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GB2486314B - A field effect transistor - Google Patents

A field effect transistor

Info

Publication number
GB2486314B
GB2486314B GB1120608.3A GB201120608A GB2486314B GB 2486314 B GB2486314 B GB 2486314B GB 201120608 A GB201120608 A GB 201120608A GB 2486314 B GB2486314 B GB 2486314B
Authority
GB
United Kingdom
Prior art keywords
field effect
effect transistor
transistor
field
effect
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
GB1120608.3A
Other versions
GB201120608D0 (en
GB2486314A (en
Inventor
Richard John Lang
Christopher Maxwell Snowden
Richard Stuart Balmer
Paul Gideon Huggett
James Pilkington
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Diamond Microwave Devices Ltd
Original Assignee
Diamond Microwave Devices Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Diamond Microwave Devices Ltd filed Critical Diamond Microwave Devices Ltd
Publication of GB201120608D0 publication Critical patent/GB201120608D0/en
Publication of GB2486314A publication Critical patent/GB2486314A/en
Application granted granted Critical
Publication of GB2486314B publication Critical patent/GB2486314B/en
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • H10P50/00
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00Field-effect transistors [FET]
    • H10D30/01Manufacture or treatment
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D48/00Individual devices not covered by groups H10D1/00 - H10D44/00
    • H10D48/30Devices controlled by electric currents or voltages
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D62/00Semiconductor bodies, or regions thereof, of devices having potential barriers
    • H10D62/10Shapes, relative sizes or dispositions of the regions of the semiconductor bodies; Shapes of the semiconductor bodies
    • H10D62/17Semiconductor regions connected to electrodes not carrying current to be rectified, amplified or switched, e.g. channel regions
    • H10D62/213Channel regions of field-effect devices
    • H10D62/221Channel regions of field-effect devices of FETs
    • H10D62/228Channel regions of field-effect devices of FETs having delta-doped channels
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D62/00Semiconductor bodies, or regions thereof, of devices having potential barriers
    • H10D62/80Semiconductor bodies, or regions thereof, of devices having potential barriers characterised by the materials
    • H10D62/83Semiconductor bodies, or regions thereof, of devices having potential barriers characterised by the materials being Group IV materials, e.g. B-doped Si or undoped Ge
    • H10D62/8303Diamond
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D64/00Electrodes of devices having potential barriers
    • H10D64/20Electrodes characterised by their shapes, relative sizes or dispositions 
    • H10D64/27Electrodes not carrying the current to be rectified, amplified, oscillated or switched, e.g. gates
    • H10D64/311Gate electrodes for field-effect devices
    • H10D64/411Gate electrodes for field-effect devices for FETs
    • H10D64/511Gate electrodes for field-effect devices for FETs for IGFETs
    • H10D64/512Disposition of the gate electrodes, e.g. buried gates
    • H10D64/513Disposition of the gate electrodes, e.g. buried gates within recesses in the substrate, e.g. trench gates, groove gates or buried gates
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D62/00Semiconductor bodies, or regions thereof, of devices having potential barriers
    • H10D62/10Shapes, relative sizes or dispositions of the regions of the semiconductor bodies; Shapes of the semiconductor bodies
    • H10D62/13Semiconductor regions connected to electrodes carrying current to be rectified, amplified or switched, e.g. source or drain regions
    • H10D62/149Source or drain regions of field-effect devices
    • H10D62/151Source or drain regions of field-effect devices of IGFETs 
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D64/00Electrodes of devices having potential barriers
    • H10D64/60Electrodes characterised by their materials
    • H10D64/62Electrodes ohmically coupled to a semiconductor
GB1120608.3A 2010-12-01 2011-11-30 A field effect transistor Expired - Fee Related GB2486314B (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US41873610P 2010-12-01 2010-12-01
GBGB1020326.3A GB201020326D0 (en) 2010-12-01 2010-12-01 A field effect transistor

Publications (3)

Publication Number Publication Date
GB201120608D0 GB201120608D0 (en) 2012-01-11
GB2486314A GB2486314A (en) 2012-06-13
GB2486314B true GB2486314B (en) 2013-04-10

Family

ID=43500900

Family Applications (2)

Application Number Title Priority Date Filing Date
GBGB1020326.3A Ceased GB201020326D0 (en) 2010-12-01 2010-12-01 A field effect transistor
GB1120608.3A Expired - Fee Related GB2486314B (en) 2010-12-01 2011-11-30 A field effect transistor

Family Applications Before (1)

Application Number Title Priority Date Filing Date
GBGB1020326.3A Ceased GB201020326D0 (en) 2010-12-01 2010-12-01 A field effect transistor

Country Status (2)

Country Link
GB (2) GB201020326D0 (en)
WO (1) WO2012072646A1 (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP3432361B1 (en) * 2017-07-19 2022-05-04 Centre National De La Recherche Scientifique Diamond mis transistor
FR3160512A1 (en) * 2024-03-25 2025-09-26 Soitec Monolithic device including a transistor and a capacitor cointegrated on a diamond-based substrate, and method of manufacturing such a device

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20080099768A1 (en) * 2005-04-29 2008-05-01 Scarsbrook Geoffrey A Diamond Transistor And Method Of Manufacture Thereof

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2765067B2 (en) * 1989-07-06 1998-06-11 住友電気工業株式会社 Ohmic connection electrode of P-type semiconductor diamond
US5382809A (en) * 1992-09-14 1995-01-17 Sumitomo Electric Industries, Ltd. Semiconductor device including semiconductor diamond
JP2002057167A (en) * 2000-08-10 2002-02-22 Kobe Steel Ltd Semiconductor element and manufacturing method thereof

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20080099768A1 (en) * 2005-04-29 2008-05-01 Scarsbrook Geoffrey A Diamond Transistor And Method Of Manufacture Thereof

Also Published As

Publication number Publication date
GB201120608D0 (en) 2012-01-11
WO2012072646A1 (en) 2012-06-07
GB201020326D0 (en) 2011-01-12
GB2486314A (en) 2012-06-13

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Legal Events

Date Code Title Description
PCNP Patent ceased through non-payment of renewal fee

Effective date: 20161130