HK1193386B - Oscillation device, goods conveyance device, and goods classification device - Google Patents

Description

Vibration device, article transport device, and article sorting device

Technical Field

The present invention relates to an article transport device for transporting an article on a movable table by vibration of the movable table, an article sorting device for sorting a plurality of articles on the movable table, and a vibration device applicable to the article transport device and the article sorting device.

Background

Conventionally, various types of article transport devices have been known as an article transport device capable of transporting an article and arbitrarily changing a transport direction on a transport line of the article.

For example, as in patent document 1, there is an article transport device of a type in which a plurality of electrostatic actuators are arranged in a grid pattern on a transport surface of an article. The article transport apparatus is provided with a plurality of square stators on a transport surface, a transport member is suspended by a spring member in the stators, and the motion of the transport member is controlled by operating suction electrodes provided on a bottom surface and a side surface in the stators, thereby moving an article on the transport member.

Further, patent document 2 discloses a technique of: a plurality of small rollers having rotation axes parallel to the conveyance surface are arranged on the conveyance surface of an article, and the rotation and orientation of the rollers are controlled to control the conveyance direction of the article placed on the rollers.

Patent document 3 discloses that: rollers having mutually orthogonal rotation axes are alternately arranged on the conveying surface, and the rotation of the rollers is controlled to control the conveying direction of the article.

The article transport apparatuses of the prior art of patent documents 1 to 3 are configured by a plurality of devices such as electrostatic actuators and small rollers, and since these devices need to be driven simultaneously, the structure becomes complicated and the control method becomes complicated. Therefore, the manufacturing cost and the maintenance cost are increased, and the trouble of the equipment is easily generated. In such a configuration, since the unevenness is generated on the conveying surface with which the article comes into contact, the smaller the article is, the more difficult it is to convey the article. Therefore, it is difficult to convey a wide article from a small article to a large article by using one article conveyance device.

As a device that does not cause such a problem, a device that conveys an article by applying vibration to a movable table having a conveying surface on which the article is placed has also been proposed.

For example, patent document 4 discloses a technique of: the elliptical vibration is generated in a movable body (movable table) having a track for conveying an article by applying vibration having the same frequency in the vertical and horizontal directions to the movable body, and the phase difference of the vibration in each direction is set according to the friction coefficient to make the conveying direction different. In this article transport device, since the transport surface on the movable table can be configured to be a flat surface, articles of various shapes and sizes can be transported. In addition, in the article transport apparatus, since both the vibration device as the mechanism unit and the control system for controlling the vibration of the vibration device can be configured simply, there are many advantages in terms of downsizing and manufacturing cost.

Further, since the article transport apparatus can control the transport direction in accordance with the friction coefficient of the article, it can also be used as an article sorting apparatus for sorting a plurality of kinds of articles having different friction coefficients by only making the control system different. Even in this case, since the article transport apparatus can have a simple configuration as in the case of the article transport apparatus, there are many advantages in terms of downsizing and manufacturing cost.

In the present invention, the article transport device and the article sorting device are collectively referred to as an article moving device, and include devices having either or both of a function of transporting articles and a function of sorting articles. In addition, a mechanical device portion that can be commonly used for these devices is referred to as a vibration device.

Documents of the prior art

Patent document

Patent document 1: japanese laid-open patent publication No. 8-116683

Patent document 2: japanese patent laid-open publication No. 2004-75387

Patent document 3: japanese laid-open patent publication No. 2008-168956

Patent document 4: japanese patent laid-open publication No. 2005-255351

Disclosure of Invention

Problems to be solved by the invention

However, in the above-described vibrating device, the moving table having the conveying surface generates elliptical vibration by making the phase difference between the vibrations in the two directions different, and the articles are conveyed or sorted by utilizing this, and the direction of the generated elliptical vibration is limited, so that the degree of freedom in the direction in which the articles move is low.

Therefore, it is considered that the vibration device described in patent document 4 is further developed so that the movable table having the conveying surface can be independently three-dimensionally vibrated not only in two directions but also in three different directions, thereby increasing the degree of freedom in the moving direction of the article.

However, in order to allow the movable table to independently vibrate in three directions, a member for elastically supporting the movable table and a member for applying vibration are required in each of the three directions, and thus the structure becomes complicated. Further, since the above-described components need to be incorporated below the movable table, the height from the conveying surface tends to increase, and the position of the center of gravity tends to increase, so that pitching and rolling of the movable table are likely to occur, and control for moving the article is difficult.

In the case of using the vibration device of patent document 4, in order to avoid propagation of the vibration to the installation surface, a vibration isolation spring is generally provided on the lower surface of the base to elastically support the entire vibration device on the installation surface. In this way, transmission of vibration to peripheral devices can be suppressed, generation of noise can be suppressed, and the peripheral environment can be appropriately maintained.

However, in such a configuration, after the exciting force acts on the movable table, a rotational moment is generated between the base and the movable table, and the posture of the base supported by the vibration isolation spring is unstable. Therefore, it is also considered that the vibration of the movable table elastically supported by the fixed table becomes unstable, and the desired vibration of the movable table cannot be generated any more.

In order to solve the above problems, an object of the present invention is to provide a vibration device which has a simple structure, can elastically support a movable table efficiently, can reduce the height from a conveying surface, and can suppress pitching and rolling, and an article transport device and an article sorting device which are excellent in controllability using the vibration device.

Further, the object of the invention of claim 2 is to provide a vibration device which has a simple structure and can generate more stable vibration of a movable table by stabilizing the posture of a base when a vibration force acts on the movable table, an article transport device which is an article moving device using the vibration device and has excellent controllability, and an article sorting device.

Means for solving the problems

The present invention adopts the following means to achieve the object.

That is, the vibration device of the 1 st invention is characterized by comprising a base, a movable table elastically supported on the base, a 1 st horizontal vibration generating member for vibrating the movable table in a 1 st horizontal direction, a 2 nd horizontal vibration generating member for vibrating the movable table in a 2 nd horizontal direction intersecting with the 1 st horizontal direction, and a vertical vibration generating member for vibrating the movable table in a vertical direction, wherein a 1 st intermediate table and a 2 nd intermediate table are provided between the base and the movable table, and the vibration device comprises a 1 st horizontal elastic supporting member, a 2 nd horizontal elastic supporting member, and a vertical elastic supporting member for supporting the base, the 1 st intermediate table, the 2 nd intermediate table, and the movable table in the 1 st horizontal direction, in this order, The second elastic support member is constituted by a first plate-like spring member having a thickness direction substantially coincident with the first horizontal direction and a longitudinal direction arranged in a horizontal direction, the first horizontal elastic support member is constituted by a first plate-like spring member having a thickness direction substantially coincident with the first horizontal direction and a longitudinal direction arranged in a horizontal direction, the second horizontal elastic support member is constituted by a second plate-like spring member having a thickness direction substantially coincident with the second horizontal direction and a longitudinal direction arranged in a horizontal direction, and the vertical elastic support member is constituted by a third plate-like spring member having a thickness direction substantially coincident with the vertical direction and a longitudinal direction arranged in a horizontal direction.

With this configuration, the movable table can be elastically supported in the three directions by the plate-shaped spring members provided in the three directions, respectively, and the plate-shaped spring members each have a large rigidity in a direction other than the plate thickness direction of the elastic support, so that the vibrations can be independently controlled without affecting each other. Further, since the plate-like spring members are arranged in a direction in which the longitudinal direction is horizontal, the height from the base to the movable table can be suppressed, and the rolling and pitching of the movable table can be suppressed.

In order to restrict the parallel movement in the three directions and prevent the plate-like spring members from being deformed in a torsional manner, it is preferable that the vibration device includes a base, a movable table elastically supported by the base, a 1 st horizontal vibration member for vibrating the movable table in a 1 st horizontal direction, a 2 nd horizontal vibration member for vibrating the movable table in a 2 nd horizontal direction intersecting the 1 st horizontal direction, and a vertical vibration member for vibrating the movable table in a vertical direction, wherein a 1 st intermediate stage and a 2 nd intermediate stage are provided between the base and the movable table, and the vibration device includes a 1 st horizontal elastic support member, a 2 nd horizontal elastic support member, and a vertical elastic support member for connecting the base to the vertical elastic support member, and the 1 st horizontal elastic support member, the 2 nd horizontal elastic support member, and the vertical elastic support member are provided for supporting the base, The 1 st intermediate stage, the 2 nd intermediate stage and the movable stage are elastically connected in the 1 st horizontal direction, the 2 nd horizontal direction and the vertical direction in this order, the 1 st horizontal elastic support member is composed of a 1 st plate-like spring member having a thickness direction substantially aligned with the 1 st horizontal direction and a longitudinal direction arranged in a horizontal direction, the 2 nd horizontal elastic support member is composed of a 2 nd plate-like spring member having a thickness direction substantially aligned with the 2 nd horizontal direction and a longitudinal direction arranged in a horizontal direction, the vertical elastic support member is composed of a 3 rd plate-shaped spring member having a thickness direction substantially aligned with the vertical direction and a longitudinal direction arranged in a horizontal direction, at least one of the 1 st, 2 nd and 3 rd plate spring members is formed by arranging a plurality of the plate spring members in parallel at a predetermined distance.

In order to further simplify the structure and achieve the compactness, it is effective to integrate the elastic support member and the vibration generating member, and therefore it is preferable that the vibration device includes a base, a movable table elastically supported on the base, a 1 st horizontal vibration generating member for vibrating the movable table in a 1 st horizontal direction, a 2 nd horizontal vibration generating member for vibrating the movable table in a 2 nd horizontal direction intersecting with the 1 st horizontal direction, and a vertical vibration generating member for vibrating the movable table in a vertical direction, wherein a 1 st intermediate stage and a 2 nd intermediate stage are included between the base and the movable table, and the vibration device includes a 1 st horizontal elastic support member, a 2 nd horizontal elastic support member, and a vertical elastic support member for connecting the base to the vertical elastic support member, and the 1 st horizontal elastic support member, the 2 nd horizontal elastic support member, and the vertical elastic support member are provided for connecting the base to the vertical elastic support member, The 1 st intermediate stage, the 2 nd intermediate stage, and the movable stage are elastically connected in the 1 st horizontal direction, the 2 nd horizontal direction, and the vertical direction in this order, the 1 st horizontal elastic support member is formed of a 1 st plate-like spring member having a thickness direction substantially equal to the 1 st horizontal direction and a length direction arranged in a horizontal direction, the 2 nd horizontal elastic support member is formed of a 2 nd plate-like spring member having a thickness direction substantially equal to the 2 nd horizontal direction and a length direction arranged in a horizontal direction, the vertical elastic support member is formed of a 3 rd plate-like spring member having a thickness direction substantially equal to the vertical direction and a length direction arranged in a horizontal direction, and the 1 st horizontal vibration-generating member, the 2 nd horizontal vibration-generating member, and the vertical vibration-generating member are attached to the 1 st plate-like spring member, The piezoelectric elements on at least one surface of the 2 nd and 3 rd plate spring members are configured to vibrate the 1 st, 2 nd, and 3 rd plate spring members by applying a sinusoidal voltage to the piezoelectric elements to generate periodic extension.

Further, in order to further simplify the structure and achieve compactness by integrating the elastic support member and the vibration generating member without deforming each plate-like spring member in a torsional manner while restricting the parallel movement of the movable table in three directions, it is preferable that the vibration device includes a base, a movable table elastically supported on the base, a 1 st horizontal vibration generating member for vibrating the movable table in a 1 st horizontal direction, a 2 nd horizontal vibration generating member for vibrating the movable table in a 2 nd horizontal direction intersecting the 1 st horizontal direction, and a vertical vibration generating member for vibrating the movable table in a vertical direction, wherein a 1 st intermediate stage and a 2 nd intermediate stage are provided between the base and the movable table, and the vibration device includes a 1 st horizontal elastic support member, a 2 nd horizontal elastic support member, and a vertical elastic support member, a 1 st horizontal elastic support member, a 2 nd horizontal elastic support member and a vertical elastic support member for elastically connecting the base, the 1 st intermediate stage, the 2 nd intermediate stage and the movable stage in the 1 st horizontal direction, the 2 nd horizontal direction and the vertical direction in this order, the 1 st horizontal elastic support member being composed of a 1 st plate-like spring member whose thickness direction substantially coincides with the 1 st horizontal direction and whose length direction is arranged in a horizontal direction, the 2 nd horizontal elastic support member being composed of a 2 nd plate-like spring member whose thickness direction substantially coincides with the 2 nd horizontal direction and whose length direction is arranged in a horizontal direction, the vertical elastic support member being composed of a 3 rd plate-like spring member whose thickness direction substantially coincides with the vertical direction and whose length direction is arranged in a horizontal direction, the 1 st plate-like spring member, At least one of the 2 nd plate spring member and the 3 rd plate spring member is provided in parallel with a predetermined distance, and the 1 st horizontal vibration generator, the 2 nd horizontal vibration generator, and the vertical vibration generator are piezoelectric elements attached to at least one surface of the 1 st plate spring member, the 2 nd plate spring member, and the 3 rd plate spring member, and are configured to vibrate the 1 st plate spring member, the 2 nd plate spring member, and the 3 rd plate spring member by applying a sinusoidal voltage to the piezoelectric elements to generate a periodic elongation.

Further, in order to easily adjust the natural frequency in each direction so as to be spaced apart from or close to each other, it is preferable that the effective length of each plate-like spring member is changeable, and therefore, it is preferable that spring seats are provided between the 1 st plate-like spring member and at least one of the 1 st intermediate stage and the 2 nd intermediate stage, and between the 2 nd plate-like spring member and at least one of the 1 st plate-like spring member and the 2 nd intermediate stage, respectively, and the positions of the spring seats are configured to be changeable in the longitudinal direction of each of the 1 st plate-like spring member and the 2 nd plate-like spring member.

The vibration device according to claim 2 is characterized by comprising a base supported on a ground surface by a vibration isolation spring, a movable base elastically supported on the base, a 1 st horizontal vibration generating member for vibrating the movable base in a 1 st horizontal direction, a 2 nd horizontal vibration generating member for vibrating the movable base in a 2 nd horizontal direction intersecting the 1 st horizontal direction, and a vertical vibration generating member for vibrating the movable base in a vertical direction, wherein a 1 st intermediate stage and a 2 nd intermediate stage are provided between the base and the movable base, and the vibration device comprises a plurality of 1 st horizontal elastic support members, a plurality of 2 nd horizontal elastic support members, and a plurality of vertical elastic support members for supporting the base, a plurality of 2 nd horizontal elastic support members, and a plurality of vertical elastic support members, The 1 st intermediate stage, the 2 nd intermediate stage, and the movable stage are elastically connected in the 1 st horizontal direction, the 2 nd horizontal direction, and the vertical direction in this order, and when the entire apparatus is assumed to be the 1 st mass body, the 2 nd mass body, and the 3 rd mass body that are located at the 1 st horizontal elastic support member and the 2 nd horizontal elastic support member in a boundary, the center of gravity position of the 1 st mass body, the center of gravity position of the 2 nd mass body, and the center of gravity position of the 3 rd mass body are configured to be substantially the same in the vertical direction and the horizontal direction.

With this configuration, the movable table can be elastically supported in three directions, i.e., the horizontal two directions and the vertical direction, and can be vibrated in each direction, so that three-dimensional vibration can be generated in the movable table, and the rotational moment generated by the vibration in the horizontal direction can be suppressed to stabilize the posture of the base, thereby accurately generating vibration in the movable table. Further, propagation of vibration to the installation surface can be suppressed, and generation of noise and vibration can be prevented to improve the working environment.

In order to generate vibration more stably in the posture of a member attached via a horizontal elastic support member based on this configuration, it is preferable that the vibration device includes a base supported on a ground surface via a vibration isolation spring, a movable base elastically supported on the base, a 1 st horizontal vibration generating member for vibrating the movable base in a 1 st horizontal direction, a 2 nd horizontal vibration generating member for vibrating the movable base in a 2 nd horizontal direction intersecting with the 1 st horizontal direction, and a vertical vibration generating member for vibrating the movable base in a vertical direction, wherein a 1 st intermediate stage and a 2 nd intermediate stage are provided between the base and the movable base, and the vibration device includes a plurality of 1 st horizontal elastic support members, a plurality of 2 nd horizontal elastic support members, and a plurality of vertical elastic support members, and the plurality of 1 st horizontal elastic support members, A plurality of 2 nd horizontal elastic support members and a plurality of vertical elastic support members for elastically connecting the base, the 1 st intermediate stage, the 2 nd intermediate stage, and the movable stage in the 1 st horizontal direction, the 2 nd horizontal direction, and the vertical direction in this order, when the whole device is assumed to be the 1 st mass body, the 2 nd mass body and the 3 rd mass body which are in the boundary of the 1 st horizontal elastic supporting member and the 2 nd horizontal elastic supporting member, the center of gravity position of the 1 st mass body, the center of gravity position of the 2 nd mass body, and the center of gravity position of the 3 rd mass body are substantially the same in the vertical direction and the horizontal direction, the center of gravity positions of the 1 st, 2 nd and 3 rd mass bodies and the mounting positions of the 1 st and 2 nd horizontal elastic support members are configured to be substantially the same in the vertical direction.

In order to prevent the movable table supported by the vertical elastic support members from generating unexpected vibration such as swinging motion, it is preferable that the vibration device includes a base supported on the ground surface via vibration-proof springs, a movable table elastically supported on the base, a 1 st horizontal vibration-generating member for vibrating the movable table in a 1 st horizontal direction, a 2 nd horizontal vibration-generating member for vibrating the movable table in a 2 nd horizontal direction intersecting the 1 st horizontal direction, and a vertical vibration-generating member for vibrating the movable table in a vertical direction, wherein a 1 st intermediate stage and a 2 nd intermediate stage are provided between the base and the movable table, and the vibration device includes a plurality of 1 st horizontal elastic support members, a plurality of 2 nd horizontal elastic support members, and a plurality of vertical elastic support members, the plurality of 1 st horizontal elastic support members, the plurality of second horizontal elastic support members, the plurality of vertical elastic support members, and the first horizontal elastic support members, A plurality of 2 nd horizontal elastic support members and a plurality of vertical elastic support members for elastically connecting the base, the 1 st intermediate stage, the 2 nd intermediate stage, and the movable stage in the 1 st horizontal direction, the 2 nd horizontal direction, and the vertical direction in this order, and when the 1 st mass body, the 2 nd mass body, and the 3 rd mass body are assumed as the entire apparatus as the 1 st mass body, the 2 nd mass body, and the 3 rd mass body that are located at the boundaries of the 1 st horizontal elastic support member and the 2 nd horizontal elastic support member, the gravity center position of the 1 st mass body, the gravity center position of the 2 nd mass body, and the gravity center position of the 3 rd mass body are substantially the same in the vertical direction and the horizontal direction, and the plurality of vertical elastic support members are provided so as to be symmetrical with respect to the respective oscillation starting directions about the gravity center positions of the 1 st mass body, the 2 nd mass body, and the 3 rd mass body, and a counterweight is provided on the movable table at a position symmetrical with respect to the plurality of vertical elastic support members.

