[go: up one dir, main page]

GB2589481B - Evaporator body - Google Patents

Evaporator body Download PDF

Info

Publication number
GB2589481B
GB2589481B GB2019836.2A GB202019836A GB2589481B GB 2589481 B GB2589481 B GB 2589481B GB 202019836 A GB202019836 A GB 202019836A GB 2589481 B GB2589481 B GB 2589481B
Authority
GB
United Kingdom
Prior art keywords
evaporator body
evaporator
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
GB2019836.2A
Other versions
GB2589481A (en
GB202019836D0 (en
Inventor
Goetz Philipp
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Cvt & Co KG GmbH
Original Assignee
Cvt & Co KG GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Cvt & Co KG GmbH filed Critical Cvt & Co KG GmbH
Publication of GB202019836D0 publication Critical patent/GB202019836D0/en
Publication of GB2589481A publication Critical patent/GB2589481A/en
Application granted granted Critical
Publication of GB2589481B publication Critical patent/GB2589481B/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/14—Metallic material, boron or silicon
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/243—Crucibles for source material
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/246—Replenishment of source material
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/26—Vacuum evaporation by resistance or inductive heating of the source
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • C23C14/562—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks for coating elongated substrates

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Vaporization, Distillation, Condensation, Sublimation, And Cold Traps (AREA)
GB2019836.2A 2018-06-06 2019-05-23 Evaporator body Active GB2589481B (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102018113528.9A DE102018113528B4 (en) 2018-06-06 2018-06-06 evaporator body
PCT/EP2019/063317 WO2019233775A1 (en) 2018-06-06 2019-05-23 Evaporator body

Publications (3)

Publication Number Publication Date
GB202019836D0 GB202019836D0 (en) 2021-01-27
GB2589481A GB2589481A (en) 2021-06-02
GB2589481B true GB2589481B (en) 2022-11-23

Family

ID=66857858

Family Applications (1)

Application Number Title Priority Date Filing Date
GB2019836.2A Active GB2589481B (en) 2018-06-06 2019-05-23 Evaporator body

Country Status (4)

Country Link
CN (1) CN112218974B (en)
DE (1) DE102018113528B4 (en)
GB (1) GB2589481B (en)
WO (1) WO2019233775A1 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2022038548A1 (en) * 2020-08-19 2022-02-24 3M Innovative Properties Company Evaporation boat for evaporation of metals

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1688514A1 (en) * 2003-11-20 2006-08-09 Denki Kagaku Kogyo Kabushiki Kaisha Metal vaporizing heating element and metal vaporizing method
US20070110412A1 (en) * 2005-11-04 2007-05-17 General Electric Company Container for evaporation of metal and method to manufacture thereof
DE102015211746A1 (en) * 2015-06-24 2016-12-29 Kennametal Inc. Evaporator body and operation of such an evaporator body

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4704605B2 (en) * 2001-05-23 2011-06-15 淳二 城戸 Continuous vapor deposition apparatus, vapor deposition apparatus and vapor deposition method
JP2006118017A (en) * 2004-10-25 2006-05-11 Denki Kagaku Kogyo Kk Metal evaporation heating element
CN100487154C (en) * 2003-11-20 2009-05-13 电气化学工业株式会社 Metal evaporation heating element and metal evaporation method
JP4772705B2 (en) 2007-01-15 2011-09-14 電気化学工業株式会社 Metal evaporation heating element
DE102013211034B4 (en) 2013-06-13 2024-03-28 Kennametal Inc. Evaporator body and method for vaporizing an object using such an evaporator body

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1688514A1 (en) * 2003-11-20 2006-08-09 Denki Kagaku Kogyo Kabushiki Kaisha Metal vaporizing heating element and metal vaporizing method
US20070110412A1 (en) * 2005-11-04 2007-05-17 General Electric Company Container for evaporation of metal and method to manufacture thereof
DE102015211746A1 (en) * 2015-06-24 2016-12-29 Kennametal Inc. Evaporator body and operation of such an evaporator body

Also Published As

Publication number Publication date
CN112218974B (en) 2023-02-17
WO2019233775A1 (en) 2019-12-12
DE102018113528B4 (en) 2022-07-28
GB2589481A (en) 2021-06-02
GB202019836D0 (en) 2021-01-27
DE102018113528A1 (en) 2019-12-12
CN112218974A (en) 2021-01-12

Similar Documents

Publication Publication Date Title
CA187364S (en) Cup
CA200109S (en) Cup
GB2590809B (en) Sucktion cup
IL275676A (en) Ejaculation control
CA186179S (en) Evaporator cover
GB2587996B (en) Structural body
PL3669974T3 (en) Laminated body
CA185189S (en) Faucet body
PL3614923T3 (en) Separation body
PL3615931T3 (en) Separating body
EP3892395A4 (en) Can body
GB2572425B (en) Body shape indicator
SG11202009229UA (en) Refrigerator-freezer
GB2589481B (en) Evaporator body
ZA202102137B (en) Drill body
EP3893698C0 (en) Body support
SMT202200029T1 (en) Radiant body
PL3642136T3 (en) Interchangeable body
GB201807050D0 (en) Medical uses
PL3829814T3 (en) Slide-grinding body
CA192160S (en) Vaporizer body
GB2587950B (en) Body support
GB2578435B (en) Body jewellery
SG11202110787TA (en) Moving body
GB201817727D0 (en) Vehicle body

Legal Events

Date Code Title Description
789A Request for publication of translation (sect. 89(a)/1977)

Ref document number: 2019233775

Country of ref document: WO