HK1163019B - Chip holder - Google Patents

Description

Blade holder

The present invention is a divisional application of an invention patent application having an application number of 200680026761.8, an application date of 2006, 12/1, and an invention name of "scribing device, scribing method, and tip holder".

Technical Field

The present invention relates to a scribing apparatus and a scribing method for forming a scribing line on a brittle material substrate, and a tip holder used for the same, and more particularly to a scribing apparatus, a scribing method, and a tip holder having features for holding a roller blade (scribing roller) for forming a scribing line.

Background

Conventionally, in flat panel displays such as liquid crystal display panels and liquid crystal projector substrates, a mother glass substrate is cut after being bonded in a manufacturing process to form individual panels having a predetermined size. When a brittle material substrate such as a mother glass substrate is cut, there are a scribing step and a breaking step, and a scribing apparatus is used in the scribing step.

Fig. 1 is a schematic perspective view showing an example of a conventional scribing device. The moving table 101 in the scribing apparatus 100 is held movably in the y-axis direction along a pair of guide rails 102a and 102 b. The ball screw 103 is screw-engaged with the moving stage 101. The ball screw 103 is driven to rotate by a motor 104, and moves the moving table 101 in the y-axis direction along the guide rails 102a and 102 b. A motor 105 is provided on the upper surface of the moving stage 101. The motor 105 rotates the table 106 in the xy plane, and positions the table at a predetermined angle. The brittle material substrate 107 is placed on the table 106 and held by a vacuum suction mechanism or the like, not shown. Two CCD cameras 108 for imaging alignment marks of the brittle material substrate 107 are provided above the scribing device.

In the scribing apparatus 100, a bridge member 110 is bridged by support columns 111a and 111b in the x-axis direction so as to straddle the movable table 101 and the table 106 above the movable table. The scribing head 112 is movable in the x-axis direction along a guide 113 provided on the bridge member 110. The motor 114 is a driving source for moving the scribing head 112 in the x-axis direction. A tip holder 130 is attached to the tip of the scribing head 112 via a holder joint 120.

The conventional holder joint and holder attached to the scribing head 112 will be described below. As shown in the exploded perspective view of fig. 2, the frame joint 120 has a bearing 121 at the upper portion and a frame portion 122 formed in an L shape at the lower portion. A positioning pin 123 is provided on a side of the frame portion 122. As shown in fig. 3 and 4, the tip holder 130 is a member for rotatably holding a disc-shaped roller blade (hereinafter simply referred to as a blade) 131. The blade 131 is rotatably held at the center of the lower end at the front end by a pin (not shown) which is prevented from falling off by a stopper 132. The blade 131 rolls while being pressed against the brittle material substrate, thereby forming a scribe line. The tip holder 130 is positioned on the holder portion 122 of the holder joint 120 by contacting the side surface thereof with the positioning pin 123. Blade holder 130 is fixed to frame 122 by fixing bolt 133. The scribe head 112 holds the holder joint 120 and the holder 130 at the lower portion thereof so as to be movable up and down. The scribing head 112 is provided with an elevating unit capable of performing such elevating operation inside thereof, and for example, an air cylinder controlled by air pressure, an electric elevating unit driven by a linear motor or the like, or the like is used. The lifting unit rolls the blade 131 while pressing the blade 131 against the surface of the brittle material substrate with an appropriate load, thereby forming a scribe line.

Next, a scribing operation of the scribing apparatus in which electrical and mechanical adjustments necessary for the scribing operation are completed after the scribing apparatus is assembled will be described. Fig. 5A and 5B are flowcharts showing this processing procedure. Before the scribing is started, as shown in fig. 6, the brittle material substrate 107 is first placed on the table 106, and after positioning, suction fixing is performed (step S0). Then, in order to confirm the positioning state, the positioning marks 63a and 63b for positioning at the left and right positions on the imaging substrate are enlarged by using the two CCD cameras 108 provided above the scribing device, and image processing is performed (step S1). Since the enlarged images after the image pickup are displayed on the corresponding monitors, the operator can perform an accurate positioning operation while checking the picked-up images. The scribing apparatus 100 detects how much the substrate 107 is placed at an angle (θ) inclined from a line connecting the two CCD cameras, that is, a reference line a of the table 106, or how much the substrate 107 is placed away from an origin position as a reference of the table 106 by image processing (step S2). Based on the detection result, the scribing apparatus 100 proceeds to step S3, and corrects the inclination angle θ of the table 106 to 0 by the rotation of the motor 105. The deviation from the origin position of the table 106 may be corrected as follows. The stage 106 is moved in the y-axis direction by an amount corresponding to the y-axis component of the displacement, and the position of the scribing head 112 is moved in the x-axis direction by an amount corresponding to the x-axis component of the displacement. As another correction method, the following method is also available. That is, the scribing apparatus divides the deviation amount into an x-axis component and a y-axis component, and moves the scribing start position by correcting the values of the respective axis components of the position data of the scribing start position. The same result can be obtained if this is done.