Further, in order to simultaneously stabilize the posture of the member mounted via the horizontal elastic support member and suppress the swing motion of the movable table supported by the vertical elastic support member, it is preferable that the vibration device includes a base supported on the ground surface via a vibration isolation spring, a movable table elastically supported on the base, a 1 st horizontal vibration generating member for vibrating the movable table in a 1 st horizontal direction, a 2 nd horizontal vibration generating member for vibrating the movable table in a 2 nd horizontal direction intersecting the 1 st horizontal direction, and a vertical vibration generating member for vibrating the movable table in a vertical direction, wherein a 1 st intermediate stage and a 2 nd intermediate stage are included between the base and the movable table, and the vibration device includes a plurality of 1 st horizontal elastic support members, a plurality of 2 nd horizontal elastic support members, and a plurality of vertical elastic support members, a plurality of 1 st horizontal elastic support members, a plurality of 2 nd horizontal elastic support members, and a plurality of vertical elastic support members for elastically connecting the base, the 1 st intermediate stage, the 2 nd intermediate stage, and the movable stage in the 1 st horizontal direction, the 2 nd horizontal direction, and the vertical direction in this order to a 1 st mass body, a 2 nd mass body, and a 3 rd mass body, which assume that the entire apparatus is a boundary between the 1 st horizontal elastic support member and the 2 nd horizontal elastic support member, wherein the barycentric position of the 1 st mass body, the barycentric position of the 2 nd mass body, and the barycentric position of the 3 rd mass body are substantially the same in the vertical direction and the horizontal direction, and the barycentric position of each mass body and the mounting position of each horizontal elastic support member are substantially the same in the vertical direction, and the plurality of vertical elastic support members are provided so that the 1 st mass body, the second mass body, and the third mass body are substantially the, The center of gravity positions of the 2 nd mass body and the 3 rd mass body are symmetrical with respect to the respective oscillation starting directions, and a counterweight is provided on the movable table at a position symmetrical with each other across the plurality of vertical elastic support members.

In addition, as another configuration of the invention 2, there can be mentioned an embodiment in which: the vibration device comprises a base supported on a ground surface via a vibration-proof spring, a movable table elastically supported on the base, a horizontal vibration-generating member for vibrating the movable table in a horizontal direction, and a vertical vibration-generating member for vibrating the movable table in a vertical direction, wherein an intermediate stage is provided between the base and the movable stage, and the vibration device includes a plurality of horizontal elastic support members and a plurality of vertical elastic support members, a plurality of horizontal elastic support members and a plurality of vertical elastic support members for elastically connecting the base, the intermediate stage, and the movable stage in the horizontal direction and the vertical direction in this order, when the entire apparatus is assumed to be two mass bodies with the horizontal elastic support member as a boundary, the two mass bodies are configured such that the positions of the centers of gravity thereof are substantially the same in the vertical direction and the horizontal direction.

Even with this configuration, by making the positions of the centers of gravity of the mass bodies connected via the horizontal elastic support member and relatively moving in the horizontal direction substantially the same in the vertical direction, it is possible to suppress the rotational moment incidentally generated by the excitation force in the horizontal direction, stabilize the posture of the base, and accurately generate vibration in the movable table. Further, propagation of vibration to the installation surface can be suppressed, and generation of noise and vibration can be prevented to improve the working environment.

In order to generate vibration more stably in the posture of a member attached via a horizontal elastic support member based on this configuration, it is preferable that the vibration device includes a base supported on a ground surface via a vibration isolation spring, a movable table elastically supported on the base, a horizontal vibration generating member for vibrating the movable table in a horizontal direction, and a vertical vibration generating member for vibrating the movable table in a vertical direction, wherein an intermediate table is provided between the base and the movable table, and the vibration device includes a plurality of horizontal elastic support members and a plurality of vertical elastic support members for elastically connecting the base, the intermediate table, and the movable table in a horizontal direction and a vertical direction in this order, and when the entire device is assumed to be two mass bodies having the horizontal elastic support members as a boundary, the center of gravity positions of the two mass bodies are substantially the same in the vertical direction and the horizontal direction, and the center of gravity positions of the respective mass bodies and the attachment positions of the respective horizontal elastic support members are substantially the same in the vertical direction.

In order to prevent the movable table supported by the vertical elastic support members from generating unexpected vibration such as swinging motion, it is preferable that the vibration device includes a base supported on a ground surface via a vibration-proof spring, a movable table elastically supported on the base, a horizontal vibration-generating member for vibrating the movable table in a horizontal direction, and a vertical vibration-generating member for vibrating the movable table in a vertical direction, wherein an intermediate table is provided between the base and the movable table, and the vibration device includes a plurality of horizontal elastic support members and a plurality of vertical elastic support members for elastically connecting the base, the intermediate table, and the movable table in the horizontal direction and the vertical direction in this order, and when the entire device is assumed to be two mass bodies with the horizontal elastic support members as boundaries, the two mass bodies have substantially the same center of gravity position in the vertical direction and the horizontal direction, the plurality of vertical elastic support members are provided symmetrically with respect to the respective oscillation starting directions with the center of gravity position of each of the mass bodies as the center, and weights are provided on the movable table at positions symmetrical with respect to each other across the plurality of vertical elastic support members.

Further, in order to simultaneously achieve stabilization of the posture of a member mounted via a horizontal elastic support member and suppression of the swing motion of a movable table supported by a vertical elastic support member, it is preferable that the vibration device includes a base supported on a ground surface via a vibration-proof spring, a movable table elastically supported on the base, a horizontal vibration-generating member for vibrating the movable table in the horizontal direction, and a vertical vibration-generating member for vibrating the movable table in the vertical direction, wherein an intermediate table is provided between the base and the movable table, and the vibration device includes a plurality of horizontal elastic support members and a plurality of vertical elastic support members for elastically connecting the base, the intermediate table, and the movable table in the horizontal direction and the vertical direction in this order, when the entire apparatus is assumed to be two mass bodies having the horizontal elastic support members as a boundary, the center of gravity positions of the two mass bodies are substantially the same in the vertical direction and the horizontal direction, the center of gravity positions of the respective mass bodies and the attachment positions of the respective horizontal elastic support members are substantially the same in the vertical direction, the plurality of vertical elastic support members are provided so as to be symmetrical with respect to the respective oscillation starting directions about the center of gravity positions of the respective mass bodies, and a counterweight is provided on the movable table at a position symmetrical with respect to the center of gravity positions of the respective mass bodies with the plurality of vertical elastic support members interposed therebetween.

In order to easily raise the center of gravity position of the base so as to overlap with other members provided on the base and to protect the driving device such as the vibration generating member even in the case of the configuration according to any of the above-described aspects of the invention 2, it is preferable that the vibration device includes a peripheral wall portion rising from the vicinity of the outer peripheral edge of the base, the peripheral wall portion being configured to surround the elastic support member and the vibration generating member and being configured as a center of gravity adjusting member for adjusting the center of gravity position of the base.

In order to configure an article transport apparatus having excellent controllability capable of transporting an article on a movable table in an arbitrary direction, it is preferable that the article transport apparatus be configured to transport the article placed on the movable table by vibration of the movable table, and the article transport apparatus include: any of the above vibrating devices; a vibration control means for controlling a plurality of oscillation starting means included in the vibration device so that the plurality of oscillation starting means generate periodic oscillation starting forces at the same frequency and have a phase difference therebetween, thereby generating a three-dimensional vibration locus on the movable stage; and a vibration switching member for switching the amplitude and phase difference of the periodic excitation force generated by each of the excitation members.

In order to configure an article sorting device having excellent controllability capable of sorting a plurality of articles on a movable table according to a friction coefficient, it is preferable that the article sorting device be configured to sort the plurality of articles placed on the movable table by vibration of the movable table, and the article sorting device include: any of the above vibrating devices; and a vibration control means for controlling each of the plurality of oscillation starting means included in the vibration device so that the plurality of oscillation starting means generate periodic oscillation forces at the same frequency and have a phase difference, thereby generating a three-dimensional vibration locus on the movable stage; and a phase difference setting unit configured to set a phase difference between a periodic exciting force generated by the horizontal exciting member and a periodic exciting force generated by the vertical exciting member based on a magnitude relation between a friction coefficient of each article and the reference friction coefficient, with a predetermined reference friction coefficient as a boundary, so that each article moves in different directions, thereby simultaneously distinguishing a plurality of articles placed on the movable table.

ADVANTAGEOUS EFFECTS OF INVENTION

The above-described invention according to claim 1 provides a vibration device which has a simple structure, can elastically support a movable table effectively in three directions, has a small height from a conveying surface, and can suppress pitching or rolling of the movable table, and an article conveyance device and an article sorting device using the vibration device and having excellent controllability. Further, according to the invention of claim 2, it is possible to provide a vibration device capable of more effectively suppressing a rotational moment generated when a vibration force acts on a movable table, and therefore, even in a form in which a base is supported by a vibration-proof spring, the posture of the base can be stabilized, vibration of the movable table supported by the base can be more stabilized to improve operation accuracy, and propagation of vibration to an installation surface can be suppressed to prevent noise, vibration, and the like, thereby improving a working environment, and an article transport device and an article sorting device excellent in controllability using the vibration device.

Drawings

Fig. 1 is a system configuration diagram of a vibration device and an article transport device using the vibration device according to embodiment 1 of the present invention.

Fig. 2 is a perspective view of the vibration device.

Fig. 3 is an exploded perspective view of the vibration device.

Fig. 4 is a perspective view showing a main part of the vibration device.

Fig. 5 is a plan view showing a main part of the vibration device.

Fig. 6 is a front view showing a main part of the vibration device.

Fig. 7 is a plan view showing the movable table of the vibration device moving in the 1 st horizontal direction.

Fig. 8 is a plan view showing the movable table of the vibration device moving in the 2 nd horizontal direction.

Fig. 9 is a front view showing a state where the movable table of the vibration device is moved in the vertical direction.

Fig. 10 is a schematic view showing the oscillation starting direction of the oscillation device.

Fig. 11 is a diagram showing a relationship between a phase difference between periodic exciting forces in each direction of the vibrating device and a conveying speed of an article.

Fig. 12 is a diagram showing the relationship among the phase difference between the periodic exciting forces in the respective directions of the vibration device, the article conveying speed, and the friction coefficient.

Fig. 13 is a graph showing a relationship between the amplitude of the periodic exciting force in the horizontal direction of the vibrating device and the conveying speed of the article.

Fig. 14 is a plan view illustrating a conveying trajectory in a case where an article is conveyed by the vibration device.

Fig. 15 is a system configuration diagram of a vibration device according to embodiment 2 of the present invention and an article sorting device using the vibration device.

Fig. 16 is a diagram showing a relationship between a phase difference between periodic exciting forces in each direction of the vibrating device and a moving speed of the article.

Fig. 17 is a plan view showing a moving area when a plurality of articles having different friction coefficients are moved by the vibrating device.

Fig. 18 is an explanatory view showing the movement regions of a plurality of articles having different friction coefficients, in which the phase difference in the direction X, Y is changed by using the vibration device.

Fig. 19 is an explanatory view showing the moving areas of a plurality of articles having different friction coefficients, in which the phase difference in the direction X, Y is changed by using the vibrating device.

Fig. 20 is a plan view showing the article moving direction under the conditions shown in fig. 18 (a) and 18 (b).

Fig. 21 is a perspective view showing a vibration device according to embodiment 3 of the present invention.

Fig. 22 is a system configuration diagram of a vibration device and an article transport device using the vibration device according to embodiment 4 of the present invention.

Fig. 23 is a perspective view of the vibration device.

Fig. 24 is a plan view of the vibration device.

Fig. 25 is a perspective view of the vibration device in a state in which a part thereof is removed.

Fig. 26 is a perspective view showing a main part of the vibration device.

Fig. 27 is a plan view showing a main part of the vibration device.

Fig. 28 is a sectional view taken along line a-a in fig. 24.

Fig. 29 is a sectional view of B-B in fig. 24.

Fig. 30 is a system configuration diagram of a vibration device and an article sorting device using the vibration device according to embodiment 5 of the present invention.

Fig. 31 is a perspective view of the vibration device according to embodiment 6 of the present invention.

Fig. 32 is a perspective view of the vibration device in a state in which a part thereof is removed.

Fig. 33 is a plan view of the vibration device.

Fig. 34 is a sectional view taken along line a-a in fig. 33.

Fig. 35 is a perspective view of the vibration device according to embodiment 7 of the present invention.

Fig. 36 is a perspective view of the vibration device in a state in which a part thereof is removed.

Fig. 37 is a plan view of the vibration device.

Fig. 38 is a sectional view taken along line a-a in fig. 37.

Detailed Description

Embodiments of the present invention will be described below with reference to the drawings.

Embodiment 1

Fig. 1 shows an article transport apparatus 1 as one of article transport apparatuses, which is configured by combining a vibration apparatus 2 according to embodiment 1 of the present invention and a control system section 3 for controlling the vibration apparatus 2.

The control system unit 3 is configured to control piezoelectric elements 81, 82, and 83 incorporated in the vibration device 2 as described below, thereby applying periodic excitation forces in each of the directions X, Y, and Z to the vibration device 2, the directions being the 1 st horizontal direction, the 2 nd horizontal direction, and the vertical direction, and thereby causing the vibration device 2 to vibrate.

The directions of X, Y, Z are defined as indicated by the coordinate axes shown in the drawings, and the description will be made below along the coordinate axes shown in the drawings as appropriate.

Fig. 2 is a diagram showing a state of the vibration device 2 actually used. In this state, the front, back, and side surfaces are covered with the cover 42 provided on the base 4. A rectangular conveyance table 63 constituting a part of the movable table 6 is provided on the upper surface, and the article 9 to be conveyed can be placed on the upper surface 63a of the conveyance table 63 as a conveyance surface.

Fig. 3 shows a state where the conveying table 63 is removed from the vibrating device 2. The vibration device 2 includes a movable base 61 as a rectangular parallelepiped block elastically supported in the 3 axial directions of X, Y, Z therein, and a movable plate 62 having a rectangular plate shape is connected to the movable base 61 by 4 countersunk bolts 62a to 62a (only two of which are shown in the drawing). The conveying table 63 is provided on the upper surface of the movable plate 62, and the movable plate 62 and the conveying table 63 are fastened by screw holes 62b to 62b and bolts 63b to 63b provided near the four corners.

The movable base 61, the movable plate 62, and the conveying table 63 are integrally supported as the movable table 6 in the vibrating device 2, and are vibrated by a vibration generating member described later.

Fig. 4 shows a state where the cover 42, the movable plate 62, and the conveyance table 63 are removed. Next, the structure of the vibration device 2 according to the present embodiment will be described in detail with reference to the drawing.

The vibration device 2 is configured such that the movable base 61 is elastically supported on the base 2 in 3 directions X, Y, Z, and the base 4, the 1 st intermediate stages 51, the 2 nd intermediate stage 52, and the movable base 61, which are rigid body portions, are connected in this order, and the 1 st plate-like spring members 71, which are the 1 st horizontal elastic support members, the 2 nd plate-like spring members 72, which are the 2 nd horizontal elastic support members, and the 3 rd plate-like spring members 73, which are the vertical elastic support members, are provided. Since the plate-like spring members 71 to 73 are arranged so that the plate thickness direction thereof is X, Y, Z directions, they are easily elastically deformed in the directions.

The vibration device 2 includes 1 st to 3 rd piezoelectric elements 81 to 83 as vibration-inducing members for vibrating the movable base 61 in 3 directions X, Y, Z.

These structures will be described in more detail below.

First, the base 4 is configured as a rectangular plate, and bolt holes for installation in an external device or a floor, not shown, are formed in the rectangular shape. It is preferable that an elastic body having a small spring constant, such as vibration-proof rubber not shown, be attached to the lower side of the base 4 to reduce the reaction force from the installation surface.

Further, the mounting blocks 41 are provided at four positions slightly closer to the center than the four corners so as to be arranged in a rectangular shape. Although not shown in the figure, each mounting block 41 is fixed to the base 4 by bolts as shown in fig. 5.

Returning to fig. 4, the mounting blocks 41 are each formed as a block having an L-shaped cross section, and one side of the L-shaped block that forms the L-shape is brought into contact with the base 4, and the other side is in an upright state. The standing sides form YZ planes orthogonal to the X direction. Further, the 1 st plate-like spring members 71, 71 are provided so as to be connected to the mounting blocks 41, 41 adjacent in pairs in the Y direction. Since the 1 st plate-like spring members 71, 71 are attached to the YZ plane of each of the attachment blocks 41 to 41, the plate thickness direction thereof is the X direction, and the longitudinal direction thereof is the Y direction.

In addition, in order to arrange the 1 st plate spring members 71, 71 on the two pairs of mounting blocks 41 to 41, respectively, two of the 1 st plate spring members 71, 71 are arranged in parallel with a predetermined distance apart in the X direction.

Further, both end portions of the 1 st plate-like spring members 71, 71 are sandwiched between the rectangular spring pressing pieces 71d to 71d and YZ planes of the mounting blocks 41 to 41, and are fixed by bolts not shown, so that the 1 st plate-like spring members 71, 71 are supported so that bending angles are restricted.

The 1 st intermediate stages 51, 51 are connected to the 1 st plate-like spring members 71, 71 through spring seats 71c to 71c in the vicinity of the longitudinal center thereof, respectively. The 1 st intermediate stage 51 is formed in a rectangular parallelepiped shape extending in the Y direction.

The 1 st plate-like spring members 71, 71 are provided with two spring seats 71c to 71c, respectively, and spring pressers 71e to 71e are provided so as to face the respective spring seats 71c to 71 c. The 1 st plate-like spring members 71, 71 are held between the spring seats 71c to 71c and the spring retainers 71e to 71e facing each other, and are connected to the 1 st intermediate stages 51, 51 by bolts (see fig. 5) while restricting the deflection angle. The 1 st intermediate stages 51, 51 are divided into two, but they are connected by the 2 nd plate-like spring members 72, 72 described later, and thus operate integrally.

The 1 st intermediate stages 51 and 51 are formed in a rectangular parallelepiped shape as described above, and are arranged so that six surfaces thereof are oriented perpendicular to the X, Y, Z-axis surfaces, respectively. Two 2 nd plate-like spring members 72, 72 are provided so as to connect XZ surfaces orthogonal to the Y axis, which are provided in the 1 st intermediate stages 51, 51.

By this mounting, the two 2 nd plate-like spring members 72, 72 are arranged in parallel with each other with their plate thickness directions orthogonal to the Y axis and their longitudinal directions oriented in the X direction and separated from each other by a predetermined distance in the Y direction.

Both end portions of the 2 nd plate-like spring members 72, 72 are sandwiched between the rectangular spring retainers 72d to 72d and the XZ plane included in the 1 st intermediate stages 51, and are fixed to the portions by bolts (see fig. 5), so that the 2 nd plate-like spring members 72, 72 are supported so as to be restricted in bending angle.

