[go: up one dir, main page]

GB874674A - Ion-getter pump - Google Patents

Ion-getter pump

Info

Publication number
GB874674A
GB874674A GB265358A GB265358A GB874674A GB 874674 A GB874674 A GB 874674A GB 265358 A GB265358 A GB 265358A GB 265358 A GB265358 A GB 265358A GB 874674 A GB874674 A GB 874674A
Authority
GB
United Kingdom
Prior art keywords
source
getter
casing
vaporizer
ion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB265358A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
High Voltage Engineering Corp
Original Assignee
High Voltage Engineering Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by High Voltage Engineering Corp filed Critical High Voltage Engineering Corp
Publication of GB874674A publication Critical patent/GB874674A/en
Expired legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J41/00Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
    • H01J41/12Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps
    • H01J41/14Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps with ionisation by means of thermionic cathodes
    • H01J41/16Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps with ionisation by means of thermionic cathodes using gettering substances

Landscapes

  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)

Abstract

874,674. Discharge apparatus. HIGH VOLTAGE ENGINEERING CORPORATION. Jan. 27, 1958 [Jan. 26, 1957], No.. 2653/58. Class 39(1). An ion-getter pump for producing a high vacuum below 10<SP>-6</SP> mm. of mercury consisting of a casing containing an ion source and a vaporizer source for getter metals, particularly titanium, is characterized in that the ion source is created in one part of the casing and is in communication with the vaporizer source which is created in another part of the casing, there being no substantial restriction of the flow of gas between the two parts of the casing. In the arrangement shown, a layer of getter metal 5 is formed on the wall of a tube 1 by vaporization of titanium wires 4 wound on one or more hairpin-shaped wires 2 of high-melting-point metal such as tungsten. A connection 6 enables a specific potential to be given to the layer 5. The gas to be pumped which may bea rare gas, is ionized by a discharge device 3 of the Penning type. If a very high final vacuum of about 10<SP>-7</SP> mm. of. mercury or less is required, a heated cathode 8 is used. Otherwise, any other source of electrons, such as a radio-active preparation or a pointed cathode may be used. Other types of ion source may also be used. The vaporizer source may be directly or indirectly heated. A preliminary evacuation of the container 7 to a pressure of about 10<SP>-2</SP> mm. of mercury is effected by a backing, pump, and the getter metal 4 and tungsten wire 5 are outgassed by powerful heating. Thebacking pump is then removed and the discharge device switched on. In operation, the temperature of the vaporizer source may be maintained at a value below the vaporizing temperature of the getter metal except for repeated brief intervals when it is raised above that temperature. Owing to the separation of the vaporizer source and the ion source the electrodes of the latter are not contaminated by evaporated getter material.
GB265358A 1957-01-26 1958-01-27 Ion-getter pump Expired GB874674A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DEL26701A DE1061029B (en) 1957-01-26 1957-01-26 Ion getter pump

Publications (1)

Publication Number Publication Date
GB874674A true GB874674A (en) 1961-08-10

Family

ID=7263893

Family Applications (1)

Application Number Title Priority Date Filing Date
GB265358A Expired GB874674A (en) 1957-01-26 1958-01-27 Ion-getter pump

Country Status (3)

Country Link
CH (1) CH362790A (en)
DE (1) DE1061029B (en)
GB (1) GB874674A (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR1281403A (en) * 1960-12-01 1962-01-12 Thomson Houston Comp Francaise Advanced Evaporative Ionization Type Vacuum Pump System

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE563139C (en) * 1929-04-24 1932-11-02 Aeg Device for maintaining the vacuum in high vacuum vessels, especially high vacuum switches
DE540617C (en) * 1929-06-29 1931-12-28 C H F Mueller Akt Ges Process for creating and maintaining the vacuum in discharge vessels
US2460175A (en) * 1945-07-31 1949-01-25 Hazeltine Research Inc Ionic vacuum pump
DE924335C (en) * 1952-07-18 1955-02-28 Leitz Ernst Gmbh Procedure for evacuating a vessel
US2757306A (en) * 1955-02-23 1956-07-31 Nat Res Dev Ionisation gauge

Also Published As

Publication number Publication date
DE1061029B (en) 1959-07-09
CH362790A (en) 1962-06-30

Similar Documents

Publication Publication Date Title
US2796555A (en) High-vacuum pump
GB994911A (en) Improvements in or relating to sputtering apparatus
US2856532A (en) Pulsed ion source
US2988657A (en) Ion pump
US2967012A (en) Getter-ion pump
US3464907A (en) Triode sputtering apparatus and method using synchronized pulsating current
US2217448A (en) Cathode
US2972690A (en) Ion pump and gauge
GB874674A (en) Ion-getter pump
US2403745A (en) Apparatus and method for making tubes
US2980317A (en) Vacuum device
US2845567A (en) Indirectly heated thermionic cathode
GB873906A (en) Improvements in or relating to ion-getter pumps
US3100272A (en) Low pressure mercury plasma discharge tube
US3080104A (en) Ionic pump
US2116677A (en) Gaseous electric discharge device and method of operating the same
US2187774A (en) Electric discharge lamp adapted for use as source in optical projection apparatus
US1878338A (en) Gaseous conduction apparatus
GB542390A (en) Improvements in or relating to electron discharge apparatus
US3572875A (en) Vacuum tube
US3437260A (en) Vacuum arc gettering pump
US3159332A (en) Methods and apparatus for enhanced sputter-ion pump operation
US1989462A (en) Ionic amplifier
US1935699A (en) Electric discharge tube for the emission of rays
US2038927A (en) Vapor filled thermionic tube