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GB2632443B - A substrate for the CVD growth of graphene, a graphene laminate and a method of manufacture thereof - Google Patents

A substrate for the CVD growth of graphene, a graphene laminate and a method of manufacture thereof

Info

Publication number
GB2632443B
GB2632443B GB2312136.1A GB202312136A GB2632443B GB 2632443 B GB2632443 B GB 2632443B GB 202312136 A GB202312136 A GB 202312136A GB 2632443 B GB2632443 B GB 2632443B
Authority
GB
United Kingdom
Prior art keywords
graphene
manufacture
substrate
cvd growth
laminate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
GB2312136.1A
Other versions
GB202312136D0 (en
GB2632443A (en
Inventor
Dixon Sebastian
Guiney Ivor
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Paragraf Ltd
Original Assignee
Paragraf Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Paragraf Ltd filed Critical Paragraf Ltd
Priority to GB2312136.1A priority Critical patent/GB2632443B/en
Priority to GB2314238.3A priority patent/GB2632500A/en
Publication of GB202312136D0 publication Critical patent/GB202312136D0/en
Priority to TW113128284A priority patent/TW202507048A/en
Priority to PCT/EP2024/071582 priority patent/WO2025031890A1/en
Publication of GB2632443A publication Critical patent/GB2632443A/en
Application granted granted Critical
Publication of GB2632443B publication Critical patent/GB2632443B/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/02—Pretreatment of the material to be coated
    • C23C16/0272—Deposition of sub-layers, e.g. to promote the adhesion of the main coating
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B32/00—Carbon; Compounds thereof
    • C01B32/15—Nano-sized carbon materials
    • C01B32/182—Graphene
    • C01B32/184—Preparation
    • C01B32/186—Preparation by chemical vapour deposition [CVD]
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/08—Oxides
    • C23C14/081—Oxides of aluminium, magnesium or beryllium
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/26—Deposition of carbon only

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Inorganic Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Nanotechnology (AREA)
  • Chemical Vapour Deposition (AREA)
  • Carbon And Carbon Compounds (AREA)
GB2312136.1A 2023-08-08 2023-08-08 A substrate for the CVD growth of graphene, a graphene laminate and a method of manufacture thereof Active GB2632443B (en)

Priority Applications (4)

Application Number Priority Date Filing Date Title
GB2312136.1A GB2632443B (en) 2023-08-08 2023-08-08 A substrate for the CVD growth of graphene, a graphene laminate and a method of manufacture thereof
GB2314238.3A GB2632500A (en) 2023-08-08 2023-09-18 A method for the manufacture of a graphene laminate
TW113128284A TW202507048A (en) 2023-08-08 2024-07-30 A method for the manufacture of a graphene laminate
PCT/EP2024/071582 WO2025031890A1 (en) 2023-08-08 2024-07-30 A method for the manufacture of a graphene laminate

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB2312136.1A GB2632443B (en) 2023-08-08 2023-08-08 A substrate for the CVD growth of graphene, a graphene laminate and a method of manufacture thereof

Publications (3)

Publication Number Publication Date
GB202312136D0 GB202312136D0 (en) 2023-09-20
GB2632443A GB2632443A (en) 2025-02-12
GB2632443B true GB2632443B (en) 2025-09-17

Family

ID=88017056

Family Applications (2)

Application Number Title Priority Date Filing Date
GB2312136.1A Active GB2632443B (en) 2023-08-08 2023-08-08 A substrate for the CVD growth of graphene, a graphene laminate and a method of manufacture thereof
GB2314238.3A Pending GB2632500A (en) 2023-08-08 2023-09-18 A method for the manufacture of a graphene laminate

Family Applications After (1)

Application Number Title Priority Date Filing Date
GB2314238.3A Pending GB2632500A (en) 2023-08-08 2023-09-18 A method for the manufacture of a graphene laminate

Country Status (1)

Country Link
GB (2) GB2632443B (en)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2017029470A1 (en) * 2015-08-14 2017-02-23 Simon Charles Stewart Thomas A method of producing a two-dimensional material
WO2022175273A1 (en) * 2021-02-17 2022-08-25 Paragraf Limited A method for the manufacture of an improved graphene substrate and applications therefor

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2617851B (en) * 2022-04-21 2024-09-18 Paragraf Ltd A graphene-containing laminate

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2017029470A1 (en) * 2015-08-14 2017-02-23 Simon Charles Stewart Thomas A method of producing a two-dimensional material
WO2022175273A1 (en) * 2021-02-17 2022-08-25 Paragraf Limited A method for the manufacture of an improved graphene substrate and applications therefor

Also Published As

Publication number Publication date
GB202312136D0 (en) 2023-09-20
GB2632500A (en) 2025-02-12
GB2632443A (en) 2025-02-12
GB202314238D0 (en) 2023-11-01

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