The 2 nd intermediate table 52 is connected to the 2 nd plate-like spring members 72, 72 via spring seats 72c to 72c in the vicinity of the longitudinal direction center thereof.

The 2 nd plate-like spring members 72 and 72 are provided with two spring seats 72c to 72c, respectively, and spring presser pieces 72e to 72e are provided so as to face the respective spring seats 72c to 72 c. The 2 nd plate-like spring members 72 and 72 are held between the spring seats 72c to 72c and the spring retainers 72e to 72e facing each other, and the bending angles are restricted, and these portions are connected to the 2 nd intermediate table 52 by bolts (see fig. 5).

As shown in the plan view of fig. 5, the 2 nd intermediate stage 52 is configured as a rectangular frame body, and is formed by combining four blocks of rectangular parallelepiped having six faces orthogonal to the X, Y, Z direction.

As shown in fig. 6, elongated holes are formed in the spring seats 72c to 72c and the spring retainers 72e to 72e, and the 2 nd plate-like spring members 72 and 72 are connected to the 2 nd intermediate table 52 by bolts inserted through the elongated holes as shown in fig. 5. The spring seats 72c to 72c and the spring retainers 72e to 72e can be moved in the X direction, that is, in the longitudinal direction of the 2 nd plate-like spring members 72 and 72 by an amount corresponding to the long holes, whereby the 2 nd plate-like spring members 72 and 72 can change the effective length functioning as springs.

Similarly, the spring seats 71c to 71c and the spring retainers 71e to 71e for connecting the 1 st plate-like spring members 71, 71 to the 1 st intermediate stages 51, 51 are formed with elongated holes, and the spring seats 71c to 71c and the spring retainers 71e to 71e can be moved in the Y direction by an amount corresponding to the elongated holes, whereby the effective lengths of the 1 st plate-like spring members 71, 71 can be changed.

As described above, the 1 st and 2 nd plate spring members 71, 72 and 72 can change the spring constant and also the natural frequency by changing the effective length, respectively.

Returning to fig. 4, two 3 rd plate-like spring members 73 to 73, in total, are provided on the upper surface and the lower surface of the 2 nd intermediate table 52, which is a rectangular frame. The 3 rd plate-like spring members 73 to 73 are provided so as to connect the XY planes formed on the upper and lower surfaces of the portions existing on the following two sides in the X direction: these two sides are two sides parallel to the Y direction among the sides of the rectangle forming the 2 nd intermediate stage 52. Both end portions of the 3 rd plate-like spring members 73 to 73 are held between the rectangular spring presser members 73c to 73c and the XY plane of the 2 nd intermediate stage 52, and are fixed to the portions by bolts (see fig. 5), so that the bending angles are restricted.

Further, in the vicinity of the central portions of the 3 rd plate-like spring members 73, 73 connected to the upper surface of the 2 nd intermediate table 52 and the 3 rd plate-like spring members 73, 73 (see fig. 5) connected to the lower surface of the 2 nd intermediate table 52, an inter-spring block 73e is provided in the gap to maintain the interval therebetween.

A spring presser 73e is provided below the inter-spring block 73e via 3 rd plate-like spring members 73, 73 connected to the lower surface of the 2 nd intermediate table 52. The spring holder 73e is in a state where the two 3 rd plate-like spring members 73, 73 are sandwiched between the spring holder 73e and the lower surface of the 2 nd intermediate table 52, and can be fixed by bolts not shown.

The movable base 61 is provided above the inter-spring block 73e via 3 rd plate-like spring members 73, 73 connected to the upper surface of the 2 nd intermediate table 52. The movable base 61 is in a state where the two 3 rd plate-like spring members 73, 73 are sandwiched between the movable base 61 and the upper surface of the 2 nd intermediate base 52, and can be fixed by bolts in the form shown in fig. 5. In order to attach the movable plate 62 to the upper surface of the movable base 61 as shown in fig. 3, it is considered to avoid the head of the bolt from flying out.

As described above, the vibration device 2 of the present embodiment shown in fig. 4 has the following configuration: the 1 st intermediate stages 51, 51 are elastically supported by the base 4 in the X direction using the 1 st plate-like spring members 71, the 2 nd intermediate stage 52 is elastically supported by the 1 st intermediate stages 51, 51 in the Y direction using the 2 nd plate-like spring member 72, and the movable base 61 is elastically supported by the 2 nd intermediate stage 52 in the Z direction using the 3 rd plate-like spring member 73. Thereby, the movable stand 6 is elastically supported by the base 4 in directions X, Y, Z.

The plate-like spring members 71 to 73 have elasticity in the direction X, Y, Z, which is the plate thickness direction, and have sufficient rigidity in the width direction and the longitudinal direction perpendicular thereto. Thus, the support in each direction can be considered independent.

The 1 st to 3 rd plate-like spring members 71 to 73 are provided in parallel to the respective directions and supported in pairs, so that they are configured as a part of a parallel link. Thus, the plate-like spring members 71 to 73 can be displaced so as to maintain a pair-wise relationship with a constant gap therebetween without performing a twisting motion.

The vibration device of the present embodiment includes the 1 st horizontal vibration-generating member 81, the 2 nd horizontal vibration-generating member 82, and the vertical vibration-generating member 83 which are independent in the direction X, Y, Z.

First, the 1 st horizontal oscillation element as an oscillation element in the X direction is constituted by attaching two, in total, four 1 st piezoelectric elements 81 to the surfaces of two 1 st plate-like spring members 71, respectively. The 1 st piezoelectric elements 81 to 81 can be expanded or contracted in the Y direction by applying a voltage, and displacement in the X direction is generated by bending the 1 st plate-like spring members 71, 71.

The 1 st plate-like spring members 71, 71 have a bending point in which the direction of bending changes in the center between the base-side connection point 71a positioned by the spring presser 71d at the end and the 1 st intermediate stage-side connection point 71b positioned by the spring retainer 71c and the spring presser 71e at the center, and therefore the 1 st piezoelectric elements 81 to 81 are attached to this portion in a manner that prevents deformation and reduces efficiency. Therefore, the 1 st piezoelectric elements 81 to 81 are effectively disposed so as to avoid the center of the effective length of the spring and be close to either end.

The 1 st piezoelectric elements 81 to 81 are provided at positions having the same distance from the end portion, respectively, and can generate the same deformation by adjusting the output. As shown in fig. 7, the 1 st plate-like spring members 71, 71 can be deformed in the same manner while maintaining the interval between the 1 st plate-like spring members 71, 71 spaced apart in the X direction, and the 1 st intermediate stages 51, 51 can be displaced only in the X direction while maintaining the horizontal state.

Next, returning to fig. 4, similarly to the above-described 1 st horizontal vibration-generating member, the 2 nd horizontal vibration-generating member as a vibration-generating member in the Y direction is constituted by two, or four in total 2 nd piezoelectric elements 82 to 82 respectively attached to the surfaces of the two 2 nd plate-like spring members 72 and 72. The 2 nd piezoelectric elements 82 to 82 can be expanded or contracted in the X direction by applying a voltage, and displacement in the Y direction is generated by bending the 2 nd plate-like spring members 72, 72. The 2 nd piezoelectric elements 82 to 82 are also mounted at the same positions as the 1 st piezoelectric elements 81 to 81, so that the 2 nd plate-like spring members 72 and 72 can be deformed in the same manner while maintaining the interval between the 2 nd plate-like spring members 72 and 72 spaced apart in the Y direction, and the 2 nd intermediate stage 52 can be displaced only in the Y direction while maintaining the horizontal state, as shown in fig. 8.

Returning to fig. 4, the vertical oscillation-starting member as the oscillation-starting member in the Z direction is constituted by two 3 rd piezoelectric elements 83 to 83 in total, which are respectively attached to the surfaces of the upper two plate-shaped spring members 73, 73 among the two plate-shaped spring members 73 to 73 provided vertically, respectively. The 3 rd piezoelectric elements 83 to 83 can be expanded or contracted in the X direction by applying a voltage, and can be displaced in the Z direction by bending the 3 rd plate-like spring members 73, 73. The 3 rd piezoelectric elements 83 to 83 are also mounted at the same positions as the 1 st piezoelectric elements 81 to 81 and the 2 nd piezoelectric elements 82 to 82, so that the 3 rd plate-like spring members 73 and 73 can be deformed in the same manner while maintaining the interval between the 3 rd plate-like spring members 73 and 73 spaced apart in the Z direction as shown in fig. 9, and the movable base 61 can be displaced only in the Z direction while maintaining the horizontal state. The 3 rd piezoelectric elements 83 to 83 may be provided on two 3 rd plate-like spring members 73, 73 provided on the lower side, or the 3 rd piezoelectric elements 83 to 83 may be provided on four 3 rd plate-like spring members 73 to 73 in total on the upper side and the lower side.

As described above, by changing the voltages capable of applying displacement in the directions of X, Y, Z in a sinusoidal manner, periodic exciting forces can be applied to the movable base 61 in each direction.

The control system unit 3 shown in fig. 1 applies a sinusoidal control voltage to each of the 1 st piezoelectric element 81, the 2 nd piezoelectric element 82, and the 3 rd piezoelectric element 83, and causes the vibration device 2 configured as described above to generate a periodic excitation force for generating X, Y, Z vibration in each direction.

Therefore, the control system unit 3 includes an oscillator 34 for generating a sinusoidal voltage, and the sinusoidal voltage is amplified by an amplifier 35 and then output to the piezoelectric elements 81, 82, and 83. The control system unit 3 further includes a vibration control means 31 for adjusting X, Y, Z the control voltage in each direction in detail. Further, the frequency of the vibration generated by the oscillator 34 is set to a frequency that resonates with any one of the vibration systems in the X, Y, Z direction, and the vibration is amplified to achieve power saving. In this case, in order to avoid interference between vibrations of the vibration system in all directions, the natural frequencies in the respective directions may be set apart. In this case, the natural frequency in each direction is, for example, about-10% to + 10%.

In the present embodiment, as described above, the effective lengths of the 1 st plate-like spring members 71, 71 and the 2 nd plate-like spring members 72, 72 can be changed by the spring seats 71c to 71c and 72c to 72c, respectively. Therefore, the natural frequencies in the X direction and the Y direction can be changed and adjusted to appropriate values based on the natural frequency in the Z direction.

The vibration control means 31 is mainly composed of an amplitude adjustment circuit 31a for adjusting the amplitude of the control voltage in each direction of X, Y, Z, and a phase adjustment circuit 31b for adjusting each phase difference. In the present embodiment, the amplitude adjustment circuit 31a corresponding to each control voltage of X, Y, Z is provided, and the phase adjustment circuit 31b for adjusting the phase of the control voltage to a predetermined phase difference from the phase of the control voltage in the Z direction with reference to the phase of the control voltage in the Z direction is provided for each control voltage of X, Y.

The control system unit 3 further includes a conveyance path determining unit 33 for determining a conveyance path and a conveyance speed corresponding to the conveyed article 9, and a vibration switching unit 32 for issuing a command for changing a specific control value to each of the amplitude adjusting circuit 31a and the phase adjusting circuit 31b in accordance with the determined conveyance path and conveyance speed.

The conveyance path determining means 33 stores therein data of a plurality of conveyance paths and conveyance speeds corresponding to the conveyed articles 9, and after selecting a conveyance path and a conveyance speed from the data in accordance with an instruction from the outside, not shown, commands are applied to the vibration switching means 32 so as to switch the vibration mode in association with the conveyance path and the conveyance speed selected here.

Then, the vibration switching means 32 outputs a command, determines specific control values of the amplitude adjusting circuits 31a and the phase adjusting circuits 31b, and switches the control values so that the transport path and the transport speed become target values of the command.

Specifically, the article transport apparatus 1 configured as described above operates as follows to transport and sort the articles 9 placed on the movable table 6.

Here, as shown in the schematic diagram of fig. 10, a case is assumed where the movable stage 6 is elastically supported by the base 4 in each direction of X, Y, Z by the elastic bodies 74, 75, 76, and vibration-causing members 84, 85, 86 in each direction are provided. With this configuration, the movable stand 6 can be moved in three directions by the oscillation starting members 84, 85, and 86 provided in the three directions X, Y, Z. The elastic bodies 74 to 76 in the schematic view of fig. 10 correspond to the 1 st to 3 rd plate-like spring members 71 to 73 (see fig. 4), and the vibration generating members 84 to 86 correspond to the 1 st to 3 rd piezoelectric elements 81 to 83 (see fig. 4) as the 1 st horizontal vibration generating member, the 2 nd horizontal vibration generating member, and the vertical vibration generating member, respectively.

Z ═ Z was applied to the movable stage 6 of the model shown in fig. 10 in the Z direction₀Periodic vibration shift denoted by x sin ω t. Here, Z₀Denotes the amplitude in the Z direction, ω denotes the angular frequency, and t denotes time. And, likeThe same frequency as that in the Z direction is applied to the X, Y direction. Here, X₀Denotes the amplitude in the X direction, Y₀The amplitude in the Y direction is shown,represents the phase difference of the vibration in the X direction and the vibration in the Z direction,a phase difference between the vibration in the Z direction and the vibration in the Z direction is shown.

By applying the periodic vibration displacement in the sine wave shape in each direction of X, Y, Z in this way, three-dimensional vibration can be generated in the movable stage 6 by combining these vibration displacements. For example, as shown in FIG. 10, the vibration component in the direction opposite to the Z direction hasIs out of phase with XWhen the vibration is generated in the Y direction, the vibration having the elliptical orbit with the right side as the upper side is generated two-dimensionally on the XZ plane, and the vibration having the elliptical orbit with the right side as the lower side is generated on the YZ plane. Further, by further combining these two vibrations, an elliptical orbit in a three-dimensional space is generated as shown in the lower right in the drawing.

Further, by changing the amplitude and phase of the vibration shift in each direction, the size and orientation of the two-dimensional elliptical orbit in the XZ plane and the YZ plane can be changed, and the size and orientation of the elliptical orbit in the three-dimensional space can be freely changed in accordance with the change. In order to apply the periodic vibration displacement in each direction, a control is performed by applying a periodic exciting force in each direction.

As described above, the movable base 6 vibrates while tracing an elliptical orbit, and the article 9 placed on the movable base 6 moves. The moving speed component in the X direction during the movement can be controlled based on the elliptical orbit in the XZ plane, and the moving speed component in the Y direction can be controlled based on the elliptical orbit in the YZ plane. That is, the amplitude and phase difference of the vibration in the X direction and the Y direction are changed based on the vibration component in the Z direction, and the moving speed component in the X, Y direction is changed, whereby the conveyance in any direction is possible.

Specifically, the moving speed is changed in the following manner.

The inventors' findings will be described with reference to fig. 10 and fig. 11, and the phase difference is used for the explanationThe moving speed vx (yy) of the article 9 is varied in such a manner as to draw a curve like a sine wave. Therefore, the phase difference between the vibration component in the X direction and the vibration component in the Z direction is set as shown in fig. 10At this time, the article 9 is conveyed in the direction in which X is positive. In addition, the phase difference is set toAfter that, the article 9 is conveyed in the direction in which X is negative. In contrast, the phase difference is set toThereafter, the moving speed Vx becomes 0, and the article 9 comes to a standstill in the X direction. And, by making the phase difference inOr betweenThe speed in the positive direction and the speed in the negative direction can be respectively increased or decreased by changing the speed. Such a relationship is established not only in the X direction but also in the Y direction, and the moving direction and the moving speed can be changed by setting the phase difference with respect to the vibration component in the Z direction in the same manner.

Thus, the amplitude X of the vibration component in each direction X, Y is set₀、Y₀And a phase difference with respect to a Z-direction vibration componentThe moving speeds Vx, Vy in the direction X, Y can be changed.

Further, according to the findings of the inventors, the description will be made with reference to fig. 10, and a curve showing the relationship between the phase difference shown in fig. 11 and the moving speed vx (yy) of the article 9 changes depending on the friction coefficient between the article 9 and the movable table 6, and becomes the relationship shown in fig. 12. That is, when the friction coefficients of the two articles W11 and W12 and the movable base 6 are μ 11 and μ 12, respectively, and the relationship of μ 11 < μ 12 is satisfied, the graph of the moving speed at W12 has a shape in which the curve of the moving speed at W11 is shifted in the direction in which the phase difference is positive. Therefore, when the movable table 6 that performs the elliptical vibration is simultaneously placed with the articles 9 having different coefficients of friction, the moving speed and the moving direction are different.

Specifically, the phase difference shown in fig. 12 is setIn the case of (3), W11 does not move, and W12 moves in the negative direction. In addition, when setting the phase difference atIn the case of space, W11 can be moved in the positive direction and W12 can be moved in the negative direction. And if it is set toIt is possible to move only W11 in the forward direction without moving W12. In addition, if it is set toIn between, both W11 and W12 can be moved in the positive direction, but can be moved in the negative directionThe speeds of W11 and W12 were transposed to the boundary. And, as long as atBy finely changing the phase difference within the range of (2), the speed ratio of W11 and W12 can also be changed.

Further, it is only necessary to set the phase difference toIt is possible to move only W12 in the forward direction without moving W11. And, as long as the phase difference is set atIn between, it is sufficient to move W12 in the positive direction and W11 in the negative direction. As long as the phase difference is set toIt is possible to move only W11 in the negative direction without moving W12. Then, the phase difference is set asIn the range of (3), both W11 and W12 can be moved in the negative direction, and the ratio of the moving speeds of both can be changed by changing the phase difference within the range.

Further, according to the findings of the inventors, the phase difference will be described with reference to fig. 10 and fig. 13And the speed of movement Vx (Yy) of the articles 9, also by varying the amplitude X₀（Y₀) But is varied. That is, the moving speed Vx (Yy) of the article 9 is set to be the phase differenceHas a curve similar to the sine wave of the vibration substantially equal to the amplitude X of the vibration displacement₀（Y₀) The changes are made proportionally. Thus, when the moving speed vx (yy) of the article 9 is to be doubled, the amplitude of the vibration displacement in the x (y) direction may be substantially doubled. For this purpose, the amplitude of the control voltage may be changed to apply a vibration force corresponding to the change.

Thus, when two kinds of articles 9 having different coefficients of friction are conveyed in the X (Y) direction, the phase difference of the vibration in the X (Y) direction with respect to the vibration in the Z direction is changedOnly one of the two articles 9 can be moved, the speed ratio can be changed while changing the moving direction, and the x (y) direction can be changedThe absolute value of the moving speed can be controlled. By combining these operations, the speed of one can be changed while maintaining the speed of the other, and the direction of conveyance can be changed.

The above-described control of the transport speed and direction in one direction is developed in two directions, and thereby the movable body can be freely moved in the XY plane. That is, by combining the vibration in the Z direction with the vibration in the two directions X, Y in the horizontal direction to generate elliptical vibration in the XZ plane and elliptical vibration in the YZ plane, respectively, three-dimensional elliptical vibration is generated by combining these elliptical vibrations, and the direction and magnitude of the elliptical vibration are three-dimensionally switched, whereby the moving direction and moving speed of the article 9 can be controlled in more detail. Further, by changing the amplitude and phase of the periodic exciting forces generated by the control voltages in the X direction and the Y direction based on the periodic exciting forces generated by the control voltages in the Z direction, respectively, and changing the elliptical vibration components in the XZ plane and the elliptical vibration components in the YZ plane, respectively, the moving speed components in the X direction and the Y direction can be applied to the article 9 in accordance with the relationships shown in fig. 11 to 13.

