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GB2619964B - Method for detection of a bearing condition of a vacuum pump - Google Patents

Method for detection of a bearing condition of a vacuum pump Download PDF

Info

Publication number
GB2619964B
GB2619964B GB2209262.1A GB202209262A GB2619964B GB 2619964 B GB2619964 B GB 2619964B GB 202209262 A GB202209262 A GB 202209262A GB 2619964 B GB2619964 B GB 2619964B
Authority
GB
United Kingdom
Prior art keywords
detection
vacuum pump
bearing condition
bearing
condition
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
GB2209262.1A
Other versions
GB2619964A (en
GB202209262D0 (en
Inventor
Lucchetta Emiliano
Cobbett Andrew
Glyn Horler Richard
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Edwards Ltd
Original Assignee
Edwards Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Edwards Ltd filed Critical Edwards Ltd
Priority to GB2209262.1A priority Critical patent/GB2619964B/en
Publication of GB202209262D0 publication Critical patent/GB202209262D0/en
Priority to PCT/GB2023/051462 priority patent/WO2023247926A1/en
Publication of GB2619964A publication Critical patent/GB2619964A/en
Application granted granted Critical
Publication of GB2619964B publication Critical patent/GB2619964B/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D27/00—Control, e.g. regulation, of pumps, pumping installations or pumping systems specially adapted for elastic fluids
    • F04D27/001—Testing thereof; Determination or simulation of flow characteristics; Stall or surge detection, e.g. condition monitoring
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/05—Shafts or bearings, or assemblies thereof, specially adapted for elastic fluid pumps
    • F04D29/056—Bearings
    • F04D29/059—Roller bearings

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
GB2209262.1A 2022-06-24 2022-06-24 Method for detection of a bearing condition of a vacuum pump Active GB2619964B (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
GB2209262.1A GB2619964B (en) 2022-06-24 2022-06-24 Method for detection of a bearing condition of a vacuum pump
PCT/GB2023/051462 WO2023247926A1 (en) 2022-06-24 2023-06-05 Method for detection of a bearing condition of a vacuum pump

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB2209262.1A GB2619964B (en) 2022-06-24 2022-06-24 Method for detection of a bearing condition of a vacuum pump

Publications (3)

Publication Number Publication Date
GB202209262D0 GB202209262D0 (en) 2022-08-10
GB2619964A GB2619964A (en) 2023-12-27
GB2619964B true GB2619964B (en) 2024-12-25

Family

ID=82705574

Family Applications (1)

Application Number Title Priority Date Filing Date
GB2209262.1A Active GB2619964B (en) 2022-06-24 2022-06-24 Method for detection of a bearing condition of a vacuum pump

Country Status (2)

Country Link
GB (1) GB2619964B (en)
WO (1) WO2023247926A1 (en)

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011074892A (en) * 2009-10-01 2011-04-14 Shimadzu Corp Turbo-molecular pump and life determination method of mechanical bearing
JP2014074380A (en) * 2012-10-05 2014-04-24 Ebara Corp Dry vacuum pump device
EP3557072A1 (en) * 2019-02-27 2019-10-23 Pfeiffer Vacuum Gmbh Monitoring the bearing assembly of a vacuum pump

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62282194A (en) * 1986-05-30 1987-12-08 Mitsubishi Electric Corp Turbo molecular pump device
EP3456979B1 (en) * 2017-09-18 2022-03-30 Pfeiffer Vacuum Gmbh Vacuum device and method for generating an item of information concerning the operation of a vacuum device

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011074892A (en) * 2009-10-01 2011-04-14 Shimadzu Corp Turbo-molecular pump and life determination method of mechanical bearing
JP2014074380A (en) * 2012-10-05 2014-04-24 Ebara Corp Dry vacuum pump device
EP3557072A1 (en) * 2019-02-27 2019-10-23 Pfeiffer Vacuum Gmbh Monitoring the bearing assembly of a vacuum pump

Also Published As

Publication number Publication date
GB2619964A (en) 2023-12-27
GB202209262D0 (en) 2022-08-10
WO2023247926A1 (en) 2023-12-28

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