GB2627461A - Sputter Ion pump module and vacuum pump - Google Patents

Abstract

A sputter ion pump (SIP) module (14, figure 1) comprises an outer structure (e.g. frame structure 48, figure 3), an anode 20, and at least one support element (71, 73) at an upper side or lower side of the anode to support the anode. The anode is connected to the outer structure by the at least one support element. A high voltage (HV) conductor 28 extends through the outer structure and is connected to the anode to support the anode. The anode may be only supported by the HV conductor and one or two support elements. The support elements may be made from an insulating material and may be releasably connected to the anode. The HV conductor may extend through a base element of the frame structure. A method for assembly of a sputter ion pump module is also disclosed. A vacuum pump (10, figure 1) may comprise the sputter ion pump module and a non-evaporable getter (NEG) module (12, figure 1).

Description

SPUTTER ION PUMP MODULE AND VACUUM PUMP

The present invention relates to a sputter ion pump (SIP) module for a vacuum pump and a vacuum pump having such an SIP module, Further, the present invention relates to a method for assembly of such an SIP module.

Commonly known SIPs comprise one or more anodes built as tubes or cylindric openings wherein a magnetic field is oriented parallei to the central axis of the tubes. The anode is surrounded by cathode elements. In particular a cathode element is arranged opposite to the cylindric openings of the anode at a certain distance along the central axis. A strong electrical field is generated between the anode and the cathode. Due to the magnetic field, the path of the electrons within the anode cells are augmented which results in ionization of gas atoms and molecules in the vacuum chamber. The resulting ions are accelerated to strike the cathode element. On impact of the accelerated ions on the cathode elements, they will either become buried within the cathode material or sputter cathode material onto the other surfaces of the pump. The continuously sputtered chemical active cathode material acts as a getter which then evacuates the gas by both chemisorption and physisorpt or: resulting in a net pumping action.

For common small SIPs usually the anode is supported by fastening the anode directly to a high voltage (HV) conductor of a vacuum feedthrough, typically by welding to avoid direct contact with the grounded pump components. However; separation of the anode is not possible anymore due to permanent fixing the anode to the HV conductor. Servicing the SIP is nearly impossible.

For!al-0e SIPS it is known to implement supports of the anode by fixturing it to grounded pump components utilizing an insulating material. Thereby, the position of the anode is fixed which increases the required accuracy when connecting the anode to a HV conductor. To overcome this issue, it is common to use flexible connectors. However, this increases complexity of assembling and complexity of the SIP itself.

There is a need to develop an SIP module and method for assembly of such an SIP module requiring reduced building space and complexity of design as well as assembly.

The problem is solved by a sputter ion pump module according to claim 1, a method for assembly such a sputter ion pump module according to claim 13 and a vacuum pump according to claim 15.

The sputter ion pump (SIP) module for a vacuum pump according to the present invention comprises an outer structure and an anode having an upper side and an opposite lower side. Further, the SIP module comprises at least one support element at the upper side or the lower side of the anode to support the anode. Therein, the anode is connected to the outer structure by the at least one support element. in addition, a high voltage (HV) conductor is extending through the outer structure and connected to the anode to support the anode. Thus, the anode is combinedly supported by the HV conductor and the at least one support. Thus, by the at least one support element the anode is connected and supported in the outer structure for assembly, Further support is provided by the HV conductor in the assembled state, in particular when connecting the outer structure to a flange having a vacuum feedthrough for the HV conductor. Thus, the SIP module according to the present invention is independent from the flange and can be built in a modular way. Use of different flanges with the same SIP module is thus feasible. However, at the same time sufficient support and structural stability of the anode is provided by the at least one support element together with the FIV conductor.

Preferably, the outer structure may be a housing which may or may not vacuum tight. The housing may render the SIP module and/or the NEG module fully -3 -functional and preferably provides means for connecting the vacuum pump to a vacuum apparatus or chamber. Alternatively, the outer structure is surrounding the elements of the SIP module and/or the NEG module and built to be inserted in a vacuum apparatus or chamber. Therein, the outer structure may comprise openings to allow gas to enter into the SIP module or NEC; module.

