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GB2485559A - Graphene based electronic device - Google Patents

Graphene based electronic device Download PDF

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Publication number
GB2485559A
GB2485559A GB1019493.4A GB201019493A GB2485559A GB 2485559 A GB2485559 A GB 2485559A GB 201019493 A GB201019493 A GB 201019493A GB 2485559 A GB2485559 A GB 2485559A
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United Kingdom
Prior art keywords
graphene
elements
source
electronic device
electrodes
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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GB1019493.4A
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GB201019493D0 (en
Inventor
Genhua Pan
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Plymouth University
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Plymouth University
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Application filed by Plymouth University filed Critical Plymouth University
Priority to GB1019493.4A priority Critical patent/GB2485559A/en
Publication of GB201019493D0 publication Critical patent/GB201019493D0/en
Publication of GB2485559A publication Critical patent/GB2485559A/en
Withdrawn legal-status Critical Current

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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/26Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrochemical variables; by using electrolysis or electrophoresis
    • G01N27/403Cells and electrode assemblies
    • G01N27/414Ion-sensitive or chemical field-effect transistors, i.e. ISFETS or CHEMFETS
    • G01N27/4145Ion-sensitive or chemical field-effect transistors, i.e. ISFETS or CHEMFETS specially adapted for biomolecules, e.g. gate electrode with immobilised receptors
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/26Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrochemical variables; by using electrolysis or electrophoresis
    • G01N27/403Cells and electrode assemblies
    • G01N27/414Ion-sensitive or chemical field-effect transistors, i.e. ISFETS or CHEMFETS
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D62/00Semiconductor bodies, or regions thereof, of devices having potential barriers
    • H10D62/80Semiconductor bodies, or regions thereof, of devices having potential barriers characterised by the materials
    • H10D62/881Semiconductor bodies, or regions thereof, of devices having potential barriers characterised by the materials being a two-dimensional material
    • H10D62/882Graphene

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  • Life Sciences & Earth Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Molecular Biology (AREA)
  • Biochemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Analytical Chemistry (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)

Abstract

A graphene based electronic device comprises an array of graphene elements 14, a series of gate electrodes 20, and a series of pairs of source 16 and drain 18 electrodes angled to the gate electrodes such that each graphene element can be addressed individually by appropriate selection of one of the gate electrodes and one of the pairs of source and drain electrodes. The graphene elements may be flakes of graphene or formed from an etched graphene sheet. Probe molecules may be attached to the graphene such that the device acts as an array of FET transistor biosensors.

