[go: up one dir, main page]

GB2420379A - Vacuum pump having a motor combined with an impeller - Google Patents

Vacuum pump having a motor combined with an impeller Download PDF

Info

Publication number
GB2420379A
GB2420379A GB0425447A GB0425447A GB2420379A GB 2420379 A GB2420379 A GB 2420379A GB 0425447 A GB0425447 A GB 0425447A GB 0425447 A GB0425447 A GB 0425447A GB 2420379 A GB2420379 A GB 2420379A
Authority
GB
United Kingdom
Prior art keywords
rotor
stator
cylindrical
rotor element
pump
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
GB0425447A
Other versions
GB0425447D0 (en
Inventor
Emmanuel Uzoma Okoroafor
Nigel Paul Schofield
James Alexander Haylock
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
BOC Group Ltd
Original Assignee
BOC Group Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by BOC Group Ltd filed Critical BOC Group Ltd
Priority to GB0425447A priority Critical patent/GB2420379A/en
Publication of GB0425447D0 publication Critical patent/GB0425447D0/en
Publication of GB2420379A publication Critical patent/GB2420379A/en
Withdrawn legal-status Critical Current

Links

Classifications

    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04DNON-POSITIVE-DISPLACEMENT PUMPS
    • F04D25/00Pumping installations or systems
    • F04D25/02Units comprising pumps and their driving means
    • F04D25/06Units comprising pumps and their driving means the pump being electrically driven
    • F04D25/0606Units comprising pumps and their driving means the pump being electrically driven the electric motor being specially adapted for integration in the pump
    • F04D25/0613Units comprising pumps and their driving means the pump being electrically driven the electric motor being specially adapted for integration in the pump the electric motor being of the inside-out type, i.e. the rotor is arranged radially outside a central stator
    • F04D25/064Details of the rotor
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04DNON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00Axial-flow pumps
    • F04D19/02Multi-stage pumps
    • F04D19/04Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/044Holweck-type pumps
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04DNON-POSITIVE-DISPLACEMENT PUMPS
    • F04D25/00Pumping installations or systems
    • F04D25/02Units comprising pumps and their driving means
    • F04D25/06Units comprising pumps and their driving means the pump being electrically driven
    • F04D25/0606Units comprising pumps and their driving means the pump being electrically driven the electric motor being specially adapted for integration in the pump
    • F04D25/0613Units comprising pumps and their driving means the pump being electrically driven the electric motor being specially adapted for integration in the pump the electric motor being of the inside-out type, i.e. the rotor is arranged radially outside a central stator
    • F04D25/0646Details of the stator

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Structures Of Non-Positive Displacement Pumps (AREA)

Abstract

A vacuum pump, such as a Holweck type pump, includes a pump rotor 18, a cylindrical rotor element 20, a stator 12 and a motor. The cylindrical rotor element 20 is mounted on the pump rotor 18, and the stator 12 includes a threaded cylindrical element 22 adjacent the cylindrical rotor element 20. The motor includes a rotor element 26 which is mounted on an inner surface of the cylindrical rotor element 20. The pump rotor 18 and stator 12 may be formed from composite materials, such as organic matrix materials, which may comprise a resin with reinforcing fibres and/or particulates. The pump rotor 18 and cylindrical rotor element 20 may be mounted co-axially on a shaft 10. The shaft 10 may be formed from a metallic material.