Preferably, the HV conductor is connected to the lower side of the anode and the at least one support. element is connected to the upper side of the anode. Thus, by the HV conductor and the at least one support element at the upper side of the anode sufficient support for the anode is provided.

Preferably, a first support element is arranged at the upper side and a second support element is arranged at the lower side of the anode. Thus, by the first support element and the second support element the anode is fully supported within the outer structure of the SIP module. Hence, the anode can be first connected to the outer structure and subsequently connected to the HV conductor in order to increase structural stability of the anode within the outer structure during assembly in particular mounting of the outer structure to a Flange.

Preferably, the anode is only supported by the HV conductor and one support element. The combination of the HV conductor and the one support element provides sufficient stability of the anode. Alternatively, the anode is only supported by the HV conductor, the first support element and the second support element. Thus, by the combination of the HV conductor the first support element and the second support element sufficient structural stability of the anode within the outer structure of the SIP module is provided.

Preferably, the at least one support element is made from an insulating material. Thus, the anode of the SIP module can be braced via the support element by grounded pump components, i.e. the outer structure of the SIP module, -4 -Preferably, the at least one support element is a sleeve and the anode comprise a peg which is received by the sleeve. in particular, if the SIP module comprises a first support element and a second support element at the upper side and the lower side of the anode, respectively, the anode may comprise a peg on the upper side to be received the first support element built as a sleeve and / or comprise a second peg at the lower side to be received in the second support element built as sleeve.

Preferably, the at least one support element is releasably connected to the anode, preferably by a pluggable connection. In particular, if the at least one support element is built as a sleeve receiving of the peg of the anode can be easily performed without tools and / or additional assembly steps such as welding. In particular, when replacing the anode or any part of the SIP module, the connection between the anode and the respective support element can be easily resolved for maintenance.

Preferably, the HV conductor is built as a connecting pin and the anode comprises a peg wherein the pin and the peg are connected with each other by a conducting sleeve receiving the pin and the peg at opposite ends. Thereby, a releasable and pluggable connection between the HV conductor and the anode is provided, wherein the high voltage provided by the HV conductor is transferred to the anode. Thus, the HV conductor provided through the vacuum feed-through of a flange can be easily separated from the anode in order to remove or replace the flange together with the vacuum feedthrough.

Preferably, the outer structure comprises a frame structure having a base element and a top element, wherein the lower side of the anode is connected to the base element via the at least one support element and / or the upper side of the anode is connected to the top element via the at least one support element. Therein, the frame structure can be built compact in size such that the SIP module can be inserted into a vacuum chamber of a vacuum apparatus. -5 -

Preferably, the top element and the base element are connected via one or more frame side elements, i.e. shoulder screws and in particular two frame side elements. Thus, for assembly the anode can be placed and fixed between the base element and the top element by the at least one support element and in particular by a first support element at the upper side of the anode, connecting the upper side of the anode to the top element of the frame structure and a second support element at the lower side of the anode, connecting the lower side of the anode to the base element of the frame structure. Thereby, the anode element is completely fixed and held in place in the frame structure of the outer structure. Subsequently, the frame structure together with the anode can be connected to a flange and simultaneously connecting the HV conductor to the anode for further support and HV supply to the anode.

Preferably, the base element may be a flange to connect the SIP to a vacuum apparatus or vacuum chamber. Alternatively, the base element may be connected to a flange being part of the SIP module or a vacuum pump comprising such an SIP module.

Preferably, the HV conductor extends through the base element. Thus, by connecting the base element to a flange, at the same time the HV conductor extends through the base element and is connected to the anode of the SIP module.