Description

I
Graphene based Electronic Device This invention relates to an electronic device, and in particular to an electronic device incorporating an array of graphene elements. The device is intended principally as a biosensor, but it may be possible to use it in other applications.
Graphene is a one-atomic layer thick sheet of carbon atoms, the atoms of which are closely packed into a honeycomb like formation. It has been found that graphene has a number of unusual properties, one of which is that is can act as a semiconductor if treated appropriately. Mohanty and Berry (Nano letters 2008, Vol 8, no 12, 4469-4476) describe the use of graphene in a biosensor. In that arrangement, a flake of graphene is applied to a silica layer provided upon a silicon substrate. A probe biomolecule is attached to the graphene flake in such a manner that interactions between the probe biomolecule and a target biomolecule cause variations in the electrical conductivity of the graphene flake. By monitoring the electrical conductivity of the graphene flake, an output indicative of the form or nature of the target biomolecule may be achieved. F Whilst such a device may operate successfully, in practice it is of little commercial benefit as fabrication is impractical and as only a single device is provided, throughput of data is very low.
It is an object of the invention to provide a graphene based electronic device in which at least some of the disadvantages associated with such a known arrangement are overcome or are of reduced effect.
According to the present invention there is provided a graphene based electronic device comprising an array of graphene elements, a series of gate electrodes, each gate electrode being associated with a plurality of the graphene elements, and a series of pairs of source and drain electrodes each being electrically connected to a plurality of graphene elements, the source and drain electrodes being angled to the gate electrodes such that each graphene element can be addressed individually by appropriate selection of one of the gate electrodes and one of the pairs of source and drain electrodes The array of graphene elements may comprise a plurality of graphene flakes.
Alternatively, a single graphene sheet or layer may be etched or otherwise treated to define the separate elements.
By providing a plurality of separate graphene elements each of which can be addressed individually, it will be appreciated that a commercially viable electronic device may be provided. Such a device may be suitable for mass production and may be used in applications in which a high throughput of data is required.
Each graphene element of the array, together with the associated addressing electrodes, may serve as a biosensor, for example functioning in a manner similar to that described in the above mentioned Mohanty and Berry paper, or in DNA or biomolecule-based electronics applications. Alternatively, the graphene elements could serve a range of other functions, for example as transistors, sensors or other devices. One possibility may be to use the device in spin transistor arrays, for example in which the source and drain electrodes are of MgO or a ferromagnetio material instead of, for example, copper. Such a device could be used in spintronics (spin based electronics) applications, computer memories or the like.
Where used as a biosensor, each graphene element has attached thereto or associated therewith a probe biomolecule, and means are provided to permit monitoring of the conductivity of the graphene element, by monitoring, for example, the electrical resistance between the associated source and drain electrodes when a potential is applied to the associated gate electrode.
Conveniently, the graphene elements are mounted upon a Silicon oxide layer beneath which the gate electrodes are provided in the form of a series of parallel strips, each of which is aligned with a row of the graphene elements provided on a substrate of, for example, silicon The gate electrodes are conveniently perpendicular to the source and drain electrodes However, this need not always be the case and arrangements where they are otherwise angled relative to one another are possible The invention will further be described, by way of example with reference to the accompanying drawing, Figure 1, which is a diagrammatic illustration of part of a device in accordance with one embodiment of the invention Referring to Figure 1, an electronic device in accordance with one embodiment of the invention is illustrated. The device comprises a silicon substrate 10 on which a silicon oxide layer 12 is provided. A series of graphene elements 14 are provided upon the silicon oxide layer 12. In the arrangement illustrated the elements 14 take the form of graphene flakes which are formed and placed in position separately. However, other envisaged arrangements involve growing or otherwise forming a sheet of graphene which can be secured or otherwise positioned upon the silicon oxide layer 12, or indeed it may be possible for it to be grown or formed in position upon the layer 12, and then etching, for example using a photolithography technique, or otherwise applying a pattern to the graphene layer to form it into the separate elements 14.
A series of pairs of parallel, elongate source and drain electrodes 16, 18 are applied to the silicon oxide layer 12 adjacent the graphene elements 14, and a series of gate electrodes 20 are formed in or on the silicon substrate 10 beneath the silicon oxide layer 12.
With such an arrangement, each individual graphene element 14 can be uniquely addressed by using the pair of source and drain electrodes 16, 18 associated therewith in combination with the gate electrode 20 associated therewith. Provided only a single graphene element 14 is to be addressed at any given time, such an arrangement permits unique, individual addressing of each graphene element 14 without requiring the provision of separate electrodes for each element 14, and thus permits fabrication of the device in a relatively simple and convenient form.
In the arrangement described herein before, each graphene element 14 is treated so as to take the form of a semiconductor and would serve effectively, as a transistor or switch, the application of a potential to the gate electrode 20. determining whether or not a current is able to pass between the source and drain electrodes 16, 18 associated with that graphene element 14 Such an arrangement is advantageous compared to existing transistor arrangements as graphene when in a conductive mode, is of high conductivity at room temperature and so the transistor so formed would be of a very fast acting form One alternative possibility may be to use the device in spin transistor arrays for example in which the source and drain electrodes are of MgO or a ferromagnetic material instead of, for example, copper Such a device could be used in spintronics (spin based electronics) applications, computer memories or the like.
It is envisaged that, rather than simply taking the form of an array of transistors, the electronic device of the invention may serve as a biosensor array. In order to achieve this, each graphene element 14 of the array has associated therewith or attached thereto a probe biomolecule. The probe biomolecules may take the form of, for example, DNA, ATP, proteins or the like. In use the device is exposed to target F biomolecules which are able to hybridize with the probe molecules. Chimerical affinity between the target and probe biomolecules will affect the conductance of the associated graphene elements 14 by causing a change in the electron mobility across the graphene element 14 between the source and drain electrodes 16, 18. It will be appreciated, therefore, that by applying a potential to a selected one of the gate electrodes 20, and monitoring the electrical resistance between the associated pair of source and drain electrodes 16, 18, the nature or form of the target biomolecule can be studied. The manner in which the electrical resistance is monitored may involve, for example, applying a known voltage across the source and drain electrodes 16, 18 and measuring the current flowing therein. However, other techniques may be used to measure this characteristic without departing from the scope of the invention.
In use, therefore each conductivity of each individual graphene element 14 may be measured by applying a potential to the gate electrode associated with that element and by measuring the electrical resistance between the source and drain electrodes 16, 18 associated with that graphene element 14 Despite the source and drain electrodes 16, 18 being associated with several elements 14, the sensed characteristic will be representative only of the resistance or conductivity or changes therein, of the F graphene element 14 associated with the chosen gate electrode 20 the other graphene elements 14 associated with the selected pair of source and drain electrodes 16, 18 being substantially non-conductive as a result of the absence of an applied potential to the gate electrodes associated with those elements 14 Measurement of the resistance or conductivity of each of the graphene elements 14 can thus be achieved quickly, simply by addressing each of the elements 14 in turn and making the appropriate electrical measurements Such a device is advantageous, as outlined hereinbefore, as it is commercially viable, being capable of large scale manufacture, and in that a rapid or high throughput of measurements can be made, allowing it to be used in a wide range of applications. It is of label-free nature, of very high sensitivity and low noise, and as it is in the form of an electronic device, is convenient to use.
By way of example, the biosensor described hereinbefore may be used in a wide range of biomedical, medical diagnosis, healthcare and ICT for healthcare applications using label-free biosensing. Alternative uses of the technology may be in DNA or biomolecule-based electronics applications.
It will be appreciated that the arrangement described hereinbefore constitutes only a single embodiment of the invention and that a wide range of modifications and alterations may be made thereto without departing from the scope of the invention.
GB1019493.4A 2010-11-18 2010-11-18 Graphene based electronic device Withdrawn GB2485559A (en)