Description

VACUUM PUMP
This invention relates to a vacuum pump, and in particular to a vacuum pump comprising a molecular drag pumping mechanism.
A known type of molecular drag pumping mechanism is the Holweck pumping mechanism. A Holweck mechanism typically comprises one or more concentric cylindrical rotor elements mounted on a metallic rotor extending substantially orthogonal to a metallic drive shaft such that the longitudinal axes of the cylinders io are concentric with the longitudinal axis of the drive shaft. The cylinders are located within a stator having helical grooves of a progressively tapering section.
Traditionally, the rotor elements of a motor for driving the rotor are located on the drive shaft. For example, the rotor elements of the motor may be mounted on the is external surface of the drive shaft. However, the rotor elements of the motor subsequently require sheathing to protect the rotor elements, usually performed by mounting a metallic or composite shell over the rotor elements, and this tends to be a relatively complex procedure. Alternatively, the rotor elements may be located in a bore formed in the drive shaft. As the formation of a bore in the shaft can reduce the overall stiffness of the shaft, this requires the shaft to be formed from material having a relatively high specific stiffness and strength, increasing costs.
The present invention provides a vacuum pump comprising a rotor, a cylindrical rotor element formed from composite material and mounted on the rotor, a stator comprising a threaded cylindrical stator element adjacent the cylindrical rotor element, and a motor for driving the rotor, wherein a rotor element of the motor is mounted on the inner surface of the cylindrical rotor element.
The cylindrical rotor element is preferably formed from organic matrix composite material, such as carbon-fibre reinforced epoxy resin. Such material exhibits high specific stiftness and strength, and thus enables the rotor element to withstand -2- M04B162/ASB both the high levels of mechanical stress that occur during high-speed rotation of the rotor (typically greater than 330 m/s) and the additional load placed thereon by the motor rotor element.
In the preferred embodiment, the rotor is also formed from composite material, preferably one having an organic matrix, such as a resin with reinforcing particulates and/or fibres. The rotor is preferably mounted on a shaft co-axial with the cylindrical rotor element. The shaft may be formed from metallic material, such as aluminium or an alloy thereof, or from any other material of sufficient io specific stiffness and strength to withstand the stresses applied thereto during use.
By forming the rotor from composite material, the combination of rotor, cylindrical rotor element and motor rotor element will have a relatively low inertia during use.
A consequence of this is that in the result of a pump failure during use, any is fragments of this combination can be retained within the pump using a relatively low strength stator. In contrast, in the prior art where a metallic rotor is used, a metallic stator is required to retain any fragments of the rotor in the event of a failure. Therefore, in the preferred embodiment the stator is formed from composite material, preferably one having an organic matrix, such as a resin with reinforcing particulates and/or fibres.
Further magnetic elements may be mounted on the inner surface of the cylindrical rotor element as required. For example, elements of a passive magnetic bearing may be conveniently mounted on the cylindrical rotor element.
In addition to the molecular drag pumping mechanism defined by the rotor and stator elements of the pump, additional pumping stages may be provided as required. For example, one or more turbomolecular stage may be provided upstream from the molecular drag pumping mechanism, and/or one or more regenerative stages may be provided downstream from the molecular drag pumping mechanism.
-3- M04B162/ASB Preferred features of the present invention will now be described, by way of example only, with reference to the accompanying drawing which is a schematic cross-sectional view of part of a vacuum pump having a molecular drag pumping mechanism. An impeller of the pump comprises a shaft 10 formed from an aluminium alloy and retained within a stator 12 using bearings 14 for rotation relative thereto about the longitudinal axis 16 of the shaft 10. A rotor 18 is attached to one of the end of the shaft 10. In this example, the rotor 18 is in the form of a disc extending substantially orthogonal to the longitudinal axis 16 of the shaft 10. The rotor 18 is formed from an organic matrix composite material comprising a resin filled with reinforcing particles and/or fibres. For example, the rotor may be formed from a thermoplastic resin, such as PEEK (poly-ether- ether- ketone), reinforced with glass or carbon particles.
A cylindrical rotor element 20 of the impeller is attached to the rotor 18 such that the longitudinal axis of the cylindrical rotor element 20 is substantially co-axial with the longitudinal axis of the shaft 10. However, any number of such rotor elements may be attached to the rotor 18; where two or more rotor elements 20 are provided these are preferably arranged in a concentric manner on the rotor 18.
The cylindrical rotor element 20 is also formed from an organic matrix composite material. This material is preferably a thermosetting resin, such as epoxy, filled with reinforcing carbon fibres.
The stator 12 is provided with threaded elements 22 having helical grooves 24 adjacent the rotor element 20, each of a progressively tapering section, to define a two stage molecular drag pumping mechanism. Additional stages may be provided by including additional rotor elements 20 and corresponding threaded elements 22 of the stator 12.
A motor drives rotation of the impeller relative to the stator 12. As shown in the figure, one or more rotor elements 26 of the motor are mounted on the inner surface of the cylindrical rotor element 20 of the impeller, and a stator element 28 of the motor is mounted on the stator 12 of the pumping mechanism adjacent the -4- M04B162/ASB motor rotor element 26 and surrounded by coils 30. In this example, each motor rotor element 26 is preferably a permanent magnet formed from one of Samarium- Cobalt (SmCo5) or Iron-Nd-Boron (FeNdB) or Polymer-bonded-FeNdB, and thus requires a back iron element 32 to return and maintain the magnet flux across the poles of the motor rotor element 26. Alternatively, the motor rotor elements may have a Halbach magnetisation pattern so that a back iron element is not required.
The motor rotor elements 26 and, where required, back iron elements 32, may be enclosed within a shell 34, formed for example from aluminium, io In addition to defining the stator elements 22 of the pumping mechanism, the stator 12 serves to retain any fragments of the impeller generated as a result of pump failure. As the rotor 18 and cylindrical rotor element 20 are formed from composite material, the impeller will be relatively light, and so the kinetic energy stored in the impeller during rotation will be relatively low. As a result, the energy of any fragments generated by a pump failure will also be relatively low. In view of this, in the illustrated example the stator 12 may be conveniently formed from an organic matrix composite material, as this will have sufficient strength to retain any fragments of the impeller. This material is preferably a thermoplastic resin, such as PPS (polyphenylene sulphide), filled with reinforcing particles and/or fibres formed from glass or carbon. A relatively light, cheap pump can thus be provided.