When the substrate to be scribed is replaced, it is necessary to perform the correction operation for the deviation amount before the scribing is started every time. When the correction operation is completed, the scribing operation is started from a desired position. The scribing apparatus 100 lowers the tip holder and rolls the tip holder while contacting the substrate to perform normal scribing (steps S5 to S7). After the scribing line is formed, the scribing apparatus 100 raises the tip holder (step S8), then moves the substrate relative to the tip holder (step S9), and returns to S5.

Next, the movement of the substrate shown in step S9 will be described in detail with reference to fig. 5B. First, the scribing apparatus 100 determines whether or not the flag FX as the control data in the control program is 0 (step S10). The flag FX is a flag created when the table is rotated and is initialized to 0. When the flag FX is 0, the process proceeds to step S11 to determine whether the scribing in the x-axis direction is finished. If not, the scribing apparatus 100 moves the substrate relative to the movable table 106 (step S12), returns to step S5, and repeats the same process. By repeating this cycle, the scribing in the x-axis direction can be terminated. After the scribing in the x-axis direction is completed, the process proceeds to step S13, the scribing apparatus 100 sets the flag Fx to 1, and the process proceeds to step S14, and the table 106 is rotated 90 degrees to the right. Thereafter, in step S15, it is determined whether or not the scribing in the y-axis direction is completed, and if not, the process proceeds to step S16 to move the table 106, and the process returns to step S5. Since the flag FX is set up if the scribing operation in the x-axis direction is finished, the scribing apparatus 100 proceeds from step S10 to step S15 to determine whether the scribing operation in the y-axis direction is finished. If not, the scribing apparatus 100 moves the substrate in parallel in the y-axis direction by a required movement amount (step S16). Thereafter, the process returns to step S5 again, and the same scribing operation is repeated. Thereafter, when the scribing apparatus 100 determines that the formation of the scribing line in the y-axis direction is completely completed in step S15, the table is rotated 90 degrees in the left direction, and the scribing operation is completed. The scribing apparatus 100 resets the flag FX, releases the suction of the substrate, and detaches the substrate from the table 106 (step S17). Next, when another substrate is placed on the stage, scribing operation may be performed in the same order.

When the holder joint 120 is attached to the scribe device 100 which is newly manufactured and used, or when the tip holder 130, the scribe head 112, or the holder joint 120 to which the tip 131 is attached is detached for adjustment, repair, or replacement in the middle of use of the scribe device, and then the scribe device is attached and used after adjustment, or when another member is attached and used after replacement, the offset amount correction work needs to be performed by the following method. In this case, for the sake of simple explanation, the following adjustment is assumed to have been completed. That is, the center coordinates of the photographed image of one of the two CCD cameras are adjusted so as to be aligned with the origin position necessary for forming the scribe line, and the scribe line formed by the blade after the mounting of the tip holder and other members is adjusted in advance so as to be parallel to the reference line in the x-axis direction of the table.

First, in order to accurately measure the deviation between the origin position of the driving system of the scribing apparatus 100 and the start position at which the blade 131 actually starts forming the scribing line on the substrate, it is necessary to perform test scribing. When performing the test scribing, the operator places a dummy substrate different from the general mother substrate on the stage 106, and performs the preprocessing from step S0 to step S3. Fig. 7 is a schematic diagram showing a positional relationship between the scribe line formed on the dummy substrate by the test and the center coordinate P0 of the alignment mark of the image captured by the CCD camera. When the respective offsets of the scribing head 112, the carriage joint 120, and the tip holder 130 are corrected and cancelled, the scribing apparatus 100 starts scribing from the center coordinate P0.

However, since there are electrical and mechanical errors and the values of the respective assembly members are different, it is impossible to scribe from the center coordinate P0 unless the required correction process is finished by newly measuring the error amount after mounting. Therefore, the operator lowers the tip holder 130 to bring the tip into contact with the dummy substrate (steps S5 'and S6'). Thereafter, the dummy substrate is test-scribed to form one scribe line (S7'). Thereafter, the tip holder was raised (S8 ') and the amount of deviation was measured (S9'). Here, it is assumed that the scribing start position (X, Y) of the blade is the position P1(X, Y) ═ 4, 3 as shown in fig. 7. This position can be measured using a captured image of the CCD camera 108.

Next, the operator measures the amount of deviation from the position P1 to the center coordinate P0 (S9'). Since the offset amount is a value to be canceled as an offset, the correction processing is performed using the offset amount as a correction value (S10'). After that, the dummy substrate is removed from the stage to complete the correction process (S11'). Thereafter, the process returns to step S0, and the same process is repeated. In this way, for a normal scribe line below step S5 shown in fig. 5A, the scribe line can be started from the center coordinate P0.