This enables the article 9 to be conveyed specifically as follows. Next, a conveying mode of each article will be described with reference to a plan view illustrating a conveying mode of each article in fig. 14 (a) to 14 (f) together with fig. 1.

First, when only one article 9 is used, as shown in fig. 14 (a), the article 9 can be moved in the X direction from an initial time (T0), and also moved in a direction changed by adding a moving speed component in the Y direction from a certain time (T1). In such a case, the conveyance destination may be changed depending on the type of the article 9, or the article 9 may be determined as a defective article based on inspection data obtained by a separate camera and conveyed out of the line. In order to carry out the conveyance in such a manner, the conveyance path determining means 33 in fig. 1 inputs the type of the article 9 conveyed as the data related to the conveyed article from the outside, selects the conveyance path and the conveyance speed corresponding to the article 9 based on the data stored in the inside in advance, or determines the conveyance direction and the conveyance speed based on the inspection data as the data related to the conveyed article and outputs the determined direction and speed to the vibration switching means 32. The vibration switching means 32 determines whether or not the vibration mode in each direction needs to be switched in accordance with the conveyance direction and the conveyance speed, and if switching is necessary, commands specific control values for adjusting the amplitude and the phase of the periodic exciting force in each direction to each of the amplitude adjusting circuit 31a and the phase adjusting circuit 31 b.

When such a change in the conveying path is determined as needed and the amplitude and phase are adjusted by the vibration switching member 32, the article 9 can be moved while drawing a free trajectory in the XY direction as shown in fig. 14 (b). The determination of the change of the transport path may be performed at a predetermined timing or may be performed in response to an external signal.

As shown in fig. 14 (c), when the articles 9a and 9b are two types of articles having different friction coefficients, the articles may be conveyed at the same speed in one direction in the initial stage (T0) and moved separately in different directions from a certain time (T1). In this case, in the initial stage (T0), the phase difference in fig. 12 is applied in the X directionVibration does not occur in the Y direction, but also occurs in the Y direction from the time T1, and the phase difference with respect to the vibration in the Z direction is switched toAndor betweenAndin the meantime. At the same time, the velocity in the X direction is also varied by phase difference with the vibration in the Z directionThe shift is switched so that there is a speed difference in the X direction between the articles 9a and 9 b. In the course of this vibration switching, the conveyance path determining means 33 in fig. 1 determines an appropriate conveyance path and conveyance speed from the set timing or the data relating to the conveyed object inputted from the outside, and issues a change command of the conveyance direction and conveyance speed to the vibration switching means 32 based on these data. Then, the vibration switching means 32 specifies specific control values of the amplitude and the phase in each direction corresponding to the commanded conveying direction and conveying speed, and gives a command to each of the amplitude adjusting circuit 31a and the phase adjusting circuit 31b to obtain the control values.

By performing the same control, only one of the articles 9a and 9b can be moved or a speed difference can be provided between the two as shown in fig. 14 (d). As shown in fig. 14 (e), the articles 9a and 9b can be moved in opposite directions along an arbitrary direction after the direction is selected.

By continuously changing the conveyance path and the speed, the conveyance path and the conveyance speed of the articles 9a and 9b can be simultaneously controlled in the XY plane independently as shown in (f) of fig. 14.

Further, by controlling so as to convey the articles 9 different in friction coefficient in different conveyance directions as described above, it is strictly speaking possible to make the conveyance directions different for articles different in friction coefficient in appearance, such as articles having different surface shapes, which are assumed to have the same friction coefficient. For example, even if the front surface and the back surface of the same member are different in surface irregularities, the contact area with the movable table 6 is greatly different.

As described above, the vibration device 2 of the present embodiment includes the base 4, the movable table 6 elastically supported on the base 4, the 1 st horizontal vibration generating member 81 for vibrating the movable table 6 in the X direction as the 1 st horizontal direction, the 2 nd horizontal vibration generating member 82 for vibrating the movable table 6 in the Y direction as the 2 nd horizontal direction intersecting the 1 st horizontal direction, and the vertical vibration generating member 83 for vibrating the movable table 6 in the Z direction as the vertical direction, includes the 1 st intermediate stages 51, 51 and the 2 nd intermediate stage 52 between the base 4 and the movable table 6, and includes the 1 st horizontal elastic supporting member, the 2 nd horizontal elastic supporting member, and the vertical elastic supporting member elastically connecting the base 4, the 1 st intermediate stage 51, the 2 nd intermediate stage 52, and the movable table 6 in each direction of X, Y, Z in this order, the 1 st horizontal elastic support member is constituted by a 1 st plate-like spring member 71 having a thickness direction substantially coincident with the 1 st horizontal direction and a longitudinal direction arranged in a horizontal direction, the 2 nd horizontal elastic support member is constituted by a 2 nd plate-like spring member 72 having a thickness direction substantially coincident with the 2 nd horizontal direction and a longitudinal direction arranged in a horizontal direction, and the vertical elastic support member is constituted by a 3 rd plate-like spring member 73 having a thickness direction substantially coincident with the vertical direction and a longitudinal direction arranged in a horizontal direction.

With this configuration, the movable base 6 is elastically supported independently in each direction because the first to third plate-like spring members 71 to 73 as elastic support members for elastically supporting the movable base 6 are provided in directions in which elastic deformation in the respective directions X, Y, Z is easy, and the plate-like spring members 71 to 73 have large rigidity in a direction different from the plate thickness direction. Therefore, when the 1 st horizontal vibration-generating member 81, the 2 nd horizontal vibration-generating member 82, and the vertical vibration-generating member 83 vibrate in each direction, the vibrations can be independently controlled without affecting the directions of each other. Further, since the plate-like spring members 71 to 73 are arranged so that the longitudinal direction thereof is in the horizontal direction, the height from the base 4 to the movable table 6 can be suppressed, and pitching and rolling of the movable table 6 can be suppressed.

Further, since the 1 st to 3 rd plate spring members 71 to 73 are formed in parallel to be spaced apart by a predetermined distance, and the plate spring members 71 to 73 are connected to each other to form a part of the parallel link, the displacement is easily maintained in a state where the interval is constant in each direction. Therefore, the plate-like spring members 71 to 73 are suppressed from being deformed in a twisted manner, and can be supported more stably in the three directions.

Further, each of the vibration generating members is a piezoelectric element 81-83 attached to at least one surface of the 1 st to 3 rd plate spring members 71-73, and is configured to vibrate the 1 st to 3 rd plate spring members 71-73 by applying a sinusoidal voltage to the piezoelectric elements 81-83 to periodically expand the piezoelectric elements 81-83, so that the plate spring members 71-73 and the vibration generating members 81-83 as elastic support members can be integrated to simplify the structure and make the structure compact.

Further, since the spring seats 71c to 72c are provided between the 1 st intermediate stage 51 and the 1 st plate-like spring member 71 and between the 2 nd intermediate stage 52 and the 2 nd plate-like spring member 72, respectively, and the positions of the spring seats 71c to 72c are configured to be changeable in the longitudinal direction of the 1 st plate-like spring member 71 and the 2 nd plate-like spring member 72, respectively, the natural frequency of the plate-like spring members 71, 72 can be changed easily by changing the positions of the spring seats 71c to 72c in the longitudinal direction of the plate-like spring members 71, 72. This makes it possible to easily adjust the natural frequencies in the respective directions to be close to each other.

Further, the article carrying apparatus 1 of the present embodiment is an article carrying apparatus for carrying an article 9 placed on a movable table 6 by vibration of the movable table 6, and includes the vibration apparatus 2, a vibration control member 31, and a vibration switching member 32, wherein the vibration control member 31 is configured to control a plurality of vibration generating members 81 to 83 included in the vibration apparatus 2 so that the plurality of vibration generating members 81 to 83 generate periodic vibration generating forces at the same time at the same frequency and have a phase difference in the vibration generating forces, thereby generating a three-dimensional vibration trajectory in the movable table 6; the vibration switching member 32 is used for switching the amplitude and phase difference of the periodic excitation force generated by the excitation members 81 to 83.

With this configuration, the article transport apparatus 1 can transport the article 9 on the movable table 6 in any direction and has excellent controllability.

<Embodiment 2>

Fig. 15 shows embodiment 2 of an article sorting device 101 configured as one of article moving devices using a vibrating device 2 according to the present invention. The same portions as those in embodiment 1 are denoted by the same reference numerals, and description thereof is omitted.

In this embodiment, the configuration of the vibration device 2 is the same as that of embodiment 1, except that the control system unit 103 for the vibration device 2 is different. Specifically, the vibration switching member 32 and the conveyance path determining member 33 included in the control system unit 3 according to embodiment 1 do not exist as in fig. 1, and the phase difference input unit 132 is included as a substitute for these members as in fig. 15. The phase difference input unit 132 receives the phase difference in the X direction and the Y direction with respect to the phase of the control voltage in the Z direction, and issues a command to each phase adjustment circuit 31b corresponding to the direction X, Y so as to set the phase difference.

Here, the operation principle of the article sorting device 101 of the present embodiment is also the same as that described in embodiment 1 using fig. 10 to 13, and the moving speed and the moving direction of the article 9 are changed according to the friction coefficient between the movable table 6 and the article 9 and the phase difference and amplitude of the vibration in each direction.

Specifically, the article 9 is distinguished as follows.

The inventors' findings will be described with reference to fig. 10 and fig. 16, and the phase difference is used for the explanationThe moving speed vx (yy) of the article 9 is varied in such a manner as to draw a curve like a sine wave, and is also varied in accordance with the friction coefficient between the article 9 and the movable table 6. That is, when the friction coefficients of the three articles W21, W22, W23 and the movable table 6 are μ 21, μ 22, and μ 23, respectively, and μ 21 < μ 22 < μ 23, the graph of the moving speed at W22 has a shape in which the curve of the moving speed at W21 is shifted in the direction in which the phase difference is positive, and the graph of the moving speed at W23 has a shape in which the curve of the moving speed at W21 is further shifted in the direction in which the phase difference is positive. Therefore, when the movable table 6 that performs the elliptical vibration is simultaneously placed with the articles 9 having different coefficients of friction, the moving speed and the moving direction are different.

Specifically, the phase difference shown in fig. 16 is setIn this case, W21 advances in the positive direction, and W22 and W23 advance in the same negative direction, but the moving speed of W23 is higher than the moving speed of W22. And, if set to a phase differenceThen W21 goes in the positive direction, W22 goes in the positive direction at a speed lower than W21, and W23 goes in the negative direction. If the phase difference is set toW21 travels in the negative direction, W22 travels in the positive direction, and W23 travels in the positive direction at a speed greater than W22. If the phase difference is set toW21 travels in the negative direction, W22 travels in the negative direction at a speed lower than W21, and W23 travels in the positive direction. In addition to thisIn addition, the phase may be set arbitrarily, and the order of magnitude of the moving speed may be changed by moving all of W21 to W23 in the forward direction or the reverse direction.

Further, as described above with reference to fig. 13, the amplitude X is also changed₀（Y₀) To make the phase differenceAnd the moving speed vx (yy) of the article 9. That is, the moving speed Vx (Yy) of the article 9 is set to be the phase differenceHas a curve similar to the sine wave of the vibration substantially equal to the amplitude X of the vibration displacement₀（Y₀) The changes are made proportionally. Thus, when the moving speed vx (yy) of the article 9 is to be doubled, the amplitude of the vibration displacement in the x (y) direction is preferably doubled. Therefore, in order to apply the excitation force corresponding to the excitation force, the amplitude of the control voltage may be changed.

By simultaneously performing such vibration control in one direction in the orthogonal X, Y direction, it is possible to distinguish and move a plurality of kinds of articles 9 in different directions on the movable table 6.

Next, as shown in fig. 17, a case will be described in which three kinds of articles W21, W22, and W23 are placed on the movable table 6. The friction coefficients are μ 21, μ 22, and μ 23, and μ 21 < μ 22 < μ 23 are given as relationships therebetween.

Considering that the speed of the article moving on the movable base 6 can be decomposed into the X-direction moving speed component Vx and the Y-direction moving speed component Vx, Vx and Vy can be controlled based on the elliptical orbit in the XZ plane and the elliptical orbit in the YZ plane, respectively, as described above, and the relationship of fig. 16 is given in the relationship of the phase difference with respect to the vibration component in the Z direction.

Here, as the direction in which the articles W21, W22, and W23 having different friction coefficients are moved, the regions are divided into upper, lower, left, and right regions, and A, B, C, D regions are set, respectively, as shown in fig. 17. By making the phase difference of X, Y vibration component with respect to Z-direction vibration componentAlternatively, the moving direction can be set in any of these regions.

For example, inAre respectively set as shown in FIG. 16As shown in the table (a) of fig. 18, the X-direction moving velocity components Vx of W21, W22, and W23 have positive (+), negative (-), and negative (-), respectively, and the Y-direction moving velocity components Vy have positive (+), positive (+) and negative (-). That is, in the regions shown in fig. 17, W21 attempts to move to the D region, W22 attempts to move to the C region, and W23 attempts to move to the a region, and as a result, W21 to W23 move in each region in a divided manner as shown in fig. 20 (a).

Similarly, as shown in the table in FIG. 18 (b)When the movement proceeds, W21, W22, and W23 move to B, A, C region, and as a result, W21 to W23 move separately to each region as shown in fig. 20 (b).

Further, as shown in fig. 18 (c), 18 (d), and 19 (e) to 19 (h), the following description is given toWhen the light source is turned on, W21, W22 and W23 are respectively moved to the D, B, A region while being distinguishedIn the processAt this time, W21, W22 and W23 were moved into the region B, D, C while being distinguished from each otherAt this time, W21, W22 and W23 were moved into the region C, D, B while being distinguished from each otherAt this time, W21, W22 and W23 were moved into the region A, B, D while being distinguished from each otherAt this time, W21, W22 and W23 were moved into the region C, A, B while being distinguished from each otherThen, W21, W22, and W23 are moved to the region A, C, D while being distinguished.

If the articles 9 having different coefficients of friction are used in this manner, they can be moved in different directions, and the moving direction of each article can be changed to any moving direction.

Using the principle described above, the present article sorting device 101 is used to sort the articles 9 specifically as follows. Next, description will be given with reference to fig. 15 and 16.

First, the phase difference input unit 132 inputs the phase difference of the vibration component in the X direction and the Y direction with respect to the vibration component in the Z directionThe phase difference input unit 132 issues a command to the phase adjustment circuits 31b, 31b corresponding to the X direction and the Y direction, respectively, in accordance with the input value so as to shift the phase of the vibration in the direction X, YOrThen, the phase adjustment circuit 31b shifts the phase in accordance with the original signal of the oscillator 34OrAnd applied as a control voltage to the 1 st piezoelectric element 81 and the 2 nd piezoelectric element 82, thereby applying a phase difference with respect to the vibration component in the Z direction. In this way, for example, the phase difference input unit 132 is used to setIn the case of the above-described mode input, the articles 9 having the properties of W21, W22, and W23 can be classified into the C, D, B region in fig. 17 in the same manner as in the case of fig. 19 (e).

In addition, by setting the phase difference shown in fig. 18 and 19 by the phase difference input unit 132, the articles 9 can be distinguished as described in the tables.

Here, in the present invention, when the phase difference for the above-described discrimination is set, the friction coefficient at which the moving speed is 0 is defined as the reference friction coefficient. I.e. phase difference from that in fig. 16Corresponding to a reference coefficient of friction of μ a, withThe corresponding reference friction coefficient is μ b. That is to say that the first and second electrodes,setting the phase difference toIs equivalent to being set in the following way: as a boundary for the division, μ a is set as the reference friction coefficient, and the article 9 having a friction coefficient greater than μ a travels in the positive direction, and the article 9 having a friction coefficient smaller than μ a travels in the negative direction. Also, the phase difference is set toIs equivalent to being set in the following manner: the reference friction coefficient is set to μ b as a boundary for the division, and the article 9 having a friction coefficient greater than μ b travels in the negative direction and the article 9 having a friction coefficient smaller than μ b travels in the positive direction.

Therefore, the phase difference input unit 132 is configured not to input the phase difference itself based on the reference divided in each direction of X, Y, but to input X, Y the reference friction coefficient in each direction and either one of the positive and negative directions in which the article travels according to the magnitude of the friction coefficient with respect to the reference friction coefficient, and to automatically set the phase difference based on the table stored in the inside of fig. 16 based on the information.

As is clear from fig. 16, by changing the phase difference of the vibration with respect to the vibration in the Z direction, the moving direction of the article 9 having a different friction coefficient can be changed, and a speed difference can be provided. Therefore, the article sorting device 101 can sort the articles into 4 or more kinds not only in the regions corresponding to the four corners of the movable table 6 but also after setting more detailed regions such as the middle of these regions.

Further, by controlling to distinguish between the articles 9 having different friction coefficients as described above, it is strictly speaking possible to distinguish between articles having different friction coefficients in appearance, such as articles having different surface shapes, which are assumed to have the same friction coefficient. For example, even if the front surface and the back surface of the same member are different in surface irregularities, the contact area with the movable table 6 is greatly different.

As described above, the article sorting device 101 of the present embodiment is configured to sort a plurality of articles 9 placed on the movable table 6 by the vibration of the movable table 6, and includes the vibration device 2 and the vibration control means 31, the vibration control means 31 controlling the plurality of oscillation starting members 81 to 83 included in the vibration device 2 such that the plurality of oscillation starting members 81 to 83 generate periodic oscillation forces at the same time at the same frequency and have a phase difference therebetween, the movable table 6 generates a three-dimensional vibration locus, and the phase difference between the periodic oscillation force generated by the 1 st horizontal oscillation starting member 81 and the periodic oscillation force generated by the vertical oscillation starting member 83 is set based on the magnitude relationship between the friction coefficient of each article 9 and the reference friction coefficient, with a predetermined reference friction coefficient as a boundary, respectively, And a phase difference between the periodic excitation force generated by the 2 nd horizontal excitation member 82 and the periodic excitation force generated by the vertical excitation member 83, so that the articles move in different directions, thereby simultaneously separating the plurality of articles 9 placed on the movable table 6.

With this configuration, the article sorting device 101 can be configured to sort a plurality of articles 9 on the movable table 6 based on the friction coefficient and to have excellent controllability.

<Embodiment 3>

Fig. 21 shows a vibration device 202 of a different form instead of the vibration device 2 commonly used in the above-described embodiments 1 and 2. The same portions as those in the case of embodiment 1 and embodiment 2 are denoted by the same reference numerals, and description thereof is omitted.

In this embodiment, the form of the 1 st plate-like spring member 71, the 1 st intermediate stage 51, and the 2 nd spring member 72 connected in this order from the base 4 is substantially the same as that in fig. 4.