Claims (9)

-5- M04B162/ASB CLAIMS
1. A vacuum pump comprising a rotor, a cylindrical rotor element formed from composite material and mounted on the rotor, a stator comprising a threaded cylindrical stator element adjacent the cylindrical rotor element, and a motor for driving the rotor, wherein a rotor element of the motor is mounted on the inner surface of the cylindrical rotor element.
2. A pump according to Claim 1, wherein the rotor is formed from composite material.
3. A pump according to Claim 2, wherein the composite material comprises an organic matrix.
4. A pump according to Claim 2 or Claim 3, wherein the composite material comprises a resin with reinforcing particulates and/or fibres.
5. A pump according to any of Claims 2 to 4, wherein the rotor is mounted on a shaft co-axial with the cylindrical rotor element.
6. A pump according to Claim 5, wherein the shaft is formed from metallic material.
7. A pump according to any of Claims 2 to 6, wherein the stator is formed from composite material.
8. A pump according to Claim 7, wherein the composite material of the stator comprises an organic matrix.
-6- M04B162/ASB
9. A pump according to Claim 7 or Claim 8, wherein the composite material of the stator comprises a resin with reinforcing particulates and/or fibres.
GB0425447A 2004-11-18 2004-11-18 Vacuum pump having a motor combined with an impeller Withdrawn GB2420379A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
GB0425447A GB2420379A (en) 2004-11-18 2004-11-18 Vacuum pump having a motor combined with an impeller

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB0425447A GB2420379A (en) 2004-11-18 2004-11-18 Vacuum pump having a motor combined with an impeller

Publications (2)

Publication Number Publication Date
GB0425447D0 GB0425447D0 (en) 2004-12-22
GB2420379A true GB2420379A (en) 2006-05-24

Family

ID=33548509

Family Applications (1)

Application Number Title Priority Date Filing Date
GB0425447A Withdrawn GB2420379A (en) 2004-11-18 2004-11-18 Vacuum pump having a motor combined with an impeller

Country Status (1)

Country Link
GB (1) GB2420379A (en)

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2295812A1 (en) * 2009-07-30 2011-03-16 Pfeiffer Vacuum Gmbh Vacuum pump
WO2011092674A1 (en) * 2010-02-01 2011-08-04 Agilent Technologies Italia S.P.A. High-vacuum pump
JP2013113300A (en) * 2011-11-26 2013-06-10 Pfeiffer Vacuum Gmbh High-speed rotating rotor for vacuum pump
US20140294565A1 (en) * 2011-11-30 2014-10-02 Arisawa Mfg. Co., Ltd. Vacuum pump
WO2015071143A1 (en) * 2013-11-12 2015-05-21 Oerlikon Leybold Vacuum Gmbh Rotor device for a vacuum pump, and vacuum pump
EP2565463A3 (en) * 2011-09-05 2015-10-14 Pfeiffer Vacuum GmbH Vacuum pump
EP4348055A1 (en) * 2021-06-04 2024-04-10 Edwards Limited Holweck drag pump

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1459884A (en) * 1973-09-29 1976-12-31 Leybold Heraeus Verwaltung Turbomolecular pump direct current power converter
EP0283287A2 (en) * 1987-03-18 1988-09-21 Seiko Seiki Kabushiki Kaisha Pump
US5106273A (en) * 1990-03-07 1992-04-21 Alcatel Cit Vacuum pump for producing a clean molecular vacuum
EP1408237A1 (en) * 2002-10-11 2004-04-14 Alcatel Turbomolecular pump

