HK1084405B - Composition and method to achieve reduced thermal expansion in polyarylene networks - Google Patents

Description

The U:S. Government has a paid-up license in this invention and the right in limited circumstances to require the patent owner to license others on reasonable terms as provided by the terms of Cooperative Agreement No. 70NANB8H4013 awarded by NIST (Advanced Technology Program).

This invention was made with U.S. Government support under the above-referenced Cooperative Agreement awarded by NIST. The U.S. Government thus has certain rights in this invention.

Field of the Invention

The present invention relates to polyarylene oligomers and polymers that display reduced thermal expansion at high temperatures. The present invention also relates to integrated circuit articles made using polyarylene dielectrics with reduced thermal expansion at high temperatures.

Background of the Invention

The semiconductor industry's drive to continually improve performance and density has forced the use of advanced materials and interconnect structures. Interconnect performance requires the reduction of resistance and capacitance. Copper metallization was introduced in 1998 to reduce the resistance of interconnect wiring. Capacitance reduction or the introduction of low dielectric constant insulators, herein referred to as low k dielectrics, are needed for future performance enhancements.

For over 25 years, silicon dioxide has been the dielectric insulator of choice for the semiconductor industry. Silicon dioxide possesses excellent dielectric breakdown strength, a high modulus, good thermal conductivity, a low coefficient of thermal expansion, and excellent adhesion to metallic liners, plasma enhanced chemical vapor deposited (PECVD) barrier cap layers, and other like materials. However, with reduced ground rule dimensions and the need for improved performance, silicon dioxide is slowly being phased out and replaced with materials possessing lower permitivity to achieve reduced capacitance. For example, at the 180 nm technology node, fluorosilicate glass is replacing silicon dioxide in many applications.

At the 130 nm technology generation, "true" low k dielectrics are being implemented into semiconductor products. There are several candidate materials but the industry has focused on two primarily: spin-on organic polymers and carbon-doped PECVD silicon dioxide dielectrics.

Polymer dielectrics may be used as insulating layers between various circuits as well as layers within circuits in microelectronic devices, such as integrated circuits, multichip modules, and laminated circuit boards. The microelectronics fabrication industry is moving toward smaller geometries in its devices to enable lower power and faster speeds. As the conductor lines become finer and more closely packed, the requirements of the dielectrics between such conductors become more stringent.

While polymer dielectrics often provide lower dielectric constants than inorganic dielectrics, such as silicon dioxide, polymer dielectrics often present challenges to process integration during fabrication. For example, to replace silicon dioxide as a dielectric in integrated circuits, the polymer dielectric must be able to withstand processing temperatures during metallization and annealing steps of the process.

Preferably, the dielectric material should have a glass transition temperature greater than the processing temperature. The dielectric must also retain the desirable properties under device use conditions. For example, the dielectric should not absorb water which may cause an increase in the dielectric constant and potential corrosion of metal conductors.

WO 98/11149 discloses dielectric polymers, which are the reaction product of a cyclopentadienone functional compound and an acetylene functional compound and are useful for microelectronics fabrication.

One shortfall of polymer dielectrics, such as the polyarylene material described in WO 98/11149 , is its significant increase in the coefficient of thermal expansion, herein referred to as CTE, with increasing temperature. This significant increase in the CTE of polymer dielectrics with temperature results in a large mismatch in the CTE of the dielectric and the metal interconnect lines. Interconnect fabrication processes require multiple temperature excursions from 20°C to 400°C (and in cases 450°C). In the fabrication of a multilevel interconnect structures, it is common for the structure or article to be exposed to 400°-450°C for approximately 5-10 hours. The CTE mismatch between the polymer dielectric and metal lines (copper or aluminum) stresses barrier metal liner layers, potentially resulting in liner discontinuity (i.e., breaks in the liner layer). During reliability testing, the CTE mismatch manifests during thermal cycle testing where isolated via structures fail standard reliability qualification.

In view of the state of the art, there is a need for a modified polymer dielectric that reduces the mismatch between the CTE of the polymeric dielectric and a metal such as copper or aluminum over the entire processing range.

