GB2597041B - Improved inertial sensor - Google Patents

Improved inertial sensor Download PDF

Info

Publication number: GB2597041B
Authority: GB; United Kingdom
Prior art keywords: inertial sensor; improved inertial; improved; sensor; inertial
Prior art date: 2018-12-20
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Active

Application number

GB1916195.9A

Other versions

GB2597041A (en

Inventor

Vercier Nicolas

Martin Nicolas

Coatantiec Jacques

Chaumet Bernard

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

Thales SA

Original Assignee

Thales SA

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

2018-12-20

Filing date

2019-11-05

Publication date

2022-09-14

2019-11-05 Application filed by Thales SA filed Critical Thales SA

2022-01-19 Publication of GB2597041A publication Critical patent/GB2597041A/en

2022-09-14 Application granted granted Critical

2022-09-14 Publication of GB2597041B publication Critical patent/GB2597041B/en

Status Active legal-status Critical Current

2039-11-05 Anticipated expiration legal-status Critical

Classifications

- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
- G01C19/5719—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using planar vibrating masses driven in a translation vibration along an axis
- G01C19/5733—Structural details or topology
- G01C19/5755—Structural details or topology the devices having a single sensing mass
- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
- G01C19/5719—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using planar vibrating masses driven in a translation vibration along an axis
- G01C19/5726—Signal processing
- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
- G01C19/5607—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating tuning forks
- G01C19/5614—Signal processing
- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
- G01C19/5607—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating tuning forks
- G01C19/5621—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating tuning forks the devices involving a micromechanical structure
- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
- G01C19/5719—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using planar vibrating masses driven in a translation vibration along an axis
- G01C19/5733—Structural details or topology
- G01C19/574—Structural details or topology the devices having two sensing masses in anti-phase motion

Landscapes

Engineering & Computer Science (AREA)
Physics & Mathematics (AREA)
General Physics & Mathematics (AREA)
Radar, Positioning & Navigation (AREA)
Remote Sensing (AREA)
Signal Processing (AREA)
Gyroscopes (AREA)

GB1916195.9A 2018-12-20 2019-11-05 Improved inertial sensor Active GB2597041B (en)

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
FR1873534A FR3098295B1 (en)	2018-12-20	2018-12-20	Improved inertial sensor

Publications (2)

Publication Number	Publication Date
GB2597041A GB2597041A (en)	2022-01-19
GB2597041B true GB2597041B (en)	2022-09-14

Family

ID=73642915

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
GB1916195.9A Active GB2597041B (en)	2018-12-20	2019-11-05	Improved inertial sensor

Country Status (3)

Country	Link
DE (1)	DE102019008491A1 (en)
FR (1)	FR3098295B1 (en)
GB (1)	GB2597041B (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US11879906B2 (en)	2021-11-18	2024-01-23	Invensense, Inc.	Inertial sensor sensing of vibration frequency
FR3160461A1 (en) *	2024-03-25	2025-09-26	Thales	Gyroscopic measuring method and sensor

Citations (2)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US20150377621A1 (en) *	2014-06-27	2015-12-31	Thales	Mems angular inertial sensor operating in tuning fork mode
US20180266822A1 (en) *	2017-03-15	2018-09-20	Hitachi, Ltd.	Gyroscope

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US8448513B2 (en) *	2011-10-05	2013-05-28	Freescale Semiconductor, Inc.	Rotary disk gyroscope

2018
- 2018-12-20 FR FR1873534A patent/FR3098295B1/en active Active
2019
- 2019-11-05 GB GB1916195.9A patent/GB2597041B/en active Active
- 2019-12-06 DE DE102019008491.8A patent/DE102019008491A1/en active Pending

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US20150377621A1 (en) *	2014-06-27	2015-12-31	Thales	Mems angular inertial sensor operating in tuning fork mode
US20180266822A1 (en) *	2017-03-15	2018-09-20	Hitachi, Ltd.	Gyroscope

Also Published As

Publication number	Publication date
DE102019008491A8 (en)	2021-07-22
FR3098295A1 (en)	2021-01-08
DE102019008491A1 (en)	2021-07-08
GB2597041A (en)	2022-01-19
FR3098295B1 (en)	2021-11-19

Publication	Publication Date	Title
GB201602331D0 (en)	2016-03-23	Inertial sensors
AU201815502S (en)	2018-11-26	Movement sensors
SG11202102280SA (en)	2021-04-29	Retrographic sensors
GB201818712D0 (en)	2019-01-02	Accelerometer
GB201915139D0 (en)	2019-12-04	Sensor determination
IL276709B1 (en)	2023-06-01	Sensor unit
PL3620346T3 (en)	2021-07-26	Sensor arrangement
GB201713041D0 (en)	2017-09-27	Sensor Cover
GB2568885B (en)	2022-07-27	Sensor arrangement
SG11202104665XA (en)	2021-06-29	Improved wafer-like sensor
GB201701291D0 (en)	2017-03-15	Sensor
GB201514321D0 (en)	2015-09-23	Inertial sensor
GB201811925D0 (en)	2018-09-05	Sensor packages
GB201618039D0 (en)	2016-12-07	Inertial sensor
GB2597041B (en)	2022-09-14	Improved inertial sensor
GB2570714B (en)	2022-03-02	Accelerometers
GB2570732B (en)	2023-01-11	Angular rate sensors
GB201721314D0 (en)	2018-01-31	Improved sensor
GB201708813D0 (en)	2017-07-19	Sensors
GB201903049D0 (en)	2019-04-24	Sensor
GB201902361D0 (en)	2019-04-10	Sensor
PL3669153T3 (en)	2025-07-28	Sensor
GB201714478D0 (en)	2017-10-25	Sensor
GB201714068D0 (en)	2017-10-18	Sensor
GB2558899B (en)	2022-05-25	Sensor