When such correction processing is performed, the pre-processing in steps S1 to S3 is performed every time the substrate to be scribed is replaced, and thereafter, scribing lines are formed on the brittle material substrate 107 accurately at the positions of predetermined lines (for example, line B in fig. 6), and the scribing operation is repeated while sequentially changing the scribing start position with respect to the same substrate 107 (steps S5 to S9).

When the blade scribes a brittle material substrate for a predetermined length, the blade is worn out to deteriorate the performance, and therefore, the blade needs to be replaced periodically (patent document 1). In the conventional scribing apparatus, when a consumable blade is replaced, an operator first removes the tip holder 130 from the scribing head 112. Next, the worn blade 131 is detached from the detached blade holder 130, and a new blade is attached to the blade holder 130. After that, the operator again attaches the tip holder 130 to the scribing head 112, and the replacement work is finished. Therefore, when any one of the blade itself, the tip holder, and the scribe head is replaced, an error (offset) occurs in the attachment position of the blade, and therefore, it is necessary to test the scribe line and the subsequent correction process (steps S5 'to S11') in order to cancel the offset.

In this way, the offset amount generated by the replacement of the peripheral members of the scribing head is corrected, and then, after the preprocessing from step S0 to step S3 is performed on the general mother substrate, a series of scribing operations from step S5 to step S9 are repeated, thereby forming a desired number of scribing lines on the substrate.

Further, although the scribing apparatus 100 in which the scribing head moves in the x-axis direction and the table moves in the y-axis direction and rotates is shown here, there is also a scribing apparatus in which the table moves in the x-axis direction and the y-axis direction and rotates (patent document 2). In addition, there is a scribing apparatus in which the table is moved in the x-axis and y-axis directions without a rotation mechanism. Further, there is a scribing apparatus in which a table is fixed and a scribing head is moved in x-axis and y-axis directions (patent document 3).

As a modification of the scribing apparatus shown in fig. 1, there is a scribing apparatus (apparatus type 1) of a type in which a rotary table is not provided on a movable table 101 and a brittle material substrate 107 is directly placed on the movable table. Further, as another modification, there is a scribing device of a type having a driving mechanism in which the table 106 of fig. 1 is fixed and the bridge member 110 is moved in the y-axis direction together with the support columns 111a and 111b (device type 2, for example, patent document 4). At this time, the following scribing operation is required. That is, since the tilt angle θ of the substrate 107 detected in step S2 of fig. 5A cannot be corrected, only the offset amount of the substrate is corrected in step S3. In this scribing apparatus, the scribing operation is performed by the linear interpolation method described with reference to fig. 6 instead of the correction of θ. That is, when it is set that a regular scribe line is formed at the position of the straight line B, the line of the straight line a is obtained only by moving the scribe head 112 in the x-axis direction. Therefore, in the scribing apparatus, the table 106 is moved in the case of the apparatus type 1 and the bridge member 110 is moved in the case of the other apparatus type 2, respectively, in parallel with the movement of the scribing head in the x-axis direction. If so, the inclined scribe line B can be formed. The amount of parallel shift depends on the magnitude of the tilt angle θ. In the case of the inclined scribe line, the scribe head 112 and the table 106 (or the bridge member 110) share a movement amount corresponding to the base and height of the triangle formed by the inclination angle θ, in other words, it can be realized by repeating a minute stepwise linear movement in both directions.

Patent document 1: japanese patent No. 3074143

Patent document 2: japanese patent laid-open No. 2000-119030

Patent document 3: japanese patent laid-open No. 2000-086262

Patent document 4: japanese patent laid-open No. 2000-264657

Problems to be solved by the invention

When replacing a conventional blade mounted on the blade holder, the operator first loosens the fixing bolt 133 and removes the blade holder 130 from the holder connector 120. Then, the operator releases the bolt of the stopper 132 to displace the stopper 132 from the pin hole, and extracts the pin to remove the blade 131. Alternatively, after replacing with a new blade, the operator inserts the pin in the same process to attach the blade to the blade holder 130, and then assembles the blade holder 130 to the holder adaptor 120, as shown in fig. 4. Next, the holder joint 120 is mounted on the scribing head 112.

When the blade is replaced in this way, operations from S0 to S3 and from S5 'to S11' in fig. 5 must be performed. That is, in order to correct the offset accompanying the exchange, it is necessary to perform a work of forming a testability scribe line using a dummy substrate temporarily or obtaining an offset amount and correcting the amount, and such a process is troublesome.

The size of the blade varies depending on the application, and in the case of scribing a bonded substrate for a liquid crystal display, for example, the diameter is about 2.5mm and the pin is about 0.5mm phi, which is small and difficult to handle. Therefore, the prior art has the disadvantage that the blade replacement operation is time-consuming. In addition, in a panel processing factory where a plurality of types of blades are mounted on various devices, there is a possibility that different types of blades are erroneously mounted. In this case, since the scribing condition is changed, stable scribing cannot be performed normally, and the cause of the stable scribing cannot be found directly. Further, when the tip holder is fixed to the holder joint by a fixing bolt, since the mounting position of the tip is slightly shifted by the fixing method, there is a disadvantage that the position of forming the scribe line is shifted by the mounted tip.