Summary of the Invention

The present invention relates to an integrated circuit article comprising a polymer dielectric that has a minimum mismatch between the coefficient of thermal expansion of the metal (e.g., copper or aluminum) and the polymer dielectric to prevent damage in the metal via structures during thermal cycling. Thus, according to a first embodiment, the present invention relates to an integrated circuit article comprising an active substrate including, at least transistors and a pattern of metal lines forming an electrical interconnect structure wherein the metal lines are at least partially separated by a polyarylene material. In the inventive integrated circuit article, the polyarylene material is a low-k dielectric that possesses a CTE of less than 115 ppm/°C over the temperature range from 350°C to 425°C, preferably less than 100 ppm/°C. The term "low-k' is used in the present invention to denote a dielectric material having a dielectric constant of less than 3.0, preferably less than 2.6. The polyarylene is the reaction product of 3,3'-(oxydi-1,4phenylene) bis (2,4,5-triphenylcyclopentadienone) and 1,3,5 tris(phenylethynyl)benzene in a molar ratio of from 0.8:1 to 0.9:1. The inventive integrated circuit article described in the first embodiment includes a polyarylene material which is the product of Diels Alder and phenyl acetylene cure reactions between at least one compound having two or more diene functional groups and at least one compound having two or more dienophile functional groups, wherein at least one of the compounds has three or more of said functional groups.

The second embodiment of the present invention is a cured polyarylene material which is the product of 3,3'-(oxydi-1,4-phenylene)bis(2,4,5)-triphenylcyclopentadienone) and 1,3,5-tris(phenyethynyl)benzene in a molar ratio of 0.8:1 to 0.9:1 which has been cured at a temperature of at least 405°C for at least one how, said polyarylene material having a coefficient of thermal expansion as determined by thermal mechanical analysis of less than 110 ppm/°C over a temperature range of 350°-425°C.

A third embodiment of the current invention is a cured polyarylene material comprising the reaction product of 3,3'-(oxydi-1,4-phenylene)bis(2,4,5-triphenylcyclopentadienone) and 1,3,5-tris(phenylethynyl)benzene wherein the stoichiometric molar ratio of the two monomers is between 0.8:1 and 0.9:1, respectively, wherein said polyarylene polymer has been cured at a temperature of 410°C to 425°C for a time period of from 40 to 75 minutes, wherein said polyarylene material possesses a coefficient of thermal expansion as determined by thermal mechanical analysis of less than 110 ppm/°C over a temperature range of 350°-425°C.

More specifically, the polyarylene material described in the second embodiment is a material wherein the preferred cure profile is 410°C for 90 minutes or 415°C for 60 minutes.

A fourth embodiment of the present invention relates to an integrated circuit article comprising an active substrate containing transistors, an electrical interconnect structure comprising a pattern of metal lines, and one of the polyarylene material described in the second embodiment at least partially separating the lines.

Brief Description of the Drawings

The sole figure is a plot of the coefficient of thermal expansion (CTE) versus temperature for a series of polyarylene material dielectric samples as a function of chemical composition (i.e., molar stoichiometry) and cure conditions.

Detailed Description of the Invention

The present applicants have unexpectedly discovered that an integrated circuit article requires a polymer dielectric that has a minimum mismatch between the coefficient of thermal expansion of the metal and the polymer dielectric to prevent damage in the metal during thermal cycling. Thus, according to a first embodiment, the present invention relates to an integrated circuit article comprising an active substrate including at least transistors and a pattern of metal lines forming an electrical interconnect structure wherein the metal lines are at least partially separated by a polyarylene material. It should be noted that the terms "polyarylene" and "polyphenylene" are equivalently used throughout the present application. In this inventive integrated circuit article, the polyarylene material dielectric possesses a CTE of less than 115 ppm/°C over the temperature range from 350°C to 425°C, preferably less than 100 ppm/°C.