As shown in fig. 21, the 2 nd intermediate stage 252 connected to the 2 nd plate-like spring member 72 via the spring seat 72c has a rectangular parallelepiped block shape. The 3 rd plate-like spring members 73 to 73 are provided so as to extend from the upper surface and the lower surface of the 2 nd intermediate table 252 toward both sides in the X direction, and are connected to inter-spring blocks 273e and 273e formed as rectangular parallelepiped blocks disposed outside the 1 st plate-like spring members 71 and 71, respectively.

A pair of 3 rd plate-like spring members 73 to 73, which are spaced apart in the Z direction and arranged in parallel, are connected to the inter-spring blocks 273e and 273e, respectively, and the inter-spring blocks 273e and 273e are fixed from below by the spring pressing members 273d to 273d and from above by the movable bases 261 and 261 so as to be sandwiched between the spring pressing members 273d to 273d and the movable bases 261 and 261.

In the present embodiment, unlike the case of fig. 3, since the movable bases 261, 261 are separated in the X direction, the conveyance table 63 can be directly fixed to the movable bases 261, 261 without providing the movable plate 62 (see fig. 3). In contrast, in the case where the movable base 61 is located near the center as in the vibration device 1 shown in fig. 3, in order to avoid the installation of the bolt near the center of the conveyance table 63, it is necessary to provide the movable plate 62 between the movable base 61 and the conveyance table 63 so as to shift the position of the bolt. Therefore, in comparison with such a configuration, the structure of the present embodiment can reduce the weight of the movable portion.

Even in the case of the above configuration, the same effects as those in the case of the vibration device 2 described as the embodiment 1 and the embodiment 2 can be obtained. Further, by using the vibration device 202 of the present embodiment in combination with the control system section 3 instead of the vibration device 2 of embodiment 1, it is possible to configure the article transport device, and in this case, the same effects as those of the article transport device described in embodiment 1 can be obtained. Further, by using the vibration device 202 of the present embodiment in combination with the control system unit 103 in place of the vibration device 2 of embodiment 2, it is possible to configure the article transport device, and in this case, the same effects as those of the article sorting device described in embodiment 2 can be obtained.

<Embodiment 4>

Fig. 22 shows an article transport apparatus 301 which is a combination of a vibration apparatus 302 according to embodiment 4 of the present invention and a control system section 3 for controlling the vibration apparatus 302 and which is one of article transfer apparatuses.

The vibration device 302 shown in the figure is in a state in which a mounting table and a peripheral wall portion, which will be described later, are removed and a driving portion 325 is exposed, the driving portion 325 is elastically supported by a base 304, and piezoelectric elements 381, 382, and 383 as vibration-causing members are provided in the driving portion 325. The base 304 is elastically supported by a fixed base 321.

The control system unit 3 is configured to apply periodic exciting forces in each of the 1 st horizontal direction X, the 2 nd horizontal direction Y, and the vertical direction Z to the vibration device 302 by controlling the voltages applied to the piezoelectric elements 381, 382, and 383, thereby generating vibrations.

In addition, as in the other embodiments described above, the directions of X, Y, Z are defined as indicated by the coordinate axes shown in the drawings, and the following description will be made along the coordinate axes shown in the drawings as appropriate.

Fig. 23 is a perspective view showing a state in which the vibration device 302 is actually used, and fig. 24 is a plan view showing the state. As shown in fig. 23 and 24, in this state, the four surfaces of the front surface, the rear surface, and the side surfaces are covered with the peripheral wall portion 342 provided along the outer peripheral edge of the chassis 304. A rectangular table 363 constituting a part of the movable table 306 is provided on the upper surface, and the article 9 to be conveyed can be placed on the upper surface 363a of the table 363 as a placement surface.

The peripheral wall portion 342 has a function of protecting the four surfaces of the driving portion 325 (see fig. 22) and a function of adjusting the position of the center of gravity by increasing the weight of the base 304, and is configured by combining lower hammers 342a to 342b and upper hammers 342c to 342d formed in a block shape.

The base 304 is elastically supported on a fixing base 321 by vibration-proof springs 322 to 322 disposed at four corners of the lower surface, and the fixing base 321 can be installed on an arbitrary installation surface. Since the pair of handles 323 and 323 are provided on the fixed base 321 so as to be spaced apart in the X direction, the vibration device 302 can be easily transported by holding the handles 323 and 323.

Since the base 304 is elastically supported by the vibration isolation springs 322 to 322 as described above, even when vibration is generated in the movable base 306, the vibration can be prevented from being transmitted to the fixed base 321, and the vibration can be prevented from being transmitted to the installation surface. In addition, in the vibration device 302 of the present embodiment, the fixing base 321 is provided below the base 304 for easy transportation and installation, but may be directly installed on the installation surface via the vibration isolation springs 322 to 322. That is, in the present embodiment, the fixing base 321 is provided in view of portability, but according to the gist of the present invention, the fixing base 321 is not necessarily an essential component, and the fixing base 321 can be regarded as being equivalent to the installation surface. In the present invention, as will be described later, the mass of the entire device is considered to be the degree of the connection of a plurality of mass bodies, and the center of gravity position between these mass bodies is correlated. The mass of the entire apparatus described here represents the total mass of the portion above the base 304 elastically supported by the vibration-proof springs 322 to 322, and the mass of the fixing base 321, which is not necessarily required in the present invention, is not considered.

Fig. 25 shows a state in which a part of the members constituting the movable table 306, the lower hammers 342a to 342b, the upper hammers 342c to 342d, and the handles 323 and 323 are removed from the vibration device 302 in fig. 23.

The vibration device 302 has a movable base 361 elastically supported in three axial directions X, Y, Z in the interior thereof, and the movable base 361 is formed into a rectangular parallelepiped block. The table 363 (see fig. 23) is provided above the movable base 361. The movable base 361 and the mounting table 363 are integrated to form a movable table 306, and are elastically supported by the base 304 inside the vibration device 302, and are vibrated by a vibration generator described later.

As shown in fig. 24, vibration-proof springs 322 to 322 for elastically supporting the base 304 on a fixing base 321 are disposed at four corners of the base 304. As shown in fig. 25, the vibration-proof springs 322 to 322 are provided so as to protrude from the base 304, and the tips thereof are connected to lower hammers 342a and 342a arranged so as to extend in the Y direction, and the base 304 is elastically supported by the lower hammers 342a and 342 a.

A specific connection structure of the anti-vibration spring 322 will be described with reference to fig. 29. This figure is a sectional view along B-B in FIG. 24.

As the vibration-proof spring 322, a member of a general form can be used, and here, such a member is used that: the elastic portion has a cylindrical shape at the center, and disk-shaped plates are provided on both sides with the elastic portion interposed therebetween, and the bolt portions 322a and 322a protrude to positions on both sides of the plates. The vibration-proof spring 322 has one end surface thereof abutting against the upper surface of the fixed base 321, and a bolt portion 322a is fixed to a hole portion 321a formed in the fixed base 321 using a nut. The bolt portion 322a is screwed until it abuts against the lower surface of the lower hammer 342a in a state where the opposite end surface penetrates the hole portion 304b formed in the base 304.

Thus, the vibration-proof spring 322 can elastically support the base 304 connected to the lower hammer 342a on the fixed base 321. In the case of the structure not using the fixing base 321 as described above, the vibration isolating spring 322 having no bolt portion 322a at the lower end may be used, and the vibration isolating spring 322 may be directly disposed on the installation surface.

Fig. 26 shows a state in which the peripheral wall portion 342 is further removed from the vibration device 302 in the state of fig. 25. In addition, although the base 304 is originally not supported by the peripheral wall portion 342 and cannot be kept spaced apart from the fixed base 321, it is described in the present figure as a normal positional relationship in which the base 304 is elastically supported.

Next, the structure of the vibration device 302 according to the present embodiment will be described in detail with reference to the drawing.

The vibration device 302 is configured such that a movable base 361 is elastically supported in three directions X, Y, Z on a base 304 described later, the base 304 as a rigid body portion, 1 st intermediate stages 351, 2 nd intermediate stage 352, and the movable base 361 are connected in this order, 1 st plate-like spring members 371, 371 as a 1 st horizontal elastic support member, 2 nd plate-like spring members 372, 372 as a 2 nd horizontal elastic support member, and 3 rd plate-like spring members 373, 373 as a vertical elastic support member are provided, and the base 304 is elastically supported on a fixed base 321 that can be treated substantially equally to the installation surface using the vibration-proof springs 322. Since the plate-like spring members 371 to 373 are arranged so that the plate thickness direction thereof is X, Y, Z, they are easily elastically deformed in that direction.

Further, the piezoelectric actuator includes 1 st piezoelectric elements 381-381 as 1 st horizontal oscillation means for oscillating the movable base 361 in three directions X, Y, Z, 2 nd piezoelectric elements 382-382 as 2 nd horizontal oscillation means, and 3 rd piezoelectric elements 383-383 as vertical oscillation means.

These structures will be described in more detail below.

First, the fixing base 321 and the base 304 are each formed as a rectangular plate, and the base 304 is elastically supported on the fixing base 321 by the vibration-proof springs 322 to 322 provided at four corners as described above. The vibration-proof springs 322 to 322 are members having a weak spring characteristic with a spring constant of about 1/10 of the plate-like spring members 371 to 373 provided in each direction, and suppress propagation of vibration from the base 304 to the installation surface, and reduce the reaction force from the installation surface to stabilize the posture of the base 304. Further, even when the resonant frequency in the direction X, Y, Z in the form of vibrating the movable stage 306 in the opposite phase to the base 304 is limited to 1/10 or less in the Z direction in the form of vibrating the entire device on the base 304 integrally with the fixed stage 321, the base 304 can be stabilized when the movable stage 306 is vibrated.

Further, mounting blocks 341 are fixed to the base 304 so as to be arranged in a rectangular shape at four positions slightly on the center of the vibration-proof rubbers 322 to 322. The mounting blocks 341 are each formed as a block having an L-shaped cross section, and one side forming the L is brought into contact with the base 304, and the other side is brought into a standing state. The standing sides form YZ planes orthogonal to the X direction. Further, the 1 st plate-like spring members 371, 371 are provided so as to be connected to the mounting blocks 341, 341 adjoining in pairs in the Y direction. Since the 1 st plate-like spring members 371, 371 are attached to the YZ plane of the respective attachment blocks 341 to 341, the plate thickness direction thereof is the X direction, and the longitudinal direction thereof is the Y direction.

Further, since the 1 st plate-like spring members 371, 371 are respectively provided on the two pairs of mounting blocks 341 to 341, two are provided in parallel in a state of being separated by a predetermined distance in the X direction.

Further, since both end portions of the 1 st plate-like spring members 371, 371 are sandwiched between the rectangular spring pressing pieces 371d to 371d and the YZ plane included in the respective mounting blocks 341 to 341 and fixed by bolts, they are supported so that the bending angle is restricted.

Further, 1 st intermediate stages 351, 351 are connected to the 1 st plate-like spring members 371, 371 via spring seats 371c in the vicinity of the longitudinal direction centers thereof, respectively. The 1 st intermediate stages 351 are each formed in a rectangular parallelepiped shape extending in the Y direction. Spring pressing pieces 371e and 371e are provided so as to face the spring seats 371c and 371c, respectively. The 1 st plate-like spring members 371, 371 are held between the spring seats 371c, 371c and the spring pressing pieces 371e, 371e facing each other, and are fixed to the 1 st intermediate stages 351, 351 by bolts at these portions while being restricted in bending angle. The 1 st intermediate stages 351, 351 are divided into two parts as shown in the plan view of fig. 27, but are connected by the 2 nd plate-like spring members 372, 372 described later, and thus operate integrally.

Referring back to fig. 26, the 1 st intermediate stages 351 and 351 are formed in a rectangular parallelepiped shape as described above, and are arranged so that the six surfaces thereof are oriented perpendicular to the X, Y, Z-axis surfaces. Two 2 nd plate-like spring members 372 and 372 are provided by connecting XZ planes orthogonal to the Y axes of the respective members.

By this mounting, the two 2 nd plate-like spring members 372, 372 are arranged in parallel with each other so that the plate thickness direction is orthogonal to the Y axis and the longitudinal direction is directed to the X direction and separated from each other by a predetermined distance in the Y direction.

The 2 nd plate-like spring members 372 and 372 are supported so that their both ends are sandwiched between the rectangular spring pressing pieces 372d to 372d and the XZ plane included in the 1 st intermediate stages 351 and fixed to the portions by bolts, thereby restricting bending angles.

The 2 nd intermediate stage 352 is connected to the 2 nd plate-like spring members 372, 372 near the longitudinal direction centers thereof via spring seats 372c, 372 c. Further, spring pressing pieces 372e, 372e are provided so as to face the spring seats 372c, respectively. The 2 nd plate-like spring members 372 and 372 are held between the spring seats 372c and the spring pressing pieces 372e to 372e facing each other, respectively, and are fixed to the 2 nd intermediate stage 352 by bolts at these portions while being restricted in bending angle.

As shown in the plan view of fig. 27, the 2 nd intermediate stage 352 is configured as a rectangular frame, and is formed by combining 4 rectangular parallelepiped blocks having six faces orthogonal to the X, Y, Z direction.

As described above, the 1 st and 2 nd plate-shaped spring members 371, 371 and 372 can change the effective length or use members having different thicknesses and widths by changing the sizes of the spring seats 371c to 371c and the spring pressers 371e to 371e, and can change the spring constant and the natural frequency.

Fig. 28 is a view of the cross section a-a in fig. 24, and the description will be continued with reference to fig. 28 in addition to fig. 26.

Two and a total of four 3 rd plate-like spring members 373 to 373 are provided on the upper surface and the lower surface of the 2 nd intermediate stage 352 constituting a rectangular frame body, respectively. The 3 rd plate-like spring members 373 to 373 are provided so as to connect the XY planes of the upper and lower surfaces of the portions formed to exist at the following two side positions in the X direction: the two sides are two sides parallel to the Y direction among the sides of the rectangle forming the 2 nd intermediate stage 352. Both end portions of the 3 rd plate-like spring members 373 to 373 are held between the rectangular spring retainers 373c to 373c and the XY plane of the 2 nd intermediate stage 352 and fixed by bolting, and therefore, are supported at the portions so as to restrict the deflection angle.

Further, in the vicinity of the central portions of the 3 rd plate-like spring members 373, 373 connected to the upper surface of the 2 nd intermediate table 352 and the 3 rd plate-like spring members 373, 373 connected to the lower surface of the 2 nd intermediate table 352, inter-spring blocks 373d are provided for maintaining the interval therebetween.

Further, a spring pressing piece 373e is provided below the inter-spring block 373d via 3 rd plate-like spring members 373, 373 connected to the lower surface of the 2 nd intermediate table 352. The spring clamp 373e can be fixed by bolts, not shown, in a state where two 3 rd plate-like spring members 373, 373 are sandwiched between the spring clamp 373e and the lower surface of the 2 nd intermediate table 352.

Further, the movable base 361 is provided above the inter-spring block 373d via 3 rd plate-like spring members 373, 373 connected to the upper surface of the 2 nd intermediate table 352. The movable base 361 can be fixed by bolts in a state where two 3 rd plate-like spring members 373, 373 are sandwiched between the movable base and the upper surface of the 2 nd intermediate table 352. A movable plate 362 formed in a rectangular plate shape is attached to an upper surface of the movable base 361, and a mounting table 363 and a frame member 364 are screwed to the upper surface. The upper surface of the mounting table 363 is a mounting surface 363a on which an article is mounted. These mounting table 363, frame member 364, movable plate 362, and movable base 361 together constitute the movable base 306 (see fig. 24).

Further, counter weights (counter weights) 373f, 373f formed in a block shape are provided so as to project to the left and right of the spring presser 373e, and balance with the movable table 306 is achieved, and the center of gravity of the entire movable table 306 side supported by the 3 rd plate-like spring members 373, 373 is located at substantially the same position as the center between the 3 rd plate-like spring members 373, 373 in the horizontal direction and the vertical direction. Hereinafter, this center of gravity position will be referred to as "center of gravity position of movable table 306".

By positioning the "center of gravity position of the movable table 306" at the center between the 3 rd plate-like spring members 373, 373 in the horizontal direction and the vertical direction in this manner, even when vibration is generated in the X direction and the Y direction in the movable table 306, it is possible to suppress a so-called hunting phenomenon in which the movable table 306 is tilted due to the influence of inertial force.

As described above, the vibration device 302 of the present embodiment shown in fig. 26 is configured such that: the 1 st intermediate stages 351, 351 are elastically supported in the X direction by the 1 st plate-like spring members 371, 371 on the base 304, the 2 nd intermediate stage 352 is elastically supported in the Y direction by the 1 st intermediate stages 351, 351 by the 2 nd plate-like spring members 372-372, and the movable base 361 is elastically supported in the Z direction by the 2 nd intermediate stage 352 by the 3 rd plate-like spring members 373-373. With such a configuration, the movable base 306 is elastically supported on the base 304 in the direction X, Y, Z.

The plate-like spring members 371 to 373 have elasticity in the direction X, Y, Z which is the plate thickness direction, and have sufficient rigidity in the width direction and the longitudinal direction perpendicular to the plate thickness direction. Thus, the support in each direction can be considered independent.

Further, the 1 st to 3 rd plate-like spring members 371 to 373 are supported in pairs by being arranged in parallel in each direction as if constituting a part of the parallel links. Thus, the plate-like spring members 371 to 373 can be displaced so as to maintain a pair-wise relationship with a constant gap therebetween without twisting.

In the vibration device 302 of the present embodiment, as shown in fig. 23 and 24, the base 304 is provided with the peripheral wall portion 342 having a function as a center of gravity adjusting member, so that the position of the center of gravity of the base 304, the peripheral wall portion 342, and members fixed to the base 304 and the peripheral wall portion 342 can be adjusted. Hereinafter, this center of gravity position is referred to as "center of gravity position of the base 304". Since the base 304 is made lightweight by providing the opening 304a in the central portion as shown in fig. 28, the center of gravity position of the base 304 can be easily adjusted to a high position by providing the peripheral wall portion 342. By doing so, the center of gravity position of the base 304 is set to be substantially the same as the center of gravity position of the movable table 306 in the horizontal direction and the vertical direction.

The peripheral wall portion 342 has a structure in which the lower hammers 342a to 342b made of four blocks and the upper hammers 342c to 342d made of four blocks are connected vertically, so that the center of gravity position in the horizontal direction and the vertical direction can be finely adjusted. In particular, since the upper hammers 342c to 342d are exposed to the outside, they can be easily replaced, and can immediately cope with various changes in conditions such as device conditions, use conditions, and the like, for adjusting balance between devices additionally connected to an inspection machine or the like, and adjusting balance with the weight of an article to be conveyed.

Further, by providing the base 304 with a hammer as the peripheral wall portion 342, the base 304 has a mass about 10 times that of the movable table 306. By doing so, even when a vibration exciting force is applied to the movable base 306 in each direction of X, Y, Z, the vibration displacement generated in the base 304 due to the reaction force can be reduced. Therefore, even during operation, the position of the base 304 can be stabilized, and the movable table 306 can be vibrated with higher accuracy.