Disclosure of Invention

The present invention has been made in view of the problems of the conventional scribing apparatus and scribing method, and an object of the present invention is to solve the problems by using a tip holder integrated with a tip and holding offset data in the tip holder in advance in the form of a code.

In order to solve the problem, a scribing device of the present invention includes: a setting mechanism (for example, a table, a conveyor, etc.) for setting the brittle material substrate; a scribing head arranged to face the brittle material substrate on the setting mechanism; the frame joint is arranged at the front end of the marking head; a blade holder having a roller blade for forming a scribing line, one end of which is detachably attached to the holder joint and the other end of which is rotatably attached, and a code for recording offset data in scribing; and a relative movement unit which relatively moves the scribing head and the brittle material in a plane along a plane of the brittle material substrate (for example, in an x-axis direction and a y-axis direction of a table surface when the setting mechanism is the table), and relatively moves the scribing head in the x-axis direction and the y-axis direction based on the offset data held in the tip holder before scribing to correct the offset.

In order to solve the problem, the scribing method of the present invention uses a scribing apparatus including: a setting mechanism for setting a brittle material substrate, a scribing head arranged to face the brittle material substrate on the setting mechanism, a frame joint arranged at the front end of the scribing head, and a blade holder having a roller blade for forming a scribing line, one end of which is detachably mounted on the frame joint and the other end of which is rotatably mounted, and a code for recording offset data during scribing; wherein the first offset data of the tip holder is read when the tip holder is mounted on a holder joint, an error of a mounting portion is detected by a test scribe when at least one of the scribe head and the holder joint is replaced, second offset data of a unit is obtained, the scribe head is relatively moved in an x-axis direction and a y-axis direction based on the first offset data of the offset read from the tip holder and the second offset data of the unit, and correction processing is performed so that the scribe head and the brittle material are relatively moved in a plane along a plane of the brittle material substrate (for example, in the x-axis direction and the y-axis direction of a table surface when the setting mechanism is the table), and the brittle material substrate on the setting mechanism is scribed.

Here, the table may be configured to move in the x-axis direction and the y-axis direction as the relative movement unit.

Here, the relative movement unit may include a movement unit that moves the table in the y-axis direction and a movement unit that moves the scribing head in the x-axis direction.

Here, the relative movement unit may further include a rotation unit configured to rotate the table within a plane of the brittle material substrate.

Here, the code may be a two-dimensional code.

Here, the code may also include data indicating the kind of the wheel blade.

In order to solve the problem, the blade holder of the present invention has a roller blade for forming a scribing line rotatably mounted at one end and a mounting portion with one surface cut off at the other end, and is detachably mounted on a holder joint of a scribing device.

In order to solve the problem, the tip holder of the present invention includes a roller blade for forming a scribing line attached to one end, an attachment portion having one surface cut out at the other end, and a code in which data unique to the tip holder is recorded on at least one surface of the tip holder, and is detachably attached to a holder joint of a scribing apparatus.

Here, the code may be a two-dimensional code.

Here, the data specific to the tip holder may include data indicating the type of the blade mounted on the tip holder.

Here, the data specific to the tip holder may include correction data for removing the offset of the tip holder during scribing.

Effects of the invention

According to the present invention having these features, since the offset data of the blade is held in the blade holder as a code, the correction data can be easily set in the scribing device by reading the code. Therefore, it is not necessary to measure the bias inherent to the tip holder, and an effect is obtained that the scribing can be easily started from a desired position.

Drawings

Fig. 1 is a perspective view showing an overall structure of a conventional scribing apparatus;

fig. 2 is a perspective view showing a conventional holder joint and a conventional tip holder;

fig. 3 is a perspective view showing a conventional tip holder;

FIG. 4 is a view showing a state where a conventional tip holder is attached to a holder joint;

fig. 5A is a flowchart showing a conventional scribing process;

fig. 5B is a flowchart showing a substrate moving process in a conventional scribing process;

FIG. 6 is a view showing a state where the alignment mark is photographed by a CCD camera;

fig. 7 is a diagram showing a relationship between the alignment mark and the scribing start position of the blade and the offset data;

fig. 8 is a perspective view showing the entire structure of a scribing device according to an embodiment of the present invention;

fig. 9 is a diagram showing the structure of a cartridge according to an embodiment of the present invention;

fig. 10 is a perspective view of a blade holder according to the present embodiment;

fig. 11 is a view showing a shelf joint according to the present embodiment;

FIG. 12 is a perspective view showing the insertion of the tip holder of the holder joint according to the present embodiment;

FIG. 13 is a partial sectional view of the holder joint showing a state where the tip holder is inserted;

fig. 14 is a view showing a state in which a holder joint is attached to a scribe head;

fig. 15 is a block diagram showing the configuration of a control system of the scribing device according to the present embodiment;

fig. 16A is a flowchart showing a scribing process sequence of the scribing apparatus according to the present embodiment;

fig. 16B is a flowchart showing a scribing process sequence of the scribing apparatus according to the present embodiment;

fig. 17 is a diagram showing a relationship between the alignment mark and the scribing start position of the blade and the offset data;

FIG. 18A is a schematic view showing a process of writing two-dimensional data to the blade holder;

fig. 18B is a schematic diagram showing a process of reading two-dimensional data for the blade holder.