The term "polyarylene" is used herein to denote a material which predominately comprises aromatic rings directly bonded to other aromatic rings. These aromatic rings may be phenyl rings; substituted phenyl rings; fused aromatic systems such as naphthalene, anthracene, phenanthrene, fluorene, and substituted fused aromatic rings. There may be linking groups in the polyarylene polymer chain, such as oxygen, sulfur, sulfones, sulfoxides, amines, phosphorous, silicon, aliphatic carbon groups, carbonyl, carboxylate, and the like, separating some of these, aromatic rings. Substituent groups on the aromatic rings may be essentially inert or may be reactive species which can further react and/or link two or more polyarylene polymer chains together.

The polyarylene is the reaction product of compounds of the formulas:

1. (a) a biscyclopentadienone of the formula:
2. (b) a polyfunctional acetylene of the formula:

where R₁ is inertly-substituted aromatic moiety, R² is inerthy-substituted aromatic moiety, Ar¹ and Ar⁸ are independently an unsubstituted aromatic moiety or inertly substituted aromatic moiety and y is 3. The definition of aromatic moiety includes phenyl, polyaromatic and fused aromatic moieties. Inertly-substituted means the substituent groups are essentially inert to the cyclopentadienone and acetylene polymerization reactions and do not readily react under the conditions of use of the cured polymer in microelectronic devices with environmental species, such as water. Such substituent groups include, for example, F, Cl, Br, -CF₃, -OCH₃, -OCF₃, -O-Ph, an alkyl containing from 1 to 8 carbon atoms, and a cycloalkyl containing from 3 to 8 carbon atoms.

A polyfunctional compound containing two or more aromatic cyclopentadienone moieties may be made by the condensation of benzils with benzyl ketones using conventional methods. Exemplary methods are disclosed, for example, in Kumar, et al. Macromolecules, 1995, 28, 124-130; Ogliaruso, et al., J. Org. Chem., 1965, 30, 3354; Ogliaruso, et al., J. Org. Chem., 1963, 28, 2725; and U.S. Patent No. 4,400,540 . The contents of each of the foregoing disclosures are incorporated herein by reference.

A polyfunctional compound containing two or more aromatic acetylene moieties may be made by conventional methods. An aromatic compound may be halogenated and then reacted with the appropriate substituted acetylene in the presence of an aryl ethynylation catalyst to replace the halogen with the substituted acetylene compound. The polymerization steps may be carried out by using the process disclosed, for example, in WO 98/11149 , the content of which is incorporated herein by reference.

The polyarylenes may be applied to the integrated circuit device according to any known process, such as, for example, solution deposition, liquid-phase epitaxy, screen printing, melt-spinning, dip coating, roll coating, spinning, brushing (for example, as a varnish), spray coating, powder coating, plasma-deposition, dispersion-spraying, solution -casting, slurry-spraying, dry-powder-spraying, fluidized bed techniques, welding, explosion methods including the Wire Explosion Spraying Method and explosion bonding, press bonding with heat, plasma polymerization, dispersion in a dispersion media with subsequent removal of dispersion media, pressure bonding, heat bonding with pressure, gaseous environment vulcanization, extruding molten polymer, hot-gas welding, baking, coating and sintering. Mono- and multilayer films can also be deposited onto a substrate using a Langmuir-Blodgett technique at an air-water or other interface.. Preferably, the curable polyarylene oligomer solution is spin coated onto the substrate from an organic solvent.

Suitable organic solvents include, but are not limited to: mesitylene, pyridine, triethylamine, N-methylpyrrolidinone (NMP), methyl benzoate, ethyl benzoate, butyl benzoate, cyclopentanone, cyclohexanone, cycloheptanone, cyclooctanone, cyclohexylpyrrolidinone, and others or hydroxy ethers, such as dibenzylethers, diglyme, triglyme, diethylene glycol ethyl ether, diethylene glycol methyl ether, dipropylene glycol methyl ether, dipropylene glycol dimethyl ether, toluene, xylene, benzene, dipropylene glycol monomethyl ether acetate, dichlorobenzene, propylene carbonate, naphthalene, diphenyl ether, butyrolactone, dimethylacetamide, dimethylformamide and mixtures thereof.

