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GB8320963D0 - Storage case - Google Patents

Storage case

Info

Publication number
GB8320963D0
GB8320963D0 GB838320963A GB8320963A GB8320963D0 GB 8320963 D0 GB8320963 D0 GB 8320963D0 GB 838320963 A GB838320963 A GB 838320963A GB 8320963 A GB8320963 A GB 8320963A GB 8320963 D0 GB8320963 D0 GB 8320963D0
Authority
GB
United Kingdom
Prior art keywords
storage case
storage
case
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
GB838320963A
Other versions
GB2126710A (en
GB2126710B (en
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Publication of GB8320963D0 publication Critical patent/GB8320963D0/en
Publication of GB2126710A publication Critical patent/GB2126710A/en
Application granted granted Critical
Publication of GB2126710B publication Critical patent/GB2126710B/en
Expired legal-status Critical Current

Links

Classifications

    • H10P72/0402—
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B15/00—Preventing escape of dirt or fumes from the area where they are produced; Collecting or removing dirt or fumes from that area
    • B08B15/02—Preventing escape of dirt or fumes from the area where they are produced; Collecting or removing dirt or fumes from that area using chambers or hoods covering the area
    • H10P72/1922—
    • H10P72/1926—
    • H10P95/00—
GB08320963A 1982-08-27 1983-08-03 Storage case to prevent dust contamination Expired GB2126710B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57147658A JPS5939019A (en) 1982-08-27 1982-08-27 Clean storage box

Publications (3)

Publication Number Publication Date
GB8320963D0 true GB8320963D0 (en) 1983-09-07
GB2126710A GB2126710A (en) 1984-03-28
GB2126710B GB2126710B (en) 1985-12-04

Family

ID=15435332

Family Applications (1)

Application Number Title Priority Date Filing Date
GB08320963A Expired GB2126710B (en) 1982-08-27 1983-08-03 Storage case to prevent dust contamination

Country Status (2)

Country Link
JP (1) JPS5939019A (en)
GB (1) GB2126710B (en)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0328642Y2 (en) * 1985-10-30 1991-06-19
JPH0736418B2 (en) * 1986-05-19 1995-04-19 富士通株式会社 Wafer carrier
DE3637880C2 (en) * 1986-11-06 1994-09-01 Meissner & Wurst Transportable container for handling semiconductor elements during their manufacture as well as methods for the particle-free delivery of products
JPH0298101U (en) * 1989-01-23 1990-08-06
JPH0298102U (en) * 1989-01-23 1990-08-06
DE69228014T2 (en) * 1991-01-29 1999-05-27 Shinko Electric Co., Ltd., Tokio/Tokyo Unit for airtight storage of semiconductor wafers
JP3225441B2 (en) * 1991-04-23 2001-11-05 東京エレクトロン株式会社 Processing equipment
US6340381B1 (en) * 1991-12-02 2002-01-22 Ebara Research Co., Ltd. Method and apparatus for the preparation of clean gases
DE69224917T2 (en) * 1992-12-02 1998-10-22 Ebara Corp., Tokio/Tokyo METHOD AND DEVICE FOR PREVENTING CONTAMINATION OF A SUBSTRATE OR SUBSTRATE SURFACE
US5402807A (en) * 1993-07-21 1995-04-04 Moore; David R. Multi-modular device for wet-processing integrated circuits
US5772784A (en) * 1994-11-14 1998-06-30 Yieldup International Ultra-low particle semiconductor cleaner
DE19541436C2 (en) * 1995-11-07 1998-10-08 Steag Micro Tech Gmbh Plant for the treatment of objects in a process tank
US6105592A (en) * 1997-07-21 2000-08-22 Semitool, Inc. Gas intake assembly for a wafer processing system
CN102208535A (en) * 2004-09-09 2011-10-05 国立大学法人北海道大学 Solar cell and photoelectric conversion element

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1331210A (en) * 1971-09-22 1973-09-26 Ibm Clean air work station
NL7215945A (en) * 1972-11-24 1974-05-28
DE2328875C2 (en) * 1973-06-06 1989-11-02 CIBA-GEIGY AG, 4002 Basel Air distributor
US4098174A (en) * 1976-04-08 1978-07-04 Landy Jerome J Total exhaust laminar flow biological fume hood safety cabinet and method
IN152016B (en) * 1980-11-24 1983-09-24 Klenzaids Engineers Plc
GB2109921A (en) * 1981-11-10 1983-06-08 Frederick George Stoddart Method and apparatus for manipulating samples in a protected environment

Also Published As

Publication number Publication date
GB2126710A (en) 1984-03-28
GB2126710B (en) 1985-12-04
JPS5939019A (en) 1984-03-03

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Legal Events

Date Code Title Description
PCNP Patent ceased through non-payment of renewal fee

Effective date: 19930803