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Application filed by Ut-Battelle, LlcfiledCriticalUt-Battelle, Llc
Publication of HK1168151ApublicationCriticalpatent/HK1168151A/zh
Publication of HK1168151BpublicationCriticalpatent/HK1168151B/zh
Method and apparatus for measuring mechanical and electrical characteristics of a surface using electrostatic force modulation microscopy which operates in contact mode