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GB2551890B - Plasma generating apparatus - Google Patents

Plasma generating apparatus Download PDF

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Publication number
GB2551890B
GB2551890B GB1707341.2A GB201707341A GB2551890B GB 2551890 B GB2551890 B GB 2551890B GB 201707341 A GB201707341 A GB 201707341A GB 2551890 B GB2551890 B GB 2551890B
Authority
GB
United Kingdom
Prior art keywords
generating apparatus
plasma generating
plasma
generating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
GB1707341.2A
Other versions
GB2551890A (en
GB201707341D0 (en
Inventor
Jung Hee-Soo
Choi Seung-Ki
Shim Woo-Sub
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Agency for Defence Development
Original Assignee
Agency for Defence Development
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency for Defence Development filed Critical Agency for Defence Development
Publication of GB201707341D0 publication Critical patent/GB201707341D0/en
Publication of GB2551890A publication Critical patent/GB2551890A/en
Application granted granted Critical
Publication of GB2551890B publication Critical patent/GB2551890B/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61L—METHODS OR APPARATUS FOR STERILISING MATERIALS OR OBJECTS IN GENERAL; DISINFECTION, STERILISATION OR DEODORISATION OF AIR; CHEMICAL ASPECTS OF BANDAGES, DRESSINGS, ABSORBENT PADS OR SURGICAL ARTICLES; MATERIALS FOR BANDAGES, DRESSINGS, ABSORBENT PADS OR SURGICAL ARTICLES
    • A61L2/00—Methods or apparatus for disinfecting or sterilising materials or objects other than foodstuffs or contact lenses; Accessories therefor
    • A61L2/02—Methods or apparatus for disinfecting or sterilising materials or objects other than foodstuffs or contact lenses; Accessories therefor using physical phenomena
    • A61L2/14—Plasma, i.e. ionised gases
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/32458—Vessel
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/32458—Vessel
    • H01J37/32467—Material
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/32532—Electrodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/32532—Electrodes
    • H01J37/32541—Shape
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/32532—Electrodes
    • H01J37/3255—Material
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/32532—Electrodes
    • H01J37/32568—Relative arrangement or disposition of electrodes; moving means
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/32798—Further details of plasma apparatus not provided for in groups H01J37/3244 - H01J37/32788; special provisions for cleaning or maintenance of the apparatus
    • H01J37/32816—Pressure
    • H01J37/32834—Exhausting
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/47—Generating plasma using corona discharges
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H2245/00—Applications of plasma devices
    • H05H2245/30—Medical applications
    • H05H2245/36—Sterilisation of objects, liquids, volumes or surfaces
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H2245/00—Applications of plasma devices
    • H05H2245/40—Surface treatments

Landscapes

  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Epidemiology (AREA)
  • Animal Behavior & Ethology (AREA)
  • General Health & Medical Sciences (AREA)
  • Public Health (AREA)
  • Veterinary Medicine (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Apparatus For Disinfection Or Sterilisation (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Plasma Technology (AREA)
GB1707341.2A 2016-05-11 2017-05-08 Plasma generating apparatus Active GB2551890B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1020160057443A KR101709167B1 (en) 2016-05-11 2016-05-11 Plasma generating apparatus

Publications (3)

Publication Number Publication Date
GB201707341D0 GB201707341D0 (en) 2017-06-21
GB2551890A GB2551890A (en) 2018-01-03
GB2551890B true GB2551890B (en) 2020-06-03

Family

ID=58314636

Family Applications (1)

Application Number Title Priority Date Filing Date
GB1707341.2A Active GB2551890B (en) 2016-05-11 2017-05-08 Plasma generating apparatus

Country Status (2)

