally it should be pointed out that it is also possible to form the capillary on both sides in an open manner at least in the region of the pen-like tip, which means that the capillary communicates with the similar ends of a pen for, for example, a manual writing instrument.

Fig. 7 shows schematically and in perspective view a so-called multiplex array with NxM mixing zones.

To form an NxM array, a plurality of so-called pen needles are schematically shown in fig. 7. A needle member 7 having an open channel "inside" and a needle 9 having an open channel outside or a needle tip or capillary having a channel open at both ends may be used. The liquid strips 33 and 35 can be stretched by handling liquid from the needle tip 6 or 10, respectively, the liquid lines intersecting, thereby creating a mixing zone 37. The configuration shown is as described above a so-called multiplex array with NxM mixing zones.

Reference is made to fig. 8 and 9, which illustrate how the transfer of a sample from one fluidic device to another is achieved. For this purpose, fig. 8a shows the transfer of the sample from the tip device 11 with the tip 12 to another tip device with the tip 12. The tip 12 of one device 11 slides over the tip of the opposite device. It is important that the two capillaries overlap upon contact. One device acts as a liquid source and the other empty device acts as a liquid receiver. One state is that the two devices that are active include overlapping open capillaries.

In a similar manner the transfer of the sample from one needle 7 with a tip 6 to a tip member 11 with a tip 12 is shown in fig. 8 b. This transfer is accomplished by moving one device horizontally until the two capillary channels come into contact to transfer liquid. For delivery, the capillary action (capillary force) of one tip member must be greater than the capillary action within the capillary of the needle. This may be accomplished by using smaller capillary sizes in the tip member or by a larger capillary aspect ratio.

Another possible liquid transfer is shown in fig. 9. For this purpose, the passage 18 is formed in a device 11 formed in a pointed shape to solve the positioning problem. The needle-like means 7 is guided in a horizontal manner until the needle tip 6 engages in the positioning channel 18 and liquid transfer is possible. Furthermore, a constriction 20 may be arranged on the upper needle device 7 so that the x/y positioning may be made easier. The positioning aid or the positioning member, respectively, can already be incorporated in a simple manner, for example, in an etching mask. A single curved member may have additional features such as groups or constrictions which enable the member to engage within another member or to compensate for positioning errors between two members. The safety of the fluid transfer can be improved by using such a positioning aid. The formation of the above-described self-positioning or self-adjusting structures is quasi free and can for example already be incorporated in the etch mask. No additional processing steps are required in order to form the automatic positioning aid. These components include those characteristics inherent after the automatic adjustment and therefore no external auxiliary means are required.

Only a single fluidic component is primarily shown in fig. 1-9, and the structure of the present invention, including a plurality of individual fluidic components, is described in more detail in the following figures. For this purpose fig. 10 shows a CD-shaped steel disc 41, in which a structure is formed, for example by etching or stamping, which is arranged to form a corresponding fluid structure by bending a plurality of individual components. The structure is suitable for sampling multiple samples simultaneously or processing multiple samples simultaneously. The problem of forming a cassette can be solved in the same manner.

The structure formed by steel CD41 in fig. 10 is represented schematically and in perspective view in fig. 11. The hyperplane curvature is shown from above and from the side. Strip-like length portions 43 and 45 are formed in the CD disc 41 by etching and a needle-like tip portion 47 is formed in the center of the disc. By bending along the polygonal curved edge 42, the interior of the strip 45 is bent downwards, while the needle tips at the center of the CD disc 41 are simultaneously separated to form a fluid needle member 47 extending from the end of the strip 45, said member being provided for sampling or processing of a sample.

In addition and as shown with reference to a particular strip, a capillary 46 is also preferably formed by etching at the centre line of the strip portions 43 and 45, and in addition a so-called pot or well 48 is formed in the region of the outer strip 43.

Various samples can be removed simultaneously by the structure shown in fig. 11 or sampling can be performed by dipping the needle tip 47 into the corresponding sample groove. A sample is taken from the tip of the needle 47 and transferred through the capillary 46 into a cavity or well or canister 48, respectively. These enlarged containers or canisters are disposed on the disk-shaped portion 43 of the structure and may be used for liquid sample detection or analysis, for example by infrared, NMR, or the like.