Preferably, the at least one support element restricts lateral movement of the anode in at least two directions and preferably in three or four lateral directions. Here and in the following the axial direction of the SIP and its element is defined along the anode from its lower side to its upper side. Here and in the following, the lateral direction refers to a direction perpendicular to the direction along the anode from the lower side of the anode to the upper side. In addition, the at least one support element restricts axial movement of the anode in one axial direction. In addition, the HV conductor restricts axial movement of the anode -6 -in the other or opposite axial direction. The HV conductor further restricts lateral movement of the anode in at least two lateral directions and preferably in three or four lateral directions. Thus, by the combination of the at least one support element and the HV conductor, the anode is restricted in movement in all axial directions and all lateral directions. At the same time the at least one support element or the two support elements may not fully restrict lateral movement allowing slight lateral movement of the anode while connecting the anode to the HV conductor in order to facilitate mounting the HV conductor to the anode. Thus, a secure connection between the HV conductor and the anode is possible and slight manufacturing deviations can be compensated ion Preferably, the at least one support element is received in a recession of the outer structure and preferably in a recession of the base element and / or the top element. Thus, a first end of the at least one support element is connected to the anode, wherein a second end of the at least one support element is arranged in the recession of the outer structure. Therein, the recession may be partially open, to insert the at least one support element. Thus, the at least one support element can be inserted into the recession for example by a lateral movement of the support element. The recession may be U-shaped such that by the recession lateral movement of the anode in three directions is restricted.

In another aspect of the present invention a method for assembling an SIP module is provided. The method includes: Providing an outer structure of the SIP module preferably provided by or comprising a frame structure; Providing an anode of the SIP module; Connecting the anode to the outer structure via at least one support element; and Connecting an HV conductor to the anode for supporting the anode.

Preferably, the anode is connected to the outer structure via two support elements and preferably exactly two support elements. Thus, the anode is -7 -connected to the outer structure and subsequently the HV conductor is connected to the anode in order to provide structural stability of the anode.

Preferably, connecting the I-IV conductor to the anode for supporting the anode is carried out by connecting the outer structure to a flange having a vacuum feedthrough for the HV conductor. Thus, at the same time the outer structure and in particular a base element of the outer structure is connected to a flange, the HV conduc:tor is connected to the anode, In particular, the SIP module is further built along the features mentioned before with respect to the SIP module.

Preferably, the top element is movable preferably along the frame side elements connecting the top element and the base element, wherein after inserting the anode into the frame structure, the top element is moved towards the base element to fix the anode between the top element and the base element. In particular, the position of the top element is fixed by fixing means such as sets screws fixing the position of the top element on the frame side elements.

Preferably, first the support element at the upper side of the anode is connected to the top element and subsequently, the support element at the lower side of the anode is inserted into a recession of the base element via a lateral movement.

Preferably, first the support element at the lower side of the anode is inserted into a recession of the base element via a lateral movement and subsequently the support element at the upper side of the anode is connected to the top element.

In another aspect of the present invention a vacuum pump is provided compri ing an SIP module as described before. -^ -8 -Preferably, the vacuum pump further comprises a non-evaporable getter (NEG) module preferably connected to the top element of the SIP module, i.e. the upper side of the SIP module in a stacked manner.

Preferably, the outer structure of the SIP module and/or the outer structure of the NEC module are cylindrical. Therein for the SIP module the hosing is provided by a shell having a cylindrical shape.

Preferably, the outer surface of the SIP module and the outer surface of the NEC module, in particular of the respective outer structures; lushes with each other providing an overall cylindrical shape of the vacuum pump.

Preferably, the vacuum pump comprises a flange wherein the SIP module is connected with its first end to the flange and preferably with its second end to the NEC; module. In particular the SIP module is directly connected by its base element to the flange and the NEG module is connected to the SIP module via the top element of the SIP module. Alternatively, the base element may be a flange to connect the SIP module/NEG module to a vacuum apparatus or vacuum chamber.

Preferably, the SIP module and the NEC module are arranged within an area of the flange. Thus, the SIP module and the NEC module can be together inserted into a vacuum chamber and fixed to the vacuum chamber by the flange.

Preferably, the NEC module and/or the SIP module are completely arranged within the vacuum. In particular, due to the small building size of the NEC module and the SIP module, both can be inserted into a vacuum chamber and connected to the vacuum chamber by a flange. Thus, no additional volume of vacuum space is added to the vacuum chamber the vacuum pump is installed on. At the same time due to the present invention the number of parts in the -9 -vacuum is reduced relative to if a standard ion pump design were modified in order to be mounted to a flange.

