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HK1040075A1 - 与一垂直介面共容的开启系统 - Google Patents

与一垂直介面共容的开启系统 Download PDF

Info

Publication number
HK1040075A1
HK1040075A1 HK02101411.7A HK02101411A HK1040075A1 HK 1040075 A1 HK1040075 A1 HK 1040075A1 HK 02101411 A HK02101411 A HK 02101411A HK 1040075 A1 HK1040075 A1 HK 1040075A1
Authority
HK
Hong Kong
Prior art keywords
opening system
system compatible
vertical interface
configurations
interface
Prior art date
Application number
HK02101411.7A
Other languages
English (en)
Inventor
C. Bonora Anthony
J. Fosnight William
S. Martin Raymond
Original Assignee
Asyst Technologies, Inc.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Asyst Technologies, Inc. filed Critical Asyst Technologies, Inc.
Publication of HK1040075A1 publication Critical patent/HK1040075A1/zh

Links

Classifications

    • H10P95/00—
    • H10P72/3406—
    • H10P72/3408—
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S414/00—Material or article handling
    • Y10S414/135—Associated with semiconductor wafer handling
    • Y10S414/139—Associated with semiconductor wafer handling including wafer charging or discharging means for vacuum chamber
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S414/00—Material or article handling
    • Y10S414/135—Associated with semiconductor wafer handling
    • Y10S414/14—Wafer cassette transporting

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Devices For Use In Laboratory Experiments (AREA)
  • Casings For Electric Apparatus (AREA)
  • Pressure Vessels And Lids Thereof (AREA)
HK02101411.7A 1998-07-13 1999-07-12 与一垂直介面共容的开启系统 HK1040075A1 (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US09/115,526 1998-07-13
US09/115,526 US6220808B1 (en) 1998-07-13 1998-07-13 Ergonomic, variable size, bottom opening system compatible with a vertical interface
PCT/US1999/015691 WO2000002804A1 (en) 1998-07-13 1999-07-12 Opening system compatible with a vertical interface

Publications (1)

Publication Number Publication Date
HK1040075A1 true HK1040075A1 (zh) 2002-05-24

Family

ID=22361955

Family Applications (1)

Application Number Title Priority Date Filing Date
HK02101411.7A HK1040075A1 (zh) 1998-07-13 1999-07-12 与一垂直介面共容的开启系统

Country Status (7)

Country Link
US (1) US6220808B1 (zh)
EP (1) EP1133442A4 (zh)
JP (1) JP2002520831A (zh)
KR (1) KR100616125B1 (zh)
HK (1) HK1040075A1 (zh)
TW (1) TW434167B (zh)
WO (1) WO2000002804A1 (zh)

