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GB2478265B - Apparatus and method relating to the focusing of charged particles - Google Patents

Apparatus and method relating to the focusing of charged particles

Info

Publication number
GB2478265B
GB2478265B GB0816014.5A GB0816014A GB2478265B GB 2478265 B GB2478265 B GB 2478265B GB 0816014 A GB0816014 A GB 0816014A GB 2478265 B GB2478265 B GB 2478265B
Authority
GB
United Kingdom
Prior art keywords
focusing
charged particles
method relating
relating
charged
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
GB0816014.5A
Other versions
GB2478265A (en
GB0816014D0 (en
Inventor
Derek Aitken
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Superion Ltd
Original Assignee
Superion Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Superion Ltd filed Critical Superion Ltd
Priority to GB0816014.5A priority Critical patent/GB2478265B/en
Publication of GB0816014D0 publication Critical patent/GB0816014D0/en
Priority to JP2009202950A priority patent/JP5524542B2/en
Publication of GB2478265A publication Critical patent/GB2478265A/en
Application granted granted Critical
Publication of GB2478265B publication Critical patent/GB2478265B/en
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/05—Electron or ion-optical arrangements for separating electrons or ions according to their energy or mass
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/317—Electron-beam or ion-beam tubes for localised treatment of objects for changing properties of the objects or for applying thin layers thereon, e.g. for ion implantation
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/317—Electron-beam or ion-beam tubes for localised treatment of objects for changing properties of the objects or for applying thin layers thereon, e.g. for ion implantation
    • H01J37/3171—Electron-beam or ion-beam tubes for localised treatment of objects for changing properties of the objects or for applying thin layers thereon, e.g. for ion implantation for ion implantation
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/20—Magnetic deflection
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/26—Mass spectrometers or separator tubes
    • H01J49/28—Static spectrometers
    • H01J49/30—Static spectrometers using magnetic analysers, e.g. Dempster spectrometer
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/05—Arrangements for energy or mass analysis
    • H01J2237/055—Arrangements for energy or mass analysis magnetic
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/05—Arrangements for energy or mass analysis
    • H01J2237/057—Energy or mass filtering

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Tubes For Measurement (AREA)
  • Particle Accelerators (AREA)
GB0816014.5A 2008-09-03 2008-09-03 Apparatus and method relating to the focusing of charged particles Expired - Fee Related GB2478265B (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
GB0816014.5A GB2478265B (en) 2008-09-03 2008-09-03 Apparatus and method relating to the focusing of charged particles
JP2009202950A JP5524542B2 (en) 2008-09-03 2009-09-02 Apparatus and method for focusing charged particles

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB0816014.5A GB2478265B (en) 2008-09-03 2008-09-03 Apparatus and method relating to the focusing of charged particles

Publications (3)

Publication Number Publication Date
GB0816014D0 GB0816014D0 (en) 2008-10-08
GB2478265A GB2478265A (en) 2011-09-07
GB2478265B true GB2478265B (en) 2013-06-19

Family

ID=39866163

Family Applications (1)

Application Number Title Priority Date Filing Date
GB0816014.5A Expired - Fee Related GB2478265B (en) 2008-09-03 2008-09-03 Apparatus and method relating to the focusing of charged particles

Country Status (2)

Country Link
JP (1) JP5524542B2 (en)
GB (1) GB2478265B (en)

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4578589A (en) * 1983-08-15 1986-03-25 Applied Materials, Inc. Apparatus and methods for ion implantation
US4902993A (en) * 1987-02-19 1990-02-20 Kernforschungszentrum Karlsruhe Gmbh Magnetic deflection system for charged particles
US5760405A (en) * 1996-02-16 1998-06-02 Eaton Corporation Plasma chamber for controlling ion dosage in ion implantation
EP1090411A2 (en) * 1998-06-19 2001-04-11 Superion Limited Apparatus and method relating to charged particles
GB2446005A (en) * 2007-01-23 2008-07-30 Superion Limited Apparatus and method for removal of selected particles from a charged particle beam

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04248240A (en) * 1991-01-23 1992-09-03 Sanyo Electric Co Ltd Ion irradiation device

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4578589A (en) * 1983-08-15 1986-03-25 Applied Materials, Inc. Apparatus and methods for ion implantation
US4902993A (en) * 1987-02-19 1990-02-20 Kernforschungszentrum Karlsruhe Gmbh Magnetic deflection system for charged particles
US5760405A (en) * 1996-02-16 1998-06-02 Eaton Corporation Plasma chamber for controlling ion dosage in ion implantation
EP1090411A2 (en) * 1998-06-19 2001-04-11 Superion Limited Apparatus and method relating to charged particles
GB2446005A (en) * 2007-01-23 2008-07-30 Superion Limited Apparatus and method for removal of selected particles from a charged particle beam

Also Published As

Publication number Publication date
GB2478265A (en) 2011-09-07
JP5524542B2 (en) 2014-06-18
GB0816014D0 (en) 2008-10-08
JP2010118331A (en) 2010-05-27

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Legal Events

Date Code Title Description
PCNP Patent ceased through non-payment of renewal fee

Effective date: 20130919