In the following the present invention is described in more detail with reference to the accompanying figures. The figures show: Fig. 1 a vacuum pump according to the present invention, Fig. 2 a sectional view of the vacuum pump of Fig. 1, Fig. 3 a frame structure of the vacuum pump of Fig. 1, Figs. 4A and 4B the frame structure and an anode of the vacuum pump of Fig. 1, Figs. 5A-5C a shell ent of the vacuum pump of Fig. 1, Figs. 6A and 6B a sectional view of a non--evaporable getter module, Fig. 7 a connecting element according to the present invention, Figs. 8A and 8B insulation elements according to the presen nven ion, Fig. 9 a sectional view of the SIP module according to Fig. 1.

Referring to Figure 1 showing a vacuum pump 10 according to the present invention. Therein the vacuum pump 10 comprises a non-evaporable getter (NEG) module 12, a sputter ion pump (SIP) module 14 and a vacuum flange 16. Therein the SIP module 14 is directly connected to the flange 16, wherein the NEG module 12 is attached to the SIP module 14 opposite to the flange 16. The vacuum pump 10 and in particular both the NEG module 12 and the SIP module 14 have a cylindric shape. The shape of the SIP module 14 flushes with the shape of the NEG module 12 such that the SIP module 14 and the NEG module 12 may have a substantially similar or identical outer shape or at last cross-section. Although in the following figures the vacuum pump has a cylindrical shape, other shapes are also possible.

The NEG module 12 and the SIP module 14 are arranged within the area of the flange 16 and can be completely inserted into a vacuum chamber for pumping.

Referring to Figure 2. In the section view it is shown that the SIP module 14. comprises an anode 20 which has in the example of Figure 2 three cylindrically shaped openings or tubes. Other numbers of tubes are also possible. At an axial end of these openings a cathode 18 is disposed. The anode 20 is kept on a high electrical potential by a high voltage (FIV) conductor 28 guided through the flange by a vacuum feedthrough 26 and connected to the anode. Furthermore, the flange 16 comprises a connector 63 which is connected via an electrical lead 30 with a heating element 32 of the NEG module 12. NEG elements 34 are arranged onto the heating element 32 for re-activation of the NEG material by heating up.

Here and in the following the axial direction of the SIP and its element is defined along the anode from its lower side to its upper side. Here and in the following, the lateral direction refers to a direction perpendicular to the axial direction of the anode.

Referring to Figure 3 showing the frame structure 48 of the SIP module. The frame structure 48 comprises a base element 50 which can be attached to the flange 16 by welding, brazing, soldering, screws or any other releasable connection means.. In other embodiments the flange 16 and the base 50 are integrally built or the base element 50 may be provided by the flange 16 itself. 11 -

Connected to the base element 50 are h example of Figure 3 two frame side elements 24 built as shoulder screws or posts which extend from the base element 50 to a top element 52. The NEG module 12 can be connected to the top element 52 by welding, brazing, soldering, screws or any other releasable connection means. During assembly, the anode 20 is fixed within the frame structure 48 and subsequently the frame structure 48 together with the anode 20 is connected to the flange 16. This is shown in Figures 4A and 4B. The anode 20 is connected in the frame structure 48 by a lower support element 71 provided by an insulating element 62 connected to the anode 20. Further, an upper support element 73 is provided by an insulating element 74. Therein, the insulating elements 62, 74 are built by an insulating material such as a ceramic material. By the lower insulating support 71 the anode 20 is restricted from downward motion towards the flange 16 and might also be restricted by lateral motion, i.e. in one or more other directions or all other directions. By the upper support element 73, the anode 20 is restricted from upward motion and lateral motion, i.e. in one or more other directions or all other directions. The at least one support element 71, 73 or the two support elements 71, 73 may not fully restrict lateral movement allowing slight lateral movement of the anode while connecting the anode to the HV conductor 28 in order to facilitate mounting the HV conductor 2.8 to the anode 20. Thus, a secure connection between the HV conductor 28 and the anode 20 is possible and slight manufacturing deviations can be compensated for. In order to prevent motion of the anode 20 completely and fix the anode's position in the frame structure, the anode 20 is connected to the HV conductor 28, extending through an opening in the base element 50, via a conducting sleeve 49, connecting the anode 20 with the HV conductor 28 of the vacuum feedthrough 26. Thus, by the lower support element 71, the upper support element 73 and the connection to the HV conductor 28 of the electrical feedthrough 26, the anode 20 is fixed in its position within the frame structure 48 of the SIP module 14.

