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GB2515017B - Process gas abatement - Google Patents

Process gas abatement

Info

Publication number
GB2515017B
GB2515017B GB1310252.0A GB201310252A GB2515017B GB 2515017 B GB2515017 B GB 2515017B GB 201310252 A GB201310252 A GB 201310252A GB 2515017 B GB2515017 B GB 2515017B
Authority
GB
United Kingdom
Prior art keywords
process gas
gas abatement
abatement
gas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
GB1310252.0A
Other versions
GB201310252D0 (en
GB2515017A (en
Inventor
James Seeley Andrew
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Edwards Ltd
Original Assignee
Edwards Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Edwards Ltd filed Critical Edwards Ltd
Priority to GB1310252.0A priority Critical patent/GB2515017B/en
Publication of GB201310252D0 publication Critical patent/GB201310252D0/en
Priority to PCT/GB2014/051631 priority patent/WO2014199123A1/en
Priority to EP14728250.3A priority patent/EP3008385B1/en
Priority to JP2016518580A priority patent/JP6422953B2/en
Priority to KR1020157034852A priority patent/KR102315105B1/en
Priority to CN201480033061.6A priority patent/CN105556211B/en
Priority to US14/961,916 priority patent/US20160230989A1/en
Priority to TW103119944A priority patent/TWI633926B/en
Publication of GB2515017A publication Critical patent/GB2515017A/en
Application granted granted Critical
Publication of GB2515017B publication Critical patent/GB2515017B/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23GCREMATION FURNACES; CONSUMING WASTE PRODUCTS BY COMBUSTION
    • F23G7/00Incinerators or other apparatus for consuming industrial waste, e.g. chemicals
    • F23G7/06Incinerators or other apparatus for consuming industrial waste, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23GCREMATION FURNACES; CONSUMING WASTE PRODUCTS BY COMBUSTION
    • F23G7/00Incinerators or other apparatus for consuming industrial waste, e.g. chemicals
    • F23G7/06Incinerators or other apparatus for consuming industrial waste, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases
    • F23G7/061Incinerators or other apparatus for consuming industrial waste, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases with supplementary heating
    • F23G7/065Incinerators or other apparatus for consuming industrial waste, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases with supplementary heating using gaseous or liquid fuel
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23LSUPPLYING AIR OR NON-COMBUSTIBLE LIQUIDS OR GASES TO COMBUSTION APPARATUS IN GENERAL ; VALVES OR DAMPERS SPECIALLY ADAPTED FOR CONTROLLING AIR SUPPLY OR DRAUGHT IN COMBUSTION APPARATUS; INDUCING DRAUGHT IN COMBUSTION APPARATUS; TOPS FOR CHIMNEYS OR VENTILATING SHAFTS; TERMINALS FOR FLUES
    • F23L7/00Supplying non-combustible liquids or gases, other than air, to the fire, e.g. oxygen, steam
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23LSUPPLYING AIR OR NON-COMBUSTIBLE LIQUIDS OR GASES TO COMBUSTION APPARATUS IN GENERAL ; VALVES OR DAMPERS SPECIALLY ADAPTED FOR CONTROLLING AIR SUPPLY OR DRAUGHT IN COMBUSTION APPARATUS; INDUCING DRAUGHT IN COMBUSTION APPARATUS; TOPS FOR CHIMNEYS OR VENTILATING SHAFTS; TERMINALS FOR FLUES
    • F23L2900/00Special arrangements for supplying or treating air or oxidant for combustion; Injecting inert gas, water or steam into the combustion chamber
    • F23L2900/07002Injecting inert gas, other than steam or evaporated water, into the combustion chambers

Landscapes

  • Engineering & Computer Science (AREA)
  • Environmental & Geological Engineering (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Incineration Of Waste (AREA)
  • Treating Waste Gases (AREA)
  • Air Supply (AREA)
GB1310252.0A 2013-06-10 2013-06-10 Process gas abatement Active GB2515017B (en)

Priority Applications (8)

Application Number Priority Date Filing Date Title
GB1310252.0A GB2515017B (en) 2013-06-10 2013-06-10 Process gas abatement
KR1020157034852A KR102315105B1 (en) 2013-06-10 2014-05-29 Process gas abatement
EP14728250.3A EP3008385B1 (en) 2013-06-10 2014-05-29 Process gas abatement
JP2016518580A JP6422953B2 (en) 2013-06-10 2014-05-29 Process gas abatement apparatus and abatement method
PCT/GB2014/051631 WO2014199123A1 (en) 2013-06-10 2014-05-29 Process gas abatement
CN201480033061.6A CN105556211B (en) 2013-06-10 2014-05-29 The apparatus and method for producing gas reduction
US14/961,916 US20160230989A1 (en) 2013-06-10 2014-05-29 Process gas abatement
TW103119944A TWI633926B (en) 2013-06-10 2014-06-09 Process gas abatement apparatus and method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB1310252.0A GB2515017B (en) 2013-06-10 2013-06-10 Process gas abatement

Publications (3)

Publication Number Publication Date
GB201310252D0 GB201310252D0 (en) 2013-07-24
GB2515017A GB2515017A (en) 2014-12-17
GB2515017B true GB2515017B (en) 2017-09-20

Family

ID=48875984

Family Applications (1)

Application Number Title Priority Date Filing Date
GB1310252.0A Active GB2515017B (en) 2013-06-10 2013-06-10 Process gas abatement

Country Status (8)