Description of the reference numerals

1 scribing device

10 blade holder

11a, 11b, 16b flat portion

12 gap

13 pin slot

14 blade

15 pin

16 mounting part

16a inclined part

17 two-dimensional coding

20 frame joint

21a, 21b bearing

22 holding part

23 opening

24 magnet

25 parallel pin

41 image processing part

42 control part

43 correction value input unit

44X motor drive unit

45Y motor driving part

46 rotating motor driving part

47 blade frame lifting driving part

48 monitor

112 scribing head

Detailed Description

Fig. 8 is a perspective view illustrating a scribing apparatus according to an embodiment of the present invention. In this scribing apparatus, the same portions as those in the above conventional example are given the same reference numerals. The moving table 101 of the scribing device 1 according to the present embodiment is movably held in the y-axis direction along a pair of guide rails 102a, 102 b. The ball screw 103 is screw-engaged with the moving stage 101. The ball screw 103 is driven to rotate by a motor 104, and moves the moving table 101 in the y-axis direction along the guide rails 102a and 102 b. A motor 105 is provided on the upper surface of the moving stage 101. The motor 105 rotates the table 106 on the xy plane to position the table at a predetermined angle. The brittle material substrate 107 is placed on the table 106 and held by a vacuum suction mechanism or the like, not shown. Two CCD cameras 108 for imaging alignment marks of the brittle material substrate 107 are provided above the scribing apparatus 1.

In the scribing apparatus 1, a bridge member 110 is bridged in the x-axis direction by support columns 111a and 111b across the movable table 101 and the table 106 above the movable table. The scribing head 112 is movable in the x-axis direction along a guide 113 provided on the bridge member 110. The motor 114 is a member that moves the scribing head 112 in the x-axis direction. A tip holder 10 described later is attached to the tip of the scribing head 112 via a holder joint 20. Here, the motor 104, the guide rails 102a and 102b, and the ball screw 103 are moving parts that move the table in the y-axis direction; the bridge member 110, the supports 111a and 111b, and the guide 113 are moving parts for moving the scribing head in the x-axis direction; the motor 105 is a rotating part that rotates the table; these members constitute the relative moving portions.

The structure of the tip holder 10 mounted on the scribing head according to the present embodiment will be described below. Fig. 9 is a view showing a blade holder according to an embodiment of the present invention, and fig. 10 is a perspective view thereof. As shown in these figures, the tip holder 10 is a substantially cylindrical member, and substantially square flat portions 11a and 11b are provided at one end thereof so as to be both parallel to the central axis. The tip holder 10 has a notch 12 along the central axis between the flat portions, and has pin grooves 13 at the lower ends of the flat portions 11a and 11b in a direction perpendicular to the surfaces. The blade 14 has, for example, a disk shape having a wheel diameter of 2.5mm and a thickness of about 0.5mm, and has a conical cross section at its circumferential portion and a through hole at its center. The blade 14 is rotatably held by a pin 15 inserted into the pin groove 13 passing through a central through hole. After the pin 15 is inserted into the pin groove 13 to hold the blade 14, the blade can be replaced together with the blade holder without detaching the blade even when the blade needs to be replaced. On the other hand, the other end of the tip holder 10 is provided with a mounting portion 16 for positioning. The attachment portion 16 is formed by cutting the tip holder 10, and has an inclined portion 16a and a flat portion 16 b. The flat portion 16b is parallel to the axis of the tip holder and perpendicular to the flat portions 11a and 11b below. Further, a two-dimensional code 17 as described later is printed on the flat portion 11 a. The tip holder 10 is made of a magnetic metal at a part of its upper portion.

The scribing head 112 is provided therein with an elevating unit capable of elevating the blade holder 10 having the blade mounted thereon, for example, an electric elevating unit composed of an air cylinder or a linear motor controlled by air pressure. The blade 14 is pressed against the surface of the brittle material substrate by an appropriate load and rolled by the lifting portion, thereby forming a scribe line.

The shelf joint 20 will be explained below. Fig. 11 is a view showing a holder joint, and fig. 12 is a perspective view showing a state where the tip holder 10 is inserted into the holder joint 20. As shown in these figures, the holder joint 20 has bearings 21a and 21b at the upper part and a holding part 22 for holding the tip holder at the lower part. As shown in the drawing, a circular opening 23 is formed in the holding portion 22 of the rack joint 20, and a magnet 24 is embedded inside the opening. In addition, a parallel pin 25 perpendicular to the central axis is provided in the opening 23 at a position spaced apart from the central axis. The parallel pins 25 are connected to the inclined portions 16a of the tip holder 10 to position the tip holder 10.