The steps for assembling the SIP module 14 thus comphse: a) providing a frame structure preferably comprising base element 50, one or more frame side elements 24 connected to the base element, and may also include a top element 52 connected to the respective frame side elements 24, b) inserting the anode and connecting the anode in the frame structure by the lower support element 71 and the upper support element 73, c) attaching the frame structure 48 together with the anode 20 to the flange 16, thereby connecting the anode 20 to the electrical feedthrough 26 and simultaneously fixing the position of the anode 20 in the SIP module 14, d) attaching the shell around the frame structure 48 as explained in more detail below.

Referring to the figures SA SC showing details of the shell of the vacuum pump 10. The shell of the vacuum pump 10 and in particular of the SIP module 14 comprises two individual shell elements 22. Therein, each shell element 22 is built identically in the present embodiment but the shell elements 22 may also be built/designed differently. Each shell element 22 comprises at least one magnet 78, wherein in the example of Figures 5A -SC each shell element 22 corn-prises two magnets 78. Therein, the maonets 78 are arranged in a recession 79 of the shell element 22 in order to prevent lateral movement. The size of the recession 79 is adapted to the size of the magnets such that sidewalls of the recession 79 directly contact sidewalis of the respective magnets 78. The magnets 78 are attached to the respective shell elements 22 only by their magnetic force. No further fixing/fastening elements are present, Thus, the shell elements 22 serve as both pole pieces and the outer structure for the SIP module 14. The -13 -pole pieces guide the magnetic flux through the SIP module 14, and the outer structure provides structural stability to the SIP module 14. Therefore, the shell elements 22 are made from a magnetic material such as mild steel. The magnets 78 are neodymium (Nd) magnets or samarium (Sa) cobalt (Co) magnets. The magnets are attached with one surface to the shell element 22. An opposite surface of the magnets 78 is directly connected to the cathode 18. The cathode 18 is plate-shaped and covers the complete or substantially complete surface of the magnets 78. The cathode 18 may be made from titanium (Ti) or tantalum (Ta). The two shell elements 22 may comprise cathode elements 18, 18' made from the same material or different material. In order to fix the cathode 18 in its position, bracket or clamping elements 80 are provided at the upper end and lower end of the respective magnets 78. The bracket elements 80 are held in place by the magnetic force of the magnets 78. No additional fixing elements are necessary. The bracket elements 80 comprise a chamfered surface 84 with a chamfer towards the magnets 78. Similarly, the cathode element 18 comprises chamfered edges 82 with a chamfer facing away from the magnets 78 and corresponding to the chamfered surface 84 of the bracket elements 80. When attaching the bracket element 80 to the side of the magnets 78, a clamping force is applied to the cathode 18 to fix the position of the cathode 18. The surface of the cathode element 18 flushes with the respective bracket element 80 and thus close positioning of the cathode element 18 to the anode 20 is feasible. Further, assembly and disassembly of the cathode elements 18 can be done without the need of additional tools.

The two shell elements 22 resemble the outer shape of the SIP module 14. The shell elements 22 have openings 23 to allow gas molecules and particles to enter the active volume of the SIP module, The present invention is not limited by the number or shape of these openings 23" In order to have sufficient stability of the shell elements, the shell elements 22 provide at their axial edge an indentation 81 along an axial direction of the shell elements 2.2 which accommodates the frame side elements 24 when attached to them. Thus, by the corresponding shape of the indentations 81, the position of the elements 22 are defined by the position of the frame side elements 24.

