GB2515017B - Process gas abatement - Google Patents
Process gas abatementInfo
- Publication number
- GB2515017B GB2515017B GB1310252.0A GB201310252A GB2515017B GB 2515017 B GB2515017 B GB 2515017B GB 201310252 A GB201310252 A GB 201310252A GB 2515017 B GB2515017 B GB 2515017B
- Authority
- GB
- United Kingdom
- Prior art keywords
- process gas
- gas abatement
- abatement
- gas
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
- F23G—CREMATION FURNACES; CONSUMING WASTE PRODUCTS BY COMBUSTION
- F23G7/00—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals
- F23G7/06—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
- F23G—CREMATION FURNACES; CONSUMING WASTE PRODUCTS BY COMBUSTION
- F23G7/00—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals
- F23G7/06—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases
- F23G7/061—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases with supplementary heating
- F23G7/065—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases with supplementary heating using gaseous or liquid fuel
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
- F23L—SUPPLYING AIR OR NON-COMBUSTIBLE LIQUIDS OR GASES TO COMBUSTION APPARATUS IN GENERAL ; VALVES OR DAMPERS SPECIALLY ADAPTED FOR CONTROLLING AIR SUPPLY OR DRAUGHT IN COMBUSTION APPARATUS; INDUCING DRAUGHT IN COMBUSTION APPARATUS; TOPS FOR CHIMNEYS OR VENTILATING SHAFTS; TERMINALS FOR FLUES
- F23L7/00—Supplying non-combustible liquids or gases, other than air, to the fire, e.g. oxygen, steam
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
- F23L—SUPPLYING AIR OR NON-COMBUSTIBLE LIQUIDS OR GASES TO COMBUSTION APPARATUS IN GENERAL ; VALVES OR DAMPERS SPECIALLY ADAPTED FOR CONTROLLING AIR SUPPLY OR DRAUGHT IN COMBUSTION APPARATUS; INDUCING DRAUGHT IN COMBUSTION APPARATUS; TOPS FOR CHIMNEYS OR VENTILATING SHAFTS; TERMINALS FOR FLUES
- F23L2900/00—Special arrangements for supplying or treating air or oxidant for combustion; Injecting inert gas, water or steam into the combustion chamber
- F23L2900/07002—Injecting inert gas, other than steam or evaporated water, into the combustion chambers
Landscapes
- Engineering & Computer Science (AREA)
- Environmental & Geological Engineering (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Combustion & Propulsion (AREA)
- Incineration Of Waste (AREA)
- Treating Waste Gases (AREA)
- Air Supply (AREA)
Priority Applications (8)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| GB1310252.0A GB2515017B (en) | 2013-06-10 | 2013-06-10 | Process gas abatement |
| KR1020157034852A KR102315105B1 (en) | 2013-06-10 | 2014-05-29 | Process gas abatement |
| EP14728250.3A EP3008385B1 (en) | 2013-06-10 | 2014-05-29 | Process gas abatement |
| JP2016518580A JP6422953B2 (en) | 2013-06-10 | 2014-05-29 | Process gas abatement apparatus and abatement method |
| PCT/GB2014/051631 WO2014199123A1 (en) | 2013-06-10 | 2014-05-29 | Process gas abatement |
| CN201480033061.6A CN105556211B (en) | 2013-06-10 | 2014-05-29 | The apparatus and method for producing gas reduction |
| US14/961,916 US20160230989A1 (en) | 2013-06-10 | 2014-05-29 | Process gas abatement |