When the tip holder 10 is attached to the holder joint 20, the tip holder 10 is inserted into the opening 23 of the holder joint from the attachment portion 16, as shown in fig. 12. In this way, the tip portion of the tip holder is attracted by the magnet 24, and the inclined portion 16a comes into contact with the parallel pin 25 to be positioned and fixed. Fig. 13 is a partial sectional view showing the attached state, and fig. 14 is a view showing a part of the scribe head 112 to which the holder joint 20 is attached. Since the tip holder 10 is attracted only by the magnet 24, it can be attached very easily and fixed at a predetermined position. Even when the tip holder 10 is replaced, the tip holder can be easily detached by pulling, and the attachment and detachment are easy.

Next, the structure of the scribing apparatus 1 according to the present embodiment will be described with reference to a block diagram. Fig. 15 is a block diagram showing a control system of the scribing apparatus 1. In the figure, outputs from two CCD cameras 108 are given to the control unit 42 through the image processing unit 41. The unit correction value and correction data of the tip holder, which will be described later, are supplied to the control unit 42 through the correction value input unit 43. The control unit 42 gives data to the X motor drive unit 44 and the Y motor drive unit 45 based on these correction values to cancel the offsets in the X direction and the Y direction. These motor driving units 44 and 45 directly drive the motors 114 and 104, respectively. The rotation motor driving unit 46 drives the motor 105 to rotate the brittle material substrate 107 placed on the table 106, and at the same time, eliminates the angular deviation when there is an angular deviation. Further, the tip holder elevation driving unit 47 or the monitor 48 is connected to the control unit 42. The tip holder elevation driving unit 47 drives the tip holder 14 so that the tip 14 is pressed against the surface of the brittle material substrate with an appropriate load when the tip 14 rolls.

Next, the operation of the present embodiment will be described with reference to the flowcharts of fig. 16A and 16B. When the scribing apparatus 1 starts scribing, the processing of steps S0 to S3 is performed as in fig. 5A of the conventional example described above. Next, in step S4, the scribing apparatus 1 determines whether or not the test scribing is necessary, and if the test scribing is necessary, the process proceeds to step S5' to perform substantially the same processing as in the conventional example described above. This process will be described below.

When the scribing head 112 or the holder joint 20 is newly attached to the scribing device 1 for use in place of a newly manufactured or used tip holder, it is necessary to adjust the origin position and the traveling direction of the driving system of the scribing device 1 to accurately coincide with the start position and the forming direction of the scribe line actually formed on the substrate by the blade 14. When test scribing is performed after replacing the scribing head 112 or the rack joint 20, the operator places the dummy substrate on the table in advance. Here, for example, X ═ 1 and Y ═ 2 may be input in advance as a correction value for a certain tip holder. In the first use of the scribing device, the offset value of the tip holder is set to 0 and 0. Fig. 17 is a diagram showing a relationship between an alignment mark mounted on a glass substrate or the like to be scribed and an actual cutting position of a tip holder. If the center point of the alignment mark is set as the center coordinate P0, the scribing apparatus 1 can start scribing from the center coordinate P0 by correcting the misalignment of the tip holder 10 so long as there is no misalignment in the scribing head 112 or the holder joint 20.

However, since there is an electrical and mechanical error, it is impossible to draw a line from the center coordinate P0. Therefore, the operator lowers the tip holder to bring the tip into contact with the dummy substrate (steps S5 'and S6'). Thereafter, a test scribe is performed on the dummy substrate (S7 '), and then the tip holder is raised in step S8' to measure the cutting start position. Here, as shown in fig. 17, the cutting start position (X, Y) of the blade is assumed to be a position P2(X, Y) ═ 3, 1. The position can be measured with a CCD camera 108. According to this measurement, when the tip holder without offset is used, the offset (error) unique to the unit can be checked by the scribe head 112 and the holder joint 20 when the tip is lowered to start scribing the dummy substrate.

Therefore, the amount of deviation from the measured position P2 to the center coordinate is measured (S9'). Since the offset amount is a value to be eliminated as an offset, the operator inputs a correction value using the error of the eliminating unit (S12). At this time, the unit correction value (second correction value) for canceling the offset is X ═ 3, and Y ═ 1.