The preferred solvents that may be employed in the present invention are mesitylene, N-methylpyrrolidinone (NMP), gamma-butyrolactone, diphenylether, cyclohexanone, and mixtures thereof.

After coating, the oligomer or polymer is preferably exposed to temperatures sufficient to advance the oligomer or polymer to a higher molecular weight, and in the most preferred examples, to a cross-linked polymer with the desired coefficient of thermal expansion.

The integrated circuit article of the present invention may be made according to any known method in the art, such as those fabricated with silicon or gallium arsenide. An integrated circuit would, typically, have multiple layers of metal conductors separated by one or more insulating materials. The polyarylene can be used as insulation between discrete metal conductors in the same layer, and/or between conductor levels of the interconnect structure. The polyarylene can also be used in combination with other materials such as other spin on organics, inorganics, or organic-inorganic hybrids, other CVD materials with the composition of SiCOH, fluorinated spin-on glass (FSG), SiO₂, or Si₃N₄, in a composite interconnect structure. For example, integrated circuit devices may be made as is disclosed in U.S. Patent No. 5,550,405 ; U.S. Patent No. 5,591,677 ; Hayeshi, et al., 1996 Symposium on VLSI Technology Digest of Technical Papers, pg. 88-89; and WO 98/11149 .

The inventive integrated circuit articles can be made by any known process such as either a "damascene" metal inlay or subtractive metal patterning scheme. Processes for fabricating damascene lines and vias are known in the art. See, for example, U.S. Patent Nos. 5,262,354 and 5,093,279 .

Patterning of the material may be done with typical reactive ion etch (RIE) procedures using oxygen, argon, nitrogen, helium, carbon dioxide, fluorine-containing compounds, or mixture of these and other gases, using a photoresist "softmask", such as, for example, an epoxy novolac, or a photoresist in combination with an inorganic "hardmask" such as, fro example, SiO₂, Si₃N₄, or a metal.

The polyarylene may be used in conjunction with aluminum (Al), Al alloys, copper (Cu), Cu alloys, gold (Au), silver (Ag), tungsten (W) and other common metal conductor materials (for conductive lines and plugs) deposited by physical vapor deposition, chemical vapor deposition, evaporation, electroplating, electroless deposition, and other deposition methods. Additional metal layers to the basic metal conductors, such as tantalum, titanium, tungsten, chromium, cobalt, their alloys, or their nitrides, may be used to fill holes, enhance metal fill, enhance adhesion, provide a barrier, or modify metal reflectivity.

Depending on fabrication architecture, either metal or the dielectric material of the present invention may be removed or planarized using chemical-mechanical polishing techniques.

The applicants have unexpectedly discovered that, for integrated circuit articles, a maximum coefficient of thermal expansion of the polyarylene dielectric of less than 110 ppm/°C over the temperature range from 200°C to 425°C, preferably less than 100 ppm/°C, as measured by thermal mechanical analysis of thick films in tension under inert conditions, is needed in order for the articles to withstand thermal cycling during the build and subsequent thermal cycle reliability testing without generating defects or failures in the metal via structures.

It was discovered that a unique combination of a specific polyarylene composition and cure conditions (i.e., heat treatment) yields a significantly reduced coefficient of thermal expansion for the polyarylene material dielectric. To achieve the polyarylene compositions, a bifunctional diene compound (preferably a biscyclopentadienone) and a tri- or higher functional dienophile (preferably a trisacetylene) are reacted. The molar ratios of the monomers are modified leading to variations in crosslink density of the resultant cured resin. The crosslink density of the resultant cured resin increased and the coefficient of thermal expansion at high temperatures decreased.