In a similar manner, fig. 12 shows a further similar structure in a slightly upper perspective view, in which the strip-shaped part 51 is arranged vertically, which means on the outer contour of the structure 50. The sample can also be removed by using a needle-like tip 53 which is transferred via a capillary 55 into a container or canister or cavity 57 or 59, respectively. The detection or analysis, respectively, of the sampled sample can be carried out in the peripheral part, meaning within the container 57 and in the upper horizontal area of the container or tank or well 59.

In the example according to fig. 11 a so-called "inner" cylinder cassette is shown and in fig. 12 a so-called "outer" cylinder cassette is shown. The disc-shaped structure may be bent in such a way as to form a cylinder. The structures shown in fig. 11 and 12 are commonly referred to as cylindrical cassettes, meaning that both of the structures shown can solve the problem of forming cassettes that also occurs in sampling or processing of multiple samples. Forming the cartridge is thus an integration of several components of a unitary construction. Other shapes (other than cylindrical) may also be used to form the cassette, such as a crown shape or also a CD shape as shown in fig. 13.

The box-like structures furthermore have the advantage that they can be stored or transported, for example, on top of one another.

Another embodiment of a possible structure of the present invention is shown in fig. 13a-13d, which includes a plurality of fluidic components disposed on or near the structure. Fig. 13a likewise shows in top view an at least almost circular metal disk or CD-shaped disk 61 on which a circumferentially extending individual fluidic component 63 is arranged. The individual fluidic components may be formed by etching into the metal CD. As shown with reference to fig. 13b, the individual fluid member 63 is an elastic leaf spring-like member having a restoring force. Only a single fluidic member 63 is shown in fig. 13b for a clearer overall view. The leaf spring-like member may be formed by mechanical elasticity of a metal material. A specific actuation principle can thus be formed, such as the leaf spring shown or a solid hinge.

Fig. 13c shows a possible specific embodiment, the leaf spring 63 in combination with a curved needle-like tip 65. The combination of the curved needle-like tips can improve sampling of the sample.

In fig. 13d is schematically shown how a test strip contacting process can be obtained by using the structure of fig. 13 a. Also in fig. 13d only one prestressed fluid member 63 with a needle-like tip 65 is shown for the sake of clarity of observation. The components in turn only show the outer contour. The individual leaf spring-like members 63 are slightly pre-bent in the upward direction. By actuation, for example with an annular actuating member 67, a separate leaf spring-like member may be pushed down to contact, for example, a test strip or a so-called well plate such as shown in fig. 4. Sample sampling or sample handling can now be performed and after the fluid transfer has been achieved the actuation is deactivated and the leaf spring like member 63 will return to its pre-stressed position such that the test strip is unlocked.

In order for the fluid members or individual leaf spring-like members to remain in their pre-stressed position to form the structure or individual fluid members, it is necessary to use a material that has some elasticity or resilience when deformed. Thus, in particular, for example, metallic materials are suitable for forming the proposed structure.

Furthermore, it is also possible to coat the metal substrate with a piezoelectric substrate or bismuth metal, respectively, in order to actuate the fluidic component or the leaf-spring-like component, so that actuation of the individual fluidic component or leaf-spring-like component can be achieved by movement of the piezoelectric component.

As mentioned above, the formation of the leaf spring-like member may be achieved by etching as will be described in more detail with reference to fig. 14a and 14 b. The metal CD or metal disk 81 is first etched as such so that the region or portion 63 is partially separated from the metal disk portion.

By applying a force F, the member front end bends in the opposite direction to the force F, with a certain transmission ratio, as shown in fig. 14 b.

In other words, the pre-stressing described with reference to fig. 13a-13d occurs.

In addition, the resulting pre-bent member with a certain transmission ratio may also be coated with a piezoelectric substrate or bismuth metal, so that actuation may be achieved by the piezoelectric member or bismuth metal for sample sampling or sample processing.

The formation of the fluidic component of the present invention is described in more detail with reference to fig. 15 and 16. Fig. 15a shows a conventionally formed planar structure 81 with flow rates in the nl and μ l range, meaning that nl or μ l structures are formed on the substrate 81 by etching. If desired, a hole or cavity 85 is provided at the respective end of each member 83 of the structure, including the channel or capillary 84, which is large enough to apply the bending tool.