Priority Applications (1)

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GB2485559A true GB2485559A (en) 2012-05-23

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Cited By (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102590309A (en) * 2012-02-03 2012-07-18 游学秋 Manufacture and application method for graphene transistor and biosensor of graphene transistor
CN103995035A (en) * 2014-05-29 2014-08-20 东南大学 Multi-grid graphene field-effect tube structure for detection of base sequence and preparation method thereof
EP2848929A1 (en) 2013-09-11 2015-03-18 AIT Austrian Institute of Technology GmbH Graphene FET-based biosensor
CN107488709A (en) * 2017-06-23 2017-12-19 山东师范大学 Optical fiber FET biology sensor, biological monitor and method
EP3545076A4 (en) * 2016-11-22 2020-07-29 Roswell Biotechnologies, Inc Nucleic acid sequencing device containing graphene
US10902939B2 (en) 2017-01-10 2021-01-26 Roswell Biotechnologies, Inc. Methods and systems for DNA data storage
US10913966B2 (en) 2017-04-25 2021-02-09 Roswell Biotechnologies, Inc. Enzymatic circuits for molecular sensors
US11100404B2 (en) 2017-10-10 2021-08-24 Roswell Biotechnologies, Inc. Methods, apparatus and systems for amplification-free DNA data storage
US11143617B2 (en) 2017-05-09 2021-10-12 Roswell Biotechnologies, Inc. Binding probe circuits for molecular sensors
US11268123B2 (en) 2017-04-25 2022-03-08 Roswell Biotechnologies, Inc. Enzymatic circuits for molecular sensors
US11371955B2 (en) 2017-08-30 2022-06-28 Roswell Biotechnologies, Inc. Processive enzyme molecular electronic sensors for DNA data storage
US11440003B2 (en) 2016-02-09 2022-09-13 Roswell Biotechnologies, Inc. Electronic label-free DNA and genome sequencing
US11448639B2 (en) 2016-01-28 2022-09-20 Roswell Biotechnologies, Inc. Massively parallel DNA sequencing apparatus
US11624725B2 (en) 2016-01-28 2023-04-11 Roswell Blotechnologies, Inc. Methods and apparatus for measuring analytes using polymerase in large scale molecular electronics sensor arrays
US11656197B2 (en) 2017-01-19 2023-05-23 Roswell ME Inc. Solid state sequencing devices comprising two dimensional layer materials
WO2023197722A1 (en) * 2022-04-11 2023-10-19 清华大学 Differential suspension single-layer graphene nanopore sensor, and preparation method therefor and use thereof

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114371208B (en) * 2021-11-30 2024-11-29 山东师范大学 Biosensor manufacturing and detecting method, biosensor and photo-electromagnetic system

