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GB2485714A - Integrated circuit switches, design structure and methods of fabricating the same - Google Patents

Integrated circuit switches, design structure and methods of fabricating the same Download PDF

Info

Publication number
GB2485714A
GB2485714A GB1203306.4A GB201203306A GB2485714A GB 2485714 A GB2485714 A GB 2485714A GB 201203306 A GB201203306 A GB 201203306A GB 2485714 A GB2485714 A GB 2485714A
Authority
GB
United Kingdom
Prior art keywords
fabricating
methods
integrated circuit
same
design structure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
GB1203306.4A
Other versions
GB2485714B8 (en
GB2485714A8 (en
GB2485714B (en
GB201203306D0 (en
Inventor
Felix P Anderson
Thomas L Mcdevitt
Anthony K Stamper
Jonathan Hale Hammond
Julio Carlos Costa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
International Business Machines Corp
RF Micro Devices Inc
Original Assignee
International Business Machines Corp
RF Micro Devices Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by International Business Machines Corp, RF Micro Devices Inc filed Critical International Business Machines Corp
Priority to GB1321363.2A priority Critical patent/GB2506770B8/en
Publication of GB201203306D0 publication Critical patent/GB201203306D0/en
Publication of GB2485714A publication Critical patent/GB2485714A/en
Application granted granted Critical
Publication of GB2485714B publication Critical patent/GB2485714B/en
Publication of GB2485714B8 publication Critical patent/GB2485714B8/en
Publication of GB2485714A8 publication Critical patent/GB2485714A8/en
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • B81B3/0035—Constitution or structural means for controlling the movement of the flexible or deformable elements
    • B81B3/004—Angular deflection
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • B81B3/0018—Structures acting upon the moving or flexible element for transforming energy into mechanical movement or vice versa, i.e. actuators, sensors, generators
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
    • B81C1/00015—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
    • B81C1/00134—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems comprising flexible or deformable structures
    • B81C1/0015—Cantilevers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
    • B81C1/00015—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
    • B81C1/00261—Processes for packaging MEMS devices
    • B81C1/00277—Processes for packaging MEMS devices for maintaining a controlled atmosphere inside of the cavity containing the MEMS
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
    • B81C1/00015—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
    • B81C1/00261—Processes for packaging MEMS devices
    • B81C1/00333—Aspects relating to packaging of MEMS devices, not covered by groups B81C1/00269 - B81C1/00325
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06F—ELECTRIC DIGITAL DATA PROCESSING
    • G06F30/00—Computer-aided design [CAD]
    • G06F30/30—Circuit design
    • G06F30/39—Circuit design at the physical level
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H1/00—Contacts
    • H01H1/0036—Switches making use of microelectromechanical systems [MEMS]
    • H10P50/00—
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/01—Switches
    • B81B2201/012—Switches characterised by the shape
    • B81B2201/014—Switches characterised by the shape having a cantilever fixed on one side connected to one or more dimples
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C2203/00—Forming microstructural systems
    • B81C2203/01—Packaging MEMS
    • B81C2203/0136—Growing or depositing of a covering layer
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C2203/00—Forming microstructural systems
    • B81C2203/01—Packaging MEMS
    • B81C2203/0145—Hermetically sealing an opening in the lid

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Physics & Mathematics (AREA)
  • Theoretical Computer Science (AREA)
  • Analytical Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Electromagnetism (AREA)
  • Evolutionary Computation (AREA)
  • Geometry (AREA)
  • General Engineering & Computer Science (AREA)
  • Micromachines (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Power Engineering (AREA)
  • Manufacture Of Switches (AREA)

Abstract

Integrated MEMS switches, design structures and methods of fabricating such switches are provided. The method includes forming at least one tab (32a) of sacrificial material (36) on a side of a switching device (34) which is embedded in the sacrificial material. The method further includes stripping the sacrificial material through at least one opening (40) formed on the at least one tab which is on the side of the switching device, and sealing the at least one opening with a capping material (42).
GB1203306.4A 2009-08-27 2010-08-12 Integrated circuit switches, design structure and methods of fabricating the same Expired - Fee Related GB2485714B8 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
GB1321363.2A GB2506770B8 (en) 2009-08-27 2010-08-12 Integrated circuit switches, design structure and methods of fabricating the same