| TW103119944A TWI633926B (en) | 2013-06-10 | 2014-06-09 | Process gas abatement apparatus and method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| GB1310252.0A GB2515017B (en) | 2013-06-10 | 2013-06-10 | Process gas abatement |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| GB201310252D0 GB201310252D0 (en) | 2013-07-24 |
| GB2515017A GB2515017A (en) | 2014-12-17 |
| GB2515017B true GB2515017B (en) | 2017-09-20 |
Family
ID=48875984
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| GB1310252.0A Active GB2515017B (en) | 2013-06-10 | 2013-06-10 | Process gas abatement |
Country Status (8)
| Country | Link |
|---|---|
| US (1) | US20160230989A1 (en) |
| EP (1) | EP3008385B1 (en) |
| JP (1) | JP6422953B2 (en) |
| KR (1) | KR102315105B1 (en) |
| CN (1) | CN105556211B (en) |
| GB (1) | GB2515017B (en) |
| TW (1) | TWI633926B (en) |
| WO (1) | WO2014199123A1 (en) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110546433A (en) * | 2017-05-29 | 2019-12-06 | 北京康肯环保设备有限公司 | Method and apparatus for reducing pressure and removing harmful gas |
| GB2579197B (en) * | 2018-11-22 | 2021-06-09 | Edwards Ltd | Abatement method |
| GB2594078B (en) | 2020-04-16 | 2024-10-16 | Edwards Ltd | Flammable gas dilution |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0768109A2 (en) * | 1995-10-16 | 1997-04-16 | Teisan Kabushiki Kaisha | Exhaust gas treatment unit and process |
| WO2000062905A1 (en) * | 1999-04-20 | 2000-10-26 | Advanced Technology Materials, Inc. | Advanced apparatus and method for abattment of gaseous pollutants |
| EP1103297A1 (en) * | 1999-11-26 | 2001-05-30 | Hitachi, Ltd. | Method and apparatus for treating perfluorocompound gas |
| US20020134233A1 (en) * | 2001-03-21 | 2002-09-26 | Chae Seung-Ki | Method and apparatus for reducing PFC emission during semiconductor manufacture |
| US20020159924A1 (en) * | 1999-10-18 | 2002-10-31 | Arno Jose I. | Fluorine abatement using steam injection in oxidation treatment of semiconductor manufacturing effluent gases |
| WO2006013355A1 (en) * | 2004-08-04 | 2006-02-09 | The Boc Group Plc | Gas abatement |
Family Cites Families (18)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR2616884B1 (en) * | 1987-06-19 | 1991-05-10 | Air Liquide | PROCESS FOR THE TREATMENT OF GASEOUS EFFLUENTS FROM THE MANUFACTURE OF ELECTRONIC COMPONENTS AND AN INCINERATION APPARATUS FOR IMPLEMENTING SAME |
| JP2742562B2 (en) * | 1988-10-11 | 1998-04-22 | 千代田化工建設株式会社 | Combustion treatment method for toxic exhaust gas |
| JP2001104751A (en) * | 1999-10-04 | 2001-04-17 | Mitsubishi Electric Corp | Exhaust gas abatement system |
| JP2001185539A (en) * | 1999-12-24 | 2001-07-06 | Toshiba Corp | Gas recovery system and gas recovery method |
| US6579085B1 (en) * | 2000-05-05 | 2003-06-17 | The Boc Group, Inc. | Burner and combustion method for the production of flame jet sheets in industrial furnaces |
| US7338629B2 (en) * | 2001-02-02 | 2008-03-04 | Consolidated Engineering Company, Inc. | Integrated metal processing facility |
| JP2003056830A (en) * | 2001-08-10 | 2003-02-26 | Ebara Corp | Processing apparatus for waste gas |
| US6568185B1 (en) * | 2001-12-03 | 2003-05-27 | L'air Liquide Societe Anonyme A'directoire Et Conseil De Surveillance Pour L'etude Et L'exploitation Des Procedes Georges Claude | Combination air separation and steam-generation processes and plants therefore |