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1459884A (en) * 1973-09-29 1976-12-31 Leybold Heraeus Verwaltung Turbomolecular pump direct current power converter
EP0283287A2 (en) * 1987-03-18 1988-09-21 Seiko Seiki Kabushiki Kaisha Pump
US5106273A (en) * 1990-03-07 1992-04-21 Alcatel Cit Vacuum pump for producing a clean molecular vacuum
EP1408237A1 (en) * 2002-10-11 2004-04-14 Alcatel Turbomolecular pump

Cited By (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2295812A1 (en) * 2009-07-30 2011-03-16 Pfeiffer Vacuum Gmbh Vacuum pump
WO2011092674A1 (en) * 2010-02-01 2011-08-04 Agilent Technologies Italia S.P.A. High-vacuum pump
CN102906427A (en) * 2010-02-01 2013-01-30 安捷伦科技有限公司 High vacuum pump
CN102906427B (en) * 2010-02-01 2016-02-03 安捷伦科技有限公司 High vacuum pump
US10968915B2 (en) 2010-02-01 2021-04-06 Agilent Technologies, Inc. High-vacuum pump
EP2565463A3 (en) * 2011-09-05 2015-10-14 Pfeiffer Vacuum GmbH Vacuum pump
JP2013113300A (en) * 2011-11-26 2013-06-10 Pfeiffer Vacuum Gmbh High-speed rotating rotor for vacuum pump
EP2597313A3 (en) * 2011-11-26 2014-11-12 Pfeiffer Vacuum Gmbh High speed rotor for a vacuum pump
US20140294565A1 (en) * 2011-11-30 2014-10-02 Arisawa Mfg. Co., Ltd. Vacuum pump
US9835170B2 (en) * 2011-11-30 2017-12-05 Edwards Japan Limited Vacuum pump with fiber-reinforced resin cylinder
WO2015071143A1 (en) * 2013-11-12 2015-05-21 Oerlikon Leybold Vacuum Gmbh Rotor device for a vacuum pump, and vacuum pump
EP4348055A1 (en) * 2021-06-04 2024-04-10 Edwards Limited Holweck drag pump

Also Published As

Publication number Publication date
GB0425447D0 (en) 2004-12-22

Similar Documents

Publication Publication Date Title
EP2028744A1 (en) Low-inertia permanent-magnet electrical machine rotor.
WO2022223798A1 (en) Rotor
KR102218809B1 (en) Rotor, Rotator and Method of Manufacturing Rotor
US6047461A (en) Rotor for permanent magnet excited, high-speed electric rotary machine, manufacturing method of the same and electric rotary machine including the same
CN105745821B (en) For keeping the plate of magnet
EP1850454B1 (en) Traction drive for elevator
EP1050946A2 (en) Composite stator and rotor for an electric motor
US10634188B2 (en) Rotors for rotating machines with hollow fiber-reinforced composite shaft
US11979064B2 (en) Motor rotor with surface treatment
EP3186872B1 (en) High power flywheel system
CN1359555A (en) Electric axial flow machine
EP1710892B1 (en) A rotor for an electrical machine
GB2420379A (en) Vacuum pump having a motor combined with an impeller
JP2015091202A (en) Magnet floating and scattering prevention member and rotor
US20190027979A1 (en) Salient-pole rotor and rotor manufacturing method
FR3031848A1 (en) ROTOR FOR ELECTROMAGNETIC MACHINE WITH FLUX AXIAL ROTATING AT HIGH ROTATION SPEEDS AND ELECTROMAGNETIC MACHINE EQUIPPED WITH SUCH A ROTOR
JP5895015B2 (en) Reinforced magnet
JPH074383A (en) Compound molecular pump
JP6639761B1 (en) Rotor and motor
JPH1146465A (en) Composite motor housing
US20220320981A1 (en) Hybrid axial/radial electric motor
JP2003111323A (en) Generator motor rotor
CN115714512A (en) Composite insert for rotor lamination
JP7120503B1 (en) Motor rotor and motor using this rotor
US20240413685A1 (en) Axial Flux Machine Rotor

Legal Events

Date Code Title Description
WAP Application withdrawn, taken to be withdrawn or refused ** after publication under section 16(1)