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US6615113B2 (en) 2001-07-13 2003-09-02 Tru-Si Technologies, Inc. Articles holders with sensors detecting a type of article held by the holder
US6935830B2 (en) * 2001-07-13 2005-08-30 Tru-Si Technologies, Inc. Alignment of semiconductor wafers and other articles
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US7100340B2 (en) * 2001-08-31 2006-09-05 Asyst Technologies, Inc. Unified frame for semiconductor material handling system
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US7217076B2 (en) 2001-08-31 2007-05-15 Asyst Technologies, Inc. Semiconductor material handling system
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DE10204408B4 (de) * 2002-02-04 2007-02-15 Promos Technologies, Inc. Vorrichtung und Verfahren zur Verhinderung einer Verschmutzung eines Substratpositionsaufzeichnungssystems in einem SMIF-System mit korrodierenden Gasen, die sich auf den Substraten befinden
US6726429B2 (en) * 2002-02-19 2004-04-27 Vertical Solutions, Inc. Local store for a wafer processing station
JP4091380B2 (ja) * 2002-08-29 2008-05-28 東京エレクトロン株式会社 被処理体基板を収容した複数種類のカセットに対応可能なロードポート
DE10250353B4 (de) * 2002-10-25 2008-04-30 Brooks Automation (Germany) Gmbh Einrichtung zur Detektion von übereinander mit einem bestimmten Abstand angeordneten Substraten
US6918737B2 (en) * 2002-10-31 2005-07-19 Solo Cup Company System and method for stacking a predetermined number of nestable objects
JP3916148B2 (ja) * 2002-11-15 2007-05-16 Ｔｄｋ株式会社 ウェハーマッピング機能を備えるウェハー処理装置
US6984839B2 (en) * 2002-11-22 2006-01-10 Tdk Corporation Wafer processing apparatus capable of mapping wafers
US6679672B1 (en) * 2003-03-10 2004-01-20 Syracuse University Transfer port for movement of materials between clean rooms
US7607879B2 (en) * 2004-06-15 2009-10-27 Brooks Automation, Inc. Substrate processing apparatus with removable component module
JP4012189B2 (ja) * 2004-10-26 2007-11-21 Ｔｄｋ株式会社 ウエハ検出装置
US7410340B2 (en) * 2005-02-24 2008-08-12 Asyst Technologies, Inc. Direct tool loading
JP4237714B2 (ja) * 2005-03-08 2009-03-11 平田機工株式会社 駆動部隔離ｆｏｕｐオープナ
US7513822B2 (en) 2005-06-18 2009-04-07 Flitsch Frederick A Method and apparatus for a cleanspace fabricator
US11024527B2 (en) 2005-06-18 2021-06-01 Frederick A. Flitsch Methods and apparatus for novel fabricators with Cleanspace
US9339900B2 (en) * 2005-08-18 2016-05-17 Futrfab, Inc. Apparatus to support a cleanspace fabricator
US9059227B2 (en) 2005-06-18 2015-06-16 Futrfab, Inc. Methods and apparatus for vertically orienting substrate processing tools in a clean space
US10627809B2 (en) 2005-06-18 2020-04-21 Frederick A. Flitsch Multilevel fabricators
US9457442B2 (en) * 2005-06-18 2016-10-04 Futrfab, Inc. Method and apparatus to support process tool modules in a cleanspace fabricator
US9159592B2 (en) 2005-06-18 2015-10-13 Futrfab, Inc. Method and apparatus for an automated tool handling system for a multilevel cleanspace fabricator
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KR102110585B1 (ko) * 2007-05-17 2020-05-13 브룩스 오토메이션 인코퍼레이티드 측면 개방형 기판 캐리어 및 로드 포트
TWI475627B (zh) 2007-05-17 2015-03-01 布魯克斯自動機械公司 基板運送機、基板處理裝置和系統、於基板處理期間降低基板之微粒污染的方法，及使運送機與處理機結合之方法
US20080298935A1 (en) * 2007-06-04 2008-12-04 Michael Lering Wafer Cassette, Wafer Cassette Pod and Minienvironment Chamber Loadport Arrangement with a Minienvironment Chamber and a Wafer Cassette Pod with a Wafer Cassette
US9852936B2 (en) * 2015-01-29 2017-12-26 Taiwan Semiconductor Manufacturing Co., Ltd. Load port and method for loading and unloading cassette
WO2016140920A1 (en) * 2015-03-02 2016-09-09 Delaware Capital Formation, Inc. Customizable mounting interface for a sealed transfer port
JP2020520309A (ja) 2017-05-08 2020-07-09 デラウェア・キャピタル・フォーメイション・インコーポレーテッドＤｅｌａｗａｒｅ Ｃａｐｉｔａｌ Ｆｏｒｍａｔｉｏｎ Ｉｎｃｏｒｐｏｒａｔｅｄ カバーを有するアクセスポート
US12508726B2 (en) * 2021-02-12 2025-12-30 Hine Automation, Llc Method for improved detection of anomalous substrates in automated material-handling systems

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Also Published As

Publication number Publication date
KR20010074712A (ko) 2001-08-09
WO2000002804A9 (en) 2000-07-27
TW434167B (en) 2001-05-16
EP1133442A1 (en) 2001-09-19
US6220808B1 (en) 2001-04-24
WO2000002804A1 (en) 2000-01-20
EP1133442A4 (en) 2005-01-19
JP2002520831A (ja) 2002-07-09
KR100616125B1 (ko) 2006-08-28

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