In addition, from the viewpoint of protecting the driving portion 325, it is preferable that the peripheral wall portion 342 is configured to cover at least the plate-like spring members 371 to 373 as elastic support members and the piezoelectric elements 381 to 383 provided on the plate-like spring members 371 to 373 from the outside.

With respect to the "center of gravity position of the base 304" defined as above, the rigid body portion located between the 1 st plate-like spring members 371 to 371 and the 2 nd plate-like spring members 372 to 372 is referred to as "center of gravity position of the 1 st intermediate stage 351", and the rigid body portion located between the 2 nd plate-like spring members 372 to 372 and the 3 rd plate-like spring members 373 to 373 is referred to as "center of gravity position of the 2 nd intermediate stage 352". The 1 st and 2 nd plate-like spring members 371 to 371 and 372 are provided at substantially the same mounting position in the Z direction and are arranged uniformly centering on the movable table 306. Therefore, both the "center of gravity position of the 1 st intermediate stage 351" and the "center of gravity position of the 2 nd intermediate stage 352" are configured to be substantially the same as the "center of gravity position of the movable stage 306" and the "center of gravity position of the base 430" in the horizontal direction and the vertical direction. In the case where the plate-like spring members 371 to 373 are provided so as to be divided in the Z direction, it is sufficient to consider the center positions thereof as the mounting positions.

In another way to explain the relation of the gravity center positions, when the mass of the entire device elastically supported by the anti-vibration springs 322 to 322 is assumed to be the 1 st mass body, the 2 nd mass body, and the 3 rd mass body which are connected in this order from the base 304 side by the 1 st plate spring members 371 to 371 and the 2 nd plate spring members 372 to 372, the gravity center positions of these mass bodies are substantially the same in the horizontal direction and the vertical direction.

With this configuration, when two mass bodies, i.e., the mass body on the base 304 side (the 1 st mass body) and the mass body on the 1 st intermediate stage 351 side (the 2 nd mass body + the 3 rd mass body), which are elastically connected in the X direction by the 1 st plate-like spring members 371 to 371, are considered, the gravity center positions of the two mass bodies are substantially the same in both the horizontal direction and the vertical direction. Therefore, when vibration occurs in the X direction by integrating the 1 st intermediate stage 351 side portion, no rotational moment is generated between the mass bodies of both, and therefore, no inclination occurs on the base 304 side, and the posture is stabilized, and as a result, the operation of the movable stage 306 can be stabilized.

When the entire apparatus is considered as the mass bodies of both the mass body on the 1 st intermediate stage 351 side (the 1 st mass body + the 2 nd mass body) and the mass body on the 2 nd intermediate stage 352 side (the 3 rd mass body) elastically connected in the Y direction by the 2 nd plate-like spring members 371 to 371, the gravity center positions of the two mass bodies are substantially the same in both the horizontal direction and the vertical direction. Therefore, the same effects as described above can be obtained also in the Y direction.

The vibration device 302 of the present embodiment shown in fig. 26 includes independent vibration-starting members 381 to 383 in the direction X, Y, Z.

First, the 1 st horizontal oscillation element as the oscillation element in the X direction is constituted by attaching two, eight in total, 1 st piezoelectric elements 381-381 to two to the front and back surfaces in the vicinity of both ends of the two 1 st plate-like spring members 371, respectively. The 1 st piezoelectric elements 381-381 can be expanded or contracted in the Y direction by applying a voltage thereto, and displacement in the X direction is generated by bending the 1 st plate-like spring members 371, 371.

The 1 st plate-like spring member 371 has a bending point in which the direction of bending changes in the center between the base-side connection point 371a positioned by the spring pressing piece 371d at the end and the 1 st intermediate stage-side connection point 371b positioned by the spring pressing piece 371c and the spring pressing piece 371e, and therefore, the 1 st piezoelectric elements 381-381 are attached to this portion in a manner of adversely hindering the deformation and lowering the efficiency. Therefore, it is efficient to dispose the 1 st piezoelectric elements 381 to 381 away from the center of the effective length of the spring and close to either end.

The 1 st piezoelectric elements 381-381 are provided at positions approximately equal to the end portions, respectively, and can generate the same deformation by adjusting the output. By doing so, the 1 st plate-like spring members 371, 371 can be deformed similarly so as to maintain the interval between the 1 st plate-like spring members 371, 371 separated in the X direction, and the 1 st intermediate stages 351, 351 can be displaced only in the X direction while maintaining the horizontal state.

Next, similarly to the above-described 1 st horizontal vibration generating member, the 2 nd horizontal vibration generating member as a vibration generating member in the Y direction is constituted by attaching two, and eight 2 nd piezoelectric elements 382 to 382 in total to the front and back surfaces in the vicinity of both ends of the two 2 nd plate-like spring members 372 and 372, respectively. The 2 nd piezoelectric elements 382 to 382 can expand or contract in the X direction by applying a voltage thereto, and can displace in the Y direction by bending the 2 nd plate-like spring members 372 and 372. The 2 nd piezoelectric elements 382 to 382 are also mounted at the same positions as the 1 st piezoelectric elements 381 to 381, and by doing so, the 2 nd plate-like spring members 372 and 372 can be similarly deformed so as to maintain the interval between the 2 nd plate-like spring members 372 and 372 separated in the Y direction, and the 2 nd intermediate stage 352 can be displaced only in the Y direction while maintaining the horizontal state.

The vertical vibration-generating member as a vibration-generating member in the Z direction is constituted by eight 3 rd piezoelectric elements 383 to 383, in total, which are respectively attached to the front and back surfaces in the vicinity of both ends of the upper two plate-like spring members 373 and 373 of the two plate-like spring members 373 to 373 provided in the up-down direction. The 3 rd piezoelectric elements 383 to 383 can be expanded or contracted in the X direction by applying a voltage, and the 3 rd plate-like spring members 373 and 373 are bent to be displaced in the Z direction. The 3 rd piezoelectric elements 383 to 383 are also mounted at the same positions as the 1 st piezoelectric elements 381 to 381 and the 2 nd piezoelectric elements 382 to 382, and by doing so, the 3 rd plate-like spring members 373 and 373 can be similarly deformed so as to maintain the interval between the 3 rd plate-like spring members 373 and 373 separated in the Z direction, and the movable base 361 can be displaced only in the Z direction while maintaining the horizontal state. The 3 rd piezoelectric elements 383 to 383 may be provided on two 3 rd plate-like spring members 373 and 373 provided on the lower side, or the 3 rd piezoelectric elements 383 to 383 may be provided on a total of 43 rd plate-like spring members 373 to 373 provided on the upper side and the lower side.

As described above, by changing the voltages capable of applying displacement in the directions of X, Y, Z in a sinusoidal manner, periodic exciting forces can be applied to the movable base 361 in the respective directions.

As in the case of embodiment 1, the control system unit 3 is configured in the vibration device 302 configured as described above, and as shown in fig. 22, the 1 st piezoelectric element 381, the 2 nd piezoelectric element 382, and the 3 rd piezoelectric element 383 are applied with control voltages in a sine wave form, respectively, so that the vibration device 302 generates a periodic excitation force for generating X, Y, Z vibrations in each direction.

Similarly to the structure described in embodiment 1, the control system section 3 can control the vibration device 302 in the same manner, and can constitute the article transport device 301, which is one of the article moving devices, in conjunction with the vibration device 302.

As in the article transport apparatus 1 (see fig. 1) according to embodiment 1, even the article transport apparatus 301 configured as described above can transport and sort the articles 9 placed on the movable base 306 (see fig. 23).

Specifically, as in the case of embodiment 1, the vibration device 302 of the present embodiment can be schematically shown in fig. 10, and can obtain the characteristics shown in fig. 11 to 13. Further, by utilizing such characteristics, as described in embodiment 1 using fig. 14 (a) to 14 (f), the articles 9 can be conveyed and sorted on the movable tables 6 and 306.

By configuring the article transport device 301 as the article moving device by using the vibration device 302 of the present embodiment as described above, the article 9 can be transported in any direction. Further, in order to configure the barycentric positional relationship between the 1 st to 3 rd mass bodies as described above, the vibration device 302 of the present embodiment is configured such that the barycentric positions of the portions elastically connected in the X direction by the 1 st plate-like spring members 371 to 371 are substantially the same in the horizontal direction and the vertical direction, and the barycentric positions of the portions elastically connected in the Y direction by the 2 nd plate-like spring members 372 to 372 are substantially the same in the horizontal direction and the vertical direction, and can suppress the generation of a rotational moment between the base 304 side and the movable table 306 side at the time of vibration in the X direction and the Y direction. By doing so, the base 304 is elastically supported on the fixed base 321 by the vibration-proof springs 322 to 322, but does not tilt, and can stably maintain the posture. Therefore, vibration can be stably generated on the movable table 306 side supported by the base 304, and the article 9 can be conveyed with higher accuracy. Further, since the posture of the base 304 is stable, unnecessary vibration is not transmitted to the fixing table 321 and the installation surface, and vibration transmission and noise generation can be suppressed, which contributes to improvement of the working environment.

Further, since the 1 st and 2 nd plate-like spring members 371 to 371 and 372 are provided so as to be substantially the same as the position of the center of gravity of the 1 st to 3 rd mass bodies in the vertical direction, the X-direction and Y-direction excitation forces generated by the 1 st and 2 nd piezoelectric elements 381 to 381 and 382 act in the direction of the center of gravity. Therefore, the postures of the 1 st to 3 rd mass bodies can be stabilized, and the operation of the movable table 306 can be further stabilized.

In the vibration device 302 of the present embodiment, the movable table 306 constituting a part of the 3 rd mass body is provided with the counterweights 373f, 373f so that the center of gravity of the movable table 306 is substantially the same as the centers between the 3 rd plate spring members 373 to 373. Therefore, when vibration occurs in the direction X, Y, the movable base 306 can be vibrated more stably without causing tilt, that is, so-called wobbling, of the movable base 306 due to the action of inertia force, and thus more accurate operation can be performed.

Further, the base 304 is provided with the peripheral wall portion 342 so as to protect the driving portion 325, and the displacement of the base 304 due to the reaction force of the exciting force can be reduced by the increase in the mass of the base 304 side, whereby the operational stability of the movable table 306 can be further improved.

As described above, the vibration device 302 of the present embodiment includes the base 304 supported on the ground surface by the vibration isolation springs 322, the movable stage 306 elastically supported on the base 304, the 1 st piezoelectric elements 381 to 381 for vibrating the movable stage 306 in the X direction, the 2 nd piezoelectric elements 382 to 382 for vibrating the movable stage 306 in the Y direction, and the 3 rd piezoelectric elements 383 to 383 for vibrating the movable stage 306 in the Z direction, wherein the base 304 and the movable stage 306 include the 1 st intermediate stage 351, the 1 nd intermediate stage 351, and the 2 nd intermediate stage 352, and the 1 st intermediate stage 351, the 2 nd intermediate stage 352, and the movable stage 306 are sequentially provided with the plurality of the 1 st plate-like spring members 371, the plurality of the 2 nd plate-like spring members 372 to 372, and the plurality of the 3 rd plate-like spring members 373 to 371 for elastically connecting the base 304, the 1 st intermediate stages 351, the 2 nd intermediate stage 352, and the movable stage 306 in the X direction, the Y direction, and the Z direction, when the entire device is assumed to be the 1 st, 2 nd and 3 rd mass bodies having the 1 st, 2 nd and 3 rd plate spring members 371 to 371 and 372 as boundaries, the barycentric positions of the 1 st, 2 nd and 3 rd mass bodies are substantially the same in the vertical and horizontal directions.

With this configuration, vibration can be induced in three directions, i.e., the two horizontal directions XY and the vertical direction (Z direction) to generate three-dimensional vibration of the movable table 306, and even if the vibration isolation springs 322 to 322 are provided below the base 304, generation of a rotational moment when a vibration inducing force is generated in the horizontal direction can be suppressed to stabilize the posture of the base 304, and vibration can be accurately generated in the movable table 306. Further, even when the vibration is not propagated to the installation surface, the transmission of the vibration to the periphery and the generation of noise can be suppressed, and the working environment can be improved.

Further, since the position of the center of gravity of each mass body and the mounting position of each plate-like spring member 371 to 373 are substantially the same in the vertical direction, the posture of the movable table 306 can be made to vibrate more stably in both the horizontal directions.

Further, since the plurality of 3 rd plate-like spring members 373 to 373 are provided symmetrically with respect to each oscillation starting direction centering on the gravity center position of each mass body and the counterweights 373f and 373f are provided symmetrically with respect to the movable table 306 with the 3 rd plate-like spring members 373 to 373 interposed therebetween, unexpected vibrations such as wobbling of the movable table 306 during operation can be suppressed.

Further, since the peripheral wall 342 is provided so as to rise from the vicinity of the outer periphery of the base 304, the peripheral wall 342 is configured to surround the plate-like spring members 371 to 373 and the piezoelectric elements 381 to 383, and is configured as a gravity center adjusting member for adjusting the gravity center position of the base 304, it is possible to increase the gravity center position of the base 304, easily overlap the gravity center positions of the respective mass bodies, and function as a cover for protecting the driving unit 325.

The article transport apparatus 301 as the article transfer apparatus according to the present embodiment includes the vibration apparatus 302 configured as described above, a vibration control unit 31, and a vibration switching unit 32 for switching the amplitude and phase difference of the periodic excitation forces generated by the respective excitation units, and the vibration control unit 31 controls the plurality of piezoelectric elements 381 to 383 included in the vibration apparatus 302 as the excitation units so that the plurality of piezoelectric elements 381 to 383 simultaneously generate the periodic excitation forces at the same frequency and have the phase difference therebetween, thereby generating the three-dimensional elliptical vibration locus on the movable table 306. By doing so, it is possible to effectively configure the article transport apparatus 301 that can transport the article 9 on the movable table 306 in an arbitrary direction and that is excellent in controllability.

<Embodiment 5>

As shown in fig. 30, the article sorting device 401, which is one of the article moving devices, is configured in the 5 th embodiment by the vibrating device 302 as in the 4 th embodiment. The same portions as those in embodiment 4 are denoted by the same reference numerals, and description thereof is omitted.

In this embodiment, as in the case of embodiment 4, the configuration of the vibration device 302 is different only from the control system unit 103 for controlling the vibration device 302. The control system section 103 uses the same components as those in the case shown in fig. 15 as embodiment 2.

Therefore, the same operation as that described in embodiment 2 using fig. 16 to 20 can be performed, and the article 9 can be appropriately distinguished similarly.

As described above, in the present embodiment, the same device as the vibration device 302 described in embodiment 4 is used, and therefore the same effects as those of the vibration device 302 described in embodiment 4 can be obtained.

In addition, the article sorting apparatus 401 as the article moving apparatus of the present embodiment is configured to include the vibration apparatus 302 and the vibration control means 31, wherein the vibration control means 31 controls the plurality of piezoelectric elements 381 to 383 as the vibration generating means included in the vibration apparatus 302 such that the plurality of piezoelectric elements 381 to 383 generate periodic vibration generating forces at the same time at the same frequency and have a phase difference in the vibration generating forces, and the movable table 306 generates a three-dimensional elliptical vibration locus, and a phase difference between the periodic vibration generating forces generated by the piezoelectric elements 381 and 382 as the horizontal vibration generating means and the periodic vibration generating forces generated by the piezoelectric element 383 as the vertical vibration generating means is set in accordance with a magnitude relation of a friction coefficient included in each article with respect to the reference friction coefficient with a predetermined reference friction coefficient as a boundary, the articles 9 placed on the movable table 306 are divided while moving in different directions.

By doing so, it is possible to effectively configure the article sorting device 401 that can sort the plurality of articles 9 on the movable table 306 according to the friction coefficient and that is excellent in controllability.

<Embodiment 6>

As shown in fig. 31, embodiment 6 is configured as a vibration device 502 different from the cases of embodiments 1 to 5. The same portions as those in embodiments 1 to 5 are denoted by the same reference numerals, and description thereof is omitted.

As will be described later, the vibrating device 502 can generate an arbitrary elliptical vibration trajectory in the XZ plane by applying exciting forces in the X direction and the Z direction to the movable table 506, and by adding the control system section 3 (see fig. 1 and 22) similar to those of embodiments 1 and 4, the article moving device 501 including the control system section 3 can be configured as an article transport device for transporting an article in the X front-back direction. Further, by adding the control system unit 103 (see fig. 15 and 30) similar to those of embodiments 2 and 5, the article moving device 501 including the control system unit 103 can be configured as an article sorting device for sorting articles in the forward and backward directions of X.

Although the detailed description of the configuration of the control system unit used in the present embodiment is omitted, it is sufficient that the phase adjustment circuit 31b, the amplitude adjustment circuit 31a, and the amplifier 35 for controlling the excitation force in the Y direction are omitted from the control system unit 3 in fig. 1 or 22 or the control system unit 103 in fig. 15 or 30.

As shown in fig. 31 and 33, in the vibration device 502 of the present embodiment, a base 504 is elastically supported by the vibration-proof springs 322 to 322 on the upper portion of a fixing base 521 formed in a rectangular plate shape. As will be described later, the movable stage 506 is elastically supported by the base 504 in the X direction and the Z direction, and a peripheral wall 542 is provided along the outer peripheral edge of the base 504 so as to cover these support portions. The peripheral wall portion 542 is formed by configuring lower hammers 542a to 542b each formed of four blocks into a rectangular frame body, and upper hammers 542c and 542c each formed of two blocks are provided on the upper portion thereof.

A mounting table 563 extending in the X direction is provided above the movable table 506, and the top surface of the mounting table 563 is configured to be a mounting surface 563a on which the article 9 is mounted. Further, stepped portions 563b and 563b are provided in the front and back directions of the Y across the placement surface 563a in the width direction, respectively, to restrict the movement of the article 9 placed on the placement surface 563a in the Y direction.

Fig. 32 shows a state where the mounting table 563 and a part of the peripheral wall portion 542 are detached from the state of fig. 31.

The basic configurations of the elastic support member and the vibration generating member around the movable stage 506 are substantially the same as those of the vibration device 302 of embodiment 4 shown in fig. 26, and are referred to as configurations in which the 2 nd plate-like spring members 372 and the 2 nd piezoelectric elements 382 to 382 in the Y direction are removed from the vibration device 302 and the 3 rd plate-like spring members 373 and 373 are directly supported on the 1 st intermediate stages 351 and 351.

To briefly explain using fig. 32, first, two intermediate stages 551 are elastically supported on the base 504 by two 1 st plate-like spring members 571 and 571 configured to be elastically displaceable in the X direction, which is the horizontal direction. Further, the movable base 561 is elastically supported by four 3 rd plate-like spring members 573 to 573 so as to be elastically displaceable in the Z direction as a vertical direction on the intermediate base 551.