After the completion of the process or when the test scribing is not performed, the scribing device 1 determines whether or not the tip holder 130 is replaced in step S21. The blade holder 10 is mounted on the holder joint 20 as shown in fig. 13, and further, the holder joint 20 is mounted on the scribing head 112 as shown in fig. 14. Therefore, if any of these members is replaced, the position of the electrical origin and the starting point of the scribe line is displaced. The cause of the positional deviation (offset) is component accuracy, assembly error, or the like. The scribe head 112 and the holder joint 20 are replaced less frequently, and these can be set as a unit fixing error. On the other hand, in the tip holder, since the tip holder 10 itself is replaced every time the tip wears and the performance deteriorates, the correction must be frequently performed. Therefore, in the present embodiment, the offset value specific to the tip holder 10 is measured in advance when the tip holder 10 is shipped and shipped, and the offset value (first offset value) is recorded in the tip holder 10 itself as described later. When the operator replaces the tip holder, the process proceeds to step S22, and the offset value of the new tip holder 10 is read. Then, the corresponding correction data is input by the correction value input unit 43 (step S23).

Thereafter, the control unit 42 adds the unit correction value and the correction value of the tip holder to X and Y, respectively, as the total correction value in step S24. In the above example, the total correction value is X ═ 4 and Y ═ 3, and the correction process ends.

If the correction data of the tip holder 10 is not input and the unit fixing error is not corrected and the blade is directly lowered, the blade is lowered to the position P1(X, Y) shown in fig. 17 at (4, 3). When only the unit fixing error is corrected, the blade is lowered to the position P3(X, Y) of fig. 17 to (1, 2). Therefore, in the scribing device 1, the unit correction value and the correction data of the tip holder are given. In this way, for a general scribe line below step S5 shown in fig. 16A, the scribe line can be started from the center coordinate P0.

Thereafter, when scribing a new brittle material substrate, scribing is performed by performing steps S5 to S9 after performing steps S0 to S3 in the flowchart shown in fig. 16A. That is, even if the brittle material substrate is changed after the offset of the scribing head is corrected, the substrate may be corrected once by detecting the amount of displacement of the substrate from the normal positioning position on the table when the substrate is replaced.

Next, when the tip holder 10 is replaced after the initial correction, as shown in fig. 16A, steps S1 to S4 and the flow from step S21 to S22 read out the correction value recorded in the new tip holder 10. Further, in step S23, the read correction data of the new tip holder 10 is input. Thereafter, in step S24, the correction value of the tip holder is added as a total correction value in combination with the cell correction value that has been set in the scribing device, and all corrections are completed without performing test scribing.

Therefore, in the actual scribing after the correction processing, general scribing can be performed by performing S5 to S9 following steps S1 to S3 shown in fig. 16A. That is, as in the prior art, the operator places the dummy substrate on the table, tentatively forms the scribe line on the dummy substrate, and after correcting the deviation of both the positioning position and the direction of the substrate, it is not necessary to perform a correction process of so-called canceling the offset generated due to the mounting offset of the tip holder (steps S5 'to S11'), thereby greatly reducing the correction work.

The measurement of the offset inherent to the tip holder performed at the time of shipment and shipment will be described. At this time, the scribing start position of the tip holder is confirmed using a device having a cell error of 0 or a device having a known cell error. Then, offset data is obtained from the scribe start position. In addition, the value from which it is eliminated is used as correction data.

Next, a method of recording the offset data will be described. In the present embodiment, as shown in fig. 18A and 18B, a code is recorded on the flat portion 11a or 11B of the tip holder 10. The code may be recorded by a one-dimensional code such as a barcode, but a two-dimensional code is preferable in order to reduce the recording area. For two-dimensional coding, more information can be recorded on a narrower area than for one-dimensional coding. Further, the two-dimensional code has a data restoring function, and even if contamination or partial data breakage occurs, it can be restored and read by the reading sensor. Fig. 18A and 18B are diagrams schematically showing the writing and reading of the two-dimensional code with respect to the tip holder 10. In fig. 18A, the recorded data is set by the controller 51 of the laser marker to form a pattern of a two-dimensional code. As data to be recorded, the kind of blade or offset data measured in advance is made into a two-dimensional code. Thereafter, the head 52 directly prints on the flat portion 11a or 11b of the tip holder 10. Fig. 9 and 10 show the two-dimensional code 17 printed on the flat portion 11a in this manner. Also, when the blade holder is replaced for blade replacement, the two-dimensional code is read by the reader 53 as shown in fig. 18B before a new blade holder is used. If so, the type of blade can be identified from the read data. Further, as described above, by inputting the offset value to the control unit of the scribing apparatus manually or automatically, the data correction process accompanying the tip holder replacement can be performed very easily.

In the present embodiment, the two-dimensional code is directly printed on the tip holder 10, but a label on which the two-dimensional code is printed may be attached. In the present embodiment, the two-dimensional code is printed on the flat portion 11a or 11b of the tip holder, but may be recorded on the inclined portion 16a or the flat portion 16b, or may be recorded on the surface of the cylindrical portion.

In the present embodiment, the type of blade and the offset data are recorded as the two-dimensional code, but the date of manufacture of the tip holder, the lot size, or the like may be recorded in addition to these data. Further, the recorder of the two-dimensional encoded pattern may be a recorder other than a laser marker, and a wireless portable reader may be used as the data reader.