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EP1982166A1 (en) * 2006-01-20 2008-10-22 Agency for Science, Technology and Research Biosensor cell and biosensor array
EP1984941A1 (en) * 2006-02-16 2008-10-29 Lucent Technologies Inc. Devices including graphene layers epitaxially grown on single crystal substrates
WO2009043023A2 (en) * 2007-09-28 2009-04-02 William Marsh Rice University Electronic switching, memory, and sensor devices from carbon sheets on dielectric materials
US20100025660A1 (en) * 2008-07-31 2010-02-04 University Of Connecticut Semiconductor devices, methods of manufacture thereof and articles comprising the same
EP2195648A1 (en) * 2007-09-12 2010-06-16 President And Fellows Of Harvard College High-resolution molecular graphene sensor comprising an aperture in the graphene layer
GB2471672A (en) * 2009-07-07 2011-01-12 Uws Ventures Ltd Graphene biosensor

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1982166A1 (en) * 2006-01-20 2008-10-22 Agency for Science, Technology and Research Biosensor cell and biosensor array
EP1984941A1 (en) * 2006-02-16 2008-10-29 Lucent Technologies Inc. Devices including graphene layers epitaxially grown on single crystal substrates
EP2195648A1 (en) * 2007-09-12 2010-06-16 President And Fellows Of Harvard College High-resolution molecular graphene sensor comprising an aperture in the graphene layer
WO2009043023A2 (en) * 2007-09-28 2009-04-02 William Marsh Rice University Electronic switching, memory, and sensor devices from carbon sheets on dielectric materials
US20100025660A1 (en) * 2008-07-31 2010-02-04 University Of Connecticut Semiconductor devices, methods of manufacture thereof and articles comprising the same
GB2471672A (en) * 2009-07-07 2011-01-12 Uws Ventures Ltd Graphene biosensor

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
"Graphene based single bacterium resolution biodevice and DNA transistor: Interfacing graphene derivatives with nanoscale and microscale biocomponents"; Mohanty, N., Berry, V.; Nano Letters, 2008, Vol 8, No 12, pp 4469-4476 *

Cited By (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102590309B (en) * 2012-02-03 2014-04-02 游学秋 Manufacture and application method for graphene transistor and biosensor of graphene transistor
CN102590309A (en) * 2012-02-03 2012-07-18 游学秋 Manufacture and application method for graphene transistor and biosensor of graphene transistor
EP2848929A1 (en) 2013-09-11 2015-03-18 AIT Austrian Institute of Technology GmbH Graphene FET-based biosensor
CN103995035A (en) * 2014-05-29 2014-08-20 东南大学 Multi-grid graphene field-effect tube structure for detection of base sequence and preparation method thereof
US11624725B2 (en) 2016-01-28 2023-04-11 Roswell Blotechnologies, Inc. Methods and apparatus for measuring analytes using polymerase in large scale molecular electronics sensor arrays
US11448639B2 (en) 2016-01-28 2022-09-20 Roswell Biotechnologies, Inc. Massively parallel DNA sequencing apparatus
US11440003B2 (en) 2016-02-09 2022-09-13 Roswell Biotechnologies, Inc. Electronic label-free DNA and genome sequencing
EP3545076A4 (en) * 2016-11-22 2020-07-29 Roswell Biotechnologies, Inc Nucleic acid sequencing device containing graphene
US10902939B2 (en) 2017-01-10 2021-01-26 Roswell Biotechnologies, Inc. Methods and systems for DNA data storage
US11656197B2 (en) 2017-01-19 2023-05-23 Roswell ME Inc. Solid state sequencing devices comprising two dimensional layer materials
US10913966B2 (en) 2017-04-25 2021-02-09 Roswell Biotechnologies, Inc. Enzymatic circuits for molecular sensors
US11268123B2 (en) 2017-04-25 2022-03-08 Roswell Biotechnologies, Inc. Enzymatic circuits for molecular sensors
US12247251B2 (en) 2017-04-25 2025-03-11 Semicon Bio Enzymatic circuits for molecular sensors
US11143617B2 (en) 2017-05-09 2021-10-12 Roswell Biotechnologies, Inc. Binding probe circuits for molecular sensors
CN107488709A (en) * 2017-06-23 2017-12-19 山东师范大学 Optical fiber FET biology sensor, biological monitor and method
CN107488709B (en) * 2017-06-23 2020-05-05 山东师范大学 Optical fiber field effect tube biosensor, biodetection device and method
US11371955B2 (en) 2017-08-30 2022-06-28 Roswell Biotechnologies, Inc. Processive enzyme molecular electronic sensors for DNA data storage
US11100404B2 (en) 2017-10-10 2021-08-24 Roswell Biotechnologies, Inc. Methods, apparatus and systems for amplification-free DNA data storage
WO2023197722A1 (en) * 2022-04-11 2023-10-19 清华大学 Differential suspension single-layer graphene nanopore sensor, and preparation method therefor and use thereof

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