Referring to Figures 6A and 6B showing the NEC module 12 comprising a heater 32 with heating wire 86. The NEC module 12 comprises a base element 88 and top element 90, wherein NEC elements 34 are sleeved over the heater 32. The top element 90 and the base element 88 might be connected by NEC side elements such as shoulder screws or posts. In particular the NEC side elements are built by threaded rods or posts. The electrical connection of the heater 32 is provided by an electrical connector 38 having connection elements 94. The connection elements 94 are shown in more detail in Figure 7. The connection elements 94 comprise a first end 96 and second end 98. Between the first end 96 and the second end 98 a collar or protruding feature 1.00 is present. Although shown in figure 7 that the first end 96 and the second end 98 may have the same diameter, the present invention is not limited to this example and also different diameters of the first end 96 and the second end 98 would be possible. Similarly, the example of Figure 7 shows a circular cross section wherein other shapes are of course also possible.

The connector 38 comprises insulating elements 102, 106 as shown in Figures 8A and 8B. A first insulating element 102 has openings 104. Therein the number of openings 104 corresponds to the number of connecting elements 94. The diameter of the openings 104 corresponds to the diameter of the first end 96 and preferably the insulating elements 102 is made from a ceramic material. Similarly, the second insulating element 106 is made from a ceramic material. The second insulating element 106 is built by two halves, wherein Figure SB shows only a single halve. By the two halves of the insulating element 106 openings 108 are established, wherein the diameter of the openings 108 correspond to the diameter of the second end 98 of the connecting element 94. The connecting element 94 is crimped or otherwise attached to the heating wire 86 of the heater 32. Subsequently the two halves of the second insulating element r are inserted into a housing of the base element 88 of the NEG module 12 and sits on a shoulder 95. Therein, due to the protruding feature 100, the connecting elements 94 cannot fall through the openings 108 of the second insulating element 106. Subsequently, the first insulating element 102 is assembled by inserting the first end 96 of the connecting elements 94 into the respective open-ings 104. Due to the protruding feature 100, the connecting elements 94 cannot fall out of the first insulating element 102. By a fixing element, for example provided by a set screw, the first insulating element 102 and the second insulating element 106 are fixed in their position. Thereby, no clamping force is directly acting on the connecting elements 94. Due to the protruding feature 100, the fixing element 94 is fixed in its axial position wherein a slight lateral movement of the connectino. element 94 is still allowed and helps during assembly of the NEG module 12.

Similar to the connector 38 connecting the NEG module 12 to the SIP module 14, a connector 40 is provided in order to connect the SIP module to the flange 16 as shown in Figures 4A and 46. Thereby, an electrical lead 30 to be connected to the heater 32 runs from the flange 16 through the complete SIP module 14 and via the connector 38 to the NEG module 12. The electric lead 30 may comprise two electrical wires 110, 110' which are surrounded by an insulating material such as a ceramic material.

In the following it is referred to Figure 9 showing a sectional top view of the SIP module 14. The anode 20 has a first surface 114 and an opposite second surface 118, which correspond to the axial direction of the cylindric openings in the anode 20. The First surface 114 and the second surface 118 are connected by side surfaces 116, wherein the electrical lead 30 runs along a side surface 116 of the anode 20. Due to the position of the electrical lead 30, there is no direct line or line of sight 112 between the cathode element 18 and the electrical lead 30 preventing or at least reducing the likelihood of sputtering material of the cathode 18 onto the surface of the electrical lead 30 which may produce shorts.

-16 -Thus, the electric lead 30 is protected by the anode 20 itself. Therefore, the side surface 116 of the anode may comprise indentations 120 which accommodate the electrical lead 30 and the respective wires 110, 110' of the electrical lead 30. Thus, the low voltage supply of the heater 32 of the NEC module 12 is running from the connector 68 via the connecting element 40 and the electrical lead 30 across the SIP module 14 and in particular within the pole pieces of the SIP module provided by the shell elements 22 towards the connector 38 at the top element 52 of the SIP module and then further to the connector 38 and the heater 32.

