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GB814364A - Improvements in and relating to electrolytic etching - Google Patents

Improvements in and relating to electrolytic etching

Info

Publication number
GB814364A
GB814364A GB31594/55A GB3159455A GB814364A GB 814364 A GB814364 A GB 814364A GB 31594/55 A GB31594/55 A GB 31594/55A GB 3159455 A GB3159455 A GB 3159455A GB 814364 A GB814364 A GB 814364A
Authority
GB
United Kingdom
Prior art keywords
wafer
electrolytic etching
semi
solution
gold
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB31594/55A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Maxar Space LLC
Original Assignee
Philco Ford Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Philco Ford Corp filed Critical Philco Ford Corp
Publication of GB814364A publication Critical patent/GB814364A/en
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25F—PROCESSES FOR THE ELECTROLYTIC REMOVAL OF MATERIALS FROM OBJECTS; APPARATUS THEREFOR
    • C25F3/00—Electrolytic etching or polishing
    • C25F3/02—Etching
    • C25F3/14—Etching locally
    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25F—PROCESSES FOR THE ELECTROLYTIC REMOVAL OF MATERIALS FROM OBJECTS; APPARATUS THEREFOR
    • C25F3/00—Electrolytic etching or polishing
    • C25F3/02—Etching
    • C25F3/12—Etching of semiconducting materials
    • H10P14/47—
    • H10P50/613—

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Weting (AREA)

Abstract

814,364. Electrolytic etching; semi-conductor devices &c. PHILCO CORPORATION. Nov. 4, 1955 [Dec. 22, 1954], No. 31594/55. Drawings to Specification. Classes 37 and 41. A method of electrolytic etching comprises coating a body of material with a metal having an electrical conductivity greater than that of the body and directing a flow of etchant to impinge upon a localized region of the body while passing a current therethrough to remove the coating locally and etch the material so exposed. Typically the body is of semi-conductive material, e.g. N-type germanium or silicon, and is coated with a noble metal, preferably gold or platinum. Thus to form a surface barrier transistor, a wafer of N-type germanium may be electroplated with gold from a solution of auric chloride in ethylene glycol acidified with hydro. chloric acid, and is then electrolytically etched from opposite faces of the wafer with a solution of indium trichloride followed by plating indium contacts into the etched cavities by reversal of polarity of the applied potential, using the apparatus of Specification 805,291. In a similar manner using a single jet of electrolyte to form a single cavity in the wafer; a germanium diode may be formed.
GB31594/55A 1954-12-22 1955-11-04 Improvements in and relating to electrolytic etching Expired GB814364A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US477034A US2799637A (en) 1954-12-22 1954-12-22 Method for electrolytic etching

Publications (1)

Publication Number Publication Date
GB814364A true GB814364A (en) 1959-06-03

Family

ID=23894225

Family Applications (1)

Application Number Title Priority Date Filing Date
GB31594/55A Expired GB814364A (en) 1954-12-22 1955-11-04 Improvements in and relating to electrolytic etching

Country Status (2)

Country Link
US (1) US2799637A (en)
GB (1) GB814364A (en)

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2963411A (en) * 1957-12-24 1960-12-06 Ibm Process for removing shorts from p-n junctions
NL110575C (en) * 1958-01-17 1965-02-15 Philips Nv
NL239732A (en) * 1958-06-18
US3012921A (en) * 1958-08-20 1961-12-12 Philco Corp Controlled jet etching of semiconductor units
US3039514A (en) * 1959-01-16 1962-06-19 Philco Corp Fabrication of semiconductor devices
US3039515A (en) * 1959-02-24 1962-06-19 Philco Corp Fabrication of semiconductor devices
NL250075A (en) * 1959-04-10 1900-01-01
US3058478A (en) * 1959-10-09 1962-10-16 Carman Lab Inc Fluid treatment apparatus
FR1260804A (en) * 1960-03-31 1961-05-12 Electronique & Automatisme Sa Process for producing printed circuits
US3135638A (en) * 1960-10-27 1964-06-02 Hughes Aircraft Co Photochemical semiconductor mesa formation
US3303085A (en) * 1962-02-28 1967-02-07 Gen Electric Molecular sieves and methods for producing same
US3335278A (en) * 1963-09-11 1967-08-08 Gen Electric High level radiation dosimeter having a sheet which is permeable to damage track producing particles
US3630795A (en) * 1969-07-25 1971-12-28 North American Rockwell Process and system for etching metal films using galvanic action
US3867272A (en) * 1970-06-30 1975-02-18 Hughes Aircraft Co Electrolytic anticompromise apparatus
US4497692A (en) * 1983-06-13 1985-02-05 International Business Machines Corporation Laser-enhanced jet-plating and jet-etching: high-speed maskless patterning method
US4599154A (en) * 1985-03-15 1986-07-08 Atlantic Richfield Company Electrically enhanced liquid jet processing
EP2560196A1 (en) * 2011-08-15 2013-02-20 Nederlandse Organisatie voor toegepast -natuurwetenschappelijk onderzoek TNO Method and system for forming a metallic structure

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US1416929A (en) * 1921-11-07 1922-05-23 William E Bailey Art of electrolysis

Also Published As

Publication number Publication date
US2799637A (en) 1957-07-16

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