In addition, cure conditions, such as temperature and time of cure have an effect on the crosslink density and therefore affect the coefficient of thermal expansion at high temperatures (>300°C). For instance, if the cure temperature is not sufficient to allow the crosslinking reactions to go to completion, the crosslink density of the network is lower and therefore the coefficient of thermal expansion at high temperatures is higher. As a result, the coefficient of thermal expansion can be minimized by controlling the cure temperature and time. That is, higher cure temperatures and longer cure times can lead to a lower coefficient of thermal expansion at temperatures >300°C. In order to achieve the lowest CTE high temperatures, the cure temperature is preferably no less than 405°C, more preferably from about 405° to about 415°C for a time period of from about 60 to about 100 minutes, and even more preferably at a temperature from about 410° to about 420°C for a time period of from about 40 to about 70 minutes. As an example, certain samples of the low CTE formulation cured at 400°C for 45 minutes have a CTE of 120 +/- 5 at 400°C, whereas, samples of the same formulation cured at 410°C for 90 minutes have a CTE of 93 +/-5 at 400°C. the following examples are set forth to illustrate the present invention and should not be constructed to limit its scope. In the examples, all parts and percentages are by weight unless otherwise indicated.

EXAMPLE 1 Preparation of Cyclopentadienone Compounds and Acetylene Compounds 1,3,5-Tris(phenylethyl)benzene (Compound A)

Triethylamine (375 g), triphenylphosphine (4.7865 g), palladium acetate (1.0205 g), and N, N-dimethyl formamide (2000 mL) were charged to a 5 liter 3-necked round bottom flask equipped with a thermocouple, an overhead mechanical stirrer, a condenser, an addition funnel, and a heating mantle with a temperature controller. This mixture was stirred for 5 minutes to dissolve the catalyst. Then, diethylhydroxylamine (5 g), 1,3, 5-tribromobenzene (190 g) and phenylacetylene (67.67 g) were added. The reactor was purged with nitrogen for 15 minutes, and then heated to 70°C while maintaining a nitrogen atmosphere. After heating at 70°C for 30 minutes, phenylacetylene (135.33 g) was slowly added dropwise over a period of 1 hour, and the temperature increased to 80°C. Heating was continued an additional 9 hours. The reaction was then cooled to room temperature and water (1 liter) was added which precipitates crude product. The product was filtered, washed three times with 500 mL portions of water, then once with 500 mL of cyclohexane. The crystals were vacuum dried at 75°C overnight to give 226.40 g (99.1 percent yield) that was 97.25 area percent pure by gas chromatography. The crystals were dissolved in toluene (1800 mL), refiltered through silica gel, and the solvent removed on a rotary evaporator to give 214.2 g (94.2 percent yield) that was 99.19 area percent pure by gas chromatography. The residue was then recrystallized from a mixture of toluene (375 mL) and 2-propanol (696 mL). The white crystals were filtered, rinsed with a mixture of toluene (100 mL) and 2-propanol (400 mL), and vacuum dried at 75°C overnight to give 1,3,5-tris(phenylethynyl)benzene (190.0 g, 83.91 percent yield) that was 99.83 area percent pure by gas chromatography. Additional recrystallizations from toluene/isopropariol gives material of acceptable organic and ionic purity.

3.3'-(Oxydi-1,4-phenylene)bis(2,4,5-triphenylcyclopentadieone) (Compound C) (a) Preparation of 4.4'-diphenylaceyldiphenyl ether

To a slurry of aluminum chloride (97.9 g, 0.734 mol) in methylene dichloride (200 mL) at 0°C was added, dropwise, a solution of diphenyl ether (50.0 g, 0.294 mol) and phenylacetyl chloride (102 g, 0.661 mol) in methylene chloride (50 mL), over a 30 minute period. When the addition was completed, the reaction mixture was allowed to warm to ambient temperature and stirred overnight. The reaction mixture was carefully poured, with stirring, into 1.5 kg of ice/water. Methylene chloride (1500 mL) was added to dissolve the solids and the layers were separated. The organic layer was filtered through celite, then concentrated to dryness. Recrystallization from toluene gave 110 g (92 percent) of the title compound as light tan prisms.

(b) Preparation of 4.4'-Bis(phenylglyoxaloyl)diphenyl Ether

Aqueous HBr (97 mL of a 48 weight percent solution) was added to a slurry of 4.4'-diphenylacetyldiphenyl ether (50.0 g, 0.123 mol) in DMSO (400 mL) and the resulting mixture was heated to 100°C for two hours, then cooled to ambient temperature. The reaction mixture was partitioned between toluene (500 mL) and water (750 mL). The organic layer was washed with water (3 x 250 mL), followed by washing with brine, and concentration to give a viscous, bright yellow oil which solidified upon standing at ambient temperature. Recrystallization from ethanol gave 35.9 g (67 percent) of the title compound as bright yellow cubes.

