[go: up one dir, main page]

HK1088955A - 投射光学系统、曝光装置及曝光方法 - Google Patents

投射光学系统、曝光装置及曝光方法 Download PDF

Info

Publication number
HK1088955A
HK1088955A HK06109259.1A HK06109259A HK1088955A HK 1088955 A HK1088955 A HK 1088955A HK 06109259 A HK06109259 A HK 06109259A HK 1088955 A HK1088955 A HK 1088955A
Authority
HK
Hong Kong
Prior art keywords
optical system
projection optical
lens
mirror
imaging
Prior art date
Application number
HK06109259.1A
Other languages
English (en)
Inventor
Yasuhiro Omura
Original Assignee
Nikon Corporation
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nikon Corporation filed Critical Nikon Corporation
Publication of HK1088955A publication Critical patent/HK1088955A/zh

Links

HK06109259.1A 2003-05-06 2004-05-06 投射光学系统、曝光装置及曝光方法 HK1088955A (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2003-128154 2003-05-06
JP2003-350647 2003-10-09
JP2003-364596 2003-10-24

Publications (1)

Publication Number Publication Date
HK1088955A true HK1088955A (zh) 2006-11-17

Family

ID=

Similar Documents

Publication Publication Date Title
US10156792B2 (en) Projection optical system, exposure apparatus, and exposure method
US9500943B2 (en) Projection optical system, exposure apparatus, and exposure method
CN101216682B (zh) 投影光学系统、曝光装置及曝光方法
HK1088955A (zh) 投射光学系统、曝光装置及曝光方法
HK1191102A (zh) 投影光学系统、曝光装置和曝光方法
HK1194477A (zh) 投影光学系统和曝光装置以及曝光方法
HK1194479A (zh) 投影光学系统和曝光装置以及曝光方法
HK1194478A (zh) 投影光学系统和曝光装置以及曝光方法