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US12/548,697 US8569091B2 (en) 2009-08-27 2009-08-27 Integrated circuit switches, design structure and methods of fabricating the same
PCT/US2010/045248 WO2011028384A1 (en) 2009-08-27 2010-08-12 Integrated circuit switches, design structure and methods of fabricating the same

Publications (5)

Publication Number Publication Date
GB201203306D0 GB201203306D0 (en) 2012-04-11
GB2485714A true GB2485714A (en) 2012-05-23
GB2485714B GB2485714B (en) 2014-05-14
GB2485714B8 GB2485714B8 (en) 2015-09-23
GB2485714A8 GB2485714A8 (en) 2015-09-23

Family

ID=43533073

Family Applications (2)

Application Number Title Priority Date Filing Date
GB1203306.4A Expired - Fee Related GB2485714B8 (en) 2009-08-27 2010-08-12 Integrated circuit switches, design structure and methods of fabricating the same
GB1321363.2A Expired - Fee Related GB2506770B8 (en) 2009-08-27 2010-08-12 Integrated circuit switches, design structure and methods of fabricating the same

Family Applications After (1)

Application Number Title Priority Date Filing Date
GB1321363.2A Expired - Fee Related GB2506770B8 (en) 2009-08-27 2010-08-12 Integrated circuit switches, design structure and methods of fabricating the same

Country Status (7)

Country Link
US (2) US8569091B2 (en)
JP (1) JP5651178B2 (en)
CN (1) CN102471048A (en)
DE (2) DE112010003412T5 (en)
GB (2) GB2485714B8 (en)
TW (1) TWI529120B (en)
WO (1) WO2011028384A1 (en)

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US8569091B2 (en) 2009-08-27 2013-10-29 International Business Machines Corporation Integrated circuit switches, design structure and methods of fabricating the same
US8458888B2 (en) 2010-06-25 2013-06-11 International Business Machines Corporation Method of manufacturing a micro-electro-mechanical system (MEMS)
US8535966B2 (en) * 2010-07-27 2013-09-17 International Business Machines Corporation Horizontal coplanar switches and methods of manufacture
US20120162232A1 (en) * 2010-12-22 2012-06-28 Qualcomm Mems Technologies, Inc. Method of fabrication and resultant encapsulated electromechanical device
US9120667B2 (en) * 2011-06-20 2015-09-01 International Business Machines Corporation Micro-electro-mechanical system (MEMS) and related actuator bumps, methods of manufacture and design structures
US20130106875A1 (en) * 2011-11-02 2013-05-02 Qualcomm Mems Technologies, Inc. Method of improving thin-film encapsulation for an electromechanical systems assembly
US8673670B2 (en) * 2011-12-15 2014-03-18 International Business Machines Corporation Micro-electro-mechanical system (MEMS) structures and design structures
US9166271B2 (en) * 2012-06-01 2015-10-20 Purdue Research Foundation Tunable cavity resonator including a plurality of MEMS beams
US8927312B2 (en) * 2012-10-16 2015-01-06 International Business Machines Corporation Method of fabricating MEMS transistors on far back end of line
US9371222B2 (en) * 2013-03-15 2016-06-21 Honeywell International Inc. Microstructure plating systems and methods
JP5881635B2 (en) * 2013-03-25 2016-03-09 株式会社東芝 MEMS equipment
US9969613B2 (en) 2013-04-12 2018-05-15 International Business Machines Corporation Method for forming micro-electro-mechanical system (MEMS) beam structure
US9496110B2 (en) * 2013-06-18 2016-11-15 Globalfoundries Inc. Micro-electro-mechanical system (MEMS) structure and design structures
US9911563B2 (en) * 2013-07-31 2018-03-06 Analog Devices Global MEMS switch device and method of fabrication
FR3012671B1 (en) * 2013-10-29 2015-11-13 St Microelectronics Rousset INTEGRATED MECHANICAL DEVICE WITH VERTICAL MOVEMENT
CN105523519B (en) * 2014-09-29 2017-08-25 中芯国际集成电路制造(上海)有限公司 MEMS and forming method thereof
JP2016163917A (en) * 2015-03-06 2016-09-08 株式会社東芝 MEMS equipment
US10854761B1 (en) * 2015-03-30 2020-12-01 Southern Methodist University Electronic switch and active artificial dielectric
KR20170135896A (en) 2015-04-02 2017-12-08 도쿄엘렉트론가부시키가이샤 EUV tolerant trenches and hole patterning using dual frequency capacitively coupled plasma (CCP)
EP3442335B1 (en) 2016-04-13 2025-12-03 IMD Natural Solutions GmbH Formulation systems for antimicrobial glycolipids
US10748757B2 (en) 2017-09-21 2020-08-18 Honeywell International, Inc. Thermally removable fill materials for anti-stiction applications
US10727044B2 (en) 2017-09-21 2020-07-28 Honeywell International Inc. Fill material to mitigate pattern collapse
JP2020053569A (en) * 2018-09-27 2020-04-02 ソニーセミコンダクタソリューションズ株式会社 Semiconductor device, solid-state imaging device and method of manufacturing semiconductor device
US10793422B2 (en) * 2018-12-17 2020-10-06 Vanguard International Semiconductor Singapore Pte. Ltd. Microelectromechanical systems packages and methods for packaging a microelectromechanical systems device