Country Link
US (1) US20160230989A1 (en)
EP (1) EP3008385B1 (en)
JP (1) JP6422953B2 (en)
KR (1) KR102315105B1 (en)
CN (1) CN105556211B (en)
GB (1) GB2515017B (en)
TW (1) TWI633926B (en)
WO (1) WO2014199123A1 (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110546433A (en) * 2017-05-29 2019-12-06 北京康肯环保设备有限公司 Method and apparatus for reducing pressure and removing harmful gas
GB2579197B (en) * 2018-11-22 2021-06-09 Edwards Ltd Abatement method
GB2594078B (en) 2020-04-16 2024-10-16 Edwards Ltd Flammable gas dilution

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0768109A2 (en) * 1995-10-16 1997-04-16 Teisan Kabushiki Kaisha Exhaust gas treatment unit and process
WO2000062905A1 (en) * 1999-04-20 2000-10-26 Advanced Technology Materials, Inc. Advanced apparatus and method for abattment of gaseous pollutants
EP1103297A1 (en) * 1999-11-26 2001-05-30 Hitachi, Ltd. Method and apparatus for treating perfluorocompound gas
US20020134233A1 (en) * 2001-03-21 2002-09-26 Chae Seung-Ki Method and apparatus for reducing PFC emission during semiconductor manufacture
US20020159924A1 (en) * 1999-10-18 2002-10-31 Arno Jose I. Fluorine abatement using steam injection in oxidation treatment of semiconductor manufacturing effluent gases
WO2006013355A1 (en) * 2004-08-04 2006-02-09 The Boc Group Plc Gas abatement

Family Cites Families (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2616884B1 (en) * 1987-06-19 1991-05-10 Air Liquide PROCESS FOR THE TREATMENT OF GASEOUS EFFLUENTS FROM THE MANUFACTURE OF ELECTRONIC COMPONENTS AND AN INCINERATION APPARATUS FOR IMPLEMENTING SAME
JP2742562B2 (en) * 1988-10-11 1998-04-22 千代田化工建設株式会社 Combustion treatment method for toxic exhaust gas
JP2001104751A (en) * 1999-10-04 2001-04-17 Mitsubishi Electric Corp Exhaust gas abatement system
JP2001185539A (en) * 1999-12-24 2001-07-06 Toshiba Corp Gas recovery system and gas recovery method
US6579085B1 (en) * 2000-05-05 2003-06-17 The Boc Group, Inc. Burner and combustion method for the production of flame jet sheets in industrial furnaces
US7338629B2 (en) * 2001-02-02 2008-03-04 Consolidated Engineering Company, Inc. Integrated metal processing facility
JP2003056830A (en) * 2001-08-10 2003-02-26 Ebara Corp Processing apparatus for waste gas
US6568185B1 (en) * 2001-12-03 2003-05-27 L'air Liquide Societe Anonyme A'directoire Et Conseil De Surveillance Pour L'etude Et L'exploitation Des Procedes Georges Claude Combination air separation and steam-generation processes and plants therefore
AT411019B (en) * 2002-03-19 2003-09-25 Tribovent Verfahrensentwicklg METHOD FOR PROCESSING RESIDUES FROM THE PULP AND PAPER INDUSTRY
GB0416385D0 (en) * 2004-07-22 2004-08-25 Boc Group Plc Gas abatement
GB0521944D0 (en) * 2005-10-27 2005-12-07 Boc Group Plc Method of treating gas
JP2007197271A (en) * 2006-01-27 2007-08-09 Canon Inc Fuel reformer
GB0611968D0 (en) * 2006-06-16 2006-07-26 Boc Group Plc Method and apparatus for the removal of fluorine from a gas system
US8845323B2 (en) * 2007-03-02 2014-09-30 Air Products And Chemicals, Inc. Method and apparatus for oxy-fuel combustion
DE102007015309B4 (en) * 2007-03-27 2023-01-05 Ansaldo Energia Switzerland AG Operating procedure for a turbo group
GB0706544D0 (en) * 2007-04-04 2007-05-09 Boc Group Plc Combustive destruction of noxious substances
GB0902234D0 (en) * 2009-02-11 2009-03-25 Edwards Ltd Method of treating an exhaust gas stream
JP2013044479A (en) * 2011-08-24 2013-03-04 Japan Pionics Co Ltd Method for purifying exhaust gas containing silicon chloride compound

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0768109A2 (en) * 1995-10-16 1997-04-16 Teisan Kabushiki Kaisha Exhaust gas treatment unit and process
WO2000062905A1 (en) * 1999-04-20 2000-10-26 Advanced Technology Materials, Inc. Advanced apparatus and method for abattment of gaseous pollutants
US20020159924A1 (en) * 1999-10-18 2002-10-31 Arno Jose I. Fluorine abatement using steam injection in oxidation treatment of semiconductor manufacturing effluent gases
EP1103297A1 (en) * 1999-11-26 2001-05-30 Hitachi, Ltd. Method and apparatus for treating perfluorocompound gas
US20020134233A1 (en) * 2001-03-21 2002-09-26 Chae Seung-Ki Method and apparatus for reducing PFC emission during semiconductor manufacture
WO2006013355A1 (en) * 2004-08-04 2006-02-09 The Boc Group Plc Gas abatement

Also Published As

Publication number Publication date
US20160230989A1 (en) 2016-08-11
GB201310252D0 (en) 2013-07-24
JP2016526648A (en) 2016-09-05
JP6422953B2 (en) 2018-11-14
WO2014199123A1 (en) 2014-12-18
GB2515017A (en) 2014-12-17
TW201509509A (en) 2015-03-16
KR20160019428A (en) 2016-02-19
CN105556211A (en) 2016-05-04
CN105556211B (en) 2017-10-24
KR102315105B1 (en) 2021-10-19
EP3008385A1 (en) 2016-04-20
EP3008385B1 (en) 2018-03-14
TWI633926B (en) 2018-09-01

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