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HK1025841B - 电磁对准和扫描装置 - Google Patents

电磁对准和扫描装置 Download PDF

Info

Publication number
HK1025841B
HK1025841B HK00103149.4A HK00103149A HK1025841B HK 1025841 B HK1025841 B HK 1025841B HK 00103149 A HK00103149 A HK 00103149A HK 1025841 B HK1025841 B HK 1025841B
Authority
HK
Hong Kong
Prior art keywords
scanning apparatus
electromagnetic alignment
alignment
electromagnetic
scanning
Prior art date
Application number
HK00103149.4A
Other languages
English (en)
Other versions
HK1025841A1 (zh
Inventor
Ebihara Akimitsu
Novak Thomas
Original Assignee
Nikon Corporation
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nikon Corporation filed Critical Nikon Corporation
Publication of HK1025841A1 publication Critical patent/HK1025841A1/zh
Publication of HK1025841B publication Critical patent/HK1025841B/zh

Links

HK00103149.4A 1994-06-27 1998-12-24 电磁对准和扫描装置 HK1025841B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US26699994A 1994-06-27 1994-06-27
US08266999 1994-06-27

Related Parent Applications (3)

Application Number Title Priority Date Filing Date
HK01101430.5A Division HK1032291B (zh) 1994-06-27 1998-12-24 电磁对准和扫描装置
HK01101433.2A Division HK1035432B (zh) 1994-06-27 1998-12-24 电磁对准和扫描装置
HK98115706.6A Addition HK1017824B (zh) 1994-06-27 1998-12-24 电磁对准和扫描装置

Related Child Applications (3)

Application Number Title Priority Date Filing Date
HK01101430.5A Addition HK1032291B (zh) 1994-06-27 1998-12-24 电磁对准和扫描装置
HK01101433.2A Addition HK1035432B (zh) 1994-06-27 1998-12-24 电磁对准和扫描装置
HK98115706.6A Division HK1017824B (zh) 1994-06-27 1998-12-24 电磁对准和扫描装置

Publications (2)

Publication Number Publication Date
HK1025841A1 HK1025841A1 (zh) 2000-11-24
HK1025841B true HK1025841B (zh) 2001-05-04

Family

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