Here, fig. 34 shows a sectional view a-a in fig. 33. As can be seen from this figure, the 3 rd plate-like spring members 573 to 573 are arranged vertically in parallel with each other with the interposition of the inter-spring block 573d, a movable pedestal 561 is provided on the upper portion of the inter-spring block 573d with the interposition of the 3 rd plate-like spring member 573, and a spring seat 573e is provided on the lower portion of the inter-spring block 573d with the interposition of the 3 rd plate-like spring member 573.

Movable base 561 is provided with a mounting table 563 at an upper portion thereof, and is integrated with mounting table 563 to constitute movable base 506.

Further, the spring seat 573e is provided with counterweights 573f, and is configured to balance the movable table 506, and the center position of the entire movable table 506 side elastically connected by the 3 rd plate spring members 573 to 573 and the center position of the 3 rd plate spring members 573 to 573 are substantially the same in the horizontal direction and the vertical direction.

The center positions of the 3 rd plate spring members 573 to 573 are also the same as the center of gravity in the vertical direction. The intermediate stages 551 and 551, the 1 st plate-like spring members 571 and 571, and the 3 rd plate-like spring members 573 to 573 are all provided symmetrically with respect to each direction of the spring X, Y, Z centering on the above-described center of gravity. Therefore, the center of gravity of the entire mass on the side of the intermediate stages 551 and 551 supported by the 1 st plate-like spring members 571 and the center between the 3 rd plate-like spring members 573 to 573 are substantially the same in the horizontal direction and the vertical direction.

Further, by providing the peripheral wall portion 542 on the base 504, the center of gravity position on the base 504 side can be adjusted. By doing so, the center of gravity of the base 504 side is also positioned substantially at the same level in the horizontal and vertical directions as the center between the plate-like spring members 573 to 573.

To explain the point described above in terms of another point of view, when the entire apparatus is considered to be replaced with two mass bodies including the mass body on the base 504 side and the mass body on the intermediate stage 551 side, which are bordered by the 1 st plate-like spring members 571 and 571, it can be said that the barycentric positions of these mass bodies are in a relationship of substantially the same position in the horizontal direction and the vertical direction.

In the vibration device 502, piezoelectric elements 581, 583, and 583 are provided in the upper spring member out of the 1 st plate spring members 571 and the 3 rd plate spring members 573 to 573, respectively, and the piezoelectric elements are controlled by a voltage, whereby vibration can be induced in each direction.

When the article transfer device 501 using the vibration device 502 is configured as the article transport device according to embodiment 1 or 4, the article 9 placed on the placement surface 563a as shown in fig. 33 can be transported in any direction of the forward direction or the reverse direction of the X with a further speed change. In the case where the articles 9 are the articles 9a and 9b having different coefficients of friction, the article sorting devices according to embodiments 2 and 5 can be configured such that one article is moved in the positive direction of X and the other article is moved in the negative direction, thereby sorting the articles.

In the case of such an operation, the above-described relationship of the position of the center of gravity is obtained, and therefore, the posture of the base 504 is stabilized, and the movable table 506 can be vibrated with high accuracy. Further, by attaching the weights 573f, 573f to the movable table 506 and adjusting the position of the center of gravity thereof, the swing phenomenon of the movable table 506 can be suppressed, and the accuracy can be further improved. Further, by providing the peripheral wall portion 542 on the base 504, the drive portion 525 can be protected, and the weight of the base 504 can be increased to reduce the operation of the base 504 due to the reaction force against the excitation force, thereby further improving the above-described effect.

As described above, the vibration device 502 of the present embodiment includes the base 521 supported on the ground surface by the vibration isolation springs 322 to 322, the movable base 506 elastically supported on the base 521, the 1 st piezoelectric elements 581 to 581 for vibrating the movable base 506 in the horizontal direction, and the 3 rd piezoelectric elements 583 to 583 for vibrating the movable base 506 in the vertical direction, wherein intermediate stages 551, 551 are provided between the base 521 and the movable stage 506, further, the present invention includes a plurality of 1 st plate-shaped spring members 571 and a plurality of 3 rd plate-shaped spring members 573 to 573 that elastically connect the base 521, the intermediate stage 551, and the movable stage 506 in the horizontal direction and the vertical direction in this order, and is configured such that when the entire apparatus is assumed to be two mass bodies whose boundaries are the 1 st plate-shaped spring members 571 and 571, respectively, the gravity center positions of these mass bodies are substantially the same in the vertical direction and the horizontal direction.

With this configuration, the vibration in the horizontal direction and the vertical direction can be generated to generate an elliptical vibration locus of the movable base 506, and even if the vibration isolation springs 322 to 322 are provided below the base 504, the generation of the vibration force in the horizontal direction can be suppressed to stabilize the posture of the base 504, and the vibration of the movable base 506 can be accurately generated. Further, even when the vibration is not propagated to the installation surface, the transmission of the vibration to the periphery and the generation of noise can be suppressed, and the working environment can be improved.

<Embodiment 7>

As shown in fig. 35, embodiment 7 is configured as a vibration device 602 different from the cases of embodiments 1 to 6. The same portions as those in embodiments 1 to 6 are denoted by the same reference numerals, and description thereof is omitted.

As in the case of embodiment 6, this vibration device 602 can generate an arbitrary elliptical vibration trajectory in the XZ plane by applying excitation forces in the X direction and the Z direction to the movable stage 606, and is configured to be large in the height direction (Z direction) and small in the width direction (Y direction) as compared with the case of the vibration device 502 (see fig. 31) of embodiment 6. In this vibrating device 602, as in the case of embodiment 6, the control system section 3 (see fig. 1 and 22) similar to that of embodiments 1 and 4 is added, whereby the article moving device 601 including the control system section 3 can be configured as an article transport device for transporting articles in the X front-back direction, and the control system section 103 (see fig. 15 and 30) similar to that of embodiments 2 and 5 is added, whereby the article moving device 601 including the control system section 103 can be configured as an article sorting device for sorting articles in the X front-back direction.

As shown in fig. 35 and 37, in the vibration device 602 of the present embodiment, a base 604 is elastically supported by vibration-proof springs 322 to 322 on an upper portion of a fixing base 621 formed in a rectangular plate shape extending in the X direction. As described later, the movable stage 606 is elastically supported by the base 604 in the X direction and the Z direction, and a peripheral wall 642 is provided along the outer peripheral edge of the base 604 so as to cover these support portions. The peripheral wall portion 642 is formed as a rectangular frame by lower hammers 642a to 642b made of four pieces.

A mounting table 663 extending in the X direction is provided above the movable base 606, and an upper surface of the mounting table 663 is configured to be a mounting surface 663a on which the article 9 is mounted. Step portions 663b and 663b are provided in the Y front-back direction across the placement surface 663a, respectively, to restrict the movement of the article 9 placed on the placement surface 663a in the Y direction.

Fig. 36 shows a state in which the mounting table 663 and a part of the peripheral wall portion 642 are detached from the state of fig. 35.

The basic configuration of the elastic support member and the vibration generating member around the movable stage 606 is substantially the same as that of the vibration device 502 of embodiment 6 shown in fig. 32, and the mounting direction of the 1 st plate-like spring members 571 and 571 for elastically supporting the movable stage 506 side on the base 504 in the X direction is different from the configuration of the intermediate stages 551 and 551.

To briefly explain using fig. 36, first, a pair of 1 st plate-like spring members 671 and 671 are disposed on a base 604 so as to be spaced apart in the X direction and parallel to each other, and are mounted so as to stand upright in the Z direction. Further, two blocks 651a, 651a constituting a part of the intermediate stage 651 are connected to the upper portions of these 1 st plate-like spring members 671, 671. Thus, these blocks 651a, 651a are elastically supported on the base 604 in the X direction.

A pair of 3 rd plate-like spring members 671 and 671 are provided so as to be vertically opposed to each other with the normal direction thereof directed in the Z direction over the entire range between the blocks 651a and 651a, and the movable base 661 is supported by the 3 rd plate-like spring members 671 and 671 so as to be elastically supported in the Z direction. Blocks 651b, 651b are provided between the respective end portions of the pair of 3 rd plate-like spring members 671, so that the parallelism between the 3 rd plate-like spring members 671, 671 can be maintained. In order to maintain the positional relationship of these members, a pair of plates 651c, 651c are provided as reinforcing members, and these plates 651c, 651c are sandwiched therebetween. The blocks 651a, 651b, and plates 651c, 651c constitute one intermediate table 651, which is a rigid body, and maintain a substantially constant shape.

Here, fig. 38 is a sectional view a-a in fig. 37. As can be seen from this figure, the 3 rd plate-like spring members 673, 673 are arranged in parallel vertically with the inter-spring block 673d interposed therebetween, a movable pedestal 661 is provided on the upper portion of the inter-spring block 673d with the 3 rd plate-like spring member 673 interposed therebetween, and a spring seat 673e is provided on the lower portion of the inter-spring block 673d with the 3 rd plate-like spring member 673 interposed therebetween.

Movable base 661 is provided with mounting table 663 at an upper portion thereof, and is integrated with mounting table 663 to constitute movable base 606.

Further, the spring seat 673e is provided with a weight 673f so as to be balanced with the movable base 606, and the center position of the entire movable base 606 side elastically connected by the 3 rd plate-like spring members 673, 673 and the center position between the 3 rd plate-like spring members 673, 673 are substantially in the same relationship in the horizontal direction and the vertical direction.

Further, the relationship of the center of gravity position between the masses with the 1 st plate-like spring members 671 and 671 as boundaries and the relationship of the center of gravity position between the masses with the 3 rd plate-like spring members 673 and 673 as boundaries are also configured in the same manner as in embodiment 6. A difference from embodiment 6 can be said to be only that the center between the 3 rd plate-like spring members 673, 673 and the center between the 1 st plate-like spring members 671, 671 are slightly shifted in the Z direction.

Even in the case of the above configuration, similarly to the case of embodiment 6, the movable stand 606 can be vibrated in the direction X, Z, and the article transfer device 601 is configured by adding the control system section, whereby articles can be conveyed and sorted.

The vibration device 602 according to this embodiment has the same center-of-gravity positional relationship as in the case of embodiment 6, and can stabilize the posture of the base 604 that is operating and can vibrate the movable table 606 with high accuracy. Further, by attaching the counterweight 673f to the movable base 606 and making the position of the center of gravity appropriate, the hunting phenomenon can be suppressed and the operation accuracy can be further improved. Further, by providing the peripheral wall portion 642 in the chassis 604, the drive portion 625 can be protected, and the weight of the chassis 604 can be increased to reduce the operation of the chassis 604 due to the reaction force against the excitation force, thereby further improving the above-described effect.

The specific configuration of each portion is not limited to the above-described embodiments 1 to 7.

For example, although the embodiment 1 is configured such that the excitation forces are applied to the excitation members 81 to 83 in the respective directions in the directions X, Y, Z which are orthogonal to each other, the three-dimensionally synthesized vibration locus can be generated and changed mainly in the movable stage 6, and it is not always necessary to make them orthogonal to each other, and only the directions may be made to intersect with each other. The vibration-generating members 81 to 83 need not be set in the vertical and horizontal directions, and may be used in various forms such as inclining the base 4 and vertically setting the base 4. More specifically, even when the oscillation starting member is provided obliquely, an oscillation starting force including components in a plurality of directions, i.e., horizontal and vertical directions, can be generated by one oscillation starting member. These aspects are also the same in the other embodiments 2 to 7.

In embodiment 1, the 1 st to 3 rd piezoelectric elements 81 to 83 bonded to the 1 st to 3 rd plate-like spring members 71 to 73 are provided on either one of the front and back surfaces, but may be provided on both surfaces, and the vibrating force may be further increased. These aspects are the same in the other embodiments 2 to 7, and may be configured in either a single-layer type or a double-layer type.

In embodiment 1, as described in fig. 4, the 1 st to 3 rd piezoelectric elements 81 to 83 are bonded to the outer half portions of the 1 st to 3 rd plate-like spring members 71 to 73, respectively, but the 1 st to 3 rd piezoelectric elements 81 to 83 may be bonded to the inner half portion, or may be provided in the outer half portion and the inner half portion, respectively. Further, the piezoelectric elements 81 to 83 are bonded to the outer half portions of the plate-like spring members 71 to 73, respectively, but the piezoelectric elements 81 to 83 may be bonded to the inner half portions in reverse, or may be provided in the outer half portions and the inner half portions, respectively. These aspects can be said to be the same in the other embodiments 2 to 7.

Further, in embodiment 1, the 1 st to 3 rd plate-like spring members 71 to 73 are supported at the end portions, respectively, and the other members are supported at the center, but may be divided into two plate-like spring members near the center. This aspect can be said to be the same in the other embodiments 2 to 7.

In embodiment 1, the 1 st to 3 rd plate-like spring members 71 to 73 for elastically supporting and the piezoelectric elements as the 1 st to 3 rd vibration-inducing members 81 to 83 for inducing vibrations in the respective directions are integrated, but in the case where the demand for compactness is small, an electromagnet may be used as the vibration-inducing member and configured independently of the plate-like spring members 71 to 73. This aspect is the same in the other embodiments 2 to 7, and may be configured to use an electromagnet.

In the above-described embodiment, the control circuit is provided to adjust the phases of the periodic excitation force in the X direction and the periodic excitation force in the Y direction based on the phase of the periodic excitation force in the Z direction, but the phase of the periodic excitation force in the direction may be changed as long as the phase difference between the periodic excitation force in the Z direction and each of the periodic excitation forces in the X direction and the Y direction can be set to a predetermined value.

As long as the anti-vibration spring 322 described in embodiment 4 has a sufficiently low spring constant with respect to the plate-shaped spring members 371 to 373, it may be a member made of a metal spring, or may be a member made of an elastic body such as rubber, and is preferably used. This aspect is also the same in the other embodiments 5 to 7.

The other structure can be variously modified within a range not departing from the gist of the present invention.

Industrial applicability

The vibration device according to the first aspect of the present invention is the vibration device according to the first aspect of the present invention, and the article transport device and the article sorting device according to the second aspect of the present invention are the vibration device according to the first aspect of the present invention. Further, according to the invention of claim 2, there are provided a vibration device capable of suppressing a rotational moment generated when a vibration force acts on a movable table, thereby stabilizing the posture of a base even in a form in which the base is supported by a vibration-proof spring, improving the operation accuracy by stabilizing the vibration of the movable table supported by the base, and suppressing propagation of vibration to an installation surface to prevent noise, vibration, and the like, thereby improving the working environment, and an article transport device and an article sorting device excellent in controllability using the vibration device.

Description of the reference numerals

1. An article conveying device (article moving device); 2. a vibrating device; 3. a control system section; 4. a base; 6. a movable table; 9. 9a, 9b, an article; 31. a vibration control member; 32. a vibration switching member; 33. a conveyance path determination section; 34. an oscillator; 35. a control voltage amplifier; 42. a cover; 51. 1 st intermediate stage; 52. a 2 nd intermediate stage; 61. a movable base; 62. a movable plate; 63. a conveying table; 71. a 1 st plate-like spring member (1 st horizontal elastic supporting means); 72. a 2 nd plate-like spring member (2 nd horizontal elastic supporting means); 71. a 3 rd plate-like spring member (vertical elastic support member); 81. a 1 st piezoelectric element (1 st horizontal vibration-starting member); 82. a 2 nd piezoelectric element (2 nd horizontal vibration-starting member); 83. a 3 rd piezoelectric element (vertical vibration generating member); 101. an article sorting device (article moving device); 132. a phase difference input unit; 322. a vibration-proof spring; 373f, a counterweight.

Claims (16)

1. A vibration device comprising a base, a movable table elastically supported by the base, a 1 st horizontal vibration generating member for vibrating the movable table in a 1 st horizontal direction, a 2 nd horizontal vibration generating member for vibrating the movable table in a 2 nd horizontal direction intersecting the 1 st horizontal direction, and a vertical vibration generating member for vibrating the movable table in a vertical direction,

a 1 st intermediate stage and a 2 nd intermediate stage are provided between the base and the movable stage, and the vibration device includes a 1 st horizontal elastic support member, a 2 nd horizontal elastic support member, and a vertical elastic support member for elastically connecting the base, the 1 st intermediate stage, the 2 nd intermediate stage, and the movable stage in the 1 st horizontal direction, the 2 nd horizontal direction, and the vertical direction in this order,

the 1 st horizontal elastic support member is composed of a 1 st plate-like spring member having a thickness direction substantially aligned with the 1 st horizontal direction and a longitudinal direction arranged in a horizontal direction,

the 2 nd horizontal elastic support member is composed of a 2 nd plate-like spring member having a thickness direction substantially aligned with the 2 nd horizontal direction and a longitudinal direction arranged in a horizontal direction,

the vertical elastic support member is composed of a 3 rd plate-shaped spring member having a thickness direction substantially aligned with the vertical direction and a longitudinal direction arranged in a horizontal direction,

the base, the 1 st horizontal vibration-generating member, the 2 nd horizontal vibration-generating member, the vertical vibration-generating member, the 1 st horizontal elastic support member, the 2 nd horizontal elastic support member, and the vertical elastic support member are all disposed below the movable table,

the 1 st intermediate stage is supported by the 1 st horizontal elastic support member, the 2 nd intermediate stage is supported by the 2 nd horizontal elastic support member connected to the 1 st intermediate stage, and the movable stage is supported by the vertical elastic support member connected to the 2 nd intermediate stage.

2. A vibration device comprising a base, a movable table elastically supported by the base, a 1 st horizontal vibration generating member for vibrating the movable table in a 1 st horizontal direction, a 2 nd horizontal vibration generating member for vibrating the movable table in a 2 nd horizontal direction intersecting the 1 st horizontal direction, and a vertical vibration generating member for vibrating the movable table in a vertical direction,

a 1 st intermediate stage and a 2 nd intermediate stage are provided between the base and the movable stage, and the vibration device includes a 1 st horizontal elastic support member, a 2 nd horizontal elastic support member, and a vertical elastic support member for elastically connecting the base, the 1 st intermediate stage, the 2 nd intermediate stage, and the movable stage in the 1 st horizontal direction, the 2 nd horizontal direction, and the vertical direction in this order,

the 1 st horizontal elastic support member is composed of a 1 st plate-like spring member having a thickness direction substantially aligned with the 1 st horizontal direction and a longitudinal direction arranged in a horizontal direction,

the 2 nd horizontal elastic support member is composed of a 2 nd plate-like spring member having a thickness direction substantially aligned with the 2 nd horizontal direction and a longitudinal direction arranged in a horizontal direction,

the vertical elastic support member is composed of a 3 rd plate-shaped spring member having a thickness direction substantially aligned with the vertical direction and a longitudinal direction arranged in a horizontal direction,

at least one of the 1 st, 2 nd and 3 rd plate-shaped spring members is provided in parallel with a predetermined distance,

the base, the 1 st horizontal vibration-generating member, the 2 nd horizontal vibration-generating member, the vertical vibration-generating member, the 1 st horizontal elastic support member, the 2 nd horizontal elastic support member, and the vertical elastic support member are all disposed below the movable table,

the 1 st intermediate stage is supported by the 1 st horizontal elastic support member, the 2 nd intermediate stage is supported by the 2 nd horizontal elastic support member connected to the 1 st intermediate stage, and the movable stage is supported by the vertical elastic support member connected to the 2 nd intermediate stage.