Fig. 15b shows a curved hyperplane nl or μ l structure 87 in which individual members 83 are bent to form curved member portions 88, which may have a range of approximately 90 degrees of bending or deflection. Of course, the angle may be different and may range from only a few degrees to almost 180 degrees.

The formation of the individual structural members 83, including the at least one fluid passage 84 described with particular reference to fig. 1-3, will be described in greater detail with reference to fig. 16a-16 f. Fig. 16a shows in cross-section a metal base corresponding to the base plate 81 of fig. 15. The substrate materials must be suitable for the application according to the invention, they must have the inherent properties of plastic deformation, meaning that thus for example metals or elastic polymers are suitable. The use of fairly brittle, brittle or amorphous materials such as silicon, glass, etc. is only limited and thus deformation in three dimensions is practically impossible. In fig. 16b, the metal substrate shown in fig. 16a is typically coated with a polymer layer 91 on both sides using an etching process, for example.

The polymer layer is then partially exposed and partially removed by washing the exposed portions so that channel-like longitudinally extending void areas 93 will be created, as schematically shown in fig. 16 c. By etching the metal of the empty region 93, a channel-like capillary 95 will be created, as schematically shown in fig. 16 d. It is of course not necessary to perform etching on both sides, so only one surface of the metal sheet is treated to form the capillary channel 95 that is open on only one side.

According to another embodiment, the fully open channels 97 may even be formed by etching metal, as schematically shown in fig. 16 e.

Finally, the polymer 91 will be removed so that a channel or capillary for the fluidic component proposed by the present invention is formed, as schematically shown in the cross-sectional view of fig. 16 f.

The channels of the fluidic components, such as shown in fig. 1b and 1c, can now be left open. But on the other hand closed channels can also be formed by covering or bonding open channels with a cover film, e.g. a metal film.

At the same time, the driving force described with reference to fig. 14 can be formed in the step of forming the channel-shaped capillary by etching as a bonding guide of the orientation member. Furthermore, from a simple planar nl or μ l structure, some parts can be bent from a two-dimensional plane to a three-dimensional plane (hyperplane) by, for example, bending into an arch, shaping, etc., which will result in a structure within the nl or μ l of the invention. As described with reference to fig. 15 and 16, planar nl or μ l structures are formed using conventional, microscopic technical fabrication methods such as photolithography or etching. To obtain a single hyperplane curved member 88 as shown in fig. 15b, a variety of techniques may be applied. The most common or obvious technique is simply pressing at least a portion of the member 83 out of the plane of the structure 81, for example by using a bending or stamping tool. The tool tension member may also be wrapped along the punch tool or edge. Another possibility is to apply a roller-like tool. It is also possible to apply heat to one surface of the structure or at least of the component to create tension so that the bending process can take place without the use of special bending tools. Furthermore, if symmetrical beads are applied, for example during the formation of the channels or capillary grooves as described above with reference to 16a-16f, a certain tension can also be obtained, so that the bending of the hyperplane section can be formed without the need for special bending tools.

The curved member may fulfill various different functions such as contact, pin punching, reflection, etc. The pretreatment for the out-of-plane components of the substrate is at least partially etched through the entire substrate sheet as described, inter alia, with reference to fig. 13a, 13b, 14b, 15a and 15 b. The individual flexure members may be formed "by integral etching".

The possibility of plastic deformation of the microstructure makes it possible to include inherent elements within the microfluidic system, such as out-of-plane distance forming members, positioning holes, adjustment aids, positioning aids, stops, etc., as schematically shown in fig. 17 a. This makes it possible to increase the positioning of e.g. a microfluidic component with respect to an external system. No further processing steps are required for forming the above-mentioned adjustment or distance-forming member. If necessary, an additional bending step must be applied to bend those positioning members or adjustment members to the distance forming members as described, as shown in the hyperplane of fig. 17 a. But generally those members that are distance forming members may be incorporated in, for example, an etching mask. The fluidic component comprising those positioning components or distance-forming components which are inherent therefore no longer require any further external auxiliary means. Those auxiliary devices additionally comprise a fluid channel or capillary. In any case the fluid flows "around the bend angle". Thus, plate optimization (meaning reduction of fluid area) can be formed.