Country Link
KR (1) KR101709167B1 (en)
GB (1) GB2551890B (en)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102017104852A1 (en) 2017-03-08 2018-09-13 Cinogy Gmbh Flat flexible electrode arrangement for a dielectrically impeded plasma discharge
DE102017111902B4 (en) * 2017-05-31 2020-12-31 Cinogy Gmbh Flat support arrangement
DE102017118652A1 (en) * 2017-08-16 2019-02-21 Hochschule Für Angewandte Wissenschaft Und Kunst Hildesheim/Holzminden/Göttingen Plasma generator module and its use
DE102017008810A1 (en) 2017-09-20 2019-03-21 Cetteen Gmbh MBFEX tube
KR101903026B1 (en) * 2018-02-13 2018-10-01 한국기초과학지원연구원 Water treatment low-temperature plasma generation device
EP3626031B1 (en) * 2018-03-23 2025-07-16 Coldplasmatech GmbH System comprising an energy supply unit, a plasma applicator and a write-read device, and use of this system
US12496456B2 (en) 2018-03-23 2025-12-16 Coldplasmatech Gmbh Plasma applicator
WO2024192184A1 (en) * 2023-03-14 2024-09-19 TellaPure, LLC Methods and apparatus for generating atmospheric pressure, low temperature plasma with changing parameters

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE202008008734U1 (en) * 2008-07-02 2009-11-19 Melitta Haushaltsprodukte Gmbh & Co. Kg Device for the electronic treatment of objects in a foil bag and foil bag
US20110055113A1 (en) * 2009-08-28 2011-03-03 Conor Cunningham Method and system for managing spread orders
US20110247649A1 (en) * 2008-10-17 2011-10-13 Nederlandse Organisatie Voor Toegepast- Natuurwetenschappelijk Onderzoek Tno Method and an apparatus for cleaning and/or sterilization of an object provided in a sealed enclosure
KR101492864B1 (en) * 2013-10-08 2015-02-13 한국과학기술원 Food packing material generating plasma
WO2016028037A1 (en) * 2014-08-18 2016-02-25 주식회사 플라즈맵 Plasma sterilization film and plasma sterilization packaging container
US20160262251A1 (en) * 2015-03-05 2016-09-08 Agency For Defense Development Plasma generation electrode module, plasma generation electrode assembly, and apparatus for generating plasma using the same
WO2016182384A1 (en) * 2015-05-13 2016-11-17 주식회사 플라즈맵 Plasma sterilization film, sterilization packaging container and power supply device applied to same

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008183025A (en) * 2007-01-26 2008-08-14 National Univ Corp Shizuoka Univ Package sterilization method and sterilization apparatus
JP6317927B2 (en) * 2012-01-09 2018-04-25 ムー・メディカル・デバイスズ・エルエルシーＭｏｅ Ｍｅｄｉｃａｌ Ｄｅｖｉｃｅｓ Ｌｌｃ Plasma assisted skin treatment

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE202008008734U1 (en) * 2008-07-02 2009-11-19 Melitta Haushaltsprodukte Gmbh & Co. Kg Device for the electronic treatment of objects in a foil bag and foil bag
US20110247649A1 (en) * 2008-10-17 2011-10-13 Nederlandse Organisatie Voor Toegepast- Natuurwetenschappelijk Onderzoek Tno Method and an apparatus for cleaning and/or sterilization of an object provided in a sealed enclosure
US20110055113A1 (en) * 2009-08-28 2011-03-03 Conor Cunningham Method and system for managing spread orders
KR101492864B1 (en) * 2013-10-08 2015-02-13 한국과학기술원 Food packing material generating plasma
WO2016028037A1 (en) * 2014-08-18 2016-02-25 주식회사 플라즈맵 Plasma sterilization film and plasma sterilization packaging container
US20160262251A1 (en) * 2015-03-05 2016-09-08 Agency For Defense Development Plasma generation electrode module, plasma generation electrode assembly, and apparatus for generating plasma using the same
WO2016182384A1 (en) * 2015-05-13 2016-11-17 주식회사 플라즈맵 Plasma sterilization film, sterilization packaging container and power supply device applied to same

Also Published As

Publication number Publication date
GB2551890A (en) 2018-01-03
GB201707341D0 (en) 2017-06-21
KR101709167B1 (en) 2017-02-22

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