(c) Preparation of Compound C

To a nitrogen purged 5-L Morton flask equipped with a thermocouple, reflux condenser with nitrogen inlet, mechanical stirrer, and addition funnel was added, 195.4 g (0.4498 mol, 1.0 eq) 4.4'-bis(phenylglyoxyaloyl)diphenyl ether, 193.9 g diphenylacetone (0.9220 mol, 2.05 eq), and 2.5 liter deoxygenated ethanol. The mixture was heated to reflux, at which point a homogeneous solution was attained, and the solution was sparged with nitrogen for 30 minutes. To the addition funnel was added a solution containing 25.2 g KOH (0.4498 mol, 1.0 eq), 200 mL ethanol, and 25 mL water. The temperature was reduced to 74°C and the KOH solution was added rapidly over 5 minutes. An exothermic reaction was quickly established and maintained reflux until ¾ of the solution was added, whereafter the temperature begins to decrease. A dark purple color was observed immediately upon addition of base and solid was observed before addition was complete. After complete addition, the heterogeneous solution was heated at a strong reflux for 15 minutes and much solid product was formed. The mixture was allowed to cool to 25°C and 29.7g glacial acetic acid (0.4984 mol, 1.1 eq.) was added and stirred for 30 minutes. The crude product was isolated by filtration and washed in the filter funnel with filter water, 3 liter EtOH, 2 liter MeOH, and dried for 12 hours at 60°C to 90°C under vacuum giving 323 g (92 percent) crude DPO-CPD, which was 94 percent pure by LC. The cured material was dissolved in HPLC grade methylene chloride (10 weight percent), transferred to a 5 liter Morton flask equipped with a bottom flush valve and mechanical strirrer, and washed vigorously for 10 to 90 minutes, 2 to 7 times with equal volume portions of low ionic water. The CH₂Cl₂ solution was then flashed through a 5 cm column containing 75g of silica gel in CH₂Cl₂. The column was washed with an additional 1 liter CH₂Cl₂ at which point the filtrate was essentially clear. The solution was evaporated to dryness and re-dissolved in THF and evaporated again to remove the bulk of the residual methylene chloride. The powder was transferred to a 5 liter flask equipped with addition funnel and Friedrichs reflux condenser, and dissolved (0.07 to 0.12 grams per mL) in deoxygenated HPLC THF at reflux. An additional 1 liter THF was then added and a nitrogen sparge tube was inserted into the solution. The solution was sparged with nitrogen for three hours and the THF was condensed at 45°C to 50°C while residual methylene chloride was removed by distillation. A distillation head was attached and 700 mL to 1 liter THF was removed. The solution was then allowed to slowly cool over several hours to room temperature, then cooled with an ice bath to below 10°C during which time crystallization occurs. The crystals were isolated using a 5 mm PTFE filter in a 4 liter Millipore clamp-frit suction filtration flask. The crystals were then washed with 1 liter MeOH and dried over night at 80°C to 90°C under vacuum giving 70 to 85 percent yield DPO-CPD with 99 percent LC purity, mp 270°C.

EXAMPLE 2 Preparation of a Series of Oligomer Solutions from 3,3'-(oxydi-1,4-phenylene)bis(2,4,5-triphenylcyclopentadienone)(Compound C) and 1,3,5-Tris(phenylethynyl)benzene (Compound A) and property measurements.

A series of Oligomer Solutions from 3,3'-(oxydi-1,4-phenylene)bis(2,4,5-triphenylcyclopentadienone) (Compound C) and 1,3,5-Tris(phenylethynyl)benzene (Compound A) , wherein the molar ratio of the components was varied, such that the moles of Compound C are equal to or less than the moles of Compound A, specifically the molar ratios used to prepare the oligomer solutions varied from 1:1 (C:A) to 0.8:1(C:A). The monomers were reacted in gamma-butyrolactone at 30 percent solids by heating to 200°C for a period of 24-48 hours. The solutions were cooled to approximately 130°C then diluted to 20 percent solids with cyclohexanone. The solutions were then allowed to cool to room temperature.