3. A vibration device comprising a base, a movable table elastically supported by the base, a 1 st horizontal vibration generating member for vibrating the movable table in a 1 st horizontal direction, a 2 nd horizontal vibration generating member for vibrating the movable table in a 2 nd horizontal direction intersecting the 1 st horizontal direction, and a vertical vibration generating member for vibrating the movable table in a vertical direction,

a 1 st intermediate stage and a 2 nd intermediate stage are provided between the base and the movable stage, and the vibration device includes a 1 st horizontal elastic support member, a 2 nd horizontal elastic support member, and a vertical elastic support member for elastically connecting the base, the 1 st intermediate stage, the 2 nd intermediate stage, and the movable stage in the 1 st horizontal direction, the 2 nd horizontal direction, and the vertical direction in this order,

the 1 st horizontal elastic support member is composed of a 1 st plate-like spring member having a thickness direction substantially aligned with the 1 st horizontal direction and a longitudinal direction arranged in a horizontal direction,

the 2 nd horizontal elastic support member is composed of a 2 nd plate-like spring member having a thickness direction substantially aligned with the 2 nd horizontal direction and a longitudinal direction arranged in a horizontal direction,

the vertical elastic support member is composed of a 3 rd plate-shaped spring member having a thickness direction substantially aligned with the vertical direction and a longitudinal direction arranged in a horizontal direction,

the 1 st horizontal vibration generating member, the 2 nd horizontal vibration generating member and the vertical vibration generating member are piezoelectric elements attached to at least one surface of the 1 st, 2 nd and 3 rd plate spring members, and the 1 st, 2 nd and 3 rd plate spring members are vibrated by applying a sinusoidal voltage to the piezoelectric elements to generate a periodic extension,

the base, the 1 st horizontal vibration-generating member, the 2 nd horizontal vibration-generating member, the vertical vibration-generating member, the 1 st horizontal elastic support member, the 2 nd horizontal elastic support member, and the vertical elastic support member are all disposed below the movable table,

the 1 st intermediate stage is supported by the 1 st horizontal elastic support member, the 2 nd intermediate stage is supported by the 2 nd horizontal elastic support member connected to the 1 st intermediate stage, and the movable stage is supported by the vertical elastic support member connected to the 2 nd intermediate stage.

4. A vibration device comprising a base, a movable table elastically supported by the base, a 1 st horizontal vibration generating member for vibrating the movable table in a 1 st horizontal direction, a 2 nd horizontal vibration generating member for vibrating the movable table in a 2 nd horizontal direction intersecting the 1 st horizontal direction, and a vertical vibration generating member for vibrating the movable table in a vertical direction,

a 1 st intermediate stage and a 2 nd intermediate stage are provided between the base and the movable stage, and the vibration device includes a 1 st horizontal elastic support member, a 2 nd horizontal elastic support member, and a vertical elastic support member for elastically connecting the base, the 1 st intermediate stage, the 2 nd intermediate stage, and the movable stage in the 1 st horizontal direction, the 2 nd horizontal direction, and the vertical direction in this order,

the 1 st horizontal elastic support member is composed of a 1 st plate-like spring member having a thickness direction substantially aligned with the 1 st horizontal direction and a longitudinal direction arranged in a horizontal direction,

the 2 nd horizontal elastic support member is composed of a 2 nd plate-like spring member having a thickness direction substantially aligned with the 2 nd horizontal direction and a longitudinal direction arranged in a horizontal direction,

the vertical elastic support member is composed of a 3 rd plate-shaped spring member having a thickness direction substantially aligned with the vertical direction and a longitudinal direction arranged in a horizontal direction,

at least one of the 1 st, 2 nd and 3 rd plate spring members is provided in parallel with a predetermined distance,

the 1 st horizontal vibration generating member, the 2 nd horizontal vibration generating member, and the vertical vibration generating member are piezoelectric elements attached to at least one surface of the 1 st, 2 nd, and 3 rd plate spring members, and the 1 st, 2 nd, and 3 rd plate spring members are vibrated by applying a sinusoidal voltage to the piezoelectric elements to generate a periodic expansion,

the base, the 1 st horizontal vibration-generating member, the 2 nd horizontal vibration-generating member, the vertical vibration-generating member, the 1 st horizontal elastic support member, the 2 nd horizontal elastic support member, and the vertical elastic support member are all disposed below the movable table,

the 1 st intermediate stage is supported by the 1 st horizontal elastic support member, the 2 nd intermediate stage is supported by the 2 nd horizontal elastic support member connected to the 1 st intermediate stage, and the movable stage is supported by the vertical elastic support member connected to the 2 nd intermediate stage.

5. Vibration apparatus according to any one of claims 1 to 4,

spring seats are provided between the 1 st plate-like spring member and at least one of the base and the 1 st intermediate stage, and between the 2 nd plate-like spring member and at least one of the 1 st intermediate stage and the 2 nd intermediate stage, respectively, and the positions of the spring seats are configured to be changeable in the longitudinal direction of the 1 st plate-like spring member and the 2 nd plate-like spring member, respectively.

6. A vibration device comprising a base supported on a ground surface by a vibration-proof spring, a movable table elastically supported on the base, a 1 st horizontal vibration-generating member for vibrating the movable table in a 1 st horizontal direction, a 2 nd horizontal vibration-generating member for vibrating the movable table in a 2 nd horizontal direction intersecting the 1 st horizontal direction, and a vertical vibration-generating member for vibrating the movable table in a vertical direction,

a 1 st intermediate stage and a 2 nd intermediate stage are provided between the base and the movable stage, and the vibration device includes a plurality of 1 st horizontal elastic support members, a plurality of 2 nd horizontal elastic support members, and a plurality of vertical elastic support members for elastically connecting the base, the 1 st intermediate stage, the 2 nd intermediate stage, and the movable stage in the 1 st horizontal direction, the 2 nd horizontal direction, and the vertical direction in this order,

when the whole device is assumed to be the 1 st mass body, the 2 nd mass body and the 3 rd mass body which are in the boundary of the 1 st horizontal elastic support member and the 2 nd horizontal elastic support member, the gravity center position of the 1 st mass body, the gravity center position of the 2 nd mass body and the gravity center position of the 3 rd mass body are configured to be approximately the same in the vertical direction and the horizontal direction,

the base, the 1 st horizontal vibration-generating member, the 2 nd horizontal vibration-generating member, the vertical vibration-generating member, the 1 st horizontal elastic support member, the 2 nd horizontal elastic support member, and the vertical elastic support member are all disposed below the movable table,

the 1 st intermediate stage is supported by the 1 st horizontal elastic support member, the 2 nd intermediate stage is supported by the 2 nd horizontal elastic support member connected to the 1 st intermediate stage, and the movable stage is supported by the vertical elastic support member connected to the 2 nd intermediate stage.

7. A vibration device comprising a base supported on a ground surface by a vibration-proof spring, a movable table elastically supported on the base, a 1 st horizontal vibration-generating member for vibrating the movable table in a 1 st horizontal direction, a 2 nd horizontal vibration-generating member for vibrating the movable table in a 2 nd horizontal direction intersecting the 1 st horizontal direction, and a vertical vibration-generating member for vibrating the movable table in a vertical direction,

a 1 st intermediate stage and a 2 nd intermediate stage are provided between the base and the movable stage, and the vibration device includes a plurality of 1 st horizontal elastic support members, a plurality of 2 nd horizontal elastic support members, and a plurality of vertical elastic support members for elastically connecting the base, the 1 st intermediate stage, the 2 nd intermediate stage, and the movable stage in the 1 st horizontal direction, the 2 nd horizontal direction, and the vertical direction in this order,

when the whole device is assumed to be the 1 st mass body, the 2 nd mass body and the 3 rd mass body which are in the boundary of the 1 st horizontal elastic support member and the 2 nd horizontal elastic support member, the gravity center position of the 1 st mass body, the gravity center position of the 2 nd mass body and the gravity center position of the 3 rd mass body are substantially the same in the vertical direction and the horizontal direction, and the gravity center positions of the 1 st mass body, the 2 nd mass body and the 3 rd mass body and the installation positions of the horizontal elastic support members are substantially the same in the vertical direction,

the base, the 1 st horizontal vibration-generating member, the 2 nd horizontal vibration-generating member, the vertical vibration-generating member, the 1 st horizontal elastic support member, the 2 nd horizontal elastic support member, and the vertical elastic support member are all disposed below the movable table,

the 1 st intermediate stage is supported by the 1 st horizontal elastic support member, the 2 nd intermediate stage is supported by the 2 nd horizontal elastic support member connected to the 1 st intermediate stage, and the movable stage is supported by the vertical elastic support member connected to the 2 nd intermediate stage.

8. A vibration device comprising a base supported on a ground surface by a vibration-proof spring, a movable table elastically supported on the base, a 1 st horizontal vibration-generating member for vibrating the movable table in a 1 st horizontal direction, a 2 nd horizontal vibration-generating member for vibrating the movable table in a 2 nd horizontal direction intersecting the 1 st horizontal direction, and a vertical vibration-generating member for vibrating the movable table in a vertical direction,

a 1 st intermediate stage and a 2 nd intermediate stage are provided between the base and the movable stage, and the vibration device includes a plurality of 1 st horizontal elastic support members, a plurality of 2 nd horizontal elastic support members, and a plurality of vertical elastic support members for elastically connecting the base, the 1 st intermediate stage, the 2 nd intermediate stage, and the movable stage in the 1 st horizontal direction, the 2 nd horizontal direction, and the vertical direction in this order,

when the whole device is assumed to be the 1 st mass body, the 2 nd mass body and the 3 rd mass body which are in the boundary of the 1 st horizontal elastic support member and the 2 nd horizontal elastic support member, the gravity center position of the 1 st mass body, the gravity center position of the 2 nd mass body and the gravity center position of the 3 rd mass body are substantially the same in the vertical direction and the horizontal direction, and,

the plurality of vertical elastic support members are provided symmetrically with respect to each oscillation starting direction with the center of gravity position of the 1 st mass body, the 2 nd mass body, and the 3 rd mass body as the center, and weights are provided on the movable table at positions symmetrical with respect to each other across the plurality of vertical elastic support members,

the base, the 1 st horizontal vibration-generating member, the 2 nd horizontal vibration-generating member, the vertical vibration-generating member, the 1 st horizontal elastic support member, the 2 nd horizontal elastic support member, and the vertical elastic support member are all disposed below the movable table,

the 1 st intermediate stage is supported by the 1 st horizontal elastic support member, the 2 nd intermediate stage is supported by the 2 nd horizontal elastic support member connected to the 1 st intermediate stage, and the movable stage is supported by the vertical elastic support member connected to the 2 nd intermediate stage.

9. A vibration device comprising a base supported on a ground surface by a vibration-proof spring, a movable table elastically supported on the base, a 1 st horizontal vibration-generating member for vibrating the movable table in a 1 st horizontal direction, a 2 nd horizontal vibration-generating member for vibrating the movable table in a 2 nd horizontal direction intersecting the 1 st horizontal direction, and a vertical vibration-generating member for vibrating the movable table in a vertical direction,

a 1 st intermediate stage and a 2 nd intermediate stage are provided between the base and the movable stage, and the vibration device includes a plurality of 1 st horizontal elastic support members, a plurality of 2 nd horizontal elastic support members, and a plurality of vertical elastic support members for elastically connecting the base, the 1 st intermediate stage, the 2 nd intermediate stage, and the movable stage in the 1 st horizontal direction, the 2 nd horizontal direction, and the vertical direction in this order,

when the whole device is assumed to be the 1 st mass body, the 2 nd mass body and the 3 rd mass body which are in the boundary of the 1 st horizontal elastic support member and the 2 nd horizontal elastic support member, the gravity center position of the 1 st mass body, the gravity center position of the 2 nd mass body and the gravity center position of the 3 rd mass body are substantially the same in the vertical direction and the horizontal direction, the gravity center positions of the 1 st mass body, the 2 nd mass body and the 3 rd mass body and the mounting positions of the 1 st horizontal elastic support member and the 2 nd horizontal elastic support member are substantially the same in the vertical direction, and,

the plurality of vertical elastic support members are provided symmetrically with respect to each oscillation starting direction with the center of gravity position of the 1 st mass body, the 2 nd mass body, and the 3 rd mass body as the center, and a counterweight is provided on the movable table at a position symmetrical with the center of gravity position of the plurality of vertical elastic support members,

the base, the 1 st horizontal vibration-generating member, the 2 nd horizontal vibration-generating member, the vertical vibration-generating member, the 1 st horizontal elastic support member, the 2 nd horizontal elastic support member, and the vertical elastic support member are all disposed below the movable table,

the 1 st intermediate stage is supported by the 1 st horizontal elastic support member, the 2 nd intermediate stage is supported by the 2 nd horizontal elastic support member connected to the 1 st intermediate stage, and the movable stage is supported by the vertical elastic support member connected to the 2 nd intermediate stage.

10. A vibration device comprising a base supported on a ground surface via a vibration-proof spring, a movable base elastically supported on the base, a horizontal vibration-generating member for vibrating the movable base in a horizontal direction, and a vertical vibration-generating member for vibrating the movable base in a vertical direction,

an intermediate stage is provided between the base and the movable stage, and the vibration device includes a plurality of horizontal elastic support members and a plurality of vertical elastic support members for elastically connecting the base, the intermediate stage, and the movable stage in the horizontal direction and the vertical direction in this order,

when the entire device is assumed to be two mass bodies having the horizontal elastic support member as a boundary, the gravity center positions of the two mass bodies are substantially the same in the vertical direction and the horizontal direction,

the base, the horizontal vibration-generating member, the vertical vibration-generating member, the horizontal elastic support member, and the vertical elastic support member are all disposed below the movable table,

the intermediate stage is supported by the horizontal elastic support member, and the movable stage is supported by the vertical elastic support member connected to the intermediate stage.

11. A vibration device comprising a base supported on a ground surface via a vibration-proof spring, a movable base elastically supported on the base, a horizontal vibration-generating member for vibrating the movable base in a horizontal direction, and a vertical vibration-generating member for vibrating the movable base in a vertical direction,

an intermediate stage is provided between the base and the movable stage, and the vibration device includes a plurality of horizontal elastic support members and a plurality of vertical elastic support members for elastically connecting the base, the intermediate stage, and the movable stage in the horizontal direction and the vertical direction in this order,

when the entire apparatus is assumed to be two mass bodies having the horizontal elastic support member as a boundary, the gravity center positions of the two mass bodies are substantially the same in the vertical direction and the horizontal direction, and the gravity center position of each mass body and the mounting position of each horizontal elastic support member are substantially the same in the vertical direction,

the base, the horizontal vibration-generating member, the vertical vibration-generating member, the horizontal elastic support member, and the vertical elastic support member are all disposed below the movable table,

the intermediate stage is supported by the horizontal elastic support member, and the movable stage is supported by the vertical elastic support member connected to the intermediate stage.

12. A vibration device comprising a base supported on a ground surface via a vibration-proof spring, a movable base elastically supported on the base, a horizontal vibration-generating member for vibrating the movable base in a horizontal direction, and a vertical vibration-generating member for vibrating the movable base in a vertical direction,

an intermediate stage is provided between the base and the movable stage, and the vibration device includes a plurality of horizontal elastic support members and a plurality of vertical elastic support members for elastically connecting the base, the intermediate stage, and the movable stage in the horizontal direction and the vertical direction in this order,

when the entire apparatus is assumed to be two mass bodies having the horizontal elastic support member as a boundary, the gravity center positions of the two mass bodies are substantially the same in the vertical direction and the horizontal direction, and,

the plurality of vertical elastic support members are provided symmetrically with respect to each oscillation starting direction with respect to the center of gravity of each mass body, and a counterweight is provided on the movable table at a position symmetrical with respect to each other across the plurality of vertical elastic support members,

the base, the horizontal vibration-generating member, the vertical vibration-generating member, the horizontal elastic support member, and the vertical elastic support member are all disposed below the movable table,

the intermediate stage is supported by the horizontal elastic support member, and the movable stage is supported by the vertical elastic support member connected to the intermediate stage.

13. A vibration device comprising a base supported on a ground surface via a vibration-proof spring, a movable base elastically supported on the base, a horizontal vibration-generating member for vibrating the movable base in a horizontal direction, and a vertical vibration-generating member for vibrating the movable base in a vertical direction,

an intermediate stage is provided between the base and the movable stage, and the vibration device includes a plurality of horizontal elastic support members and a plurality of vertical elastic support members for elastically connecting the base, the intermediate stage, and the movable stage in the horizontal direction and the vertical direction in this order,

when the entire apparatus is assumed to be two mass bodies having the horizontal elastic support member as a boundary, the gravity center positions of the two mass bodies are substantially the same in the vertical direction and the horizontal direction, the gravity center position of each mass body and the mounting position of each horizontal elastic support member are substantially the same in the vertical direction, and,

the plurality of vertical elastic support members are provided symmetrically with respect to each oscillation starting direction with respect to the center of gravity of each mass body, and a counterweight is provided on the movable table at a position symmetrical with respect to each other across the plurality of vertical elastic support members,

the base, the horizontal vibration-generating member, the vertical vibration-generating member, the horizontal elastic support member, and the vertical elastic support member are all disposed below the movable table,

the intermediate stage is supported by the horizontal elastic support member, and the movable stage is supported by the vertical elastic support member connected to the intermediate stage.

14. The vibration apparatus according to any one of claims 6 to 13,

the vibrating device is provided with a peripheral wall part rising from the vicinity of the outer periphery of the base,

the peripheral wall portion is configured to surround the elastic support member and the vibration generating member, and is configured as a center of gravity adjusting means for adjusting a position of a center of gravity of the base.

15. An article transport apparatus for transporting an article placed on a movable table by vibration of the movable table,

the method comprises the following steps: the vibration device according to any one of claims 1 to 14; a vibration control means for controlling a plurality of oscillation starting means included in the vibration device so that the plurality of oscillation starting means generate periodic oscillation starting forces at the same frequency and have a phase difference therebetween, thereby generating a three-dimensional vibration locus on the movable stage; and a vibration switching member for switching the amplitude and phase difference of the periodic excitation force generated by each of the excitation members.

16. An article sorting device for sorting a plurality of articles placed on a movable table by using vibration of the movable table,

the method comprises the following steps: the vibration device according to any one of claims 1 to 14; and a vibration control means for controlling the plurality of oscillation starting means provided in the vibration device so that the plurality of oscillation starting means generate periodic oscillation forces at the same frequency and have a phase difference therebetween, thereby generating a three-dimensional vibration locus on the movable stage,

and a phase difference setting unit configured to set a phase difference between the periodic exciting force generated by the horizontal exciting member and the periodic exciting force generated by the vertical exciting member based on a magnitude relation between the friction coefficient of each article and the reference friction coefficient, based on a predetermined reference friction coefficient as a boundary, so that each article moves in different directions, thereby differentiating a plurality of articles placed on the movable table at the same time.