Thus, by the vacuum pump according to the present invention a combination of an NEC module and an SIP module is provided which can both be completely inserted into the vacuum chamber having a small cross-sectional area. At the same time, due to implementing a frame structure 48 and a shell, the process of assembling the SIP module 14 is simplified and the number of necessary parts in the vacuum can be reduced.

Reference List vacuum pump 12 NEG module 14 SIP module 16 flange 18, 18' cathode element anode 22 she element 23 openings 24 frame side element 26 vacuum feedthrough 28 HV conductor electrical lead 32 heating element 34 NEG element 38 connector connector 48 frame structure 49 conducting sleeve base element 52 top element 62 insulating element 68 connector 71 lower support element 73 upper support element 74 insulating element 78 magnet 79 recession bracket element 81 indentation 82 chamfered edge 84 chamfered surface 86 heating wire 88 base element top element 94 connection element shoulder 96 first end 97 fixing element 98 second end protruding feature 102 first insulating element 104 opening 106 second in atm( element 108 openings 110, 110' electrical Wire 112 line of sight 114 first surface 116 side surface 118 second surface indentation

Claims (15)

1. CLAIMS1, Sputter on pump, SIP, module for a vacuum pump, comprising: an outer structure, an anode having an upper side and an opposite lower side, at least one support element at the upper side or the lower side of the anode to support the anode, wherein the anode is connected to the outer structure by the at least one support element, and a high voltage, IN, conductor extending through the outer structure and connected to the anode to support the anode.
2. 2. Sputter ion pump module according to claim 1, wherein the HV conductor is connected to the lower side of the anode and the at least one support element is connected to the upper side of the anode.
3. 3. Sputter ion pump module according to claims 1 or 2, comprising a first support element at the upper side and a second support element at the lower side of the anode.
4. 4. Sputter on pump module according to any of claims 1 to 3, wherein the anode is only supported by the I-1V conductor and one support element or the FIV conductor, the first support element and the second support element.
5. 5. Sputter ion pump module according to any of claims 1 to 4, wherein the at least one support element is made from an insulating material. -20
6. 6. Sputter ion pump module according to any of claims 1 to 5, wherein the at least one support element is a sleeve, and the anode comprises a peg which is received by the sleeve.
7. 7. Sputter ion pump module according to any of claims 1 to 6, wherein the at least one support element is releasably connected to the anode, preferably by a pluaqable connection.
8. 8. Sputter ion pump module according to any of claims 1 to 7, wherein the HV conductor is built as connecting pin and the anode comprises a peg, wherein the pin and the peg are connected with each other by a conducting sleeve receiving the pin and the peg at opposite ends.
9. 9. Sputter ion pump module according to any of claims 1 to 8, wherein the outer structure comprises a frame structure having a base element and a top element, wherein the lower side of the anode is connected to the base element via the at least one support element and/or the upper side of the anode is connected to the top element via the at least one support element.
10. 10. Sputter ion pump module according to claim 9, wherein the HV conductor extends through the base element.
11. 11. Sputter ion pump module according to any of claims 1 to 10, wherein the at least one support element restricts lateral movement of the anode in at least two directions and axial movement of the anode in one direction and the I--IV conductor restricts axial movement of the anode in the other/opposite direction and lateral movement of the anode in at least two directions.
12. 12. Sputter ion pump module according to any of claims 1 to 11, wherein the at least one support element is received in a recession of the outer -21 structure, wherein preferably the recession is partially open to insert the at least one support element.
13. 13. Method for assembly an SIP module, preferably according to any of claims 1 to 12, including: Providing an outer structure of the SIP module preferably provided by a frame structure; Providing an anode of the SIP module; Connecting the anode to the outer structure via at least one support element; and Connecting an HV conductor to the anode for supporting the anode.
14. 14. Method according to claim 13, wherein the connecting the HV conductor to the anode for supporting the anode is carried out by connecting the outer structure to a flange having a vacuum feedthrough for the HV conductor.
15. 15. Vacuum pump comprising an SIP module according to any of claims 1 to 12 and a non-evaporable getter, NEC, module.