Furthermore, in fig. 17b a stacking of a plurality of the microfluidic devices of fig. 9, 17a is shown. In other words, a plurality of microstructures including a distance forming member, a stopper, a positioning hole, and the like can be stacked by appropriate positioning of those bending assistance parts. This makes it easier to form a microstructured (with or without fluid) cartridge.

The invention as described above relates to nl and μ l structures for transporting and/or transferring very small amounts of liquids in the nl and μ l range. As an example of sampling blood, a needle-like tip having a length of, for example, 3mm may be employed, the width of the needle shaft may be about 400 μm, the capillary may have a width of approximately 200 μm and the depth of the capillary may be, for example, about 80 μm. The amount of blood to be sampled may be in the range of 2. mu.l to 100. mu.l. These values are, of course, examples given for a clearer understanding of the invention, and the invention is therefore not at all limited to said values. It should be shown how precise or small, respectively, the microstructure according to the invention is and in the present invention an extremely small liquid amount is considered.

The invention is particularly advantageous in that curved nano-or microstructures can be used for "wrap angle" sampling or sample processing. By using the device or the member or the structure, respectively, according to the invention, sampling or sample processing can be performed under conditions of very limited space or dimensions, e.g. the fluidic device can be guided or moved, respectively, parallel to the substrate or object from which the sample has to be sampled, which substantially simplifies the sampling of the sample.

The fluid components and structures shown with reference to fig. 1-17 and the described manufacturing methods are of course only examples and the invention is not at all limited to the figures, the components shown and the processes described. The figures are only intended to be more clearly understood and further materials used for forming the fluidic components or structures, respectively, for example, are of course not limited to metals or elastomeric polymers. It is also possible to use at least partly elastic ceramic materials to form the components or structures, respectively, according to the invention. Furthermore, it is not important to use open or closed capillaries, to arrange needle-like tips at the end of the fluidic device, edgeless ends, straight cutting tips, rounded or corrugated or serrated ends.

Claims (5)

1. A method for forming a 3D fluidic device or structure, respectively, comprising the steps of:

a step of forming at least one individual longitudinally extending member or strip-like portion within the substrate by etching or stamping;

a step of forming at least one channel or capillary-like open or closed groove along the at least one member or the at least one strip-like portion, respectively, simultaneously or in another step by lithography or etching;

and a step of bending at least a part of said member or portion beyond the plane of the substrate by plastic, elastic or mechanical forming, at least in one position, by simple pressing or stretching along the bending tool edge by applying a bending tool to form a so-called hyperplane device or structure.

2. A method for forming a 3D fluidic device or structure, respectively, comprising the steps of:

forming at least one individual longitudinally extending member or strip-like portion in the substrate by etching or stamping, the substrate material being tensioned by applying heat to one surface,

a step of forming at least one channel or capillary-like open or closed groove along the at least one member or the at least one strip-like portion, respectively, simultaneously or in another step by lithography or etching;

and a step of bending at least a part of the member or portion beyond the plane of the substrate by applying heat on one surface without using a special bending tool to form a so-called hyperplane device or structure.

3. A method according to claim 1 or 2, wherein a plurality of longitudinally extending members or strip-like portions are formed, the members or strip-like portions being connected at one end to the base and disconnected at an opposite end from the base, and longitudinally extending grooves or channels are formed in at least a major part of the members or strip-like portions, the grooves or channels extending to the end where the members or portions are disconnected from the base and at least a major part of the members being bent beyond the plane of the base at least one location of the members or portions, such that those members or portions are bent or curved at least at a location beyond the plane of the base to form so-called hyperplane devices and/or structures.

4. A method according to any one of claims 1 to 3, wherein the bending-out of the member or part is performed by a roller-like member or by stretching the member or part along the edge of a bending tool.

5. A method according to any of claims 2 to 4, wherein the tension is obtained by applying symmetrical beads during the formation of the channel or capillary groove, whereby the component or section is bent out of the plane of the substrate by means of the tension.