| AT411019B (en) * | 2002-03-19 | 2003-09-25 | Tribovent Verfahrensentwicklg | METHOD FOR PROCESSING RESIDUES FROM THE PULP AND PAPER INDUSTRY |
| GB0416385D0 (en) * | 2004-07-22 | 2004-08-25 | Boc Group Plc | Gas abatement |
| GB0521944D0 (en) * | 2005-10-27 | 2005-12-07 | Boc Group Plc | Method of treating gas |
| JP2007197271A (en) * | 2006-01-27 | 2007-08-09 | Canon Inc | Fuel reformer |
| GB0611968D0 (en) * | 2006-06-16 | 2006-07-26 | Boc Group Plc | Method and apparatus for the removal of fluorine from a gas system |
| US8845323B2 (en) * | 2007-03-02 | 2014-09-30 | Air Products And Chemicals, Inc. | Method and apparatus for oxy-fuel combustion |
| DE102007015309B4 (en) * | 2007-03-27 | 2023-01-05 | Ansaldo Energia Switzerland AG | Operating procedure for a turbo group |
| GB0706544D0 (en) * | 2007-04-04 | 2007-05-09 | Boc Group Plc | Combustive destruction of noxious substances |
| GB0902234D0 (en) * | 2009-02-11 | 2009-03-25 | Edwards Ltd | Method of treating an exhaust gas stream |
| JP2013044479A (en) * | 2011-08-24 | 2013-03-04 | Japan Pionics Co Ltd | Method for purifying exhaust gas containing silicon chloride compound |
-
2013
- 2013-06-10 GB GB1310252.0A patent/GB2515017B/en active Active
-
2014
- 2014-05-29 US US14/961,916 patent/US20160230989A1/en not_active Abandoned
- 2014-05-29 EP EP14728250.3A patent/EP3008385B1/en active Active
- 2014-05-29 CN CN201480033061.6A patent/CN105556211B/en active Active
- 2014-05-29 WO PCT/GB2014/051631 patent/WO2014199123A1/en not_active Ceased
- 2014-05-29 JP JP2016518580A patent/JP6422953B2/en active Active
- 2014-05-29 KR KR1020157034852A patent/KR102315105B1/en active Active
- 2014-06-09 TW TW103119944A patent/TWI633926B/en active
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0768109A2 (en) * | 1995-10-16 | 1997-04-16 | Teisan Kabushiki Kaisha | Exhaust gas treatment unit and process |
| WO2000062905A1 (en) * | 1999-04-20 | 2000-10-26 | Advanced Technology Materials, Inc. | Advanced apparatus and method for abattment of gaseous pollutants |
| US20020159924A1 (en) * | 1999-10-18 | 2002-10-31 | Arno Jose I. | Fluorine abatement using steam injection in oxidation treatment of semiconductor manufacturing effluent gases |
| EP1103297A1 (en) * | 1999-11-26 | 2001-05-30 | Hitachi, Ltd. | Method and apparatus for treating perfluorocompound gas |
| US20020134233A1 (en) * | 2001-03-21 | 2002-09-26 | Chae Seung-Ki | Method and apparatus for reducing PFC emission during semiconductor manufacture |
| WO2006013355A1 (en) * | 2004-08-04 | 2006-02-09 | The Boc Group Plc | Gas abatement |
Also Published As
| Publication number | Publication date |
|---|---|
| US20160230989A1 (en) | 2016-08-11 |
| GB201310252D0 (en) | 2013-07-24 |
| JP2016526648A (en) | 2016-09-05 |
| JP6422953B2 (en) | 2018-11-14 |
| WO2014199123A1 (en) | 2014-12-18 |
| GB2515017A (en) | 2014-12-17 |
| TW201509509A (en) | 2015-03-16 |
| KR20160019428A (en) | 2016-02-19 |
| CN105556211A (en) | 2016-05-04 |
| CN105556211B (en) | 2017-10-24 |
| KR102315105B1 (en) | 2021-10-19 |
| EP3008385A1 (en) | 2016-04-20 |
| EP3008385B1 (en) | 2018-03-14 |
| TWI633926B (en) | 2018-09-01 |
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