Further, in the present embodiment, data unique to the tip holder is recorded as a two-dimensional code, but a data carrier of a close contact type or the like can be used as the recording medium. At this time, the data carrier is mounted on the flat portion 16b of the tip holder, and a reading/writing unit having data reading and writing functions is disposed in a portion of the tip holder which faces the data carrier. In this case, the read data is used without using a recorder, a reading sensor, or the like, for writing and reading the code.

In this embodiment, the bias value is recorded as a two-dimensional code on the tip holder. Alternatively, the data for canceling the offset value may be recorded in the tip holder, and a correction value for canceling the offset value may be input to the scribe device and corrected.

Next, a case where the present invention is applied to another type of scribing apparatus will be described. As another type of scribing device, there is a device that moves only in the x-axis direction and the y-axis direction without rotating the table. In addition, there is a scribing apparatus in which a scribing head is moved in the x-axis and y-axis directions. In these cases, it is necessary to change to θ correction and perform correction corresponding to θ by checking the alignment mark.

In the case where the scribing device in which the brittle material substrate 107 is directly placed on the moving stage is not provided on the moving stage 101 without providing the rotating stage, the angle θ cannot be corrected in step S2 of fig. 16A. At this time, if the correction processing is performed as in the above case, the scribe line is started from a desired position, for example, the center coordinate P0 of the alignment mark, but if the angular deviation is still present, the end point of the scribe line is deviated. In this case, the angular deviation can be eliminated by the straight line interpolation method as in the prior art.

Further, a multi-head scribing apparatus having a plurality of heads may be used. At this time, the position must be adjusted so as to conform to the correction data to eliminate the offset when each head is used. In addition, even in the case of a scribing device equipped with a pair of upper and lower scribing heads for simultaneously scribing the upper and lower surfaces of a panel substrate to which two brittle material substrates are bonded, the same tip holder can be used. Even in a scribing apparatus equipped with a scribing head in which the scribing head moves in the x-axis and y-axis directions together, the tip holder is held in the xy-plane so as to be rotatable, and the scribing line formed by the tip draws a curve, the correction of the scribing start position data can be easily performed in a short time after the tip is replaced by using the tip holder of the present invention.

Industrial applicability

The invention relates to a scribing device, a scribing method and a tip holder used for forming a scribing line on a brittle material substrate. Therefore, it is possible to easily start scribing from a desired position without measuring the offset inherent to the tip holder, and this is useful for the scribing step of the glass substrate.

Claims (11)

1. A tip holder for forming a scribe line for cutting a brittle material substrate, the tip holder having a holding portion for holding a tip holder and a roller blade for forming a scribe line, one end of the roller blade being inserted into an opening of the holding portion, and the other end of the roller blade being rotatably attached,

the one end has a mounting portion with one surface cut away in a manner including an inclined portion,

a part of the one end is made of a magnetic metal,

when the one end is inserted into the opening of the holding portion, the inclined portion of the tip holder is positioned by contacting with a parallel pin provided perpendicular to the central axis of the opening in the opening of the holding portion, and fixed by a magnet embedded in the opening of the holding portion,

the mounting portion further includes a flat portion continuous with the inclined portion and parallel to a central axis of the blade holder,

the blade holder further comprises a lower flat portion at the other end, the flat portion of the mounting portion and the lower flat portion are perpendicular to each other,

the parallel pins are disposed at positions spaced apart from the central axis of the opening.

2. The blade holder of claim 1 wherein the roller blade is integral with the blade holder.

3. The blade holder of claim 1 wherein an end corner of one end of said blade holder is chamfered.

4. The cartridge of claim 1, wherein said cartridge has a code on at least one side that records data inherent to said cartridge.

5. The cartridge of claim 4, wherein the code is a two-dimensional code.

6. The cartridge of claim 4, wherein said intrinsic data includes data indicative of a type of blade mounted.

7. The cartridge of claim 4, wherein the intrinsic data includes correction data to eliminate bias when scribing.

8. A tip holder for forming a scribe line for cutting a brittle material substrate, the tip holder including one end and the other end, and a roller tip for forming a scribe line rotatably attached to the other end,

a mounting portion having a surface cut out so as to include an inclined portion and a flat portion continuous to the inclined portion and parallel to the central axis,

a lower flat portion at the other end, the flat portion of the mounting portion and the lower flat portion being perpendicular to each other,

a part of the one end is made of a magnetic metal,

the end corner of said one end is chamfered,

the roller blade and the blade holder are integrated,

the blade holder has a code on at least one surface, the code recording data specific to the blade holder.

9. The cartridge of claim 8, wherein the code is a two-dimensional code.

10. The cartridge of claim 8, wherein said intrinsic data comprises data indicative of a type of blade mounted.

11. The cartridge of claim 8, wherein said intrinsic data includes correction data to eliminate bias during scribing.