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GB879256A - Improvements in or relating to vaporisation of metals - Google Patents

Improvements in or relating to vaporisation of metals

Info

Publication number
GB879256A
GB879256A GB31217/56A GB3121756A GB879256A GB 879256 A GB879256 A GB 879256A GB 31217/56 A GB31217/56 A GB 31217/56A GB 3121756 A GB3121756 A GB 3121756A GB 879256 A GB879256 A GB 879256A
Authority
GB
United Kingdom
Prior art keywords
vapour
wire
filament
metal
droplet
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB31217/56A
Inventor
Leslie Arthur Holland
Laurence Laurenson
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Edwards High Vacuum Ltd
Original Assignee
Edwards High Vacuum Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Edwards High Vacuum Ltd filed Critical Edwards High Vacuum Ltd
Priority to GB31217/56A priority Critical patent/GB879256A/en
Priority to US689381A priority patent/US3056740A/en
Priority to DEE14787A priority patent/DE1242429B/en
Priority to FR1184364D priority patent/FR1184364A/en
Publication of GB879256A publication Critical patent/GB879256A/en
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/28—Vacuum evaporation by wave energy or particle radiation
    • C23C14/30—Vacuum evaporation by wave energy or particle radiation by electron bombardment
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/305—Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating, or etching
    • H01J37/3053—Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating, or etching for evaporating or etching

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Toxicology (AREA)
  • Plasma & Fusion (AREA)
  • Analytical Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Physical Vapour Deposition (AREA)

Abstract

879,256. Coating by vapour deposition. EDWARDS HIGH VACUUM Ltd. Oct. 2, 1957 [Oct. 12, 1956], No: 31217/56. Class 82(2) [Also in Groups XI, XXVIII and XL(a)] A source of metal vapour for use in vacuum metallization apparatus comprises means for feeding a metal wire downwardly on to or adjacent a cooled surface and means providing electrons whch bombard the end of the wire to produce a molten droplet emitting metal -vapour, said droplet adhering to the portion of the cooled surface in proximity to the end of the wire and becoming suspended on said portion. As shown, metal wire 1 is fed through the hollow core of positive water-cooled block 4 from which it emerges to be heated by electron bombardment from circular filament 5, vapour being emitted from droplet 7. Negative ring shield 8 surrounds the filament and prevents electron bombardment of nearby positive fittings. An arc discharge may be used instead of, or in addition to, the filament source of electrons: the arc may be formed between block 4 and a pointed tungsten rod acting as cathode. Wires which may be evaporated include those of titanium, aluminium, copper and nickel-chromium alloy. Objects to be coated may be mounted statically or on rotating jigs. Specification 754,102 is referred to.
GB31217/56A 1956-10-12 1956-10-12 Improvements in or relating to vaporisation of metals Expired GB879256A (en)

Priority Applications (4)

Application Number Priority Date Filing Date Title
GB31217/56A GB879256A (en) 1956-10-12 1956-10-12 Improvements in or relating to vaporisation of metals
US689381A US3056740A (en) 1956-10-12 1957-10-10 Vapourisation of metals
DEE14787A DE1242429B (en) 1956-10-12 1957-10-11 Device for vacuum evaporation of metallic layers by means of electron bombardment
FR1184364D FR1184364A (en) 1956-10-12 1957-10-12 Source of metal vapor, especially for diffusion vacuum pumps and method of operation thereof

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB31217/56A GB879256A (en) 1956-10-12 1956-10-12 Improvements in or relating to vaporisation of metals

Publications (1)

Publication Number Publication Date
GB879256A true GB879256A (en) 1961-10-11

Family

ID=10319789

Family Applications (1)

Application Number Title Priority Date Filing Date
GB31217/56A Expired GB879256A (en) 1956-10-12 1956-10-12 Improvements in or relating to vaporisation of metals

Country Status (4)

Country Link
US (1) US3056740A (en)
DE (1) DE1242429B (en)
FR (1) FR1184364A (en)
GB (1) GB879256A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1771629B1 (en) * 1968-06-19 1971-07-29 Heraeus Gmbh W C EVAPORATION DEVICE FOR ALUMINUM

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL282934A (en) * 1961-09-07
US3156406A (en) * 1962-03-26 1964-11-10 Varian Associates High vacuum pumping method and apparatus
US3358910A (en) * 1964-11-16 1967-12-19 Nippon Electric Co Vacuum pump
DE4201584C1 (en) * 1992-01-22 1993-04-15 Leybold Ag, 6450 Hanau, De
RU2596533C2 (en) * 2014-10-28 2016-09-10 Федеральное государственное бюджетное образовательное учреждение высшего профессионального образования "Ульяновский государственный технический университет" Cathode of electric arc evaporator and preparation method thereof

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE661185C (en) * 1936-02-01 1938-06-13 Bernhard Berghaus Method and device for the production of metallic coatings from metals vaporized by means of an electric arc in a chamber
GB505135A (en) * 1937-03-25 1939-05-05 Bernhard Berghaus Improvements in and relating to the coating of articles by cathode disintegration
GB513257A (en) * 1938-03-02 1939-10-09 Paul Alexander Process of and apparatus for deposition of metals by thermal evaporation in vacuum
US2717962A (en) * 1944-03-31 1955-09-13 Louis F Wouters Electric discharge devices
US2527747A (en) * 1946-01-03 1950-10-31 Margaret N Lewis Apparatus for coating articles by thermal evaporation
US2509053A (en) * 1947-11-08 1950-05-23 Bell Telephone Labor Inc Space current device employing mutually bombarded electrodes
GB754102A (en) * 1951-06-22 1956-08-01 Edwards & Co London Ltd W Improvements in or relating to a method and apparatus for vapourising materials, forexample, metal in vacuum
US2808980A (en) * 1953-09-23 1957-10-08 Westinghouse Electric Corp Electrical vacuum pump
US2791371A (en) * 1956-01-09 1957-05-07 Jr John S Foster Radio frequency ion pump
US2960457A (en) * 1956-02-28 1960-11-15 Servomechanisms Inc Apparatus for vaporizing coating materials

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1771629B1 (en) * 1968-06-19 1971-07-29 Heraeus Gmbh W C EVAPORATION DEVICE FOR ALUMINUM

Also Published As

Publication number Publication date
FR1184364A (en) 1959-07-21
US3056740A (en) 1962-10-02
DE1242429B (en) 1967-06-15

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