The coefficient of thermal expansion of the cured films was measured using a thermal mechanical analyzer with a quartz assembly in tension mode. Films of 9-17 microns were prepared by coating multiple layers of the oligomer solution onto a wafer followed by a 400°C - 5 minute hot plate bake (under a Nitrogen purge) of each layer prior to depositing the next layer. After the desired thickness was achieved the films were cured (on wafer) in an oven under Forming gas for the specified cure time and temperature. After curing, the samples were placed in dilute 100:1 water:HF to promote delamination of the film from the wafer. The films were then rinsed with deionized water and dried in a vacuum oven at ∼80C for ∼1 hour.

The films were then cut into strips of ∼2 mm x 15 mm and loaded into the thermal mechanical analyzer quartz tension assembly. The films were heated from ∼50°C to 430°C at 5°C/minute and the expansion was measured.

An example of the relationship between monomer ratio and cure conditions on the CTE at 400°C is illustrated in Table 1. Table 1

Sample	Molar ratio of compound C:A	Cure Temperature (°C)	Cure Time (min.)	CTE at 400°C (ppm/°C)
A	1:1	400	45	139 +/- 6
B	1:1	415	60	117 +/-5
C	0.9:1	400	45	121 +/- 4
D	0.9:1	400	90	106 +/- 4
E	0.9:1	410	60	101 +/- 2
F	0.9:1	410	90	93 +/- 1
G	0.9:1	415	60	94 +/- 3
H	0.9:1	415	90	89 +/-4
I	0.8:1	415	60	95 +/- 4

While the present invention has been particularly shown and described with respect to preferred embodiments thereof, it will be understood by those skilled in the art that the foregoing and other changes in forms and details may be made within the scope of the appended claims.

Claims (6)

1. An integrated circuit article comprising an active substrate including at least transistors, an electrical interconnect structure comprising a pattern of metal lines, and a polyarylene material having a coefficient of thermal expansion, as determined by thermal mechanical analysis, of less than 115ppm/°C over a temperature range of 350°C-425°C wherein the polyarylene is the reaction product of 3,3'-(oxydi-1,4phenylene)bis(2,4,5-triphenylcyclopentadienone) and 1,3,5 tris(phenylethynyl)benzene in a molar ratio of from 0.8:1 to 0.9:1.
2. A cured polyarylene which is the reaction product of 3,3'-(oxydi-1,4phenylene)bis(2,4,5-triphenylcyclopentadienone) and 1,3,5 tris(phenylethynyl)benzene in a molar ratio of from 0.8:1 to 0.9:1; which has been cured at a temperature of at least 405°C for at least one hour; which has a coefficient of thermal expansion, as determined by thermal mechanical analysis, of less than 110 ppm/°C over a temperature range of 350-425°C.
3. The cured polyarylene of Claim 2 wherein the molar ratio of (3,3'- (oxydi-1, 4-phenylene) bis (2,4, 5-triphenylcyclopentadienone) to 1, 3,5-tris (phenylethynyl) benzene is about 0.9:1.
4. The cured polyarylene of Claim 2 wherein the cure is at a temperature from 405 to 410°C for a time period of 60 to 100 minutes.
5. A cured polyarylene which is the reaction product of 3,3'-(oxydi-1,4phenylene)bis(2,4,5-triphenylcyclopentadienone) and 1,3,5 tris(phenylethynyl)benzene in a molar ratio of from 0.8:1 to 0.9:1; which has been cured at a temperature of from 410°C to 425°C for a time period of from 40 to 75 minutes; which has a coefficient of thermal expansion, as determined by thermal mechanical analysis, of less than 110 ppm/°C over a temperature range of 350-425°C
6. An integrated circuit article according to claim 1, wherein the polyarylene material is a polyarylene in accordance with Claim 2.