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US20090101383A1 (en) * 2007-10-22 2009-04-23 Takeshi Miyagi Micromechanical device and method of manufacturing micromechanical device

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US6465280B1 (en) * 2001-03-07 2002-10-15 Analog Devices, Inc. In-situ cap and method of fabricating same for an integrated circuit device
WO2003052364A1 (en) * 2001-12-17 2003-06-26 Infineon Technologies Ag Method for producing a microstructure
US20090101383A1 (en) * 2007-10-22 2009-04-23 Takeshi Miyagi Micromechanical device and method of manufacturing micromechanical device

Also Published As

Publication number Publication date
DE112010003412T5 (en) 2012-08-16
WO2011028384A1 (en) 2011-03-10
TW201121876A (en) 2011-07-01
GB2506770B (en) 2014-08-20
GB2485714B8 (en) 2015-09-23
GB2506770B8 (en) 2015-09-23
CN102471048A (en) 2012-05-23
GB2485714A8 (en) 2015-09-23
TWI529120B (en) 2016-04-11
GB201321363D0 (en) 2014-01-15
US9284185B2 (en) 2016-03-15
JP2013503446A (en) 2013-01-31
GB2506770A (en) 2014-04-09
JP5651178B2 (en) 2015-01-07
US20110049649A1 (en) 2011-03-03
DE112010006130B3 (en) 2019-06-27
GB2485714B (en) 2014-05-14
US8569091B2 (en) 2013-10-29
GB2506770A8 (en) 2015-09-23
GB201203306D0 (en) 2012-04-11
US20140017844A1 (en) 2014-01-16

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Legal Events

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746 Register noted 'licences of right' (sect. 46/1977)

Effective date: 20140527

S117 Correction of errors in patents and applications (sect. 117/patents act 1977)

Free format text: REQUEST FILED; REQUEST FOR CORRECTION UNDER SECTION 117 FILED ON 22 APRIL 2015

S117 Correction of errors in patents and applications (sect. 117/patents act 1977)

Free format text: CORRECTIONS ALLOWED; REQUEST FOR CORRECTION UNDER SECTION 117 FILED ON 22 APRIL 2015 ALLOWED ON 09 JULY 2015.

S13A Application for inventor to be mentioned (section 13(1)/patents act 1977)

Free format text: APPLICATION FILED; APPLICATION FOR A PERSON TO BE MENTIONED AS INVENTOR UNDER RULE 10(2) BY INTERNATIONAL BUSINESS MACHINES CORPORATION AND RF MICRO DEVICES, INC FILED ON 14 MAY 2015

S13A Application for inventor to be mentioned (section 13(1)/patents act 1977)

Free format text: APPLICATION ALLOWED; PATENTS RULES 2007. AS A RESULT, IT WAS FOUND THAT JULIO CARLOS COSTA AND JONATHAN HALE HAMMOND SHOULD BE MENTIONED AS JOINT INVENTORS IN THE PUBLISHED PATENT APPLICATIONS AND GRANTED PATENTS FOR THE INVENTIONS AND THAT AN ADDENDUM SLIP MENTIONING THEM AS JOINT INVENTORS BE PREPARED FOR THE PUBLISHED APPLICATIONS AND GRANTED PATENTS FOR THE INVENTIONS.

PCNP Patent ceased through non-payment of renewal fee

Effective date: 20160812